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1. 21 6 1 Guarantee of Sevenstar 6 2 Product Warranty SECTION3 FUNCTIONS LOS AN LE consente E 3 1 General 21 6 4 Disclaimer 3 2 Control Mode sse 21 APPENDIX D ne ee eee nee tA 22 APPENDIX Sevenstar Instruction of 1 1 Declaration The copy right of The user 5 manual of mass flow controller and mass flow meter 18 subjected to Beijing Sevenstar Electronics Co Ltd following abbr Sevenstar which is not allowed to duplicate store and distribute any part of this manual in mean of electric mechanical photocopy recording or other way without permission of Sevenstar This manual is not assured that there is no mistake and missing in which have been corrected strictly and the publisher is under no obligation to the mistake or missing meanwhile the publisher is not in charge of any loss that this manual leads to Beijing Sevenstar Electronics Ltd lof35 Sevenstar 1 2 Attention Dear customer thanks for using CS mass flow controller and mass flow meter This manual describes in detail important issues about correct and safe operations of the product User of the product should read and comprehend this manual an
2. Nn 1 r Then 0 3106 Ni N2 Nn 1 or C 1 1 1 0 p2Cp2 PnCPn ew or 1 n The flow of single gas OT The flow of mixture gas D1 Pn The density of single gas CP1 CPn Specific heat of the single gas Ni Nn Structure factors of gas molecule See Table 6 AttentionA 1 Standard Temperature 273 15K 0 Air Pressure 101325 Pa 760mm Hg 2 Please feel free to contact us if the request gas conversion factors could not be found in our appendix 350135 Sevens tar Beijing Sevenstar Qualiflow Electronic Equipment Manufacturing Co Ltd CS Series Mass Flow Controller Beijing Sevenstar Electronics Co Ltd Mass Flow Meter Subsidiary Co Ltd Address No 1 Jiuxiangiao East Rd Chaoyang District Beijing China P O BOX 3 741 Beijing China Post code 100015 Tel 86 10 64362939 86 10 64361831 ext 8491 or 8315 Fax 86 10 64362923 or 64362939 Homepage http mfc sevenstar com cn E Mail mfcsales sevenstar com cn Shanghai Office Room 1916 Unicom International Tower NO 547 Tianmu West Road Zhabei District Shanghai 200070 China Tel 86 21 33030324 Fax 86 21 63533265 Shenzhen Office Room 712 Section B Qiche Tower No 45 Zhenhua Road Futian District Shenzhen China Zip code 518031 Tel 86 755 88290258 Fax 86 755 88294770 Description may be changed following improvements
3. Please use proper fittings and keep the rules All fittings of instrument must be matched according to the listing in manual Please read manual carefully before screwing tightly h Please do leakage check Please check carefully all of vacuum parts and make sure that there 15 not leakage in the system i Please make sure that instrument is working under safe pressure Please make sure that the pressure of inlet gas is less than maximum working pressure referring to maximum working pressure in manual j Please keep the whole system away from pollution When system running do not use polluting gas such as particle of dust dirt fibre glass or scrap iron k Please do warm up instrument before working Please do warm up instrument especially in using dangerous gas Please close valve completely to make sure that there is not error flow 1 4 General Mass flow controller MFC accurately measures and controls mass flow rates which is widely applied in the fields as semiconductor and IC fabrication special materials science chemical industry petrolic industry pharmaceutical industry environmental protecting and vacuum system researching etc The typical applications include microelectronic process equipment such as diffusion oxidation epitaxy CVD plasma etching sputtering ion implantation vacuum deposition equipment optical fiber melting micro reaction equipment mixing amp matching gas system capillary flow control
