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Digital Mass Flow Controller User's Manual

1. Terms and Conditions We would like to express our appreciation for your purchase and use of Yamatake products You are required to acknowledge and agree upon the following terms and conditions for your purchase of Yamatake products field instruments control valves and control products unless otherwise stated in any separate document including without limitation estimation sheets written agreements catalogs specifications and instruction manuals 1 Warranty period and warranty scope 1 1 Warranty period Yamatake products shall be warranted for one 1 year from the date of your purchase of the said products or the delivery of the said products to a place designated by you 1 2 Warranty scope In the event that Yamatake product has any failure attributable to Yamatake during the aforementioned warranty period Yamatake shall without charge deliver a replacement for the said product to the place where you purchased or repair the said product and deliver it to the aforementioned place Notwithstanding the foregoing any failure falling under one of the following shall not be covered under this warranty 1 Failure caused by your improper use of Yamatake product noncompliance with conditions environment of use precautions etc set forth in catalogs specifications instruction manuals etc 2 Failure caused for other reasons than Yamatake product 3 Failure caused by any modification or repair made by any person other than Yam
2. e Even after flow rate range is changed the accuracy specifications are the same as for the standard range The full scale designated by FS shows the numeric value of the standard range e Even though the flow rate range is changed the minimum control flow rate is the same as for the standard range 5 17 Chapter 6 E Alarm code display MAINTENANCE AND TROUBLESHOOTING When a flow rate deviation alarm occurs or when an alarm occurs during self diagnostics the device forcibly switches to the operating mode currently selected for Operation selection at alarm occurrence amp in the function setup Additionally the alarm code and normal display are alternately shown at the upper 4 digit portion of the 7 segment display Flow rate deviation lower limit alarm Insufficient alarm judgment delay power voltage inlet pressure excessive inlet pressure operating tempera ture etc Flow rate deviation upper limit alarm Insufficient alarm judgment delay valve trouble sensor trouble etc Valve amperage lower limit alarm Insufficient alarm judgment delay alarm setting current value too high excessive inlet pressure etc Valve amperage upper limit alarm Insufficient alarm judgment delay alarm setting current value too low insufficient power voltage insufficient inlet pressure etc limit operation side for 5 minutes or longer in the control or fully open mode Sensor err
3. The device is a precision instrument Do not drop it or subject it to impact or it might be damaged When installing joints UNF connections secure the lower part of the body in a vise or the like gripped between rags to protect the finished surfaces and turn the joint to tighten The device may be damaged if the lower body is not secured Mount securely in order to prevent vibration Otherwise equipment failure could result iii A CAUTION Mount the device horizontally Do not mount it with the display facing down Doing so might cause measurement error or equipment failure Use the largest pipe possible to reduce pressure loss in the pipes for the MQV0050 J K 0200 J K 0500 J K If there is a large pressure loss in the pipes the pressure of the gas supply to this device operating differential pressure will be affected and will fluctuate greatly with the flow rate This could result in unstable control When making the pipe connections hold the hexagonal part of the connector section and turn the pipe to tighten After connecting check that there are no gas leaks If using Rc connections take care not to coat with too much sealant Foreign matter or burrs in the pipes may also cause measurement errors Do not apply a negative voltage or a voltage exceeding 5V to the external setup voltage input terminal Doing so might cause malfunction or equipment failure When using a relay
4. The factory setting is the control mode The operating mode can be forcibly changed to fully closed mode valve is fully closed or fully open mode valve is fully open As shown in the diagram below the mode is changed alternately between the con trol mode and fully closed mode every time the RUN key is pressed Additionally to change the mode from the control mode to the fully open mode Control mode RUN key Fully closed mode RUN key 2s or more RUN key RUN key 2s or more Fully open mode keep the RUN key pressed for 2 seconds or longer E Operating mode display The operating mode is shown on the 7 segment display during instantaneous flow 7 segment display _OK lamp Fully closed mode Out oFF is always displayed after checking that the flow rate is zero 0 Blinking FULL is displayed for approximately 1 second when the mode transits to the fully open mode Fully open mode Control mode Out or lit a7 is displayed for approximately 1 second when the mode changes to the control mode rate display Additionally the OK lamp blinks in the fully open mode Note Advanced use Selecting the operating mode through external input e When operating mode change 5 6 or 8 is selected for external contact input function assignment 4 to 2 in the function setup the operating mode can be changed through external contact input e When operating mode change 1 or 5 is selected for e
5. Model No MQV9200 MQV9500 MQV0002 Control Setup display Control Setup display Control Setup display flow rate range resolution flow rate range resolution flow rate range resolution mL min standard mL min standard L min standard L min standard L min standard L min standard Air nitrogen 2 to 200 0 004 to 0 500 0 002 0 02 to 2 00 0 01 Oxygen 2 to 200 0 004 to 0 500 0 002 0 02 to 2 00 0 01 Argon 2 to 200 0 004 to 0 500 0 002 0 02 to 2 00 0 01 Natural gas 13A 2 to 200 0 004 to 0 500 0 002 0 02 to 1 60 0 01 LNG 1 Natural gas 13A 2 to 200 0 004 to 0 500 0 002 0 02 to 2 00 0 01 LNG 2 sl 100 methane 2 to 200 1 0 004 to 0 500 0 002 0 02 to 2 00 0 01 100 propane 0 6 to 60 0 oz Toon to 0 160 0 001 0 006 to 0 600 0 002 100 butane 0 4 to 50 0 0 2 1 0 to 120 0 0 5 0 004 to 0 400 0 002 2 Model No MQV0005 MQV0020 MQV0050 B C Control Setup display Control Setup display Control Setup display flow rate range resolution flow rate range resolution flow rate range resolution L min standard L min standard L min standard L min standard L min standard L min standard Air nitrogen 0 04 to 5 00 0 2 to 20 0 0 4 to 50 0 Oxygen 0 04 to 5 00 02 to 200 04 to 50 0 Argon 0 04 to 5 00 02 to 20 0 0 4 to 50 0 Carbon dioxide 1 0 to 120 0 0 5 Tonn to 0 300 0 001 0 010 to 1 200 0 005 P 1 1 0 5 1 1 1 0 2 Mi Carbon dioxide 0 03 to 3 00 0 10 to 12 00 0 3 to 30 0 Natural gas 13A 0 04 to 5 00 0 02 0 2 to
6. Safety precautions are intended to ensure the safe and correct use of this prod uct to prevent injury to the operator and others and to prevent damage to proper ty Be sure to observe these safety precautions Warnings are indicated when mishandling this A WAR N I N G product might result in death or serious injury Cautions are indicated when mishandling this AN CAUTION product might result in minor injury to the user or only physical damage to the product E Examples AN Use caution when handling the product S The indicated action is prohibited Q Be sure to follow the indicated instructions WARNING Never allow gases that are within explosive limits to pass through this device Doing so might result in an explosion accidents OO Under no circumstances use a device for oxygen gas whose gas contacting sections have not been treated to be oil free Doing so could cause the gas to ignite Even if gas contacting sections have been treated to be oil free they cannot be used for oxygen if they have previously been used for some A CAUTION If the device is used for burner air fuel ratio control take the necessary countermeasures with the equipment to prevent the occurrence of backfire and to avoid any influence to the device even if backfire occurs Pressure increase or fire in the pipes caused by the backfire of the burner could damage the controller This device cannot be use
7. Temperature reference does not match the reference flow meter e Regulator is vibrating slightly e Foreign object stuck on sensor Flow rate zero adjustment If a cause of the flow rate does not becoming zero in spite of an actual zero flow 6 2 forced PV zero function function setup C 24 Insert a mist trap upstream Adjust the flow rate zero Ask for repair Lower the primary pressure Insert a regulator upstream Change the regulator pressure setting or apply the instantaneous PV filter am function setup 23 Use larger diameter pipe Change the check valve to one having a low cracking pressure Adjust the operating differential pressure setting to the actual operating differential pressure or set 2 for the operating differential pressure setup Match the temperature reference Change in 4 in the function setup Change the regulator pressure setting Ask for repair rate is that the sensor s zero point has deviated adjust the flow rate zero point as follows 1 Press the DISP key to display the instantaneous PV display The PV and L min lamps light 2 Set the operating mode to the fully closed mode or set the setting flow rate to zero and fully close the valve 3 Continue pressing the ENT key in this state 4 After about 10 seconds DH CRL is indicated on the display After about one sec ond release the ENT key 5 The display changes to FF Flow rat
