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USER MANUAL COMPexPro™ Series 10/2005

1. A B IR 0 DIN Sy D AA 20 Elio Figure 35 Foot configuration Key to Figure 35 A Threaded rod C Knurled nut B Viton ring O10x2 D Foot Each foot has a diameter of 20 mm The shank of the foot has a size M10 thread The adjustment range of the foot is 40 mm The positions of the feet on the laser device are shown in Figure 32 d and Figure 33 d User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Connections and Space Requirements 4 3 4 Gas Connections The positions of the individual gas connections on the laser device are shown in Figure 36 Aa 17 000000 ES Oooo gt DUO W E o as SAN kA a Figure 36 Gas connections Key to Figure 36 A Inert gas connection D Buffer gas connection B Halogen gas connection E Vacuum pump connection C Rare gas connection Specifications Gas connections 6 mm Gyrolok Gas lines 316L stainless steel electropolished inside 6 mm outer diameter degreased Vacuum pump connection Material will be supplied with the vacuum pump NOTE A For safety reasons the halogen supply line from an external gas cylinder should have a double wall tubing B Unless otherwise agreed with COHERENT LAMBDA PHYSIK a premix cylinder has to be connected to the BUFFER gas connection and a helium cylinder to the INERT gas connection C Gas connections that are not used have to be blanked off with the
2. ii edie KHAN ies 256 Power ON lampi dah note a eek Mee a NE 2 DA Megawhat ne be 139 PREMIO AA AA Gua eval cece team ea cake 18 PYElONIZALION says Sve Do a td Ue woe a 17 PRESET ENERGY TOO eee eeee 163 Pressure regulator Operation vestidas dal eos gt Naa ane aes 131 Requirements vases veda coh ee lad Peale NG Bane 91 Pressure relief valve GAS SYSIOM naka r KG AA ek ee ee ees 25 Pressure sensor Gas SIM ea GUT a pads 25 Pressure switch Purge Gas SYSlEM cnica pida tet DANDAN kba Paka A 28 Pressure vessel Safety features sxia rasas pik nay a a a E AE WAE KES 59 Safety precautions 22022 es 55 Protective eyewear 2 49 63 155 Pulse duration 72 73 Pulse energy eee eee eee eee 31 72 73 74 Purge gas PUIPOSO kaa Nian PAG bei id 28 Supply system 28 TUMING Banas what sas Ny ees wat 159 Purge gas TNES conca it mula Ieee Lik 180 Purge laser tube eit dad x dea aha 196 PURGE LINE key o coccoccccccc eee 148 PURGE RESERVOIR key 5 148 196 COHERENT LAMBDA PHYSIK 10 2005 349 INDEX 350 Q Question mark Meaning in commands 2 00 0 e eee eee eee 257 R Radiation safety features 0000 56 Radiation warning lamp 5 140 Rare gas cylinder Exchange 5 naat mk ahhh BEE NGA DP ENNA LUN NN KA ed 187 Remote interlock switches 05 30 COnne chion s a Path 114 Remote PC CON
3. Figure 89 Energy monitor connection F version 4 Disconnect the purge gas line C from the energy monitor 5 Pull the lever of the clamping ring D that clamps the bellows onto the bending unit of the energy monitor 6 Remove the clamping ring 7 Carefully remove the energy monitor from the laser housing CAUTION Risk of damaging optical sensitive components The attenuator lies in the between the energy monitor and bending unit and might be difficult to remove Do not use any tools Always wear suitable plastic gloves 8 Remove the O ring between energy monitor and bending unit 9 Exchange the attenuator see Figure 89 E If the displayed internal calculation value was less than 9 9 Replace with a coarser meshed attenuator or remove an attenuator if two attenuators were inserted If the displayed internal calculation value was 20 or higher Replace with a closer meshed attenuator or add an appropriate attenuator if necessary 10 Re insert the O ring removed in step 8 and reattach the energy monitor onto the bending unit 11 Attach the clamping ring that clamps the energy monitor onto the bending unit and close the lever to fix the connection 12 Connect the purge gas line plug to the energy monitor 13 Connect the two FOL s DATA IN and DATA OUT into the sockets on top of the energy monitor COHERENT LAMBDA PHYSIK 10 2005 231 MAINTENANCE 7 8 232 14 Attach the service pane
4. Removing Blanks Use of in remote commands BREAK key Buffer gas Buffer gas cylinder Exchange C Carriage Return character Meaning incommands Charge On Demand CON Charging current Charging voltage setting Check valve Cooling system Cl see Comminication interface COHERENT LAMBDA PHYSIK 10 2005 AN a EEE AP aa 257 rd PE meats 327 341 INDEX Circulation Tarn Xuan seks Reh aes awed ddl ea aQ NG 17 Class laser device Demon urticaria decedent tee eae ed Mads hon Ped bee 44 Class IV high power laser device Definition cacas Seats GALANG NANA pat 44 Clip removal tool 00 107 Colon Meaning in commands 000 eee eee eee 257 Communication interface AA 21 140 328 Constructive safety features eee 56 Cooling water INGUIN uhh kad ha DAG rd ta 27 CONNECIONS 00000000 as a AA weave Paces 93 Specifications vu cional od 82 COUNTS RESET key amics dad A 146 COUNTS SEL key 22020222 eee es 146 Cursor keys Handheld keypad 143 D Data ring FUNCION ra AA NAM ae Se ee Re eee 329 SOILS diri Pep 5204 eek ko Bab cata DL tale NB aaa AR Gaede eae 29 Designated use of the laser 06 06 7777 40 DIMENSIONS 12 Aa ote eae Sa le 84 Discharge capacitors eee ee 329 Display Handheld keypad
5. 208 8 2 1 Overview of Operating Modes 258 xii User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO TABLE OF CONTENTS 8 2 2 Operating Mode Setting Restrictions 8 2 3 Description of Operating Modes 8 2 3 1 O T E PU 8 2 3 2 ONS iia rhe DAR 8 2 3 3 SKIP rutas aray Bath a ad ee 8 2 3 4 NEW pA ERA dicas 8 2 3 5 PASSIVATION FILL 8 2 3 6 PURGE RESERVOIR 22 0 8 2 3 7 SAFETY RIEL cect ta da ha 8 2 3 8 TRANSPORT FILL seiu iak eetehi a 8 2 3 9 FLUSHING 0222 8 2 3 10 CON Tiara dara sae 8 2 3 11 AA KA Ka AA NG LAG NANG PAGAN 8 2 3 12 POR uta ata R 8 2 3 13 MANUAL FILL INERT 8 2 3 14 FLUSH lt XY gt LINE oo 8 2 3 15 PURGE xXY5 LINE eccere ere e 8 2 3 16 CAPACITY 57 17 MOER a ta MANA Kapa 8 2 3 18 ENERGY CAL 0222 8 2 4 Status Codes pa Ka Ta ad vet aaa cs 8 3 Laser Parameter Commands 8 3 1 Overview of Laser Parameters 8 3 2 Operating Mode Setting Restrictions 8 3 3 Parameter Polling Restrictions 8 3 4 Running Modes and Operating Parameters 8 3 4 1 MODE kka maa ANG adn es KANG ANA 8 3 4 2 EGY and EGY SET oo 8 3 4 3 EGY RANGE esis iid Derrida da aah Kaka waG 8 3 4 4 AM ingat ka NG BARKO AND ANN ha 8 3 4 5 TRIGGER Sy cided mb 8 3 4 6 REPRATE rai 8 3 4 7 COUNTS o k a na esta aoe a ha ba ene 8 3 5 Gas System and Gas Supp
6. no y Clean tube optics y Clean beam splitter y Adjust tube optics Problem solved y yes Problem solved Stop Check for gas leak Bi Yes Tighten leak Problem solved Adjust Thyratron Problem solved Call service Figure 104 Beam energy too low part 4 318 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Low Light 9 8 Low Light The low light error my occur for several reasons To clearly detect the source of the problem follow the flowcharts shown on the following pages Low Light See flowchart Low Light No Trigger Pulses Are there any trigger pulses See flowchart Low Light Missing Pulses Measure beam output energy with external energy meter Is beam output energy accurate See flowchart Low Light Problem with Energy Monitor See flowchart Low Light Beam Output Energy too low s there any beam output energy no Raise EGY const value Problem solved Major malfunction Call service EGY const value has been below lasing threshold Run with higher energies Figure 105 Low Light COHERENT LAMBDA PHYSIK 10 2005 319 TROUBLESHOOTING Low Light No Trigger Pulses Does the laser receive any external trigger signals Switch to INT TRIGGER Is the laser set to EXT TRIGGER
7. 18 Layout of the high voltage circuit 19 Laser control system with handheld keypad 21 Communication interface and handheld keypadr 22 Laser gas supply exhaust without halogen source 24 Laser gas supply exhaust with fluorine source 26 Cooling water circuit 5 27 Pulse energy as a function of charging voltage 31 Voltage increase in the Energy Constant mode 31 Energy decreasein the HV Constant mode 32 Charging current with halogen injections 33 Charging current with Partial Gas Replacement 33 EGY PGR flow 0308 35 Charging current with No Gas Replacement NGR 36 EGY NGR flow diagram an 36 Operating mode transition diagram 37 Laser radiation warning light and shutter 56 Remote connection 0c eee ee eee 57 Key SWIIGN magapi d eee weds Saw ede Geel 60 Location of voltage warning lights 61 Labels on beam exit side 62 Labels on connection side 64 Labels mode vent paa pn pil pide edad ones LG 67 337 LIST OF FIGURES 338 Figure 32 Figure 33 Figure 34 Figure 35 Figure 36 Figure 37 Figure 38 Figure 39 Figure 40 Figure 41 Figure 42 Figure 43 Figure 44 Figure 45 Figure 46 Figure 47 Figure 48 Figure 49 Figure 50 Figure 51 Figure 52 Figure 53 Figure 54 Figure 55 Figure 56 Figure 57 Figur
8. 126 Tools and Materials e 2 sets of hose connectors NOTE Each set of hose connectors consists of a nut see Figure 56 A a nozzle B and a ferrule C Depending on the configuration of the cooling water circuit at the installation location other connection pieces can be used J Figure 56 Set of water hose connectors e Length of water hose e 2 Hose clamps e Hose cutter e 17 mm wrench e Appropriate screwdriver to tighten hose clamps e 2 sets of connectors for connection to water source and drain and if applicable appropriate tool to tighten the connectors to the fab Preconditions CAUTION Risk of damaging laser device cooling water circuit The use of incorrect cooling water corrodes the heat exchanger Do not use distilled or deionized water e Water supply corresponds with the water supply requirements in Section 4 2 4 on page 82 e Laser device positioned at final installation location User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation Preparation 1 Cut the water hose to the lengths required for the individual water inlet and water outlet lines hoses 2 Insert a nozzle into one of the water hoses in the direction indicated in Figure 57 Figure 57 Insertion of nozzle into water hose 3 Usea hose clamp to tighten the water hose onto the nozzle 4 Repeat steps 2 and 3 to prepare the other hose 5 Remove the protective caps from the water connect
9. 138 6 1 1 2 Power ON Lamp 139 6 1 1 3 Key Switch 139 6 1 1 4 Control Voltage Lamp 139 6 1 2 Laser Radiation Warning Lamp 140 6 1 3 Handheld Keypad 1200 6 1 3 1 Display 2 3 wheelie KA hnd 142 6 1 3 2 Numerical Input Keys 143 6 1 3 3 Cursor Keys 0c e eee eee 143 6 1 3 4 ENTER 66 eeeeee 143 6 1 3 5 EXE KOY nanaman Habana aa mates 143 6 1 3 6 BREAK KEY pman hha NGA ahd ears 143 6 1 3 7 RUN STOP Key 2 2 144 6 1 3 8 TRIGGER INT EXT Key 144 6 1 3 9 MODE KEY 5 daka Kian rondan 145 6 1 3 10 REPRATE HV EGY Keys 145 6 1 3 11 COUNTS Keys 0 2 146 6 1 3 12 MENU Keys 0 146 6 1 3 13 EGY CAL KEY seared eat 146 6 1 3 14 Function KeyS 5 147 6 1 3 15 GAS Keys 2 148 6 2 Routine Operating Sequences 148 6 2 1 Check Beam 1 149 6 2 2 Turn On Gases 0c eee eee 150 6 2 3 Start Up Laser Device 153 6 2 4 Start Laser Operation 155 6 2 5 Stop Laser Operation 157 6 2 6 Shut Down Laser Device 158 6 2 7 Turn Off Gases a 159 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO TABLE OF CONTENTS 6 3 6 3 1 6 3 2 6 3 3 6 3 4 6 3 5 6 4 6 4 1 6 4 2 6 4 3 6 4 4 6 4 5 6 4 6 6 4 7 6 4 8 6 4 9 7 1 7 2 7 2 1 7 2 2 7
10. 142 Display elements 138 Door interlock switch Installation n enirar eaa mea a ad eee 114 Door switches 0000002 30 Dynamic gas lifetimes 0000 330 E EGY GAL KOy 2 dagan Pury eagles a Sete Da wine te 095 hw ae 146 EGY Key matnni AA ad Bad erie 145 EGY NGR Flow diagram 36 MODE to E E E a baat Peep aera wad Dasha pag 162 EGY PGR Flow diagram 2 220 ia eke eae bee heehee be eee des des 35 Mode 2 dT an Ban Apn ee ts Pee a a E 162 Electrical connection LOCATON acarar a DL weed Pa ae hahaa na 92 Specifications 00 cee 81 Electrical hazards 0000 cect 42 Electrical safety features 000 ccc eee 58 Emergency gas fill 171 Emergency OFF EMO 5 52 Enable key switch 139 342 User Manual COMPexPro Series A0510COMPPRO INDEX A0510COMPPRO Energy Constant 006 5 31 150 329 Energy efficiency gt 17 Energy management mode 05 162 Energy MONO nna ested ee oi hana 329 Calibration ss iii pawan seid Pea Sw a wales 223 Description sists arte gt Hate GA NEN Ng ere eae ie bee mha bigla 18 15 Maintenan6e vesical BAKI haveing tanh oa DANG NANANG aoa a 203 Energy Seting Pee ae DNA PLAN PANDA 163 ENTER key Handheld keypad 0 143 Environmental conditions 005 75 Equals sign Meaning incommands 00 ska eee eee 257 Excimer Meaning of expression 0008 9
11. laser radiation switch 4 warning lamp Figure 49 Remote socket connections Connecting the Laser Warning Lamp 2 Connect pins 1 and 4 e g with a laser radiation lamp that warns upon entering a room that the laser in on Installation may vary due to local requirements User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation 5 2 6 Connect Mains Power Supply Lines Purpose Connect the laser device and vacuum pump to the mains power supply at the installation location WARNING Risk of electrocution Work on the electrical system and equipment of the laser device shall only be carried out only by skilled electricians or by instructed persons under the supervision and guidance of a skilled electrician and in accordance with electrical engineering rules and regulations A mains power supply outlet is required for the laser device Note the power consumption of these devices COMPexPro 102 201 1 5 kVA max COMPex ro 110 120 205 Fo 3 0 kVA max NOTE The power supply line of the laser device is to be protected through an approved and correctly rated circuit interruption device in accordance with valid national and local electrical standards Tools and Materials e Wire cutter and stripper e f used plug for your local mains wall socket The mains plug 30 A is to be approved in accordance with valid national and local electrical standards e Appropriate screwdrivers fo
12. 252 Tools and Materials e 9 16 inch wrench e 13 mm wrench e Gyrolok stainless steel cap to seal the gas lines e Stainless steel plugs included with the laser device to seal the connections on the laser device CAUTION Incorrect handling will cause unnecessary downtime Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas system pressures of below 20 bar abs may be critical e Inert gas as specified see Section 4 2 2 on page 76 Gas cylinder with a remaining pressure of at least 10 bar abs connected to the inert gas connection of the laser device Preconditions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device switched on and laser ready to operate no radiation being emitted e All gas cylinder valves and pressure regulators closed Disconnecting the Gas Lines 1 Purge the halogen gas line see Section 7 4 2 on page 180 2 Ensure that the halogen gas cylinder valve and pressure regulator are closed 3 Use the 9 16 wrench to disconnect the halogen gas line from the Gyrolok fitting o
13. NOTE The pressure regulator has to be set to at least 4 bar to completely evacuate the line between the gas cylinder valve and the laser head With lower pressure settings residues may remain in the line between the pressure regulator and the gas cylinder valve 17 Close the halogen gas cylinder valve 18 Press FLUSH LINE gt on the handheld keypad FLUSH current selection INERT BUFFER RARE HAL appears in the bottom line of the display 19 Press lt Cursor Rights and or lt Cursor Left gt to select HAL halogen 20 Press lt ENTER gt to confirm the selection COHERENT LAMBDA PHYSIK 10 2005 185 MAINTENANCE 186 21 Press lt EXE gt to evacuate the selected gas line between the laser head valve and the gas cylinder valve The message FLUSH HAL appears in the bottom line of the display The vacuum pump runs for two seconds to evacuate the gas line 22 Repeat step 21 until the pressure regulator gauge indicates a relatively constant vacuum NOTE If a vacuum is not reached there is a relatively large leak in the gas line Check all connections in the line If necessary tighten the connections and repeat the evacuation of the gas line 23 After appoximately 10 minutes check the pressure regualator gauge again A significant increase in pressure indicates a leak 24 If there is a leak tighten the connections and where necessary exchange the sealing ring Following this repeat the leak tes
14. sca jeans stay eae a cay Go Mae 329 Excimer laser gas lines Preparation eoet aas hha FE hara oad bet NGA dale GPa kad 130 Excimer laser gases TUN a dik old ea etd PAGA 159 EXE Execute KOY icc eras egies whale Lie 5 RA 143 Exhaust Installation of line 02 117 Location of connection 0 0c eee eee 94 Specifications 5 5 Dae ais 83 External laser radiation warning 30 External triggering gt 30 F FDA radiation performance standards 65 Fiber optics light wave guide 2 330 Fire safety Features AA il 59 Guidelines aana 51 Flammable materials 000200200 eee 51 Flow regulating valve Cooling system cece 28 Flow sensor Cooling system 28 Flush gas line procedure 022 ee 179 FLUSH LINE key 148 Flushing procedure 329 Foot Adjustment range 02000 nae 88 Configuration 0002 88 7 88 Full width half maximum FWHM 2 ee eae 330 Function keys Handheld keypad 2 2 2 ee eee 147 FUSES gt cist coe ese Saale pa eee 324 COHERENT LAMBDA PHYSIK 10 2005 343 INDEX 344 G Gas cabinets kn AA LA Danilo ed Baca ate Raa ay 91 Gas connections viii sad Saeed ae Be Cae ede 89 Gas cylinders Remaining pressure eee 77 Safety precautions 020 eee 150 Gas handling safety features cece eee eee 59 GAS kEYS a air Pba Ka
15. 1 2 3 2 COHERENT LAMBDA PHYSIK 10 2005 gt lt gt lt lt gt lt Symbols The signal words DANGER WARNING and CAUTION are always emphasized with a safety symbol that indicates a special hazard regardless of the hazard level This symbol is combined with one of the signal words DANGER WARNING or CAUTION to indicate a hazardous situation caused by laser radiation This symbol is combined with one of the signal words DANGER WARNING or CAUTION to indicate a hazardous situation caused by electricity This symbol is combined with one of the signal words DANGER WARNING or CAUTION to indicate a hazardous situation caused by hot surface s This symbol is combined with one of the signal words DANGER WARNING or CAUTION to indicate a hazardous situation caused by flammable substances This symbol is combined with one of the signal words DANGER WARNING or CAUTION to indicate a hazardous situation caused by toxic substances This symbol is combined with one of the signal words DANGER WARNING or CAUTION to indicate a hazardous situation caused by circumstances other than those described above INTRODUCTION 1 3 Laser Terminology According to ISO 11145 ISO 11145 Optics and Optical Instruments Lasers and Laser Related Equipment Vocabulary and Symbols contains a list of laser terminology To prevent misunderstandings this manual strictly differentiates between laser and laser device
16. 23 Use a leak tester to check the inert gas line and internal gas system for leaks 24 If there is a leak check and where necessary tighten the line connections Following this repeat the vacuum leak test 25 Repeat steps 17 to 24 without leak testing the internal gas system for all other gas lines 26 Close the service cover Cleaning and Filling the Gas Lines 27 Ensure that the cylinder valves of all gas lines are open and that the pressure regulators are set to the required values see Section 4 2 2 on page 76 28 Press FLUSH LINE gt on the handheld keypad FLUSH current selection INERT BUFFER RARE HAL appears in the bottom line of the display 29 Press lt Cursor Rights and or lt Cursor Left gt to select INERT 30 Press lt ENTER gt to confirm the selection 31 Press lt EXE gt a number of times to clean the inert line The line is evacuated and at the same time refilled with fresh gas 32 Repeat steps 28 bis 31 for all other gas lines except the HALOGEN gas line Re passivating the Halogen Gas Line 33 Repeat steps 28 bis 31 for the halogen gas line 34 Leave the halogen gas in the gas line for approx 15 minutes 35 After waiting approx 15 minutes press lt EXE gt again to fill the halogen line with fresh gas NOTE Depending on the configuration of the gas system the command has to be repeated until the gas line is completely filled Finalization 36 When SNOOP was
17. 35 Refill the laser tube with a new gas fill 36 Recalibrate the energy monitor see Section 7 7 1 on page 223 COHERENT LAMBDA PHYSIK 10 2005 241 MAINTENANCE 7 10 242 Thyratron Maintenance Purpose Check and if necessary increase the thyratron supply voltage to compensate for ageing of the thyratron NOTE The procedure described in this section primarily applies to a routine maintenance action The same procedure can be followed to rectify faults such as missing pulses no trigger or low beam energy Take into account the deviations in the procedure when rectifying faults such as additional pulses and overload Maintenance Interval e Every 300 million pulses Time Required e 0 25h Tools and Materials e 3mmallen key e TRMS Voltmeter TRMS True Root Mean Square e Laser logbook Preconditions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device switched on and laser ready to operate no radiation being emitted Preparation 1 Use the 3 mm allen key to remove the thyratron adjustment plate cover NOTE If one of the jumpers is already at the maximum setting on the thyratron adjusment plate the thyratron or hydroge
18. 4 tae ede heed a YLONA d nee 103 Transportation fill 0 00 eee ee 171 250 TRIGGER INT EXT key 8 144 Trigger pulse gt 334 Trigger signal ports 96 COHERENT LAMBDA PHYSIK 10 2005 351 INDEX 352 Triggering modes 0 30 A A a Ni AEE AEA I IAE E N S 160 Troubleshooting FUSOS apt ds a a 324 InterlOCkS gt aaa pla Naan 308 Warnings and error messages ee eae 294 TUO GASES airis a Nah NN BAG NA NG oe 159 GASES iii Pid 68 al aa cd ti Ante aa as 150 Typographic conventions in this manual 2 U Ultra violet light Physical hazards s seoan a OEE ER eae 45 Safety guidelines 2 20 49 Unstable resonator Adapter aa Arad BANDED BARAN Ae oe ete ed 241 Adjustment Se 241 PSSM POM Saves le lee ee eee ae ie 236 User counter Reading aa anag PD hed A A A vetted adh 170 RESCUING BANA LABAN Na NA GAN AB 170 User interface Laser control system 0 21 V Vacuum 2 2 Ah nee GS See maa 99 Connection 00 ete 116 PUIDOSO maine cera Paty Leta Peale ei BG began Sede re at 25 Vacuum valve 1 tees 25 Ventilating systems 0 eee 54 Visible alignment laser 0 234 W Warm Up phase aa Nada raras aia 154 Warning and error messages 294 Duty Cycle Exceeded eee 295 Energy Cal Error dud sada wenger e 295 Error Temperature Measurement a 296 Fata
19. 7 Press lt EXE gt to fill the laser tube with inert gas The vacuum pump starts to evacuate the laser tube After reaching 30 mbar the vacuum pump stops the inert gas valve opens and the laser tube is filled to 1200 mbar with inert gas The inert gas valve then closes After filling the laser tube REPLACE WINDOWS enter appears to indicate the the windows can now be exchanged CAUTION Risk of damaging laser tube Do not press lt ENTER gt when the tube windows are removed as this would cause a large amount of ambient air to enter the laser tube COHERENT LAMBDA PHYSIK 10 2005 215 MAINTENANCE Removing the Output Coupler 8 Use the 3 mm allen key to remove the service panel from the laser device 9 Disconnect the purge gas line plug and remove the purge gas line from the optics mount see Figure 80 B Figure 80 Front optics with energy monitor Fo version 10 Pull the lever of the clamping ring see Figure 80 C that clamps the bellows onto the bending unit of the energy monitor A and remove the clamping ring 11 Press the bellows see Figure 80 D towards the laser tube and remove the O ring between bellows and bending unit 216 User Manual COMPexPro Series A0510COMPPRO AO510COMPPRO Tube Optics Maintenance CAUTION Risk of damaging optical components There is overpressure in the laser tube Always hold the optic mount with the other hand while loosening it Always wear disp
20. Operating and Display Elements 6 1 3 2 6 1 3 3 6 1 3 4 6 1 3 5 6 1 3 6 Numerical Input Keys The numerical input keys 0 to 9 and decimal point allow you to enter the numerical values that define parameters such as REPRATE repetition rate HV charging voltage and EGY beam output power The input is confirmed by pressing the ENTER key Incorrect entries can be terminated prior to pressing ENTER by pressing the CLEAR key If the entered value is out of range an audible warning occurs and the last accepted value is retained Cursor Keys The cursor keys cursor left cursor right allow you to select a menu item i e one of the items displayed in parenthesis in the bottom line of the display Press the cursor key that moves the cursor in the direction of the required item and then press ENTER to confirm the selection ENTER Key The ENTER key is to be pressed to confirm numerical input or menu items selected with the cursor keys EXE Key The EXE Execute key is to be pressed to immediately start execution of the last selected function BREAK Key The BREAK key is to be pressed to abort the currently active operation Any unsaved changes will be lost If BREAK is pressed during laser operation the laser immediately stops Pressing BREAK during a gas action will immediately terminate the action BREAK can also be pressed during data input or menu item selection to terminate the action In this ca
21. Series A0510COMPPRO A0510COMPPRO Operating Modes and Parameters 6 3 4 3 Press lt ENTER gt to confirm the selection The selected running mode is indicated in the top left corner of the handheld keypad display NOTE The message PRESET ENERGY TOO HIGH appears when a new gas fill is required see Section 7 5 1 on page 192 Change Beam Output Energy Value Purpose Set the beam output energy value for laser operations in one of the energy constant modes NOTE The beam output energy value cannot be changed when the HV constant mode is selected The range of possible energy values is indicated in the gas menu see Section 6 4 2 on page 166 Preconditions e Energy constant mode EGY PGR or EGY NGR selected see Section 6 3 3 Entering the Beam Energy Value 1 Press lt EGY gt The bottom line of the handheld keypad display reads EGY current setting mJ NOTE If lt EGY gt is pressed when the HV constant mode is active a beep tone indicates that the selection has been denied 2 Use the numerical input keys to enter the desired value in mJ 3 Press lt ENTER gt to confirm the input The new value appears in the top line of the handheld keypad display NOTE A beep tone will indicate an out of range value In this case the previously set value remains active COHERENT LAMBDA PHYSIK 10 2005 163 OPERATION 6 3 5 164 Change Charging Voltage Purpose Set the charging vo
22. When working with an open laser beam always familiarize yourself with the necessary safety precautions before starting the laser Always wear suitable eye protection Never stare into the laser beam or its reflection Aviod contact with the laser beam 20 Start the laser see Section 6 2 4 on page 155 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Tube Optics Maintenance 21 Turn the horizontal optic adjustment screw siehe Figure 76 A from right to left see Figure 76 A until the beam energy is at its heighest Figure 76 Horizontal and vertical optic adjustment 22 Repeat step 21 with the vertical optic adjustment screw B 23 If there is insufficient energy see laser data sheet for the required energy output repeat steps 21 and 22 24 Insert the energy monitor back into the correct position in front of the output coupler and tighten using the 4 mm allen key Change and Adjust the Rear Mirror 25 Repeat the procedure Flushing the Laser Tube see page 202 to fill the laser tube with inert gas 26 Repeat steps 11 to 23 from page 204 to exchange and adjust the rear mirror Finalization 27 Re install the mirror access covers removed in step 8 28 Calibrate the energy monitor see Section 7 7 1 on page 223 COHERENT LAMBDA PHYSIK 10 2005 207 MAINTENANCE 7 6 2 208 Disassemble Assemble Tube Optics Mounts COMPex ro 100 COMPex Pro 200 Purpose D
23. nergy monitor damaged Call Service Check FOL from beam splitter box to energy monitor Replace or re connect FOL Problem solved Has laser been at a standstill or a long time Perform a leak test Purge lines 3 times Continued on next page Flush lines and fill with fresh gas New Fill a Problem solved Je Continued on next page Figure 102 Beam energy too low part 2 316 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Beam Energy Too Low Beam Output Energy Low Continue 2 Laser tube temperature OK no yes XeCl about 30 C if available adjust waterflow Make a few thousand shots Problem solved Optics just changed or cleaned Has laser been open for more than 2 minutes no Check Optics Right Optics labeled at side of optics Replace Optics yes Coated optics properly mounted Correct no mounting yes yes Problem solved Adjust tube optics no Continued on next page Figure 103 Beam energy too low part 3 COHERENT LAMBDA PHYSIK 10 2005 F ArF about 40 C all others about 35 C yes Re passivate Problem solved Continued on next page es 0 6 317 TROUBLESHOOTING Beam Output Energy Low Continue 3 Laser tube yes gases old New Fill
24. 78 4 2 2 2 Gas Mixtures 5 80 4 2 3 Power Supply 81 4 2 4 Cooling Water 000 c ee eee eee 82 4 2 5 Air Intake 895 83 4 3 Connections and Space Requirements 84 4 3 1 Dimensions and Weight 84 4 3 2 Beam Exit Position 87 4 3 3 Foot Configuration 88 4 3 4 Gas Connections 5 89 4 3 4 1 Pressure Regulators 91 4 3 4 2 Gas CabNetS pax nga nnen ans an hahang 91 4 3 5 Electrical Connection 0 00 92 4 3 6 Cooling Water Connections 93 4 3 7 Air Intake and Exhaust Connections 94 4 3 8 Control Lines 0 000 c eee nooo 95 4 3 8 1 Serial Interface gt 95 4 3 8 2 Remote 500801 a 95 4 3 8 3 Trigger Signal Ports 96 4 3 8 4 Sync Out Signal 44 7 4 3 9 Maintenance 768 98 4 4 ACCESSOrieS a eee 99 4 4 1 Vacuum Pump eee 99 4 4 2 Halogen Filter eee eee ee 99 viii User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO TABLE OF CONTENTS 5 5 1 5 2 COHERENT LAMBDA PHYSIK 10 2005 INSTALLATION aaa Transport and Unpacking 5 1 1 5 1 2 5 1 3 5 1 3 1 5 1 4 5 1 5 5 1 6 5 1 7 5 1 8 5 1 9 5 1 10 Safety aaa DAANAN eae peewee paaa Transport and Storage Conditions Floor Loads Vid ti ai Packaging Dimensions and Weight Transport Packaging
25. 9 2 2 Overload This interlock is an electronic interlock for the HV power supply It is activated if the high voltage charging circuit does not reach the preset high voltage level Reason 1 Thyratron no longer adjusted Solution Adjust the thyratron settings see Section 7 10 on page 242 Reason 2 Malfunction in the HV circuit Solution Switch the laser device off and then on again If the problem remains call Lambda Physik service Remote An externally connected safety switch e g door switch connected to the 4 pin remote socket see Section 4 3 8 2 on page 95 or one of the interlocked access panels is open Reason 1 Externally connected safety switch open Solution Close contact between pins 2 and 3 of the remote socket Reason 2 One of the laser device service panels is open Solution Close all service panels COHERENT LAMBDA PHYSIK 10 2005 309 TROUBLESHOOTING 9 2 3 9 2 4 310 Temp Res This interlock is a thermal switch which is located on top of the laser tube The switch opens if the laser tube temperature reaches 46 C Reason There insufficient cooling water flow no cooling water or the cooling water is too warm Solutions 1 Ensure that water flow matches the specifications see Section 4 2 4 on page 82 2 Ensure that the water inlet temperature is within range of specifications see Section 4 2 4 on page 82 3 Check that the
26. Buffer 2 Rare 3 Inert 4 Halogen Excimer laser gas valve Buffer Rare Inert Halogen Vacuum valve Laser tube head valve Laser tube NovaTube Laser tube pressure sensor Pressure relief valve Halogen filter Vacuum pump Exhaust gt 0 9 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Primary System Components The individual gas supply lines are connected to the laser device at the corresponding connections situated on the connection side of the laser head see Figure 6 The gas solenoid valves B are normally closed They are opened to allow the corresponding gas to flow into the gas manifold The vacuum valve C is a solenoid valve that is normally closed It is opened to allow the gas in the gas manifold to be pumped out through the exhaust by the vacuum pump The head valve D is a solenoid valve that is normally closed It is opened to allow the gases to flow from the gas manifold into the NovaTube E The pressure sensor F situated at the rear of the NovaTube provides a tube pressure reading that can be polled through a software command The pressure relief valve G opens when the pressure in the NovaTube is too high The halogen filter H removes molecular species of halogen gas from the laser gas mixtures exhausted from the NovaTube The vacuum pump 1 exhausts the gases from the NovaTube It is started and stopped through signals r
27. Check external trigger device Measure U and U at thyratron Problem solved adjustment panel Stop Exchange thyratron fuse MO7 F1 at thyratron adjustment panel Are there any voltages Measure Usas at thyratron adjustment Problem solved panel Stop Defective power supply Call service Varistor or HV trigger damaged Call service IS Usas between 140 and 160 V Raise U and U one or two steps Problem solved Major malfunction Call service Figure 106 Low Light no trigger pulses 320 User Manual COMPexPro Series A0510COMPPRO Low Light A0510COMPPRO Low Light Missing Pulses Is laser in HV Constant Mode Is laser gas old Make a naw fill es 4 Stop Problem solved Is laser running with ArF or F Measure laser tube temperature Is temperature less than 35 C If available Reduce water flow Problem solved Raise environ mental temperature Make a few thousand shots Problem solved Raise U and U one or two steps at thyratron adjustment panel Problem solved Stop Major malfunction Call service Figure 107 Low Light missing pulses COHERENT LAMBDA PHYSIK 10 2005 321 TROUBLESHOOTING Low Light Problem with Energy Monitor Calibrate energy monitor Problem solved Check FOL from beam
28. Flow 0 3 to 3 0 l s Recommended cylinder size 10 1 150 bar 2100 psi a Not required when optional fluorine source is used Fluorine Fz in He for COMPex Pro F5 Type of gas 0 5 F2 in 95 He Purity of Helium 99 995 or higher Purity of Fluorine for Excimer laser HF free Pressure regulator 4 4 to 5 2 bar abs Flow 0 3 to 3 0 l s Recommended cylinder size 10 150 bar 2100 psi a Not required when optional fluorine source is used Hydrogen chloride HCI Ha in He Type of gas 5 HCl and 1 H2 in He Purity 99 995 or higher Pressure regulator 3 5 to 5 0 bar abs Flow 0 3 to 3 0 I s Recommended cylinder size 10 I 100 bar 1400 psi Argon Ar Type of gas Ar Purity 99 995 or higher Pressure regulator 3 5 to 5 0 bar abs Flows 0 8 to 3 0 l s Recommended cylinder size 50 I 200 bar 2800 psi User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Facilities Krypton Kr Type of gas Purity Pressure regulator Flow Recommended cylinder size Xenon Xe Type of gas Purity Pressure regulator Flow Recommended cylinder size Neon Ne Type of gas Purity Pressure regulator Flow Recommended cylinder size Kr 99 99 or higher 3 5 to 5 0 bar abs 0 8 to 3 0 l s 10 100 bar 1400 psi Xe 99 99 or higher 3 5 to 5 0 bar abs 0 8 to 3 0 l s 2 5 50 bar 700 psi Ne 99 995 or higher 3 5 to 5 0 bar abs with fluorine cylinder or 6 5
29. NOTE For the new capacity value to be accepted the command CAP SET aaa has to follow the command OPMODE CAPACITY RESET COHERENT LAMBDA PHYSIK 10 2005 289 CONTROL SOFTWARE 8 3 8 3 8 3 8 4 290 LEAKRATE Fo source The F source leak test will be carried out during a new gas fill After the gas has been filled the laser selects the standby mode to check if there is a loss of gas The LEAKRATE command requests the loss of pressure Syntax Polling LEAKRATE Reply aaa Syntax Description aaa Leak rate of the Fs source Variable integer 3 places Unit mbar 2 min Value current leak rate TEMP Fo source This command requests the temparature of the heating element of the integrated Fs source If no F source is connected the reply is 0 The command can be sent in all modes The current heater will however only be indicated in the NEW FILL mode Syntax Polling TEMP Reply aa a Syntax Description aa a Temperature of the F gt source Variable decimal 2 places before and 1 place after decimal point Unit C Value current temperature User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Parameter Commands 8 3 8 5 8 3 9 8 3 9 1 8 3 9 2 ROOMTEMP HCI source As the chemical reaction in the HCI source is temperature dependent the ROOMTEMP command indicates to the source the room temperature range When the laser device is started the paramet
30. Section 9 1 12 NEW FILL 3 No Gas Flow Section 9 1 17 OFF 1 Interlock XXX Section 9 1 11 OFF 2 Preset Energy Too High Section 9 1 25 OFF 4 Fatal Error Watchdog Section 9 1 6 OFF 5 Fatal Error LWL Datalink Section 9 1 5 OFF 6 Polling Section 9 1 24 OFF 7 Energy Cal Error Section 9 1 2 OFF 8 New Gas Fill Needed Section 9 1 15 OFF 9 No Vacuum Section 9 1 18 OFF 10 Low Pressure Section 9 1 14 OFF 11 No Capacity Left Section 9 1 16 OFF 12 Error Temperature Measurement Section 9 1 3 OFF 13 Fluorine Valve Not Opened Section 9 1 7 OFF 21 Warm up 8 min Section 9 1 28 OFF 26 Low Light Section 9 1 13 OFF 27 Wrong Pressure Section 9 1 29 OFF 29 RAM Check Error Section 9 1 26 OFF 31 Timeout Section 9 1 27 OFF 33 Halogen Pressure Too High Section 9 1 8 OFF 35 Not Available Section 9 1 20 OFF 39 Inert Valve Closed Section 9 1 10 OFF 41 OFF 41 Section 9 1 21 ON 2 Preset Energy Too High Section 9 1 25 294 User Manual COMPexPro Series Sheet 1 of 2 A0510COMPPRO A0510COMPPRO Warnings and Error Messages Message to External PC Handheld Keypad Message Description ON 03 Duty Cycle Exceeded Section 9 1 1 ON 8 New Gas Fill Needed Section 9 1 15 ON 9 No Vacuum Section 9 1 19 ON 10 Low Pressure Section 9 1 14 ON 13 Fluorine Valve Not Opened Section 9 1 7 ON 34 HI In Prep Section 9 1
31. Series A0510COMPPRO A0510COMPPRO Set Up and Service 6 4 6 Activating the Temperature Control 8 9 10 11 Ensure that the cooling water valve is open Press lt F5 gt The current status of the temperature regulation appears in the bottom line of the handheld keypad display Press lt Cursor Rights and or lt Cursor Left gt to select ON or OFF Press lt ENTER gt to confirm the selection Read Total Counter Purpose Obtain the total counter reading to determine the total number of laser pulses emitted by the laser since commissioning Preconditions e None Reading the Total Counter 1 Press lt COUNTS SEL gt The bottom line of the handheld keypad display indicates the currently active counter and number of pulses If necessary use the lt Cursor Left gt key to select the total counter reading Note the counter reading Press ENTER to cancel the counter reading function The previously active screen display re appears COHERENT LAMBDA PHYSIK 10 2005 169 OPERATION 6 4 7 6 4 8 170 Read User Counter Purpose Obtain the user counter reading to determine the total number of laser pulses emitted since the last counter reset Preconditions e None Reading the User Counter 1 Press lt COUNTS SEL gt The bottom line of the handheld keypad display indicates the currently active counter and number of pulses 2 If necessary use the lt Cursor Rights key
32. see Figure 1 Thus start laser device means that the power is off and shall be turned on To start the laser means to switch on the laser beam and start lasing Figure 1 Laser components according to ISO 11145 Definitions A Laser Consists of an amplifying medium capable of emitting coherent radiation with wavelengths up to 1 mm by means of stimulated emission B Laser Device A laser A where the radiation is generated together with essential additional facilities E that are necessary to operate the laser e g cooling power and gas supply C Laser Assembly Laser device B together with specific normally optical mechanical and or electrical system components for beam handling and forming F e g mirrors lenses G e g telescope focussing D Laser Unit One ore more laser assemblies C together with measurement and control systems l and handling systems J robotics workpiece positioning H Workpiece User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Conversion Tables 1 4 Conversion Tables 1 4 1 Measurements Listed below are the units of measure used in this manual and their equivalents according to the SI standard 1 meter m 1 meter m 1 centimeter cm 1 square meter m 1 square meter m 1 cubic meter m3 1 liter I 1 kilogram kg 1 bar 100 000 Pascal Pa 1 4 2 Temperatures 39 37 inches in 3 28 feet ft 0 3937
33. 1 2 2 Safety Information 4 1 2 3 Signal Words and Symbols 4 1 2 3 1 Signal Words 5 4 1 2 3 2 8 5 5 1 3 Laser Terminology According to ISO 11145 6 1 4 Conversion 780685 7 1 4 1 Measurements 00 0 e eee eee eee 7 1 4 2 08 2 0 cee eee 7 1 4 3 Calcium Hardness eee ee 8 1 5 Feedback Regarding Documentation 8 2 FUNDAMENTALS 00000055 9 2 1 The Excimer Laser Device 9 2 2 Functional Description of the Laser 10 2 3 System Overview 77 12 2 3 1 Designation of Sides 12 2 3 2 Exterior Views 0 13 2 3 3 Inside View Except COMPexPro F2 15 2 3 4 Optional Halogen Source 16 COHERENT LAMBDA PHYSIK 10 2005 TABLE OF CONTENTS 2 4 2 4 1 2 4 2 2 4 3 2 4 4 2 4 4 1 2 4 4 2 2 4 5 2 4 6 2 4 7 2 4 8 2 4 9 2 5 2 5 1 2 5 2 2 5 3 2 5 4 2 6 2 7 2 7 1 2 7 2 2 7 2 1 2 7 2 2 2 7 2 3 2 7 3 2 8 2 8 1 2 8 2 2 8 3 2 8 4 2 9 vi Primary System Components Laser 106 Resonator Optics aaa Energy Monitor e0 eeu High Voltage Circuit HV Power 5 3 TOY TON isa Laser Control cea Electrical System eee Gas Supply Exhaust System Cooling System 5 Purge Gas System cee eae Monitoring and Fail Safe
34. 9 2 308 Reason 2 Laser tube has a leak Solution Check the laser tube for leaks If the leak cannot be sealed call Lambda Physik service Reason 3 Pressure detector on the laser tube defective Solution Call Lambda Physik service Interlocks An interlock refers to an error message indicating a malfunction or critical interference The high voltage is switched off but the laser device remains powered up The advantages of this method are that the entire system does not need to be restarted when there is a simple malfunction and communication with the processor is still possible More than one interlock can occur at a time To receive information about the current interlocks 1 Press the function key lt F1 gt on the handheld keypad 2 Press lt Cursor left gt or lt Cursor rights to select the interlock 3 Press lt ENTER gt WARNING Risk of electric shock Storage capacitors are charged with high voltage Never open the laser housing while high voltage capacitors are charged Measurements and work on the electrical system and its equipment shall only be carried out by a skilled electrician The following interlocks may occur Overload see Section 9 2 1 on page 309 Remote see Section 9 2 2 on page 309 Temp Res see Section 9 2 3 on page 310 Ventilation see Section 9 2 4 on page 310 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Interlocks 9 2 1
35. COHERENT LAMBDA PHYSIK USER MANUAL COMPex Pro Series 10 2005 LP Part Number 265 974_E Rev AC Document Code A0510COMPPRO U S A Lambda Physik USA Inc 3201 West Commerical Blvd Ft Lauderdale FL 33309 USA Tel 1 954 486 1500 1 800 EXCIMER Fax 1 954 486 1501 eMail salesusa lambdaphysik com GERMANY Coherent Lambda Physik GmbH Hans B ckler Strasse 12 D 37079 G ttingen Germany Tel 49 551 6938 0 Fax 49 551 68691 eMail salesgermany lambdaphysik com JAPAN Lambda Physik Co Lid German Industry Center 1 18 2 Hakusan Midori ku Yokohama 226 0006 Japan Tel 81 45 939 7848 Fax 81 45 939 7849 eMail asiasales lambdaphysik com Marabun Corp Marabun Daiya Bldg 8 1 Nihonbashi Odenmacho Chuo ku Tokyo 103 8577 Japan Tel 81 3 3639 9811 Fax 81 3 3662 1349 Internet http www lambdaphysik com CONTENTS INTRODUCTION FUNDAMENTALS SAFETY SPECIFICATIONS REQUIREMENTS AND ACCESSORIES INSTALLATION OPERATION MAINTENANCE CONTROL SOFTWARE TROUBLESHOOTING GLOSSARY LIST OF FIGURES INDEX A0510COMPPRO TABLE OF CONTENTS 1 INTRODUCTION 4 1 1 1 About this 08 3 1 1 1 1 Intended Audience 0 1 1 1 2 Numbering of Chapters Pages and Instructions 2 1 1 3 Typographic Conventions 2 1 1 4 3 1 2 Safety aaa 3 1 2 1 Laser Safety Classification 3
36. INERT BUFFER RARE HAL appears in the bottom line of the display 4 Press lt Cursor Right gt and or lt Cursor Left gt to select the desired gas line 5 Press lt ENTER gt to confirm the selection COHERENT LAMBDA PHYSIK 10 2005 181 MAINTENANCE 74 3 182 6 Press lt EXE gt to start the purging procedure The message PURGE current selection appears in the bottom line of the display OFF appears in the display when the line purging has been completed NOTE A Depending on the length of the gas line this procedure has to be repeated until the gas line is completely purged B Before restarting laser operation the gas line has to be completely filled with the appropriate gas for the line see Section 7 4 1 on page 179 Exchange Halogen Gas Cylinder Purpose Replace exhausted or expired halogen gas cylinders with fresh gas cylinders NOTE After exchanging the gas cylinder use inert gas to check the corresponding line for leaks Maintenance Interval e f pressure in the gas cylinder drops below 10 bar NOTE To ensure that there is adequate gas pressure for all gas activities it is recommended that the gas cylinder be exchanged when the remaining pressure drops below 20 bar e When gas cylinder has passed expiry date Time Required e 0 75h User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Gas System Maintenance Tools and Materials e Appropriate wrench to
37. appears in the bottom line of the display 3 Press lt ENTER gt to confirm that a new fill is to be started COHERENT LAMBDA PHYSIK 10 2005 193 MAINTENANCE 194 4 Press lt EXE gt to start the NEW FILL procedure NOTE Only interrupt the procedure with BREAK in case of an emergency As the procedure is immediately interrupted and the fill is incomplete there may be insufficient pressure in the laser tube In this case manually fill the laser tube to 1050 mbar with inert gas see Section 6 4 9 on page 171 or restart the new fill procedure At the start of the new fill the halogen filter ratio is checked If it exceeds 99 the message RENEW HALOGEN FILTER is displayed and the NEW FILL procedure terminates Replace the halogen filter The vacuum pump starts to evacuate the tube the current pressure and the message NEW FILL EVAC are displayed After reaching 30 mbar the vacuum pump stops The laser then enters a two minute stand by phase for a laser tube gas leak check The message NEW FILL WAIT is displayed If everything is all right the message changes to NEW FILL FILL The individual gases are then filled into the laser tube at the partial pressures indicated in the gas menu OFF appears in the display when the new fill has been completed CAUTION Penetration of atmospheric oxygen can damage the laser tube Evacuation of the laser tube was most likely inhibited by a leak Each attempt t
38. diameter 150 mm min flow rate 200 m3 h e Additional blower when exhaust is longer than 5 m e Additional exhaust line when exhaust line exceeds 5 m Preconditions e Mains power supply connected COHERENT LAMBDA PHYSIK 10 2005 117 INSTALLATION Installing the Exhaust Line 1 Usee the allen key to remove the two screws at the exhaust fan outlet on the rear side of the laser device see Figure 50 Figure 50 Loosen the exhaust fan outlet 2 Connect the exhaust pipe to the exhaust fan outlet using the two 4 mm allen screws that have just been removed WARNING Toxic hazard Lead laser and vacuum pump exhaust hose to an appropriate ventilation system Do not connect the exhaust to breathing air systems i e air conditioning or ventilating systems 3 Connect the other end to the exhaust tube to a suitable ventilation output 4 Check that the air input filters on the front of the laser are fitted properly and are not obstructed Tests and Adjustments 5 Switch on the laser main switch 6 Check that the exhaust fan mounted on the top rear of the laser device is working and sucking air out of the laser device 7 Check that there are no leaks around the exhaust pipe clamp If necessary seal any leaks 8 Switch off the laser main switch 118 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation 5 2 7 2 Connect Laser Tube Exhaust Line Including Vacuum Pump
39. e Helium leak tester or liquid leak tester e g SNOOP NOTE Make sure that the chosen leak tester is suitable for use in the environment in which the laser is installed Liquid leak testers are for instance not permitted in cleanrooms e Ethanol and cleaning paper when SNOOP was used CAUTION Incorrect handling can cause unnecessary downtime Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas supply system pressures below 20 bar abs may be critical e Gases as specified in Section 4 2 2 on page 76 Gas cylinders with a remaining pressure of at least 10 bar abs Preconditions e Laser device fully installed e Pressure regulators and cylinder valves in all gas lines closed NOTE The handling of pressure regulators and gas cylinder valves is described in Section 6 2 2 on page 150 Depending on the configuration of the gas supply system a shut off valve situated between pressure regulator and laser device may be used to open and close the gas lines The gas lines up to the shut off valve have to be checked for leaks before starting this procedure Preparation 1 Switch on the laser device see Section 6 2 3 on page 153 Checking for Vacuum Leak Tightness CAUTION Incorrect operation can damage the pressure regulator If pressure is applied to a pressure regulator with low sec
40. flat and smooth working surface e Lens cleaning tissue e Pressurized air or inert gas that is particulate and oil free e Polishing powder e g vienna chalk from service case e Distilled water e Optics grade Ethanol or Methanol e Lead pencil CAUTION Risk of damaging optical components through contamination Contamination can cause serious damage to the optical components Always wear disposible plastic gloves when working with and on optical components e Disposable skin tight plastic gloves Maintenance Interval e Every 10 to 30 million pulses e Every 3 to 5 new gas fills Time Required e 1 0h Preconditions e Contaminated mirror removed from the mirror mount see Section 7 6 2 on page 208 COHERENT LAMBDA PHYSIK 10 2005 211 MAINTENANCE 212 Preparation 1 Place three layers of lens tissue on a clean dry and smooth surface glass plate CAUTION Risk of damaging coated optics Use only ethanol to polish the coated side of optics Polish carefully with gentle pressure Wear disposable plastic gloves Avoid touching the surface of the optic 2 Use pressurized air or inert gas to blow off any loose particles from both sides of the optic 3 Check that the optic has a mark indicating the coated surface NOTE A The coated side of the mirror only requires cleaning when contaminated e g through fingerprints or dust B The coated side of the window is usually marked with a horizontal line a
41. follow the flowchart Beam Energy too Low see Section 9 7 on page 314 COHERENT LAMBDA PHYSIK 10 2005 301 TROUBLESHOOTING 9 1 16 9 1 17 302 No Capacity Left OFF 11 This is an error message relating to the halogen source Please refer to the halogen source s manual for further information No Gas Flow XX 3 No gas flow has been detected in one of the gas lines With control from an external PC XX represents the name of the operating mode OPMODE at which the error occurred e g PASSIVATION FILL PURGE RESERVOIR etc Reason 1 Gas cylinder valve not opened Solution Open the gas cylinder valve Reason 2 Incorrect pressure regulator setting Solution Set the pressure regulator to the necessary value see Section 4 2 2 on page 76 Reason 3 Gas cylinder pressure too low Solution Exchange the gas cylinder see Section 7 4 3 on page 182 or Section 7 4 4 on page 187 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Warnings and Error Messages 9 1 18 No Vacuum OFF 9 This error message is displayed after a safety fill NOTE With a handheld keypad do not confuse the warning and the error message No Vacuum The warning is a function of the optional halogen source while injecting or filling the laser tube with halogen The error only occurs after an unsuccess ful evacuation of the laser tube Symptom 1 Vacuum Pump did not r
42. on the handheld keypad FLUSH current selection INERT BUFFER RARE HAL appears in the bottom line of the display 4 Press lt Cursor Right gt and or lt Cursor Left gt to select the desired gas line 5 Press lt ENTER gt to confirm the selection 6 Press lt EXE gt to evacuate the selected gas line between the laser head valve and the gas cylinder valve The message FLUSH current selection L appears in the bottom line of the display The vacuum pump runs for two seconds to evacuate the gas line NOTE Depending on the length of the gas line this procedure has to be repeated until the gas line is completely evacuated Filling the Gas Line with Fresh Gas 7 Open the gas cylinder valve that was closed in step 1 8 Repeat the procedure at least once with the gas supply open i e from step 2 to completely fill the line Purge Gas Line Purpose Evacuate the gas line for five seconds and then fill the line with the gas connected to the INERT connection helium This is for example necessary to perform a leak test with a helium leak tester or to remove impurities from the system when the laser is not used for a number of days User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Gas System Maintenance Tools and Materials CAUTION Incorrect handling will cause unnecessary downtime Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is
43. the mains power supply E Line Voltage 230V Line Voltage 110V Line Frequency 50Hz Line Frequency 60Hz Pos 4 905221 Label indicating the power supply unit s fuses M03 F6 M03 F5 MO3 Mo3 M03 Mo3 F4 F3 F2 F1 Pos 5 900663 Fabrication number of the laser device Lambda Physik Gottingen FN User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Labels Pos 6 904489 Laser tube identification label 09 LAMBDA PHYSIK SERIEN NR SIEHE SCHLAGZAHL SERIAL NO SEE ENGRAVED NUMBER MANUFACTION YEAR MAX BETRIEBSDRUCK MAX OPERATION PRESSURE MAX BETRIEBSTEMPERATUR e E p MAX OPERATION TEMPERATURE MIN BETRIEBSTEMPERATUR MIN OPERATION TEMPERATURE VOLUME LITRE GAS PROZESSOR oOo GAS PROCESSOR ELEKTRODEN ABSTAND ELECTRODE GAP Pos 5 900641 Label warning of the risk of electrical shock or even electrocution if the module s and or component s situated near to or behind the cover to which the label is affixed are touched or treated improperly Only correspondingly qualified and authorized personnel shall open and work on the indicated module s and or component s COHERENT LAMBDA PHYSIK 10 2005 69 SAFETY Pos 5 380289 Label naming the upper remote plug and describing the lower power supply plug REMOTE 0 05 4 230V 10A POW ER 70 User Manua
44. 166 COD should be used to avoid temporary laser stand by while capacitors are charged that would otherwise cause the laser to self fire the repetition rate is less than 50 Hz and jitter as well as delay are not critical The COD command can also be used to determine the COD time delay as it is displayed during selection of the COD Preconditions e Laser device switched on and laser ready to operate laser radiation not being emitted Toggling between COD On and COD Off 1 Press the function button lt F10 gt If the current status is ON the time delay is displayed in usec This is the time between trigger signal and laser pulse which is the time the capacitors need to be charged before each laser pulse 2 Press either lt Cursor Right gt or lt Cursor Left gt to select ON or OFF 3 Press lt ENTER gt to confirm the selection The COD status is saved If COD has been switched on COD is displayed on the handheld keypad Select and Change Gas Menu Purpose Select the gas menu for the gas mixture appropriate to the wavelength at which the laser is to be operated The gas menu displays the following parameters Menu number Gas mixture Partial pressures sequentially Requirements e Laser device switched and laser ready to operate laser radiation not being emitted Selecting and Changing the Gas Menu 1 Press the lt MENU SEL gt key A short form of the current menu wil