4. m L I CJ Line 18 47 TI TI Line 17 46 aA T I LI 1 LI LI LI Li Me bn HA b r3 QU Li LE LE LE Gi li ds 95 dora m a Gi 1 m 1 1 ul fl 1 Line 20 49 T gt To Switch Line 47 157 Power of lt 15y User EGXD Power Source To Switch Power of User E3232 R3435 Converter Line 34 CS Product CS Product ot DE 9 Pins CS Product of DB 15 Fins Line 53 Line 53 Line 53 Figure 2 19 Illustration of Connecting CS Product Sevenstar manufactures all standard cables RS485 adaptor customized cables and some accessories For more details contact Sevenstar or its local agent 200f35 Sevenstar 2 5 Checking Before Operation Before operating the the following checks should be completed 2 5 1 Check that tubing 1s leak free 2 5 2 Check the process sequence and proper function of all other gas components involved 2 5 3 Check the voltage of command signals and power supply to the MFC MFM 2 5 4 Check that the appropriate type of gas is being supplied at the rated pressure 2 5 5 Allow the MFC to warm up for 20 minutes and then check the zero level output 2 5 6 Use dry inert gas for test runs 2 5 7 Prior to using the MFC for extremely corrosive gases purge MFC with a dry inert gas for one hour SECTION3 FUNCTIONS 3 1 General Based on n
5. A C D can communicate with via RS485 DeviceNet ProfiBus 2 4 2 Connections The 9 pin male Sub D connector 15 pin male sub D connector RS485 connector DeviceNet connector Analog Signal Interface RS232 RS485 connector ProfiBus connector of 9 pin female sub D ProfiBus connector of 15 pin male sub D are shown in figure2 8 figure2 9 figure 2 10 figure 2 11 figure 2 12 figure2 13 figure2 14 and figure2 15 AttentionA Although sharing with the same appearance of CS200 A C D MFC the 0 5V Setpoint Input the 4 20mA 0 20 Setpoint Input and the valve Over ride not available That means 1 and pin6 of D sub 9 and pint pin7 pin8 and pin12 of D sub 15 are not available 5V 20mA Setpoint Ret P 5 GND O Flow Signal Output Valve Over ride 0 Setpoint Input 0 Flow Signal Output SP Flow Out Ret 15 G24V option SP Flow Out Ret Figure 2 8 9 pin male D sub connector Flow Out Ret 4 20mA 0 20 Flow Signal Output Valve Over ride 15V 24Y option 15V with 15V only 4 20mA or 0 20mA Setpoint Input O 5 Setpoint Input Figure 2 9 15 pin male D sub connector 160135 1 Signal Common 9 E 4 Figure 2 10 5485 connector 1 0 5V Flow Signal Output 2 5V Flow Out Ret 3 EGND Figure 2 12 Analog Signal Interface DGND Rx
6. and Alarms Sensor Zero Output Out of Bounds EEPROM Failure Valve Coil Failure or Valve Disconnected Temperature Out of Operating Range After power up the LED on the top of the CS200 A C D MFC MFM is turned GREEN A warning condition will be announced by a blinking RED and whenever an alarm condition is detected it will be set continuously to RED Please refer to Digital MFC Communication User Manual for more details 3 11 LED There is a green red LED located on the top of the MFC The constant green LED indicates the power on Green blinking indicates that the 15 zeroing A blinking red LED indicates warning condition Constant red indicates error condition In DeviceNet connection there will be 2 LED on the top of CS200 A C D refer to CS200MFC CS220 _DnetSpecification_V1 01 for more details In ProfiBus connection there will be 1 LED on the top of CS200 A C D the constant green LED indicates that the communication is normal No light indicates warning condition Attention When the valve of MFC is fully opened it can be functioned as a MFM In that case the maximum flow testing voltage could reach beyond 10V please be careful while flow is beyond F S 5V Full Scale the real flow will have no linearity corresponding with flow testing voltage While it s purging flow display will be inaccurate even showing reduce while the real flow is enhanced please be sure it ll be no damaged to device itself SECTION4
7. to product The information contained in this document is subject to change without notice If there is any mistake in this uses manual please feel free to contact us O2010 Beijing Sevenstar Electronics Co Ltd All rights reserved
8. 0 0673 ___ 09 069 18470 058 1 09 055 240 032 CH n 210 5 200 _ 029 39 ox sme om _ o TE ois 0 2608 2 3220 0 451 330135 GAS CODE SPECIFIC HEAT DENSITY CONVERSION SEMIE52 0302 Cal g g 1 0 C FACTOR ee 0 1405 3 4180 0 570 ____ ____07 ____ 3 4224 0 0899 1 010 __________00 ____ 0 0861 3 6100 0 999 i 039 i SibCb 067 0 472 400 046 ___ SiHCb 717 0332 640 050 __________ 2 2880 067 Wh ______ 11 006 13290 027 006 0 0379 5 8580 _____ 1431 ___ 340135 Sevenstar Conversion Factors Instruction and are standard calibrated by N2 while it s out of factory Other gas calibrations can be approximated by converting of conversion factors of our instruction While using other gas operating One single gas The conversion factors could find out in the users specification instruction A mixture of two or more gases Assume there is n sorts of gases could calculate the conversion factors C by the following formula Basic Formula C 0 3106 N 2 Cp Density of the gas Cp Specific heat of the gas N Structure factors of gas molecule See the following table Table Gas Molecule Composing factors COMPOSITION EXAMPLE N VALUE CO NH For mixture gases Ni 1 r N2 2 or