8. 2 or 25 However the minimum control flow rate is the same as for the standard range As the range is reduced the setup and display resolution levels are improved as described in the table below Setup and display resolution levels after changing of range MQV9200 MQV9500 Note MQVv0002 MQV0005 Full scale flow rate Resolution Full scale flow rate Resolution Full scale flow rate Resolution Full scale flow rate Resolution mL min mL min L min L min L min L min L min L min ERREECHEN 5 00to3 02 0 02 200 to 121 0 300 to 0 121 0 001 2 00to 1 21 3 00 to 1 21 0 01 120 0 to 60 5 120 0 to 60 5 0 5 1 200 to 0 605 0 005 1 200 to 0 605 0 005 60 0 to 30 2 60 0 to 30 2 0 2 0 600 to 0 302 0 002 0 600 to 0 302 0 002 30 0 to 10 0 30 0 to 10 0 0 1 0 300 to 0 100 0 001 0 300 to 0 100 0 001 Note The display unit of the flow rate shown in 1 for the MQV9500 is mL min MQVv0020 MQV0050 MQV0200 MQV0500 Full scale flow rate Resolution Full scale flow rate Resolution Full scale flow rate Resolution Full scale flow rate Resolution L min L min L min L min L min L min L min L min _ soowse o2 sows 2 20 0 to 12 1 30 0 to 12 1 200 to 121 200 to 121 12 00 to 6 05 12 0 to 6 05 120 to 61 120 to 61 6 00 to 3 02 6 00 to 3 02 60 to 31 60 to 31 3 00 to 1 00 3 00 to 1 00 30 to 10 30 to 10 DI Handling Precautions
9. Carbon dioxide CO3 C iitof ds Natural gas 13A LNG See the Remarks column for Heating value 46MJ m C fitof 2 and amp for 100 propane details 100 methane 100 butane Natural gas 13A LNG Heating value 45MJ m 5 7 Chapter 5 ADVANCED OPERATION Display Item Item Description Setup Item and Factory Remarks Description Setting SP ramp control 0 Function disabled The SP change ramp level the function 1 SP ramp control 1 rate of change per second can In SP ramp up ramp 1 be set to a constant value for in SP ramp down ramp 2 control startup and setting flow SP ramp control 2 rate changed In external contact OFF Setting of ramps 1 and 2 is ramp 1 done in parameter setup mode in external contact ON gt Page 5 11 for details ramp 2 In case of SP ramp control 2 the operation is performed by ramp 2 when 12 is selected in either one of 4 to 42 external contact input function assignment and also when the target contact is ON but otherwise operation is performed by ramp 1 If 7 is selected anywhere in to 42 SP ramp control is perform ed only when the target contact is ON Optional analog Function disabled The flow rate at analog input output scaling function Function enabled 100 5V can be optionally set The flow rate is set in parameter setup mode gt 5 2 Parameters page 5 11 Forced PV Function disabled Instantaneous flow rate is made
10. Chapter 1 INTRODUCTION MQV9200 9500 0002 0005 0020 0050 Standard control flow rate range Append Description ed No Notes 1 22 3 4 D 1 8 Without optional functions 1 Gas contacting parts treated to be ae oil free 5 0 Without optional functions oe Y With traceability certificate ol Product version CL Digital mass flow controller CMG V series ER EISE standar aA _ 0 004 to 0 500L min standard 1 4 O 0 02 to 2 00L min standard 1 4 0 04to 5 00 L min standard 1 4 0 2 to 20 0 L min standard 1 4 0 4 to 50 0 L min standard 1 4 Integrated display body length 90mm Separate display body length 90mm CT I IE C peme CT Swageox i 14 VCR H e Air nitrogen 2 4 Jugen 3 4 Without optional functions _ Without optional funcions Model with RS 485 communications CPL GE function Without optional functions L min standard and mL min standard indicate the volumetric flow rate per minute L min and mL min converted to conditions of 20 C and 101 325 kPa 1 atm The reference temperature can be changed to 0 25 or 35 C Air nitrogen is the factory setting By changing the setting this model can be used for argon carbon dioxide CO2 city gas 13A LNG 46MJ m3 city gas 13A LNG 45MJ m3 propane 100 methane 100 or butane 100 Additionally special gas m
11. Description Setting 1 Operation selection 0 Control continued and Alarm code displays even if 0 at alarm occurrence alarm output OFF any is selected time alarm ignored 1 to 3 Output logic 1 to 3 is Control continued and inverted ON at all times alarm output ON However they are turned Forced fully closed and OFF at all times during alarm output ON power shutoff Forced fully open and alarm output ON Control continued and alarm output ON 2 Forced fully closed and alarm output ON 3 Forced fully open and alarm output ON Slow start setup 0 Slow start disabled Slow start is used when the 1 to 8 Slow start enabled external contact input turns ON equivalent to approx 1 when slow start operation to 6 seconds settling switching is selected at Z 70 to time 42 r L turned ON the gas type is the one selected by dp gas type selection 2 2 Selectable only on the oxygen model Gas type selection 1 0 Conversion factor for See Remarks An initial gas type is set at the each gas type set by factory the user If the flow rate range changes due Air nitrogen to a change in the gas type the Oxygen flow rate OK range and flow rate Argon alarm range in the parameter setup Carbon dioxide CO must be changed Natural gas 13A LNG When 0 is selected set the Heating value 46MJ m3 conversion factor CF in the 100 propane parameter setup mode 100 methane gt 5 2 P
12. Set the allowable range in the parameter setup For details on how to set parameters see page 5 9 ALM lamp 7 segment display Lit when an alarm occurs Displays the instantaneous flow rate EV1 lamp flow set value totalized flow amperage Lit when event 1 output is ON to the valve and the operating mode EV2 lamp It also displays parameter setup values function f Lit when event 2 output is ON setup values and details of alarms Ze SC S Digital 1 SP lamp Mass Flow L lamp RW i Lit when the flow rate Controller Lit when the totalized flow is displayed setpoint is displayed PV lamp Lit when the instantaneous flow rate is displayed Blinks when the cumulative flow event occurs L min lamp Lit when the instantaneous flow rate or flow set value is displayed DISP key Use this key to switch the details displayed on the 7 segment display ENT key Use this key to fix and store the set value to memory Also use it to reset the cumulative flow and to reset alarm and move to the function setup mode Akey Use this key to increment the setting value Additionally this key is used to change to the device information display mode key Use this key to decrement the setting value Also use it to move to the function setup mode qkey Use this key to move to a desired digit when changing setting value Also use it to move to the parameter setup mode RUN key Use this key
13. is new the active SP 4 5 Chapter 4 BASIC OPERATION 4 6 Note Advanced use direct setup function Control can be executed using an SP No or SP value currently being changed indicated by blinking display when the direct setup function is enabled for the instantaneous flow rate direct setup function ON OFF 2 in the function setup In this case the ENT key need not be pressed to enter the SP value D Handling Precautions e When switching the display by pressing the DISP key first press the ENT key to enter the SP value For details on how to set up functions see Chapter 5 ADVANCED OPERATION D Handling Precautions Common to single setup and multi setup e When 1 Analog setup is selected as the flow rate setup method i 3 in the function setup and the SP value is controlled by external voltage input the SP value and SP No cannot be changed with the A or V key e If no operation is made for approximately 10s after the operation stat ed in 1 has been performed the display automatically returns to the instantaneous flow rate display elf the DISP key is pressed during the operations in steps 2 and 3 setting is blinking the SP No and SP value return to their previous values without saving of new values e When the SP value is updated in step 3 for single setup or in step 4 for multi setup the display automatically returns to the instantaneous flow rate display after approximately 2s have ela
14. 0 FS lt Q lt 50 FS Temperature characteristics 0 06 FS max per 1 C 0 08 FS max per 1 C Pressure characteristics 0 4 FS max per 0 2 FS max per 100kPa 100kPa Standard differential pressure 150kPa Inlet pressure 200kPa Inlet pressure 200kPa gauge 150kPa gauge outlet outlet pressure OkPa gauge 3 pressure OkPa gauge Required differential pressure 50kPa 100kPa Operating differential 300kPa max pressure range 15 Pressure resistance 1MPa gauge allowable inlet pressure Standard operating 23 C temperature 3 Allowable operating 10 to 60 C temperature range Allowable storage 20 to 70 C temperature range Allowable operating humidity 10 to 90 RH condensation not allowed range Helium leak rate Within 1 x 10 Pa m3 s 1 4 VCR connection type Setup method 1 Key operation 2 External analog input 3 RS 485 communications 3 wire system Setup resolution See Gas type and control range table page 7 9 External analog input Input range 0 to 5Vdc 1 to 5Vdc 0 to 20mA 4 to 20mA switchable Input impedance 1MQ 10 Chapter 7 SPECIFICATIONS Model No MQV0005 MQV0020 MQV0050 B C Flow rate Display method 7 segment LED 4 digits display Setup resolution See Gas type and control range table page 7 9 Indication accuracy at standard 1 1 FS 1 digit 50 FS lt Q lt 100 FS temperature and differential 2 0 5 FS 1 digit 0 F
15. 14 10 FS 0 5 to 100 FS 14 14 2 FS 0 5 to 100 FS 414 14 Flow rate deviation 10 0s 0 5 to 999 9s alarm valve amperage alarm judgment delay 0 0 to 999 9s Delay does not apply to totalizer pulse output 0 0 to 999 9s User setup conversion 1 000 0 100 to 9 999 factor 100 0 0 1 to 100 0 At the factory setting alarms are not detected gt Handling Precautions Alo Valve amperage lower 0 0 0 0 to 99 9 page 5 14 7 limit alarm 13 Event 1 output upper 0 F 0 to 100 FS Unit L min standard lower limit flow rate setup F a mL min standard for the Event 2 output upper 0 FS 0 to 100 FS MQV9200 lower limit flow rate setup 14 14 SP ramp control MQV9200 9500 Sets the flow rate change ramp 1 0 0 to 999 9 per second MQV0002 0005 Flow rate unit L min 0 000 to 9 999 standard SP ramp control MQV0020 0050 mL min standard for ramp 2 0 00 to 99 99 the MQV9200 9500 MQV0200 0500 Ramp control does not 0 0 to 999 9 function if the value stays at the factory setting ramp zero The SP takes effect immediately after a change 5 12 Chapter 5 ADVANCED OPERATION Display Description Factory Setting Setting Range Related Func Remarks tion setup Optional analog scaling 100 FS 10 to 100 FS Sets the flow rate correspond Ser 14 ing to 100 of analog input output 5V Unit L min standard mL min standard for the MQV9200 Cumulative flow event 0 to 9999 The un