45. 3 74 7 4 1 7 4 2 7 4 3 7 4 4 7 5 7 5 1 7 5 2 7 5 3 7 5 4 COHERENT LAMBDA PHYSIK 10 2005 Operating Modes and Parameters 160 Change Trigger Mode 160 Change Repetition Rate 161 Change Running Mode 162 Change Beam Output Energy Value 163 Change Charging Voltage 164 Set Up and Service aaa 165 Select Charge On Demand COD 165 Select and Change Gas Menu 166 Reset Gas Menu to Factory Settings 167 Select Gas 006 168 Activate Temperature Control Optional 168 Read Total Counter 05 169 Read User Counter aaa 170 Reset User Counter 3 170 Emergency Fill with Inert Gas 171 MAINTENANCE 173 Laser Logbook 173 Maintenance Schedule 174 COMPexPro 100 COMPexPro 200 174 A F kara ede tahanan 175 Lockout Tagout a 176 Gas System Maintenance 179 Flush Gas Line eee eee 179 Purge Gas 1186 777777 180 Exchange Halogen Gas Cylinder 182 Exchange Rare Buffer or Inert Gas Cylinder 187 Laser Tube Maintenance 192 New Fill oi ticas lada heed edd 192 Manual Halogen Injection 195 Purge Laser Tube nnua 196 Re Passivate Laser Tube 198 xi TABLE OF CONTE
46. 3 2 1 4 OZONO AI 48 3 2 2 Personnel Safety 49 3 2 2 1 Laser Radiation Safety 49 3 2 2 2 Electrical Safety 52 3 2 2 3 Gas Safety 222220 53 3 2 2 4 Pressure Vessel Safety 55 3 2 2 5 Seismic Protecti0N o oo 55 3 2 3 Constructive Safety Features 56 3 2 3 1 Radiation Safety Features 56 3 2 3 2 Electrical Safety Features 58 3 2 3 3 Pressure and Gas Handling Safety Features 59 3 2 3 4 Fire Safety Features 59 3 2 3 5 Mechanical Safety Features 60 3 2 3 6 General Safety Features 60 3 3 LabelS caca tia AN 61 3 3 1 Labels on Outside of Laser Device 62 3 3 1 1 Beam Exit 506 7 62 3 3 1 2 Connection Side oooooooo 64 3 3 2 Labels Inside Laser Device 67 COHERENT LAMBDA PHYSIK 10 2005 vii TABLE OF CONTENTS 4 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES an kaka a RA 71 4 1 Laser SpecificationS ooooommo 71 4 1 1 COMPexPro 100 Series 72 4 1 2 COMPexPro 200 Series 73 4 1 3 COMPexProF2 Series sia aba lean eis 74 4 2 Facilities 3 wc oi 75 4 2 1 Environmental Conditions 75 4 2 1 1 Transport and Storage 75 4 2 1 2 Operations ves oo ois waar a a aa 75 4 2 2 DASS AKA a Dangan Oe 76 4 2 2 1 Single Gases 0000
47. 53 Halogen gases ss ars Pee cle eae a ea eed Peas 47 Halogen injection HI 0 eee eee 32 33 331 Manual Hil ma pedir dee duke taxa ban LG NT whales 195 Halogen SOUrCE cion oi eae hp peed eed a eee 331 Handheld keypad 0 128 140 331 Hazard warning labels 0 000 e eee eee nae 61 User Manual COMPexPro Series A0510COMPPRO INDEX A0510COMPPRO Hazardous energy sources 2000 176 Head valve Gag systemi nas Oxted ardilla 25 Heating voltage pdng rad Ra wares 20 FIGWUIMs BARA 122 HI PGRalgontnm gt 5 ka NGA teas who PADYAK ALALA 34 High reflecting HR mirror 5 18 High voltage electric energy Physical 4210965 Nak dire NN NA 46 Safety guidelines 002 52 High voltage circuit gt 19 High voltage discharge 00 eee eae 17 HV Constant mode 00000 nas 32 pelecthom 2 8 162 GN BA athe ame oS mak BB Bae 145 HV power supply module 0 0 eee 20 l NEN GAS LA A A PD ee er eed 331 Inert gas cylinder Exchange ad heed de eee lo a 187 Information separator Use of in remote commands eee eee eee 257 Installation ia ee ee se ANG LAG 101 ExMAUSTIINGS coi gt Reeder ace tc Pada Bae Dd 117 Floor loads E E E ee 103 Gas AA Woe toe 122 Handheld keypad 0 128 Laser device 200000 101 Laser tube exhaust line 0 119 Mains power supply line 0 0 eee eee 116 Remote PG ck it ee Sua
48. 76 Gas cylinders with a remaining pressure of at least 10 bar abs User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Tube Optics Maintenance CAUTION Risk of damaging optical components through contamination Contamination can cause serious damage to the optical components Always wear disposible plastic gloves when working with and on optical components e Disposable skin tight plastic gloves Preconditions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device switched on and laser ready to operate no radiation being emitted e Gas cylinder valves open and pressure regulators correspondingly set for secondary pressures see Section 4 2 2 on page 76 Flushing the Laser Tube 1 Ensure that the cylinder valve and pressure regulator in the inert gas line are closed 2 Open the valve on the inert gas cylinder 3 Setthe pressure regulator in the inert gas line to the specified value see Section 4 2 2 on page 76 4 Press lt PURGE RESERVOIR gt A list of selections appears in the bottom line of the display 5 Press lt Cursor Right gt and or lt Cursor Left gt to select WIN EXCHANGE 6 Press lt ENTER gt to confirm
49. B Cooling water outlet Specifications Connections 10 mm SERTO Piping Y inch length 3 m COHERENT LAMBDA PHYSIK 10 2005 93 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES 4 3 7 94 Air Intake and Exhaust Connections The laser device has two air intakes on the beam exit side see Figure 39 A and a central exhaust outlet on the connection side B The exhaust is to be connected to an appropriate industrial ventilation system see Section 4 2 5 on page 83 NOTE To ensure an adequate supply of cooling air the laser device has to be situated in the specified maintenance area see Section 4 3 9 on page 98 a a EN 000000 S Oooo pan o o o 0 0 o o Figure 39 Location of air intake and exhaust Key to Figure 39 A Air intake B Exhaust Specifications Diameter 150 mm Hose length max 3m If the total length of the exhaust line exceeds 5 m an additional blower is required User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Connections and Space Requirements 4 3 8 4 3 8 1 4 3 8 2 Control Lines This section describes the COMPex Pro interfaces Serial Interface The laser can be controlled by an external PC system using the interface specified in this section The connector is a 25 pole Sub D type male connector PIN Signal Specification Description 2 TXD O RS232 Tra
50. C This automatically increases or decreases the water flow as required to ensure that the respective module operates at the correct temperature The check valve G ensures that cooling water does not re enter the laser device at the cooling water outlet Apart from turning on the external water supply and ensuring that the outlet water flows into an appropriate drain the cooling water circuit requires no operation or routine maintenance Purge Gas System UV light reacts with oxygen to create ozone Apart from creating a health hazard for more information see Section 3 this oxidizes the surface of the optics and decreases laser performance To prevent ozone production the beam path can be purged with nitrogen purge gas The external purge gas supply is connected to the corresponding connection on the laser head The pressure of the purge gas entering the purge gas system is monitored by a pressure switch Apart from turning on the externally supplied purge gas and regulating the pressure of the gas in the external circuit the purge gas supply requires no operation or routine maintenance User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Monitoring and Fail Safety Systems 2 5 2 5 1 2 5 2 2 5 3 Monitoring and Fail Safety Systems Watchdogs The COMPexPro like all of Lambda Physik excimer lasers using serial data rings has watchdogs to ensure functional checks Watchdogs are switches which
51. COHERENT LAMBDA PHYSIK 10 2005 85 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES a 3531 Thi J 25 CUA Gu D a fg 139 9 603 750 5 j 30 315 _ 30 o o nni E a i a e A Wu o o 2 to O O o O k co Cl 9 141 5 518 io Pa x 8 TI 35 0 0 9 go Fo 354 gt M Figure 33 Dimensions COMPexPro 200 Series Key to Figure 33 a Connection side A Operating panel with fuses b Service side B Air outlet c Beam exit side C Thyratron adjustment panel cover d Top D Beam exit E Foot 86 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Connections and Space Requirements 4 3 2 Beam Exit Position The COMPex ro is equipped with height adjustable feet These enable the beam exit position to be vertically adjusted between 378 mm and 418 mm The position of the beam exit aperture is shown in Figure 34 A The beam exit is 141 5 mm away from the rear foot 353 1 25 30_ 1141 5 Figure 34 Beam exit position COHERENT LAMBDA PHYSIK 10 2005 87 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES 4 3 3 88 Foot Configuration The laser device is equipped with four feet To compensate for permissible variations in the flatness of the floor the four feet are height adjustable The adjustment range of each foot is indicated in Figure 35
52. Consequently halogen has come in contact with ambient humidity Solution Replace the corroded lines Reason 2 Halogen line has been purged prior to a standstill but the halogen gas cylinder was not sealed properly Solutions 1 Check the pressure regulator in halogen line 2 Check the valve on the halogen gas cylinder 3 Replace the corroded lines and pressure regulators User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Device Does Not Start 9 6 Laser Device Does Not Start Symptom After turning on the laser device with the mains and the key switches nothing happens lamps do not light no sound Reason 1 Mains supply line not properly connected or defective Solution WARNING Risk of electric shock The mains supply line power cord shall only be replaced by a skilled electrician or by instructed persons under the supervision and guidance of a skilled electrician and in accordance with electrical engineering rules and regulations Check and if necessary replace the mains supply line Reason 2 Incorrect main supply voltage and frequency Solution Check that the laser device is set to the correct mains supply voltage and frequency COHERENT LAMBDA PHYSIK 10 2005 313 TROUBLESHOOTING 9 7 314 Reason 3 Defective fuse s Solution CAUTION Risk of damaging power supply A blown fuse suggests a malfunction in the power supply
53. Constant Mode HV CONST Running Mode that keeps the charging current constant Thus the beam energy slowly decreases during operation until the next New Fill see Section 2 7 on page 31 HVrepl See Treshold Voltage Inert Gas that does not react with any other substances Normally helium Interlock A safety feature that occurs in case of a laser malfunction switching the laser into a safe mode normally off COMPexPro laser devices are equipped with hardware and software interlocks Hardware interlocks are mechanically realized by switches Software interlocks are activated when a predefined limit value is exceeded COHERENT LAMBDA PHYSIK 10 2005 331 GLOSSARY 332 Laser Abbreviation for Light Amplification by Stimulated Emission of Radiation According to ISO 11 145 laser means the lasing unit itself see also Laser Device Laser Device According to ISO 11 145 the laser device includes the laser and its supply unit power supply cooling supply etc see also Laser Mirrors Mirrors are the part of the laser optics that build up the resonator The rear mirror is a highly reflective mirror the front mirror is translucent thus acting as an output coupler In most cases it has a dielectric coating depending on the operating wavelength of the laser New Fill Evacuates the laser tube and refills it with fresh gases according to the settings in the Gas Menu NGR Abbreviation for No Ga
54. Half Maximum 72 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Specifications COMPex ro 200 Series CDRH class IV laser classification Power lt 30 W Pulse shape temp gt 10ns Pulse to pulse stability lt 3 for 1 Sigma Characteristic Type ArF KrF XeCl XeF Unit Wavelength 193 248 308 351 nm Max pulse COMPexPro 201 400 700 300 mJ energy F Version COMPexPro 201 400 mJ Cl Version COMPexPro 205 400 700 300 mJ F Version COMPexPro 205 400 my Cl Version Max repetition COMPexPro 201 10 10 10 10 Hz rate COMPex ro 205 50 50 50 50 Hz Max average COMPexPro 201 4 5 3 W power F Version COMPexPro 201 3 5 0 W Cl Version COMPexPro 205 15 30 15 W F Version COMPexPro 205 20 W Cl Version Pulse duration COMPexPro 200 0 25 25 20 ns nominal Serie FWHM Beam dimensions COMPexPro 200 24x6 12 24x6 12 24x6 12 24x6 12 mm Serie v Beam divergence COMPexPro 200 3 x 1 3x1 3x1 3x1 mrad Serie v xh a measured at low repetition rate 5 Hz b average value measured at max repetition rate c typical value FWHM Full Width Half Maximum COHERENT LAMBDA PHYSIK 10 2005 73 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES 4 1 3 COMPex Pro Fo Series CDRH class IV laser classification Power gt 30 W Pulse shape t
55. Helium He is required to purge the laser tube and the gas lines Neon Ne is required to ensure the safe transport and storage of the laser device Nitrogen N2 is required to purge the beam path and optics modules of the COMPex Pro Fo User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Facilities External Excimer Laser Gas Supply The laser device s gas supply system allows connection to either separate gas cylinders or a single premix gas cylinder When supplied from separate gas cylinders the necessary quantity of each gas will automatically be taken from the appropriate gas cylinder during the automated gas filling procedure The gases are mixed inside the laser tube No additional external equipment is required to proportion or mix the gases ready for use Operation with a premix gas cylinder is recommended for low duty cycle applications that consistently use the same laser wavelength In this case one cylinder of premix excimer laser gas and separate cylinders with the necessary additional operating gases e g helium and nitrogen are required Section 4 2 2 1 specifies the individual laser gases required to supply the laser device from separate gas cylinders Section 4 2 2 2 specifies the exact quantity of each of the individual gases that are required to provide the optimum gas mixture for the desired wavelength The information in this section can be used as a guide for ordering an appropriate
56. Hz 1 3 3 0 kVA 13A 120 V Version COMPex ro 102 50 60 Hz 1 3 1 5 kVA 12A COMPex ro 110 50 60 Hz 1 3 3 0 kVA 25A COMPexPro Fo 50 60 Hz 1 3 3 0 kVA 25A COMPexPro 201 50 60 Hz 1 3 1 5 kVA 12A COMPexPro 205 50 60 Hz 1 3 3 0 kVA 25 A NOTE The electrical connection is described in Section 4 3 5 on page 92 COHERENT LAMBDA PHYSIK 10 2005 81 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES 4 2 4 82 Cooling Water The COMPexPro 102 and COMPexPro 201 are fully aircooled Installation of the water cooling is only required for COMPexPro 110 COMPexPro F and COMPexPro 205 The lasers are optionally equipped with built in temperature stabilization to optimize the gas temperature of the laser tube by regulation of the water flow CAUTION Risk of corrosion of the laser heat exchange Do not use deionized or distilled water NOTE A Suspended particles in the cooling water can cause sedimentation in or even clog the cooling circuit We therefore strongly recommend the installation of a particle filter in the external water supply line B At high duty cycle more than 1000 liters of cooling water are needed a day For cost as well as environmental reasons we recommend the use of a closed circuit cooling water system with a water chiller Temperature Range at water inlet 5 to 20 C for 100 duty cycle Flow rate 1 to 5 l min depending on water temperature pH value 6 to 9 Pressure less than 4 bar abs He
57. Invisible Laser Radiation When Open AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION Pos 2 901031 Beam output safety sign Label indicating that laser radiation is emitted from the aperture to the left of the label AVOID EXPOSURE VISIBLE AND INVISIBLE LASER RADIATION IS EMITTED FROM THIS APERTRE COHERENT LAMBDA PHYSIK 10 2005 63 SAFETY 3 3 1 2 Connection Side Figure 30 Labels on connection side Pos 4 904025 Label warning of exposure to laser radiation when the mirror access panel is removed DANGER Visible And Invisible Laser Radiation When Open AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION 64 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Labels Pos 5 90512101 This complying with IEC 60825 that provides safety instructions for when the laser device is being operated with a handheld keypad or remote computer at distances at more than 2 m from the laser device ATTENTION IF CONTROLLER AND LASER ARE SEPARATED MORE THAN 2 METERS ALSO THE CONTROLLER HAS TO BE EQUIPPED WITH APPROPRIATE WARNING LABELS AND EMISSION INDICATOR SEE MANUAL Pos 6 90103401 Label to certify that the laser complies with FDA radiation performance standards This product complies with FDA radiation performance standards 21 CFR Chapter 1 Subchapter J Pos 7 90483301 Label warning of the pre
58. LAMBDA PHYSIK 10 2005 129 INSTALLATION 5 2 10 2 5 2 11 130 Connect a Remote PC A remote PC can only be connected when the handheld keypad is disconnected from the laser device The remote PC is used to run the COMPex Pro through an external program written by the user that communicates with the laser device through the serial interface Tools and Materials e RS232C wire with 25 pin D type connector see Section 4 3 8 1 page 95 e Appropriate screwdriver for the RS232 plugs Preconditions e Laser device positioned at the final installation location e Supply lines connected Connecting the Remote PC to the Laser Device 1 Connect the RS232 cable to the laser device s RS232 port see Figure 58 on page 129 2 Fasten the plugs screws at the port 3 Connect the RS232 cable to a serial port on the Remote PC 4 Fasten the plugs screws at the port Leak Test and Passivate Laser Gas Lines Purpose Test the gas lines for leaks After a successful leak test clean the gas system and passivate the halogen gas line The sequence in which this procedure has to be executed is evacuate the gas lines and test for underpressure leaks fill the gas supply system with inert gas helium clean the excimer laser gas lines passivate the halogen gas line and internal gas system User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation Tools and Materials e 4mm allen key
59. LOW LIGHT The beam energy is too low The energy monitor does not detect laser pulses after the trigger pulses at least 30 of all pulses within a period of 10 seconds are missing Sheet 1 of 2 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Operating Modes No 27 Description WRONG PRESSURE The tube pressure is not within the permissible range 20 outside of the tube pressure specified in the gas menu 29 Memory check malfunction The gas data is lost 30 A leak in the laser tube has been detected after an optic change 31 TIMEOUT There has been no data transmitted through the RS232 within a second 33 HALOGEN PRESSURE TOO HIGH only halogen source The preset partial pressure for the halogen in the gas menu is too high for a halogen source gt 15 mbar 34 HI IN PREP only halogen source A halogen injection is being prepared 35 NOT AVAILABLE only halogen source A function has been selected that is not available with the halogen source e g the EGY PGR mode 36 Charge On Demand COD is switched on 37 WARNING REPRATE FOR COD gt 50 Hz Charge On Demand COD is active and the repetition rate entered is higher than 50 Hz The repetition rate has been reduced to the highest value permissible for COD of 50 Hz 39 INERT VALVE CLOSED The internal valve has been closed after a manual fill with inert gas reason the
60. Maintenance Removing the Beam Splitter 4 Use a 3 mm allen key to loosen the five fixing screws securing the cover of the bending unit see Figure 87 A Figure 87 Energy monitor bending unit F gt version 5 Carefully pull out the beam splitter see Figure 88 Figure 88 Beam splitter Cleaning the Beam Splitter 6 Clean beam splitter in the same way as uncoated optics see Section 7 6 3 on page 211 Installing the Beam Splitter 7 Re insert the beam splitter into the clamping bracket with slight pressure 8 Attach the bending unit cover to the bending unit and use a 3 mm allen key to tighten the five fixing screws 9 Refit the service panel COHERENT LAMBDA PHYSIK 10 2005 229 MAINTENANCE 7 7 3 7 7 3 1 230 Exchange Energy Monitor Attenuators Purpose Exchange the energy monitor attenuators This is only necessary when the automatic adjustment of the energy monitor signal gain during energy monitor calibration was not successful This procedure differs for the Fo version see Section 7 7 3 2 on page 231 The procedure for all other versions is described in Section 7 7 3 1 NOTE This procedure is performed as necessary during the energy monitor calibration procedure Consequently there are no separate lists of maintenance intervals preconditions or tools and materials Changing the Attenuator COMPexPro 100 COMPexPro 200 1 Press BREAK to stop the calibration of the energy mo
61. Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Accessories 4 4 4 4 1 4 4 2 Maintenance areas Position in Fig Maintenance area Dimensions Area m2 41 and 42 B mm COMPexPro 100 and COMPex Pro F2 Footprint 1191 5 x 375 0 45 A Beam exit side 500 x 375 0 19 B Service area 1191 5 x 1000 1 19 0 Connection side 800 x 375 0 30 COMPex ro 200 Footprint 1591 5 x 375 0 60 A Beam exit side 500 x 375 0 19 B Service area 1591 5 x 1000 1 59 0 Connection side 800 x 375 0 30 Accessories Vacuum Pump Type Becker VTC 6 2 The vacuum pump is connected to the laser device with a 3 m supply cable and does not require an additional power supply For more information see the attached vacuum pump manual Halogen Filter Type Standard Supplier COHERENT LAMBDA PHYSIK order number 261 068 The halogen filter is fitted to the vacuum pump and requires no further connections COHERENT LAMBDA PHYSIK 10 2005 99 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES 100 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO 5 1 5 1 1 INSTALLATION This chapter describes the installation of the laser device It must be read prior to initial installation after transportation prior to re installation after storing the laser device Transport and Unpacking This section describes the internal transport and unpacking of the laser d
62. Na nanan Ha aad Mord wd 130 Remote socket 0 0 00 c eee eee eee ee 114 VACUUM PUMP 116 Water lines n eiaa e E e eee 125 Interlock a nA e ete o NP NOTA der a 0001 0 MY 29 331 Overa cai a a es 309 Remote marn O PAE 00558 309 Temp ROS ma pna DRAG oe A REAS 310 Ventilation oi ie deua a a aea a ees 310 Internal triggering saanuna anaa 30 lonizing radiation Radiation limit 46 K Key switch aea a oaa eee 60 139 L Labels ioien tit a a aaa baaa a Te E 61 COHERENT LAMBDA PHYSIK 10 2005 345 INDEX 346 Laser DEMO ZA NN a PA Aa ae ek aie 6 Slade 155 Stop a di ltda a Na aa ais rasa 157 Laser assembly aE eS 6 AA Lasericontrol SyStem y vai A A AAA 21 Laser device Does notistart pin aa Kain 313 Installato EAE a a N 101 Maintenance area siase ondi raa NEE eee 98 Power consumption 0 115 SHUU GOWN asides rs whee Ka his RE E 158 Star UPisgss roi ANAN ANAN 0 MAA tice 153 Transport and lifting with rigid packaging 106 Transport and lifting without rigid packaging 109 Laser gas lines Preparation ii mah Na KA tite sw RIRS 130 Laser gases Newcastle ias 192 td Seles a 159 5 Laser light Characteristics msa sina wh pee hee a and LNG Ea pee 10 Laser Logbook ak Bana a ante bm 58058 E RARS 173 Laser parameters 272 Laser radiation Physical
63. Purpose Assemble and connect the vacuum pump and halogen filter to the laser device During laser operation the laser tube has to be evacuated to remove the spent excimer laser gas mixture This gas mixture contains toxic halogens which are filtered out of the exhaust gas by a halogen filter NOTE Consult the vacuum pump manual attached to this manual for a fundamantal description of the installation of the vacuum pump and basic function tests Tools and Materials e Vacuum pump e Vacuum hose e Gas exhaust hose 34 flexible hose e 36 mm wrench e 19mm wrench e 6mm allen key Preconditions e Laser device positioned at the final installation location COHERENT LAMBDA PHYSIK 10 2005 119 INSTALLATION 120 Installing the Laser Tube Exhaust Line NOTE While mounting the vacuum pump and halogen filter five plugs are to be removed Keep these plugs in the service case for future use 1 Remove the plug from the vacuum pump see Figure 51 Figure 51 Removing plug from vacuum pump 2 Remove the plastic plug from the halogen filter 3 Set two of the halogen filter threaded rods into the anti torsion fork with the arrow on the filter pointing downwards see Figure 52 Figure 52 Inserting halogen filter User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation 4 When the anti torsion fork is not properly adjusted use the 6 mm allen key to loosen the anti torsion fork
64. Transport and Unpacking Procedure Transport Lifting with Rigid Packaging Incoming Goods Inspection Remove Rigid Packaging Transport Lifting without Rigid Packaging Remove Anti Static Inner Cover Installation ee 5 2 1 5 2 2 5 2 3 5 2 4 5 2 5 5 2 6 5 2 7 5 2 7 1 5 2 7 2 5 2 8 5 2 9 5 2 10 5 2 10 1 5 2 10 2 5 2 11 5 2 12 5 2 13 Installation Procedure Position Laser Device Visual Check 0 Transport Locks 0 Connect Remote Socket Connect Mains Power Supply Lines Connect Exhaust Lines Connect Laser Device Housing Exhaust Line 5 Connect Laser Tube Exhaust Line Including Vacuum Pump Connect Gas Lines Connect Water Lines COMPexPro 110 COMPexPro 205 COMPexPro Fa aa dat aaa Ka nawa Connect Signal Lines Connect the Handheld Keypad Connect a Remote PC Leak Test and Passivate Laser Gas Lines Leak Test Laser Tube Fill Laser Tube New Fill 112 113 113 114 115 117 117 119 122 125 128 128 130 130 135 TABLE OF CONTENTS 6 OPERATION x25200 waaa cra kaa 137 6 1 Operating and Display Elements 138 6 1 1 Operating Panel o 138 6 1 1 1 Main Switch
65. alter the logical level as soon as the reset pulses stop The watchdog is reset by the control at least three times a second Should the pulses stop as in the case of a breakdown this is recognized by the watchdog belonging to the module The module is switched to a safe inactive state Data Ring Selftest After the system is booted a self test is automatically carried out in order to test the data ring and the modules for error free interaction The serial structure of the data ring requires all modules working properly and the controller receiving a correct response for a transmitted signal If this does not occur the controller sends a failure message In this situation it is not possible for the controller to localize the error In case of a malfunction the control interrupts the transmission of light signals in the data ring To locate the defective module the laser device has to be restarted Interlocks Interlock refers to an error message indicating a malfunction or critical interference in the functioning of the laser The response of the laser to the interlock may vary when the user needs to be protected the laser is completely switched off When the malfunction is correlated to the laser only the high voltage is switched off and disabled The advantages of this method are no need for the entire system to be restarted in case of a straight forward malfunction communication with the processor is
66. an adequate gas supply to perform gas actions Depending on the configuration of the gas system pressures of below 20 bar abs may be critical e Gases as specified see Section 4 2 2 on page 76 Gas cylinders with a remaining pressure of at least 10 bar abs Preconditions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device switched on and laser ready to operate no radiation being emitted e Gas cylinder valves open and pressure regulators correspondingly set for secondary pressures see Section 4 2 2 on page 76 NOTE When the gas supply is closed the message NO GAS FLOW appears when purging the line Purging the Gas Line 1 Close the pressure regulator in the gas line that is to be purged 2 Ensure that the inert gas cylinder valve is open and the pressure regulator is set to at least 4 bar abs NOTE The pressure regulator has to be set to at least 4 bar to completely purge the line between the gas cylinder valve and the laser head With lower pressure settings residues may remain in the line between the pressure regulator and the gas cylinder valve 3 Press lt PURGE LINE gt on the handheld keypad PURGE current selection
67. are required for halogen gases Gas Cabinets WARNING Toxic gas hazard Halogens are extremely reactive and resistant oxidants Avoid inhalation and skin contact with halogens Gas cylinders especially those containing fluorine and hydrogen chloride gas mixtures pose a safety hazard because of the risk of leakage In order to diminish this risk safety gas cabinets are available Please contact your gas supplier for further information COHERENT LAMBDA PHYSIK 10 2005 91 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES 4 3 5 Electrical Connection The COMPex ro is connected to the mains power supply socket through a 3 m long mains cable that is hard wired to the laser device see Figure 37 A A wall socket configured according to the specifications indicated in Section 4 2 3 has to be located in the immediate vicinity of the laser device a 3000000 KI cago Figure 37 Position of the mains connection Specifications Type of mains plugs IEC Standard 92 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Connections and Space Requirements 4 3 6 Cooling Water Connections The location of the cooling water connections on the laser device are indicated in Figure 36 Aa 1000000 S ooo A N 8 0 0 0 0 o g Figure 38 Cooling water connections Key to Figure 38 A Cooling water inlet
68. cece eee eee 158 Signal words Usage Manual wis serca 4 Skin safety guidelines 000 cee eee 51 Software Operating modes 0201 00055 208 Software version 0 255 Solenoid valve Gas Systemsa ganda A woke Saudades Kan 23 Special characters Use of incommands oessa rri 200 eee eee 257 Specific safety aspects eee eee 44 Start up laser device auauna aaa 153 Static gas lifetime 02200 330 Status CODES eae eee dee dahl AA a e 270 Output and display 0 00 e eee eee 38 Stimulated emission 000020 eee 10 Stop lasenn raene Na Awash panes as Mace peace 157 Storage CapacitOrs sees kA BNG aed Meee as NGA 19 20 Symbols in this manual cece eee eee 5 T Temperature control function 5 168 Temperature sensor Cooling system 0 eee 28 Temporal mode are e a ttt 9 Threshold voltage cece eae 334 TAYratron eek eed gee baie deeds 334 DESCAPION i tee e AY a LANG BRUHA 20 Heating voltages 2000222 eee 20 243 Location of adjustment 6 cee eee 15 Maintenance 0000 242 Total counter Reading kaa ann is oe Ree 169 Toxic gases Safe working practices 2 20 53 Toxic hazards 0 40 42 53 Trademarks ciiu an all we eee eaten eas Paes hs 3 Transport packaging DIMENSIONS Na NN 5 A 103 Removal po AA PANA Kal NG PATAG EN RON 107 Remove rigid packaging 0 107 Removing the inner covers a 110 Weights
69. cooling water is turned on and that there is no water leak If the problem remains call Lambda Physik service Ventilation The motor which drives the gas circulation fan in the laser tube is protected by this interlock Reason 1 Malfunction of the gas circulation fan motor Solutions 1 Ensure that the motor is electrically connected 2 Ensure that the fan motor is not damaged If the problem remains call Lambda Physik service Reason 2 Damaged fan or fan bearings Solution Call Lambda Physik service User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Self Firing 9 3 9 4 Self Firing The laser fires a light pulse without receiving a trigger pulse Reason 1 Only with COD COD not active Solution 2 Switch on COD see Section 6 4 1 on page 165 Reason 2 Incorrect thyratron settings Solution 2 Adjust the thyratron see Section 7 10 on page 242 Reason 2 Thyratron varistor or trigger board defective Solution Call Lambda Physik service No Trigger Signal This malfunction causes the error message LOW LIGHT see Section 9 8 on page 319 COHERENT LAMBDA PHYSIK 10 2005 311 TROUBLESHOOTING 9 5 312 Corrosion in Gas System Symptom Insufficient gas lifetime Beam specifications not reached Visible corrosion at gas lines and connections Reason 1 The halogen line was not purged prior to a standstill
70. device correctly connected to the electricity gas and water supplies and linked to the laser assembly or laser unit e Beam path checked see Section 6 2 1 on page 149 e Where applicable purge gas turned on for at least 5 minutes see Section 6 2 2 on page 150 e Externally supplied excimer laser gases turned on if gas actions are required see Section 6 2 2 on page 150 Preparation WARNING Risk of serious injury Ensure that only authorized and trained personnel operate the laser device 1 Check the maintenance schedule 2 Where applicable turn on the cooling water see Section 4 2 4 on page 82 for the cooling water specifications COHERENT LAMBDA PHYSIK 10 2005 153 OPERATION Turning On the Laser Device 3 Turn the main switch see Figure 68 A clockwise to the ON setting The POWER ON lamp B lights and various consumers in the laser device will start A B C D MAINS POWER ON O KEY SWITCH CONTROL s 5 6 6 UPPLY 24V AC Figure 67 Switching on the laser device 4 154 Insert the key into the key switch see Figure 67 C and turn clockwise to the setting to activate the laser controller The CONTROL SUPPLY lamp D lights The laser device performs a self test If a serious malfunction is detected during the self test FATAL ERROR will appear in the 2nd line of the handheld keypad display After successfully completing the self test the laser i
71. device has two air inlets on the beam exit side see Figure 5 on page 13 G and a central exhaust outlet on the connection side see Figure 6 on page 14 H As the laser gas is evacuated through a separate connection the exhausted air does not contain any toxic gases or byproducts Nevertheless in certain failure scenarios the exhaust gas may contain a small concentration of halogen gas or ozone The exhaust should therefore be connected to a suitable industrial extraction system which enables the gases to be appropriately treated Water Cooling The cooling system cools the laser tube NovaTube through tap water The layout of the cooling water circuit is shown in Figure 15 G B Figure 15 Cooling water circuit Key to Figure 15 A Cooling water inlet E Laser tube B Cooling water outlet Laser tube temperature sensor C Flow regulating valve G Check valve D Water flow sensor COHERENT LAMBDA PHYSIK 10 2005 27 FUNDAMENTALS 2 4 9 28 The external cooling water supply and drain is connected to the laser device at the inlet A and outlet B connections situated on the connection side of the laser head The flow sensor D ensures that sufficient water flows into the laser device If the water flow is not sufficient an interlock is activated The Temperature sensor F monitors the temperature in the NovaTube E If the temperature is too high or too low a signal is sent to the flow regulating valve
72. disconnect re connect gas cylinders e Stainless steel cap e g laser device s gas line blanking plug removed during the installation for sealing the halogen line e Helium leak tester or liquid leak tester e g SNOOP NOTE Make sure that the chosen leak tester is suitable for use in the environment in which the laser is installed Liquid leak testers are for instance not permitted in cleanrooms e Ethanol and cleaning paper when SNOOP was used CAUTION Incorrect handling will cause unnecessary downtime Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas system pressures of below 20 bar abs may be critical e Gases as specified see Section 4 2 2 on page 76 Gas cylinders with a remaining pressure of at least 10 bar abs Preconditions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device switched on and laser ready to operate no radiation being emitted e Pressure regulators and cylinder valves in each gas line closed COHERENT LAMBDA PHYSIK 10 2005 183 MAINTENANCE 184 Evacuating th
73. electrodes in an excimer laser are very smooth and can easily reflect the light of the alignment laser It is therefore possible to align the laser such that it appears to be on axis when in fact it is being reflected off an electrode This is easily determined by observing the direction in which the alignment laser light moves as you adjust the alignment laser mirror If you adjust the mirror to move the light to the right the light at the output side should move to the right If you make an adjustment to the right and the beam moves to the left this indicates that the alignment laser beam is being reflected off an electrode 2 When the alignment laser is roughly on axis with the laser resonator screw the two plastic alignment pucks into the aperture of each optics mount NOTE The optics can remain installed during this procedure 3 Adjust the alignment laser until the beam exactly passes through both holes in the alignment pucks see Figure 91 Figure 91 Direct alignment laser through alignment pucks 4 Remove the alignment pucks User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Resonator Alignment Aligning the Laser Resonator 5 Place the piece of card as close as possible to alignment laser 6 Position the card so that the beam cleanly passes through the pin hole NOTE Each resonator optic will reflect a small percentage of the alignment laser beam back towards the alignment laser D
74. energy source to stimulate the emission of laser light An active laser medium see Figure 2 A can be a solid a liquid or a gaseous material The COMPexPro uses a gaseous material as active lasing medium which is contained in its laser tube The electrons in this laser active medium are pumped or energized to an excited state by an energy source B In a process known as stimulated emission they are stimulated by external photons to emit the stored energy in the form of photons The photons thus emitted travel in step with the stimulating photons and in turn impinge on other excited atoms to release more photons The optical resonator normally consists of two mirrors C and D which are placed on two sides of the active laser medium Light amplification is achieved as the photons move back and forth between the two mirrors triggering further stimulated emissions A part of the intense directional and monochromatic laser light finally leaves the resonator through one of the mirrors D which is only partially reflective COMPexPro laser devices have these two mirrors attached to the rear and front side of the laser tube C O 1 Figure 2 Laser principle Key to Figure 2 A Active laser medium C Rear mirror B Energy source D Front mirror User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Functional Description of the Laser To stimulate the active lasing medium for emission of laser light an ele
75. evacuation of the gas line 11 After appoximately 10 minutes check the pressure regualator gauge again A significant increase in pressure indicates a leak 12 If there is a leak check and where necessary tighten the line connections Following this repeat the vacuum leak test 13 Close the pressure regulator in the inert gas line 14 Repeat steps 3 to 13 for all other gas lines Checking for Overpressure Leak Tightness 15 Ensure that the pressure regulators and cylinder valves are closed on all gas lines 16 Open the inert gas cylinder valve 17 Set the pressure regulator in the inert gas line to the specified value see Section 4 2 2 on page 76 18 Press lt PURGE LINE gt on the handheld keypad PURGE current selection INERT BUFFER RARE HAL appears in the bottom line of the display 19 Press lt Cursor Right gt and or lt Cursor Left gt to select INERT 20 Press lt ENTER gt to confirm the selection User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation 21 Press lt EXE gt to purge the selected gas line The message PURGE I L appears in the bottom line of the display The inert gas line and the internal gas system are evacuated and filled with inert gas He NOTE Depending on the configuration of the gas system the command has to be repeated until the gas line is completely purged 22 Remove the service cover from the service side of the laser device
76. gas cylinder valve 1 Turn the valve on the pressure regulator see Figure 64 A of the first gas line counter clockwise to its stop to ensure that the pressure regulator is closed N Y S Figure 64 Closing pressure regulator 2 Open the valve on the gas cylinder see Figure 65 A by turning counter clockwise Ca S Figure 65 Opening gas cylinder valve 3 Check the pressure gauge see Figure 65 B indicating the pressure in the gas cylinder to ensure that there is a remaining cylinder pressure of at least 10 bar abs COHERENT LAMBDA PHYSIK 10 2005 151 OPERATION 4 Turn the valve on the pressure regulator see Figure 66 A clockwise until the pressure gauge B indicates the required pressure NOTE The required pressures for the individual gases are indicated in Section 4 2 2 on page 76 N Y AS Figure 66 Setting pressure regulator to required pressure 5 Repeat steps 1 to 4 to turn on each of the other gases connected to the laser device 152 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Routine Operating Sequences 6 2 3 Start Up Laser Device Purpose Start up the laser device to enable laser operation The device starts with a self test of the data ring and laser modules and the warming up of the thyratron Tools and Materials e None Preconditions e Laser device ready to operate e g
77. hazards shea bab Pa arras 45 Safety guidelines 2 22 49 Warning lamp 21 ead wea Sega alee a 140 Laser resonator GA Pee an PANA 0 Gar Shs al ae 232 a Configuration estean eieae nae eee 18 Laser safety classification 00 3 Laser Safety Officer 0 41 49 Laser IUNDE rada neta R ha 16 Laser tube exhaust line Installation 2 8 A aada 119 Laser unit Definitio N A ae ADIOS a axed ty ada 6 Use of protective eyewear 00 eee ee 155 Laser warning lamp Installation AA ere este tie nee seca ANA est tee 114 LCD display eenaa niet crease tag bene noe weet 142 Leak test gas line Overpressure leak tightness eee ence 190 Vacuum leak tightness 0 0 ee ee 189 Le akoa A pth tle eae oie haa 54 Light amplification 10 Lockout tagout Proced ra AN BA Pri at tees 176 Requirements of lockout tagout device 176 Low beam energy 244 Low Hont emor sane ah an Se ean a pani Kana ates 319 Low light fUNCtION as 2 e bt ee eee Sethe 268 User Manual COMPexPro Series A0510COMPPRO INDEX A0510COMPPRO M Main switehy LAG NG HEDRA Wat gene aed 138 LOGKOUL 33 4 gine Sera aa it 177 Maintenance TUDE OPtiCS nm t eee er een Bed 200 Maintenance area 000002 98 Maintenance schedule 0 174 Manual halogen injection 2 0 0 c e
78. inch in 1550 square inches in 10 76 square feet ft 35 31 cubic feet ft 0 264 US gallons gal 2 20 US pounds Ibs 100 000 Pascal Pa 14 50 pounds force per square inch Ibf in The temperatures in this manual are primarily indicated in degrees celsius C To convert C to F multiply by 9 divide by 5 and add 32 To convert F to C subtract 32 multiply by 5 divide by 9 As a guide we have converted below some temperature values from C to PF 10 C 0 C 5 C 20 C 38 C 100 C COHERENT LAMBDA PHYSIK 10 2005 14 F 32 F 41 F 68 F 100 F 212 F INTRODUCTION 1 4 3 1 5 Calcium Hardness The Calcium Hardness of the cooling water is indicated in milliequivalent kg mval kg or calcium equivalent of the compound It is differentiated between ppm American Hardness d German Hardness Y French Hardness and e English Hardness In this manual the hardness is indicated in ppm For conversion see below mval kg ppm Ko of e 1 mval kg 0 50 0 2 8 5 0 3 5 1 ppm 0 02 1 0 0 056 0 1 0 07 1d 0 357 17 9 1 0 1 79 1 25 1 0 2 10 0 0 56 1 0 0 7 1 e 0 286 14 3 0 8 1 43 1 0 Feedback Regarding Documentation If you have any comments regarding the documentation provided to you please contact us When you contact us please provide us with The document code The date of issue The page number section number a
79. laser pulses emitted since the last counter reset After pressing COUNTS SEL The desired counter is selected with the cursor keys and confirmed by pressing the ENTER key e RESET allows you to reset the User Counter After pressing COUNTS RESET the user counter is reset to zero by pressing the EXE key The Total Counter cannot be reset by the user MENU Keys The MENU keys enable you to select or reset the laser device s gas menus e SEL allows different gas setting menus to be selected If the COMPexPro is only to be operated with one gas mixture this key has no function e RESET allows you to reset the values in the gas settings menu gas partial pressures gas mode repetition rate and energy filter to their factory settings After pressing MENU RESET the gas settings are reset to their factory settings by pressing the EXE key EGY CAL Key The EGY CAL key selects a routine that allows the internal energy monitor to be calibrated according to an externally measured energy reading NOTE The internal energy monitor is calibrated in the factory Subsequent calibration is a maintenance procedure that is only to be carried by correspondingly authorized and trained personnel User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Operating and Display Elements 6 1 3 14 Function Keys The function keys F1 to F10 allow various laser operating or display functions to be selected As the COMPex Pro shares the s
80. live parts and elements e Use only original fuses with the specified current rating e The electrical equipment of the COMPexPro laser device is to be inspected and checked at regular intervals Defects such as loose connections or scorched cables must be rectified immediately User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Specific Safety Aspects 3 2 2 3 Gas Safety WARNING Toxic hazards 5 fluorine or 0 5 hydrogen chloride fo The gas system of an excimer laser contains a mixture of up to Aviod inhalation of or skin contact with hydrogen gases The properties of compressed gases such as pressure diffusibility make the handling of compressed gases hazardous Laser gas mixtures invariably contain components which are corrosive toxic and oxidizing Therefore extreme care must be taken when handling these mixtures As a general guide to safe working practices the following precautions should be observed when working with gas equipment Always follow these guidelines and take additional precautions if necessary Gas protective equipment such as masks must be available at the entrance to the area where the laser is located Ensure that a protective mask with a protective gas filter or a complete breathing apparatus set is placed in a clearly displayed and accessible part of the operating area It is recommended that personnel work in pairs and within sight and sound of each other although n
81. maximum value after a new gas fill to half energy 50 To test this the laser operates at maximum repetition rate with no interruption and maximum possible high voltage but only for one minute a day Neither Halogen Injections nor any other gas actions are performed The decline in output from one day to the next is measured Gas Menu A data file in the Communication Interface It contains information about actual and default partial pressures of the gases allowed partial pressure ranges default repetition rate and HV threshold settings User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Halogen In excimer lasers either fluorine F or hydrogen chloride HCI Halogen Injection Injects a single flash of halogen gas into the laser tube Afterward the beam energy must stabilize again Hence there are increased pulse to pulse energy fluctuations for a while Supports to increase the gas lifetime to a great extent see Section 2 7 on page 31 Halogen Source The HaloSafe halogen source is safe way to provide halogen gas Eliminates the need for handling toxic halogen gas outside the laser device Halogen only is provided if needed The halogen source is available as an option Handheld Keypad A keypad specially designed to make laser operations more comfortable It provides control over all necessary laser functions HI Abbreviation for Halogen Injection HV Abbreviation for High Voltage HV
82. no no Counter yes no no no no no no a The limitations also apply for the command FLUSH lt xy gt LINE b Will only be accepted in the HV CONST mode c Will only be accepted in the EGY CONST mode 8 3 3 Parameter Polling Restrictions In some cases the parameter value indicated as a reply to a polling command will vary depending on the settings of other parameters Such cases are indicated in the following table Current mode Current OPMODE HV EGY HV Off New Fill Set value 0 Purge Reservoir Purge Flush lt xy gt Line HV On HI PGR Set value Measured value 0 when the laser was off for at least 3 seconds EGY NGR Off New Fill Last applicable value Set value EGY PGR Purge Reservoir Purge Flush lt xy gt Line EGY NGR On HI PGR Current value Current value EGY PGR 274 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Parameter Commands 8 3 4 8 3 4 1 8 3 4 2 Running Modes and Operating Parameters MODE The laser can operate in the HV CONSTant mode or EGY CONSTant mode with or without gas actions see Section 2 7 on page 31 This command sets or calls the running mode It is available in all operating modes when the gas handling procedures have been completed Syntax Setting MODE XXXX Polling MODE Reply XXXX Syntax Description XXXX Running mode HV HV Const EGY PGR EGY Const with gas actions E
83. of which will remain high even at some distance of the laser Although the radiation is nonionizing damage can still occur to living tissue if exposed for to long as a result of heat produced during radiation absorption The radiation of an excimer laser lies outside the visible range Possible wavelengths of the high intensity ultraviolet radiation are 157 nm 193 nm 248 nm 308 nm or 351 nm When operating the laser at 157 nm additional spontaneous and stimulated visible radiation occurs in the range between 635 nm and 755 nm WARNING The laser beam is very dangerous to the eyes and skin The following are hazardous 1 Direct radiation light as it leaves the laser 2 radiation light which is reflected from a surface 3 radiation light which is diffusely scattered from a surface Always wear appropriate safety goggles and protect your skin when there is a chance of exposure to radiation from the laser Never look into the laser beam In general the maximum permissible radiation exposure for the skin is several times greater than for the eye Safety measures with regard to the radiation hazard are therefore mainly based on dangers for the eye A potential chemical hazard originates from interaction between the laser beam and an obstruction The high irradiance could result in the liberation of hazardous fumes and gases In addition the heat generated is sufficient to ignite many materials Not only is the direct laser be
84. on the laser device see Section 6 2 3 on page 153 14 Press lt F4 gt on the hand held terminal 15 Press the numerical button gt 0 lt to reset the filter filling ratio and press lt ENTER gt to confirm Filter Cartridge Disposal WARNING Toxic hazard The halogen filter may contain halogen gas that has not reacted Therefore for safety reasons a storage period prior to disposal is necessary Observe the storage period and pre disposal procedure indicated in this section and the information in the filter packaging 16 Store the filter cartridge for 6 hours in a well ventilated location 17 Immerse the filter cartridge in 10 liters of water for 24 hours 18 Place the filter cartridge inside the plastic bag removed from the new filter and seal the bag by means of the supplied twist tie 19 Dispose of the filter cartridge in accordance with local regulations 20 Dispose of the water according to all locally applicable regulations NOTE Local waste water regulations may require that the water be neutralized For neutralization use calcium hydroxide if the pH value is less than 7 or acetic acid if the pH value exceeds 7 COHERENT LAMBDA PHYSIK 10 2005 249 MAINTENANCE 7 12 7 12 1 250 Preparation for Transport Storage During transportation or longer periods of non operation e g storage gases can enter the laser tube and damage the passivation layer the gas lines and cause corrosion T
85. operation the shutter can be closed Ifa longer break is necessary it is advisable to switch back to the OFF mode NEW FILL Mode The NEW FILL mode is actuated by the user to execute a complete refill of the laser tube The complete gas mixture is pumped out of the laser tube and replaced by fresh gas The NEW FILL mode is actuated from the OFF mode At the end of the new fill the OFF mode is automatically reactivated Laser Operation All operating modes and laser parameters can be set and the status requested from the communication interface through the handheld keypad or external PC connected to the laser device s serial interface The status of the laser device is indicated by a status code that is indicated on the handheld keypad display See Section 6 1 3 1 on page 142 or output through the serial interface together with the currently active operating mode The meaning of the individual status codes is described in Section 8 2 4 on page 270 If a status code indicates an interlock or error that requires interaction with the user solve the problem according to the information given in Section 8 2 4 on page 270 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO SAFETY Never switch on or attempt to operate or service the COMPex Pro before reading understanding and fully familiarizing yourself with the contents of this chapter This chapter is divided into three sections General Safety Aspects which exp
86. page 187 Before transportation Perform transportation 0 25h See Section 7 12 1 on page 250 a Typical values for dynamic gas lifetime XeCl lifetime tends to be greater than the other gases b Typical values for static gas lifetime XeCl lifetime tends to be greater than the other gases c Including new gas fill 174 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Maintenance Schedule 7 2 2 COMPexPro Fo Maintenance Interval Action Time Required Comments Every 1 to 5 million pulses see Section 7 5 1 on Every 3 to 5 days New gasti an page 192 Before a new gas fill After a week of non Flush gas lines 0 1h oe SON operation pag Every 10 to 30 million pulses See Section 7 6 4 on Every 3 to 5 new gas fills Renew BS apies HON page 214 Alion 8 10h See Section 7 8 on Whenever the tube windows 1 9N laser beam page 232 have been cleaned exchanged Calibrate energy ra See Section 7 7 1 on 0 75 h monitor page 223 z payan energy monitor Clean beam splitter 05h pa 7 7 2 2 0n Every 4 weeks Check halogen filter See Section 7 11 1 on 0 05 h Before a new gas fill level page 246 When indicated by the laser See Section 7 11 2 on control software y Replace halogen filter 0 25 h page 246 Every 300 million pulses Check adjust thyratron 0 25 h See Section 7 10 on voltages page 242 If pressure in the gas Change halogen gas 0 75 h See Sectio
87. path and the laser optics with a purgeable shield at critical environmental conditions Please contact Lambda Physik for more information COHERENT LAMBDA PHYSIK 10 2005 75 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES 4 2 2 76 Gases Excimer Laser Gas The active medium in an excimer laser is a mixture of a rare gas a halogen gas and a buffer gas The required gas mixture depends on the type of laser and the wavelength at which the laser is to be operated As standard the COMPexPro is optimized for fluorine operation at the wavelengths 193 nm 248 nm and 351 nm Optionally available is a multigas laser tube which additionally enables XeCl operation at a wavelength of 308 nm For operation at 157 nm a special F gt version of the COMPex Pro laser device is required The required gas mixtures for the available types of laser and possible wavelengths are shown in the following table Type Wavelength Gas Mixture COMPexPro 100 series 351 nm F2 in He Xe Ne 308 nm HCl H2 in He Xe Ne 248 nm F2 in He Kr Ne 193 nm F2 in He Ar Ne He COMPexPro 200 series 351 nm F2 in He Xe Ne He 308 nm HCI H2 in He Xe Ne 248 nm F2 in He Kr Ne 193 nm F2 in He Ar Ne COMPexPro Fo 157 nm F2 in He He Additional Operating Gases In addition to the gases required for the excimer laser gas mixture further gases are required to operate the laser device