9. 0slm 0 05 0 35 MPa lt 10slm 0 05 0 35 MPa lt 10slm Differential Pressure 0 1 0 35 10sim lt Flow lt 30sim lt 0 02MPa lt 0 02MPa lt 0 02MPa 0 1 0 35 MPa gt 10slm 0 1 0 35 MPa 2 10slm 0 2 0 45 Flow gt 30slm Zero lt 0 05 5 Span lt 0 1 F S C Flows30slm Zero x 0 0296 5 Span x 0 0596 F S C Full scale range Temperature Coefficient Span 0 2 F S C Flow 30slm MPa 35 Zero Drift lt 0 6 F S per year without autozero Metal Stainless Steel V V 5 Metal Cr Fe ratio gt 2 0 CrO thickness gt 20 Angstroms 25Ra Operation Temperature 5 45 O 50 Digital RS485 ProfiBus Digital RS485 or ProfiBus Digital RS485 or DeviceNet DeviceNet DeviceNet Input Signal N A N A N A Analog 0 5 VDC 4 20 mA Analog 0 5 VDC or 4 20 mA Analog 0 5 VDC 4 0 20 0 20 20 mA 0 20 Output Signal Digital RS485 or DeviceNet or ProfiBus Analog 0 5 VDC or 4 20 mA or 0 20 mA Power Supply 8 16 VDC or 14 28 VDC 400mA 9 pin male sub D 15 pin male sub D DeviceNet ProfiBus Analog VCR1 4 M 1 4 VCR1 4 M Compression Fitting 10 Compression FittingD6 Compression Fitting 6 ae Compression Fitting 3 8 Compression Fitting1 4 Compression Fitting 3 Compression Fitting 1 8 Compression Fitting3 Compression Fitting 1
10. 2 Product Warranty 6 2 1 Sevenstar products are guaranteed against defects in materials and workmanship if used in accordance with specifications and not subject to physical damage contamination alteration or retrofit Warranty periods One year 6 2 2 Buyers undertake to check and inspect the goods and to notify Sevenstar of shipment incidents by fax phone or e mail as soon as possible after receipting the goods 6 2 3 During the warranty period products must only be repaired by authorized Sevenstar service centers Otherwise the Sevenstar product warranty will be invalidated 6 2 4 Repairs will be performed free of charge during the one year warranty period If MFC are out of warranty Sevenstar will notify the owner of replacement or repair costs before proceeding Factory service and repairs are guaranteed 90 days The warranty excludes consumable materials and wear parts in teflon viton etc 6 2 5 will be accepted for repair or warranty without a decontamination and purge certificate 6 2 6 Each MFC is individually checked visual inspection of fittings helium leak test and 270135 Sevenstar flow calibration Sevenstar shall not be responsible for any damage caused by gas leakage or the use of a dangerous gas Users are responsible for following the safety rules applicable to each gas they use Improper use of a Sevenstar MFC will void the warranty and MFC that have been damaged as a result of improper use will not
11. 4 6 inner x 1hose cb5 inner x 1 5hose cb4 inner x 1hose W seal A sael C seal T E 50135 Sevenstar NotesA MFC MFM is calibrated by as a standard gas Units SCCM Standard Cubic Centimeter Min SLM Standard Liter Min Standard Situation Tem 273 15K 0 C Air Pressure 101325 Pa 760mm Hg F S Full Scale 1 6 Calibration Features Normally the MFC are calibrated close to customer s requirement the requirement should be accorded with the specification Without customer s information the MFC are calibrated under standard conditions 1 6 1 Standard conditions Without special conditions specified by the customer the is calibrated under the following standard conditions Pressure Outlet Atmospheric Normally gas mass flow rate is transferred to gas volume flow rate at standard state Mass flow rate unit standard cubic centimeter per minute SLM standard liter per minute Standard state Temperature 0 C 273 15K Pressure 101325Pa 760mmHg At standard state the gas density will be constant The multiplication of density and volume flow rate 18 equal to the mass flow rate Therefore at the standard state the volume flow rate can represent mass flow rate The standard mounting position is horizontal And other positions such as vertical inlet up or down flatwise or customized position are optional The mounting 60135 Sevenstar p