16. 20 0 0 1 0 4 to 50 0 0 2 LNG 1 Natural gas 13A 0 04 to 5 00 0 02 0 2 to 20 0 0 1 0 4 to 50 0 0 2 LNG 2 i 100 methane 0 04 to 5 00 0 2 to 20 0 0 4 to 50 0 100 propane 0 02 to 1 60 0 06 to 6 00 0 2 to 16 0 100 butane 0 010 to 1 200 0 005 0 04 to 4 00 0 10 to 10 00 0 05 Model No MQVO0050 J K MQV0200 MQV0500 Control Setup display Control Setup display Control Setup display flow rate range resolution flow rate range resolution flow rate range resolution L min standard L min standard L min standard L min standard L min standard L min standard Air nitrogen 4 to 50 Onygen 0 60 0 60 Carbon dioxide 4 to 40 LNG 1 4 Natural gas 13A 0 4 to 50 0 2 to 180 4 to 400 LNG 2 W 100 methane 0 4 to 50 0 2 to 200 100 propane 0 2 to 16 0 0 6 to 60 0 100 butane 0 10 to 12 00 0 4 to 40 0 Notes When the gas type is set at 100 butane on the MQV9500 the unit of flow rate display is mL min 7 11 4 to 50 2 to 20 2 to 160 lol Ko ECK Chapter 7 SPECIFICATIONS E Relationship between differential pressure and flow rate Condition the valve is fully open in air MQV9005 9020 Differential pres
17. 20mA Setup current mA Setting flow rate Full scale flow rate x 20 External reference 1 to 5V Setup voltage V Setting flow rate Full scale flow rate x 4 1 External reference 4 to 20mA Setup current mA Setting flow rate Full scale flow rate x 16 4 Internal reference 0 to 5V input means that the 5V reference voltage input of connector pin No 20 of this controller is used and a voltage is input with the optional potentiometer variable resistor with dial In this case no external power supply for setup is needed The reference voltage 5V is not accurate so to actually measure and calculate the reference voltage output from this controller use a voltage tester for the setup voltage calculation Note Advanced use When 1 Function enabled is selected for analog optional scaling function Z in the function setup the full scale flow rate can be changed to a desired level during analog setup In this case the full scale flow rate of the analog flow rate output voltage current PV output voltage current is also changed as it is linked with the above flow rate The scaling flow rate is set in the parame ter setup mode For details on how to set up functions see Chapter 5 ADVANCED OPER ATION 4 9 Chapter 4 BASIC OPERATION 4 3 Selecting the Operating Mode E Operating mode selection Three kinds of valve operating modes are provided control mode fully closed mode and fully open mode
18. 85 2 3 6 or 7 0 to 20mA external reference input 0 to 20mA external reference input 4 to 20mA external reference input The key lock can be cancelled even while it is enabled When an attempt is made to change a key locked setting Lat is indicated on the display Determines whether or not the operating mode is changed fully closed control fully open by the RUN key Additionally the operat ing mode at power ON can be selected For how to select the operating mode gt 4 3 Selecting the Operating Mode page 4 10 How to switch the SP number using external contact input and external 3 way switching input gt Multi setup page 4 5 Internal reference 0 to 5V input is the setting to use the 5V reference voltage from this device when inputting a voltage with the optional potentiometer variable change resistor with dial Using this method no external power supply for setup is needed The voltage input current input is automatically selected as it is linked with the set value of 26 gt Table in Note 2 page 5 9 Chapter 5 ADVANCED OPERATION Display Item Item Description Setup Item and Factory Remarks Description Setting Analog output type 0 2 3 and range selec Event output 1 type assignment Event output 2 type assignment 1 to 5V instantaneous 0 Not used OFF at all times ON when the totalized Totalized pulse output ON when the flow rate is OK ON in
19. This can be set only when 1 and 2 SP ramp control has been selected for the 27 SP ramp control function in the function setup at et 10 This can be set only when 1 Function enabled has been selected for the 24 analog optional scaling function in the function setup 11 This can be set only when 1 Cumulative flow event has been selected as event output type in L iior 8 in the function setup or when 1 Function enabled has been selected for the automatic valve shut off function upon occurrence of the cumulative flow event 3 13 This can be set only when 1 Function enabled has been selected for the 2 forced PV zero function in the function setup 13 This can be set only if suitable limit type is selected for the 35 SP limit function in the function setup 14 The factory setting and setting range for the SP upper lower limits flow rate obtained by multiplying the full scale flow rate by the percentage in parentheses The factory setting and setting range vary according to the gas type D Handling Precautions e The valve amperage changes greatly according to the differential pres sure even if the flow rate is the same For this reason the valve amper age alarm function cannot be used under unstable differential pressure conditions e Even under stable differential pressure conditions hysteresis character istics electric current to the valve differs even if the flow rate is the same a
20. control mode ON in fully open mode ON in control or fully ON in fully closed mode PV upper limit event PV lower limit event 1 0 to 5V instantaneous flow rate output The scale can also be changed to the desired flow rate range For details see 24 Optional flow rate output analog scaling function 0 to 20mA instantaneous flow rate output 4 to 20mA instantaneous flow rate output 0 to 5V setting flow rate output 1 to 5V setitng flow rate output 0 to 20mA setting flow rate output 4 to 20mA setting flow rate output The event output delay time is set in the parameter setup mode see page 5 11 Note however that delay cannot be set for totalizer pulse output 9 Events are output even in fully closed operation mode 10 Events are not output in fully closed operation mode 1 to 10 OFF at all times during power shutoff flow event occurs open mode 10 PV lower limit event 2 1 to 10 Inverse output of External 3 way switching function 5 4 Not used Switching of operating Switching of SP No Switching of totalizing Switching of analog I O Switching of operating above 1 to 10 Normal operation ON Event occurrence OFF External inputs OPEN GND 5V are switched as shown below For details on wiring see page 3 7 mode 1 operation Control fully closed fully open SP 0 SP 1 SP 2 Continue count reset count sto
21. displayed automatically 5 If you want to set up other items return to step 3 and repeat the procedure Otherwise proceed to step 6 6 Press the DISP key gt gt The mode returns to the instantaneous flow rate display mode The communications address is displayed only on models with the RS 485 com munications option D Handling Precautions e If you do not press any keys for one minute after entering the device information display mode the display automatically returns to the instan taneous flow rate display 5 15 Chapter 5 ADVANCED OPERATION E Device information display item No Display Description Setting Range and Description Related Remarks Item Function Setup 1 Gas type Conversion factor for each gas type set by the user Air nitrogen Oxygen Argon Carbon dioxide CO2 Natural gas 13A LNG Heating value 46MJ m3 100 propane 100 methane 100 butane Natural gas 13A LNG Heating value 45MJ m3 2 Full scale 10 to 100 of standard range Unit L min standard flow rate K mL min standard for the MQV9005 9020 9200 Reference 0 to 35 Unit C temperature Communications 0 to 127 0 means communications address function disabled Only for models with RS 485 communications 5 16 Chapter 5 ADVANCED OPERATION 5 4 Flow Rate Range The flow rate range can be reduced to a level of 99 down to 10 of the standard range using the flow rate range setup
22. for external contact input and or external 3 way switching input always use a relay designed for micro current use with gold contacts Failure to do so could cause faulty contact resulting in malfunction If there is a risk of a power surge caused by lightning use Yamatake Corporation s SurgeNon to prevent possible fire or equipment failure Gas type switching by external contact input flow rate switching and analog input output voltage range switching by external 3 way input switching should be done only after setting the operation mode to fully closed Switching while controlling could cause large fluctuations Be sure to check that the wiring is correct before turning the power on Incorrect wiring could cause damage or malfunction Do not operate the console keys using a sharp object such as a mechanical pencil or screwdriver Doing so might damage the console Sve Ge Ge Ch GG Ge SF When discarding the device dispose of it as industrial waste following local regulations The Role of This Manual Two manuals are available for the CMQ V Series Read them as necessary for your specific requirements If a manual you require is not available contact Yamatake Corporation or its dealer CMQ V Series Digital Mass Flow Controller Manual No CP SP 1204E This manual First time users of the CMQ V Series and those in charge of maintenance or hardware design for incorporating a CMQ V Series controller
23. goes out the SP lamp lights and the flow set value SP is indicated on the display DI Handling Precautions e If the SP value is not changed for about 10 seconds while the flow set value is displayed the instantaneous flow rate is redisplayed automatically For details on how to change the flow rate see section 4 2 Setting the Flow Rate page 4 4 e When multiple setpoints 2 to 8 SPs have been selected in 4 in the function setup when switching by external input the flow set value SP value is displayed for about one second and then the display switches to the SP No Indicating the totalized flow When the DISP key is pressed while the flow set value SP is displayed the SP and L min lamps go out the L lamp lights up and the totalized flow value is indicated on the display When the totalized flow value is 10 000 or higher the number is displayed in two parts the last four digits followed by the first four digits When the value is the last four digits the decimal point on the display is lit up For example when the totalized flow value is 123 456L 2455 is displayed Press the DISP key to display e To alternately display the first and last four digits press the lt key D Handling Precautions es When an alarm occurs the alarm code and the totalized flow value are displayed alternately Resetting the totalized flow count The totalized flow value is reset to zero by holding down the ENT key for t