88. premix gas Ensure that the appropriate gases are available for the wavelength that the laser is to be operated at NOTE A Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas supply system pressures below 20 bar abs may be critical B COHERENT LAMBDA PHYSIK recommends using halogen premix gas cylinders for max one year and all other gas cylinders for max two years C The gas connections are described in Section 4 3 4 on page 89 Halogen Source As an option Lambda Physik offers a halogen source that can be used instead of a halogen gas cylinder The halogen source is the controlled by the laser device Halogen Filter A halogen filter is built into the laser and will fully absorb all of the halogen exhausted during the filling procedures No toxic gases will leave the laser device The halogen filter filling ratio is monitored by the laser control software The filter should be exchanged after up to 30 gas fills or on a yearly basis whichever comes first COHERENT LAMBDA PHYSIK 10 2005 77 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES 4 2 2 1 78 Single Gases Fluorine F2 in He for COMPexPro 102 110 201 2052 Type of gas 0 5 F2 in 95 He Purity of Helium 99 995 or higher Purity of Fluorine for Excimer laser HF free Pressure regulator 3 5 to 5 0 bar abs
89. proper optical density for the laser wavelength e Allother personnel in the vicinity of the laser should also be ordered to wear protective eyewear Only qualified personnel should be permitted to operate the laser e Never intentionally look directly into any laser beam e Avoid indirect viewing of direct or reflected laser radiation Specular reflections from reflective surfaces can be as dangerous as the direct laser beam Do not view the beam through optical instruments unless the optics are designed to filter the laser wavelength e Precautions must be taken to ensure that there are no reflecting objects in the path of the laser beam e Do not deviate from standard operating procedures when working with class IV laser equipment e Use lasers only in approved applications and locations Take adequate precautions to prevent unauthorized personnel from entering the area where a class IV laser is operating Do not use lasers around untrained personnel who may injure themselves inadvertently Ensure that all personnel in the area observed proper safety precautions e Do not assume the laser system is aligned Misaligned optics can cause unintended exposure e Report all incidents of exposure to your supervisor e Warning signs indicating the laser enclosed area should be clearly displayed with an additional warning light outside the door e Local and national regulations governing the safe use of lasers should be adhered to a
90. ring cannot pick up or trasmit interference due to electromagnetic radiation such as that generated through the fast high voltage discharge this system ensures safe interference free communication within the laser device The user interface to the laser control system is the handheld keypad G or external control PC remote PC These devices communicate with the CI through the serial interface RS232 situated on the connection side of the laser head COHERENT LAMBDA PHYSIK 10 2005 21 FUNDAMENTALS 2 4 6 22 Figure 12 right shows the handheld keypad which provides a comfortable way to operate the COMPex Pro laser device The communication interface Figure 12 left also supports the input of externally generated trigger pulses EXT TRIG and the output of synchronisation pulses SYNC OUT Figure 12 Communication interface and handheld keypadr Electrical System The laser device is connected to a single phase power supply The individual consumers in the laser device are either connected to the mains voltage circuit single or to a 24 V DC circuit The mains voltage consumers in the laser device include the HV power supply module gas circulation fan and vacuum pump as well as the cooling and exhaust fans The 24 V DC power supply serves the low voltage consumers These include the solenoid gas valves gas purifier and various decentralized control modules The components in the electrical system are not subj
91. routine maintenance or the rectification of faults such as missing pulses no trigger or low beam energy To rectify additional pulses or if the error message OVERLOAD occurs perform steps 16 to 23 10 Remove the Uy and or Up jumpers and insert at the next highest setting see Figure 98 Figure 98 Thyratron supply voltage adjustment 11 Start the laser 12 Wait at least three minutes for the thyratron to reach a thermally stable state If additional pulses should occur decrease UR one step 13 Measure Uy between GND and HEAT again 14 Measure Up between GND and RES again 15 Note the new values and compare them with the previously recorded values User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Halogen Filter Maintenance 7 11 Decrease the Supply Voltage NOTE Steps 16 to 23 only apply if faults such as additional pulses or the error message OVERLOAD occurs 16 Remove the Up jumper and insert at the next lowest setting opposite the direction to the arrow see Figure 98 on page 244 17 Start the laser 18 Wait at least three minutes for the thyratron to reach a thermally stable state 19 Measure Up between GROUND and RES again 20 Note the new value 21 Start laser operation at the lowest possible HV value for stable energy output 22 Operate the laser for five minutes at max repetition rate 23 Increase the HV value in steps of 1 kV every five minutes until the max HV val
92. selection Change Repetition Rate Purpose Set the repetition rate rep rate for internal triggering of the laser NOTE A When the laser is operating in the internal trigger mode the changed repetition rate will become active immediately B The repetition rate can also be changed when the laser is operating in the external trigger mode In this case the next internally triggered laser operation will start with the changed repetition rate The repetition rate is always indicated in Hz 1 s Only integers are accepted The minimum repetition rate is 1 Hz The maximum repetition rate depends on the COMPex Pro version and is indicated on the corresponding data menu page Preconditions e Laser device started up see Section 6 2 3 Entering the Repetition Rate 1 Press lt REPRATE gt The bottom line of the handheld keypad display reads REPRATE current setting Hz 2 Use the numerical input keys to enter the desired value in Hz 3 Press lt ENTER gt to confirm the selection The new value will be indicated in the top line of the display NOTE A beep tone will indicate an out of range value In this case the previously set value remains active COHERENT LAMBDA PHYSIK 10 2005 161 OPERATION 6 3 3 162 Change Running Mode Purpose Select the desired laser running energy management mode The available choices are Energy constant mode with partial gas replacement EGY PGR Energy
93. servicing conditions and must therefore be regarded as a potential hazard to the human operator The laser beam must also be regarded as a potential fire hazard A Class IV laser system is not enclosed and therefore requires several safety precautions Class IV is the most powerful and potentially hazardous category of lasers Direct and scattered radiation from Class IV products are considered acute hazards to the eyes and skin Precautions include eye and skin protection remote interlocks and warning labels NOTE The COMPexPro is a class IV laser device However when connected to a laser unit OEM device with a fully encapsulated beam path it becomes part of a Class laser unit A Class laser device is defined as a laser system which is supplied with a special enclosure which does not allow access to hazardous levels of laser light during normal operation This class of laser does not require special precautions for eye safety during normal operations as long as the protective enclosure is in place WARNING Risk of serious injury A COMPex Pro Class laser system becomes a Class IV system when the enclosure is open The laser itself remains a class IV device User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Specific Safety Aspects 3 2 1 3 2 1 1 Physical Hazards Laser Radiation Safety Ultra Violet Light Laser radiation is emitted as a narrow beam of almost parallel rays the intensity
94. splitter box to energy monitor FOL broken or not properly connected Replace or re connect FOL no Energy monitor damaged Call Service Problem solved Figure 108 Low Light problem with energy monitor 322 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Low Light Replace optics Low Light Beam Output Energy too Low Clean tube optics Clean beam splitter Check optics Right optics labeled at side of optics optics properly mounted Adjust tube optics Correct mounting Major malfunction Call service Figure 109 Low Light beam energy too low COHERENT LAMBDA PHYSIK 10 2005 323 TROUBLESHOOTING 9 9 Fuses 9 9 1 Fuses Inside Laser Device The fuses located inside the COMPex Pro are atthe rear side of the laser device as seen from beam exit M03 Mo3 M03 M03 M03 Mo3 6 F5 F4 F3 F2 F1 Figure 110 Fuses at the inner rear side of COMPexPro atthe thyratron adjustment panel Figure 111 Fuses at the thyratron adjustment panel Fuse Value 110 V Value 230 V Protection M03 F1 0 5 A slow blow 0 5 A slow blow Fan1 2 M03 F2 not used M03 F3 8 0 A slow blow 8 0 A slow blow Vacuum Pump M03 F4 0 5 A slow blow 0 5 A slow blow Servo Driver M03 F5 2 5 A slow blow 2 5 A slow blow Gas Circulation M03 F6 0 063 A slow blow 0 063 A slow blo
95. stainless steel caps that are supplied with the laser device COHERENT LAMBDA PHYSIK 10 2005 89 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES 90 The table below indicates which gases single or premix are to be connected for a given laser gas Laser Gas Single Gas Connection Premix Gas Connection H R B H R B rm 6 6 6 000006 He F He Ar Ne He Premix l H R B l H R B 6 6 000069 F He Kr Ne He Premix H R B H R B ro DOOOOOOO HCI H He Xe Ne He Premix H R B H R B xr 6 6 0 600000009 He F He Xe Ne He Premix l F2 0900 He F He a Inert gas Helium only for COMPex Pro models 102 and 110 b Inert gas Helium only for COMPexPYO models 201 and 205 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Connections and Space Requirements 4 3 4 1 4 3 4 2 Pressure Regulators CAUTION Risk of damaging the gas system Halogen gases corrode most metals In addition the use of unsuitable pressure regulators can contiminate the gas mixture Only use pressure regulators made of stainless steel that are suitable for halogen gases Contact the supplier to ensure that the pressure regulator is suitable for the intended use Pressure regulators are supplied by gas manufacturers Lambda Physik recommends pressure regulators which are designed to operate within the pressure range of the respective gas see Section 4 2 2 on page 76 Stainless steel regulators
96. starting the laser following a week of non use or to remove impurities in the gas line after exchanging a gas cylinder Maintenance Interval e Before a new gas fill e After a week of non operation Time Required e 0 1h Tools and Materials CAUTION Incorrect handling will cause unnecessary downtime Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas system pressures of below 20 bar abs may be critical e Gases as specified see Section 4 2 2 on page 76 Gas cylinders with a remaining pressure of at least 10 bar abs COHERENT LAMBDA PHYSIK 10 2005 179 MAINTENANCE 74 2 180 Preconditions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device switched on and laser ready to operate no radiation being emitted e Gas cylinder valves open and pressure regulators correspondingly set for secondary pressures see Section 4 2 2 on page 76 Evacuating the Gas Line 1 Close the corresponding gas cylinder valve 2 Ensure that the pressure regulator in the gas line is open 3 Press lt FLUSH LINE gt
97. still possible COHERENT LAMBDA PHYSIK 10 2005 29 FUNDAMENTALS 2 5 4 2 6 30 External Interlock and Laser Warning Lamp Dedicated contacts are provided to secure the room in which the COMPexPro is operating through one or more remote interlock switches e g door switches and an external warning lamp If the circuit conncted to the remote interlock contacts is interrupted e g by opening a door the HV power supply will be shut down thereby preventing laser radiation from being generated As soon as the contacts are closed again the laser can be restarted When a restart after activation of an external interlock is to be prevented the contacts will have to be intergrated into an emergency off circuit The external warning lamp will light as soon as laser radiation is emitted For further information about the external interlock and warning lamp contacts please refer to Section 4 3 8 2 on page 95 Pulse Triggering Modes The COMPex ro operates as a pulsed laser The discharge and consequently the emission of the individual laser light pulses can be triggered either internally or externally With internal triggering the laser light pulses are triggered by the laser device s internal trigger generator Triggering occurs continuously at the repetition rate rep rate set by the user through the laser control software see Section 8 3 4 6 on page 278 With external triggering the laser light pulses are t
98. supply with the key switch Ill 1st person Watch for a light signal in the Data In FOL for several seconds If one appears FOL is in order If not remove the FOL IV 2nd person Switch off 24 V power supply with the key switch V 1st person Disconnect Data In FOL from gas handling module VI 2nd person Switch on the 24 V power supply with the key switch VII 1st person Watch for a light signal in the Data In FOL for several seconds If one appears the FOL is in order If not remove the FOL VIII 2nd person Switch off the 24 V power supply with the key switch If the COMPex ro has no built in halogen source omit steps IX to XII IX 1st person Disconnect Data In FOL from halogen source X 2nd person Switch on the 24 V power supply with the key switch XI 1st person Watch for a light signal in the Data In FOL for several seconds If one appears the FOL is in order If not remove the FOL XII 2nd person Switch off the 24 V power supply with the key switch 10 If all FOLs are working one of the modules is damaged In this case call COHERENT LAMBDA PHYSIK service Reason 3 Software is not compatible with a newly installed module Solution Call COHERENT LAMBDA PHYSIK service 298 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Warnings and Error Messages 9 1 7 9 1 8 Fatal Error Watchdog OFF 4 Reason Gas handling module does not respond Soluti
99. to OFF see Figure 71 so that the laser device is isolated from the potentially hazardous energy sources Figure 71 Main switch lockout 4 Lockout the main switch by inserting the assigned lockout device into the opening in the bottom of the main switch see Figure 71 A NOTE The lockout device can only be inserted when the main switch is in the OFF position 5 Dissipate any stored or residual energy by following the specific instructions in the respective service or maintenance procedure e g when working on the HV system which contains a thyratron always insert the grounding stick and allow the capacitors to discharge before starting work 6 Ensure that the laser device is disconnected from the energy source and isolated by turning the key switch and making certain that the laser device will not operate 7 Depending on local regulations attach appropriate tags to warn that maintenance or servicing is being performed and indicate the identity of the person who applied the lockout device The main switch of the laser device is now locked out The necessary maintenance or servicing can now be performed If however work is to be carried out on an open gas system always perform steps 8 to 11 prior to starting the maintenance or servicing work COHERENT LAMBDA PHYSIK 10 2005 177 MAINTENANCE 178 Securing the Gas Supply Lines NOTE Steps 8 to 11 are generally applicable when the external gas supply
100. to 7 0 bar abs for fluorine source 0 8 to 3 0 l s 200 I 200 bar 2800 psi Helium He flushing gas for laser tube Type of gas Purity Pressure regulator Flow Recommended cylinder size He 99 995 3 5 to 5 0 bar abs with fluorine cylinder or 6 5 to 7 0 bar abs for fluorine source 0 8 l s to 3 0 l s 200 I 200 bar 2800 psi Nitrogen N2 purge gas for beam path Type of gas Purity Pressure regulator Flow Recommended cylinder size N2 99 999 boil off quality 2 0 to 2 5 bar abs with fluorine cylinder or 6 5 to 7 0 bar abs for fluorine source 1 0 to 12 0 l s 50 I 200 bar 2800 psi a Only for COMPex Pro Fo COHERENT LAMBDA PHYSIK 10 2005 79 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES 4 2 2 2 Gas Mixtures The following table provides an overview of the excimer las gas mixtures used The gases are listed in the order that they are filled NOTE The information in the table below also serves as a guide for preparing appropriate premix gases Type Gas mixture Partial Gas Pressure Gas Total wavelength pressure connection pressure mbar mbar COMPexPro 102 ArF 193 nm 100 Fo He 0 17 3 16 Halogen 3000 COMPex Pro 110 160 Ar 5 33 Rare 2340 Ne 78 00 Buffer 400 He 13 33 Inert KrF 248 nm 80 Fo He 0 12 2 30 Halogen 3300 100 Kr 3 03 Rare 3120 Ne 94 55 Buffer XeCl 308 nm 80 HCI H2 He 0 13 0 02 2 35 Halogen 3200 60 Xe
101. to select the user counter reading 3 Note the counter reading 4 Press ENTER to cancel the counter reading function The previously active screen display re appears Reset User Counter Purpose Reset the user counter reading to zero Preconditions e None Resetting the User Counter 1 Press lt COUNTS RESET gt COUNTER RESET appears 2 Press lt EXE gt to reset the user counter to zero EXECUTED briefly appears to confirm that the user counter has been reset User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Set Up and Service 6 4 9 Emergency Fill with Inert Gas Purpose An emergency gas fill manual fill with inert gas fills the laser tube with inert gas for 10 seconds This is required to fill the laser tube to a pressure higher than atmospheric pressure to protect it e g after a malfunction for a period from the penetration of ambient air This function is required when e g due to the interruption of a procedure the tube pressure has dropped below 1050 mbar when the laser tube has a leak or a leak is suspected NOTE This function can only be used when an inert gas cylinder is connected to the appropriate gas fitting on the laser head If an inert gas cylinder is not connected carry out a transport filling see Section 7424 on page 250 Tools and Materials CAUTION Incorrect handling will cause unnecessary downtime Only use gas cylinders
102. 1 87 Rare 3060 Ne 95 63 Buffer XeF 351 nm 120 Fo He 0 18 3 46 Halogen 3300 15 Xe 0 45 Rare 3165 Ne 95 91 Buffer COMPex ro 201 ArF 193 nm 100 Fo He 0 16 2 96 Halogen 3200 COMPexPro 205 200 Ar 6 25 Rare 2900 Ne 90 63 Buffer KrF 248 nm 60 Fo He 0 09 1 68 Halogen 3400 130 Kr 3 82 Rare 3210 Ne 94 41 Buffer XeCl 308 nm 60 HCI H2 He 0 08 0 02 1 57 Halogen 3600 100 Xe 2 78 Rare 3440 Ne 95 55 Buffer XeF 351 nm 130 Fo He 0 20 3 74 Halogen 3300 15 Xe 0 45 Rare 2855 Ne 86 52 Buffer 300 He 9 09 Inert COMPexPro Fo Fo 157 nm 60 Fo He 0 1 1 9 Halogen 3000 2940 He 98 Inert 80 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Facilities 4 2 3 Power Supply CAUTION Risk of damaging laser device Improper installation can cause serious mains supply line damage The mains supply line must be installed with strain relief in a cable channel The laser device requires a permanently connected mains supply The specifications of the electrical connection are listed below NOTE Each COMPexPro laser device is factory set at either 230 V or 120 V All rated voltages can vary by 12 Type Frequency Phases Wires Apparent Current load 230 V Version COMPexPro 102 50 60 Hz 1 3 1 5 kVA 6A COMPex ro 110 50 60 Hz 1 3 3 0 kVA 13A COMPexPro Fo 50 60 Hz 1 3 3 0 kVA 13A COMPex ro 201 50 60 Hz 1 3 1 5 kVA 6A COMPex ro 205 50 60
103. 3 Check the work area to ensure that all employees have been safely positioned or removed from the area 14 Remove the lockout device NOTE The lockout device shall be removed from the energy isolating device by the person who applied the device If the authorized person who applied the device is not available contact the supervisor of the person who applied the device 15 Notify the responsible persons that the servicing or maintenance is completed and that the laser device can be switched on and restored to service User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Gas System Maintenance 7 4 744 Gas System Maintenance This section describes the procedures that are to be followed to maintain the external gas system The condition of the external gas system and the gases has a direct influence on the operating performance of the excimer laser NOTE The instructions in this section apply for a straight forward gas system with one gas source for one laser device In industrial environments the COMPex Pro may be connected to an external gas handling system that serves a number of laser devices Therefore always consult the gas handling system supplier s instructions before performing any of the actions described in this section Flush Gas Line Purpose Evacuate a gas line and fill the line with fresh gas This is for example necessary to remove helium from the gas line after a leak test or after
104. 309 aaa pah kapang palink CUP 309 Teme RES 7 310 Ventilation 0 a a 310 Self Firing a 311 No Trigger 4 568 311 Corrosion in Gas System 312 Laser Device Does Not Start 313 Beam Energy Too LoW o 314 Low Light ca PADA NG 319 FUSES oo ole eit ee te ee ee eens 324 Fuses Inside Laser Device 324 Fuses Outside Laser Device 325 XV TABLE OF CONTENTS 10 GLOSSARY usina Kana 327 LIST OF FIGURES 050000000000 337 INDEX capita arar radar 341 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO 1 1 COHERENT LAMBDA PHYSIK 10 2005 INTRODUCTION This chapter describes the contents of this manual as well as the conventions safety information and units used in this manual About this Manual This instruction manual is intended to familiarize the user with the COMPexPro Series excimer laser device and its designated use The instruction manual contains important information on how to operate and routinely maintain the COMPexPro laser device safely properly and most efficiently Observing these instructions helps to avoid danger reduce repair costs and downtimes and increase the reliability and lifetime of the COMPex ro The instruction manual must always be available wherever the COMPexPro is in use The instruction manual must be read and applied by any person in charge of carryi
105. 4 User Manual COMPexPro Series A0510COMPPRO
106. 6 Constant Energy Operation Without Gas Actions The No Gas Replacement NGR operating mode is a constant energy mode without any gas replenishment When the high voltage reaches the level HV p the message Preset Energy too high appears to indicate that a new gas fill is needed Laser operation will be continued until HVmax is reached The laser then shuts off automatically see Figure 22 Energy HV max warn A Figure 22 Charging current with No Gas Replacement NGR Figure 23 shows a flow diagram for laser operation in the EGY CONST mode with NGR no gas replacement HV epi reached Warning Needed New Gas Fill Laser runs until HV nax is reached pana EN Laser operation stops ba Interlock New Gas Fill Needed Figure 23 EGY NGR flow diagram User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Operating Modes 2 8 2 8 1 Operating Modes Figure 24 provides an overview of the available operating modes and the possible transitions between these modes These operating modes are briefly described in the following subsections Mains OFF PASSIVATION FILL TRANSPORT FILL PURGE lt xy gt LINE ENERGY CAL CAPACITY RESET HI PGR etc Figure 24 Operating mode transition diagram OFF Mode The laser control software automatically selects the OFF mode after switching on th
107. 86 LEAKRATE pnp rat ad lees bee e ee bee eae 290 MENU gt lt tite thie bee the pd 281 MODE 3A ate daa Ga BANA Ae NAGA 275 POWER STABILIZATION ACHIEVED 286 PRESSURE pacas Sethe Daub ale wand KA EG eaten eels 287 PULSE DIFF 22 ahha il dae 287 RARE seit ik eileen eile ee Mende Wa AMS ie Mee AA 280 REPRA HE 23 seep eet eet ie a eee ats PG ee 278 RESERVOIR eee eee eee 288 ROOMTEMP eaaa dnote ND Shae ah haaa 291 User Manual COMPexPro Series A0510COMPPRO INDEX A0510COMPPRO TEMP geval a a PARA ata 290 TEMP CONTROL Aaga aaa eee ee eee eee eee 288 203 TOTALCOUNTER vendo traca e Na aaa 282 TRIGGER maan mki pa as aloe 277 TYPE OR LASER scouts o ic Piles 291 VERSION salut ta herent ob lee aed a Beas ne Be 291 Parameter polling restrictions 5 274 Partial gas replacement 00 cee eens 33 332 Partial pressure Lined a KANG eae Mice ae Edis 333 PassiVatiO aaa tara lada 17 333 Peaking Capacitors 0 0 eee eee 19 333 Periodic maintenance schedule eee ee eae 174 Personal Protective Equipment PPE aaan 41 Protective eyewear cee eee 49 Protective gloves sa seoran aa trimo EEES EERE 54 Personnel Selection and qualification 208 42 PORMOJS 0er a tad 32 Plane parallel resonator 18 Polling commands Description
108. 9 ON 37 Warning repetition rate for COD 50 Hz Section 9 1 29 ON 40 ON 40 Section 9 1 22 ON 41 ON 41 Section 9 1 23 PASSIVATION FILL 3 No Gas Flow Section 9 1 17 PURGE RESERVOIR 3 No Gas Flow Section 9 1 17 SAFETY FILL 3 No Gas Flow Section 9 1 17 TRANSPORT FILL 3 No Gas Flow Section 9 1 17 Fatal Error Com Datalink Section 9 1 4 Sheet 2 of 2 9 1 1 NOTE The error Fatal Error Com Datalink is only indicated on the handheld keypad Duty Cycle Exceeded ON 03 Reason The laser has exceeded its duty cycle more than 12000 pulses in any 20 minutes This warning message will not be indicated by all lasers Solution Run the laser for a period of time at a lower repetition rate Energy Cal Error OFF 7 Reason The energy reading could not be adjusted within a range of 99 200 during the energy calibration procedure see Section 7 7 1 on page 223 Solution Insert an attentuator or remove an attentuator as described in Section 7 7 3 on page 230 COHERENT LAMBDA PHYSIK 10 2005 295 TROUBLESHOOTING 296 Error Temperature Measurement OFF 12 This is an error message relating to the fluorine source Please refer to the fluorine source s manual for further information Fatal Error COM Datalink Only displayed on the handheld keypad not sent to the external PC Communication between handheld keypad and communication interface is interrupted Reason 1 Handheld keypad and laser devic
109. A yellow green grounding conductor is included in every AC power module All power connectors have grounding pins that make first and break last e All ground conductors are equipped with a ring lug and external tooth lockwasher e Fuses are used to provide branch circuit protection against low level faults User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Specific Safety Aspects e AC power and signal lines are never combined in the same connector e Fast acting magnetic circuit breakers with at least 10 kA interrupting capacity a lockable disconnect means and an emergency off function are supplied with the main switch 6 Allexternal low voltage 24 V lines conform to the VDE 0551 safety standard 3 2 3 3 Pressure and Gas Handling Safety Features The Lambda Physik Excimer Laser incorporates the following pressure and gas handling features e The pressure chamber is designed in accordance with the European Pressure Equipment Directive 97 23 EEC Every pressure vessel is tested according to the European Pressure Equipment Directive 97 23 EEC e Gas valves are electrically operated e The main housing is fully interlocked e All gas fittings are 6 mm Gyrolok e A powerful ventilation system causes continuous underpressure in the tube chamber during laser operation This prevents toxic gas from escaping into the ambient air in case of a leak e The exhaust enclosure is designed to ensure venti
110. AMBDA PHYSIK Excimer Laser Synchronisation Unit synchronisation unit can be used for applications that require a constant delay Adjustable delay 1 us to 3 5 us Step width 10 ns Precision 1 ns Transient 15 pulses from laser start User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Connections and Space Requirements 4 3 8 4 Sync Out Signal The Sync Out Signal is sent by the Communications Interface Cl It informs external devices that a trigger signal either internal or external has just been given NOTE COD Charge On Demand is active there is a time delay between the Sync Out Signal and firing of the laser For more information about this delay see Section 6 4 1 on page 165 Specifications Connection BNC Galvanic isolation through optocoupler Voltage 3 3 V to 5 V Impedance lt kQ Signal length lt us the signal occurs on the positive flank of the trigger signal COHERENT LAMBDA PHYSIK 10 2005 97 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES 4 3 9 Maintenance Area The laser device has to be installed in area which allows the maintenance covers to be removed and installation and maintenance work to be performed The necessary maintenance area is indicated in Figures 41 and 42 500 1191 5 800 1375 Figure 41 Maintenance area of COMPexPro 100 series and COMPexPr0 Fo 1375 Figure 42 Maintenance area of COMPexPro 200 series 98 User
111. ATION ACHIEVED This command requests if the preset stabilization of the beam energy has been reached It is only available in the ON mode Syntax Polling POWER STABILIZATION ACHIEVED Reply XXX Syntax Description XXX Condition YES Stabilization reached NO Stabilization not reached User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Parameter Commands 8 3 7 6 8 3 7 7 PRESSURE This command requests the current pressure in the laser tube It is available in all modes Syntax Polling PRESSURE Reply aaaa Syntax Description aaaa Tube pressure Variable integer 4 places Unit mbar Value specified through gas menu PULSE DIFF This command requests the difference between the amount of trigger pulses and the amount of laser pulses that reach the energy monitor After the request or when the laser is sarted the pulse difference is set to zero Negative values indicate that there are fewer laser pulses than trigger pulses With the laser switched on the value can deviate from the actual value by 1 Syntax Polling PULSE DIFF Reply Jaaa Syntax Description aaa Pulse difference negative sign for fewer laser pulses Unit pulses Value current difference COHERENT LAMBDA PHYSIK 10 2005 287 CONTROL SOFTWARE 8 3 7 8 8 3 7 9 288 RESERVOIR TEMP This command requests the current temperature of the laser tube Syntax Polling RESERVOIR TEMP Re
112. CAL The energy monitor will be calibrated The functional sequence of the routine when cotrolling the laser device through an external PC is indicated in Figure 100 on page 269 The steps are indicated in the rectangles the necessary commands are written in capital letters next to the corresponding steps User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Operating Modes Syntax Setting OPMODE ENERGY CAL Polling OPMODE Reply ENERGY CAL ENERGY CAL CONT Syntax Description CONT The routine waits for the input of a reference energy through the command EGY or EGY SET see Section 8 3 on page 272 Perform a New Fill OPMODE NEW FILL Switch to HV Constant Mode OPMODESHV thousand shots OPMODE OFF Choose HV HV lt xy gt REPRATE lt xy gt Choose reprate Start Energy Calibration OPMODE ENERGY CAL Insert or remove attenuators Laser adjusts energy monitor EGY reading Energy monitor OPMODE oFF Stop Energy e OPMODE reading within Calibration range Range 99 to 200 Yes Yes OPMODE returns ENERGY CAL CONT Input ext energy EGY lt xy gt No OPMODE returns OFF 7 meter reading End Figure 100 Calibrating the energy monitor COHERENT LAMBDA PHYSIK 10 2005 269 CONTROL SOFTWARE 8 2 4 270 Status Codes Depending on the configuration of the laser device the following status codes
113. COMPexPro Series A0510COMPPRO A0510COMPPRO General Safety Aspects Brief operating personnel before beginning special operations and maintenance work and appoint a person to supervise the activities In any work concerning the operation conversion or adjustment of the COMPexPro and its safety oriented devices or any work related to maintenance inspection and repair always observe the start up and shut down procedures set out in the instruction manual and the information on maintenance work Ensure that the maintenance area is adequately secured WARNING Potential electrical hazards If the laser device is completely shut down for maintenance and repair work it must be secured against inadvertent starting Ensure that the electrical system is locked out and tagged out prior to servicing by locking the mains switch of the laser device with a padlock and tagging appropriate warning signs WARNING Potential eye and skin burns If the laser device is completely shut down for maintenance and repair work it must be secured against inadvertent starting Ensure that the radiation system is locked out and tagged out prior to servicing by locking the mains switch of the laser device with a padlock and tagging appropriate warning signs CAUTION Risk of gas leaks Switching off the laser device automatically closes the solenoid valves in the laser device s gas circuit This interrupts the gas flow in the laser device but
114. COMPexPro Series A0510COMPPRO Labels 3 3 2 Labels Inside Laser Device Figure 31 Labels inside Pos 1 Labels at the thyratron adjustment panel 8 8 50 Hz 5 5 60 Hz FUSE AUX I D gt BIAS HEAT RES GND 5 S E E A0510COMPPRO COHERENT LAMBDA PHYSIK 10 2005 67 SAFETY 68 Pos 2 900837 Label warning of risk of electrocution if the high voltage circuitry behind the panel to which the label is attached is accessed without taking the correct precautions The panel to which the label is attached shall only ever be removed by correspondingly qualified and authorized personnel LEBENSGEFAHR Nur Personal vollst ndig vertraut mit den VorsichtsmaBnahmen f r Arbeiten an Hochspannungsger ten darf Arbeiten am Ger t ausf hren Vor jedem Service ist stets das Handbuch zu lesen Alle Anweisungen zur dauerhaften Erdung sowie Pr fung auf Abwesenheit der Hoch spannung sind genau und jederzeit zu befolgen Only Personnel fully conversant with safety measures for working with High Voltage equipment shall perform work at this equipment Every time before service it is mandatory to read the Manual All instructions for positive Grounding and Check for Absence of High Voltage have to be followed meticuously and at any time DANGER TO LIFE Pos 3 903070 Label showing the electrical frequency and voltage to be provided by
115. DA PHYSIK 10 2005 137 OPERATION 6 1 6 1 1 6 1 1 1 138 Operating and Display Elements This section provides an overview of the operating and display elements on the laser device operating panel and handheld keypad The use of these elements in individual operating sequences is described in Section 6 2 on page 148 Operating Panel The operating elements that start up and shut down the COMPexPro laser device are located on the operating panel at the rear of the laser head see Figure 60 These operating elements are described in the following subsections A B C D POWER ON KEY SWITCH CONTROL SUPPLY 24V AC Figure 60 Operating panel Key to Figure 60 A Main switch B Power ON lamp C Key switch D Control voltage lamp Main Switch Set the main switch to ON to apply line voltage to the laser device The mains voltage is the operating voltage of certain consumers in the laser device e g thyratron The laser cannot however be started until the control voltage is activated through the key switch Set the main switch to OFF to disconnect the laser device from the mains power supply User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Operating and Display Elements 6 1 1 2 6 1 1 3 6 1 1 4 Power ON Lamp The POWER ON lamp indicates that line voltage is applied to the laser device When this lamp is illuminated the control voltage circuits in the l
116. E 5 Press lt ENTER gt to confirm the choice 6 Press lt EXE gt to start the procedure The laser tube is evacuated and then filled to 1200 mbar with inert gas The inert gas valve then closes Following this the message REPLACE WINDOWS enter appears User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation 5 2 13 Press lt ENTER gt to start the leak test procedure The laser is filled to 3000 mbar with inert gas and the cavity pressure is monitored over a 15 minute period During this time the message LEAK TEST is displayed If a leak is detected the message LEAK TEST error appears In this case press lt ENTER gt to delete the message Following this the message CHECK WINDOWS appears Check that the window mounts are correctly tightened see Section 7 6 1 on page 201 and then press lt ENTER gt to restart the leak test When the message LEAK TEST ok appears press lt ENTER gt to terminate the routine The laser tube is evacuated again and filled to 1050 mbar with laser gas Fill Laser Tube New Fill Purpose The software routine NEW FILL is used to evacuate the laser tube and fill it with fresh laser gas See Section 7 5 1 on page 192 After this 2nd new fill the laser is ready to operate NOTE If after installation the beam energy of the COMPex Pro is below the specified value the laser tube has to be re passivated see Section 7 5 4 o
117. Exchange Pre Mounted Tube Optics COMPex ro F2 Purpose Remove the optics mounts containing damaged or worn optics output coupler and rear mirror from the laser device and insert new pre mounted optics into the laser device Prior to removing the optics mounts the gas mixture has to be pumped out of the laser tube and the tube refilled with the gas connected to the inert valve Following replacement of the optics a leak test has to be performed These procedures are controlled through a dedicated software routine NOTE Always change the output coupler and the rear mirror in two seperate procedures to ensure that one of the optics remains adjusted The replaced optics can then be aligned with the optics that are still adjusted When the tube optics is replaced in one single procedure resonator adjustment can only be performed by specially trained personnel or authorized service Maintenance Interval e Every 10 to 30 million pulses e Every 3 to 5 new gas fills e If the tube optics are damaged NOTE The optics of the Fo version of the COMPexPro are not intended to be cleaned i e the optics are only to be exchanged Time Required e 1 0h Tools and Materials e 4mmallen key from service case e 3mmallen key from service case e 2 5 mm allen key from service case e Sealing plate or premounted optics mounts e External energy meter for handling see energy meter manual e Gases as specified see Section 4 2 2 on page
118. FF 5 296 9 1 6 Fatal Error Watchdog OFF 4 299 9 1 7 Fluorine Valve Not Opened OFF 13 ON 13 299 9 1 8 Halogen Pressure Too High OFF 33 299 9 1 9 Hl in Prep ON 34 4 299 9 1 10 Inert Valve Closed OFF 39 300 9 1 11 Interlock XXX OFF 1 300 Xiv User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO TABLE OF CONTENTS 9 2 9 3 9 4 9 5 9 6 9 7 9 8 9 9 COHERENT LAMBDA PHYSIK 10 2005 9 1 9 1 9 1 9 1 9 1 9 1 9 1 9 1 9 1 9 1 9 1 9 1 9 1 9 1 9 1 9 1 9 1 9 1 24 25 26 27 28 9 1 30 9 2 1 9 2 2 9 2 3 9 2 4 9 9 1 9 9 2 Leak Check Windows FLUSHING LEAKTEST CONT 30 300 Low Light 26 2 77777 301 Low Pressure OFF 10 ON 10 301 New Gas Fill Needed OFF 8 ON 8 301 No Capacity Left OFF 11 302 No Gas Flow XX 3 ooooococccoooo ooo 302 No Vacuum 2 9 o 303 No Vacuum ON 9 aaa 304 Not Available OFF 35 304 OPFATIO FEA Disco tours dior 304 0 304 7 305 Polling 6 2 777777 305 Preset Energy too High OFF 2 ON 2 305 RAM Check Error OFF 29 306 Timeout OFF 31 0c eee 306 Warm up 8min 2 21 307 Warning Repetition Rate for COD 50 Hz e A AO 307 Wrong Pressure OFF 27 307 InterlOCKS 0c eee ee eee eee 308
119. GY NGR EGY Const without gas actions EGY and EGY SET This setting command has three functions Inthe EGY Const mode the EGY sets the setpoint for the stabilization of the beam energy preset energy This value is reset when the laser device is next restarted With some lasers the function is executed through the parameter command EGY SET When EGY 0 is sent in the EGY Const mode the energy value is set to the value that is predefined through the parameter PRESET EGY in the menu data During energy monitor calibration the EGY command is required to input the externally displayed energy value The EGY command is available in the operating modes OFF and ON The reply to the polling command EGY or EGY SET also differs depending on the currently active running mode OFF setpoint for the beam energy in mJ ON measured beam energy in mJ If the request is repeated before the next trigger puls 0 will be displayed ENERGY CAL current monitor reading without unit COHERENT LAMBDA PHYSIK 10 2005 275 CONTROL SOFTWARE Syntax Setting EGY aaa aa or EGY SET aaa aa Polling EGY or EGY SET Reply aaa aa Syntax Description aaa aa Beam energy Variable decimal 3 places before and 2 places after decimal point Unit my with energy monitor calibration without unit Range indicated through gas menu 8 3 4 3 EGY RANGE This command sets or calls the range of tolerance for the beam ener
120. HERENT LAMBDA PHYSIK 10 2005 277 CONTROL SOFTWARE 8 3 4 6 278 REPRATE This command sets or calls the repetition rate rep rate for the internally triggered laser pulses The command is available in the ON and OFF modes Syntax Setting REPRATE aaaa Polling REPRATE Reply aaaa Syntax Description aaaa Repetition rate Variable integer 4 places Unit Hz Range as determined in the gas menu with a higher loading voltage the maximum repetition rate can be reduced NOTE With internal triggering active the new repetition rate becomes immediately effective In the external trigger mode the new repetition rate will become effective when internal triggering is next activated User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Parameter Commands 8 3 4 7 8 3 5 8 3 5 1 COUNTS When external triggering is active the laser can be set to generate a preset number of laser pulses This command enables the countdown value to be set or called The laser will only accept external trigger pulses until the indicated amount is reached After that the laser will stop and COUNTS will be set to zero The command is only available in the OFF mode Syntax Setting COUNTS aaaaa Polling COUNTS Reply aaaaa Syntax Description aaaaa Amount of pulses Variable integer 5 places Unit pulses Range 0 to 65535 NOTE The polling command COUNTS indicates the currently set countdown cou
121. If any labels are missing immediately inform Lambda Physik In the event of safety relevant modifications or changes in the behaviour of the COMPexPro during operation stop the laser device immediately and report the malfunction to the competent authority person e g Lambda Physik Service Never make any modifications additions or conversions which might affect safety without the supplier s approval This also applies to the installation and adjustment of safety devices and valves Spare parts must comply with the technical requirements specified by the manufacturer Spare parts from original equipment manufacturers can be relied upon to do so Never modify the software of programmable control systems Adhere to prescribed intervals or those specified in the instruction manual for routine checks and inspections For the execution of maintenance work tools and workshop equipment adapted to the task on hand are absolutely indispensable COHERENT LAMBDA PHYSIK 10 2005 41 SAFETY 42 Selection and Qualification of Personnel Basic Responsibilities Make sure that only authorized personnel works on or with the COMPexPro laser device Statutory minimum age limits must be observed Employ only trained or instructed staff and set out clearly the individual responsibilities of the personnel for operation set up maintenance and repair Do not allow persons to be trained or instructed or persons taking part in a general t
122. Inform service whenever a fuse is replaced Check the fuses F1 to F6 and if necessary replace any defective fuses see Section 9 9 on page 324 Reason 4 No line voltage Solution Check the appropriate fuses in the building Beam Energy Too Low The pulse energy may be low for many different reasons To clearly detect the source of the problem follow the flowcharts shown on the following pages User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Beam Energy Too Low Beam Output Energy Low Gas cylinders just changed Continued on next page yes Check for gas leak Tighten leak New Fill Problem solved no Purge Lines 3 times Purge laser tube Flush lines and fill with fresh gas New Fill Problem solved no Check gas lines for internal corrosion Corroded gas lines Replace Re passivate Problem solved no Change gas cylinders again es Re passivate laser tube New Fill Problem solved no Continued on next page Figure 101 Beam energy too low part 1 COHERENT LAMBDA PHYSIK 10 2005 315 TROUBLESHOOTING Beam Output Energy Low Continue 1 Measure beam energy with ext energy meter yes Beam energy really too low Problem solved Calibrate energy monitor FOL broken or not properly connected
123. L gt key A short form of the current menu will be displayed in the bottom line of the handheld keypad display 2 Press lt Cursor Right gt and or lt Cursor Left gt to select the number of the desired gas menu 3 Press lt RESET gt 4 Press lt EXE gt to reset the gas menu to the factory settings COHERENT LAMBDA PHYSIK 10 2005 167 OPERATION 6 4 4 6 4 5 168 Select Gas Mode Purpose Selection between single gas and premix gas mode Single gas mode All gas components are connected as single gas cylinders the partial pressures are mixed by the laser control Premix gas mode All gas components are premixed in one gas cylinder NOTE When resetting the gas menu the gas mode is also reset to the factory setting Tools and Materials e None Requirements e Laser device switched on and laser ready to operate laser radiation not being emitted Selecting the Gas Mode 5 Press lt F8 gt The available gas modes appear in the bottom line of the handheld keypad display 6 Press lt Cursor Right gt and or lt Cursor Left gt to select the gas mode 7 Press lt ENTER gt to confirm the selection Activate Temperature Control Optional Purpose Activate the temperature control to enable a given tube temperature to be maintained Tools and Materials e None Requirements e Laser device switched on and laser ready to operate laser radiation not being emitted User Manual COMPexPro
124. MODE Reply HI PGR A PGR Partial Gas Replacement is carried out to refreshen the laser gas A portion of the gas in the laser tube is replaced by fresh gas The partial pressure of the gases to be filled is indicated in the gas menu With the halogen source this command is executed after a warm up period of 3 minutes Syntax Setting OPMODE PGR Polling OPMODE Reply PGR MANUAL FILL INERT Inert gas will be filled into the laser tube for 10 seconds This command will only be accepted up to a tube pressure of 3000 mbar Syntax Setting OPMODE MANUAL FILL INERT Polling OPMODE Reply MANUAL FILL INERT User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Operating Modes 8 2 3 14 8 2 3 15 FLUSH lt XY gt LINE A gas line will be evacuated for 2 seconds lt XY gt indicates the name of the line BUFFER HALOGEN INERT or RARE Syntax Setting OPMODE FLUSH lt XY gt LINE Polling OPMODE Reply FLUSH lt XY gt LINE Example Evacuating the halogen gas line OPMODE FLUSH HALOGEN LINE lt CR gt OPMODE lt CR gt FLUSH HALOGEN LINE lt CR gt PURGE lt XY gt LINE A gas line will be evacuated for 5 seconds and then filled for 2 seconds with inert gas lt XY gt indicates the name of the line BUFFER HALOGEN INERT or RARE Syntax Setting OPMODE PURGE lt XY gt LINE Polling OPMODE Reply PURGE lt XY gt LINE Example Purging the halogen gas line OPMODE PURGE HALOGE
125. N LINE lt CR gt OPMODE lt CR gt PURGE HALOGEN LINE lt CR gt COHERENT LAMBDA PHYSIK 10 2005 267 CONTROL SOFTWARE 8 2 3 16 8 2 3 17 8 2 3 18 268 CAPACITY RESET This command sets the filling level indicator of the halogen source to the value specified through the parameter command CAP SET Syntax Setting OPMODE CAPACITY RESET Example Set the halogen source filling level indicator to 100 CAP SET 120 lt CR gt see Section 8 3 8 2 page 289 Reset the filling level indicator to the indicated value OPMODE CAPACITY RESET lt CR gt LL OFF This command deactivates the Low Light function When the Low Light function is active default choice laser operation is interrupted when more than 30 of laser pulses are missing within a 10 second period The Low Light OFF function LL OFF will not interrupt laser operation when there are missing pulses and should therefore only be used for diagnostic purposes OPMODE LL OFF is only accepted when OPMODE OFF is active see Section 8 2 3 1 on page 260 LL OFF is a one shot command After setting LL OFF the Low Light function will be deactivated for the next laser operation started through OPMODE ON When this laser operation is terminated through OPMODE OFF LL OFF will be automatically cancelled The default low light function will be automatically active for the following laser operation started through OPMODE ON Syntax Setting OPMODE LL OFF ENERGY
126. NECTION 2 sda RA ND GMT NLA NAPAKA NAL ae ee 130 Remote software Parameter commands 00 272 Re passivate laser tube 0 17 198 Repetition rate eee 9 72 73 74 333 Gagne adds palan 161 ood BANA kaila pha 145 REPRATE key paiba aed oiled Residual energy DISSIDAION latin 0 of Ave doen nate 177 Resonator Alignment procedure 232 Configuration ista i ADAN dica 18 FUNCUON sortir aras POE hn a PAL Ale tala ees Gd alle 334 Restoring laser device to service After lockout tagout 5 178 RS232 interface 334 RUNS TOP KEY isis ta a ot 144 Running modes Energy Constant mode 0 31 HV Constant mode 32 Select portion arta dee tala dente tated 162 5 Safety Organizational measures cee eee eee 41 Safety chain to secure working area 52 Safety compliance 00 eee eee 39 Safety information 002 4 Safety symbols in this manual cee eee eae 5 Safety relevant labels 0022 61 Safety labels Checking sacs A eet aes Pees ned 113 Seismic anchorage eee 60 Seismic protection 02 ee 55 311 Serial interface ee 95 Setting Definition of setting in descriptions 257 User Manual COMPexPro Series A0510COMPPRO INDEX A0510COMPPRO Setting commands Description orion re in KANA Na Nak AU NG 256 SHOCKWATCH indicators AP idad o ads 106 Shut down laser device 0
127. NTS 7 6 Tube Optics Maintenance 200 7 6 1 Exchange Pre Mounted Tube Optics COMPexPro 100 COMPexPro 200 201 7 6 2 Disassemble Assemble Tube Optics Mounts COMPexPro 100 COMPexPro 200 208 7 6 3 Clean Tube Optics COMPexPro 100 COMPexPro 200 211 7 6 4 Exchange Pre Mounted Tube Optics COMPEX Pro Fo tao 2 4 4 5 annan 214 7 6 5 Disassemble Assemble Tube Optics Mounts COMPex Pro Fo 2k naalak Data mah han 221 7 7 Energy Monitor Maintenance 223 7 7 1 Calibrate Energy Monitor 223 7 7 2 Clean Beam Splitter 206 7 7 2 1 COMPexPro 100 COMPexPro200 227 7 7 2 2 COMPex Pro Paisa kaaa Naa ea adie 6 228 7 7 3 Exchange Energy Monitor Attenuators 230 7 7 3 1 COMPexPro 100 COMPexPro200 230 7 7 3 2 COMPex Pro Fo 4 paawa a AG 231 7 8 Laser Resonator Alignment 232 7 9 Installation and Alignment of Unstable Resonator Optics Option 236 7 10 Thyratron Maintenance 242 7 11 Halogen Filter Maintenance 245 7 11 1 Check Halogen Filter Filling Ratio 246 7 11 2 Exchange Halogen Filter Cartridge 246 7 12 Preparation for Transport Storage 250 7 12 1 Transportation 200 7 12 2 Disconnect Gas Lines 251 8 CONTROL SOFTWARE 255 8 1 Communication Syntax 206 8 2 Operating 10065
128. OHERENT LAMBDA PHYSIK 10 2005 219 MAINTENANCE 220 Removing the Rear Mirror 29 Repeat the procedure Flushing the Laser Tube see page 215 to fill the laser tube with inert gas 30 Insert the hook of the bayonet wrench into one of the recesses of the optics mountand turn the bayonet wrench counterclockwise to loosen the optics mount see Figure 84 left picture You will hear a short hissing sound due to overpressure in the tube The inert gas valve opens every two seconds to compensate for the pressure drop and prevent air from entering the tube When the laser tube is open for longer than one minute the message CLOSE RESERVOIR enter appears indicating that the sealing plate or replacement optics mount should be inserted NG AN gt Figure 84 Position of rear optics mount F gt version CAUTION Risk of damaging laser tube The software routine is automatically continued by pressing lt ENTER gt Do not press lt ENTER gt when the tube windows are removed 31 Immediately insert the sealing mount or replacement rear mirror mount and turn the bayonet wrench clockwise to close the laser tube Preparing and Installing the Rear Mirror 32 Disassemble the optics mount and replace the optics see Section 7 6 5 on page 221 NOTE If a ready prepared optic was installed in step 31 the damaged or worn optic can be exchanged after the laser has been put back into operation User Manua
129. PHYSIK 10 2005 147 OPERATION 6 1 3 15 6 2 148 GAS Keys The GAS keys allow various gas actions to be carried out These gas actions are primarily required for maintenance purposes and should therefore only be carried out by correspondingly authorized and trained personnel e NEW FILL enables the program routine to be started that replaces the gases in the laser tube with fresh gas The execution of the new fill procedure is described in detail in Section 7 5 1 on page 192 e FLUSH LINE enables the program routine to be started that evacuates a specific gas line for two seconds After pressing FLUSH LINE a prompt appears indicating the currently selected gas line and displaying the further choices in parenthesis A different gas line is selected with the cursor keys and confirmed by pressing ENTER e PURGE LINE enables the program routine to be started that evacuates a specific gas line for five seconds before filling the line with the gas connected to the inert gas connection After pressing PURGE LINE a prompt appears indicating the currently selected gas line and displaying the further choices in parenthesis A different gas line is selected with the cursor keys and confirmed by pressing ENTER e PURGE RESERVOIR enables the program routine to be started that purges the laser tube This routine is required for various maintenance work on the laser tube Routine Operating Sequences WARNING Risk of injury through