12. 5 0024 2SLM 030C 305 0031 3SLM 0500 505 0051 5SLM 100C 1005 O10L 10SLM 200C 2005 0204 20SLM 300C 300SCCM 0304 30SLM 5000 500SCCM 0O50L 50SLM available to type 000C customized Full scale please consult d for details a Electronic connector DB 9 X DeviceNet H ProfiBus fl Fittings AA Compression Fitting 3mm GG Compression Fitting 66mm CC Compression Fitting 1 4 MM VCR 1 4 f D DB15 pin DeviceNet Analog SC IGS C seal available to type C D only SW IGS W seal available to type C D only UU VCO 1 4 available to type A only RR 6 inner x1hose available to type A only VV ob inner x1 5hose available to type A only TT o4 inner x1hose available to type A only SA A seal available to type A only 0 customized fittings please consult d for details Seal Materials V Viton available to type A only M Metal available to type C D only If s Se BB Compression Fitting 1 8 available to type A only JJ Compression Fitting 10mm available to type A only 300135 Sevenstar m Mounting Position H Horizontal E HESD Horizontal Edge Side Down U Vertical Inlet Up D Vertical Inlet Down id Description Default Value The letters on cover and tag In English Diff
13. Compression Fitting 3 Compression Fitting1 4 Compression Fitting 10 o4 inner x 1hose Compression Fitting1 8 Compression Fitting3 8 O5tinneryethose 5 1 5 Table 2 1 The length of the product with different fittings 1 5 W seal 1 5 C seal A seal 130f35 Sevenstar Attention The height which is showing in figure 2 2 and figure 2 4 of 132mm are height without electric connectors of cable It should be added around 50mm more after adding the electric connector 2 3 2 Installation Place MEC according to the flow direction 2 3 2 1 1 4VCR Connection Refer to figure 2 5 and figure 2 6 Check the gland to gland space including the gaskets Remove the plastic gland protector caps When using loose VCR original style gaskets inserting the gasket into the female nut For VCR retainer gaskets snap the gasket onto the male coupling Tighten the nuts finger tight Scribe both nut and body in order to mark the position of the nut While holding the body with a wrench tighten the nut 1 8 turn past finger tight for 316L stainless steel and nickel gaskets Figure 2 6 VCR retainer gasket 2 3 2 2 Two ferrule Compression Fitting Connection Refer to figure 2 7 Check the gland to gland space Remove the gland protector caps 140f35 Sevenstar Insert the tubing to the shoulder inside the fitting and check that the ferrules are positioned as shown in figure2 7 Tighten the nuts finger tight U
14. D TxD N RxD TxD P Figure 2 14 ProfiBus connector of 9 pin female sub D Figure 2 11 DeviceNet connector Figure 2 13 RS232 RS485 connector SV Setpoint Ret P S GND 1 O SV Flow Signal Output SV Flow Out Ret 2 RS485 GND N C RS485 B Valve Over ride 4 15V 24V option P S GND 5 1 5V with 15V only N C 6 RS485 A EGND 7 O 5 V Setpoint Input Figure 2 15 ProfiBus connector of 15 pin male sub D connector 170135 Sevenstar 2 4 3 Table of Selecting Type of Cable and its Illustration of Connection DB15 Pin DB9 pin 08 2B 3B 4B 2E 3E 4E 19 19 QCX 48 QCX 20 QCX P20 49 08 1 2 4 2F 3F 4F Input Input oo D08 1F IFM IFS 8C 8CM IG IGM 15V 24V PC Computer QCX 17 QCX P17 QCX 46 QCX 4 43 QCX M QCX 50 QCX 18 QCX P18 QCX 47 QCX 42 34 50 Table 2 2 Table of Selecting Type of Cable 25232 25485 pc Serial Port Converter CS Serial of DB 15 Fins Figure 2 16 CS Product and Illustration of Connecting Power D08 1D 1F 180135 Sevenstar Power 15Y CS Froduct of 0819 Pins Figure 2 17 CS Product and Illustration of Connecting Power Power 041 Air Supply Computer gt CS Product of 15 Fins Figure 2 18 CS Product and Illustration of Connecting Power 190135 Power Source Power Source
15. MAINTENANCE 4 1 General 240135 Sevenstar No routine maintenance 15 required to be performed on the or Other than occasional cleaning and re calibration It can be used about 3 or 4 years with an ultra clean and non corrosive gas It can be used about 1 or 2 years with low purity gas or a corrosive gas For any other problems contact Sevenstar 4 2 CautionA 4 2 1 Medium Forbidden The used gas should be purified without dust liquid and oil stain If necessary the filter should be added to gas system for purification If the outlet of MFC is connected to liquid sources a One way valve should be added to avoid the liquid back to destroy MFC AttentionA For the cases that the MFC MFM used with toxic pyrophoric flammable or corrosive gas you should ensure that the fixing and fitting are airtight It becomes necessary to remove the controller from the system purge the controller thoroughly with a dry inert gas such as nitrogen before disconnecting the gas connections Failure to purge the controller could cause a fire or explosion resulting in death 4 2 2 Seal of Valves The Solenoid Valve of MFC is only for adjustment can not be used for shut off Generally shut off valves should be added in upstream and downstream of MFC for protection Normally leakage of MFC valve is not more than 1 ES SECTION 5 TROUBLESHOOTING 5 1 Initial Check 5 1 1 Check the gas supply pressure and check the flow path to the MFC