24. has been mounted with the display upside down e Procedure 1 Turn the power OFF 2 Remove the four screws holding the display 3 Lift up the display from the body and turn it 180 counterclockwise We Flat screws 4 for Ki holding the display a 4 Put the display back on the body and fasten with the four screws taken off in step 2 5 To return the display to its original position on the body turn it 180 clockwise Chapter 3 MOUNTING AND WIRING D Handling Precautions e Before changing the display direction be sure to turn the power OFF e Prevent foreign objects from falling inside the body when the display is taken off Failure to do so might cause trouble or malfunction e Do not remove the connectors used inside the device Installing joints UNF connections A CAUTION When installing joints UNF connections secure the lower part of the body in a vise or the like gripped between rags to protect the finished surfaces and turn the joint to tighten The device may be damaged if the lower body is not secured When using a standard type UNF connection install the joint first except when the pipe is directly connected Connector latches D Handling Precautions e Do not hold the top part of the body with your hand Doing so might deform the case Wrong e Take special care not to damage the connector latches 3 3 Chapter 3 MOUNTING AND WIRING Insta
25. instantaneous Function enabled zero forcibly after the flow rate is set flow rate zero to zero or the mode is changed to function valve forced fully closed mode and delay time has elapsed Instantaneous flow rate variation in zero position caused by the inclination of pipe is neglected Delay time is set in parameter setup mode gt 5 2 Parameters page 5 11 Communications 0 Communications address setting function disabled 1 to 127 Communications address Transfer speed 38400bps selection 19200bps 9600bps 4800bps 2400bps Data format selec 8 data bits even parity tion 1 stop bit 8 data bits no parity 2 la stop bits pf SP limit function SP limit function The upper and lower limit values disabled of the flow rate setup range can Only upper limit enabled be set to desired levels Only lower limit enabled Upper and lower limits are set Upper and lower limits in parameter setup mode enabled gt 5 2 Parameters page 5 11 5 8 Notes Chapter 5 ADVANCED OPERATION isplay Item Item Description Setup Item and Factory Remarks Description Setting 1 Operational 0 Low differential pressure When the setting corresponds to sp differential pressure 50 50kPa the actual operating differential SE 2 setting control Standard differential pressure control can be optimization pressure 200 100kPa optimized High differential pressure When 0 is set the control
26. rate L min standard Differential pressure kPa DI Handling Precautions e f this device is used for a gas other than air or if it is operated under con ditions different from the outlet pressure the conversion needs to be made using the equation stated on the previous page Optional parts sold separately Cable with dedicated connector 81446681 001 TT Jee Jesse Operating temperature range 0 to 40 C Potentiometer for flow rate setting 81446683 002 5kQ with digital dial 10 turns Front cover for separate display 81446858 001 Mask 1 piece unit Plate 1 piece Mounting screws 2 pieces Loader Package MLP100A100 The CMQ V can be configured on a PC In addition operating status such as flow rate trends can be monitored on the PC screen DI Handling Precautions e The old type AC adapter 81446682 001 15Vdc 350mA cannot be used for this device E External dimensions Chapter 7 SPECIFICATIONS Models with integrated display MQV9005B 9020B 9200B 9500B 0002B 0005B 0020B 0050B 22 44 T Jack for loader ak a 2 9 16 18UNF H D Bo ZC oe Unit mm Mass Flow Clot Controller ai o Un CMQ V 130 11 05 Rc 1 4 pipe coupling 2 137 Re 1 4 connection type HEX9 16 Pipe coupling made by Swagelok 2 SS 400 1 6ST Applicable pip
27. reference input 0 to 5V setting flow rate output O to 5V setting flow rate output 1 to 5V setting flow rate output 7 0 to 20mA external reference input 0 to 20mA external reference input 0 to 20mA external reference input 4 to 20mA setting flow rate output 4 to 20mA setting flow rate output 4 to 20mA setting flow rate output 5 9 5 10 Chapter 5 ADVANCED OPERATION 3 When 4 Switching of analog I O voltage range is selected for external 3 way switching function assignment 24 in the function setup external 3 way switching input takes precedence over others Additionally the analog input and output ranges change as shown in the table below according to the input status and the setting status of 5 Settings in External 3 way switching input state des OPEN ov 5V 0 to 5V internal reference input 0 to 5V external reference input 1 to 5V external reference input 1 to 5V instantaneous flow rate output 0 to 20mA external reference input 0 to 20mA external reference input 0 to 20mA external reference input 0 to 20mA instantaneous flow rate output 0 to 5V internal reference input 0 to 5V external reference input 1 to 5V external reference input 0 to 5V setting flow rate output 0 to 5V setting flow rate output 1 to 5V setting flow rate output 6 0 to 20mA external reference Input 0 to 20mA external reference input 0 to 20mA external reference input 0 to 20mA setting flow rate output 0 to 20mA setti
28. to change the operating mode Note Technical terms used in this manual are defined as follows e SP setpoint The flow set value or flow rate setpoint e PV process variable Instantaneous flow rate or controlled flow rate e Operating mode One of 3 modes valve fully closed valve control valve fully open 1 This lamp is used for m instead of L on some models 2 This lamp is used for mL min instead of L min on some models 2 1 Chapter 2 NAMES AND FUNCTIONS OF PARTS Body MQV9200 9500 0002 0005 0020 0050 Connector port This is used for I O signals Use cable with dedicated connector Jack for AC adapter Connect dedicated adapter here Model No 81446957 001 24Vdc 650mA Pipe connection port outlet This is the port from which gas is discharged Pipe connection port inlet This is the port through which gas enters Jack for PC loader connection e Body MQV0050 J K 0200 0500 Connector for separate display This is used for connecting the separate display unit Connector port This is used for I O signals Use cable with dedicated connector Pipe connection port outlet This is the port from which gas is discharged Jack for AC adapter Connect dedicated adapter here Model No 81446957 001 24Vdc 650mA Jack for PC loader connection Pipe connection port inlet This is the port through which gas enters D Handling Pre
29. using a wrench spanner or similar tool on the hexagonal sections of the joints Coating sealant Rc connection D Handling Precautions Coat with an appropriate amount of sealant Do not coat the top two threads Remove any dirt or burrs from inside the pipes Right Sealant 3 6 Chapter 3 MOUNTING AND WIRING E Wiring A CAUTION Do not apply a negative voltage or a voltage exceeding 5V to the external setup voltage input terminal Doing so might cause malfunction or equipment failure When using a relay for external contact input and or external 3 way switching input always use a relay designed for micro current use with gold contacts Failure to do so could cause faulty contact resulting in malfunction If there is a risk of a power surge caused by lightning use Yamatake Corporation s SurgeNon to prevent possible fire or equipment failure Gas type switching by external contact input flow rate switching and analog input output voltage range switching by external 3 way input switching should be done only after setting the operation mode to fully closed Switching while controlling could cause large fluctuations Be sure to check that the wiring is correct before turning the power on Incorrect wiring could cause damage or malfunction Connector pin layout Connector model No device side HIF3BA 20PA 2 54DS 20 19 Manufacturer HIROSE ELECTRIC CO LTD 2 1 View from connector insertion sid
30. within parentheses indicate steps in a sequence or parts of an explanation This font indicates 7 segment indication on the display Indicates the result of an operation or the state of the device after operation Indicates an item or page that the user is requested to refer to Chapter1 INTRODUCTION E Introduction CMQ V Series high performance digital mass flow controllers with advanced functions have been developed for the general industrial application They feature flow rate control with high speed and wide rangeability CMQ V controllers integrate three component technologies the ultra quick response UF Micro Flow thermal flow sensor made with proprietary Yamatake technology a proportional solenoid valve and advanced actuator control technology Integrating these technologies has achieved a high speed control with low differential pressure Front cover for separate display sold separately Potentiometer sold separately for setting flow rate lt gt Cable with dedicated For details see page 7 19 connector sold separately A Controller e g SDC25 26 24Vdc power supply e g WN790A AC adapter sold separately RS 485 device for models supporting optional RS 485 communications function Device Configuration E Features e High speed controllability Fast response of 300ms or less 700ms for the MQV0050 J K MQV0200 and MQV0500 Respon
31. 0 0500 MQV0200 300 280 260 240 25 C 40 C 60 C 220 200 180 Maximum operating differential pressure kPa 160 140 21 0 220 230 240 250 260 27 0 Power voltage V MQV0500 300 280 260 240 25 C 40 C 60 C 220 200 180 Maximum operating differential pressure kPa 160 140 l 21 0 22 0 23 0 240 25 0 260 27 0 Power voltage V o Handling Precautions e If this device is operated with a differential pressure exceeding the maxi mum operating differential pressure shown in the graph on the preceding page the voltage to the valve becomes insufficient and the target flow rate cannot be obtained Additionally even if the voltage does not become insufficient flow rate hunting may occur if the operating differen tial pressure exceeds 300kPa Always operate this device with a differen tial pressure less than 300kPa Chapter 7 SPECIFICATIONS WR Gas type and control range The controllable flow rate range may vary depending on the type of gas For details see the tables below Model No MQV9200 MQV9500 Control Setup display Control Setup display flow rate range resolution flow rate range resolution mL min standard mL min standard L min standard L min standard 010 10 50 02 to 200 010 to 5 0 0 2 to 20 0 010 10 5 0 02 to 20 0