130. PORT FILL 3 Syntax Description 3 Status code 3 no gas flow User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Operating Modes 8 2 3 9 8 2 3 10 FLUSHING This routine is required to exchange the tube windows The laser tube is evacuated and filled to 1050 mbar with inert gas After exchanging the optics a leak test is carried out and the laser tube is then filled with fresh laser gas Syntax Setting OPMODE FLUSHING Polling OPMODE Reply FLUSHING FLUSHING XXXX FLUSHING aa FLUSHING XXX aa Syntax Description XXXX Status CONT the routine enables the window exchange and waits for the command to continue LEAKTEST Leak test after window exchange LEAKTEST CONT the routine waits for the command to continue after the leak test aa Status code 3 No gas flow 30 The laser tube is not leak tight CONT The window exchange routine stops twice to wait for user intervention This command continues the routine after exchanging the optics and successfully completing the leak test Syntax Setting OPMODE CONT COHERENT LAMBDA PHYSIK 10 2005 265 CONTROL SOFTWARE 8 2 3 11 8 2 3 12 8 2 3 13 266 HI A halogen injection HI is carried out to refreshen the laser gas The partial pressure of the halogen to be injected is indicated in the gas menu With the halogen source this command is executed after a warm up period of 3 minutes Syntax Setting OPMODE HI Polling OP
131. RO Laser Tube Maintenance Tools and Materials CAUTION Incorrect handling will cause unnecessary downtime Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas system pressures of below 20 bar abs may be critical e Gases as specified see Section 4 2 2 on page 76 Gas cylinders with a remaining pressure of at least 10 bar abs Preconditions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device switched on and laser ready to operate no radiation being emitted e Gas cylinder valves open and pressure regulators correspondingly set for secondary pressures see Section 4 2 2 on page 76 e No impurities in the laser tube or gas lines NOTE When the laser has not been run for more than a month flush the gas lines to remove any impurities see Section 7 4 1 on page 179 Evacuating and Filling the Laser Tube 1 Turn on the excimer laser gases and set the pressure regulator in each line to the required pressure see Section 6 2 2 on page 150 2 Press lt NEW FILL gt on the handheld keypad gt NEW FILL
132. Section 8 3 7 7 pulses and laser pulses RARE XXXX mbar r s Rare gas partial pressure Section 8 3 5 2 RESERVOIR XX X C r Laser tube pressure Section 8 3 7 8 TEMP REPRATE XXXX Hz r s Repetition rate of laser pulses Section 8 3 4 6 with internal triggering ROOMTEMP XX X C r s Room temperature of HCI Section 8 3 8 5 source TEMP XX X C r Temperature of fluorine source Section 8 3 8 4 TEMP CONTROL ON or r s Laser tube temperature control Section 8 3 7 9 OFF active or inactive TIMEOUT ON or r s Time out for 15232 active or Section 8 3 6 3 OFF inactive TOTALCOUNTER XXXXX 103 r Total counter reading Section 8 3 6 1 pulses TRIGGER INT or r s Trigger source internal or Section 8 3 4 5 EXT external TYPE OF LASER XXXXXX r Model of laser device Section 8 3 9 1 VERSION X XX r Software version of the Section 8 3 9 2 COHERENT LAMBDA PHYSIK 10 2005 Communication Interface Sheet 2 of 2 273 CONTROL SOFTWARE 8 3 2 Operating Mode Setting Restrictions In some cases laser parameter commands will not be accepted The table below indicates depending on the current operating mode if a parameter command is accepted yes or refused no Parameter Current Operating Mode OPMODE Command Manual Purge xys Purge Off On HI PGR New Fill Fill Inert Line 2 Reservoir HV yes yes no no no no no EGY yes yes no no no no no Reprate yes yes no no no no no Mode yes no no no no
133. This is always written at the end of a command to indicate a polling command Colon This is written as information separator between a setting and a status code lt CR gt Carriage Return character This is always inserted after each polling command setting command or reply to terminate the command The insertion of this character is assumed in the command syntax descriptions in the remainder of this chapter NOTE Do not insert a blank before or after an equals sign question mark comma or CR character If a blank is required within a command this is indicated in the syntax of the individual command description COHERENT LAMBDA PHYSIK 10 2005 257 CONTROL SOFTWARE 8 2 Operating Modes The operating modes of the COMPex ro are changed and called through OPMODE commands OPMODEs Operating Mode In most cases a change of operating mode will not influence the settings of the parameters The operating modes are changed with the command OPMODE and the status is called through the polling command POPMODE The reply setting status indicates the currently active operating mode and where applicable the status code 8 2 1 Overview of Operating Modes The available operating modes are listed in the following OPMODE Function Description OFF Switches the laser off Section 8 2 3 1 ON Switches the laser on to run with the currently active Section 8 2 3 2 operating parameters SKIP Interrup
134. Use the 2 5 mm allen key to loosen the three screws do not lose the washers and remove window mount E from counter window mount A 3 Remove the mirror B and spacer C from the collar D The window is now ready for cleaning or exchange COHERENT LAMBDA PHYSIK 10 2005 209 MAINTENANCE Reassembling the Mirror Mount Figure 78 shows the arrangement of the parts to reassemble the mirror mount A BCDEF G H K AN o LL Figure 78 Assembling the mirror mount Key to Figure 78 A Counter window mount Captive screws B Mirror G Mirror mount C Coating mark H Threaded insert D Spacer Washer E Collar K 2 5 mm screw 4 Hold the coller see Figure 78 E and insert the spacer D and mirror B into the coller The coated side of the mirror note marking has to point towards the spacer and collar 5 Push the counter optic mount A over the collar The non coated side of the mirror has to point towards the counter window mount 6 Place optic mount G onto the counter optic mount and use the 2 5 mm allen key to evenly tighten the three 2 5 mm screws K 7 Use the optics wrench to tighten the threaded insert H until it is finger tight 210 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Tube Optics Maintenance 7 6 3 Clean Tube Optics COMPex ro 100 COMPex Pro 200 Purpose Clean contaminated mirrors Tools and Materials e Glass plate or similar clean
135. VACUUM PUMP 5 Connect the vacuum pump s mains power supply cable to the corresponding connection on the connection side of the laser device User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation 5 2 7 5 2 7 1 Connect Exhaust Lines The COMPex Pro has two exhaust lines the exhaust of the laser device housing the laser tube exhaust line including the vacuum pump and the halogen filter which is also described in this chapter WARNING Toxic gas hazard Ensure that a halogen sensor and an evacuating system are installed in the area of the vacuum pump to avoid hazardous halogen gas concentrations in case of gas leaks during laser tube evacuation Connect Laser Device Housing Exhaust Line Purpose Connect the exhaust line between the exhaust port on the top of the laser device and the building industrial ventilation system After connection of the exhaust line any contamination within the laser device housing will be directed into the industrial ventilation system NOTE Under normal operating conditions the exhaust air does not contain toxic gases or by products With certain failure scenarios however the exhaust air may contain small concentrations of halogen gas or ozone and consequently shall be treated accordingly Tools and Materials e 4mm Allen key e Exhaust line assembly supplied with the COMPex ro e Connections to your own ventilation output minimum internal
136. Y KI Figure 26 Remote connection NOTE The Remote Interlock only switches off the high voltage After closing the door switch the laser can be restarted To prevent the laser from being simply restarted after activation of a door contact the contact has to be integrated in an external EMERGENCY OFF circuit that interrupts the mains voltage supply to the laser device The specifications of the Remote Interlock are indicated in Section 4 3 8 2 on page 95 e The basic Module is monitored by a watchdog The COMPexPro immediately indicates if this module has failed testing e The service panel of the laser is equipped with an interlock which will shut off high voltage if the laser is opened during operation COHERENT LAMBDA PHYSIK 10 2005 57 SAFETY 3 2 3 2 58 Electrical Safety Features The following safety features protect the user from the potentially lethal hazards associated with high voltage power sources e The Remote connector on the connection panel of the HV power supply module is configured so that the contacts have to be closed to enable the HV power supply If the contacts are opened during laser operation the HV power supply will be immediately shut down e Opening a housing cover panel for service triggers a housing cover interlock switch that shuts off the high voltage and consequently the laser radiation This does not apply for the mirror access panels which
137. a safe and clean condition and that all safety lables are complete and legible Tools and Materials e None Check Laser Device 1 Check the laser device housing for visible signs of damage impurities and contamination WARNING Risk of injury Misuse or improper handling of the laser device can cause serious or in certain situations even lethal injuries Never put the laser device into operation if safety labeling is incomplete Immediately replace damage or missing safety lables 2 Check that all safety labels are attached as indicated in Section 3 3 on page 61 and that no safety labels are damaged Transport Locks The COMPexPro is delivered without any transport locks COHERENT LAMBDA PHYSIK 10 2005 113 INSTALLATION 5 2 5 114 Connect Remote Socket Purpose Connect according to the international standard IEC 825 remote interlock switches and an external laser radiation warning lamp supplied by the customer to the Remote socket on the laser device see also Section 2 5 4 on page 30 and Section 4 3 8 2 on page 95 Connecting the Door Interlock Switch 1 Connect pins 2 and 3 e g via a switch that opens when a door is opened thus shutting down the laser and preventing accidental beam contact NOTE The laser can only operate when pins 2 and 3 are connected with a closed switch a short circuit plug etc BO Remote interlock 2 1 External e g door i
138. ad FLUSH current selection INERT BUFFER RARE HAL appears in the bottom line of the display 37 Press lt Cursor Rights and or lt Cursor Left gt to select HAL halogen 38 Press lt ENTER gt to confirm the selection 39 Press lt EXE gt a number of times to clean the halogen gas line The halogen line is evacuated and at the same time refilled with fresh gas 40 Leave the halogen gas in the gas line for approx 15 minutes 41 After waiting approx 15 minutes press lt EXE gt again to fill the halogen line with fresh gas NOTE Depending on the configuration of the gas system the command has to be repeated until the gas line is completely filled Finalization 42 When SNOOP was used clean the gas line connections with ethanol and wipe dry with cleaning paper 43 Set the gas cylinder valves and pressure regulators to the settings required for the next laser operation closed for NGR open and correctly set for PGR Exchange Rare Buffer or Inert Gas Cylinder Purpose Replace exhausted or expired rare buffer or inert gas cylinders with fresh gas cylinders NOTE After exchanging the gas cylinder use inert gas to check the line for leaks instead of expensive rare or buffer gases Maintenance Interval e f pressure in the gas cylinder drops below 10 bar NOTE To ensure that there is adequate gas pressure for all gas activities it is recommended that the gas cylinder be exchanged when the r
139. adjust the optics for the COMPex Pro unstable resonator The unstable resonator is of the positive branch type The optics set consists of plano convex calcium fluoride CaF2 or magnesium fluoride MgF2 mirror as rear optical reflector which is HR coated for a specific wavelength an uncoated meniscus lens for the output coupler The meniscus lens can be used for different wavelengths Additional coated plane convex lenses are required in order to switch to different wavelengths A B Figure 94 Setup of the unstable resonator The optics shown in Figure 94 simultaneously seal the cavity of the excimer laser There are no additional windows installed The convex surfaces of the optics are always directed to the cavity of the laser tube The dielectric coating of the rear optics does not come into contact with the laser gas The installation of the optics has to follow the same routine as used for a standard optics installation User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation and Alignment of Unstable Resonator Optics Option Tools and Materials e Unstable Resonator Optics e Unstable Resonator Adapter e Visible alignment laser e g HeNe laser e Piece of card on which the light reflexes of the alignment laser can easily be seen with 2 mm pin hole e Energy meter e g GenTec ED 500 or Coherent LM 100 E e Set of Allen keys e Spanner wrench in service case e Adjustment ap
140. after the laser has been put back into operation 16 If necessary remove the sealing plate and insert the optics mount as described in step 14 Turn the bayonet wrench clockwise to fasten the optics mount 17 Press the bellows see Figure 80 D on page 216 towards the laser tube and insert the O ring between bellows and bending unit 18 Attach the clamping ring see Figure 80 C that clamps the bellows onto the bending unit of the energy monitor see Figure 80 A and close the lever to fix the connection 19 Connect the purge gas line to the optics mount see Figure 80 B Leak Testing the Laser Tube 20 Press lt ENTER gt to confirm that the optics have been exchanged An automatic leak test is started The laser is filled to 3000 mbar with inert gas and the cavity pressure is monitored over a 15 minute period During this time the message LEAK TEST is displayed Should a leak be detected the laser tube is evacuated to approx 1200 mbar and the warning message Leak Check Windows appears Locate the exact source of the leak and rectify 21 When no leak is detected press lt ENTER gt to proceed The laser tube is then evacuated to 30 mbar and filled to 500 mbar twice before being evacuated and finally filled to 1050 mbar 218 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Tube Optics Maintenance Refilling the Laser Tube 22 Perform a new fill see Section 7 5 1 on page 192 to fill f
141. aintenance Interval Purging the laser tube is recommended e When the laser was not in use for more than one month e After repairing a leak in the laser tube Tools and Materials CAUTION Incorrect handling will cause unnecessary downtime Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas system pressures of below 20 bar abs may be critical e Inert gas as specified see Section 4 2 2 on page 76 Gas cylinder with a remaining pressure of at least 10 bar abs User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Tube Maintenance Preconditions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device switched on and laser ready to operate no radiation being emitted e Inert gas cylinder valve open and pressure regulator correspondingly set for secondary pressure see Section 4 2 2 on page 76 Purging the Tube with Inert Gas 1 Close all pressure regulators and gas cylinder valves 2 Open the valve on the inert gas cylinder 3 Set the pressure regulator in the inert gas line to the requ
142. alogen filter 2 Shut down and secure the laser device see Section 6 2 6 on page 158 COHERENT LAMBDA PHYSIK 10 2005 247 MAINTENANCE Removing the Halogen Filter Cartridge 3 Remove the four wing nuts see Figure 99 A and washers B from the top of the halogen filter housing Y y E B BSS OOOO E D 260 130 10 Figure 99 Exchanging the halogen filter Key to Figure 99 A Wing nut E Spring B Washer Filter cartridge C Housing cover G Housing D Top O ring H Lower O ring 4 Lift the top cover C off of the filter housing 5 Remove the spring E 6 Use the pliers to lift out the filter cartridge F Take care not to remove the bottom o ring H 7 Check the condition of the upper and lower o rings in the filter housing Replace the o rings if damaged NOTE The arrow in Figure 99 indicates the direction of flow of the gas 248 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Halogen Filter Maintenance Inserting the New Halogen Filter 8 Place the new filter cartridge F into the filter housing G Ensure that the arrow on the filter cartridge points downwards 9 Place the spring E on top of the filter cartridge 10 Refit the top C of the filter housing 11 Place the washers B on each of the threaded rods 12 Fit the four wing nuts A and hand tighten Finalization 13 Switch
143. am hazardous but unchecked reflections of laser light also constitute a potential hazard This risk is excluded if the laser beam is contained within a protective enclosure Protective measures must be taken therefore when personnel are working in an open beam situation use of beam shielding and beam dump COHERENT LAMBDA PHYSIK 10 2005 45 SAFETY 3 2 1 2 46 High Voltage Electric Energy WARNING Electrical hazards High voltages exceeding the Safety Extra Low Voltage levels SELV of 42 VAC or 60 VDC introduce the potential hazard of electric shock and might cause serious injuries by passing electricity through the body High voltages of up to 32 kV are generated in the COMPex ro laser device As the equipment is provided with a protective housing accidental contact with current carrying conductors during normal operation is impossible However if an appropriate protective cover is removed potentially lethal hazards exist in spite of the existence of the housing interlocks With a protective cover removed there is the risk of an electric shock whenever the mains supply is connected and the high voltage capacitors are charged The capacitors in the laser device hold some joules at peaking voltages of up to 32 kV WARNING Risk of electrocution Personnel should never open the laser device before the main power supply cable has been disconnected and the high voltage capacitors are completely discharged An electri
144. ambda Physik AG Gyrolok is a registered trademark of Hoke Inc NJ USA VCR is a registered trademark of Cajon Company USA SERTO is a registered trademark of Gressel AG CH SNOOP is a registered trademark of Swagelok Company USA SHOCKWATCH is a registered trademark of Media Recovery Inc TX USA Microsoft MS Windows Windows 95 und Windows NT are registered trademarks of the Microsoft Corporation in the USA and other countries IBM is a registered trademark of International Business Machines Inc Safety Laser Safety Classification Lasers and laser systems are classified according to their relative hazards These classifications are found in the American National Standards for the Safe Use of Lasers ANSI Z 136 1 2000 FDA 21 CFR 1040 10 and 1040 11 and IEC 825 Within this classification the COMPexPro excimer laser is a class IV high power laser It must be regarded as a potential hazard to the human operator When connected to a correspondingly configured beam guidance system the COMPexPro becomes a class laser device The laser beam must also be regarded as a potential fire hazard COHERENT LAMBDA PHYSIK 10 2005 3 INTRODUCTION 1 2 2 1 2 3 1 2 3 1 Safety Information Chapter 3 Safety describes the physical hazards related to the laser device the means of protection against these hazards and the safety features incorporated in the design of the laser device The Safety chapter mus
145. ame handheld keypad and control software with other laser devices certain function keys are without function for the COMPex ro NOTE Function keys that are only intended for Service purposes are password protected F1 displays information about active interlocks F2 switches off the low light function when the laser is off not emitting radiation or skips the warm up period when the laser is in the warm up phase These password protected functions are provided for maintenance and troubleshooting purposes only and should therefore only be used by authorized and trained personnel F3 evacuates the laser tube and fills it for re passivation with a mixture of halogen and helium F4 shows the current filling level of the halogen filter F5 switches the laser tube temperature regulation on or off This password protected function is provided for maintenance and troubleshooting purposes only and should therefore only be used by authorized and trained personnel F6 flushes the laser tube with the gas connected to the INERT connection The function is to be called in case of a tube leakage to prevent ambient air from penetrating into the laser tube F7 without function F8 switches between single gas and gas premix operation F9 without function F10 acivates the CHARGE ON DEMAND COD function When this function is active high voltage will only be available when a trigger signal is applied COHERENT LAMBDA
146. appears to indicate the the windows can now be exchanged CAUTION Risk of damaging laser tube Do not press lt ENTER gt when the tube windows are removed as this would cause a large amount of ambient air to enter the laser tube Removing the Output Coupler 8 Use the 3 mm allen key to remove the front and rear mirror access covers from the laser device NOTE Removal of the mirror access covers shutter panels provides sufficient access to enable removal of the front optics If access is nevertheless restricted remove the service panel to gain access to the optics 9 Use the 4 mm allen key to remove the screw see Figure 72 A that secures the energy monitor B th O PL LE gt A SS o o Figure 72 Removing the energy monitor COHERENT LAMBDA PHYSIK 10 2005 203 MAINTENANCE 10 Turn aside the energy monitor The front optics are now accessible see Figure 73 Figure 73 View of the optics mount with energy monitor removed CAUTION Risk of damaging optical components There is overpressure in the laser tube Always hold the optic mount with the other hand while loosening it Loosen the screws crosswise and in stages Always wear disposable plastic gloves when handling optical components 11 Use the 3 mm allen key to loosen the six screws securing the optics mount and then remove the optics mount You will hear a short hissing sound due to the overpressu
147. ard for serial communications connections Adopted by the Electrical Industries Association this Recommended Standard RS defines the specific lines and signal characteristics used by serial communications controllers to standardize the transmission of serial data between devices The letter C denotes the current version of the standard Safety Fill A safety feature of the COMPexPro A Safety Fill is performed if the laser tube could not be evacuated to 30 mbar due to e g a Gas Leak or a defective vacuum pump Fills the laser tube with inert gas thus bringing it to a safe condition Threshold Voltage In the Energy Constant Mode the charging voltage is steadily increased to keep the beam energy constant The Threshold Voltage HVrepl is a limit at which the COMPexPro reacts to this increase The reaction may be a warning in EGY NGR a HI in EGY PGR ora PGR also EGY PGR after a number of unsuccessful Hls Thyratron Fast high voltage switch to discharge the storage capacitors as a reaction to a trigger signal see Section 2 4 4 2 on page 20 Trigger Pulse A signal that causes the laser to fire a single beam pulse Tube Optics Consist of resonator optics mirrors and windows The COMPexPro only has resonator optics UV Abbreviation for Ultraviolet Light The portion of the electromagnetic spectrum between 200 and 400 nm User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO VUV Abbreviation fo
148. as this can result in flaking of the protective halide film and rupturing of the metal This could lead to the occurrence of a fluorine metal fire Flaking of the protective film can also cause dust to foul the valves All areas containing pressurized halogen gas mixtures should be inspected for leaks periodically weekly In the event of a leak occurring the release of halogen gas constitutes the greatest hazard All leaks should be repaired immediately but not while the system contains halogen With fluorine ammonia vapor expelled from a squeeze bottle containing ammonium hydroxide may be used to detect leaks at suspected points Filter paper moistened with potassium iodide solution is a very sensitive means of detecting fluorine in concentrations as low as approximately 25 parts per million The potassium iodide paper should be held with the aid of 18 to 24 inch long tongs or forceps and will darken and turn black when fluorine is present Fluorine odor is sufficiently strong to be detectable in very low concentrations at 0 14 parts per million Fluorine will also fume readily in air Adequate ventilation is essential See Section 4 2 5 on page 83 for the specifications of the required air flow There should be a minimum of at least 10 air changes per hour for enclosed spaces WARNING Toxic hazard Ensure that the laser is ventilated into an appropriate exhaust Make sure that the exhaust of the laser is not connected to the
149. aser device can be enabled by actuating the key switch Key Switch Insert the key into the key switch and set to to activate the control voltage The control voltage is required for the control modules in the laser device e g basic module and communication interface Prior to enabling the control voltage the main switch has to be set to ON Set the key switch to O to disable the control voltage power CAUTION Prevent injury or damage through unauthorized operation Always remove the key from the key switch and keep in a safe place when the laser device is not to be operated NOTE The key cannot be removed from the key switch in the setting Control Voltage Lamp The CONTROL SUPPLY 24V AC lamp indicates that the control voltage has been activated When the lamp lights the control modules in the laser device are ready to operate COHERENT LAMBDA PHYSIK 10 2005 139 OPERATION 6 1 2 6 1 3 140 Laser Radiation Warning Lamp The laser radiation warning lamp see Figure 61 A is a white lamp that is situated in a clearly visible location on top of the laser device A PSSS RR III Pe bes POSSE x 0 A KKK LL KO Figure 61 Laser radiation warning lamp This lamp illuminates to indicate that the laser is operating i e laser radiation is being emitted For safety reasons the lamp is visible when wearing excimer las
150. at transfer to water less than 1 5 kW Connectors 10 mm SERTO NOTE The water connections are described in Section 4 3 6 on page 93 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Facilities 4 2 5 Air Intake Exhaust The COMPexPro is cooled by the ambient air Consequently it is important to ensure compliance with the specified environmental conditions see Section 4 2 1 on page 75 Under normal operating conditions the exhaust air does not contain any toxic gases or by products Nevertheless certain failure scenarios may cause the exhaust air to contain a small concentration of halogen gas or ozone and should therefore be treated accordingly Effective protection is only guaranteed if the exhaust hose is guided to an appropriate industrial ventilation system WARNING Toxic gas hazard Lead the exhaust of the laser and vacuum pump into an appropriate industrial ventilation system Make sure that the exhaust of the laser and vacuum pump is not connected to the ducting of systems used for the processing of breathing air e g air conditioning or ventilating systems Flow rate approx 200 m3 h Heat transfer to exhaust less than 1 0 kW Exhaust hose diameter 150 mm Exhaust hose length 3m NOTE The location of the air intake and exhaust is indicated in Section 4 3 7 on page 94 COHERENT LAMBDA PHYSIK 10 2005 83 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES 4 3 Connections and Space Requ
151. cal safety overview is given in Section 3 2 2 2 of this chapter page 52 but reference should also be made to Section 3 2 3 page 56 for an overall description of the system safeguards In addition to the above mentioned hazards the HV switch used in the 1 kHz version thyratron generates ionizing radiation Radiation limit 0 2 uSievert h at 10 cm distance from laser device housing This limit will not be exceeded if the COMPex Pro is operated in the specified manner User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Specific Safety Aspects 3 2 1 3 Halogen Gases WARNING Toxic gas hazard Careless handling of gas equipment can cause halogen gas to escape Avoid breathing in or skin contact with halogen gases The gas system of an excimer laser contains a mixture of 5 fluorine gas or 0 5 hydrogen chloride Halogens are extremely reactive and highly toxic gas which can cause severe chemical and thermal burns and in sufficient concentrations can cause death due to respiratory damage and pulmonary edema They are characterized by an extremely stinging smell in very low concentrations It is essential therefore that local safety regulations concerning the emission of chemical vapors must be strictly observed along with the recommendations made in this chapter and throughout this manual Depending upon the wavelength in which the laser is to be operated the halogen is either fluorine or hydrogen chlori
152. can be removed to service the optics of the COMPexPro e The main switch is designed to enable the insertion of a lockout device that corresponds with OSHA 29 CFR 1910 147 when the switch is set to OFF This ensures that the laser device can be locked out to perform servicing or maintenance e All potentially lethal voltages are contained in fully protected and grounded enclosures e The Power Module shielding encloses the HV parts of the laser to protect the surroundings against ionizing radiation and electro magnetic interference limits see Section 3 2 1 2 on page 46 A proper closed laser housing completely shields the surroundings from the ionizing radiation The emission of ionizing radiation has been checked by the German Physikalisch Technische Bundesanstalt PTB No radiation beyond background radiation was detected with covers closed Opening the Power Module shielding discharges the capacitors by a safety switch release e High voltage warning labels are prominently displayed on all three high voltage modules the high voltage power supply the gas processor power supply and the high voltage circuitry e For service the capacitors can be discharged through a shortcut plate to ground e All AC power wiring is UL recognized or VDE recognized and rated at 600 V Black or brown is used for line phases blue or white is used for neutral and green or yellow green is used for ground depending on the power supply version 6
153. capacitors are charged from a current pulse supplied from the storage capacitors The storage capacitors are charged by the HV power supply module between laser pulses As soon as the storage capacitors are charged the laser is ready to pulse The laser pulse is triggered by the HV switch thyratron which switches the recharging of the storage capacitors The working principle of the high voltage circuit is shown in Figure 10 jho CM Le FT Figure 10 Layout of the high voltage circuit Key to Figure 10 A HV power supply B Storage capacitors C Thyratron D Peaking capacitors of the discharge unit E HV trigger generator COHERENT LAMBDA PHYSIK 10 2005 19 FUNDAMENTALS 2 4 4 1 2 4 4 2 20 HV Power Supply The HV power supply module is a high voltage switching power supply specifically designed for charging capacitors in laser systems Incorporated is a high performance control module that precisely regulates the output voltage automatically compensating for line load temperature repetition rate and program voltage variations The HV power supply module converts mains current into the high voltage DC required by the discharge circuit Thyratron The laser uses a simple 3 inch hydrogen thyratron a thermionic tube It is used as an active switch to discharge the storage capacitors The anode of the thyratron is connected to the charging voltage The cathode is connected to gr
154. ce see Figure 69 A to stop the laser BREAK ee Figure 69 BREAK key on the keypad 2 Close the beam shutter NOTE The lt RUN STOP gt key can also be used This will however not stop the laser if a command that requires input is active COHERENT LAMBDA PHYSIK 10 2005 157 OPERATION 6 2 6 158 Shut Down Laser Device Purpose Shut down the laser device prior to maintenance or after use Tools and Materials e None Preconditions e No laser radiation being emitted see Section 6 2 5 or other routines e g window exchange active Switching off the Laser Device 1 Turn the key in the key switch see Figure 67 C on page 154 counter clockwise to the O setting The CONTROL SUPPLY lamp see Figure 67 D goes out WARNING Prevent accidents through unauthorized operation To prevent unauthorized operation of the COMPex ro always remove the key from the key switch after shutting down the laser device Keep the key in a safe place 2 Remove the key from the key switch and keep in a safe place 3 Turn the main switch see Figure 67 A counter clockwise to the OFF setting The LINE ON lamp see Figure 67 B goes out 4 Where applicable turn off the cooling water supply at the source 5 Turn off the gases see Section 6 2 7 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Routine Operating Sequences 6 2 7 Turn Off Gases NOTE This section desc
155. condition is activated automatically after switching on the laser device from the laser mode On when the command to switch off the laser is sent automatically after an interlock From the Off mode laser operation can be started and maintenance actions can be executed Syntax Setting OPMODE OFF Polling OPMODE Reply OFF WAIT OFF aa Syntax Description WAIT During laser start up the laser waits for power supply standby and the gas circulation fan to start duration approx 5 seconds aa Status code see Section 8 2 4 on page 270 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Operating Modes 8 2 3 2 ON In this mode the laser is switched on Light pulses will be generated and emitted according to the currently active laser parameters This mode is selected from the Off mode when the command to start the laser is sent During the start delay period see Section 8 2 3 1 OFF WAIT the laser start can be terminated by sending the command OPMODE OFF Syntax Setting OPMODE ON Polling OPMODE Reply ON ON aa Syntax Description aa Status code see Section 8 2 4 on page 270 Status Code Priorities It is possible that two or more ON status codes apply simultaneously In this case the COMPexPro replies with the ON code with the highest priority The priority for each code is listed in the following table A higher number corresponds to a higher priority If tw
156. constant mode without partial gas replacement EGY NGR HV constant mode HV The selected running mode will become immediately active and is indicated in the top left corner of the handheld keypad display When the HV constant mode is selected the currently set charging voltage becomes active When one of the energy constant modes is selected the currently set beam output energy value becomes active The high voltage value at which a partial gas replacement occurs HV ep value can be displayed by pressing the lt HV gt key For further information about energy management modes see Section 2 7 on page 31 Preconditions e Laser device switched on e HV constant mode HV charging voltage correctly set see Section 6 3 5 on page 164 e Energy constant mode Beam output energy value correctly set see Section 6 3 4 on page 163 Gas cylinder valves open and pressure regulators correctly set see Section 6 2 2 on page 150 Selecting the Running Mode CAUTION Risk of processing wastage During a partial gas replacement EGY PGR the pulse energy fluctuations are higher than during normal operation Ensure that the currently active processing application will not be harmed 1 Press lt MODE gt The bottom line of the handheld keypad display reads MODE current selection HV EGY PGR EGY NGR 2 Press lt Cursor Right gt and or lt Cursor Left gt to select the desired running mode User Manual COMPexPro
157. ctric discharge is used which is also integrated in the laser tube The amount of energy needed for the electrical discharge requires high voltages Therefore COMPex Pro laser devices are equipped with a high voltage power supply COMPexPro laser devices are designed to emit laser light in pulses The electrical energy for each laser pulse is stored in an array of capacitors which are supplied by the high voltage power supply When a laser pulse is needed an electronic switch technically realized by a thyratron enables the capacitors to be discharged The electrical energy stored in the capacitors is then transferred to the laser active medium via an electrical discharge between a set of electrodes in the laser tube and thus stimulates the laser pulse For the control of the laser beam energy COMPex Pro laser devices are equipped with an energy monitor The internal control of the components in COMPex Pro laser devices is achieved by a built in laser control device the Communication Interface The functional design of the COMPex ro laser device is shown in Figure 3 Figure 3 Functional design of the COMPexPro Key to Figure 3 Laser tube F Capacitor array High voltage power supply G Communication interface Cl Thyratron H Energy monitor Front mirror partly reflective Rear mirror high reflective Vacuum pump lt 0 COHERENT LAMBDA PHYSIK 10 2005 11 FUNDAMENTALS 2 3 2 3 1 12 System O
158. d refer to the next section User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Transport and Unpacking Damaged Deliveries 3 Do not refuse the shipment 4 Make a corresponding notation on the delivery receipt document and inspect for visible signs of damage to the rigid transport packaging 5 If there are no visible signs of damage to the packaging remove the individual packaging stages and check for visible signs of damage to the laser device 6 If there is no sign of visible damage to the laser device install the laser device If the laser device is defective immediately contact Lambda Physik for further inspection and rectification Remove Rigid Packaging Purpose Remove the top and side panels from the rigid transport packaging At the end of this procedure the laser device remains attached to the base pallet and is protected by the inner cover Tools and Materials e suitable lifting truck fork lift truck e clip removal tool provided e screwdriver for removal of clip removal tool Preparation 1 Using the fork lift truck or appropriate device move the laser device to the location whereit is to be unpacked 2 Set down the laser device in the unpacking location NOTE The original packaging is needed to re ship the laser device Store the removed packaging in such a way that no parts are lost or damaged COHERENT LAMBDA PHYSIK 10 2005 107 INSTALLATION 108 3 Unscrew and re
159. d send a light pulse for a few seconds To check this you will need the help of an additional person Proceed as follows 1st person Disconnect the Data Out FOL from the communication interface Il 2nd person Switch on the 24 V power supply with the key switch Ill 1st person Watch for a light signal in the Data Out socket of the communication interface for several seconds If there is no light the communication interface is damaged Call COHERENT LAMBDA PHYSIK service IV Switch off 24 V power supply with the key switch V Re connect the Data Out FOL to the communication interface 8 Ensure that the FOL data ring is closed To check this you will need the help of an additional person Proceed as follows 1st person Disconnect the Data In FOL from the communication interface II 2nd person Switch on the 24 V power supply with the key switch Ill 1st person Watch for a light signal in the Data In FOL for several seconds If none appears a module is damaged Call COHERENT LAMBDA PHYSIK service IV Switch off the 24 V power supply with the key switch V Re connect the Data In FOL to the communication interface COHERENT LAMBDA PHYSIK 10 2005 297 TROUBLESHOOTING 9 Check for defective FOLs To check this you will need the help of an additional person Proceed as follows 1st person Disconnect Data In FOL from the energy monitor Il 2nd person Switch on the 24 V power
160. d transportation CAUTION Risk of soiling or damaging the laser optics To avoid the formation of condensed water ensure that the max permissible temperature gradient 5 C h is maintained while moving the laser device from the storage area Ensure that all passageways corridors and access points have sufficient clearances Pay particular attention to the clearences required to turn the laser device A suitable fork lift truck or similar device is required to lift the laser device Ensure that the fork length and or the loading capacity are sufficient to safely lift the laser device When using a fork lift truck always transport or lift the laser device together with the base pallet When using a crane position the lifting harness or belt as near to the laser device s feet as possible CAUTION Risk of damaging the laser device incorrect lifting can cause serious damage Use lifting points as far apart as possible to safely lift the laser device COHERENT LAMBDA PHYSIK 10 2005 109 INSTALLATION 5 1 10 110 Remove Anti Static Inner Cover Purpose Remove the anti static inner cover from the laser device and unpack the accessories Tools and Materials e knife for cutting sealing tape Preparation 1 Move the laser device and accessories to the installation area Removing the Inner Covers NOTE The original packaging is needed to re ship the laser device Store the removed packaging in such a wa
161. de Fluorine is in the form of a fluorine helium mixture ratio 95 Yo helium to 5 fluorine Fluorine is characterized by an extremely stinging smell in very low concentrations 0 1 ppm Hydrogen chloride HCl is used as a premix gas with a ratio of gt 0 5 HCI in the premix Both are diluted further with other gases in the laser However they are still present in sufficient quantities in the gas supply to cause serious injury if not correctly handled and used The attention of the user is drawn therefore to the following maximum permitted exposure limits for fluorine and hydrogen chlorine The permitted periods of exposure time with respect to these limits will however depend upon local safety regulations The MAK maximum acceptable concentration level values according to the German publication Technische Regel des AusschuB fur Gefahrstoffe des Bundesministeriums f r Arbeit und Soziales TRGS 900 October 2000 are as follows Fo Limit 0 16 mg m HCI Limit 8 mg m3 The possibility of over pressure of the gas mixture containing fluorine or hydrogen chlorine creates potential hazards with the risk of leakage from the laser tube and gas pipes Under normal operating conditions the overpressure is 2 5 bar 3 5 bar absolute In the event of a leak occurring the release of halogen gas constitutes the greatest hazard COHERENT LAMBDA PHYSIK 10 2005 47 SAFETY 3 2 1 4 48 To remain below the MAK
162. de 3 no gas flow User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Operating Modes 8 2 3 5 8 2 3 6 PASSIVATION FILL The laser tube is evacuated and filled with halogen gas so that the tube can be re passivated Syntax Setting OPMODE PASSIVATION FILL Polling OPMODE Reply PASSIVATION FILL PASSIVATION FILL 3 Syntax Description 3 Status code 3 no gas flow PURGE RESERVOIR The laser tube is evacuated and filled purged with inert gas Syntax Setting OPMODE PURGE RESERVOIR Polling OPMODE Reply PURGE RESERVOIR PURGE RESERVOIR 3 Syntax Description 3 Status code 3 no gas flow COHERENT LAMBDA PHYSIK 10 2005 263 CONTROL SOFTWARE 8 2 3 7 8 2 3 8 264 SAFETY FILL This OPMODE can only be sent by the Communication Interface The safety fill is started when the permissible period for the evacuation of the laser tube is exceeded 30 mbar is not reached within 11 5 minutes The laser tube is automatically filled to 1050 mbar with the gas connected to the Buffer connection Neon Syntax Setting OPMODE SAFETY FILL Polling OPMODE Reply SAFETY FILL SAFETY FILL 3 Syntax Description 3 Status code 3 no gas flow TRANSPORT FILL The laser tube is evacuated and filled for transport or storage to 1050 mbar with the gas connected to the Buffer connection Neon Syntax Setting OPMODE TRANSPORT FILL Polling OPMODE Reply TRANSPORT FILL TRANS
163. does not evacuate the circuits in the laser device Also operating pressure remains in the external gas supply lines For additional safety close the corresponding external gas shut off valves when locking out the laser device Always tighten any screwed connections that have been loosened during maintenance and repair Any safety devices removed for set up maintenance or repair purposes must be refitted and checked immediately upon completion of the maintenance and repair work Ensure that all consumables and replacement parts are disposed of safely with minimum environmental impact and in accordance with the valid national and local regulations for waste disposal COHERENT LAMBDA PHYSIK 10 2005 43 SAFETY 3 2 44 Specific Safety Aspects This section contains the following Section 3 2 1 describes the physical and chemical hazards related to the laser device Section 3 2 2 describes how operators or users of the laser device shall protect themselves against these hazards Section 3 2 3 summarizes the constructive protective measures against these hazards Lasers and laser systems are classified according to their relative hazards These classifications can be found in the American National Standard for the Safe Use of Lasers ANSI Z 136 1 2000 FDA 21 CFR 1040 10 and 1040 11 IEC 60825 Within this classification the COMPexPro is a Class IV high power laser device when operated with open covers during
164. duct system of systems used for the processing of breathing air e g air conditioning or ventilating systems Ozone can be generated by ultra violet radiation in particular with ArF at 193 nm This gas should be removed with a proper air exhaust or by flushing the beam path with Nitrogen or Argon Always wear protective gloves when changing halogen filters as they are hygroscopic and contain oxidizing agents Gas cylinder valves should be closed except while filling the laser or when running the laser in the constant energy mode EGY Const As the premix gas contains halogen a needle valve or cut off valve should be installed in the fluorine premix gas line The additional valve is to be located near the gas cylinder to protect the gas line and pressure regulator against corrosion and provide additional gas protection Do not solely rely on the main gas cylinder valve to provide adequate protection User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Specific Safety Aspects 3 2 2 4 3 2 2 5 e The pressure regulator situated between the external gas cylinder and the laser should be checked regularly The maximum permitted value while cylinders are opened is 5 0 bar abs respectively 7 0 bar abs to operate the halogen source s pilot valve Pressure Vessel Safety Gas pressures of up to 3 8 bar abs are permitted in the laser tube If pressure rises above that a built in safety valve releases the o
165. e 58 Figure 59 Figure 60 Figure 61 Figure 62 Figure 63 Figure 64 Dimensions COMPexPro 100 Series and COMPexPro Fo 59768 85 Dimensions COMPexPro 200 Series 86 Beam exit position o oooooooccooommoo 87 Foot configuration eee eee 88 Gas connections 000005 89 Position of the mains connection 92 Cooling water connections 93 Location of air intake and exhaust 94 Remote socket cee eee ee eae 95 Maintenance area of COMPexPro 100 series and COMPexPro Fo 98 Maintenance area of COMPexPro 200 series 98 Permitted tilting gradients 102 Rigid transport packaging 104 Shock absorbing 016575 777 105 Location of clip removal tool 108 Removing the 05 a 108 Laser device 100 7777 112 Remote socket connections 114 Loosen the exhaust fan outlet 118 Removing plug from vacuum pump 120 Inserting halogen filter Aa 120 Adjusting the anti torsion fork 121 Tightening the gas connections 124 Water line connections a 125 Set of water hose connectors 126 Insertion of nozzle into water hose 127 Connecting RS232 plug to the laser device 129 Connecting RS232 plug to the handheld keypad 129 Ope
166. e Halogen Line CAUTION Incorrect operation can damage the pressure regulator If pressure is applied to a pressure regulator with low secondary pressure the pressure regulator membrane may become damaged Always ensure that the pressure regulator is closed before opening the gas cylinder valve 1 Open the halogen gas cylinder valve 2 Set the pressure regulator in the halogen line to at least 4 bar abs NOTE The pressure regulator has to be set to at least 4 bar to completely evacuate the line between the gas cylinder valve and the laser head With lower pressure settings residues may remain in the line between the pressure regulator and the gas cylinder valve 3 Close the halogen gas cylinder valve 4 Evacuate the halogen gas line without refilling it see Section 7 4 1 on page 179 Purging the Halogen Gas Line WARNING Health hazard through halogen gases The halogen gas line to an excimer laser contains a mixture of up to 5 fluorine gas or 0 5 hydrogen chloride Always purge the halogen gas line before separating it Avoid breathing in or skin contact with halogen gases 5 Open the inert gas cylinder valve 6 Set the pressure regulator in the inert line to at least 4 bar abs NOTE The pressure regulator has to be set to at least 4 bar to completely purge the line between the gas cylinder valve and the laser head With lower pressure settings residues may remain in the line between the pressure reg
167. e are not properly connected Solution Switch off the laser device and re connect the handheld keypad to the laser device Reason 2 Communication link damaged Solution Call COHERENT LAMBDA PHYSIK service Fatal Error LWL Datalink OFF 5 LWL is the German language abbreviation for Lichtwellenleiter a Fiber Optics Light Waveguide FOL Reason 1 The FOL data ring is improperly connected Solution 1 Switch off the laser device 2 Remove the service cover 3 Remove the cover from the communication interface 4 Remove the communication interface without disconnecting the FOLs 5 Ensure that all FOLs are properly connected Each FOL is marked with a code indicating the port to which it is to be connected User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Warnings and Error Messages Reason 2 FOL data ring interrupted or a module damaged Solution 1 Switch off the laser device 2 Remove the service cover 3 Remove the cover from the communication interface 4 Remove the communication interface without disconnecting the FOLs 5 Ensure that all FOLs are properly connected to their ports energy monitor communication interface gas handling module 6 Check that all FOLs have a min bending radius of 50 mm 7 Ensure that the Communication Interface is sending a red light pulse After switching on the 24 V power supply the communication Interface shoul
168. e beam at head height Tools and Materials e None Preparation 1 Fully familiarize yourself with the information about ultraviolet light and ultraviolet radiation safety in Sections 3 2 1 1 and 3 2 2 1 of this manual Procedure 2 Shielded beam path Ensure that all shields are correctly installed i e there is no risk of unwanted beam emission 3 Unshielded beam path Ensure that there are no persons reflective objects or objects which can ignite and or emit fumes in the beam path 4 Secure the beam path and vicinity of the beam path against entry of persons COHERENT LAMBDA PHYSIK 10 2005 149 OPERATION 6 2 2 150 Turn On Gases NOTE This section describes gas handling for a straight forward one gas source for one laser device system The COMPexPro may however connected to an external gas handling system that serves a number of consumers For exact information about operating the gas handling system please refer to the system supplier s instructions Purpose WARNING Health hazard through halogen gas leakage To minimize the risk of gas leaks keep the gas cylinder valves closed except when the currently active operating mode or working action requires the external supply of gas Turn on the externally supplied gases We differentiate between excimer laser gases and the purge gas The excimer laser gases are required for laser operation The gases are to be turned on when running the laser i
169. e for beam energy in the Section 8 3 4 2 EGY SET XXX XX my 05 EGY Const mode EGY RANGE XXX r s 8 Tolerance range for beam Section 8 3 4 3 energy FILTER XX pulses r s Amount of pulses to calculate the Section 8 3 7 2 average beam energy FILTER XXX or Yo r Halogen filter filling level Section 8 3 7 3 CONTAMINATION RESET 5 Reset filling level to zero GASMODE SINGLE r s Gas mode Section 8 3 5 1 GASES or Single gases PREMIX Gas mixtures premix HALOGEN XXXX mbar r s Halogen gas partial pressure Section 8 3 5 2 HV XX X kV r s Preset value for loading voltage Section 8 3 4 4 in the HV Const mode INERT XXXX mbar r s Inert gas partial pressure Section 8 3 5 2 Sheet 1 of 2 272 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Parameter Commands Name Format Unit Access Function Description read set INTERLOCK XX or r List active interlocks Section 8 3 7 4 NONE LEAKRATE XXXX mbar r Halogen fluorine source leak Section 8 3 8 3 2 min rate MENU X r s Number of current gas menu Section 8 3 5 3 or RESET s Reset menu to factory settings MODE HV r s Operating mode Section 8 3 4 1 EGY NGR or EGY PGR POWER YES or r Power stabilization according to Section 8 3 7 5 STABILIZATION NO EGY RANGE reached or not ACHIEVED PRESSURE XXXX mbar r Laser tube pressure Section 8 3 7 6 PULSE DIFF XXXX pulses r Difference between trigger
170. e halogen gas line to the required pressure The gas pressures are indicated in Section 4 2 2 on page 76 3 Open the valve on the helium gas cylinder 4 Set the pressure regulator in the helium gas line to the required pressure The gas pressures are indicated in Section 4 2 2 on page 76 5 Press lt F3 gt 6 Press lt EXE gt to confirm the choice and start the re passivation procedure The tube is evacuated to 30 mbar and filled with 200 mbar halogen gas and 900 mbar helium 7 Leave the laser with the passivation fill for at least 8 hours e g overnight to allow the halogen to displace the oxygen compounds from the surfaces with which it comes into contact Finalization 8 Carry out a new fill see Section 7 5 1 The displaced oxygen compounds are removed during evacuation of the tube before the fresh gas is filled COHERENT LAMBDA PHYSIK 10 2005 199 MAINTENANCE 7 6 200 Tube Optics Maintenance Maintenance of the laser optics consists of cleaning and exchange Cleaning the optics is necessary after a specific number of pulses dependent on gas mixture wavelength if the pulse energy is too low if the beam profile is poor Exchange of the optics is necessary if the optics are damaged e g scratched if the optics are unable to be cleaned e g burned in deposits after a specific number of optics cleaning operations dependent on gas mixture wavelength Each of t
171. e laser device The OFF mode can also be selected by the user from the ON mode to stop laser operation In the OFF mode all laser device system modules except the high voltage HV power supply are switched on No laser operation occurs no emission of laser radiation The gas circulation fan in the laser tube runs to ensure that the laser gas is at working temperature This mode should be selected if the laser device is not directly in use Gas actions like PGRs and New Fills can this be reduced as the laser gas is not being exhausted From the OFF mode the user can select service actions start the laser or switch off the laser Before reaching the ON mode the laser passes through the OFF WAIT mode COHERENT LAMBDA PHYSIK 10 2005 37 FUNDAMENTALS 2 8 2 2 8 3 2 8 4 2 9 38 OFF WAIT Mode The temporary OFF WAIT mode is automatically passed through when the laser is starting In this mode the laser controller waits for the HV power supply to enter standby and the gas circulation fan to start This condition remains for approx 5 seconds ON Mode The ON mode can only be started from the OFF mode In this mode the HV power supply is switched on and laser operation starts with the currently active operating mode energy management selection and parameter settings When the laser is in the ON mode and the shutter is open the workpiece will be irradiated with laser light pulses For short breaks in laser