16. MFM has been opened 250135 Sevenstar 5 1 2 Ensure that the power supply and command signals are correctly transmitted to the D connector pins and RS485 5 1 3 Check that the output signal matches the external reading 5 2 Troubleshooting Use the following table to locate the fault SYMPTOMS Output reading Gees Check closure of series shutoff valve ith flow 15 Zero drift Zero not Zero other Contact software MEC will not control will not communicate with PC Check baud rate of MFC PCB problems Mark indicates that reparation and adjustment must be dealt under specialist advices For any other problems contact Sevenstar 260f35 Sevenstar SECTION 6 WARRANTY AND SERVICES 6 1 Guarantee of Sevenstar Sevenstar and its authorized distributors assure that there are not flaw of the material and quality of product within 12 months since the date of the product purchased by you The compensation for customer is only limited to invalid part for substitution installation and processing flaw It is guaranteed that all part chose by customers are suitable to relative manufacturer Other relative statements guarantee and obligation of status and usage of product whether direct or indirect are definite to be excluded In any circumstance Sevenstar and its authorized distributors are not charged of any obligation of direct or indirect loss for customers or others 6
17. Sevenstar REV 2 3 CS200 A C D MFC MFM User s Manual Contents SECTION 1 INTRODUCTION 1 1 Declaration 1 SOfb START end 1221 C1 eerte da restes 2 A 1 3 The notice of safety 2 3 6 Valve Command Mode psec 3 3 7 Valve De ne 1 5 Specification 3 3 8 Multi Gas and Multi Flow 1 6 Calibration features 6 3 9 Total Flow Accumulator SECTION2 INSTALLATION AE 2 1 General 7 2 2 Unpaec HE 7 SECTION 4 MAINTENANCE 2 3 Mechanical Installation 7 EE 8 n tatus 2 3 2 14 SECTION 5 TROUBLESHOOTING 2 32 1 1 4VCR Installation esses 14 5 1 Initial 2 3 2 2 Compression Fitting Installation 14 5 2 Troubleshooting 2 4 Electrical Installation 15 SECTION 6 WARRANTY AND SERVICES 2 5 Checking Before Operation
18. ate Please refer to Digital MFC Communication User Manual for more details 3 5 Delay Delay is used to postpone the start of flow from zero flow to the received set point It is programmed in millisecond but the MFC internally rounds up any value to 100ms For example when the delay value is 200 MFC will delay 200ms then receiving the operate command When the set point is less than the min control rate the valve will shut off and when larger than the min control rate MFC will start after the set delay time Special default Values from to 49 ms will be programmed as 100ms Delay applies to digital and analog set points 3 6 Valve Command Mode CS200 A C D MFC MFM are available for valve close or valve open by input digital signal or analog voltage directly The Valve Command Mode is used to select one of three ways to interpret the analog signal of Valve Command Please refer to Digital MFC Communication User Manual for more details 3 7 Valve Type CS200 A C D MFC MFM have two types of valve Normally open NO or Normally closed NC When MFC do not have power supply the NO type valve is open and gas 220f35 Sevenstar can flow through the MFC the NC type valve is closed and gas can not flow through Please mention the valve type when you order the MFC 3 8 Multi Gas and Multi Flow The multi gas and multi range technology has been developed in the CS200 A C D series Customer can change gas con