32. 300 0 100kPa response speed becomes fast When 2 is set the control response speed becomes slow Flow rate display Flow rate is displayed in When the flow rate range or unit change function the standard flow rate gas type is changed the unit is unit automatically changed to the Flow rate is displayed in display unit so that the range L min at all times after change becomes the Flow rate is displayed in maximum resolution mL min at all times 1 A value less than 0 001 L min is not displayed PV instantaneous Decimal point position is The decimal point position of the flow rate display not changed SP display is not changed decimal point posi 1 Decimal point position is 1 When the standard decimal tion change function shifted one digit left point position is the 4th digit Decimal point position is 0 xxx the function is invalid shifted one digit right even though this setting is selected If the flow rate exceeds the display range a dash is displayed for all digits When the standard flow rate display does not have a decimal point it is invalid even though this function is selected When 4 flow rate setting method switching is selected in the external contact inputs X 2 in the function setup switching according to external input takes precedence L According to the settings in 45 and amp the analog input and output ranges are changed as shown in the table below Setti
33. 5000 min Grey White Orange Orange White Purple White Ground terminal Pressure connection type special hood Pressure connection socket contact Pressure connection female connector Heat shrinkable tube coated wire diameter 1 06 OO NI gt Or A Go PO Cable l 20 wire conductor structure 7 0 2mm2 HIF3 20CV 20 Bright Green 7 20 Bright Green White Chapter 7 SPECIFICATIONS Potentiometer for flow rate setting 81446683 002 e Digital dial e Potentiometer Unit mm 16 5 1 Hexagonal nut M9 2 10 Internally toothed washer T CO bw S Lo 3 E z rt sjeg 2 Es Go 2 ei el Ka LOCK 5 15 10 5 2 Mounting screw 14 2 Mounting hole dimensions M3xP0 5 re 5 3 3hol 15 2 e Sek 26 1 10 3 Thole AC adapter 81446957 001 Unit mm 81446957001 Yaratake Corporation 7 21 Revision History date oPSPia04e a S Sep 2010 CP SP 1204E Examples changed ii iii i Cautions changed and added MVQ9005 added to Features MVQ9005 9020 added Handling Precautions added AC adapter output rating changed MLP100A Loader Package added to optional parts Pin No lead wire color correspondence table added 7 2 to 7 4 MVQ9005 9020 added to specifications 7 11 to 7 13
34. 6 4V ripple 5 max The power circuit is isolated from the input output circuit SUS316 Teflon Fluororubber 9 16 18UNF Re 1 4 1 4 Swagelok 1 4 VCR Horizontal Be sure that display surface does not face down Applicable standards EN61326 1 2006 EN61326 2 3 2006 7 5 Chapter 7 SPECIFICATIONS MQV0005 0020 0050 B C Valve type Model No Mavo0005 MQV0020 MQV0050 B C Proportional solenoid valve Valve operation Normally closed when de energized N C Standard full Gas types Pressure Temperature Humidity External leaks Flow rate setup 7 6 scale flow rate 1 5 00L min standard 20 0L min standard 50 0 L min standard Air nitrogen N2 oxygen O2 argon Ar carbon dioxide CO2 natural gas 13A LNG 100 methane CH4 100 propane C2H6 100 butane CsHs Gas must be dry and not contain corrosive components chlorine sulfur acid The gas must also be clean not containing dust or oil mist 1 to 100 FS see Gas type and control range table page 7 9 Response Within 0 3s at setting 2 FS typ at standard differential Control starts from the fully closed status or the setting is changed pressure during control Accuracy 1 1 FS 50 FS lt Q lt 100 FS at standard temperature 2 0 5 FS 0 FS lt Q lt 50 FS and differential pressure Q flow rate 2 Repeatability 1 0 5 FS 50 FS lt Q lt 100 FS Q flow rate 2 0 25 FS
35. Function disabled Function enabled Valve operation stops while the control flow rate is within the OK judgment range The OK judgment range can be set in the parameter setup mode gt 5 2 Parameters page 5 11 If the PV filter is used at a 2 or 3 setting the operational differential pressure must be lower than the standard differential pressure Do not change the setting while control is in progress Two samplings moving average average average Standard range to 99 10 to 99 of The setup and display resolution levels can be improved by standard range When calculating the range reduction the value is not cut off at the least significant digit Example Standard range 30 0L min and range setup 67 Calculation formula 30 0 x 0 67 20 1 Since the value is cut off at the least significant digit the flow rate range becomes 20 0L min The range selected by 25 becomes active if 11 is selected for assignments t to f external contact input function assignment and only when the objective contact is turned ON However the range selected by CH becomes active otherwise D EI L Conversion factor for See Remarks The gas type of the model number each gas type set by is factory set the user This setting is valid only when 10 Air nitrogen Switching of gas type setup is Oxygen selected at external contact input Argon function assignment for any of
36. I Vi Si y EI 88 al Mounting panel cutout dimensions recommended 100 02 E 3 45 02 E 90 0 2 W Cable for connecting display to body Unit mm HIROSE ELECTRIC CO LTD HIF3BA 16D 2 54R Red Zei l A 2000min a Oki Electric Cable Company Limited FLEX S16 7 0 127 2651P Color pin No 1 red pin Nos 5 10 and 15 green others gray Chapter 7 SPECIFICATIONS Front cover for separate display unit 81446858 001 ask Unit mm Material PC ABS Color Dark gray 442 1 L 83 Material SPCC t1 Color Black L 109 6 o g M4 cross recessed head machine screws TT for mounting 2 7 5mm long Cable with dedicated connector e 20 wire flat cable 81446681 001 Housing Unit mm HIROSE ELECTRIC CO LTD HIF3BA 20D 2 54C Ger 2000 min BS End section F Ge End section Pin arrangement 25 min Oki Electric Cable Company Limited FLEX S20 7 0 2 AWG 24 20 min lt gt Color pin No 1 red pin Nos 5 10 and 15 green others gray 29 95 Contact HIROSE ELECTRIC CO LTD HIF3 2226SCC 20 P ces compatible lead AWG 22 to 26 7 2 fx e Pin No lead wire color correspondence table e 20 wire shielded cable 81446951 001 i Lead wire Black Black White Red Red White Green Green White Yellow Yellow White Brown Brown White Blue Blue White Grey
37. ION Description Digital mass flow controller CMQ V series 0 10 to 5 00 L min standard 1 4 0 2 to 20 0 L min standard 1 74 Integrated display body length 90mm Separate display body length 90mm SUS316 Re 1 4 1 4 Swagelok 1 4 VCR o _ _ J Without optiona 9 16 18UNF Air nitrogen Oxygen functions Without optional functions Model with RS 485 communicati6as ePL function 3 4 MES 0 D Y Without optional functions Gas contacting parts treated to be oil free Without optional functions L min standard indicates the volumetric flow rate per minute L min converted to conditions of 20 C and 101 325 kPa 1 atm The reference temperature can be changed to 0 25 or 35 C The MQV is set initially for air nitrogen use before shipment from the factory However the gas type The MQV is set initially for oxygen use before shipment from the factory However the gas type can be changed to air nitrogen or argon But if the MQV is used even once for a gas other than oxygen do Notes 1 2 can be changed to argon 3 not use it for oxygen 4 See Gas type and control r Re ange page 7 11 selected in optional function 4 The controllable flow rate range varies depending on the gas type If oxygen is selected as the gas type 1 oil inhibiting treatment for gas contacting parts must be 1 7
38. NF connection type Rc 1 4 pipe coupling 2 137 Rc 1 4 connection type Pipe coupling made by Swagelok 2 SS 400 1 6ST Applicable pipe outside diameter 1 4 material SUS316 SS 4 VCR 1 00032SC11 137 8 1 4 VCR connection type 7 17 Chapter 7 SPECIFICATIONS Model with separate display MQV0050K 0200K 0500K e Body Unit mm weg i ne ro Ile econ a a as MQV0050 eee AA Jack for s a loader gd ki 5 z Jack for AC adapter 2 3 4 16UNF i f S 25 3 205 110 05 a Sja 150 2 La e M4 screw 4 depth 5 min Yamatake Corporation 150 Rc 1 2 pipe coupling 2 Pipe coupling made by Swagelok 2 Gi SS 810 1 8ST Applicable pipe outside diameter 1 2 material SUS316 Rc 1 2 connection type 150 1 2 Swagelok connection type 3 8 VCR pipe couple made by Swagelok 2 SS 8 VCR 1 8STSC11 or equivalent 150 3 8 VCR connection type Chapter 7 SPECIFICATIONS e Separate display unit Unit mm 8 105 6 93 8 CG A o er S252 ow N 2 g so eae e cna E a 8 ES Leed EES mi DADDBE D d Sg t YAMATAKE W St Ee o S
39. No CP SP 1204E CMQ V Series Digital Mass Flow Controller User s Manual Thank you for purchasing the CMQ V Series Digital Mass Flow Controller This manual contains information for ensuring correct use of the CMQ V Series It also provides necessary information for installation maintenance and troubleshooting This manual should be read by those who design and maintain devices that use the CMQ V Series Be sure to keep this manual nearby for handy reference Yamatake Corporation NOTICE Be sure that the user receives this manual before the product is used Copying or duplicating this user s manual in part or in whole is forbid den The information and specifications in this manual are subject to change without notice Considerable effort has been made to ensure that this manual is free from inaccuracies and omissions If you should find an error or omis sion please contact Yamatake Corporation In no event is Yamatake Corporation liable to anyone for any indirect special or consequential damages as a result of using this product 2006 Yamatake Corporation ALL RIGHTS RESERVED Micro Flow uF CMQ and SDC are trademarks of Yamatake Corporation ES SAFETY PRECAUTIONS J E About Icons The safety precautions described in this manual are indicated by various icons Please be sure you read and understand the icons and their meanings described below before reading the rest of the manual