172. eceived through the FOL data ring Apart from turning on the externally supplied gases and regulating the pressure of the gases in the external gas circuits the gas supply and exhaust requires no operation or routine maintenance COHERENT LAMBDA PHYSIK 10 2005 25 FUNDAMENTALS 26 A1 A2 A3 M Figure 14 Laser gas supply exhaust with fluorine source Key to Figure 14 Gas connection 1 Buffer 2 Rare 3 Inert Excimer laser gas valve Buffer Rare Inert Halogen Vacuum valve Laser tube head valve Laser tube NovaTube Laser tube pressure sensor Pressure relief valve Halogen filter Vacuum pump Pilot valve Fluorine valve Halogen Buffer valve Reactor Accumulator Control pressure connection 6 5 bar Exhaust NXZZ PF XACETIOQTMOOO gt User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Primary System Components 2 4 8 Cooling System The efficiency of commercial excimer lasers is theoretically in the region of between 1 and 4 The remaining energy is almost completely converted to heat and has to be eliminated by an effective cooling system COMPexPro laser devices are air cooled They use environmental air for cooling The COMPex Pro 110 COMPex Pro 205 and COMPex Pro Fo however also require water cooling when they are continually operated at repetition rates exceeding 20 Hz Air Cooling The laser
173. ect to routine maintenance User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Primary System Components 2 4 7 Gas Supply Exhaust System The required excimer laser gases are supplied from an external source through dedicated supply lines In the case of fluorine the gas can either be supplied from a gas cylinder or from a halogen source fluorine source The gases are mixed for laser operation in the laser tube The gas evacuated from the laser tube is filtered so that it is free of halogens and then blown out through the exhaust The inlet and evacuation of gases is controlled by solenoid valves actuated through signals received through the FOL data ring The layout of the gas supply and exhaust system is shown in the following diagrams Figure 13 shows the layout of the gas supply exhaust system when the halogen is supplied from a gas cylinder Figure 14 shows the layout of the gas supply exhaust system when the halogen is supplied from a halogen source fluorine source The function of the halogen source is however not described in this section as this is explained in more detail in a separate manual that will be provided if the laser is equipped with a halogen source COHERENT LAMBDA PHYSIK 10 2005 23 FUNDAMENTALS 24 dp m dont TT Figure 13 Laser gas supply exhaust without halogen source R Key to Figure 13 Gas connection 1
174. ed State Dimer Gas A short lived diatomic molecule composed of an excited and a non excited atom In an Excimer laser it is created by a high voltage discharge When decomposing the excimer gas emits the laser radiation Flushing Evacuating a gas line Flushing Procedure Procedure to allow optics replacement and optics cleaning COHERENT LAMBDA PHYSIK 10 2005 329 GLOSSARY 330 FOL Abbreviation for Fiber Optics Light Wave Guide Information link that transmits via light signals Used in excimer lasers to keep the information links free of electrical interference The COMPexPro software sometimes uses the German language abbreviation LWL for Lichtwellenleiter is used FWHM Abbreviation for Full Width Half Maximum The width of a graph measured at 50 of the peak transmission see Figure 115 Yeh FWHM Figure 115 Full Width Half Maximum FWHM Gas Lifetime Dynamic Gas Lifetime Lifetime of the gas in the laser tube with respect to operation Specified as the number of pulses it takes for the beam energy to decrease from max value after new gas fill to half output energy 50 To test this the laser operates at maximum repetition rate with no interruption and max high voltage Neither Halogen Injections nor any other gas actions are performed Static Gas Lifetime Lifetime of the gas in the laser tube while non operation Specified as the time it takes for the beam energy to decrease from
175. ee ee eee 195 Meaning of expression lant ASK LS KAT LA RN 6 Start laser device 022 6 Mechanical safety features 0 60 MENU RESET key 000 e cece ee eee ees 146 MENU SEL Keyes aka 2 Pana KR Pa eae aes 146 MISSING parts csi dica cias viene hahaa ae Rieke 106 MISSING Pul Sn aae a aaa e a E A 244 MODE KC a must rana perito patient Gage Pimp ma Aa ans 145 N Name Definition of name in descriptions 257 NoWitillla oxida ala natos Sade ce 150 192 332 NEW FILL KEY na a kaka pee edd e mana Peeks 148 193 NEW FILL mode 8 NN NG KN AN a 38 AROGE s redant rata an 28 No Gas Replacement NGR mode 5 36 No trigger signal 0 244 311 NovaTube Functional description 00 16 Numerical input keys Handheld keypad 0 143 0 ORF mode geod it dl AR A a teed fe hdc ALA 37 OFF WAIT mode 38 ON MOJE 273 on trad ee Bg eed et PANG ee Pe hee LALA 38 Operating elements 00020 138 Operating modes OPMODE CAPACITY 567 208 OPMODE CONT 0 265 OPMODE ENERGY CAL 222 269 207 OPMODE FLUSH OPMODE FLUSHING 5 205 OPMODESE gt lt seat ALENG PBA BEL ea 206 OPMODE LL OFF 5 268 OPMODE MANUAL FILL INERT 2 2220 266 OPMODE NEW 1 5 202 OPMODE OFF 2272 0 pn a a a 200 9 7 261 OPMODE PASSIVATION FILL 022 263 COHERENT LAMBDA PHYSIK 10 2005 347 INDEX 348 OPMODE PGR anak os ANAN Pare agi pig
176. el does not decrease to less than HV epi 0 6 kV a PGR will be performed when the HV level again reaches HVrepl see Figure 20 If a PGR is successful i e the HV level decreases after the PGR to less than HV ep 0 6 kV the next gas replenishment action will be a HI again If a PGR is not successful i e the HV level does not decrease after the PGR to less than HVrepi 0 6 kV then the next gas replenishment action will be a PGR If three PGRs in series are not successful the message Preset energy too high will come up when HVrepi is reached again when more than 64 pulses have been fired since the last PGR When HV max is reached laser operation will be stopped User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Energy Management Figure 21 shows a flow diagram for laser operation in the EGY CONST mode with PGR partial gas replacement HV epi reached represents a number that appears in the gas menu HV less than HV 0 6kV repl Laser operation continues Laser runs until HV is Ne reached again Laser runs until HV is repl reached again less than HV 0 6kV repl Warning Laser runs until A Interlock HV ax alan Preset Energy is reached too high Figure 21 EGY PGR flow diagram COHERENT LAMBDA PHYSIK 10 2005 35 FUNDAMENTALS 2 7 3 3
177. emaining pressure drops below 20 bar e When gas cylinder has passed expiry date Time Required e 05h COHERENT LAMBDA PHYSIK 10 2005 187 MAINTENANCE 188 Tools and Materials e Appropriate wrench to disconnect reconnect gas cylinders e Stainless steel cap e g laser device s gas line blanking plug removed during the installation for sealing the halogen line e Helium leak tester or liquid leak tester e g SNOOP NOTE Make sure that the chosen leak tester is suitable for use in the environment in which the laser is installed Liquid leak testers are for instance not permitted in cleanrooms e Ethanol and cleaning paper when SNOOP was used CAUTION Incorrect handling will cause unnecessary downtime Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas system pressures of below 20 bar abs may be critical e Gases as specified see Section 4 2 2 on page 76 Gas cylinders with a remaining pressure of at least 10 bar abs Preconditions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device swi
178. emp lt ns Characteristic Fo Unit Wavelength 157 nm Max pulse energy 10 my Max repetition rate 50 Hz Max average power 0 5 W Beam dimensions 19 4 7 gt 2 mm v Beam divergence 6x2 mrad v x h a measured at low repetition rate 5 Hz b average value measured at max repetition rate c typical value FWHM Full Width Half Maximum 74 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Facilities 4 2 4 2 1 4 2 1 1 4 2 1 2 Facilities Environmental Conditions This section indicates the recommended environmental conditions for the transport storage and operation of the COMPex ro laser device Transport and Storage NOTE The indicated temperature range only applies when all cooling water has been bled from the system Temperature range Max temperature gradient Ambient air pressure Max pressure gradient Humidity Max acceleration during transport Operation Temperature range Max temp gradient Altitude Max pressure gradient Humidity Cleanroom class CAUTION 20 to 50 Celsius 5 C h 650 to 1070 mbar 75 mbar h less than 70 RH 1G 5 to 30 C 5 C h 0 to 2000 m above sea level 75 mbar h 30 to 70 RH 10 000 Risk of contaminating optical components The ambient air is to be free of dust oil organic particles corroding substances and photochemically decompositable or depositable compounds Protect the beam
179. en posters on the wall curtains that are not coated with fire retardant wooden panels or similar materials can be easily set on fire by direct or reflected laser radiation e Only beam stops made of non flammable materials not asbestos should be used e Many fluids and solvents e g cleaning agents used for maintenance are combustible The intense beam of the laser or a spark from an internal switch can ignite vapors from these materials Prevent the laser beam from contacting flammable materials used in the laser area e Move containers of flammable materials as far from the laser system as possible and shield them from the beam with opaque materials Under no circumstances should these solutions and vapors be placed in the beam path or near the system COHERENT LAMBDA PHYSIK 10 2005 51 SAFETY 3 2 2 2 52 Electrical Safety WARNING Electrical hazards If the laser device is completely shut down for maintenance and repair work it must be secured against inadvertent starting Ensure that the electrical system is locked out and tagged out prior to servicing by locking the key switch of the laser device and tagging appropriate warning signs High voltages of up to 32 kV are generated within the laser equipment The following precautions should be observed e Local safety regulations must always be strictly complied with e Switch off the laser device immediately with an interlock switch or Emergency Off EMO s
180. en the settings have been saved the message ready SWITCH MAINS OFF appears When the laser is running press RUN STOP to immediately stop laser emission TRIGGER INT EXT Key The TRIGGER INT EXT key allows you to change between the internal and external trigger modes With internal triggering laser pulses are triggered by the laser device s internal trigger generator With external triggering laser pulses are triggered from an external trigger generator connected to the external trigger socket on the laser head After pressing TRIGGER INT EXT the desired mode is selected with the cursor keys and confirmed by pressing the ENTER key User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Operating and Display Elements 6 1 3 9 6 1 3 10 MODE Key The MODE key allows you to select the desired running mode see Section 2 7 on page 31 HV selects the HV constant mode In this mode the high voltage remains constant Consequently the beam energy will slowly decrease during operation as the laser gas deteriorates EGY PGR selects the energy constant mode with partial gas replacements In this mode the beam energy is kept constant by continuously increasing the high voltage HV to compensate for the deterioration of the laser gas When the HV reaches a preset replacement value the gas in the laser tube is replenished and the HV value is correspondingly reduced EGY NGR selects the energy constant mode
181. entified using the command INTERLOCK Solution See Section 9 2 on page 308 Leak Check Windows FLUSHING LEAKTEST CONT 30 Reason A leak test during the flushing procedure has failed Solution Check the tube windows for leaks After solving the problem continue by pressing lt ENTER gt with external PC send OPMODE CONT User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Warnings and Error Messages 9 1 13 9 1 14 9 1 15 Low Light OFF 26 The energy monitor has not detected a laser light pulse after a trigger pulse Reason At least 30 of all pulses within 10 seconds are missing Solution See Section 9 8 on page 319 Low Pressure OFF 10 ON 10 This is a warning or error message relating to the fluorine source Please refer to the fluorine source s manual for further information New Gas Fill Needed OFF 8 ON 8 This message only occurs in Energy Constant Mode It may be either a warning or an error message Warning the charging voltage has exceeded the threshold voltage HV rep Error message the charging voltage has exceeded the maximum possible voltage HV max Reason 1 The laser gas is of insufficient quality Solution Perform a New Fill see Section 7 5 1 on page 192 Reason 2 The EGY Const value is too low Consequently the HV is lower than the lasing threshold Solution Increase the EGY Const value If the problem remains
182. epending on the size of the card and initial adjustment of the optics these two light spots may already be visible on the card see Figure 92 Figure 92 Reflection of alignment laser on card alignment necessary 7 Use the long 3 mm allen key to adjust the horizontal and vertical adjustment at the output coupler until the reflected light is concentric with the alignment laser beam at the pin hole 8 Using the long 3 mm allen key adjust the horizontal and vertical adjustment at the HR rear mirror until the reflected light is concentric with the alignment laser beam and reflected light from the output coupler at the pin hole see Figure 93 ae oT Figure 93 Reflection of alignment laser on card optics aligned NOTE The reflection from the output coupler is dimmer and larger in diameter Finalization 9 Re install the components removed to gain access to the tube optics NOTE The exact procedure depends on the version of the COMPex ro For further information please refer to the appropriate optics exchange procedure see Section 7 6 on page 200 COHERENT LAMBDA PHYSIK 10 2005 235 MAINTENANCE 7 9 236 Installation and Alignment of Unstable Resonator Optics Option NOTE Unstable optics are available for the COMPexPro 100 and COMPexPro 200 They are not available for the COMPex ro Fo The unstable resonator configuration requires the use an Unstable Resonator Adapter Purpose Install and
183. er components in the system to which the laser device is connected The required intervals and actions differ depending on the version of the laser device COMPexPro 100 COMPex Pro 200 Before storage fill Maintenance Interval Action Time Required Comments Every 5 to 25 million pulses see Section 7 5 1 on Every 1 to 2 weeks Newigas m Ush page 192 Before a new gas fill After a week of non Flush gas lines 0 1 h DEEN AMON operation pag Every 10 to 30 million pulses E Every 3 to 5 new gas fills Clean tube optics 1 0h See Section 7 6 1 on i age 201 GNG UG lo UNO Renew tube optics 1 0h pag Alion b 10h See Section 7 8 on Whenever the tube windows laser beam page 232 have been cleaned exchanged Calibrate energy 0 75 he See Section 7 7 1 on monitor page 223 MiC every energy monitor Clean beam splitter 05h 7 7 7 2 1 Every 4 weeks Check halogen filter 0 05 h See Section 7 11 1 on Before a new gas fill level page 246 When indicated by the laser See Section 7 11 2 on control software y Replace halogen filter 0 25 h page 246 Every 300 million pulses Check adjust thyratron 0 25 h See Section 7 10 on voltages page 242 If pressure in the gas Change halogen gas 0 75 h See Section 7 4 3 on cylinder drops below 10 bar cylinder page 182 a nA del has Change rare inert or 05h See Section 7 4 4 on buffer gas cylinder
184. er eye protection and will illuminate approx 2 seconds prior to starting laser operation Handheld Keypad The handheld keypad see Figure 62 controls the laser through the communication interface It consists of a LCD display and membrane keyboard NOTE The operating elements on the handheld keypad are briefly described in the subsections indicated in the Key to Figure 62 For further information regarding the specific use of the keys within particular procedures please refer to corresponding section in this manual User Manual COMPexPro Series A0510COMPPRO AO510COMPPRO Operating and Display Elements O N Figure 62 handheld keypad Key to Figure 62 RUN STOP key TRIGGER INT EXT key MODE key REPRATE HV EGY keys COUNTS keys GAS keys MENU keys Display Function keys EGY CAL key BREAK key EXE key Cursor keys ENTER key Numerical input keys lt 2777 6 2 0 COHERENT LAMBDA PHYSIK 10 2005 see Section 6 1 3 7 on page 144 see Section 6 1 3 8 on page 144 see Section 6 1 3 9 on page 145 see Section 6 1 3 10 on page 145 see Section 6 1 3 11 on page 146 see Section 6 1 3 15 on page 148 see Section 6 1 3 12 on page 146 see Section 6 1 3 1 on page 142 see Section 6 1 3 14 on page 147 see Section 6 1 3 13 on page 146 see Section 6 1 3 6 on page 143 see Section 6 1 3 5 on page 143 see Section 6 1 3 3 on page 143 see Section 6 1 3 4 on page 143 see Sec
185. er is set to HIGH standard value When no HCI source is connected the setting will also be HIGH The command is available in al modes Syntax Setting ROOMTEMP XXXX Polling ROOMTEMP Reply XXXX Syntax Description XXXX Room temperature range HIGH temperature above 22 C LOW temperatur below 22 C General Information TYPE OF LASER This command requests the type model of laser device Syntax Polling TYPE OF LASER Reply XXXXXXX VERSION This command requests the version of the control software that is used by the Communication Interface Syntax Polling VERSION Reply VX XX COHERENT LAMBDA PHYSIK 10 2005 291 CONTROL SOFTWARE 292 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO TROUBLESHOOTING This chapter describs the detection and rectification of faults that may occur when using the COMPexPro laser device It assumes that you are familar with the contents of this manual particularly the safety instructions WARNING Risk of serious injury and material damage Working procedures that shall only be performed by specially trained and authorized service personnel represent a serious health and safety risk to untrained persons Only perform procedures for which you have received specific training and authorization This possible faults are grouped in this chapter according to symptoms or the means of indication or e g faults that are indicated by interlock message
186. ered Typographic Conventions Menu commands enquiries and prompts are written in uppercase letters enclosed by quotation marks Example ARE YOU SURE Y N Single keys to be pressed are written in angled brackets Example Press lt Y gt to confirm and continue The key description lt ENTER gt is used to describe the key marked or referred to as ENTER J RETURN CR or CARRIAGE RETURN A plus sign between two keys means that the two keys are to be pressed simultaneously Example Press lt CTRL gt lt Q gt to select QUIT Commands to be typed into the keyboard are written in non proportional lower case letters Example Type cd lambda Programming commands of the remote software to be used literally are written in upper case letters Example OPMODE Descriptions in commands or messages that are not to be used literally are written in italic letters Example OPMODE operating mode A permitted command is to be used instead of the words operating mode Examples are written in non proportional upper case letters to simulate the appearance of computer monitor displays or printer output User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Safety 1 2 1 2 1 Trademarks LAMBDA PHYSIK the Lambda Physik logo COMPex HaloSafe MSC NovaTube POWERLOK and Super MSC are registered trademarks of Lambda Physik AG COMPexPro and the COMPexPro logo are trademarks of L
187. ertures in service case e Protective eyeware Preconditions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device switched on and laser ready to operate no radiation being emitted e Pressure regulators and cylinder valves in each gas line closed Preparation 1 Use the 3 mm allen key to remove the front and rear mirror access panels WARNING Risk of injury through laser radiation The laser can be operated when the interlock switches are bridged Safety interlocks shall only be bridged by authorized persons COHERENT LAMBDA PHYSIK 10 2005 237 MAINTENANCE 238 Aligning the Adjustment Laser When the stable resonator is modified for unstable resonator operation an alignment laser e g HeNe laser has to be adjusted to the aligned laser resonator before dismantling the standard optics The optics of the unstable resonator fit into the adjustable mounting normally used for the standard direct sealing resonator components NOTE A The alignment laser beam is directed along the laser tube axis The resonator optics are set perpendicular to the alignment laser beam by monitoring back the retro reflections of the alignment beam Insta
188. escribed in chapters 6 and 7 before working with this chapter The software described in this chapter is the COMPex ro software version 4 8 The software version that is currently installed on your laser device can be called though the polling command VERSION NOTE The COMPex ro Fo series is supplied with software version 4 83 When an upgrade from version 4 82 to 4 83 is planned the EPROM in the basic module of the Communication Interface has to be replaced by the new version CPX BM01 V2 2 COHERENT LAMBDA PHYSIK 10 2005 255 CONTROL SOFTWARE 8 1 256 Communication Syntax All commands are case insensitive text commands Each command is terminated with the lt CR gt Carriage Return character Two fundamental types of commands are used e Setting commands These are used to set laser operating modes or laser parameters e Polling commands These are used to call the current laser status or parameter setting Setting Commands Command syntax name setting lt CR gt Example The command OPMODE OFF lt CR gt has to be sent to the communication interface Cl to switch off the laser Polling Commands Command syntax name lt CR gt Reply syntax for operating modes setting lt CR gt setting status lt CR gt Example The command OPMODE lt CR gt has to be sent to the communication interface to find out the current operating mode of the laser If the laser is ready for operation but at p
189. evice After following all procedures detailed in this chapter the laser device is ready for installation To ensure that the laser device is moved and unpacked safely and that no damage occurs strictly adhere to the instructions in this chapter In addition ensure that the requirements for transport and storage are complied with see Section 4 2 1 1 on page 75 Check that all transport routes corridors and all exits and entrance ways provide suffienct space for the safe movement of the laser device in its respective packing stage WARNING Risk of injury or damage Failure to observe the transportation requirements and restrictions in this section may result in injury to persons or damage to equipment Persons responsible for transporting the system must ensure that all transport requirements are complied with Safety When moving the laser device and its components always follow the standard safety precautions and practices for the transportation and handling of the heavy equipment WARNING Risk of crushing The laser device together with its components accessories and packaging weighs depending on version up to 395 kg 870 8 Ib Always use suitable transport equipment to lift and transport the laser device COHERENT LAMBDA PHYSIK 10 2005 101 INSTALLATION 5 1 2 102 CAUTION Risk of damaging the laser device During transportation and installation keep the laser device as horizontal as possible The lase
190. f a vacuum is not reached there is a relatively large leak in the gas line Check all connections in the line If necessary tighten the connections and repeat the evacuation of the gas line 18 After appoximately 10 minutes check the pressure regualator gauge again A significant increase in pressure indicates a leak 19 If there is a leak tighten the connections and where necessary exchange the sealing ring Following this repeat the leak test Checking the Gas Line for Overpressure Leak Tightness 20 Open the inert gas cylinder valve 21 Set the pressure regulator in the inert gas line to the specified value see Section 4 2 2 on page 76 22 Press lt PURGE LINE gt on the handheld keypad PURGE current selection INERT BUFFER RARE HAL appears in the bottom line of the display 23 Press lt Cursor Right gt and or lt Cursor Left gt to select the desired gas line 24 Press lt ENTER gt to confirm the selection 190 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Gas System Maintenance 25 Press lt EXE gt to start the purging procedure The message PURGE current selection appears in the bottom line of the display The corresponding gas line and the internal gas system are evacuated and filled with inert gas He NOTE Depending on the configuration of the gas system the command has to be repeated until the gas line is completely purged 26 Use a leak tester to check t
191. fer gas connector Rare gas connector Halogen gas connector Inert gas connector Vacuum pump connector Water connection fittings User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO System Overview 2 3 3 Inside View Except COMPex Pro F5 Figure 7 Inside view Key to Figure 7 Thyratron front and HV power supply behind Thyratron adjustment panel Service panel HV discharge unit Power On circuit with key switch transformer Communication interface Cl Fuses Gas valve block Basic module Control box with transmitter reveiver main board Laser tube Power supply for electrostatic gas purifier Fan motor Pressure sensor Beam shielding Beam splitter box Energy monitor UOZATAET TIOTNMOUDOWST COHERENT LAMBDA PHYSIK 10 2005 15 FUNDAMENTALS 2 3 4 2 4 2 4 1 16 Optional Halogen Source Normally the compressed gas cylinders of the halogen gases used must be stored in specially designed safety gas cabinets For safety reasons and to ease the use of COMPexPro laser devices Lambda Physik offers the halogen source Halo Safe as an option This halogen source allows on site production of the required halogen thereby eliminating the need for compressed gas cylinders with hazardous hydrogen fluorine chloride as well as safety gas cabinets This drastically simplifies gas handling In addition the halogen source provides purer halogen than tank haloge
192. from the laser tube and fill the laser tube with the appropriate fresh excimer laser gases The laser tube is automatically evacuated and filled to the required pressure through the dedicated software routine NEW FILL The exact gas mixture is determined through the currently active gas menu The gas lifetime is largely dependent on the operating conditions The frequency with new fills are required should be recorded so that you can prepare a maintenance schedule specific to your individual requirements Note the date and total counter reading at which each new fill is made in your laser logbook The following situations will reduce the laser gas lifetime the laser tube has just been passivated the first fill after a period of weeks without laser operation a different wavelength has been selected the laser tube optics are contaminated high energy values in the EGY CONST mode Maintenance Interval e ArF KrF XeF and XeCl Versions Every 5 to 25 million pulses Every 1 to 2 weeks e Fo Version Every 1 to 5 million pulses Every 3 to 5 days A new gas fill is also recommended e f beam output energy is too low for your application e After a warning or error message PRESET ENERGY TOO HIGH NEW GAS FILL NEEDED or LOW LIGHT e Before calibrating the energy monitor e After re passivating the laser tube Time Required e 05h User Manual COMPexPro Series A0510COMPPRO A0510COMPP
193. g the energy monitor Section 8 2 3 18 258 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Operating Modes 8 2 2 Operating Mode Setting Restrictions In some cases operating commands will not be accepted The table below indicates depending on the current operating mode if an operating command is accepted yes or refused no Current Operating Mode OPMODE Received OPMODE Manual Purge lt xy gt Purge Off On HI PGR New Fill Fill Inert Line 2 Reservoir Off yes yes no yes yes yes yes On yes no yes no yes no no HI PGR yes no no no no no no New Fill yes no no no no no no Manual Fill yes no yes no no no no Inert Purge Flush yes no no no no no no lt xy gt Line Purge yes no no no no no no Reservoir a the restrictions also apply for the command FLUSH lt xy gt LINE b will only be accepted if a gas action HI PGR is necessary NOTE Commands to execute service routines Flushing Transport Fill Passivation Fill etc will only be accepted in the Off mode COHERENT LAMBDA PHYSIK 10 2005 259 CONTROL SOFTWARE 8 2 3 8 2 3 1 260 Description of Operating Modes This chapter describes the various operating modes as well as the commands that are to be used to change the mode and poll the current status OFF In this mode the laser device is switched on and the laser controller is active No action will be executed this
194. ging optical components through contamination Contamination can cause serious damage to the optical components Always wear disposible plastic gloves when working with and on optical components 1 Use the optics wrench to loosen the threaded inset see Figure 85 A Figure 85 Disassembled optics mount F version Key to Figure 85 A Threaded insert C Optics collar B Mirror D Mirror mount 2 Remove the optics collar C from the mirror mount D Ensure that the O ring between optics collar and mirror mount remains in its place in the mirror mount 3 Remove the mirror B from the optics collar Ensure that the red optics spacer remains in its place in the optics collar Reassembling the Mirror Mounts 4 Ensure that the red optics spacer is in its place in the optics collar and insert the mirror See Figure 85 B into the optics collar C with the coating facing the spacer 5 Insert the optics collar into the mirror mount 6 Use the optics wrench to hand tighten the threaded inset to fix the optics collar in the mirror mount User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Energy Monitor Maintenance 7 17 41 Energy Monitor Maintenance Energy monitor maintenance fundamentally consists of cleaning or exchanging the beam splitter and exchanging the energy monitor In certain cases attenuators may also have to be removed or inserted As the procedure differs depending on the version
195. gy in relation to the set values in the EGY PGR or EGY NGR mode This parameter is necessary for the indication of POWER STABILIZATION ACHIEVED The command is only available in the OFF mode Syntax Setting EGY RANGE aaa Polling EGY RANGE Reply aaa Syntax Description aaa Energy tolerance Variable integer 3 places Unit Range 1 to 100 276 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Parameter Commands 8 3 4 4 8 3 4 5 HV This command sets or calls the loading voltage for the HV Constant mode The command is available in all operating modes If the command has no purpose in the currently active mode it will be ignored Syntax Setting HV aa a Polling HV Reply aa a Syntax Description aa a Loading voltage Variable decimal 2 places before and 1 place after decimal point Unit kV Range set through gas menu TRIGGER The laser can be internally or externally triggered This command sets or calls the triggering mode The command is available in the ON and OFF modes Syntax Setting TRIGGER XXX Polling TRIGGER Reply XXX Syntax Description XXX Trigger mode INT Internal trigger generator EXT External trigger generator NOTE The internal trigger generator triggers a sequence of laser pulses without interruption When interruptions are necessary Burst mode the external trigger mode has to be selected and an external trigger generator used CO
196. hat communication with the laser device is not interrupted resulting in the laser device being unexpectedly switched off Syntax Setting TIMEOUT XXX Polling TIMEOUT Reply XXX Syntax Description XX Condition ON active OFF inactive COHERENT LAMBDA PHYSIK 10 2005 283 CONTROL SOFTWARE 8 3 7 8 3 7 1 284 System Status and Maintenance COD This command switches the Charge On Demand function on and off The COD function can only be switched on and off in the OFF mode If the COD polling command is sent in the ON mode the reply will indicate the time delay between the trigger signal and laser pulse i e the capacitor loading time for each pulse NOTE When operating the laser device with COD only use repetition rates up to 50 Hz Higher repetition rates cause missing pulses and are therefore set back to 50 Hz Syntax Setting COD XX Polling COD Reply XX aaa Syntax Description XX Condition in OFF mode ON active OFF inactive aaa Delay time in ON mode Variable integer 3 places Unit us Value depending on laser device Example Activate the COD function in the OFF mode COD ON lt CR gt Request the COD function status in the OFF mode COD lt CR gt ON lt CR gt Request the time delay in the ON mode COD lt CR gt 125 lt CR gt User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Parameter Commands 8 3 7 2 8 3 7 3 FILTER This command set
197. he beam onto the Energy Monitor Some beam splitters have an UV coating This allows a minimum of beam energy loss with a maximum of reflection and transmission Beam splitters may also act as a filter to allow transmittance of only a small range of wavelengths Buffer Gas that provides optimum discharge abilities for the laser gas Neon as a buffer is a patent of Lambda Physik US Patent 4 393 505 Charging Current Current that charges the storage capacitors in the laser COD Abbreviation for Charge on Demand an optional function of the COMPexPro With COD the trigger signal enables the power supply to charge the storage capacitors and thus the discharge capacitors This limits the period of time HV is applied to the thyratron This means HV is only used when needed and HVis not turned on without a trigger signal COHERENT LAMBDA PHYSIK 10 2005 327 GLOSSARY COD has been introduced to enhance components lifetime even further and to prevent self firing Figure 113 shows a laser triggering without COD Figure 114 with COD 1 repetition rate Mi AA Trigger In from Cl A a a tee ee A ba es S rae HV enabled HV on capacitors gt SA a 15 15 Time for possible fail triggering Figure 113 Laser triggering without COD 1 repetition rate CG Trigger In from Cl HV enabled HV on capacitor 1 bus Terargo 1 20us Delay Figure 114 Laser triggering with COD Communication I
198. he gas line connections for leaks 27 If there is a leak tighten the connections and where necessary exchange the sealing ring Following this repeat the leak test Cleaning Refilling and Passivating the Gas Line 28 Close the pressure regulator in the corresponding line 29 Open the corresponding gas cylinder valve 30 Set the pressure regulator in the corresponding gas line to the specified value see Section 4 2 2 on page 76 31 Press lt FLUSH LINE gt on the handheld keypad FLUSH current selection INERT BUFFER RARE HAL appears in the bottom line of the display 32 Press lt Cursor Right gt and or lt Cursor Left gt to select the desired gas line 33 Press lt ENTER gt to confirm the selection 34 Press lt EXE gt a number of times to clean the gas line The corresponding line is evacuated and at the same time refilled with fresh gas NOTE Depending on the configuration of the gas system the command has to be repeated until the gas line is completely filled Finalization 35 When SNOOP was used clean the gas line connections with ethanol and wipe dry with cleaning paper 36 Set the gas cylinder valves and pressure regulators to the settings required for the next laser operation closed for NGR open and correctly set for PGR COHERENT LAMBDA PHYSIK 10 2005 191 MAINTENANCE 7 5 7 5 1 192 Laser Tube Maintenance New Fill Purpose Evacuate spent excimer laser gases
199. he optics is contained in a dedicated optics mount that first has to be removed from the laser device and disassembled before the optic can be cleaned or exchanged NOTE To maximize uptime sets of ready to use laser optics can be prepared and stored in spare mounts This enables contaminated or damaged laser optics to be maintained at your convenience while the laser is running Maintenance of the tube optics differs depending on the version of the COMPexPro laser device The procedures for the COMPexPro 100 and COMPex ro 200 is described in Sections 7 6 1 7 6 2 page 208 and 7 6 3 page 211 The procedure for the COMPex Pro F is described in Sections 7 6 4 page 214 and 7 6 5 page 221 NOTE The optics of the COMPexPro Fo are not intended to be cleaned i e the optics are only to be exchanged User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Tube Optics Maintenance 7 6 1 Exchange Pre Mounted Tube Optics COMPex ro 100 COMPex Pro 200 Purpose Remove the optics mounts containing contaminated damaged or worn optics output coupler and rear mirror from the laser device and insert new or clean premounted optics into the laser device Prior to removing the optics mounts the gas mixture has to be pumped out of the laser tube and the tube refilled with the gas connected to the inert valve Following replacement of the optics a leak test has to be performed These procedures are controlled thro
200. hed on and laser ready to operate no radiation being emitted e All gas cylinder valves and pressure regulators closed Performing a Transport Fill 1 Open the buffer gas cylinder valve 2 Set the pressure regulator in the buffer gas line to the specified value see Section 4 2 2 on page 76 3 Press lt F6 gt The bottom line of the handheld keypad display shows a selection of options 4 Press lt Cursor Rights and or lt Cursor Left gt to select TRANSPORT 5 Press lt ENTER gt to confirm the selection 6 Press lt EXE gt to start the transport gas filling The tube is evacuated and filled to 1500 mbar with buffer gas NOTE A Only interrupt the procedure by pressing lt BREAK gt in case of an emergency As the procedure will be immediately interrupted and the fill is incomplete there may be insufficient pressure in thelaser tube In this case restart the transportation fill B The message SAFETY FILL appears if the evacuation was unsuccessful the remote command OPMODE returns the reply SAFETY FILL As there is most likely a leak a safety fill will be automatically started Disconnect Gas Lines Purpose The gas supply lines are to be disconnected when de installing transporting and storing the laser device To prevent corrosion in the gas system the halogen gas in the lines has to be replaced by inert gas before the lines are separated COHERENT LAMBDA PHYSIK 10 2005 251 MAINTENANCE
201. hich is increased by numerous micro halogen injections back to the normal level During the PGR laser gas is released through the halogen filter and halogen rare and buffer gases are refilled accordingly dependent on the preset gas partial pressures According to the control software configuration a PGR is requested when a given number of pulses is reached after a given time period has elapsed after a predefined increase in the laser tube pressure has occurred when the HV reaches the predefined replacement value and the previous halogen injections did not sufficiently reduce the HV level see Figure 20 asa Energy T Energy gt 7777 HH Time _ ___ HV decrease too low Figure 20 Charging current with Partial Gas Replacement COHERENT LAMBDA PHYSIK 10 2005 33 FUNDAMENTALS 2 7 2 3 34 HI PGR Algorithm The constant energy mode with gas actions Hls and PGRs is known as EGY CONST PGR The sequence of operations in this mode is as follows If HV regulation reaches HV ep after the warm up period a HI is performed If the HI is successful i e the HV level decreases after the HI to less than HVrep 0 6 kV the next gas replenishment will be a HI If the controller already has performed three successful Hls in series the next gas action will be a PGR to adjust all partial gas pressure If an HI is not successful i e The HV lev
202. ibrating the energy monitor 269 Beam energy too low part1 315 Beam energy too low part2 2 316 Beam energy too low part3 317 Beam energy too low part4 4 318 Low Lighting nG ban Kan hal ee ee 319 Low Light no trigger pulses 320 Low Light missing pulses 321 Low Light problem with energy monitor 322 Low Light beam energy too low 323 Fuses at the inner rear side of COMPexPro 324 Fuses at the thyratron adjustment panel 324 Fuses at the rear outside of COMPex ro 325 Laser triggering without COD 328 Laser triggering with 000 328 Full Width Half Maximum FWHM 330 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO INDEX Numerics 24V DC power supply A Active laser medium Additional pulses Adjustment range of feet Air intake Location Specifications Asbestos Basic module Beam dimensions Beam divergence Beam energy too low Beam exit position Beam output energy setting Beam shutter Beam splitter Cleaning Explanation Installing Location Position Purpose
203. ic halogen but not to water oxygen or other molecules Thus it can be destroyed by humidity or other impurities that enter the tube In this case the tube must be repassivated A full passivation is required when the halogen gas has been changed chlorine to fluorine and vice versa A full passivation can only be performed by service personnel Peaking capacitors The discharge of an excimer laser is fed from discharge capacitors peaking capacitors These discrete ceramic high voltage capacitors are coupled directly with the discharge electrodes with minimum inductance The peaking capacitors are charged by a current pulse supplied by the storage capacitors PGR Abbreviation for Partial Gas Replacement Premix Predetermined mixture of the laser gases or its components Purging Cleaning gas lines or the laser tube with inert gas Rare One of the components of the excimer gas Depending on the gas mixture it can be argon krypton or xenon Repetition Rate The number of beam pulses per second Unit is Hz 1 s Reservoir The hydrogen reservoir of the thyratron It provides the necessary hydrogen for thyratron operation COHERENT LAMBDA PHYSIK 10 2005 333 GLOSSARY 334 Resonator The optical resonator is formed using two mirrors The mirrors are arranged on opposite sides of the laser medium the gas thus providing the necessary feedback for the laser oscillator RS 232 C An industry stand
204. ied from separate gas cylinders CAUTION Risk of damaging the laser tube Do not use this re passivation procedure when changing the type of gas in a multigas tube e g fluorine to hydrogen chloride or vice versa In this case contact the Lambda Physik Service Center Time Required e 24 hours recommendation Tools and Materials CAUTION Incorrect handling will cause unnecessary downtime Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas system pressures of below 20 bar abs may be critical e Gases as specified see Section 4 2 2 on page 76 Gas cylinders with a remaining pressure of at least 10 bar abs User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Tube Maintenance Preconditions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device switched on and laser ready to operate no radiation being emitted e Gas cylinder valves open and pressure regulators closed Passivating the Laser Tube 1 Open the valve on the halogen gas cylinder 2 Set the pressure regulator in th
205. ight COMPexPro 100 series 345 kg COMPexPro Fo series 365 kg COMPexPro 200 series 395 kg Accessories separately packed tor COMPexPro 200 series Dimensions 660 mm x 520 mm x 430 mm or 520 mm x 520 mm x 470 mm Weight depending on configuration Laser Device without Rigid Transport Packaging The weight and dimensions of COMPex Pro laser devices and accessories without transport packaging are indicated in Section 4 3 1 on page 84 COHERENT LAMBDA PHYSIK 10 2005 103 INSTALLATION 104 Transport Packaging This section describes the means of packaging the COMPex ro to ensure safe shipment and delivery in the required condition NOTE Always retain the transport packaging to ensure optimum protection of the laser device during sub sequent shipment The transport packaging of the COMPexPro 100 series consists of a single transport container This contains the laser device together with all accessories and components removed from the laser device for transport The accessories and components of the COMPexPro 200 series laser devices are packed in a seperate box The transport packaging of the laser device is in two stages the rigid transport packaging the anti static polyethylene inner cover The rigid transport packaging see Figure 44 fully encapsulates the laser devices and inner cover It consists of a plywood base pallet B and plywood upper panels A at the sides front rear and top Fig
206. iolet radiation which constitutes a hazard to personnel during periods of operation and servicing WARNING The laser beam is very dangerous to the eyes and skin The following are hazardous 1 Direct radiation light as it leaves the laser 2 radiation light which is reflected from a surface 3 radiation light which is diffusely scattered from a surface Always wear appropriate safety goggles and protect your skin when there is a chance of exposure to radiation from the laser Never look into the laser beam If alignment or maintenance work on Class IV laser equipment is necessary everyone in the laser area must wear appropriate protective goggles or other appropriate protective eyewear The mandatory protective goggles provide protection against direct radiation reflected radiation and standard radiation normal operating conditions within the respective wavelength range WARNING Risk of serious eye injury Always wear protective goggles when there is a risk of exposure to radiation from the laser Before putting on the protective goggles check them for any obvious defects As the filter in the protective goggles provides protection for only a narrow band of wavelengths make sure you are wearing the appropriate protective goggles for the laser device in question Check with your Laser Safety Officer or other safety personnel for guidance in selecting the appropriate goggles Contact a manufacturer of protective eyewear fo
207. ions on the laser device Connecting the Water Lines NOTE After tightening the nut on the hose onto the fitting on the laser device the ferrule is formed in such a way that the nut nozzle and ferrule can no longer be disassembled To check the connection unscrew the nut completely A distinct deformation annular bulb must be visible inside of the nozzle 6 Slide the nut Figure 56 A over the nozzle B on to the hose 7 Slide the ferrule C over the nozzle until it reaches its stop 8 While pressing the nozzle against the water inlet connection fitting tighten the nut until finger tight 9 Use the 17 mm wrench to turn the nut approx 1 turns onto the connection on the laser device 10 Unscrew the nut to allow the nozzle to release the tension 11 Tighten the nut once again until finger tight and use the 17 mm wrench to tighten the nut by turning Y rotation for the final fit NOTE When a pipe is to be connected perform steps 6 to 11 in the same way but use the other ferrule and use the cooling water pipe instead of the nozzle COHERENT LAMBDA PHYSIK 10 2005 127 INSTALLATION 5 2 10 5 2 10 1 128 12 Connect the other end of the hose to the water source The type of connection depends on the configuration of the water supply 13 Repeat steps 6 to 12 to fit the second water hose between the connector on the laser device marked WATER OUT and the building drain Tests and Adjustments 14 T
208. ired pressure The gas pressures are indicated in Section 4 2 2 on page 76 4 Press lt PURGE RESERVOIR gt 5 Where necessary press cursor left or cursor right to select PURGE RES 6 Press lt ENTER gt to confirm the choice 7 Press lt EXE gt to proceed The message FLUSHING appears The vacuum pump starts to evacuate the laser tube After reaching 30 mbar the vacuum pump stops inert gas valve opens and the tube is filled to 1050 mbar with inert gas NOTE Only interrupt the procedure with BREAK in case of an emergency As the procedure is immediately interrupted and the fill is incomplete there may be insufficient pressure in the laser tube In this case manually fill the laser tube to 1050 mbar with inert gas see Section 6 4 9 on page 171 or restart the purging procedure Finalization 8 Carry out a new fill before restarting laser operation see Section 7 5 1 COHERENT LAMBDA PHYSIK 10 2005 197 MAINTENANCE 7 5 4 198 Re Passivate Laser Tube Purpose Re passivate the laser tube after a long period without laser operation or when the passivation of the tube has become damaged through contact with the ambient air Halogen gases are aggressive substances To protect the tube and other components these are designed so that a protective passivation layer is formed when the material comes into contact with a halogen gas NOTE This function can only be performed when the laser is suppl
209. irements This section specifies the connections and space that is required for the installation of the COMPexPro laser device 4 3 1 Dimensions and Weight COMPexPro 100 Dimensions Lx Hx B 1300 mm 51 2 in x 795 mm 31 3 in x 385 mm 15 2 in Weight 250 kg 551 2 lb COMPexPro F2 Dimensions Lx Hx B 1300 mm 51 2 in x 795 mm 31 3 in x 385 mm 15 2 in Weight 270 kg 594 7 Ib COMPexPro 200 Dimensions Lx Hx B 1700 mm 66 9 in x 795 mm 31 3 in x 385 mm 15 2 in Weight 325 kg 716 5 Ib Vacuum Pump Dimensions L x H x B without halogen filter 230 mm 9 1 in x 450 mm 17 7 in x 240 mm 9 4 in with halogen filter 230 mm 9 1 in x 530 mm 20 9 in x 240 mm 9 4 in Weight 23 kg 50 7 Ib The physical dimensions are shown in Figures 32 and 33 84 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Connections and Space Requirements Q _ 41 care 5 il BZ IZ a a ka j y 8 i 603 0 750 5 f 30 315 30 oO 1 o l ES LAL I 5 e Je A pa o Lo Na o So a 5 amp 5 O fe A MN 00 i 4 3 141 5 0 518 to 1 So oo y She O fa 354 gt M Figure 32 Dimensions COMPexPro 100 Series and COMPexPro Fo Series Key to Figure 32 a Connection side A Operating panel with fuses b Service side B Air outlet c Beam exit side C Thyratron adjustment panel cover d Top D Beam exit E Foot
210. isassemble the tube optics mounts to remove the mirrors for cleaning or exchange Reassemble the window mounts for installation in the laser device Tools and Materials e Optic mount with contaminated lens e Optics wrench special tool in service case e 2 5mm allen key CAUTION Risk of damaging optical components through contamination Contamination can cause serious damage to the optical components Always wear disposible plastic gloves when working with and on optical components e Disposable skin tight plastic gloves Maintenance Interval Time Required e See Section 7 6 1 on page 201 Preconditions e Mirror mount with contaminated or damaged optic removed from the laser device see Section 7 6 1 on page 201 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Tube Optics Maintenance Disassembling the Mirror Mount Figure 77 shows the components of the mirror mount together with the special tool optics wrench required for assembly disassembly Figure 77 Disassembled optics mount Key to Figure 77 A Counter window mount D Collar B Optic mirror E Mirror mount C Spacer F Optics wrench CAUTION Risk of damaging optical components through contamination Contamination can cause serious damage to the optical components Always wear disposible plastic gloves when working with and on optical components 1 Use the optics wrench to turn approx 5 times and loosen the threaded inset 2
211. l e Halogen gas as specified see Section 4 2 2 on page 76 Gas cylinder with a remaining pressure of at least 10 bar abs Preconditions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device switched on and laser ready to operate no radiation being emitted e Halogen gas cylinder valve open and pressure regulator correspondingly set for secondary pressure see Section 4 2 2 on page 76 COHERENT LAMBDA PHYSIK 10 2005 195 MAINTENANCE 7 5 3 196 Injecting Halogen Gas 1 Press lt F7 gt on the handheld keypad 2 Press lt ENTER gt to confirm that a halogen injection is to be started 3 Press lt EXE gt to start the halogen injection The laser head valve and halogen valve open for two seconds and then automatically close again Purge Laser Tube Purpose Replace the laser gas in the laser tube with inert gas The purge reservoir procedure evacuates the laser tube and fills it to 1050 mbar with the gas that is connected to the inert gas line NOTE The lt PURGE RESERVOIR key calls two different procedures reservoir purging and window exchange The window exchange procedure is described in Section 7 6 1 on page 201 M
212. l COMPexPro Series A0510COMPPRO A0510COMPPRO 4 1 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES This section contains the specifications required to integrate the COMPexPro into a laser assembly or laser unit Due to Lambda Physik s policy of continuous optimization of their laser devices the data contained in this chapter is subject to variation Should information on separate sheets e g laser data sheets attached to or provided together with this Instruction Manual contradict the information in this chapter the information on the separate data sheets has priority Laser Specifications Excimer lasers emit extremely intensive pulsed radiation that represents a potential hazard to personnel during operation and maintenance WARNUNG Risk of serious eye injury through laser radiation Always wear suitable eye protection when there is the risk of exposure to laser radiation Whenever operation maintenance or adjustment work is being performed on a open class IV laser system all persons in the vicinity of the laser shall wear laser protective goggles or other suitable eye protection The necessary protective goggles have to protect against direct reflected and scattered radiation during normal operation WARNUNG Risk of skin injury Direct and reflected laser radiation can cause burns to unprotected skin Only use the laser in accordance with its intended purpose Safety interlocks shall only be bridged by auth
213. l COMPexPro Series A0510COMPPRO A0510COMPPRO Tube Optics Maintenance 7 6 5 33 If necessary remove the sealing plate and insert the optics mount as described in step 31 Turn the bayonet wrench clockwise to fasten the optics mount Leak Testing and Adjusting the Rear Mirror 34 Repeat the steps 20 to 28 from page 218 to perform a leak test and adjust the rear mirror Finalization 35 Re install the service panel removed in step 8 36 Calibrate the energy monitor see Section 7 7 1 on page 223 Disassemble Assemble Tube Optics Mounts COMPex Pro F3 Purpose Disassemble the tube optics mounts to remove the mirrors for cleaning or exchange Reassemble the window mounts for installation in the laser device Tools and Materials e Optic mount with contaminated lens e Optics wrench special tool in service case e 2 5mm allen key CAUTION Risk of damaging optical components through contamination Contamination can cause serious damage to the optical components Always wear disposible plastic gloves when working with and on optical components e Disposable skin tight plastic gloves Maintenance Interval Time Required e See Section 7 6 4 on page 214 Preconditions e Mirror mount with contaminated or damaged optic removed from the laser device see Section 7 6 1 on page 201 COHERENT LAMBDA PHYSIK 10 2005 221 MAINTENANCE 222 Disassembling the Mirror Mount CAUTION Risk of dama