19. be replaced by Sevenstar 6 2 7 Specific warranty requirements are as follows A Gas must be clean and particle free which means a filter must be fitted in the gas line upstream of the MFC B Gas must comply with the following pressure specifications 1 Gas pressure must never exceed 3MPa 2 Differential pressure must be more than 0 05MPa for full scale flow through the valve unless another value is specified the user s manual 3 Differential pressure must be less than 0 35MPa for the MFC valve to regulate without gas flow oscillation unless another value 15 specified the user s manual 4 Pressure at the mass flow inlet must be regulated by an accurate pressure regulator to prevent gas flow oscillation C Electrical connection requirements are as follows The system must be wired carefully non observance of the pin out may irreversibly damage the electronic board inside the MFC in which case the warranty will be invalidated D Gas connections The fittings must be handled carefully Sevenstar guarantees that all fittings have been individually inspected and are scratch free E Fitting procedure The fitting procedure set out in the manual must be followed meticulously Specifically the purge procedure is very important if corrosive gases or toxic gases are used 280f35 Sevenstar F The mass flow must not be dismounted The MFC warranty will be invalidated if the seal between the block and co
20. d pay attention to the text with labels and notices Sevenstar assumes no liability for the customer s failure to comply with this manual This manual is necessary for your installation and maintenance please keep it carefully 1 3 The notice of safety Please pay attention to the below notices when reading this manual We are not responsible for any result without abiding by the below notices a Do not replace any components or disassemble instrument Do not replace any components or disassemble the instrument without any authorized and make sure that the label or and seal of product 1 not removed when returning for reworking recalibration and maintenance b Please contact professional for technical service Do not replace any components Any technical support 15 provided by professional who must be authorized by Sevenstar c Please pay more attention to use dangerous gas Instrument should be purged completely and keep safety if dangerous gas is used Meanwhile make sure that moist gas must not react with material of seal and instrument d Please pay attention to purging instrument The whole system should be purged by dry gas after and before the instrument is installed e Please abide by proper steps of purging Product should be purged and handled with gloves f Do not use the instrument in explosive environment Do not use the instrument in explosive environment unless the safety certificate 15 available 20135
21. erential Pressure 0 05 0 35 MPa 7 3 50 8 psid _ FLOW 10SLM 0 1 0 35 MPa 14 5 50 8 psid 10S8LM FLOW x 30SLM 0 2 0 45 MPa 29 0 65 3 psid SOSLM lt FLOW CS200 A CS200 C CS200 D XXXN lt 0 02 2 9psid Max inlet pressure 3 MPa 435 1 psig Calibration temperature 22 2 Valve command mode 2 Power Supply 24V Command type DeviceNet default digital mode Profibus default mode for Profibus other analog voltage 5 Customized Requirement For Example I O sign 4 20mA The proportion of mixture gases should be indicated N2 60 CO2 40 Customer Differential Pressure 0 05 0 3 MPa Customer Calibration Temperature 40 C The letters on cover and tag in Chinese Valve command mode 0 Power Supply 15V Command type Profibus default mode for analog voltage and other customized requirements 310135 Sevenstar 2000 D GG V H Take CS200 A013C500CDGGVHS as the example CS200 A Model CS200 4 Type Elastomer type Gas Noe In Type of Valve Normally closed Full range Electronic connector DB15 Fittings Compression Fittingp6mm Seal material Viton Mounting position For example Customized requirement In Chinese Differential pressure 0 3 0 5 MPa customized fittings customized calibration temperature 40 C 320f35 Sevenstar APPENDIX II CON VERSION FACTOR c omm RTE 0302 Cal g g 10C FACTOR a As 0355 018 3478
22. ew sensor driver technology zero balance technology and VCP technology CS200 A C D presents high performance and reliability And more digital functions are developed in CS200 A C D products 3 2 Control Mode CS200 A C D are available for digital 0 5V voltage and 4 20mA or 0 20mA current control mode and output When customer chooses of the three control modes the others will be screened The analog output will be available at all times The flow output of the CS200 A C D MFC MFM will be available through the RS485 interface even in the analog control mode The setting of the CS200 A C D can be provided to the MFC through one of three sources in digital or analog mode Please