40. S lt Q lt 50 FS pressure Q flow rate Totalizing Display range 3 At the time the RUN key is pressed Analog Output type Instantaneous flow rate PV output or setting flow rate SP output output switchable Accuracy Total output accuracy 0 3 FS Indication accuracy 0 3 FS Totalized pulse output rate 0 1L 1 pulse 1L 1 pulse External Input type number of inputs External 3 way switching input OPEN GND 5V 1 switching External contact input 2 way switching 3 input Required circuit type Non voltage contact or open collector Contact OFF terminal voltage External 3 way switching input 2 5 0 5V External contact input 2 8 0 5V Contact ON terminal current Approx 0 5mA current flowing to contact Allowable ON contact 2502 max resistance Allowable OFF contact 100k min resistance Allowable ON residual voltage 1 0V max open collector type Allowable OFF leakage current 50A max open collector type output external 3 way switching input Communi RS 485 communications 3 wire system 6 Transmission speed 2400 4800 9600 19200 38400 bps 24Vdc current consumption 300mA max 21 6 to 26 4V ripple 5 max Isolation The power circuit is isolated from the input output circuit Material of gas contacting parts SUS316 Teflon Fluororubber Connection method 9 16 18UNF Rc 1 4 1 4 Swagelok 1 4 VCR Horizontal Be sure that display surface does not face down Rating Allowable power volta
41. V0020 MQV0050 B C 10 24 60 a 4 3 a 2 3 OF 2 3 F 8 S o 4 g S 4 3 A 3 4 S Li g 16 g 40 amp 6 B a E E E E E 12 E 30 a L a a 4 ZS Outlet pressure condition S 8 pa Outlet pressure condition 20 L Outlet pressure condition 4 z M 1 150kPa gauge 7 z ae 1 150kPa gauge J z 1 150kPa gauge 2 2 2 50kPa gauge 4 2 4 M 2 50kPa gauge 2 10 2 50kPa gauge 3 OkPa gauge 3 OkPa gauge 3 OkPa gauge 4 50kPa gauge z 4 50kPa gauge 4 50kPa gauge 4 0 1 1 1 L o j 1 1 1 L ii 1 0 I 1 i i 1 1 1 0 2 4 6 8 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Differential pressure kPa Differential pressure kPa Differential pressure kPa MQV0050 J K 0200 0500 MQVO0050 J K MQV0200 MQVO0500 240 600 TTY Aeae GE rT E Ge 4 A g5 ge 4 SE bal ba bal gel gel o S 40 S 160 S 400 Ki a Ki E 30 E 120 arg E 300 H d d a 20 Outlet pressure condition 80 H Outlet pressure condition 200 GC Outlet pressure condition z 1 150kPa gauge z J 1 150kPa gauge z L 1 150kPa gauge d Si 2 50kPa gauge 2 50kPa gauge Si IW 2 50kPa gauge L 10 3 OkPa gauge i 40 3 OkPa gauge 7 ie 100 3 OkPa gauge 4 50kPa gauge 4 50kPa gauge 4 4 50kPa gauge 7 0 ELE 0 ee ee E E S 0 a es es ee 0 2 4 6 8 10 0 20 40 60 80 100 120 0 40 80 120 160 200 Differential pressure kPa D Handling Precautions Chapter 7 SPECIFICATIONS e If the outlet pressur
42. Vdc 1 to 5Vdc 0 to 20mA 4 to 20mA switchable Input impedance 1MQ 10 7 4 Chapter 7 SPECIFICATIONS iy Model No Mav9200 MQV9500 MQvo002 Flow rate Display method 7 segment LED 4 digits display See Gas type and control range table page 7 9 Indication accuracy at standard 1 1 FS 1 digit 50 FS lt Q lt 100 FS temperature and differential 2 0 5 FS 1 digit O FS lt Q lt 50 FS pressure Q flow rate Totalizing Display range 0 00 to 999 999 99L 0 00 to 999 999 99L 0 0 to 9 999 999 9L function Display resolution 0 01L 0 01L Totalized count backup 1 Every 2L 1 Every 5L 1 Every 20L timing 2 Every hour from the previous backup 3 At the time the RUN key is pressed Analog Output type Instantaneous flow rate PV output or setting flow rate SP output output switchable Total output accuracy 0 3 FS Indication accuracy 0 3 FS 0 01L 1 pulse 0 1L 1 pulse External External 3 way switching input OPEN GND 5V 1 switching External contact input 2 way switching 3 External 3 way switching input 2 5 0 5V External contact input 2 8 0 5V Contact ON terminal current Approx 0 5mA current flowing to contact Allowable ON contact 2502 max resistance Allowable OFF contact 100k min resistance output external 3 way switching input Communi Mode gt RS 485 communications 3 wire system 6 2400 4800 9600 19200 38400 bps Power 24Vde current consumption 300mA max 21 6 to 2
43. a throttle valve or the like to control the flow rate If the flow rate exceeds the upper limit both the flow rate display and the output voltage current may indicate considerably lower values than the actual flow rate If damage could result from the abnormal functioning of this device include appropriate redundancy in the system design The valve on this device cannot completely shut a flow off If complete shutoff is required provide a shutoff valve separately When the external valve is closed it is necessary also to fully close the valve of the device using either of the following methods e Set the flow rate setpoint to zero e Make the valve operation mode to fully closed If this valve remains in normal control status when the external shutoff valve is closed zero flow rate there will be an excessively large flow as soon as the external shutoff valve is opened For the MQV0050 J K MQV0200 J K and MQV0500 J k if the external shutoff valve is closed continuously for 5 minutes or more in control mode or with the valve forced fully open the valve overheating limit AL71 will be activated and the current to the valve will be forcibly limited Before connecting pipes with Swagelok or VCR connections check the precautions in the instruction provided by the connecting joint manufacturer When purchasing a connecting joint use the following made by Swagelok Co Ltd 1 4 Swagelok SS 400 1 6ST standard SS 400 1 6STSC11 oil in
44. accuracy 0 3 FS Indication accuracy 0 3 FS External External 3 way switching input OPEN GND 5V 1 switching External contact input 2 way switching 3 External 3 way switching input 2 5 0 5V External contact input 2 8 0 5V Contact ON terminal current Approx 0 5mA current flowing to contact Allowable ON contact 250Q max resistance Allowable OFF contact 100kQ min resistance output external 3 way switching input Communi Mee RS 485 communications 3 wire system 6 2400 4800 9600 19200 38400 bps Power 24Vde current consumption 300mA max 21 6 to 26 4V ripple 5 max The power circuit is isolated from the input output circuit SUS316 Teflon Fluororubber borosilicate glass silicon 1 4 Swagelok 1 4 VCR Horizontal Be sure that display surface does not face down Applicable standards EN61326 1 2006 EN61326 2 3 2006 7 3 Chapter 7 SPECIFICATIONS MQV9200 9500 0002 Model No Mav9200 MQV9500 MQvo0002 Valve type Proportional solenoid valve Valve operation Normally closed when de energized N C Standard full scale flow rate 1 200 mL min standard 0 500 L min standard 2 00 L min standard Gas types Air nitrogen Nz oxygen O2 argon Ar carbon dioxide CO2 natural gas 13A LNG 100 methane CH4 100 propane C2H6 100 butane CsHs Gas must be dry and not contain corrosive components chlorine sulfur acid The gas must also be clean not containing dust or oil mist C
45. amperage upper and lower limits are set in the para meter setup mode For details on function setup and parameter setup see Chapter 5 ADVANCED OPERATION D Handling Precautions e The valve amperage can vary greatly according to the differential pressure even at the same flow rate The valve amperage alarm func tion cannot be used unless the differential pressure is stable e Even under stable differential pressure conditions the relationship between the valve amperage and flow rate has hysteresis characteris tics amperage may vary even at the same flow rate When using the valve amperage alarm be sure to test sufficiently under operating conditions That way an appropriate alarm current setting can be determined 4 3 Chapter 4 BASIC OPERATION 4 2 Setting the Flow Rate Set the flow rate as shown below Flow set value Digital setup Analog setup Single setup Key input or communications Selection from function setup 24 Voltage setup Selection from function setup 85 and 5 v External reference Current setup 0 to 20mA 4 to 20mA input Factory setting Two kinds of setup methods that is digital and analog setup are provided to set the flow rate Additionally the digital setup further provides two kinds of setup methods single setup and multi setup In single setup the flow rate is set through key input or communications In multi setup the flow rate is set
46. and external contact input assignments 1 Press the DISP key several times to display the instantaneous flow rate gt gt The PV and L min lamps light mL min in MQV9200 2 Hold down the w and the ENT keys for three seconds or more gt gt Item is displayed on the 7 segment display and mode changes to the func tion setup mode 3 Press the A or e key to select the desired setup item number and then press the ENT key gt gt The current setting value blinks on the 7 segment display 4 Press the A or W key to select the desired setting 5 When you have selected the desired setting press the ENT key to enter the set ting gt gt The setting value is updated At this point the setting value is saved 6 If you want to set up other items return to step 3 and repeat the procedure Otherwise proceed to step 7 7 Press the DISP key gt gt The function setup mode changes to the instantaneous flow rate display o Handling Precautions e If you do not press any keys for one minute after entering the function setup mode the display automatically returns to the instantaneous flow rate display e f you press the DISP key without pressing the ENT key after carrying out the operation in step 4 the setting remains at the previous value with out being updated E Function setup items Chapter 5 ADVANCED OPERATION The following table shows the function setup items Display Item Item Descripti
47. arameter setup mode 3 Press the A or W key to select the desired setup item numbers and press the ENT key gt gt The current setting blinks on the 7 segment display 4 Press the A or W key to change the setting to the desired setting You can move to the digit to be changed by pressing the lt key 5 When you have finished changing the setting press the ENT key to enter the setting gt gt At this point the setting is updated 6 If you want to set up other items return to step 3 and repeat the procedure Otherwise proceed to step 7 7 Press the DISP key gt gt The mode return to the instantaneous flow rate mode from the parameter setup mode D Handling Precautions e If you do not press any keys for one minute after entering the parameter setup mode the display automatically returns to the regular instanta neous flow rate display e f you press the DISP key without pressing the ENT key after carrying out step 4 the setting remains at the previous value without being updated Chapter 5 ADVANCED OPERATION Parameter setup item list Display Description Factory Setting Setting Range Related Func Remarks tion Setup wind Flow rate OK 2 F 0 5 to 100 FS Unit L min standard Wa judgment range a e mL min oad A AS Flow rate OK 1 F 0 5 to 100 FS the MQV9200 1 judgment hysteresis a 14 Instantaneous flow ratg 10 FS 0 5 to 100 FS 14 14 2 FS 0 5 to 100 FS 14