214. l Error COM Datalink 0 0 296 Fatal Error LWL Datalink oooooooooo o 296 Fatal Error Watchdog cece eee eee 299 Fluorine Valve Not Opened 00000 eee eaeee 299 Halogen Pressure Too High 5 299 FIRED sisson Senda Sie A ced eed gs bac aie ethan DA AA Ries 299 Inert Valve Closed 2 00 300 Interlock XXX namamana BG aunties bons de pian BAG ae 300 Leak Check Windows cece eee eae 300 Low Light tii EA 301 LOW ma an ad ea Meee smh Nad 301 New Gas Fill Needed 05 301 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO INDEX No Capacity Left 302 No GasiFlO Wi coat a ri AA As 302 No VAGCUUIN 6 2 ira di a 303 304 Not Available paasa as e 5 AS 304 ORFA E 304 ON 403 6 O a 304 ONAT 6 5 de da 305 POINT i poate te pd o DANG veins Bana 305 Preset Energy too High ce eee ee 305 RAM Check Error 0200 306 TIMEOUT nalang hows KA ed HER es 306 Warm Upi8 seeds Naa di whic i aa Daves 307 Wrong Pressure 307 Warning lights 5 RG te Lege see is 61 Watchdog rusticas it kee aged Mane dances Eh eal ee 29 335 Water Cooling a 2 5 5 rara ae Ghee tebe as 27 Water lines CONNECTION ui as Ya dia 125 Preparing water hoses ea 127 Wavelengths of excimer lasers 225 9 Weight yt tek a PUA abah naga he a ath nA 84 X X character in descriptions a 257 COHERENT LAMBDA PHYSIK 10 2005 353 INDEX 35
215. l be displayed in the bottom line of the handheld keypad display 2 Press lt Cursor Right gt and or lt Cursor Left gt to select the number of the desired gas menu User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Set Up and Service 6 4 3 3 Press lt ENTER gt to confirm the selection 4 Press lt ENTER gt to choose the next partial pressure The factory settings for the partial pressures are optimized and should only be changed when the gas specifications change If necessary the gas menu can be reset to the factory settings see Section 6 4 3 on page 167 5 Where necessary use the numerical keys to enter a new partial pressure The limits for the partial pressures are 20 of the partial pressures defined through the factory settings 6 Repeat steps 4 and 5 for the next gas components 7 Press lt ENTER gt to confirm the settings in the gas menu The laser device will carry out the next new fill on the basis of the revised gas menu data Reset Gas Menu to Factory Settings Purpose Reset the data in the gas menu to the factory settings The following values will be changed Partial pressures Gas mode Repetition rate Energy filter Requirements e Laser device switched on and laser ready to operate laser radiation not being emitted NOTE When the laser is in the OFF mode this command is only available twice Resetting the Gas Menu 1 Press the lt MENU SE
216. l to the laser device and tighten the fixing screws 15 Proceed with step 3 of the energy monitor calibration procedure page 225 Laser Resonator Alignment Purpose Use a visible HeNe or diode alignment laser to align the rear mirror and output coupler so that they are parallel to each other and at right angles to the laser beam This is necessary to ensure even energy distribution and a good beam profile Prior to aligning the optics the visible alignment laser has to be adjusted to pass through the exact center of the laser resonator NOTE This procedure only applies when a dielectric coated HR rear mirror is inserted Aluminum coated mirrors will not transmit the visible light of the alignment laser Alternative Methods WARNING Risk of injury through laser radiation Laser resonator alignment procedures that require working with an open laser beam are only to be performed by authorized persons that have received specific instruction at a COHERENT LAMBDA PHYSIK training course In addition to resonator alignment using a visible alignment laser as described in this section there are other methods of aligning the resonator and optimizing energy distribution and beam profile e g aligning the resonator by optimizing the power output of the laser Alternative methods of laser alignment usually require working with an open laser beam These methods shall only be performed by persons that are authorized and have received s
217. lains aspects relating to the safe operation of the laser device Special Safety Aspects which outlines the risks specific to working procedures with and on this laser device Overview of safety relevant labels which shows the design of and describes the safety labels 3 1 General Safety Aspects 3 1 1 Applicable Standards The equipment has been tested and found to comply with the following standards and directives about safety of laser products IEC 60825 1 1994 A11 1996 IEC 825 1 1993 IEC 61010 1 1990 A1 1992 A2 1995 EN 61010 1 1993 A2 1995 CAN CSA 22 2 No 1010 010 30 UL 3101 1 Low voltage directive 73 23 EEC Pressure equipment directive 97 23 EG All laser products from Lambda Physik are compatible with the European laser safety standard EN 60825 COHERENT LAMBDA PHYSIK 10 2005 39 SAFETY 40 Basic Operation and Designated Use The COMPexPro laser device has been built in accordance with state of the art standards and recognized safety rules Nevertheless its use may constitute a risk to life and limb of the user or of third parties or cause damage to other material property WARNING Potential eye and skin burns Only use the laser in accordance with its designated use Safety interlocks are only to be defeated by authorized personnel WARNING Electrical hazard Safety interlocks are only to be defeated by authorized personnel WARNING Toxic hazards The gas sys
218. laser constant the laser control software s Partial Gas Replacement PGR mode can be selected In this mode various gas actions are performed after a given number of laser pulses after a given time period or when a predefined HV level or laser tube pressure is reached The gas actions performed in the PGR mode can be fundamentally classified as halogen injections see Section 2 7 2 1 and partial gas replacements see Section 2 7 2 2 Halogen Injections Halogen concentration decreases slowly even in well passivated systems This leads to lower pulse energy A portion of halogen is therefore added to the gas fill to compensate for the loss of halogen partial pressure This action is known as a halogen injection Hl User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Energy Management 2 7 2 2 Halogen injections are carried out when the high voltage HV reaches a predefined value for the gas refreshment action This value is referred to in Figure 19 as the replacement value HVrep next Energy T gt rep 5 I min Gasrefreshment Figure 19 Charging current with halogen injections Partial Gas Replacements The partial gas replacement PGR is used to adjust the composition of the gas mixture to the original value and remove impurities which may have built up during laser operation or idle time In addition the PGR adjusts the gas pressure in the laser tube w
219. laser operation The laser device can only be switched on with the key switch see Figure 27 A This prevents inadvertent or unauthorized starting of the laser It cannot be operated with the key in the OFF position and the key cannot be removed in the ON position A Kas LOS E O 0 0 o 0 Figure 27 Key switch 60 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Labels 3 3 e Warning lights Laser radiation warning light see Figure 25 A on page 56 illuminates white when laser radiation is being emitted or can be emitted Mains voltage warning light see Figure 28 A illuminates green when mains voltage is applied to the laser device Control voltage warning light see Figure 28 B illuminates when the control voltage 24 V is switched on D A 5 60000060 B IN Oooo 298 LS NIY 25S SS 0 ISOS Sos SRS CXS Va o 0 NG NS N4 0 Figure 28 Location of voltage warning lights e No polychlorinated biphenyl PCB is used e No asbestos is used Labels This section describes the location and purpose of the safety relevant labels attached to the COMPexPro excimer laser device Ensure that all warning labels are affixed to the laser device according to the plans given in this section WARNING Risk of injury Misuse or improper handling of the laser device can cause serious or i
220. laser radiation The COMPex Pro excimer laser device is a Class IV laser product Avoid eye or skin exposure to direct or scattered laser radiation Section 3 Safety shall have been read and understood before starting laser operation This section describes the routine operating sequences for the COMPex Pro excimer laser device It assumes operation of the laser through the handheld keypad NOTE A The terms laser and laser device as used in this section are defined in Section 1 3 on page 6 B Before starting to operate the COMPex Pro familiarize yourself with the layout and operation of the laser control program User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Routine Operating Sequences 6 2 1 Check Beam Path Purpose Ensure that the laser beam will be safely guided to the intended target WARNING Uncontrolled direct or diffuse reflection of the laser beam can cause serious injury Ensure that there are no reflective objects or particles in the path of the laser beam CAUTION Risk of fire or release of fumes Ensure that there are no materials in the path of the laser beam which may ignite or emit fumes when subject to laser radiation NOTE Utmost safety is provided by completely shielding the beam path e g through a protective enclosure or protective tubes When the beam path is not to be shielded keep the beam wherever possible in a single plane Avoid directing th
221. lation of all components 3 2 3 4 Fire Safety Features The fire safety features designed into Lambda lasers eliminate the use of materials which are combustible or produce toxic vapors as well as preventing flames from spreading or burning materials from dripping The design incorporates the following specific fire safety features No easily inflammable materials touch potential sources of ignition or hot surfaces Except for electrical wire insulation polyviny chloride PVC is not used No ventilation holes in fire break enclosures are in excess of 5mm 0 20 in diameter Hole arrays are used as required Material meeting or exceeding UL 94 V1 is used COHERENT LAMBDA PHYSIK 10 2005 59 SAFETY 3 2 3 5 Mechanical Safety Features Mechanical safety design provides protection against any hazards which could cause physical injury or burns Specific mechanical safety features are listed below e Exposed corners are radiused e Air fans have grill guards with less than 6 4 mm 0 25 in e No high temperature components are accessible to touch e The laser center of gravity is centrally located within the enclosure to minimize tipping hazard e Threaded holes are provided in the base of the housing to allow suitable seismic anchorage of the laser device 3 2 3 6 General Safety Features The COMPex Pro incorporates the following general safety features Key switch controlled
222. least one module in the laser device did not respond Solution Switch off the laser device and switch on again If the problem remains call Lambda Physik service Preset Energy too High OFF 2 ON 2 This message only occurs if the running mode is an Energy Constant Mode It may be either a warning or an error message Warning the charging voltage has exceeded the threshold voltage HV repi Error message the maximum possible voltage HVmax has been reached Reason 1 The laser gas is of insufficient quality Solution Perform a New Fill see Section 7 5 1 on page 192 COHERENT LAMBDA PHYSIK 10 2005 305 TROUBLESHOOTING 9 1 26 9 1 27 306 Reason 2 The EGY Const value is too high Consequently the HV limit has been reached Solution Reduce the EGY Const value If the problem remains follow the flowchart Beam Energy too Low see Section 9 7 on page 314 RAM Check Error OFF 29 This error message indicates incorrect menu data in the Cl s zero power RAM The menu data can still be downloaded even in this failure scenario Reason RAM check failed Communication interface or connections damaged Solution Call Lambda Physik service Timeout OFF 31 This error message appears if no data transfer has occurred through the RS232 serial interface within a period of one second Reason 1 RS232 plug not properly connected Solution Check RS232 plug for
223. les has to be created between the electrodes This is achieved with preionization pins A arranged along the main electrodes The result is a homogeneous preionization of the laser gas The switching of preionization and main discharge in series ensures a perfect synchronization between preionization and main discharge After the high voltage discharge thermal inhomogenities in the laser gas arise in the discharge area Therefore the gas volume in the discharge area has to be completely exchanged between two laser pulses A transverse circulation fan D positioned within the laser tube causes the gas volume between the main electrodes to be completely replaced between two successive laser pulses The circulation fan is driven externally via a magnetic coupling by a single phase motor The energy efficiency of the excimer laser is to the order of 2 i e the main part of the energy supplied has to be carried away in the form of heat The gas heated up by the discharge reaches the heat exchangers F as a result of the flow in the laser tube and is cooled down to the correct operating temperature approx 30 C or 86 F Each discharge pulse of the laser results in a load on the preionization pins and main electrodes and causes a slightly erosion of material Percipitation of the created particles on the laser windows would result in diminishing beam intensity by scattering and absorption Therefore these particles must permanantly be remo
224. lines are to be isolated to perform work on the COMPex Pro excimer laser device The exact procedure to de energize and secure the gas supply lines depends on the configuration of the facility s gas supply system and design of the shut off valves Always first contact the person authorized to perform the gas system lockout tagout procedure when work an open gas system is necessary 8 Notify the responsible persons that servicing or maintenance is required on the COMPex Pro laser device and that the gas supply lines leading to the laser device must be shut down and locked out to perform the servicing or maintenance 9 Turn off the shut off valve e g ball or gate valve and secure the valve by installing the appropriate valve cover lock and or tag NOTE Fluorine gas lines require double valve isolation for maintenance on the gas system 10 Evacuate the gas lines between the shut off valve and gas manifold in the laser device 11 Ensure that the appropriate gas pressure gauges indicate a reading of zero before starting the maintenance or servicing Restoring the Laser Device to Service NOTE When the servicing or maintenance is completed and the COMPexPro excimer laser device is ready to return to the normal operating condition follow steps 12 to 15 12 Check the laser device and the immediate area around the laser device to ensure that nonessential items have been removed and that the laser device is operationally intact 1
225. ll times User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Specific Safety Aspects Skin Safety Guidelines WARNING Potential skin burns Direct and reflected laser radiation can burn exposed skin Only use the laser in accordance with its designated use Safety interlocks are only to be defeated by authorized personnel Although the skin can withstand a considerably higher radiation intensity than the eyes tissue may be burned to a greater or lesser degree depending on the radiation time and the irradiation intensity e Avoid contact between the skin and the beam or specular reflections of the beam Reflections of the beam may be as dangerous as the beam itself Appropriate protective clothing should be worn to protect the skin whenever necessary Fire Safety Guidelines WARNING Fire hazards Class IV lasers are by definition fire hazards The laser beam can cause flammable materials to ignite or explode Always keep a fire extinguisher in the laser area in case a fire occurs Because of the high output power from the class IV laser a wide range of materials can be set on fire Therefore when the beam path is open appropriate fire prevention measures should be taken e Combustible materials may be ignited by the laser beam or by electrical components inside the laser system Flammable items must be isolated from the laser beam and from the laser system e Paper circuit diagrams leaflets or ev
226. lling the HeNe Laser B For further information about removing parts to gain access to the standard optics please refer to the relevant parts of the Tube Optics Maintenance description Section 7 6 on page 200 2 Remove the magnetic beam shielding 3 Remove the energy monitor by loosening the 3 mm allen screw and set the energy monitor aside 4 Install the alignment laser approx 500 mm in front of the laser device CAUTION Risk of eye injury Never directly look into the alignment laser beam or its reflections Follow the manufacturer s instructions and local regulations relating to the safe use of alignment lasers 5 Direct the output of the alignment laser through the center of the laser tube The alignment laser must pass through the tube without clipping or being or reflected by the electrodes NOTE Tilt the alignment laser tilt upward to determine whether the beam is reflecting off an electrode when being adjusted If the laser beam moves downward on the beam block the aligmment laser beam is hitting an electrode 6 Insert the alignment apertures into the openings directly in front of both of the tube optics The alignment apertures are needed for positioning the alignment laser beam to the optical axis of the excimer laser beam 7 Move the alignment laser in its position until the beam is centered to the front aperture 8 Tilt the alignment laser to center the beam through the laser tube to the rea
227. long the edge that has the coating or an arrow or upside down V pointing towards the coating C To verify for yourself which side of the window has the coating hold the optic at an angle while looking at reflected light from a fluorescent bulb The reflected light will have a greenish to pink tint across the entire surface whereas the backside has no tint 4 Use a pencil to make or enhance the mark indicating the coated surface 5 Lay the window with the coated side downwards onto the prepared lens tissue Cleaning the Tube Window NOTE Any action performed on an optic can potentially scratch it Always begin with the simplest cleaning approach and the one least likely to scratch the optic 6 Place a single sheet of lens cleaning paper over the optic 7 Put a few drops of ethanol onto the lens tissue close to one edge of the optic 8 While holding the lens in place drag the lens tissue across the surface of the optic 9 Turn over the optic and repeat the above procedure to clean the coated side of the optic 10 If the first cleaning approach did not result in a clean optic place three fresh sheets of lens cleaning tissue onto a clean dry and smooth surface glass plate 11 Mix two teaspoons of distilled water or ethanol with one teaspoon of vienna chalk on the uppermost tissue User Manual COMPexPro Series A0510COMPPRO AO510COMPPRO Tube Optics Maintenance 12 Holding the lens between your index finge
228. ltage for laser operations in the HV constant mode The largest and smallest permissible high voltage values are determined in the gas menu see Section 6 4 2 on page 166 Preconditions e HV constant mode selected see Section 6 3 3 Entering the Charging Voltage 1 Press lt HV gt The bottom line of the handheld keypad display reads HV current setting kV NOTE If lt HV gt is pressed when one of the energy constant modes is active a beep tone indicates that the selection has been denied 2 Use the numerical input keys to enter the desired value in Hz NOTE Input with one digit after the decimal point is permitted 3 Press lt ENTER gt to confirm the input The new value appears on the handheld keypad display NOTE A beep tone will indicate an out of range value In this case the previously set value remains active User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Set Up and Service 6 4 6 4 1 Set Up and Service This section describes handheld keypad functions that can be used to change the operational set up of the laser device or assist with servicing activities NOTE When the laser device is switched off the last settings are stored and reactivated when the laser device is restarted In certain operating modes these settings will be overridden by default settings Therefore before starting the laser always check the settings of the operating parameters Select Cha
229. ly 8 3 5 1 GAS MODE 6 cat edt ode te KANG dada 8 3 5 2 HALOGEN RARE BUFFER and INERT 8 3 5 3 MEN Waa BA NAA nia COHERENT LAMBDA PHYSIK 10 2005 xiii TABLE OF CONTENTS 8 3 6 Pulse and Time Counters 282 8 3 6 1 202 8 3 6 2 COUNTER 4 oratia 66 Binara ea ees 282 8 3 6 3 TIMEOUT cidad dal 283 8 3 7 System Status and Maintenance 284 8 3 7 1 COD al ra 284 8 3 7 2 FILTER AB tee eR 285 8 3 7 3 FILTER CONTAMINATION 285 8 3 7 4 INTERLOCK renine nnomi 286 8 3 7 5 POWER STABILIZATION ACHIEVED 286 8 3 7 6 PRESSURE rimy o paa a E a 287 8 3 7 7 PULSE DIRE vota ica 287 8 3 7 8 RESERVOIR TEMP 288 8 3 7 9 TEMP 0 60 208 8 3 8 Halogen Source 5 289 8 3 8 1 ACCU kaan aa een Bete ie ALA 289 8 3 8 2 CAP SET and CAP LEFT 289 8 3 8 3 PEAKRAN 3 aa aa aba 290 8 3 8 4 TEMP eee dla dette 290 8 3 8 5 ROOMTEMP 291 8 3 9 General Information 25 5 291 8 3 9 1 TYPE OF 1 oiea aa i aa 291 8 3 9 2 VERSION Sicilia ralla 291 9 TROUBLESHOOTING 293 9 1 Warnings and Error Messages 294 9 1 1 Duty Cycle Exceeded ON 03 295 9 1 2 Energy Cal Error OFF 7 295 9 1 3 Error Temperature Measurement OFF 12 296 9 1 4 Fatal Error COM Datalink 296 9 1 5 Fatal Error LWL Datalink O
230. ma 148 Gas leaks Minimizing risk 0 0 i a EA eee 150 Gas lifetime DYNAMIC aia bens KG BEN dante Pete babe aka ine Sa 330 SlaliC mr tri ida Dee das ld a wea angi Ba a Bong ate 330 Gas lines COMMEGHON nangka acacia Secure este ici E aaNet ERS 122 DISCONNECTION nanga a dra a 251 FUSNIN vast Baa dS matte KAG dm pated AG AN 179 PUTO a wanna pan ha wach wala eae Wala 180 ETDI NAAN trace Sie NA aha ticos 330 Resetting to factory settings AA 167 Selec Sata naa Band dl Dana Da E Mah 166 GAS MIXUTOS gt NG Bd Sa a Paba Baie a eee NA 76 80 Gas protective equipment 008 53 Gas 050 a aa as 17 Gas solenoid valves 202002 25 Gas supply lines SECUN tua 178 Gas system GONGSO cscs ets walle DRA Bande 312 Gases Properties of compressed gases 53 Safe working practices 2 20 53 LUMANG O nnay ann aan an als 159 TURING saing a Kamang ina Eas Ny pa NA ANDA watts 150 General safety features eee 60 H Halogen aaa te JIN nG Daan 122 331 Physical hazards NG Hauke G NANA NLA OETA 47 Halogen titer a iia e big ie aa free ETE AA Boies ia 99 Cartridge exchange eee eens 246 Maintenance cece eee 245 RUIDOSO AA 25 Halogen gas cylinders Exchange Xa nG gina Peed te Manta dae date ae ae 182 FIANCNING artis in aah Gotti anata a aun a mn Panga
231. may be appended to the reply to an operating mode polling command OPMODE No Description O No message warning or interlock active 1 Interlock 2 PRESET ENERGY TOO HIGH HV loading voltage exceed HV max 03 DUTY CYCLE only with some laser devices The duty cycle has been exceeded more than 12 000 pulses in 20 minutes 3 NO GASFLOW 4 A WATCHDOG has been activated 5 FATAL ERROR Error in the FOL data ring 6 POLLING At least one laser module does not reply 7 ENERGY CAL ERROR The energy monitor signals are outside of the permissible range the automatic signal amplification setting is malfunctioning 8 NEW GAS FILL NEEDED A new gas filling is necessary as the loading voltage exceeds HV max 9 NO VACUUM The laser tube was unable to be evacuated A safety gas fill was successfully carried out All activities were interrupted 10 LOW PRESSURE only with fluorine source As the sixth fluorine filling was unsuccessful low pressure it is assumed that the fluorine source is empty 11 NO CAPACITY LEFT only with halogen source The halogen source is empty 12 ERROR TEMPERATURE MEASUREMENT only with a halogen source Error with the measurement of the halogen source temperature 13 FLUORINE VALVE NOT OPEN only with a fluoring source The fluorine source valve is closed or a fault has occurred during the filling procedure 21 WARM UP 8min The thyratron is being warmed up 26
232. minder of the excited diatomic molecules that were originally used as a laser gas in the first systems Depending on the required laser output wavelength the active laser medium used by the COMPex Pro is either Xenon Fluoride XeF Xenon Chloride XeCl Krypton Fluoride KrF or Argon Fluoride ArF or Fluorine Fo All of these types of lasers operate in the pulsed mode and emit ultra violet laser radiation XeF lasers operate at a wavelength of 351 nm XeCl lasers operate at a wavelength of 308 nm KrF lasers operate at a wavelength of 248 nm ArF lasers operate at a wavelength of 193 mm F2 lasers operate at a wavelength of 157 nm The required wavelength has to be specified when the laser device is ordered The repetition rate i e the frequency at which the laser pulses are fired is variable up to a predetermined version dependent maximum FUNDAMENTALS 2 2 10 Functional Description of the Laser LASER is an acronym for Light Amplification by Stimulated Emission of Radiation A laser amplifies light and produces coherent light beams As the waves of coherent light beam propagate in step with one another laser light can be made extremely intense highly directional and very pure in frequency color For laser light to be emitted three basic components are needed active laser medium capable for emission of laser light an optical resonator for the amplification of the laser light andan
233. move the clip removal tool see Figure 46 A from the rigid transport packaging Figure 46 Location of clip removal tool CAUTION Risk on injury caused by incorrect use of the clip removal tool The transport packaging clips are under tension Do not use excess force to remove While levering off use the other hand to restrain movement 4 Working from the top downwards remove the clips from the rigid transport packaging Push the clip removal tool into the recess on the clip press against the clip to control movement and lever off see Figure 47 Figure 47 Removing the clips 5 When the corresponding clips have been removed remove the top front rear and side panels of the packaging Storing the Transport Packaging 6 Stack the disassembled panels of the rigid transport packaging and accessory packaging onto the base pallet NOTE When stacking ensure that the outer cover does not become contaminated or damaged and that the inside surfaces of the panels cannot become contaminated User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Transport and Unpacking Transport Lifting without Rigid Packaging NOTE For information regarding the size of the laser device see Section 5 1 3 1 on page 103 WARNING Risk of crushing The COMPexPro laser device together with its accessories and packaging weighs depending on version up to 395 kg 870 8 Ib Prevent tipping or dropping during lifting an
234. n thereby reducing contamination of the optics Primary System Components Laser Tube The laser tube NovaTube can be considered as the motor of the laser Figure 8 shows a cutaway drawing of the longitudinally symmetrical laser tube Figure 8 Cutaway drawing of the laser tube Key to Figure 8 A Preionization pins D Gas circulation fanr B Electrodes Dust filter C Laser tube Heat exchanger User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Primary System Components The laser tube C is the reservoir for the laser gas The materials chosen allow the problem free use of excimer gas mixtures The material surfaces become coated with a layer of halogen metal complex This process resulting from a reaction between halogen laser gas and metal material within tube is called passivation Passivation renders the material surfaces within the tube chemically inert to halogen A repetition of this process known as re passivation is always required if the surface passivation has been damaged as a result of air entering the laser tube or when the laser device or laser tube has been transported or stored for longer periods A high voltage discharge between the electrodes B transfers the energy to the excimer gas mixture e g fluorine or krypton premix In order to obtain a controlled spark free discharge the laser gas has to be preionized i e a sufficiently high density of free charged molecu
235. n warning lamps light Laser light pulses are emitted at the given repetition rate This can be recognized by an audible clicking If the laser does not start the power supply was unable to be initialized In this case switch the laser device off and then on again and attempt to restart the laser If the problem persists call service Adjusting the Cooling Water Flow Rate 5 Start laser operation for about 1000 shots to warm up the laser tube Measure the water outlet temperature It must be within 25 C to 30 C 77 F to 86 F for there to be a laser tube temperature of 30 C to 38 C 86 F to 100 F Adjust the flow rate according to the water temperature The flow rate is to be 1 to 5 I min depending on the water temperature User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Routine Operating Sequences 6 2 5 Stop Laser Operation Purpose Stop the laser for longer processing interruptions and prior to shutting down the laser device NOTE For short interruptions in the processing sequence the manual shutter can be closed To maximize the lifetime of the modules in the laser device the laser should be switched off during longer processing interruptions Tools and Materials e None Preconditions e Laser switched on laser radiation being emitted e Handheld keypad connected to the communication interface socket on the laser device Stopping the Lasers 1 Press the BREAK key twi
236. n 7 4 3 on cylinder drops below 10 bar cylinder i page 182 7 HANGA GATA nag Change rare inert or 05h See Section 7 4 4 on buffer gas cylinder page 187 Before transportation Perform transportation 0 25 h See Section 7 12 1 on Before storage fill page 250 a Typical values for dynamic gas lifetime b Typical values for static gas lifetime c Including new gas fill COHERENT LAMBDA PHYSIK 10 2005 175 MAINTENANCE 7 3 176 Lockout Tagout Purpose This procedure establishes the minimum requirements for the lockout of energy isolating devices whenever maintenance or servicing is performed on the COMPex Pro laser device It shall be used to ensure that the laser device is stopped isolated from all potentially hazardous energy sources and locked out before employees perform any servicing or maintenance where the unexpected energization or start up of the laser device or release of stored energy could cause injury WARNING Risk of serious injury All employees are required to comply with the restrictions and limitations imposed upon them during the use of lockout The authorized employees are required to perform the lockout in accordance with the procedures described in this section All employees upon observing a machine or piece of equipment which is locked out to perform servicing or maintenance shall not attempt to start energize or use that machine or equipment The potentially haza
237. n certain situations even lethal injuries Never put the COMPexPro into operation if the labeling is incomplete Immediately replace missing labels or inform Lambda Physik of their absence NOTE To simplify the ordering of labels the appropriate Lamdba Physik part number is indicated behind the position number of the corresponding label COHERENT LAMBDA PHYSIK 10 2005 61 SAFETY 3 3 1 3 3 1 1 62 Labels on Outside of Laser Device Beam Exit Side Figure 29 Labels on beam exit side User Manual COMPexPro Series A0510COMPPRO Labels A0510COMPPRO Pos 1 901032 Warning label according to CDRH This contains a laser radiation warning and device specific laser data The information indicated on this label is important for the choice of laser protective eyewear VISIBLE AND INVISIBLE LASER RADIATION AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION Max Average Power Output Duration Wavelength CLASS V LASER PR Model Power Energy Duration Wavelength W J ns nm COMPexPro102 20 0 6 10 50 193 351 COMPex ro 110 50 0 6 10 50 193 351 COMPex ro 120 50 0 4 10 50 193 351 COMPexPro201 20 1 10 50 193 351 COMPex Pro 205 50 1 10 50 193 351 COMPexPro F2 20 0 4 10 50 157 800 Pos 2 904025 Label warning of exposure to laser radiation when the mirror access panel is removed DANGER Visible And
238. n page 198 COHERENT LAMBDA PHYSIK 10 2005 135 INSTALLATION 136 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO OPERATION This chapter describes the fundamental operation of the COMPexPro It is divided into the following sections Section 6 1 provides an overview of the operating and display elements These are situated on the operating panel see page 138 or handheld keypad see page 140 Section 6 2 see page 148 describes the individual routine operating sequences This includes the procedures to start and stop the laser device or laser Section 6 3 see page 160 describes the procedures that enable modes or operating parameters to be changed through input at the handheld keypad Section 6 4 see page 165 describes functions that assist with the set up and service of the laser device NOTE The prerequisite for performing the procedures described in this chapter is the correct installation and regular maintenance of the laser device WARNING Risk of injury through laser radiation The COMPex Pro excimer laser device is a Class IV laser product Avoid eye or skin exposure to direct or scattered laser radiation Pay attention to electrical and laser safety before you start operation see Section 3 2 on page 44 If the laser device shows any indication of defects immediately switch off the laser device and solve the problem before starting the laser device again COHERENT LAMB
239. n reservoir is exhausted In this case contact Lambda Physik service User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Thyratron Maintenance Measure the Heating Voltages Uy and Up NOTE The specified range for the heating voltage is 6 3 to 6 7 V If the voltage is considerably outside of this range the supply voltage will need to be increased or decreased Ageing of the thyratron causes a decrease in the heating voltage which is compensated for by increasing the supply voltage 2 Use the TRMS voltmeter to measure the heating voltage of the thyratron Uy between the jacks GND and HEAT see Figure 96 Figure 96 Measuring thyratron heating voltage 3 Note the measured value 4 Measure the heating voltage of the hydrogen reservoir Up between the jacks GND und RES see Figure 97 Ur Figure 97 Measuring reservoir heating voltage 5 Note the measured value COHERENT LAMBDA PHYSIK 10 2005 243 MAINTENANCE 244 Measure the Bias Upjas NOTE Note that Upjas is a DC value The voltage has to be between 150 V and 160 V If this is not the case the varistor is exhausted In this case contact Lambda Physik service Measure Upjas between the jacks GND and BIAS Note the measured value Measure Upjas between the jacks GND und AUX Note the measured value and if necessary contact Lambda Physik service DOO NOD Increase the Supply Voltage NOTE Steps 11 to 15 only apply to
240. n the energy constant mode EGY CONST or when performing a new gas fill or other gas action e g purge laser tube prior to a window exchange The purge gas purges the beam path within the laser device This is necessary to prevent the formation of ozone when operating the laser at wavelengths shorter than approx 240 nm i e 193 nm At longer wavelengths purging the beam path serves to minimize optic contamination NOTE The purge gas nitrogen is to be turned on at least 5 minutes before starting laser operation Tools and Materials CAUTION Incorrect handling will cause unnecessary downtime Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas system pressures of below 20 bar abs may be critical e Gases as specified see Section 4 2 2 on page 76 Gas cylinders with a remaining pressure of at least 10 bar abs Preconditions e Gas cylinders connected to the appropriate connectors on the laser device User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Routine Operating Sequences Turning On the Gases CAUTION Incorrect operation can damage the pressure regulator If pressure is applied to a pressure regulator with low secondary pressure the pressure regulator membrane may become damaged Always ensure that the pressure regulator is closed before opening the
241. n the laser head CAUTION Risk of gas line corrosion The gas lines can corrode if air and humidity penetrate into them Prevent air and humidity penetration by sealing the connections on the laser head and gas lines with the corresponding plugs and caps The gas line connections should always be sealed before transporting or storing the laser device User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Preparation for Transport Storage 4 Seal the gas connection on the laser device with the corresponding plug 5 Seal the gas supply line with the corresponding cap The sealed lines may remain in this state for a longer period of time now 6 Repeat steps 3 to 5 to disconnect and seal the other gas lines COHERENT LAMBDA PHYSIK 10 2005 253 MAINTENANCE 254 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO CONTROL SOFTWARE This chapter is intended for programmers who want to develop a user shell to remotely control the COMPexPro with an external computer system through the communication interface Cl The following sections describe the operating modes and commands that are required to control the laser device through the RS232 serial interface These commands can either be sent through the handheld keypad provided with the laser device or through an external computer system NOTE Familiarize yourself with the fundamantal procedures required to operate and maintain the COMPexPro as d
242. nd where applicable the procedure step number A description of any errors A proposal for improvements Feedback Address E mail documentation coherent com Post Coherent Lambda Physik GmbH Documentation Comments Hans B ckler StraBe 12 D 37079 G ttingen Germany Telefax 49 551 68691 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO 2 1 COHERENT LAMBDA PHYSIK 10 2005 FUNDAMENTALS This chapter briefly describes the most important features functions and subassemblies of the laser device This background information will ease your understanding of the information contained in the subsequent chapters The information in this chapter does not enable you to operate or service the COMPexPro excimer laser device Never switch on or attempt to operate or service the COMPex Pro laser device before reading understanding and fully familiarizing yourself with Chapter 3 of this manual Safety NOTE Topics such as laser physics optics required for the operation of lasers and the principle of excimer lasers are discussed in detail in the Lambda Physik publication Excimer Laser Technology laser sources optics systems and applications ISBN 3 00 006395 1 available through Lambda Physik The Excimer Laser Device The COMPex ro Series of laser devices are excimer lasers which belong to the category of gas lasers The term excimer is an abbreviation for excited dimer which is a re
243. ndingly set for secondary pressures see Section 4 2 2 on page 76 Preparation 1 Perform a New Fill to ensure optimum calibration conditions see Section 7 5 1 on page 192 This takes about 20 minutes NOTE Do not press BREAK during the new fill procedure because the procedure is terminated immediately The fill is not completed and the tube pressure may thus be insufficient If this is the case start the new fill again 2 Exchange or clean the beam splitter see Section 7 7 2 on page 226 as indicated in the maintenance schedule Calibrating the Energy Monitor 3 Place and prepare the external energy meter according to the energy meter manual 4 Switch on the laser device 5 Press lt REPRATE gt 6 Set the repetition rate so that it is suitable for the energy or power meter that you are using and press lt ENTER gt to confirm input NOTE To obtain the best results set the repetition rate to the rate that you normally work with 7 Press lt HV gt 8 Set the high voltage to the highest level possible for the selected repetition rate and press lt ENTER gt to confirm input 9 Open the beam shutter 10 Press lt EGY CAL gt 11 Press lt EXE gt to confirm that the procedure is to be started WAIT is displayed in the second line for a short period The laser starts firing with the choosen repetition rate and HV COHERENT LAMBDA PHYSIK 10 2005 225 MAINTENANCE 7 7 2 226 12 Observe
244. ng out work with and on the COMPex Pro such as Operation including setting up troubleshooting in the course of work removal of production waste care and disposal of consumables service maintenance inspection repair and or transport The instruction manual is to be supplemented by the respective national rules and regulations for accident prevention and environmental protection Intended Audience This manual is intended for Operators who have completed the Basic Operations course for COMPex Pro laser devices We define an operator as someone who operates the COMPex Pro in normal day to day operations Process engineers who have completed the Advanced Operations course for COMPexPro laser devices We define a process engineer as someone who prepares jobs for production and other purposes and monitors production quantity and quality Any reader who wishes to acquire general knowledge of the COMPex Pro laser device INTRODUCTION Numbering of Chapters Pages and Instructions The pages of this manual are numbered continuously The page number appears in the lower outside corner of every page The chapters are numbered continuously The name of the chapter appears in the upper outside corner of every even page Each chapter ends with an even page number Consequently certain even pages at the ends of chapters will be intentionally left blank Each step within a procedure is sequentially numb
245. nitor 2 Ensure that the laser cannot be restarted 3 Use the 3 mm allen key to remove the front mirror access cover from the laser device 4 Remove the magnetic beam shielding CAUTION Risk of damaging optical components The attenuator is held by two clamps and may be difficult to remove Do not use tools Handle the beam splitter with great care Always wear suitable plastic gloves 5 Ifthe attenuator is difficult to remove remove the beam splitter see steps 5 to 8 on page 227 6 Change the attenuator see Figure 86 A on page 227 If the displayed internal calculation value was less than 9 9 Replace with a coarser meshed attenuator or remove an attenuator if two attenuators were inserted If the displayed internal calculation value was 20 or higher Replace with a closer meshed attenuator or add an appropriate attenuator if necessary 7 Where necessary re insert the beam splitter 8 Re insert the magnetic beam shielding 9 Re insert the front mirror access cover 10 Proceed with step 3 of the energy monitor calibration procedure page 225 User Manual COMPexPro Series A0510COMPPRO AO510COMPPRO Energy Monitor Maintenance 7 7 3 2 Changing the Attenuator COMPex ro Fo 1 Press BREAK to stop the calibration of the energy monitor 2 Ensure that the laser cannot be restarted 3 Disconnect the two FOL s DATA in and DATA OUT on top of the energy monitor see Figure 89 A
246. nsmit Data RXD I RS232 Receive Data GND Signal Ground Data format Databits 8 Parity none Stop bit 1 Baud rate 9600 bps Remote Socket The remote socket allows the laser device to be connected to external safety circuits To enable laser operation pins 2 and 3 have to be bridged otherwise the interlock message REMOTE will occur NOTE The Remote Interlock contact only switches off the high voltage and not the complete system After closing the contact the laser can be restarted To prevent this the contact has to be integrated in an external EMERGENCY OFF circuit 2 F 1 3 4 Figure 40 Remote socket Specifications Pin 2 to 3 24V AC Pin 1 to 4 24 V AC 100 mA COHERENT LAMBDA PHYSIK 10 2005 95 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES 4 3 8 3 96 Trigger Signal Ports The COMPexPro laser device has two BNC trigger signal ports External Trigger in Ext Trig Sync Out External Trigger In This part allows external triggering of the laser Specifications Connection BNC Galvanic isolation through optocoupler Voltage 3 3 V to 5 V Impedance 3 5 kQ Signal length lt us the laser pulse occurs on the positive flank of the trigger signal Delay The delay between the external trigger signal and laser pulse is approximately 1 us This delay varies by 10 ns depending on the laser mode warm up or laser on repetition rate and pulse energy The COHERENT L
247. nt of pulses divided by 1000 during the total working lifetime of the laser The requested counter cannot be reset The command is only available in the OFF mode Syntax Polling TOTALCOUNTER Reply aaaaaa Syntax Description aaaaaa Total counter reading 1 03 pulses COUNTER This command requests the current reading divided by 1000 of the resettable counter or resets the counter to zero The command is only available in the OFF mode Syntax Setting COUNTER RESET Polling COUNTER Reply aaaaaa Syntax Description RESET Reset the counter reading to zero aaaaaa Counter reading of the resettable counter 1 03 pulses User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Parameter Commands 8 3 6 3 TIMEOUT To enable interruptions in the communication between the laser device and remote PC to be detected the flow of data through the serial interface RS232 can be monitored The TIMEOUT command switches the RS232 time out function on and off When TIMEOUT is switched on and there is no data flow through the RS232 within a period of one second the laser will be shut down with the error code 31 the polling command OPMODE will produce the response OFF 31 The command is only available in the OFF mode NOTE When the time out function is active there should be continuous communication through the RS232 interface Where necessary program the remote PC with continuous requests to ensure t
248. nter value and not the current counter reading Gas System and Gas Supply GAS MODE The COMPexPro can be supplied from premix gas cylinders or single gas cylinders see Section 4 2 2 on page 76 This command sets or calls the gas mode The command is only available in the OFF mode Syntax Setting GASMODE XXXX Polling GASMODE Reply XXXX Syntax Description XXXX Gas mode PREMIX Supply from premix gas cylinders SINGLE GASES Supply from single gas cylinders COHERENT LAMBDA PHYSIK 10 2005 279 CONTROL SOFTWARE 8 3 5 2 280 HALOGEN RARE BUFFER and INERT The COMPex Pro can be supplied from up to four different gas cylinders see Section 4 2 2 on page 76 These commands set the partial pressures for the individual gases in the currently active gas gas menu when the values are within the permitted range The commands are only available in the OFF mode Syntax Setting Gas aaaa e g HALOGEN aaaa Polling Gas e g HALOGEN Reply aaaa Syntax Description Gas HALOGEN RARE BUFFER or INERT aaaa Gas partial pressure Variable integer 4 places Unit mbar Range indicated through gas menu Example Set the halogen partial pressure to 100 mbar HALOGEN 100 lt CR gt Call the buffer partial pressure BUFFER lt CR gt 2340 lt CR gt NOTE The partial pressure for the halogen cylinder has to be approx 20 times higher than the partial pressure of the halogen source as in the gas cylinders there i
249. nterface The central control unit of the COMPexPro Contains the local and remote software for the laser Abbreviation Cl 328 User Manual COMPexPro Series AO510COMPPRO A0510COMPPRO Data Ring Module s information link in the laser All laser modules are connected in series and are constantly polled to watch their function Made up of fiber optic lightwave guides FOLs Discharge Capacitors See Peaking Capacitors EGY Abbreviation for Energy EGY CONST Abbreviation for Energy Constant Mode Energy Constant Mode EGY CONST Running Mode that keeps the beam energy constant by continuously increasing the HV If a given threshold HV is reached the laser reacts with an HI or PGR or a warning depending on the Energy Constant Mode chosen see Section 2 7 on page 31 Energy Monitor Tool to measure the energy of the laser beam via a detector Fed by a beam splitter that reflects 10 of the beam energy onto the detector The Energy Monitor electronics convert the light intensity into an 8 bit signal that is evaluated by the Communication Interface The Energy Monitor is triggered with a FOL line from the beam splitter box to theenergy monitor electronics If there is laser light within the beam splitter box the FOL line leads a light pulse to the energy monitor electronics causing it to function Thus it does not detect continuously but is triggered by the beam light itself Excimer Gas Abbreviation for Excit
250. o ON codes have the same priority the COMPexPro displays the first ON code to occur Prioritity Message Meaning 5 ON 03 Duty Cycle exceeded 4 ON 9 NO VACUUM ON 10 LOW PRESSURE ON 13 FLUORINE VALVE NOT OPEN 3 ON 2 PRESET ENERGY TOO HIGH ON 8 NEW GAS FILL NEEDED ON 40 PRESET ENERGY TOO LOW 2 ON 34 HI halogen injection in preparation ON 36 COD Charge On Demand ON ON 37 COD on at repetition rate 550 Hz 0 ON Laser on no warning message ON 0 Laser on no warning message For all other codes there are no priorities This means that the last code displayed is the most current and the previous code has been deleted COHERENT LAMBDA PHYSIK 10 2005 261 CONTROL SOFTWARE 8 2 3 3 8 2 3 4 262 SKIP After initially switching on the laser device mains on the thyratron will be warmed up in readiness for laser operation The Skip command terminates the warm up period If however the thyratron warm up period is skipped the laser will not optimally perform missing pulses or no pulses Syntax Setting OPMODE SKIP NEW FILL The laser tube is evacuated and filled with fresh laser gases Syntax Setting OPMODE NEW FILL Polling OPMODE Reply NEW FILL NEW FILL XXXX NEW FILL 3 Syntax Description XXXX Status EVAC Laser tube being evacuated WAIT Leak test or halogen source being warmed up FILL Laser tube being filled 3 Status co
251. o evacuate a leaking laser tube allows atmospheric oxygen to penetrate the laser tube Always locate and rectify a leak before continuing the new fill If the evacuation fails the message SAFETY FILL appears and a safety fill is performed This automatically fills the laser tube to 1050 mbar with the gas connected to the buffer gas connection User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Tube Maintenance 7 5 2 Manual Halogen Injection Purpose CAUTION Risk of damaging the laser tube Contamination can collect in the tube and can cause damage to the tube or parts of the tube Never perform more than three manual halogen injections before performing a partial gas replacement Manually inject halogen gas into the laser tube to for instance compensate for a drop in output power The amount of gas injected is determined in the gas menu NOTE A This function can only be performed when the laser is supplied from separate gas cylinders B If there is no improvement in laser performance after the manual halogen injection always carry out a new fill see Section 7 5 1 Tools and Materials CAUTION Incorrect handling will cause unnecessary downtime Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas system pressures of below 20 bar abs may be critica
252. o prevent this the laser tube has to be filled with a transportation fill and the gas lines have to be sealed Transportation Fill Fill the laser tube with a transportation gas filling when the laser device is to be transported or is not to be used for a longer period of time The transportation fill routine evacuates the laser tube and fills it to 1500 mbar with buffer gas Maintenance Interval e Before transportation e Before storage Time Required e 0 25h Tools and Materials CAUTION Incorrect handling will cause unnecessary downtime Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas system pressures of below 20 bar abs may be critical e Buffer gas as specified see Section 4 2 2 on page 76 Gas cylinder with a remaining pressure of at least 10 bar abs connected to the buffer gas connection of the laser device User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Preparation for Transport Storage 7 12 2 Preconditions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device switc
253. ocedure differs for the Fo version see Section 7 7 2 2 on page 228 The procedure for the other versions is described in Section 7 7 2 1 NOTE This procedure is performed during the energy monitor calibration procedure Consequently there are no separate lists of maintenance intervals preconditions or tools and materials User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Energy Monitor Maintenance 77 24 Cleaning the Beam Splitter COMPex Pro 100 COMPex Pro 200 Preparation 1 Switch off the laser device WARNING Unintentional restarting can cause injury or damage Always secure the laser device against unintentional restarting when it is completely shut down for maintenance or repair Before starting work ensure that the secured by locking out the main switch Attach appropriate safety tags 2 Secure the laser device against unintentional restarting see Section 7 3 on page 176 3 Use the 3 mm allen key to remove the service panel 4 Use the 3 mm allen key to remove the front mirror access cover from the laser device Removing the Beam Splitter 5 Use the 4 mm allen key to remove the screw see Figure 72 A on page 203 that secures the energy monitor and remove the magnetic beam shielding CAUTION Risk of damaging optical components through contamination Contamination can cause serious damage to the optical components Always wear disposible plastic gloves when working with and on
254. of the COMPex ro this section is subdivided into the following subsections Section 7 7 1 describes the energy monitor calibration procedure The appropriate steps in this section indicate when the beam splitter is to be cleaned or exchanged and when attenuators are to be removed or inserted Section 7 7 2 page 226 describes the removal cleaning and installation of the beam splitter This procedure is version dependent Section 7 7 3 page 230 describes the insertion and removal of attenuators Calibrate Energy Monitor Purpose Calibrate the internal energy monitor in accordance with an external power or energy meter This is performed with the help of a dedicated software option which starts the laser and enables input of a reference power value Maintenance Interval e Whenever the tube windows have been cleaned exchanged Time Required e 0 75h COHERENT LAMBDA PHYSIK 10 2005 223 MAINTENANCE 224 Tools and Materials e 3mm Allen key e 4mm Allen key WARNING Risk of injury through laser radiation This procedure requires working with an open laser When laser operation is started laser radiation will be emitted from the beam output aperture Always wear protective eyewear and strictly adhere to the safety precautions detailed in Section 3 2 2 e Protective eyeware suitable for the currently active laser wavelength e Attenuators if necessary CAUTION Risk of damaging optical components thr