refer to Digital MFC Communication User Manual for more details 210135 Sevenstar 3 3 Zero The Zero function can be commanded through the digital interface or zero button Before zero please make sure that no gas flow through Then zero by the digital interface or zero button The zero button must be pressed continuously for 0 5 seconds in order to start zero process The green LED will blink during the zero process After zero finished the green LED will be on constantly CS Product of the ProfiBus has the Zero function but does not have the LED 3 4 Soft Start The CS200 A C D support soft start function Soft start allows customer change the setting of MFC with definite r
23. osition should be specified by the customer to ensure the best accuracy 1 6 2 Manufacturing Environment The MFC are assembled in a class 100 clean room calibrated packaged and controlled in class 1000 environment The temperature is 22 2 1 6 3 Precision Adjustment Each MFC is accurately controlled for 24 hours after manufacturing on a different calibration bench The accuracy the dynamic response the stability to pressure variations is double checked only qualified product available for sale SECTION2 INSTALLATION 2 1 General WARNING Toxic corrosive or explosive gases must be handled with extreme care After installing the the system should be thoroughly checked to ensure it 1s leak free Purge the MFC with a dry inert gas for one hour before using corrosive gases IMPORTANT When installing the MFC ensure that the arrow on the back of the unit in the same direction as the gas flow 2 2 Unpacking The CS200 A C D are assembled calibrated and clean packaged under clean room conditions These series products are packaged with two separately sealed plastic bags The outside is common plastic bag the inside 1s clean bag The outside bag should be removed in the entrance to the clean room In order to minimize the contamination the second clean bag should be removed in the clean room when MFC installed in the system 2 3 Mechanical Installation 70135 Sevenstar 2 3 1 General Most application
24. s will require a positive shutoff valve in line with the Pressurized gas trapped between the two devices can cause purge effects and consideration must be given to the sitting of the shutoff valve upstream or downstream in relation to the process sequencing It is recommended that you install an in line filter upstream to the controller in order to prevent MFC from contamination CS200 A C D should be mounted in the position accord with the requirement in the purchase order The gas should be clean and dry The mounting should be free from shock or vibration The pictures of the product are shown figure2 1 the dimensions of the product are shown in figure2 2 figure2 3 figure2 4 Different fittings Compression Fitting p6 Compression Fitting 3 Compression Fitting1 4 Compression Fitting 1 8 VCR1 4 M Compression Fitting3 8 1 5 W seal 1 5 C seal are optional for customer The length of the product L are shown in Table 2 1 Do not remove the protective end caps of the fittings until installation Figure 2 1 CS200 A C D 80135 12 0 Figure 2 2 Product dimensions 90135 132 Figure 2 Product with A seal dimensions 100135 6 60 22 4 55 30 Figure 2 3b Product with C seal dimensions 110135 6 60 92 Figure 2 3c Product with W seal dimensions 120f35 2 4 Dept 4 PE 5200 Sevenstar VCRI A M VCOI 4 M Compression Fitting 6
25. se two spanners one spanner locking the fitting stable wrench another one to tighten in 1 25 turns to prove it s not blow by after installing the front ferrule back ferrule and nut Gland Nut Back ferrule Front ferrule Fitting Figure 2 7 Compression Fitting Connector Installation AttentionA When installing the fitting you should manually use spanner to wrench it tighten by 1 2 turn pulling up imported Compression Fitting should use spanner to be tighten in 1 25 turns to prove its not blow by after your installing the front ferrule back ferrule and nut Please note you should use two spanners to operating one spanner for locking the fitting stable and another one for revolving the nut Especially when you dismantle the tube you should operate by the two spanners otherwise fitting will become flexible which will affect its airoroof function 2 4 Electrical Installation 2 4 1 General With simple switching power supply CS200 A C D are available for 8 to 16 VDC dual ending and 14 to 28 VDC single ending Customer can choose as need Customer can choose 9 pin male Sub D or 15 pin male sub D connector 9 pin male 150135 Sevenstar Sub D connector is the SEMI Standard compatible only 0 5 analog signal control and output available 15 pin male sub D connector both 4 20mA or 0 20mA and 0 5 analog signal control and output available CS200