48. arameters page 5 11 100 butane If 10 is selected for any of 1 Natural gas 13A LNG i to 2 external contact Heating value 45Md m input function assignment and only when an objective contact is Temperature at 20 C 1 atmosphere reference conditions 1 0 C 1 atmosphere 25 C 1 atmosphere 35 C 1 atmosphere Valve amperage Valve amperage alarm Set up the alarm current alarm setup disabled value in the parameter setup Only upper limit alarm gt 5 2 Parameters page 5 11 enabled Only lower limit alarm enabled Upper lower limit alarm enabled Direct setup 0 Function disabled SP value being changed flashing function ON OFF 1 Function enabled is used for control Chapter 5 ADVANCED OPERATION Display Item Item Description Setup Item and Factory Remarks Description Setting Control dead 0 zone setting 1 PV filter process for filtering 1 of instantaneous flow rate Eight samplings moving Flow rate range d setup 1 10 Flow rate range setup 2 Gas type selection 2 0 6 7 8 11 Without filter Four samplings moving standard range When reducing the flow rate range calculating the range gt Page 5 17 for details reduction the value is If a value of 10 to 99 is set the cut off at the least signif value is cut off at the least icant digit significant digit when calculating 10 to 99 10 to 99 of the range reduction
49. atake or Yamatake s subcontractors 4 Failure caused by your use of Yamatake product in a manner not conforming to the intended usage of that product 5 Failure that the state of the art at the time of Yamatake s shipment did not allow Yamatake to predict or 6 Failure that arose from any reason not attributable to Yamatake including without limitation acts of God disasters and actions taken by a third party Please note that the term warranty as used herein refers to equipment only warranty and Yamatake shall not be liable for any damages including direct indirect special incidental or consequential damages in connection with or arising out of Yamatake products 2 Ascertainment of suitability You are required to ascertain the suitability of Yamatake product in case of your use of the same with your machinery equipment etc hereinafter referred to as Equipment on your own responsibility taking the following matters into consideration 1 Regulations and standards or laws that your Equipment is to comply with 2 Examples of application described in any documents provided by Yamatake are for your reference purpose only and you are required to check the functions and safety of your Equipment prior to your use 3 Measures to be taken to secure the required level of the reliability and safety of your Equipment in your use Although Yamatake is constantly making efforts to improve the quality and reliability of Yamatake products
50. cautions e The former AC adapter model No 81446682 001 15Vdc 350mA can not be used with CMQ V Chapter 3 MOUNTING AND WIRING WARNING Never allow gases that are within explosive limits to pass through this device Doing so might result in an explosion accidents Under no circumstances use a device for oxygen gas whose gas contacting sections have not been treated to be oil free Doing so could cause the gas to ignite Even if gas contacting sections have been treated to be oil free they cannot be used for oxygen if they have previously been used for some other gas A CAUTION Prevent foreign matter from entering the device If rust water droplet oil mist or dust in the pipes enters the device measurement or control error or damage might occur If there is a possibility of foreign matter entering the device provide a filter strainer or mist trap capable of eliminating foreign matter 0 1 um or greater in diameter at the upstream Be sure to inspect and replace the filter at regular intervals Use the device within the operating differential pressure range Also do not subject it to pressure beyond the rated pressure resistance range Doing so might damage it Do not subject this device to pressure above its pressure resistance Doing so might damage it Be sure to use within the flow rate range stipulated in the product specifications To prevent excessive flow use a suitable means to control the supply pressure or use
51. cautions notices as set forth in the technical documents prepared for individual Yamatake products such as catalogs specifications and instruction manuals to ensure the quality reliability and safety of those products 7 Changes to specifications Please note that the descriptions contained in any documents provided by Yamatake are subject to change without notice for improvement or for any other reason For inquires or information on specifications as you may need to check please contact our branch offices or sales offices or your local sales agents 8 Discontinuance of the supply of products parts Please note that the production of any Yamatake product may be discontinued without notice For repairable products we will in principle undertake repairs for five 5 years after the discontinuance of those products In some cases however we cannot undertake such repairs for reasons such as the absence of repair parts For field instruments we may not be able to undertake parts replacement for similar reasons azbil Yamat ake Corpo ration Specifications are subject to change without notice 08 Advanced Automation Company 1 12 2 Kawana Fujisawa Kanagawa 251 8522 Japan URL http www azbil com 1st Edition Issued in Apr 2006 2nd Edition Issued in Sep 2010 P
52. d for measurement or control of hydrogen or helium gas Use a model specially designed for hydrogen and helium gases Prevent foreign matter from entering the device If rust water droplet oil mist or dust in the pipes enters the device measurement or control error or damage might occur If there is a possibility of foreign matter entering the device provide a filter strainer or mist trap capable of eliminating foreign matter 0 1 um or greater in diameter at the upstream Be sure to inspect and replace the filter at regular intervals Use this device within the operating differential pressure range Not doing so may cause hunting Continuous hunting could damage the valve Do not subject this device to pressure above its pressure resistance Doing so might damage it Be sure to use within the flow rate range stipulated in the product specifications To prevent excessive flow use a suitable means to control the supply pressure or use a throttle valve or the like to control the flow rate If the flow rate exceeds the upper limit both the flow rate display and the output voltage current may indicate considerably lower values than the actual flow rate If damage could result from the abnormal functioning of this device include appropriate redundancy in the system design CAUTION The valve on this device cannot completely shut a flow off If complete shutoff is required provide a shutoff valve se
53. e Table of compatible connectors all made by HIROSE ELECTRIC CO LTD Connector type Compatible connector Compatible contact Compatible wire model No model No Contact crimp type HIF3BA 20D 2 54C HIF3 2226SCC AWG 22 to 26 single wire allowed Cable clamp type HIF3BA 20D 2 54R AWG 28 flat cable only 3 7 Chapter 3 MOUNTING AND WIRING Connector signal names 20 flow rate setpoint SP output 4 to 20mA output 17 FLOW SP INPUT Setpoint flow rate SP voltage 0 to 5V 1 to 5V 0 to 20mA input 4 to 20mA input 16 MODE INPUT External 3 way switching 3 stage switching input input OPEN GND 5V OPENGND 12 Open collector non insulated output i 10 DB RS 485 communications DB Do not connect on models without 7 the communications function Connect two wires each in parallel 3 to the power supply to reduce 2 voltage drop caused by wiring 19 18 Wiring e Power supply POWER GND POWER GND 2 POWER 24V QO POWER 24V 24Vdc e RS 485 communications for models with optional RS 485 only DB lt 8 DB D DA SsG lt __ _4 or D GND 3 8 Chapter 3 MOUNTING AND WIRING e Alarm output event output Load OO EV2 OUT Load Ev1 OUT Load OO ALM OUT or D GND D Handling Precautions e Take special care that the event and alarm outputs do not exceed the output rating of the device Additionally when driving a relay use an appropriate coil surge ab
54. e outside diameter 1 4 141 4 material SUS316 1 4 Swagelok connection type SS 4 VCR 1 00032SC11 137 8 1 4 VCR connection type 7 15 Chapter 7 SPECIFICATIONS Models with integrated display MQV0050J 0200J 0500J g Modei m Le nsf ha Unit mm Mass Flow d lt HAHH 2 cna HEET 151 145 102 45 el A feee ERR Si GK Digital YAMATAKE Jack for loader 44 5 9 Jack for AC adapter OJ N 25 Land 50 2 3 4 16UNF D 27 05 gt 25 3 0 5 110 05 Bo 150 11 5 105 M4 screw 4 depth 5 min Yamatake Corporation ee Dee 150 Re 1 2 pipe coupling 2 Re 1 2 connection type Pipe coupling made by Swagelok 2 SS 810 1 8ST Applicable pipe outside diameter 1 2 material SUS316 150 1 2 Swagelok connection type 3 8 VCR pipe coupling made by Swagelok 2 SS 8 VCR 1 8STSC11 or equivalent 150 3 8 VCR connection type Chapter 7 SPECIFICATIONS Model with separate display MQV9005C 9020C 9200C 9500C 0002C 0005C 0020C 0050C e Body Unit mm 22 Bp Jack for SE loader Je E ER 2 9 16 18UNF 11 05 M4 screw 2 depth 5 min 9 16 18U
55. e display panel and then secure it to the display by tightening the screws 2 Fit the mask onto the display to mount it 3 5 Chapter 3 MOUNTING AND WIRING E Piping A CAUTION Mount this device horizontally However do not mount with the display facing down Doing so might cause measurement error or device failure Use the largest pipe possible to reduce pressure loss in the pipes for the MQV0050 J K 0200 J K 0500 J K If there is a large pressure loss in the pipes the pressure of the gas supply to this device operating differential pressure will be affected and will fluctuate greatly with the flow rate This could result in unstable control When making the pipe connections hold the hexagonal part of the connector section and turn the pipe to tighten After connecting check that there are no gas leaks If using Re connections take care not to coat with too much sealant Foreign matter or burrs in the pipes may also cause measurement errors D Handling Precautions e Make sure that the gas flows into the device in the direction indicated by the FLOW arrow on the body Otherwise the flow rate cannot be controlled correctly e Do not touch the pipe sections of a controller treated to be oil free with your bare hands Doing so will degrade the oil free treatment e Do not hold the top part of the body with your hand when connecting piping Doing so might deform the case Fasten and connect pipes to the body
