03 入札説明書様式（基板）
Contents
1. 72. 1 C 4 3 3 IL
3. 6 3 3 6 3 4 6 4 H ul II 1
4. 2 1 8 20 nm 2 1 9 2 2 1 9 1 Windows7 4GB 500GB 22 1920x1080 2 1 9 2 2 1 9 3 CAD
5. 5 6 7 7
6. n 1 2 1
7. 2
8. 8 1 1 0 8 100 7 3 1 4 5
9. 17 18 3 HH
10. 4 6 5 1 2 4
11. h H I 3 E 4 2
12. B B 3 B T E 8 3
13. 2 a 2 FE 2 1 1
14. uk 3 ul 3 rt O lt 4 5
15. 1 2 3 2 4 13 pw 2 3 3 12 2 5 4 34 2 6
16. 10 3 26 7 1 26 7 28 1 7 0 0 4 1 2 6 8 8 4 1 1 2 3
17. 8 8 1 9
18. 6 6 1 6 1 1 6 2 6 3 6 3 1 6 3 2
19. 3 TT HH r LE E 2 6 7 1 H lt 14 2 2
20. 1 4 9 9 2 6 9 2 9 5 4 1
21. 6 2 G 7 7 2 6 9 5 16 00
22. 6 5 2 3 2 7 2 3 KN dt 4
23. Ir RS 2 6 7 1 lt 15 RT lt 1 16
24. I 1
25. ke 1 0 3 0 1252 J 100V 50Hz 15A up 3 2 1 2 2 3 1 1 E UV 2000 1
26. EL 2 24 256 8 1 10 3
27. 2 8 1 2 9 7 2 8 2 7 2 D8 3 1 0 8 8 1 Ne
28. 1 2 a 1 3 2N L 1
29. 4 5 6 7 1 3 2 1 4 1 5 2 4 6 2 4 1 2 12 2 3 1
30. EE uh 5 16 25 25 3 27 4 1 4 1
31. 2 10 1 1 1 O OO OO O O D O O
32. Fr ul ER NR i 0 i se ul 2 2
33. 4 3 2 4 4 1 4
34. 3 7 5 2 10 3
35. 6 7 4 51 8 29 89 32 48 9 10 2
36. 11 12 13 4 E 14 2 1 2 5 5
37. E 1 77 2 2
38. Optical lithography system for micro flow chamber fabrication 1 Set 2 6 7 2 6 7 1 7 2 3 2 6 4 2 6 3 3 1 1 1
39. 4 2 ee ER 3 8 9 10 2 1 5 1 2 6
40. uh Nt ul 10 a 4 14 5 3 6 4 1 8 9
41. 2 415 3 338 8570 255 1 1 2 1 2 4 2 3 4 B 5 6 2 7 3 2 0
42. 3 1 1 1252 C 2F1252 100V 50Hz 20A E qi C 1 1 W 2 1 1 2 W1680mmx 2070mm 1 2 5 0mm W1000mmXH2100mm C 2 4 0 0mm W1650mmXH1900mm 1 5 kW 1 4 1
43. 1 2 2 1 2 1 1 75x75 cw 2 1 2 375 nm 70 mW UV 2 1 3 2 1 4 1 um 5 mm min 6 hm 90 mm min 40 nm 3p 120 nm
44. O O 8 1 5 Optical lithography system for micro flow chamber fabrication 1 Set 26 7 Saitama University I 6 1 6 2 6 3 6 4 II
45. XF CIF GDSII 2 1 10 2 2 2 1 10 2 0 pm 20 1 2 um 2 2 2 500 W UV 2 3 4 2 2 4 2 2 5 4 2 2 6 405 nm 14 mW cm 2 2 7 3 2 2 8 2 2
46. es r LE 2 6 7 1 19 E 2 6 7 1 H 20 3 No
47. TEL 048 858 3014 3 4 4 1 338 8570 2 55 TEL 048 858 839387 kazue mail saitama u ac jp 2
48. 24 25 25 3 27 1 2 3 4 5
49. 37snm mW UV 70mW UV 2 1 3 22 9
50. gt 11 12 GR 11 1 10 1 Y gt CS 1 54 49 1
51. i T 1 2 Hy 12 3 E 3 Fn E E E E O OO O KDE 1
52. 1 3 k E 3 O O O 2 1
53. 1 2 3 4 5 26 7 28 17 00 kazue mail saitama u ac jp 21 4 TZ O 2 1 OO 123A4567 2 1 1 75X75 ci 75 X75 ci 2 1 2 375 nm 70
54. 2 2 2 6 sales of product A B C 2 6 3 2 8 5 7 338 8570 2 55
55. 2 7 3 20 Ei Co RI RS HD 3 HD tf O1 3 ey 7 1 8 9 23 10
56. 3 4 2 14 2
57. 4 1 1 1 2 6 2 3 2 1 3 4 5 6 7
58. 21 198 89 1 3 10 1 57 15 7 12 23 8 100 5 E ES
59. 2 3 40 95 2 9 ES Dal 10 1 5 6 H 3 19 8 1 h22 50 1
60. 26 8 21 17 00 3 4 1 1 9 5
61. 66 4 F 45 96 3 1 1 19 ii SN 6 1 3 NI 1 1 1 7 1 3 2 3 H 7 2 18
62. 3og 200 nm 200 nm 3o 400 nm 3o 800 nm 50 mJ cm 500 nm 2 1 5 2 2 1 4 1 nm 6 mn 2 1 6 100 Ss 2 1 7
63. 1 2 2 2 2 1 1 2 2 2 1 T ul CD 27 3 2 0 C 1252 21B 5 5 1 I 5 2 5 3 5 4
64. 8 1 XY 2 2 8 2 2 2 9 5 2 2 10 SU 8 1 1 1 1 1 C 2F1252 2 3 1 1 2 2 2 W1400mmXH2100mm W1200mmXH2100mm 8 0mmXD1100mmXH2300mm 2000mm C 1 2 1 3 1 3 1 1 4 1
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