26. system eas chromatograph and other analytical instruments The CS200 A C D MFC MFM are a latest generation for use in semiconductor 3of35 Sevenstar applications and demanding industrial uses where its high accuracy and flexibility in interfacing are required The CS200 A C D MFC MFM incorporate a dual interface voltage and current as well as RS 485 DeviceNet and ProfiBus digital interfaces It is possible to operate the instrument completely digitally or it can be operated in analog mode with digital monitoring CS200 A C D series have wide range of power supply available for 8 16 VDC or 14 28 VDC In addition auto alarm change of operating gas and range available through the digital interface Customer Secondary Development of control and sample software 15 available through the open protocol CS200 A C D MFC default setting MAC address 32 RS485 baud rate 19200 Control mold 0 5 analog signal control 40135 Sevenstar 1 5 Specification cs200 CS200A 5200 CS200D 0 5 10 20 30 50 100 200 300 500 SCCM 0 2 3 5 10 20 30 50 100 200 300 500 SCCM 0 1 2 3 5 10 20 30 50 SLM 0 1 2 3 5 10 20 30 SLM 1 0 S P 235 F S 0 35 F S lt 35 F S 10 5 FS 10 2 F S 08 sec SEMI E17 0600 Normally Closed or Normally Open Normally Closed or Normally Normally Closed or Normally Valve Rest Position No Valve No Valve No Valve CF S lt 30slm Open Open 0 05 0 35MPa Flow lt 1
27. ver 1 torn 6 3 Services Sevenstar can provide services like start up service software development gas system design training etc Please visit mfc sevenstar com cn for more information and find your nearest service and calibration centre 6 4 Disclaimer Beijing Sevenstar Electronics Co Ltd is not responsible to loss as following situation Nature disaster and calamity Unsuitable operation and unreasonable usage Operating and storing in inappropriate or execrable circumstance Usage of instrument beyond user s manual Unauthorized change or replacement of product For example It is whether that gas path is not cleared before using corrodible gas or MFC is contaminated or blocked by particle such as dust CS TE 290135 Sevenstar Appendix CS200 Selection Guide CS200 t 0 0 0 Iv a Elastomer type M C Metal type stainless steel VV 10Ra D Metal type 9 9 9 Gas Standard SEMI52 0302 Note 029 NHs available to type C D only For example 013 Ne 007 2 000 Mixture Gases please consult d for details M _ of Valve 4 O Normally open unavailable to MFM C Normally closed unavailable to MFM Valve available to MFM only r r r r Full Scale 002C 2SCOM available to type C D only 003C 3SCOM available to type C D only 005C 5SCCM 010C 10SCCM 001 1SLM 0200 20
28. vert factor full scale of MFC via digital interface Full scale of CS200 A C D series MFC MFM can be re ranged from 30 to 110 5 For example an with 1008CCM full scale the new full scale can be re ranged between from 30SCCM to 110SCCM CS200 A C D MFC MFM support customer offset by the target null value The target null value is a customer programmed constant used to offset the flow output independently of all other sensor offset constants including the zero process For example set Target Null Value 20 5 then when no flow through the reading is 20 ES with gas flow 20 ES through MFC MFM the reading is O FS Offset range is from 100 5 0100 5 Please refer to Digital Communication User Manual for more details 3 9 Total Flow Accumulator The Total Flow accumulator will record the amount of gas in SCC that has been delivered by CS200 A C D The amount of purge will not be accumulated in the total flow amount For example the total reading is 3000 means the amount of gas delivered by MFC is 3000SCC Please refer to Digital MFC Communication User Manual for more details 3 10 Alarm CS200 A C D will monitor and store certain abnormal conditions as described below These conditions can be read and reset from the RS485 interface Provisions will be made for masking disabling the alarms or warnings on an individual basis 230f35 Sevenstar Warning

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