255. of this manual e All parts of the laser where laser radiation may possibly escape are marked with the appropriate adhesive danger signs according to IEC 60825 1 e A white Laser ON warning light see Figure 25 A is located in a prominent position on top of the laser device near to the beam exit aperture This warning light illuminates when the laser can emit radiation Emission of radiation can be recognized by an inherent clicking noise the frequency of which increases as the repetition rate increases ZA 8 Figure 25 Laser radiation warning light and shutter e Each beam exit from the laser housing can be closed by a manually operated beam shutter see Figure 25 B 56 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Specific Safety Aspects e COMPexCPro laser devices are provided with a connector marked Remote located on the connection side of the laser housing see Figure 26 A This enables connection to external electrical circuits for a warning light and one or more interlock switches the appropriate plug is included in the service box The warning light signals that the laser is operating and therefore warns of the risk of laser radiation The interlock switch shuts down the laser externally for instance if a door connected with the switch is opened D 173 000000 S 0000 aren KS xe KO KK o Ne 0 RS OOK KR
256. on Loosen and fasten front optics mount F Version Optic mount Fo Version o o oo ooooo Horizontal and vertical optic adjustment Fo versio NAAN at eed dd PD haka Position of rear optics mount Fo version Disassembled optics mount F2 version View onto the beam splitter Energy monitor bending unit Fo version Beam splitter 0 Energy monitor connection Fo version Direct alignment laser through laser cavity Direct alignment laser through alignment pucks Reflection of alignment laser on card alignment necessary 0002 ee eee Reflection of alignment laser on card optics 60 8 0 eee Setup ofthe unstable resonator Marking of the 000605 7777 152 154 156 157 159 177 203 204 205 205 209 210 213 216 217 218 219 220 222 229 229 231 234 234 235 235 236 240 339 LIST OF FIGURES 340 Figure 96 Figure 97 Figure 98 Figure 99 Figure 100 Figure 101 Figure 102 Figure 103 Figure 104 Figure 105 Figure 106 Figure 107 Figure 108 Figure 109 Figure 110 Figure 111 Figure 112 Figure 113 Figure 114 Figure 115 Measuring thyratron heating voltage 243 Measuring reservoir heating voltage 243 Thyratron supply voltage adjustment 244 Exchanging the halogen filter 248 Cal
257. on Switch off the laser device wait a minute and restart If problem remains call COHERENT LAMBDA PHYSIK service Fluorine Valve Not Opened OFF 13 ON 13 This is a warning or error message relating to the fluorine source Please refer to the fluorine source s manual for further information Halogen Pressure Too High OFF 33 This is an error message relating to the fluorine source Please refer to the fluorine source s manual for further information HI in Prep ON 34 This is a warning message relating to the fluorine source Reason The halogen source is just preparing a halogen injection This may last a few minutes Solution Wait a few minutes COHERENT LAMBDA PHYSIK 10 2005 299 TROUBLESHOOTING 9 1 10 9 1 11 9 1 12 300 Inert Valve Closed OFF 39 Reason A manual fill of inert gas has been terminated This message is either a warning or an error message Warning the inert valve was open for 10 seconds and is now closed Error message the tube pressure exceeded 3800 mbar during the fill Therefore the fill has been terminated Solution 1 Warning No action required 2 Error message Reduce the tube pressure Interlock XXX OFF 1 Reason A serious malfunction has occurred XXX indicates the name of an interlock With a handheld keypad the name of the interlock is displayed When the laser is controlled through an external PC the interlock can be id
258. ondary pressure the pressure regulator membrane may become damaged Always ensure that the pressure regulator is closed before opening the gas cylinder valve 2 Ensure that the pressure regulators and cylinder valves are closed on all gas lines COHERENT LAMBDA PHYSIK 10 2005 131 INSTALLATION 132 3 Open the inert gas cylinder valve 4 Set the pressure regulator in the inert line to at least 4 bar abs NOTE The pressure regulator has to be set to at least 4 bar to completely evacuate the line between the gas cylinder valve and the laser head With lower pressure settings residues may remain in the line between the pressure regulator and the gas cylinder valve 5 Close the inert gas cylinder valve 6 Press FLUSH LINE gt on the handheld keypad FLUSH current selection INERT BUFFER RARE HAL appears in the bottom line of the display 7 Press lt Cursor Rights and or lt Cursor Left gt to select INERT 8 Press lt ENTER gt to confirm the selection 9 Press lt EXE gt to evacuate the selected gas line The message FLUSH I L appears in the bottom line of the display The vacuum pump runs for two seconds to evacuate the gas line 10 Repeat step 9 until the pressure regulator gauge indicates a relatively constant vacuum NOTE If a vacuum is not reached there is a relatively large leak in the gas line Check all connections in the line If necessary tighten the connections and repeat the
259. optical components 6 Hold the beam splitter by the beam splitter handle see Figure 86 D Figure 86 View onto the beam splitter Key to Figure 86 A Attenuator C Fixing screw B Beam splitter D Beam splitter handle COHERENT LAMBDA PHYSIK 10 2005 227 MAINTENANCE 7 7 2 2 228 7 Remove the single fixing screw C 8 Remove the beam splitter B Cleaning the Beam Splitter 9 Clean beam splitter in the same way as uncoated optics see Section 7 6 3 on page 211 Installing the Beam Splitter 10 Re mount the beam splitter and tighten the fixing screw 11 Remount the magnetic beam shielding and the mirror access panel 12 Refit the service panel 13 Proceed with step 3 Cleaning the Beam Splitter COMPex Pro F3 Preparation CAUTION Risk of damaging optical components Always wear skintight plastic gloves when working on optical components 1 Switch off the laser device WARNING Unintentional restarting can cause injury or damage Always secure the laser device against unintentional restarting when it is completely shut down for maintenance or repair Before starting work ensure that the secured by locking out the main switch Attach appropriate safety tags 2 Secure the laser device against unintentional restarting see Section 7 3 on page 176 3 Use the 3 mm allen key to remove the service panel User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Energy Monitor
260. orized persons Avoid skin contact with direct or reflected laser radiation Reflected laser radiation can be as equally hazardous as the beam itself Where necessary wear suitable protective clothing to protect the skin COHERENT LAMBDA PHYSIK 10 2005 71 SPECIFICATIONS REQUIREMENTS AND ACCESSORIES 4 1 1 COMPex ro 100 Series CDRH class laser classification Power Pulse shape temp Pulse to pulse stability IV lt 30 W lt ns lt 3 for 1 Sigma Characteristic Type ArF KrF XeCl XeF Unit Wavelength 193 248 308 351 nm Max pulse COMPexPro 102 0 400 150 mJ energy F Version COMPexPro 102 200 mJ Cl Version COMPexPro 110 200 400 150 mJ F Version COMPexPro 110 200 my Cl Version Max repetition COMPexPro 102 20 20 20 20 Hz rate COMPexPro 110 100 100 100 100 Hz Max average COMPexPro 102 4 6 3 W power F Version COMPexPro 102 4 W Cl Version COMPexPro 110 12 30 12 W F Version COMPexPro 110 16 W Cl Version Pulse duration COMPexPro 100 20 25 20 25 ns nominal Serie FWHM Beam dimensions COMPexPro 100 24x5 10 24x5 10 24x5 10 24 5 10 mm Serie v Beam divergence COMPexPro 100 3 x 1 3x1 3x1 3x1 mrad Serie v a measured at low repetition rate 5 Hz b average value measured at max repetition rate c typical value FWHM Full Width
261. osable plastic gloves when handling optical components 12 Insert the hook of the bayonet wrench into the lower recess of the optics mount see Figure 81 left picture and turn the bayonet wrench counterclockwise to loosen the optics mount You will hear a short hissing sound due to overpressure in the tube The laser tube is now open Figure 81 Loosen and fasten front optics mount F Version The inert gas valve opens every two seconds to compensate for the pressure drop and prevent air from entering the tube When the laser tube is open for longer than one minute the message CLOSE RESERVOIR enter appears indicating that the sealing plate or replacement optics mount should be inserted CAUTION Risk of damaging laser tube The software routine is automatically continued by pressing lt ENTER gt Do not press lt ENTER gt when the tube windows are removed 13 Press the bellows against the laser tube to remove the optics mount COHERENT LAMBDA PHYSIK 10 2005 217 MAINTENANCE 14 Immediately insert the sealing plate or the ready prepared optics mount see Figure 82 and turn the bayonet wrench clockwise to close the laser tube Figure 82 Optic mount F gt Version Preparing and Installing the Output Coupler 15 Disassemble the optics mount and replace the optics see Section 7 6 5 on page 221 NOTE If a ready prepared optic was installed in step 14 the damaged or worn optic can be exchanged
262. osen the six screws securing the optics mount and then remove the optics mount You will hear a short hissing sound due to the overpressure in the tube The laser tube is now open The inert gas valve opens every two seconds to compensate for the pressure drop and prevent air from entering the tube When the laser tube is open for longer than one minute the message CLOSE RESERVOIR enter appears indicating that the sealing plate or replacement optics mount should be inserted CAUTION Risk of damaging laser tube The software routine is automatically continued by pressing lt ENTER gt Do not press lt ENTER gt when the tube windows are removed 20 Immediately mount the sealing plate see Figure 74 on page 205 COHERENT LAMBDA PHYSIK 10 2005 239 MAINTENANCE CAUTION Risk of damaging optical components The optics can easily be damaged while being removed Do not drop the optics or let them to come into contact with any metal parts Always wear disposable plastic gloves when handling optical components 21 22 Remove the old output coupler from the premount with the spanner wrench tool Insert the new output coupler into the premount with the concave side facing the thruster ring for the markings on the output coupler see Figure 95 NOTE The orientation of the concave side can be verified by checking if the alignment laser reflection focuses when incident on the concave side A Xx sl B x l
263. ot Available OFF 35 This is a warning message relating to the halogen source It occurs when attempting to call a function which is not available when operating the COMPexPro with a halogen source e g when performing a partial gas replacement OFF 41 OFF 41 The message OFF 41 appears on the handheld keypad as well as being sent through the serial interface to an external PC Reason In the Energy Constant Mode the entered energy value exceeds the set value in the menu data by more than 5 The laser is in the OFF mode Solution Enter a lower valid value ON 40 ON 40 The message ON 40 appears on the handheld keypad as well as being sent through the serial interface to an external PC Reason In the Energy Constant Mode the HV is adjusted to the lowest possible value but the laser beam output energy cannot be stabilized as low as requested Solution Increase the EGY value see Section 6 3 4 on page 163 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Warnings and Error Messages 9 1 23 9 1 24 9 1 25 ON 41 ON 41 The message ON 41 appears on the handheld keypad as well as being sent through the serial interface to an external PC Reason In the Energy Constant Mode the entered energy value exceeds the set value in the menu data by more than 5 The laser is in the ON mode Solution Enter a lower valid value Polling OFF 6 Reason At
264. ot necessarily in the same working area Only trained and competent personnel should be permitted to handle halogen gas cylinders and regulators Any equipment to be used for halogen gas mixture servicing should be thoroughly cleaned degreased and dried before use then treated with increasing concentrations of halogen gas so that any impurities can be burned off without the risk of the equipment catching fire Any equipment that has contained halogen must be thoroughly purged with helium or argon and evacuated prior to opening or refilling Due to the possibility of over pressure of the gas mixture containing halogens potential hazards exist due to the risk of leakage of the laser tube and gas pipes The most vulnerable part is the window Under normal operating conditions the pressure is 3 8 bar The equipment must be used such that the beam exit is not directed at personnel In the event of a leak occurring the release of halogen gas constitutes the greatest hazard The COMPex ro laser has an externally connected vacuum pump This means that there is the potential risk of a gas leak when evacuating the gas mixture from the excimer laser To reduce the risk of a hazardous concentration of halogen gas a halogen sensor and an extraction system should therefore be installed in the area of the vacuum pump COHERENT LAMBDA PHYSIK 10 2005 53 SAFETY 54 Avoid repeated bending and excessive vibration of gas piping and equipment
265. ough contamination Contamination can cause serious damage to the optical components Always wear disposible plastic gloves when working with and on optical components e Disposable skin tight plastic gloves e Polishing powder e g vienna chalk from service case e Lens cleaning tissues e Distilled water e Optics grade Ethanol or Methanol e Pencil and paper e Suitable energy meter or power meter see Site Preparation for more information CAUTION Incorrect handling will cause unnecessary downtime Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas system pressures of below 20 bar abs may be critical e Gases as specified see Section 4 2 2 on page 76 Gas cylinders with a remaining pressure of at least 10 bar abs User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Energy Monitor Maintenance Preconditions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device switched on and laser ready to operate no radiation being emitted e Gas cylinder valves open and pressure regulators correspo
266. ound Between these two main electrodes is the control grid which initiates the discharge switching of the thyratron As is also the case with conventional thermionic tubes the cathode structure has to be heated in order to ensure sufficient emission of starting electrons If the electron emission after a longer operating period is no longer sufficient to initiate switching of the thyratron this can be corrected during the thyratron lifetime by increasing the heating power of the cathode Hydrogen is necessary to provide a fast current increase and a high current intensity However as hydrogen is continually lost due to diffusion and metal erosion the concentration of hydrogen has to be continually renewed For this purpose there is a reservoir structure palladium in the tube in which a large quantity of hydrogen is stored By heating the reservoir hydrogen is released from the reservoir into the main thyratron It should be noted however that too much hydrogen reduces the hold off voltage between the electrodes of the thyratron to such a level that unwanted switching of the thyratron will take place even without the trigger pulse On the other hand if the partial hydrogen pressure in the thyratron is too low the laser is unable to pulse This is because there is no discharge in the thyratron due to a lack of charged particles The values for the two heating voltages Uy for the cathode heating and Un for the hydrogen reservoir vol
267. pecific training at a dedicated Lambda Physik training course Please contact Lambda Physik for further information User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Resonator Alignment Tools and Materials e Class 2 diode or HeNe visible alignment laser NOTE Class 2 lasers have a maximum power output of 1 mW HeNe lasers operate at a wavelength of 632 8 nm visible red The wavelength of a diode laser is version dependent For further information please refer to the manufacturer s instructions e Alignment pucks from service case e Piece of card on which points of light can easily be seen with 2 mm pin hole e 4mm allen key e Long 3 mm allen key Maintenance Interval e Whenever the tube windows have been cleaned exchanged Time Required e 1 0h Preconditions e Laser device switched off and locked out see Section 7 3 on page 176 e Front and rear mirror access covers removed and accessed gained to the front and rear optics COHERENT LAMBDA PHYSIK 10 2005 233 MAINTENANCE 234 Setting Up the Visible Alignment Laser CAUTION Risk of eye injury Do not stare into the beam of a class 2 laser Remove all jewelry while performing the alignment procedure Never look directly at reflected beams 1 Direct the visible aligment laser from the rear through the center of the laser cavity see Figure 90 Figure 90 Direct alignment laser through laser cavity NOTE The
268. ply aa a Syntax Description aa a Temperature of the laser tube Variable decimal 2 places before and 1 place after decimal point Unit C Range 1 to 60 TEMP CONTROL This command requests the status of the laser tube temperature control module Syntax Setting TEMP CONTROL XXX Polling TEMP CONTROL Reply XXX Syntax Description XXX Status of temperature control ON temperature control active OFF temperature control inactive N A Temperature control module not available reply only User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Parameter Commands 8 3 8 8 3 8 1 8 3 8 2 Halogen Source ACCU Halogen source This command requests the current pressure of the halogen source accumulator The reply is zero when there is no halogen source Syntax Polling ACCU Reply aaaa Syntax Description aaaa Pressure in halogen source accumulator Variable integer 4 places Unit mbar Value current pressure CAP SET and CAP LEFT Halogen source This command sets and requests the remaining volume of the halogen source It is only available in the OFF mode Syntax Setting CAP SET aaa Polling CAP LEFT Reply aaa Syntax Description CAP SET Command to set the halogen source capacity CAP LEFT Command to request the halogen source capacity aaa Capacity of the halogen source Variable integer 3 places Unit Range 0 to 120 F gt source or 0 to 100 HCI source
269. proper connection Reason 2 Control software failure Solution Switch the laser device off and then on again Where necessary program the remote PC with continuous requests to ensure that communication with the laser device through the serial interface is not interrupted User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Warnings and Error Messages 9 1 28 9 1 29 9 1 30 Reason 3 Communications interface damaged Solution Call Lambda Physik service Warm up 8min OFF 21 Reason Laser device has just been started and is now warming up the thyratron Solution Wait for eight minutes Warning Repetition Rate for COD 50 Hz ON 37 This warning can only occur with an active COD Reason Although COD only supports repetition rates up to 50 Hz the preset repetition rate is more than 50 Hz consequently the COMPexPro has set the repetition rate to 50 Hz Solution Set repetition rate to 50 Hz or less Wrong Pressure OFF 27 The laser tube pressure is out of range The tube pressure must be within a range of 20 of the default tube pressure as specified in the Gas Menu Reason 1 Pressure settings in the Gas Menu are too high or too low Solution Reduce or increase settings in the gas menu so that the sum of all partial pressures does not deviate from the default pressure by more than 20 COHERENT LAMBDA PHYSIK 10 2005 307 TROUBLESHOOTING
270. r Standard helium Helium Inert Premix helium and Premix Buffer halogen source Halogen source Halogen Helium Inert To obtain optimum laser performance observe the following instructions for the gas line installation Only use gases specified in Section 4 2 2 on page 76 Only use materials specified in Section 4 3 4 on page 89 This prevents impurities from entering the gas system Store gas cylinders in a dry cabinet to avoid corrosion through moisture Never expose the halogen line to moisture while it contains halogen or traces of halogen as this will corrode it immediately Avoid long and complicated line routings This a source of impurities entering the system Only use clean and oil free leak proof fittings throughout the gas line Avoid complicated fittings Carefully check for leaks Never use gas lines that have been used for other gases NOTE A All unused connections must be blanked off with stainless steel plugs delivered with the laser device B For further information about the gas system please refer to Section 2 4 7 on page 23 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation Tools and Materials e Gas supply lines as specified in Section 4 3 4 on page 89 e 9 16 wrench e 13mm wrench e Tools for shaping and cutting stainless steel tubing CAUTION Incorrect handling can cause unnecessary downtime Only use gas cylinders with a
271. r Vacuum Ultraviolet Light The portion of the electromagnetic spectrum between 100 and 200 nm At these very short wavelengths air becomes opaque hence experiments must be performed in a vacuum or inert gas Watchdog A switch that alters its logical level when the reset pulses stop All watchdogs are reset at least three times a second If the reset fails a breakdown is assumed The module concerned is switched to a safe in active state The Basic Module is monitored by a watchdog COHERENT LAMBDA PHYSIK 10 2005 335 GLOSSARY 336 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO LIST OF FIGURES Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 7 Figure 8 Figure 9 Figure 10 Figure 11 Figure 12 Figure 13 Figure 14 Figure 15 Figure 16 Figure 17 Figure 18 Figure 19 Figure 20 Figure 21 Figure 22 Figure 23 Figure 24 Figure 25 Figure 26 Figure 27 Figure 28 Figure 29 Figure 30 Figure 31 COHERENT LAMBDA PHYSIK 10 2005 Laser components according to ISO 11145 6 Laser principle voc ve ak nae ai 10 Functional design of the COMPex ro 11 Designation of the sides of the COMPexPro 12 Beam exit side and service side 13 Connection side and service side 14 Inside 1 mania peel ria 15 Cutaway drawing of the laser tube 16 Laser resonator and energy monitor
272. r alignment aperture The alignment laser has to pass through the center of both alignment apertures 9 Fasten the card with pin hole directly in front of the alignment laser such that the beam passes through the pin hole User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation and Alignment of Unstable Resonator Optics Option 10 Remove the alignment apertures from the tube optics 11 Carefully switch off the alignment laser Flushing the Laser Tube 12 Close all pressure regulators and gas cylinder valves 13 Open the valve on the inert gas cylinder 14 Set the pressure regulator in the inert gas line to the required pressure The gas pressures are indicated in Section 4 2 2 on page 76 15 Press lt PURGE RESERVOIR gt 16 Where necessary press cursor left or cursor right to select WIN EXCHANGE 17 Press lt ENTER gt to confirm the choice 18 Press lt EXE gt to proceed The laser tube is evacuated and filled to 1200 mbar with inert gas Following this the message REPLACE WINDOWS enter appears to indicate that the optics are to be exchanged Exchange the Tube Optics CAUTION Risk of damaging optical components There is overpressure in the laser tube Always hold the optic mount with the other hand while loosening it Loosen the screws crosswise and in stages Always wear disposable plastic gloves when handling optical components 19 Use the 3 mm allen key to lo
273. r and thumb place the uncoated side of the optic onto the vienna chalk slurry CAUTION The surface of the optic is easily scratched Excessive downward pressure can scratch the optical surface Let the weight of the optic apply the downward force 13 While applying a sideways pressure move the optic in a circular or figure eight fashion for approx three minutes see Figure 79 Figure 79 Cleaning the uncoated side of the window 14 Rinse the lens e g under flowing distilled water 15 Place three layers of fresh lens tissue on a clean dry and smooth surface glass plate 16 Lay the window with the coated side downwards onto the prepared lens tissue 17 Place a single sheet of lens cleaning paper over the window 18 Put a few drops of ethanol onto the lens tissue close to one edge of the window 19 While holding the lens in place drag the lens tissue across the surface of the window 20 Repeat the previous three steps until the lens is clean and dry 21 Visually inspect the window in a well lit area to ensure that it is clean and dry 22 Puta few drops of ethanol onto the surface close to one edge 23 Wipe a lens cleaning tissue over the surface to clean the lens with ethanol Finalization 24 Insert the cleaned mirror into the mirror mount see Section 7 6 2 on page 208 ready for re installation into the laser device COHERENT LAMBDA PHYSIK 10 2005 213 MAINTENANCE 7 6 4 214
274. r device can be tilted max 5 around the beam axis and 20 longitudinally for a short period see Figure 43 Figure 43 Permitted tilting gradients CAUTION Risk of damaging laser device feet The COMPexPro laser device is to be transported carefully Especially if attached to the base plate of the rigid transport packaging avoid sudden shocks and if tilted avoid vibrations Transport and Storage Conditions Ensure that the conditions described in Section 4 2 1 1 on page 75 are maintained while transporting and storing the laser device User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Transport and Unpacking 5 1 3 1 Floor Loads CAUTION Risk of structural damage All floors an the proposed transport route or at the proposed storage installation location must be checked to ensure that they can withstand the weight of the laser device and fork lift truck or similar device whatever used It is the responsibility of the customer to provide Lambda Physik and or the system manufacturer with Accurate information regarding floor loading capabilities This information is necessary to determine the type of transportation to be used Elevator loading capacities When elevator transport is intended the loading capability of the elevator must be verified Packaging Dimensions and Weight Laser Device with Rigid Transport Packaging Dimensions L x H x B 1820 mm x 1030 mm x 540 mm We
275. r information about appropriate protective eyewear Specifications needed to select appropriate eyewear are wavelength power beam diameter repetition rate and max pulse duration The ANSI American National Standards Institute standard for safe use of lasers requires that protective goggles which block the appropriate laser wavelength should be worn while operating or servicing class IV lasers The goggles shall be clearly labeled with an optical density and the specified wavelength To avoid confusion these goggles should be kept separate from other safety glasses and personal protective equipment Using the wrong type of goggles is dangerous It can be worse to have improper eyewear and a false COHERENT LAMBDA PHYSIK 10 2005 49 SAFETY 50 sense of security than to have no eyewear and take precautions based on the absence of protection Even if you re wearing protective goggles never looked directly into the beam intense laser radiation is capable of destroying the protective filter Visible Red Radiation Operating the Laser at 157 nm ultra violet causes additional spontaneous and stimulated emission of radiation in the range of 635 nm to 755 nm visible red Optical Safety Guidelines The following guidelines describe some of the actions necessary to avoid injury caused by the laser beam Always follow these guidelines and take additional precautions if necessary e When eyewear is necessary make sure it has the
276. r the plugs used Preconditions e Laser device positioned at the final installation location COHERENT LAMBDA PHYSIK 10 2005 115 INSTALLATION 116 Preparation 1 Locate the vacuum pump in a safe position near to the laser device CAUTION Risk of damaging the laser device The laser device is available with a number of mains voltage and frequency configurations Ensure that the laser device is configured for your local voltage and frequency 2 Compare the settings indicated on the type plate with the mains voltage and frequency specifications at the installation location The type plate is situated on the connection side of the laser device bottom left corner Connecting the Laser Device to the Mains Power Supply 1 Ensure that the key switch and main switch are both set to their respective OFF settings 2 Blank the ends of the mains power supply cable attached to the laser device 3 Connect the blanked ends to the mains wall plug or wall power outlet The colors of the cables depend on the power supply version black or brown phase white or blue neutral green or yellow green ground 4 When used insert the prepared laser devices mains power supply plug into the mains socket Connecting the Vacuum Pump Please consult the operating instructions for the vacuum pump attached to this manual The vacuum pump must be connected to the socket on the rear side of the laser device marked with POWER
277. raining course to work on or with the COMPex Pro laser device without being permanently supervised by an experienced person WARNING Potential electrical hazards Work on the electrical system and equipment of the COMPexPro laser device must be carried out only by a skilled electrician or by instructed persons under the supervision and guidance of a skilled electrician and in accordance with electrical engineering rules and regulations WARNING Toxic hazards Work on gas fuelled equipment may be carried out by specially trained personnel only Safety Instructions Governing Specific Operational Phases Take the necessary precautions to ensure that the COMPex ro laser device is used only when in a safe and reliable state Operate the laser device only if all protective and safety oriented devices such as removable safety devices emergency shut off equipment and exhausters are in place and fully functional In the event of malfunctions stop the laser device immediately and lock it Have any defects rectified immediately Before starting the laser device ensure that nobody is at risk Never switch off or remove suction and ventilation devices when the laser device is in operation Observe the adjusting maintenance and inspection activities and intervals set out in the instruction manual including information on the replacement of parts and equipment These activities may be executed by skilled personnel only User Manual
278. rating panel 0c eee eee eee 138 Laser radiation warning lamp 140 handheld keypad 5 141 Status and parameter settings display 142 Closing pressure regulator 151 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO LIST OF FIGURES Figure 65 Figure 66 Figure 67 Figure 68 Figure 69 Figure 70 Figure 71 Figure 72 Figure 73 Figure 74 Figure 75 Figure 76 Figure 77 Figure 78 Figure 79 Figure 80 Figure 81 Figure 82 Figure 83 Figure 84 Figure 85 Figure 86 Figure 87 Figure 88 Figure 89 Figure 90 Figure 91 Figure 92 Figure 93 Figure 94 Figure 95 COHERENT LAMBDA PHYSIK 10 2005 Opening gas cylinder valve Setting pressure regulator to required pressure Switching on the laser device RUN STOP key on the keypad BREAK key on the keypad Shutting down the gas supply Main switch lockout ee ee eee Removing the energy monitor View of the optics mount with energy monitor Sealing plate installed in stead of optics mount Optics mount 0 Horizontal and vertical optic adjustment Disassembled optics mount Assembling the mirror mount Cleaning the uncoated side of the window Front optics with energy monitor Fo versi
279. rdous energy sources of the COMPexPro are High voltage electric energy Laser light Compressed gases To perform maintenance or servicing within the laser device these hazardous energy sources are isolated by setting the laser device s main switch to the OFF position When working with an open gas system e g when disconnecting the laser device from the gas supply or working on the gas supply lines up to and including the solenoid valves the external gas supply also has to be shut off and locked out tagged out Tools and Materials e Assigned individual lockout and or tagout devices suitable for use with the respective energy isolating device NOTE The assigned lockout tagout device shall correspond with OSHA 29 CFR 1910 147 c 5 i e it is to be durable of a standardized type within the facility substantial enough to prevent removal without the use of excessive force or unusual techniques and shall indicate the identity of the person applying the device User Manual COMPexPro Series A0510COMPPRO AO510COMPPRO Lockout Tagout Securing the Main Switch 1 Notify all responsible persons that the the COMPexPro laser device requires servicing or maintenance and that it must be shut down and locked out to perform the servicing or maintenance 2 If the laser device is operating shut it down by following the usual shut down sequence see Section 6 2 6 on page 158 3 Ensure that the main switch is set
280. re in the tube The laser tube is now open The inert gas valve opens every two seconds to compensate for the pressure drop and prevent air from entering the tube When the laser tube is open for longer than one minute the message CLOSE RESERVOIR enter appears indicating that the sealing plate or replacement optics mount should be inserted 204 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Tube Optics Maintenance CAUTION Risk of damaging laser tube The software routine is automatically continued by pressing lt ENTER gt Do not press lt ENTER gt when the tube windows are removed 12 Immediately insert the sealing plate see Figure 74 or a ready prepared optics mount see Figure 75 Tighten the six screws securing the optics mount crosswise and stages with the 3 mm allen key HE Figure 74 Sealing plate installed in stead of optics mount Figure 75 Optics mount Preparing the Removed Optics for Re Installation 13 Disassemble the optics mount and clean or replace the optics see Section 7 6 2 on page 208 NOTE If a ready prepared optic was installed in step 12 the contaminated or worn optic can be cleaned or exchanged after the laser has been put back into operation 14 If necessary remove the sealing plate and insert the optics mount as described in step 12 COHERENT LAMBDA PHYSIK 10 2005 205 MAINTENANCE 206 Leak Testing the Laser Tube 15 Press lt ENTER gt
281. remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas supply system pressures below 20 bar abs may be critical e Gases as specified in Section 4 2 2 on page 76 Preconditions e Laser device positioned at the final installation location Preparation 1 Check that pressure regulators are connected to the gas cylinders 2 Check that the gas supply lines are laid and connected to the pressure regulators or a halogen source CAUTION Risk of damaging gas connectors Cut stainless steel only with an appropriate tool Do not use a saw Do not use lubricants 3 Fit each line with a 6 mm Gyrolok fitting 4 Check that all gas supply valves are closed Connecting the Gas Lines 5 Use the 9 16 wrench to remove the blanking plug from the appropriate gas connector on the laser device NOTE Keep the blanking plug in the service case for further use 6 Fit the gas line to the appropriate connector on the laser device and tighten until finger tight COHERENT LAMBDA PHYSIK 10 2005 123 INSTALLATION 7 Use the 9 16 wrench to tighten the Gyrolok fittings Figure 54 Tightening the gas connections 8 Repeat steps 5 to 7 until all supply lines are connected Final Checks 9 Check that all connections are properly matched and sealed tightly 10 Perform a leak test on all newly fitted lines according
282. resent switched off the Cl will send the reply OFF 0 lt CR gt NOTE The Cl does not send a reply code after receiving a setting command To ensure that the setting command is valid and has been correctly processed send the corresponding polling command immediately after sending the setting command User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Communication Syntax Syntax Description name The name OPMODE to indicate an operating mode or one of the parameter commands listed in Section 8 3 1 This can be either a setting command or a polling command setting A word or numerical value that defines an operating mode or parameter setting With numerical values the character X in the descriptions in this chapter indicates each permitted place in the value i e each digit between O and 9 Less positions or leading zeros are permitted If the value has to be within a permitted range of values this range is indicated in the respective command description When a numerical value is to contain a special character e g colon or decimal point this is also indicated in the respective command description Where more than one word or numerical value is required the information separator is a comma status One of the status codes listed in Section 8 2 4 on page 270 Equals sign This is always written between the name and setting in both setting commands and replies to polling commands Question mark
283. reset energy level see Figure 17 Energy T High Voltage Energy gt Figure 17 Voltage increase in the Energy Constant mode COHERENT LAMBDA PHYSIK 10 2005 31 FUNDAMENTALS 2 7 2 2 7 24 32 When the HV Constant mode is selected the pulse energy decreases with time as excimer laser gases have a limited lifetime see Figure 18 fi High Voltage gt IB E 5 tul L eS SS SS SS Se et Time Figure 18 Energy decrease in the HV Constant mode Most applications require the energy constant mode whereas the high voltage constant mode is primarily used for diagnostic purposes e g to measure the gas lifetime Constant Energy Operation With Gas Actions If excimer lasers are operated continuously the pulse energy as a function of time and particularly as a function of the number of laser pulses shows a clear drop Reasons for this drop are The halogen concentration in the laser gas slowly decreases because the highly reactive halogen enters into a variety of stable compounds particularly when the laser is operated at higher repetition rates Impurities and reaction products accumulate in the laser gas The intense laser radiation in the resonator causes small particles generated by the electrode burn off to condense on the optics with chemical reactants from the laser gas In order to keep the desired pulse energy of the
284. resh excimer laser gas into the laser tube NOTE We recommend running rhe laser for a few minutes to warm up the excimer laser gas mixture before continuing with the next stage of the procedure Adjusting the Output Coupler NOTE Always adjust the newly installed optic before exchanging the other optic 23 Place an external energy measuring device in the beam path please refer to the energy measuring device s operating instructions for further information 24 Set the the laser to the HV CONST mode the maximum high voltage indicated on the data sheet and the repetition rate specified on the data sheet for the required beam energy see Section 6 3 on page 160 WARNING Risk of serious eye injury through laser radiation When working with an open laser beam always familiarize yourself with the necessary safety precautions before starting the laser Always wear suitable eye protection Never stare into the laser beam or its reflection Aviod contact with the laser beam 25 Start the laser see Section 6 2 4 on page 155 26 Turn the horizontal optic adjustment screw siehe Figure 76 A from right to left see Figure 76 A until the beam energy is at its heighest Figure 83 Horizontal and vertical optic adjustment F version 27 Repeat step 21 with the vertical optic adjustment screw B 28 If there is insufficient energy see laser data sheet for the required energy output repeat steps 21 and 22 C
285. rge On Demand COD Purpose Toggle between normal charging and Charge On Demand COD e Normal charging laser pulses are emitted continuously When the emission of laser pulses is needed in irregular intervals or the repetition rate is very low e g 10 Hz or lower the storage capacitors remain charged during the stand by interval between laser pulses In these stand by intervals the laser may produce unintended laser pulses self firing Depending on the working application self firing may cause severe damage to the target e COD prevent self firing as the thyratron only switches when the pulse is needed The HV is switched off and the capacitors remain uncharged When a laser pulse is needed a trigger signal enables the power supply to charge the storage capacitors After the storage capacitors are charged a trigger signal is sent to the thyratron The laser emits one pulse and HV is switched off again The trade off is an additional jitter of about 2 5 us the typical jitter is only 2 ns As COD can be activated or deactivated the COMPexPro is adaptable to both jitter sensitive applications and those which do not allow additional pulses NOTE Due to the capacitor charging time of 20 ms COD supports repetition rates only up to 50 Hz Higher values are automatically replaced with 50 Hz and the message WARNING REPRATE FOR COD gt 50 HZ is displayed COHERENT LAMBDA PHYSIK 10 2005 165 OPERATION 6 4 2
286. ribes gas handling for a straight forward gas system with one gas source for one laser device The COMPexPro may however be connected to an external gas handling system that serves a number of laser devices Therefore for exact operating information please refer to the gas handling system supplier s instructions Purpose Turn off the excimer laser gases and or purge gas at the source NOTE A Turn off all gases when the laser device is to be shut down for longer periods e g overnight B Turn off excimer laser gases when no activities requiring gas activities are to be performed Tools and Materials e None Preconditions e None Turning Off Gases 1 Close the valve on the gas cylinder see Figure 70 A by turning it clockwise to its stop A gt N Y AX Figure 70 Shutting down the gas supply 2 Turn the valve on the gas pressure regulator see Figure 70 B counter clockwise to its stop This ensures that the pressure regulator is closed 3 Repeat steps 1 and 2 to turn off the other gases COHERENT LAMBDA PHYSIK 10 2005 159 OPERATION 6 3 6 3 1 160 Operating Modes and Parameters This section describes the selection and setting of operating modes and parameters with the handheld keypad NOTE When the laser device is switched off the last settings are stored and reactivated when the laser device is restarted In certain operating modes these settings will be o
287. riggered from an external trigger generator that is connected to the external trigger socket on the industrial computer see Section 4 3 8 3 on page 96 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Energy Management 2 7 2 7 1 Energy Management The pulse energy output energy of an excimer laser is dependent upon the charging voltage high voltage and condition age of the excimer laser gas When the pulse energy E is considered as a function of the charging voltage U the result is approximately the function shown in Figure 16 A E mJ SS a a S E U kV Figure 16 Pulse energy as a function of charging voltage As excimer laser gases age the pulse energy obtained from a given charging voltage will decrease Consequently the COMPexPro can be operated in one of two fundamental running modes the Energy Constant mode EGY CONST or the High Voltage HV Constant mode HV CONST Regardless of the running mode used the laser gas quality will reach a state which is insufficient to adjust the HV power supply at a level that provides the preset beam output energy In this case the laser gas is to be exchanged completely using the New Fill procedure The New Fill procedure requires special interaction with the user or Remote PC Fundamental Running Modes When the Energy Constant mode is selected the laser control continuously adjusts the high voltage to achieve laser operation at a p
288. rm New Fill Section 5 2 13 page 135 COHERENT LAMBDA PHYSIK 10 2005 111 INSTALLATION 5 2 2 112 Position Laser Device Purpose Set down the laser device at the final installation location and adjust the feet to the required height Tools and Materials e Spirit level e Multigrip pliers or gaspipe pliers Preconditions e Laser device situated at the final installation location Preparation 1 Lay the spirit level on to the laser device housing Adjusting the Height of the Feet CAUTION Risk of damaging the laser device The feet can drop out of the laser device if over loosened Never exceed the maximum adjustment height of 65 mm between the base plate of the laser device and the installation surface 2 Use the pliers to turn the knurled nut see Figure 48 A on one of the feet on the beam exit side to the right until it protrudes by approx 5 mm o G 6 Figure 48 Laser device foot 3 Repeat step 2 for the other feet NOTE Adjust the feet crosswise in small steps so that the weight of the laser device is always evenly support User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation 5 2 3 5 2 4 4 Repeat steps 2 and 3 until all feet are at the correct height for the desired beam height and the laser device is level Visual Check Purpose Ensure that the laser device has reached the installation location without being damaged in
289. s 5 halogen in 95 inert gas User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Laser Parameter Commands 8 3 5 3 MENU The gas menus enable imprortant settings for the operation of the COMPexPro to be defined The gas menus contain information regarding Types of gases being used Wavelength Gas mode see GAS MODE Section 8 3 5 1 Partial pressures of the gases Predefined tube pressure see also status code no 27 Limits for the loading voltage HV min HVmax Predefined constant beam energy value The MENU command enables the gas menu to be selected or requested or resets the values in the currently selected gas menu to the factory settings The command is only available in the OFF mode Syntax Setting MENU a MENU RESET Polling MENU Reply a bbb ccc Syntax Description a Gas menu number 1to6 Menu number 1 to 6 bbb Wavelength of the gas menu in nm e g 193 CCC Gas mixture of the gas menu e g ArF RESET Command to reset the settings in the selected gas menu back to the factory settings Example Call the currently selected gas menu MENU lt CR gt 1 lt CR gt Activate gas menu no 2 MENU 2 lt CR gt Reset the currently selected gas menu to the factory settings MENU RESET lt CR gt COHERENT LAMBDA PHYSIK 10 2005 281 CONTROL SOFTWARE 8 3 6 8 3 6 1 8 3 6 2 282 Pulse and Time Counters TOTALCOUNTER This command requests the amou
290. s Replacement No Gas Replacement EGY NGR No Gas Replacement is a laser running mode where the laser control keeps the beam energy constant If the threshold voltage HV ep is exceeded the software reacts with a warning If it exceeds HVmax the laser is switched off and gives an error message see Section 2 7 on page 31 OPMODE Abbreviation for Operating Mode in the Remote Software All executable commands are called OPMODE and are executed with this command Partial Gas Replacement EGY PGR Partial Gas Replacement is a laser running mode where the laser control keeps the beam energy constant If the threshold voltage HV epi is exceeded and a fixed number of Halogen Injections were not successful a part of the gas in the laser tube is removed and replaced with fresh gas Afterward the beam energy must stabilize again Hence there are increased pulse to pulse energy fluctuations for a while see Section 2 7 on page 31 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Partial Pressure In a gaseous mixture the pressure exerted by a single component is its partial pressure The sum of all partial pressure of the mixture equals the total pressure of the mixture Passivation Process that makes the surface of the laser tube chemically inert to a halogen gas During this process halogen gas reacts with the surface of the tube building up a layer of a halogen metal complex The layer is inert to one specif
291. s adjustment screw see Figure 53 shift the anti tosion fork into the required position and retighten the adjustment screw Figure 53 Adjusting the anti torsion fork 5 Use the 36 mm wrench to tighten the halogen filter onto the vacuum pump 6 Remove the center plug from the top of the halogen filter 7 Use the 19 mm wrench to mount the vacuum hose onto the halogen filter 8 Remove the plastic plug from the laser device connection marked VACUUM PUMP 9 Use the 19 mm wrench to attach the white vacuum hose to the laser device connection 10 Remove the plug from the vacuum pump outlet socket 11 Mount the 34 gas exhaust hose to the vacuum pump outlet socket WARNING Risk of toxic hazard Lead laser and vacuum pump exhaust hose to an appropriate ventilation system Do not connect the exhaust to breathing air systems i e air conditioning or ventilating systems 12 Connect the gas exhaust hose to a suitable ventilation output COHERENT LAMBDA PHYSIK 10 2005 121 INSTALLATION 5 2 8 122 Connect Gas Lines The laser devices gas management system allows gas supply from seperate gas cylinders Additionally premix gas cylinders and or the optional halogen source can be used Consequently gas line installation varies Configuration Gas types Connection Single gases Halogen Halogen Helium Inert Neon Buffer as specified Rare Premix gas and Premix Buffe
292. s and requests the amount of pulses that are required to calculate the average beam energy When the input is outside of the permissible range the last FILTER value is retained When 0 is entered the program will automatically set a filter value in relation to the repetition rate The command is available in all modes Syntax Setting FILTER aa Polling FILTER Reply aa Syntax Description aa Filter value Variable integer 2 places Unit Value 0 automatic filter value 1 2 4 8 16 FILTER CONTAMINATION This command requests capacity of the halogen filter in percent and resets the capacity after exchanging the filter The command is available in all modes Syntax Setting FILTER CONTAMINATION RESET Polling FILTER CONTAMINATION Reply aaa Syntax Description RESET Reset command sets the capacity after a filter exchange back to 100 aaa Filter filling level Variable integer 3 places Unit Yo Value 0 to 100 COHERENT LAMBDA PHYSIK 10 2005 285 CONTROL SOFTWARE 8 3 7 4 8 3 7 5 286 INTERLOCK This reply to this polling command lists alls active interlocks After the request the interlock messages are deleted The command is available in all modes Syntax Polling INTERLOCK Reply NONE XXX XXX XXX Syntax Description NONE No interlock active XXX Name of the interlock if more than one interlock is active they are separated from each other by commas POWER STABILIZ
293. s nG pata 266 OPMODE PURGE 7 207 OPMODE PURGE RESERVOIR 7 263 OPMODE SAFETY FILL 264 OPMODESSKIP to sae tv ets sean a Baten 262 OPMODE TRANSPORT FILL eee 264 Setting restrictions 0 259 274 6 258 Transition diagram o casses yi ae 37 Operating panel 000 138 Operating sequences 200000 148 Operating temperature Laser tub neasa pai mha Pact 17 OPMODE Definition magaan aman AAA LANG Gees al Ot 332 Optic cleaning corria a a paba de oa 212 Optical safety guidelines 000000202 50 Output COUPE dis cra rs co a 18 Output energy setting cece eee ee 163 OVERLOAD message 2222222222 245 OZONE hay SA a Robe a ce alahas ot 28 48 Physical NaZards Nh aire eek ie tte eek iy 48 Protection against cid ted ed eee wee E 54 Parameter commands 0000 272 ACCU Gaan EAT Ae 289 BUFFER pama aNG o 280 GARLEP it 0 e Ann 2d 289 GAP SET Seedy YE PA ALA ee hn npag 289 CODE Ia NY NA tet at Peta ie nc ODE ANG R 284 GOUNTER Lana BLK AALAGA a 282 COUNTS o id Di dirt ake 279 EGY ye ta do BADA o a A 276 EGY RANGE a pares nan DANG aes bake Oe PE els 276 FILTER 22250 kasma mia a 285 FILTER CONTAMINATION 205 GASMODE ja aka a dale eet ee as FR Be ee 279 HALOGEN a nananana eestor GNG 5 5 A NG a PAS 280 7 207 7 200 tado Pte Ee Pee 2
294. s or perceivable faults such as self firing This chapter contains the following sections Subject Description Warnings and error messages Section 9 1 on page 294 Interlocks Section 9 2 on page 308 Self firing Section 9 3 on page 311 laser fires a shot without a trigger pulse No trigger signal Section 9 4 on page 311 Corrosion in gas system Section 9 5 on page 312 Laser device does not start Section 9 6 on page 313 Beam energy too low Section 9 7 on page 314 Low light Section 9 8 on page 319 Fuses Section 9 9 on page 324 COHERENT LAMBDA PHYSIK 10 2005 293 TROUBLESHOOTING 9 1 Warnings and Error Messages This section describes warning and error messages sent by the communication interface The display on the handheld keypad is different to the command sent through the serial interface to an external PC For quick reference the messages are listed in the following table in alphabetical order of the message sent to the external PC A cross reference indicates the subsection in which the message is described in more detail described in the following subsections in alphabetical order of the handheld keypad display The corresponding message sent to the external PC can be taken from the following table Message to External PC Handheld Keypad Message Description FLUSHING LEAKTEST 3 No Gas Flow Section 9 1 17 FLUSHING LEAKTEST CONT 30 Leak Check Windows
295. s warmed up for a period of 8 minutes During this period WARMUP XX min is displayed XX indicates the remaining warm up time in minutes During the warm up phase no laser light can be emitted Checking and maintenance actions that do not require laser emission can however be carried out These actions include checking parameter settings see Section 6 3 on page 160 flushing purging the gas lines see Section 7 4 on page 179 exchanging the laser gas see Section 7 5 1 on page 192 After completing the warm up phase the laser is ready to operate see Section 6 2 4 on page 155 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Routine Operating Sequences 6 2 4 Start Laser Operation Purpose Switch on the laser beam to commence lasing using the currently set operating parameters To enable generation of the laser beam the high voltage circuit is activated NOTE If the laser device has water cooling without the optional temperature regulation the cooling water flow has to be set in accordance with the water inlet temperature before starting normal laser operation Tools and Materials WARNING Risk of eye injury Always wear appropriate laser protective eyewear when working on or with an open i e unprotected excimer laser beam see Chapter 3 e Appropriately rated laser protective eyewear NOTE Protective eyewear is not necessary when the COMPex ro is part of a laser unit
296. se the previously active setting is retained BREAK is to be pressed twice to clear an interlock after rectifying the reason for the interlock COHERENT LAMBDA PHYSIK 10 2005 143 OPERATION 6 1 3 7 6 1 3 8 144 RUN STOP Key The RUN STOP key starts and stops laser operation emission of laser radiation and prepares the laser device for shut down When the laser is off no radiation being emitted but laser device powered up press RUN STOP to start laser operation or shut down the laser device After pressing RUN STOP a menu appears allowing you to RUN or SHUTDOWN In each case use the cursor keys to select the desired mode confirm the selection with ENTER and press EXE to execute the selection After selecting ON and pressing EXE laser operation is automatically started in the Warmup mode In the warmup mode the laser is ramped up to obtain optimum performance After completing the warmup the laser automatically starts with the previously active operating parameters see Section 6 3 on page 160 Emission of laser pulses is indicated by a red LED that lights in the corner of the key and the illuminated laser radiation warning lamp on top of the laser head After selecting SHUTDOWN press EXE to save the current parameter settings onto the industrial computer hard disk prior to shutting down the laser device While the settings are being saved the message Do not switch mains off during shut down appears Wh
297. sections WARNING Risk of serious injury or damage Always switch off the laser device to perform maintenanence servicing and repair work When the laser device switched has to remain switched on to perform maintenance work always ensure that the maintenance area is adequately secured and marked and that unauthorized persons cannot gain access to the laser device All persons in the maintenance area have to be fully familiar with the appropriate sefaty regulations and requirements Laser Logbook Prepare a laser logbook to keep a continuous record of data relating to laser operations This simplifies routine maintenance scheduling as well as troubleshooting The data recorded in the logbook should provide information about relevant changes in the operating behaviour of the device The logbook should include the following entries Date and time Running mode HV EGY PGR EGY NGR Charging voltage and beam output energy Operating mode OPMODE Trigger mode Repetition rate Status Gas actions warnings interlocks etc Counter reading total counter COHERENT LAMBDA PHYSIK 10 2005 173 MAINTENANCE 7 2 7 24 Maintenance Schedule This section contains the periodic and event related maintenance schedule for the COMPex ro laser device The information is presented in a form that allows the routine maintenance of the laser device to be exactly coordinated with the routine maintenance of oth
298. sence of toxic and corrosive gases TOXIC AND CORROSIVE GASES Pos 8 905384 Label warning that gas connections must be sealed when opened GASANSCHLUSSE UND GAS GASINLETS AND SUPPLY ZULEITUNGEN SIND NACH OUTLETS MUST BE BLAN DEM TRENNEN ODER BEI KED OFF AFTER DISCON NICHTBENUTZUNG ZU VER NECTING OR IF NOT USED SCHLIESSEN Pos 9 906446 Fluorine version only Label stipulating that no gas mixture other than fluorine gas mixtures shall be be used Nur Fluor Gasgemische verwenden Only for Fluorine Gas Mixtures COHERENT LAMBDA PHYSIK 10 2005 65 SAFETY 66 Pos 10 905910 Label indicating that the laser device is protected by one or more patents THIS LASER OR ITS COMPONENTS ARE PROTECTED BY ONE OR MORE PATENTS OTHER PATENTS ARE PENDING Pos 11 Label showing electrical frequency for the main supply where XX is replaced by the value of the frequency Laser is switched for XX Hz Pos 12 90574301 Identification plate for the laser device indicating model serial number year of manufacture and principal technical data emission range max pulse energy electrical connection of HV power supply module Lambda Physik AG Hans B ckler StraBe 12 LAMBDA PHYSIK D 37079 G ttingen a Germany Modell Model Serien Nr Hergestellt inG ttingen Manufactured v Phasen Phases User Manual
299. t Checking the Gas Line for Overpressure Leak Tightness 25 Open the inert gas cylinder valve 26 Set the pressure regulator in the inert gas line to the specified value see Section 4 2 2 on page 76 27 Press lt PURGE LINE gt on the handheld keypad PURGE current selection INERT BUFFER RARE HAL appears in the bottom line of the display 28 Press lt Cursor Right gt and or lt Cursor Left gt to select HAL halogen 29 Press lt ENTER gt to confirm the selection 30 Press lt EXE gt to start the purging procedure The message PURGE HAL appears in the bottom line of the display The halogen gas line and the internal gas system are evacuated and filled with inert gas He NOTE Depending on the configuration of the gas system the command has to be repeated until the gas line is completely purged 31 Use a leak tester to check the gas line connections for leaks 32 If there is a leak tighten the connections and where necessary exchange the sealing ring Following this repeat the leak test Cleaning Refilling and Passivating the Gas Line 33 Close the pressure regulator in the halogen line 34 Open the halogen gas cylinder valve 35 Set the pressure regulator in the halogen gas line to the specified value see Section 4 2 2 on page 76 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Gas System Maintenance 74 4 36 Press FLUSH LINE gt on the handheld keyp
300. t lal C Figure 95 Marking of the optics Key to Figure 95 A B 0 23 24 25 26 240 Coated surface Wavelength indication Arrow pointing towards laser tube Remove the sealing plate from the cavity aperture and immediately attach the mount with the new output coupler to the laser tube and use the 3 mm allen key to tighten the six fixing screws Lossen the six 3 mm Allen screws of the rear optics mount and remove the optics mount A short hissing sound can be heard due to tube overpressure Immediately mount the sealing plate see Figure 74 on page 205 Use the spanner wrench to remove the old rear optics from the optics mount User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation and Alignment of Unstable Resonator Optics Option 27 Insert the new rear optics into the optics holder and attach it to the external bracket mount NOTE A When the unstable resonator optics is to be used the unstable resonator adapter must be fitted In this case the rear optics must be replaced by an uncoated window which is mounted at an angle of 5 The plano convex rear optics is mounted externally to the adapter outside the laser tube B Ensure that the flat coated side of the optics faces away from the laser tube This will orientate the convex side toward the laser tube The convex side may be determined by viewing the curvature of the optic from the side 28 Remove the sealing plate from
301. t be read by all persons entrusted with any sort of work on the COMPex Pro laser device Never start to follow the procedures detailed in this manual unless you have read and fully understood the information given in the Safety chapter Signal Words and Symbols The COMPexPro documentation may contain sections in which particular hazards are defined or special attention is drawn to particular conditions These sections are indicated with signal words in accordance with ANSI Z 535 2 1991 and safety symbols pictorial hazard alerts in accordance with ANSI 2535 3 1991 Signal Words Four signal words are used in the COMPex Pro documentation DANGER WARNING CAUTION and NOTE The signal words DANGER WARNING and CAUTION designate the degree or level of hazard DANGER Indicates an imminently hazardous situation which if not avoided will result in death or serious injury WARNING Indicates a potentially hazardous situation which if not avoided could result in death or serious injury CAUTION Indicates a potentially hazardous situation which if not avoided may result in minor or moderate injury It is also used to alert against unsafe practices that may result in property damage Use of the signal word NOTE NOTE Used to define sections where particular attention should be paid to ensure efficient operation or servicing of the laser device User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Safety
302. tage are critical to the correct operation of the tube The voltages are stabilized in a broad input voltage range in order to be unaffected by voltage fluctuations in the supply line spikes These values have to be altered during the total life of the thyratron to ensure proper switching of the tube This can be done simply by using the jumpers provided for this purpose You will find a description of the thyratron adjustment in Section 7 10 of this manual User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Primary System Components 2 4 5 Laser Control The fundamental layout of the control system for the COMPex Pro is shown in Figure 11 COMPex Figure 11 Laser control system with handheld keypad Key to Figure 11 A FOL data ring HV power supply module B Communication interface Cl RS232 connection C Energy monitor G Handheld keypad D Basic module The communication interface Cl see Figure 12 B is the central control module Partial tasks are carried out independently by dedicated submodules such as the energy monitor C basic module D and the HV power supply E Each of the submodules has an address assigned to it which can be actuated by the Cl The individual modules communicate through a data ring A made up of fiber optic lightwave guides FOLs The information is optically coded by the CI and given to or received by the data ring as a sequence of light pulses As the FOL data
303. tched on and laser ready to operate no radiation being emitted e Pressure regulators and cylinder valves in each gas line closed User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Gas System Maintenance Evacuating the Gas Line CAUTION Incorrect operation can damage the pressure regulator If pressure is applied to a pressure regulator with low secondary pressure the pressure regulator membrane may become damaged Always ensure that the pressure regulator is closed before opening the gas cylinder valve 1 Open the corresponding gas cylinder valve 2 Set the pressure regulator in the corresponding gas line to at least 4 bar abs NOTE The pressure regulator has to be set to at least 4 bar to completely evacuate the line between the gas cylinder valve and the laser head With lower pressure settings residues may remain in the line between the pressure regulator and the gas cylinder valve 3 Close the corresponding gas cylinder valve 4 Evacuate the corresponding gas line without refilling it see Section 7 4 1 on page 179 Exchanging the Gas Cylinder 5 Close all pressure regulators and gas cylinder valves 6 Separate the gas line from the gas cylinder NOTE Depending on the manufacturers instructions the pressure regulator may also have to be exchanged 7 Exchange the gas cylinder CAUTION Risk of gas leaks When using gaskets to seal the gas lines always use new unused gaske
304. ted Checking the Halogen Filter Filling Ratio 1 Press lt F4 gt on the handheld keypad 2 Read off the filling ratio 3 Press BREAK to terminate the function NOTE Make sure that a replacement halogen filter is available in good time Exchange Halogen Filter Cartridge Purpose Exchange the halogen filter cartridge when the filling capacity has been reached The halogen filter is situated in the aluminum housing above the Vacuum pump Maintenance Interval e When indicated by the laser control software Time Required e 0 25h User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Halogen Filter Maintenance Tools and Materials e Housing key e Set of Allen keys e Pliers e Replacement halogen filter WARNING Toxic hazard The halogen filter contains fluorine and or chloride components Keep the filter in a well ventilated place Wear safety glasses and gloves e Sealable plastic bag e Plastic gloves e Safety glasses Preconditions e Laser device switched on and laser ready to operate no radiation being emitted Preparation CAUTION Toxic hazard The vacuum line may contain halogen To ensure that there is no halogen in the line always purge the line before removing the halogen filter 1 Use the PURGE INERT LINE procedure to purge the inert gas line and vacuum line see Section 7 4 2 on page 180 The vacuum pump will extract the inert gas through the vacuum line and h
305. tem of an excimer laser contains a mixture of halogen gases fluorine or hydrogen chloride Inhalation of or skin contact with halogen gases should be avoided The laser device shall only be used in technically perfect condition and in accordance with its designated use and the instructions set out in this manual and only by safety conscious persons who are fully aware of the risks involved in operating the laser device Any functional disorders especially those affecting the safety of the laser device should therefore be rectified immediately The COMPex ro laser device is a UV laser light source that is primarily designed for use in high end scientific and medium duty cycle industrial applications Using the laser device for purposes other than those mentioned above is considered contrary to its designated use The manufacturer supplier cannot be held liable for any damage resulting from such use The risk of such misuse lies entirely with the user Operating the laser device within the limits of its designated use also involves observing the instructions that are set out in this manual as well as complying with inspection and maintenance directives User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO General Safety Aspects Organizational Measures In accordance with the valid national regulations for prevention of accidents in Germany VBG 93 in the USA ANSI Z 136 1 a responsible person should be designated as
306. ter optic F and reflected through attenuators to a UV photodiode A The output from the UV photodiode is converted to a voltage signal The peak value of this signal is digitally encoded and transmitted to the communication interface As the energy monitor does not supply absolute measured values it has to be calibrated according to an externally measured energy reading In addition to an external measuring device no further measures are required calibration is performed using the laser control software s dedicated calibration procedure that can be accessed through the handheld keypad or external PC User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Primary System Components 2 4 4 High Voltage Circuit The high voltage HV circuit provides the rapid high voltage discharge required to obtain efficient excitation of the laser gas The primary components of the HV circuit are the HV power supply module see Section 2 4 4 1 on page 20 thyratron see Section 2 4 4 2 on page 20 and storage capacitors as well as the discharge electrodes and peaking capacitors of the NovaTube see Section 2 4 1 on page 16 The duration of the high voltage discharge is about 50 ns and the peak power can reach one gigawatt The discharge is fed from peaking capacitors These are a large number of discrete ceramic high voltage capacitors coupled directly to the laser tube s discharge electrodes with minimum inductance The peaking
307. the Laser Safety Officer LSO with the responsibility to effect the knowledgeable evaluation of laser hazards and to monitor and enforce their control The instruction manual must always be at hand at the place of use of the COMPex Pro laser device In addition to the instruction manual observe and instruct the user in all other generally applicable legal and other mandatory regulations relevant to accident prevention and environmental protection These compulsory regulations may also deal with the handling of hazardous substances and the issuing and or wearing of personal protective equipment WARNING Risk of serious injury through incorrect operation Personnel entrusted with work on the COMPex Pro laser device must have read the instruction manual and in particular the safety instructions before beginning work Reading the instructions after work has begun is too late The necessity of reading the instruction manual applies especially to persons working only occasionally on the COMPex Pro e g during setting up service or maintenance Use personal protective equipment PPE e g protective eyewear wherever required by the circumstances or by law see Section 3 2 2 on page 49 or the separate Site Preparation Manual Ensure that all safety relevant labels are attached to the laser device in accordance with the label location diagrams in Section 3 3 on page 61 Make sure that these labels are always complete and perfectly legible
308. the displayed values They must be within a range of 99 200 9 9 20 for the Fo version The laser now tries to adjust the energy monitor gain so that the AD converter reading is within the required range If the reading is out of range take note of whether it is too high or too low Should none ofthe gain settings provide an acceptable reading the number of attentuators has to be varied Call COHERENT LAMBDA PHYSIK service When the adjustment has succeeded the display changes to READING NOTE Input values must be in mJ 1 1000 Joule If you are using an external power meter obtain the input value with the following equation _ ext Einput 1000 f where Ejnput is the input value Ejnput MJ Payt is the reading from the external power meter Pex W and f is the repetition rate f Hz 13 Enter the external energy measurement data in mJ 14 Press lt ENTER gt to confirm input The laser device sets the external energy measuring data equal to the internally calculated value The energy monitor is now calibrated Checking the Calibration 15 Start the laser with the currently active settings 16 Measure a few laser pulses with the external energy meter and compare these values with those displayed by the energy monitor They should differ no more than 2 to 3 If there is a larger deviation repeat the calibration procedure from step 4 Clean Beam Splitter Purpose Clean the beam splitter This pr
309. the rear cavity aperture and immediately attach the window mount with the new rear optics to the laser tube Adjusting the Tube Optics 29 Adjust the window mount for a few turns on the vertical and horizontal axis to ensure that reflections from the window are not on the laser tube axis Observe the reflection of the alignment laser from the output coupler on the punctured card in front of the alignment laser NOTE A Reflections from each surface from the output coupler may be overlapped and may produce an interference pattern B The beam reflected from the output coupler may be enlarged when the alignment laser is beyond 500 mm away C The reflection of the output coupler is dimmer than the reflection of the rear optics 30 Center the reflected alignment laser beam through the hole of the pin hole card with the horizontal and vertical adjustment screws on the output coupler mount Observe the reflection of the alignment laser beam from the rear optics on the punctured card in front of the alignment laser 31 Center the reflected alignment laser beam through the pin hole in the card with the horizontal and vertical adjustment screws on the rear optics mount Finalization 32 Reinstall the energy monitor and the magnetic beam shielding 33 Reinstall the service panel 34 Press lt ENTER gt to signify that the tube optics have been exchanged A new flushing cycle will be started and perform a leak test see Section 7 6
310. ther with its accessories and packaging depending on version weighs up to 395 kg 870 8 Ib Prevent tipping or dropping during lifting and transportation A suitable for lift truck or similar device is required to lift the laser device Ensure that the fork length and loading capacity is sufficient to safely lift the laser device in its packaging NOTE For information regarding the size and weigth of the laser device in its packaging see Section 5 1 3 1 on page 103 The laser device can be lifted longitudinally or from the side Set the forks as far apart as possible to safely lift the laser device Incoming Goods Inspection Purpose Check the laser device for possible transport damage NOTE A To monitor the handling of the laser device during transportation SHOCKWATCH indicators are fixed to the rigid transport packaging as well as inside the laser device These turn from white to red when subject to excess shocks B After ensuring that the laser device is not damaged check the contents of the shipment against the packing list provided and sign the delivery note If any parts are missing immediately contact Lambda Physik The contact address is indicated on the reverse side of the cover sheet of this manual Tools and Materials e None Performing Incoming Goods Inspection 1 Ensure that no SHOCKWATCH indicators on the rigid transport packaging have turned to red 2 If one or more SHOCKWATCH indicators is re
311. tion 6 1 3 2 on page 143 141 OPERATION 6 1 3 1 142 Display LCD display with 2 rows and 40 columns that indicates the current status and parameter settings of the laser as well as displaying prompts and error messages Figure 63 shows a typical screen display that appears after powering up the laser device when the HV constant mode HV CONST and internal triggering are active 1 2 3 4 5 MODE HV 10 Hz 28 0kV 0mJ 3030 4 KrF Figure 63 Status and parameter settings display Key to Figure 63 Currently active operating mode laser status and status code Running mode Repetition rate internally set Currently active charging voltage Currently emitted beam output energy Laser tube pressure Gas mixture gas menu gt 0 a For more information about the meaning of status codes for basic troubleshooting see Section 8 2 4 on page 270 b In the HV CONST mode the current value measured by the energy monitor is displayed In the energy constant mode EGY CONST the set energy constant value is displayed After pressing one of the keys that enables a parameter setting to be changed e g the MODE key a prompt will appear in the bottom row of the display Depending on the prompt use the cursor buttons right and left to choose one of the items displayed in parenthesis or use the numerical input keys to enter a numerical value User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO
312. tions CAUTION The laser device is to remain powered up during this procedure Ensure that the maintenance area is at all times adequately secured and that no unauthorized persons can access the laser device All persons in the maintenance area shall be fully familiar with the applicable safety regulations and requirements e Laser device switched on and laser ready to operate no radiation being emitted e Gas cylinder valves open and pressure regulators correspondingly set for secondary pressures see Section 4 2 2 on page 76 Flushing the Laser Tube 1 Ensure that the cylinder valve and pressure regulator in the inert gas line are closed 2 Open the valve on the inert gas cylinder 3 Set thepressure regulator in the inert gas line to the specified value see Section 4 2 2 on page 76 4 Press lt PURGE RESERVOIR gt A list of selections appears in the bottom line of the display 5 Press lt Cursor Right gt and or lt Cursor Left gt to select WIN EXCHANGE 6 Press lt ENTER gt to confirm User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Tube Optics Maintenance 7 Press lt EXE gt to fill the laser tube with inert gas The vacuum pump starts to evacuate the laser tube After reaching 30 mbar the vacuum pump stops the inert gas valve opens and the laser tube is filled to 1200 mbar with inert gas The inert gas valve then closes After filling the laser tube REPLACE WINDOWS enter
313. to Section 5 2 11 on page 130 of this manual 124 User Manual COMPexPro Series A0510COMPPRO AO510COMPPRO Installation 5 2 9 Connect Water Lines COMPex ro 110 COMPexPro 205 COMPex ro Fo Purpose Connect the cooling water inlet and outlet lines to the laser device The fittings are contained in the service case NOTE Due to the increased power of the COMPexPro 110 and COMPexPro 205 they cannot be air cooled only and therefore require a water cooling supply when they are continuously operated at repetition rates higher than 20 Hz The specifications of the water supply are indicated in Section 4 2 4 on page 82 There are two fundamental types of water line connections see Figure 55 B C D Figure 55 Water line connections Key to Figure 55 A Ferrule for inch pipe C Ferrule for Ye inch hose B Nut for all connections D Nozzle for Y inch hose NOTE A This section describes the connection of water hoses to the laser device Cooling water pipes are to be connected in a similar way using a nut and a ferrule and inserting the pipe instead of the nozzle B The water leakage service kit part no 264 089 contains different connectors which shall be sufficient to rectify a water leakage If necessary the teflon tape contained may be used to seal threads in the cooling water lines Never use the teflon tape for the connections at the laser device COHERENT LAMBDA PHYSIK 10 2005 125 INSTALLATION
314. to confirm that the optics have been exchanged An automatic leak test is started The laser is filled to 3000 mbar with inert gas and the cavity pressure is monitored over a 15 minute period During this time the message LEAK TEST is displayed Should a leak be detected the laser tube is evacuated to approx 1200 mbar and the warning message Leak Check Windows appears Locate the exact source of the leak and rectify 16 When no leak is detected press lt ENTER gt to proceed The laser tube is then evacuated to 30 mbar and filled to 500 mbar twice before being evacuated and finally filled to 1050 mbar Refilling the Laser Tube 17 Perform a new fill see Section 7 5 1 on page 192 to fill fresh excimer laser gas into the laser tube NOTE We recommend running rhe laser for a few minutes to warm up the excimer laser gas mixture before continuing with the next stage of the procedure Adjusting the Output Coupler NOTE Always adjust the newly installed optic before exchanging the other optic 18 Place an external energy measuring device in the beam path please refer to the energy measuring device s operating instructions for further information 19 Set the the laser to the HV CONST mode the maximum high voltage indicated on the data sheet and the repetition rate specified on the data sheet for the required beam energy see Section 6 3 on page 160 WARNING Risk of serious eye injury through laser radiation
315. ts 8 Screw the line fittings to the corresponding gas cylinder or alternatively to the pressure regulator if this was exchanged together with the gas cylinder Checking the Gas Line for Vacuum Leak Tightness 9 Ensure that the pressure regualtors and cylinder valves are closed on all gas lines 10 Open the corresponding gas cylinder valve COHERENT LAMBDA PHYSIK 10 2005 189 MAINTENANCE 11 Set the pressure regulator in the corresponding line to at least 4 bar abs NOTE The pressure regulator has to be set to at least 4 bar to completely evacuate the line between the gas cylinder valve and the laser head With lower pressure settings residues may remain in the line between the pressure regulator and the gas cylinder valve 12 Close the corresponding gas cylinder valve 13 Press FLUSH LINE gt on the handheld keypad FLUSH curre nt selection INERT BUFFER RARE HAL appears in the bottom line of the display 14 Press lt Cursor Rights and or lt Cursor Left gt to select the desired gas line 15 Press lt ENTER gt to confirm the selection 16 Press lt EXE gt to evacuate the selected gas line between the laser head valve and the gas cylinder valve The message FLUSH current selection appears in the bottom line of the display The vacuum pump runs for two seconds to evacuate the gas line 17 Repeat step 16 until the pressure regulator gauge indicates a relatively constant vacuum NOTE I
316. ts the thyratron warm up phase Section 8 2 3 3 NEW FILL Evacuates the laser tube and fills it with fresh laser gas Section 8 2 3 4 PASSIVATION FILL Evacuates the laser tube and fills it with a gas mixture for tube re passivation Halogen Helium Section 8 2 3 5 PURGE Evacuates the laser tube ana fills it with inert gas for purging Section 8 2 3 6 RESERVOIR SAFETY FILL Fills the laser tube with inert gas in case of a leak Section 8 2 3 7 TRANSPORT FILL Evacuates the laser tube and fills it with buffer gas Neon for transport Section 8 2 3 8 replacement FLUSHING Evacuates the laser tube and fills it with an inert gas to Section 8 2 3 9 exchange the optics CONT Continues the optics change procedure with a leak test Section 8 2 3 10 HI Injects halogen gas into the laser tube HI Section 8 2 3 11 PGR Exchanges part of the laser gas PGR partial gas Section 8 2 3 12 MANUAL FILL INERT Fills the laser tube for 10 seconds with inert gas Section 8 2 3 13 FLUSH lt xy gt LINE Evacuates the lt xy gt gas line for 2 seconds Section 8 2 3 14 PURGE lt xy gt LINE Evacuates the lt xy gt gas line for 5 seconds and fills it with inert gas Section 8 2 3 15 CAPACITY RESET Resets the filling level indicator for the halogen source Section 8 2 3 16 LL OFF Deactivates the low light function Section 8 2 3 17 ENERGY CAL Starts the routine for calibratin
317. ty Systems WatchdogsS 5 Data Ring Selftest Interlocks 2 External Interlock and Laser Warning Lamp Pulse Triggering Modes Energy Management Fundamental Running Modes Constant Energy Operation With Gas Actions Halogen Injections Partial Gas Replacements HI PGR Algorithm 4 Constant Energy Operation Without Gas ACHONS cui rane PE Operating Modes OFF Mode 0 OFF WAIT Mode 0 2 20 ON Mode sieer d e TE E NEW FILL 006 Laser 0206800 cee eee eee 30 30 31 31 32 32 33 34 36 37 37 38 38 38 38 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO TABLE OF CONTENTS 3 SAFELY coche NAA KA emcees 39 3 1 General Safety Aspects 39 3 1 1 Applicable Standards 39 3 1 2 Basic Operation and Designated Use 40 3 1 3 Organizational Measures 41 3 1 4 Selection and Qualification of Personnel Basic Responsibilities 42 3 1 5 Safety Instructions Governing Specific Operational Phases 42 3 2 Specific Safety Aspects 44 3 2 1 Physical Hazards 2 45 3 2 1 1 Laser Radiation Safety 45 3 2 1 2 High Voltage Electric Energy 46 3 2 1 3 Halogen Gases 0a 47
318. ue is reached and operate the laser at max HV for 15 minutes If no additional pulses occur the thyratron is adjusted Otherwise return to step 16 and repeat the procedure Finalization 24 Use the 3 mm allen key to refit the thyratron adjustment plate cover Halogen Filter Maintenance Lambda Physik excimer lasers use a halogen filter to remove molecular species of fluorine from laser gas mixtures removed from the laser tube Storage Filters must be stored in unopened packaging in accordance with all relevant regulations According to the accident prevention regulation Protection from Hazardous Chemical Substances VBG 1a FR Germany unopened filters can be stored for a period of up to four years The filter s lifetime is printed on the packaging Filters should always be stored in a dry place in the original unopened packaging to protect from damage A Filter with visible damage e g dents must be removed regardless of its shelf life COHERENT LAMBDA PHYSIK 10 2005 245 MAINTENANCE 7 11 1 7 11 2 246 Check Halogen Filter Filling Ratio Purpose Check the filling level of the halogen filter At a filling level of 100 the halogen filter has to be exchanged see Section 7 11 2 Maintenance Interval e Every 4 weeks e Before a new gas fill Time Required e 0 05h Tools and Materials e None Preconditions e Laser device switched on and laser ready to operate no radiation being emit
319. ugh a dedicated software routine NOTE Always change the output coupler and the rear mirror in two seperate procedures to ensure that one of the optics is remains adjusted The replaced optics can then be aligned with the optics that are still adjusted When the tube optics is replaced in one single procedure resonator adjustment can only be performed by specially trained personnel or authorized service Maintenance Interval e Remove optics for cleaning Every 10 to 30 million pulses Every 3 to 5 new gas fills e Exchange optics After cleaning the tube windows five times Ifthe optics are damaged or unable to be cleaned NOTE With ArF versions always exchange the optics after cleaning every third time Time Required e 1 0h COHERENT LAMBDA PHYSIK 10 2005 201 MAINTENANCE 202 Tools and Materials e 4mm allen key from service case e 3mm allen key from service case e 2 5 mm allen key from service case e Sealing plate or premounted optics mounts e External energy meter for handling see energy meter manual e Gases as specified see Section 4 2 2 on page 76 Gas cylinders with a remaining pressure of at least 10 bar abs CAUTION Risk of damaging optical components through contamination Contamination can cause serious damage to the optical components Always wear disposible plastic gloves when working with and on optical components e Disposable skin tight plastic gloves Precondi
320. ulator and the gas cylinder valve 7 Purge the halogen gas line at least four times see Section 7 4 2 on page 180 The halogen gas line is now free of halogen so that the gas cylinder can now be changed Exchanging the Halogen Gas Cylinder 8 Close the pressure regulator and gas cylinder valve User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Gas System Maintenance 9 Separate the gas line from the gas cylinder NOTE Depending on the manufacturers instructions the pressure regulator may also have to be exchanged CAUTION Risk of corrosion The halogen gas line is not to be left open for more than two minutes Always seal the halogen line with a stainless steel cap when the line is to be separated for a longer period 10 Seal the halogen line with a stainless steel cap to prevent corrosion 11 Exchange the halogen gas cylinder 12 Remove the stainless steel cap from the halogen line CAUTION Risk of gas leaks When using gaskets to seal the gas lines always use new unused gaskets 13 Screw the line fittings to the halogen gas cylinder or alternatively to the pressure regulator if this was exchanged together with the gas cylinder Checking the Ga s Line for Vacuum Leak Tightness 14 Ensure that the pressure regulators and cylinder valves are closed on all gas lines 15 Open the halogen gas cylinder valve 16 Set the pressure regulator in the halogen line to at least 4 bar abs
321. un Reason Vacuum Pump defective Solution 1 Switch off and secure the laser device 2 Ensure that the vacuum pump power supply line is properly connected to the COMPex Pro 3 Check the vacuum pump fuse Replace if necessary 4 Visually check the vacuum pump power supply line Symptom 2 Vacuum Pump continues to run Reason Laser tube has a leak Solution 1 Switch off and secure the laser device 2 Ensure that there is no leak at the tube optics If there is a leak which cannot be sealed call COHERENT LAMBDA PHYSIK service 3 Perform a leak test in the gas line to the vacuum pump If leaky replace line 4 Check halogen filter for leak For this purpose check the O rings inside the halogen filter housing for damage and replace the O rings if necessary Check if the butterfly nuts on the halogen filter housing are tightened see Section 7 11 2 on page 246 If the problem remains call COHERENT LAMBDA PHYSIK service COHERENT LAMBDA PHYSIK 10 2005 303 TROUBLESHOOTING 9 1 19 9 1 20 9 1 21 9 1 22 304 No Vacuum ON 9 This is a warning message relating to the halogen source It occurs when a predefined minimum pressure is not reached after evacuating the gas system inside the halogen source To solve the problem follow the instructions described in Section 9 1 18 Additionally refer to the instructions concerning this warning message in the halogen source s manual N
322. ure 44 Rigid transport packaging User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Transport and Unpacking Placed on the base pallet are two shock absorbing buffers see Figure 45 When the laser device feet are placed in the locating holes of the buffers A the laser device is secured in position when the rigid transport packaging is closed Figure 45 Shock absorbing buffers The laser device is to be stored in the rigid transport packaging 5 1 5 Transport and Unpacking Procedure This section provides an overview of the unpacking and internal transport of the laser device Further information is provided in the indicated sections of this chapter Step Action Further information 1 Unload transport container from truck and set down in goods in area Section 5 1 6 page 106 Perform incoming goods inspection Section 5 1 7 page 106 Move container to storage unpacking area Section 5 1 6 page 106 Remove rigid transport packaging Section 5 1 8 page 107 Transport laser device to unpacking or installation area Section 5 1 9 page 109 Remove anti static inner covers Section 5 1 10 page 110 Where necessary transport laser device to installation area Section 5 1 9 page 109 COHERENT LAMBDA PHYSIK 10 2005 105 INSTALLATION 106 Transport Lifting with Rigid Packaging WARNING Risk of crushing The laser device toge
323. urn on the water supply 15 Check that there are no leaks or blockages and rectify if necessary 16 Shut off the water supply after successfully completing the leak test Connect Signal Lines Purpose Connect the control and signal lines to the laser device This consists of either connecting the handheld keypad or remote computer to the corresponding port on the laser device Connect the Handheld Keypad The handheld keypad is an easy and comfortable way of operating the COMPexPro without an additional PC remote PC CAUTION Risk of data loss Menu parameters can be lost when disconnecting the handheld keypad The laser device must be switched off before disconnecting the handheld keypad from the laser device Tools and Materials e Handheld keypad e RS232 cable e Appropriate screwdriver for the RS232 plugs Preconditions e Laser device positioned at the final installation location e Supply lines connected User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation Connecting the Handheld Keypad 1 Switch off the laser device 2 Plug the RS232 cable into the RS232 port on the laser device see Figure 58 Figure 58 Connecting RS232 plug to the laser device 3 Fasten the screws of the plug 4 Plug in the other side of the cable into the handheld keypad see see Figure 59 Figure 59 Connecting RS232 plug to the handheld keypad 5 Fasten the screws of the plug COHERENT
324. used clean the gas line connections with ethanol and wipe dry with cleaning paper COHERENT LAMBDA PHYSIK 10 2005 133 INSTALLATION 5 2 12 134 Leak Test Laser Tube Purpose The window exchange procedure is used to check the leak tightness of the laser tube Tools and Materials CAUTION Incorrect handling can cause unnecessary downtime Only use gas cylinders with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas supply system pressures below 20 bar abs may be critical e Gases as specified in Section 4 2 2 on page 76 Gas cylinders with a remaining pressure of at least 10 bar abs Preconditions e Laser device switched on and laser ready to operate laser radiation not being emitted e Leak tightness of the gas supply system checked e Gas cylinder valves open and pressure regulator set see Section 4 2 2 on page 76 Leak Testing the Laser Tube 1 Press the MENU key lt SEL gt A shortened version of the current gas menu will be displayed 2 Check that the settings in the gas menu correspond with the settings on the test sheet If necessary change the menu or amend the settings see Section 6 4 2 on page 166 3 Press lt PURGE RESERVOIR gt The bottom line of the hand held keypad display indicates the available options 4 Press cursor left or cursor right to select WIN EXCHANG
325. value of 0 16 mg m3 for fluorine even in a worse case situation unventilated rooms have to have an air volume of at least 100 m3 When installaing the laser device in small rooms make sure that there is an adequate air extraction system Further potential chemical hazards exist due to the formation of hydrofluoric or hydrochloric acid if the halogen gas comes into contact with water Hydrofluoric acid in the form of KHF5 and hydrochloric acid can also be formed in the halogen filters used in the system due to fluorine coming into contact with the hygroscopic components of the filter Ozone The formation of ozone due to the interaction of ultra violet light 193 nm and 157 nm with oxygen constitutes a potential hazard The attention of the user is drawn therefore to the maximum permitted exposure limit for Ozone and the permitted periods of time in respect of this limits which depends on local and international safety regulations The MAK maximum acceptable concentration level values according to the German publication Technische Regel des AusschuB f r Gefahrstoffe des Bundesministeriums f r Arbeit und Soziales TRGS 900 October 2000 is as follows Ozone Limit 0 2 mg m3 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Specific Safety Aspects 3 2 2 3 2 2 1 Personnel Safety Laser Radiation Safety Ultra violet Radiation Safety An excimer laser emits high intensity pulsed ultrav
326. valve was open for 10 seconds or the tube pressure exceeds 3800 mbar 40 PRESET ENERGY TOO LOW The beam energy entered is too low The laser is running with the lowest HV but the beam energy is still higher than the preset value 41 The entered energy value exceeds the value defined in the menu data by more than 5 COHERENT LAMBDA PHYSIK 10 2005 Sheet 2 of 2 271 CONTROL SOFTWARE 8 3 Laser Parameter Commands To set or change laser operating parameters parameter commands are used The laser parameters are set or changed with the command name setting and read with the polling command Name 8 3 1 Overview of Laser Parameters The following table lists in alphabetical order the parameters that can be read r or set s Name Format Unit Access Function Description read set ACCU XXXX mbar r Halogen source accumulator Section 8 3 8 1 pressure BUFFER XXXX mbar 5 Buffer gas partial pressure Section 8 3 5 2 CAP LEFT XXX r Remaining volume of halogen Section 8 3 8 2 source CAP SET XXX Yo s Volume of halogen source Section 8 3 8 2 COD ON or r s COD function active or inactive Section 8 3 7 1 OFF COUNTER XXXXX 103 r Resettable counter reading Section 8 3 6 2 Or pulses RESET s Reset the counter reading COUNTS XXXXX pulses r s Amount of pulses for external Section 8 3 4 7 triggering EGY XXX XX my r s Set valu
327. ved from the laser gas which is done by an electrostatic filter E integrated in the gas circulation Due to the pressure conditions generated by the circulation fan the laser gas continuously flows through this electrostatic filter The maintenance operations required during the lifetime of the NovaTube are new gas fills and the exchange of the windows To minimize downtimes the windows should be stored as premounted units COHERENT LAMBDA PHYSIK 10 2005 17 FUNDAMENTALS 2 4 2 2 4 3 18 Resonator Optics The optical feedback system that amplifies the laser light is provided by a plane parallel resonator See Figure 9 G F E D C Figure 9 Laser resonator and energy monitor Key to Figure 9 A UV photodiode E Beam splitter B Laser tube F Energy monitor C Rear mirror highly reflective G Shutter D Output coupler At the rear of the resonator is a highly reflective HR mirror C The other resonator mirror D is known as the output coupler This is a partially reflective PR mirror that allows part of the laser light to escape from the resonator thereby forming the laser beam The gas volume of the laser tube B is sealed by the mirrors C D which are attached on each side of the laser tube Energy Monitor The internal energy monitor see Figure 9 F is situated between the output coupler D and beam shutter G A portion of the beam emitted through the output coupler is diverted by a beam split
328. verpressure via the halogen filter into the exhaust The following precautions should be observed e The laser should only be operated with the housing closed e In accordance with the European Pressure Equipment Directive Lambda Physik recommends to have the laser tube checked by a specialist every five years Call Lambda Physik Service for further information Seismic Protection For installations in areas that are susceptible to seismic activity the end user is responsible for appropriately securing the laser device within their facility or the OEM is responsible if the laser device should be installed within an OEM device alternatively For the exact configuration of the protective devices local regulatory requirements are to be followed and the site vulnerability of the facility or OEM device e g soil conditions and design is to be taken into account Provision is to be made for the following e Anchors to prevent movement or overturning of the laser device during a seismic event e Suitable strain relief devices for all supply lines to control the risks through leakage or escape of gases liquids and electricity etc during a seismic event COHERENT LAMBDA PHYSIK 10 2005 55 SAFETY 3 2 3 Constructive Safety Features The laser device is equipped with the following constructional safety features 3 2 3 1 Radiation Safety Features e Appropriate Class IV label affixed to laser device enclosure see Section 3 3 1
329. verridden by default settings Therefore before starting the laser always check the settings of the operating parameters Tools and Materials e None Change Trigger Mode Purpose Switch between external and internal triggering of the laser e Internal triggering INT laser pulses are triggered by the laser device s internal trigger generator This causes laser pulses to be fired at the preselected repetition rate e External triggering EXT laser pulses are triggered by an external trigger generator connected to the EXT TRIG socket on the connection side of the laser device see Section 4 3 8 3 on page 96 Requirements e Laser device switched on e Internal triggering Repetition rate correctly set see Section 6 3 2 CAUTION Risk of damaging laser device Do not connect or disconnect the external trigger cable to the EXT TRIG socket while the laser is running e External triggering External trigger generator correctly set and connected to the EXT TRIG external trigger socket on the rear of the laser head User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Operating Modes and Parameters 6 3 2 Selecting the Trigger Mode 1 Press lt TRIGGER INT EXT gt The bottom line of the handheld keypad display reads TRIGGER current selection INT EXT 2 Press either lt Cursor Rights or lt Cursor Left gt to select the desired trigger mode 3 Press lt ENTER gt to confirm the
330. verview This section provides an overview of the location and nomenclature of the system components Designation of Sides This section indicates the designation of the sides of the COMPexPro laser device as used throughout this manual To prevent confusion or ambiguity in the representations or procedures contained in this manual the sides of the COMPexPro are defined according to their purpose or function see Figure 4 Figure 4 Designation of the sides of the COMPexPro Key to Figure 4 A Service side B Rear side C Beam exit side D Connection side User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO System Overview 2 3 2 Exterior Views Figure 5 Beam exit side and service side Key to Figure 5 Service panel Thyratron adjustment plate access panel Lower air intake Beam shutter Beam exit frame Front mirror access panel Upper air intake Front panel TOTMOOU gt COHERENT LAMBDA PHYSIK 10 2005 13 FUNDAMENTALS 14 U T S R Figure 6 Connection side and service side Key to Figure 6 gt 0 7 7 2 2 3 gt Rear panel Mains switch Power On lamp Fuses Key switch Control supply lamp Mains supply line Exhaust fan outlet Remote interlock connector RS232 connector Rear mirror access Communication interface access panel LAN feedthrough Trigger BNC connector Vacuum pump power supply Buf
331. w Gas Purifier Power Supply Thyratron 2 5 A ultra slow blow 2 5 A ultra slow blow Thyratron Supply Module 324 User Manual COMPexro Series A0510COMPPRO A0510COMPPRO Fuses 9 9 2 Fuses Outside Laser Device The fuses axccessible from the outside of the COMPexPro are beside the main switch located on the connection side F1 F3 F5 F2 F4 F6 Figure 112 Fuses at the rear outside of COMPexPro Fuse Value 110 V Value 230 V Protection F1 12 5 A slow blow 12 5 A slow blow secondary circuit isolating transformer F2 4 0 A slow blow 4 0 A slow blow secondary circuit 24 V AC transformer F3 1 0 A slow blow 0 5 A slow blow primary circuit 24 V AC transformer F4 1 0 A slow blow 0 5 A slow blow primary circuit 24 V AC transformer F5 25 A slow blow 16 A slow blow primary circuit main line F6 25 A slow blow 16 A slow blow primary circuit main line COHERENT LAMBDA PHYSIK 10 2005 325 TROUBLESHOOTING 326 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO 10 GLOSSARY This chapter explains laser vocabulary used throughout this manual Basic Module Central module of the COMPex Pro The Basic Module controls gas handling HV power supply and tube pressure It is controlled by the Communication Interface Beam Splitter Laser optics which divide a beam into two separate beams through reflection and transmittance In the COMPex ro a beam splitter deflects a part of t
332. witch in case of an emergency i e to prevent injury or serious material damage or if trouble occurs in the electrical system see Section 3 2 3 2 on page 58 Contact after use of the interlock switch or EMO switch appropriate maintenance personnel e g safety officer e Work on the electrical system or equipment may only be carried out by a skilled electrician himself or by specially instructed personnel under the control and supervision of such electrician and in accordance with the applicable electrical engineering rules e The mains supply line power cord shall only be installed or exchanged by a skilled electrician working according to appropriate electrical engineering rules and regulations e Fault finding and troubleshooting in high voltage circuits shall only be performed by trained personnel e Necessary work on live parts and elements must be carried out only in the presence of a second person who can cut off the power supply in case of danger by actuating the emergency shut off or key switch Secure the working area with a red and white safety chain anda warning sign Use insulated tools only e f provided for in the regulations the power supply to parts of the COMPex Pro laser device on which inspection maintenance and repair work is to be carried out must be cut off e Before starting any work check the de energized parts for the presence of power and ground or short circuit them in addition to insulating adjacent
333. with a completely sealed beam path for further information please refer to the laser unit supplier s documentation e Thermometer with scale from O C to 50 C 32 F to 122 F Preconditions e Beam path correctly shielded or secured to ensure that the laser beam will be safely guided to the intended target see Section 6 2 1 on page 149 e Laser device started up and ready to emit laser radiation see Section 6 2 3 e Handheld keypad connected to the communication interface socket on the laser device Preparation 1 When working with an open laser beam take off your watch ring or any other jewelry which could cause reflections that divert the laser beam from the intended path 2 Ensure that the operating parameters displayed in the top line of the handheld keypad display are correct for the laser operating sequence that is to be started COHERENT LAMBDA PHYSIK 10 2005 155 OPERATION 156 Starting the Laser WARNING Risk of injury through laser radiation When working on or with an open i e unprotected excimer laser beam always wear appropriate laser protective eyewear Do not wear reflective jewelry such as rings or watches Read the safety instructions in Section 3 before starting the laser 3 4 Open the beam shutter Press lt RUN STOP gt see Figure 68 A A RUN STOP Figure 68 RUN STOP key on the keypad After a short delay to initialize the power supply the laser radiatio
334. with a remaining pressure of more than 10 bar abs to ensure that there is an adequate gas supply to perform gas actions Depending on the configuration of the gas system pressures of below 20 bar abs may be critical e Gases as specified see Section 4 2 2 on page 76 Gas cylinders with a remaining pressure of at least 10 bar abs Preconditions e Laser device switched on and laser ready to operate laser radiation not being emitted e Inert gas supply open and pressure regulator set to at least 4 bar abs Emergency Fill Procedure 1 Press lt F6 gt The bottom line of the handheld keypad display shows the available options 2 Use the cursor keys to select MANUAL INERT Press lt ENTER gt to confirm the selection 4 Press lt EXE gt to start the manual fill with inert gas The laser head valve and the inert gas valvle open for 10 seconds and then automatically close The new pressure will be displayed If a higher pressure is necessary repeat step 4 o COHERENT LAMBDA PHYSIK 10 2005 171 OPERATION 172 User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO 7 1 MAINTENANCE This chapter describes the routine maintenance of the COMPexPro laser device Follow the recommended service intervals and procedures to ensure optimum performance The necessary maintenance procedures are outlined in a maintenance schedule in Section 7 2 page 174 before being described in detail in the subsequent
335. without partial gas replacements When the HV has reached a given level a message appears indicating that the gas in the laser tube requires replacing REPRATE HV EGY Keys The keys REPRATE HV and EGY allow you to change the repetition rate charging voltage and beam output energy value REPRATE enables the repetition rate to be changed for internally triggered laser operations The repetition rate determines the number of laser pulses per second i e the value is specified in Hz HV enables the charging voltage to be set for laser operation in the HV constant mode Pressing the HV key when an energy constant mode is currently active will display the HV value at which a partial gas replacement occurs EGY enables the beam output energy value to be set for operations in the energy constant mode The value is entered in mJ In each case press the appropriate key to select the parameter to be changed REPRATE HV or EGY enter the value through the numerical input keys and confirm the input by pressing ENTER COHERENT LAMBDA PHYSIK 10 2005 145 OPERATION 6 1 3 11 6 1 3 12 6 1 3 13 146 COUNTS Keys The COUNTS keys enable you to display and reset the laser device s pulse counters e SEL indicates the current reading of the Total Counter or the resettable User Counter The Total Counter counts the total number of laser pulses emitted by the laser since commissioning The User Counter counts the number of
336. y that no parts are lost or damaged 2 Remove the tape that seals the anti static inner cover onto the laser device 3 Lift the anti static inner cover off the laser device 4 Take the accessories out of the packaging and clean the accessories if required User Manual COMPexPro Series A0510COMPPRO A0510COMPPRO Installation 5 2 Installation This sec tion describes the installation of the laser device When all procedures in this section have been completed the laser device can be commissioned 5 2 1 Installation Procedure This section provides an overview of the procedure to install the laser device Further information is provided in the indicated sections of this chapter Step Action Further information 1 Set down laser device at the final installation location Section 5 2 2 page 112 Visually check for damage Section 5 2 3 page 113 Connect remote interlock circuit Section 5 2 5 page 114 Connect mains power supply Section 5 2 6 page 115 Connect exhaust Section 5 2 7 page 117 Connect gas lines Section 5 2 8 page 122 Connect water lines Section 5 2 9 page 122 Connect signal lines Section 5 2 10 page 128 O NI A O Check gas lines for leaks and passivate the lines Section 5 2 11 page 130 Check laser tube for leaks Section 5 2 12 page 134 11 Fill laser tube with laser gas perfo

USER MANUAL COMPexPro™ Series 10/2005

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USER MANUAL COMPexPro&trade; Series 10/2005

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USER MANUAL COMPexPro™ Series 10/2005