56. e is different from the values graphed on the previous page calculate the flow rate using the appropriate equation below 1 When P2 P1 gt 0 53 Q C1 P1 P2 X P2 2 When P2 P1 lt 0 53 Q C2 P1 P1 Inlet absolute pressure kPa abs P2 Outlet absolute pressure kPa abs Absolute pressure gauge pressure 101 3kPa Q Flow rate L min standard mL min standard for MQV9200 C1 and C2 Constant values by model e MQV9005 e MQV9020 e MQV9200 e MQV9500 e MQVO0002 e MQV0005 e MQV0020 e MQV0050 B C e MQVO0O050 J K e MQV0200 e MQV0500 C1 0 7097 C2 0 4653 C1 0 7097 C2 0 4653 C1 3 123 C2 1 559 C1 0 03123 C2 0 01559 C1 0 03123 C2 0 01559 C1 0 3123 C2 0 1559 C1 0 3123 C2 0 1559 C1 0 5529 C2 0 2760 C1 2 212 C2 1 104 C1 2 212 C2 1 104 C1 4 115 C2 2 054 e When used with the gases other than air convert the flow rate using the following equation Flow rate Flow rate in air specific gravity of gas to be controlled Example When using the MQV0002 with CO2 inlet pressure 10kPa gauge and outlet pressure OkPa gauge 1 0 L min standard y 1 53 0 81 L min standard Specific gravity of standard compatible gas air is taken as 1 0 7 13 Chapter 7 SPECIFICATIONS 7 14 Relationship between differential pressure and outlet flow rate when valve of MQV0500 is fully closed air flow under conditions of outlet pressure OkPa gauge Flow
57. e zero adjustment is completed Chapter 6 MAINTENANCE AND TROUBLESHOOTING D Handling Precautions Perform flow rate zero adjustment with the actual flow rate stabilized to zero after completely replacing the inside of the flow path with the gas to be controlled Note e Flow rate zero adjustment can be performed by external contact input by selecting flow rate zero adjustment for 4 to 2 in the function setup For details on how to set up functions See Chapter 5 ADVANCED OPER ATION 6 3 Chapter 7 SPECIFICATIONS E Specificatins shown on next page 7 1 Chapter 7 SPECIFICATIONS MQV9005 9020 Model No MQV9005 MQV9020 Valve type Proportional solenoid valve Normally closed when de energized N C Standard full scale flow rate 4 5 mL min standard 20 L min standard Gas types Air nitrogen Nz oxygen O2 argon Ar Gas must be dry and not contain corrosive components chlorine sulfur acid The gas must also be clean not containing dust or oil mist Control 2 to 100 FS see Gas type and 1 to 100 FS see Gas type and control range table page 7 9 control range table page 7 9 Response Within 0 3s at setting 2 FS typ at standard differential Control starts from the fully closed status or the setting is changed pressure during control Accuracy at standard temperature and differential pressure Q flow rate Repeatability 0 5 Q flow rate 2 Pre
58. ection For example when the voltage output 0 to 5V or to 5V is selected in amp the voltage input is selected automatically Likewise when the current output 0 to 20mA or 4 to 20mA output is selected the current input is selected automatically 1 Internal reference 0 to 5V input External reference 0 to 20mA input 2 External reference 0 to 5V input External reference 0 to 20mA input 3 External reference to 5V input External reference 4 to 20mA input The internal reference 0 to 5V is used when the 5V output terminal voltage pin No 20 of this controller is used as the reference 1 5 Chapter 1 INTRODUCTION e Analog output type range selection function setup 8 7 04 Output can be set either to instantaneous flow rate PV or flow set value SP Furthermore a voltage current output range can be selected from 1 to 4 shown below by key operation Additionally 1 2 or 3 4 can be changed through the external 3 way switching input Combinations are switched because of linkage with the analog input range selection Instantaneous flow rate PV output Flow set value SP output 1 0 to SV output 1 0 to 5V output 2 1 to SV output 2 1 to 5V output 3 0 to 20mA output 3 0 to 20mA output 4 4 to 20mA output 4 4 to 20mA output 1 6 E Model selection guide MQv9005 9020 Standard control flow rate range method Connection Optional functions Chapter 1 INTRODUCT
59. ees 4 10 ADVANCED OPERATION E Setup mode transition operation cece cece cece eee e eee eeees 5 1 Functions eenen E E E E EE EEE 5 2 M Function setup items esseseseeseseseeseceseesecesecrceseeeeees 5 3 Parameters onserer E n connec EEE EEE tenes dieses TTS se ENEE 5 11 Device Information Display 5 15 M Setup method EE EE 5 15 RW Device information display Hem 5 16 Flow Rate Range se ce eee cece eee e eee e cece cence eee cence esecenees 5 17 MAINTENANCE AND TROUBLESHOOTING M Alarm code display cece eee e cece cece tence nee e eee nec ences 6 1 E Troubleshooting guide 6 2 Vil Chapter 7 SPECIFICATIONS MQV9200 9500 0002 22 cece eee cece eee e cece tence eect E innan 7 1 MQV0005 0020 0050 B C E 7 3 MQV0050 J K O200 0500 eee cece cece eee reece eee een eeeneee 7 5 Gas type and control range ee cece cece eee n cece cence eeeenenens 7 9 Relationship between differential pressure and flow rate 7 10 Optional parts Sold separately see ee cece cece cece eeeeeee 7 12 External dimensions e csccecccccaccdcsssessseseesecesecearseceees 7 13 vili Conventions Used in This Manual The following conventions are used in this manual DI Handling Precautions gt gt Handling Precautions indicate items that the user should pay attention to when using a CMQ V Series device Notes indicate information that might benefit the user Numbers
60. eous flow rate is displayed in the basic operation mode When keys are operated as described in the diagram below during instantaneous flow rate display the operation changes to the specified mode When the operating mode changes to Function setup mode or Parameter setup mode the specified setup can be changed In the Device information display mode you can check the statuses of major setup items gas type full scale flow rate reference temperature and communica tions address Basic operation Advanced operation OT Power ON DISP key Wkey ENT key 3s or more z Instantaneous flow rate display 5 2 page DISP key f key Ge or more Flow set value display 5 11 page DISP key DISP key 7 A 3 Totalized flow display ey eects Device information display mode 5 15 page DISP key Valve amperage display 5 1 Chapter 5 ADVANCED OPERATION 5 1 Functions This section describes how to set up functions 5 2 Setup method DISP key DISP key Basic operation Advanced operation Ee a a ll Power ON DISP key Wkey ENT key 3s or more Se Instantaneous flow rate display DISP key Flow set value display Function setup mode Parameter setup mode Device information display mode 4 key 3s or more key 3 Totalized flow display Akey 3s or more DISP key Valve amperage display Follow the procedure below to set functions such as event output type
61. essure 100kPa max 300kPa max 300 kPa max range T operating temperature 10 C lt T lt 40 C 10 C lt T lt 35 C 180kPa max 240 kPa max 40 C lt T lt 60 C 35 C lt T lt 50 C Power voltage 24Vdc Power voltage 24 0Vdc Pressure Standard differential pressure 20kPa Inlet pressure 200kPa Inlet pressure 200kPa gauge 20kPa gauge outlet outlet pressure OkPa gauge 3 pressure OkPa gauge Required differential pressure 10kPa 100kPa 150kPa 4 T7 T Pressure resistance 1MPa gauge allowable inlet pressure Temperature Standard operating temperature 23 C Si Allowable operating 10 to 60 C 10 to 50 C temperature range Allowable storage 20 to 70 C temperature range Humidity Allowable operating humidity 10 to 90 RH condensation not allowed range External Helium leak rate Within 1 x 10 Pa m s leaks 3 8 VCR connection type Flow rate Setup method 1 Key operation 2 External analog input setup 3 RS 485 communications 3 wire system See Gas type and control range table page 7 9 External analog input Input range 0 to 5Vdc 1 to 5Vdc 0 to 20mA 4 to 20mA switchable Input impedance 1MQ 10 7 8 Chapter 7 SPECIFICATIONS Model No MQVO0050 J K MQV0200 MQV0500 Flow rate Display method 7 segment LED 4 digits display Setup resolution See Gas type and control range table page 7 9 Indication accuracy at standard 1 1 5 FS 1 di
62. g to 99 999 999 for each unit Display alternates between first and last 4 digits The count can be reset by key operation or external contact input Use of external contact input makes it possible to remotely operate the start temporary stop and reset of totalization When resetting the integrated count by key operation the count restarts automatically after it has been reset On the other hand when resetting with the external contact input by contact ON the count restarts when the contact is turned OFF e Event lamp lighting output function setup 27 1 42 Two of the event types listed below can be selected Output ON delay time can also be set but delay cannot be set for totalizer pulse output Integrated flow event output when the integrated flow event setting is exceeded Totalized pulse output pulse can be output for each totalizing flow display unit OK output the control flow rate is within the set value allowable range Flow rate upper or lower limit output output in comparison with optional upper or lower limit flow rate set value Output mode The four modes control fully open control or fully open fully closed can be identified and output Chapter 1 INTRODUCTION 1 4 OK lamp ON output function setup 87 08 The OK lamp can be set to light when the control flow rate is within the set value allowable range This function is very handy for verifying at a glance whether or n
63. ge range Mounting orientation Mass Approx 1 2kg EN61326 1 2006 EN61326 2 3 2006 Applicable standards 7 7 Chapter 7 SPECIFICATIONS MQV0050 J K 0200 0500 b Model No MAVOO50 J K MQV0200 MQV0500 Valve type Proportional solenoid valve Normally closed when de energized N C Standard full scale flow rate 1 50 0 L min standard 200 L min standard 500 L min standard Gas types Air nitrogen Nz oxygen O2 argon Ar carbon dioxide CO2 natural gas 13A LNG 100 methane CH4 100 propane C2H6 100 butane Cas Gas must be dry and not contain corrosive components chlorine sulfur acid The gas must also be clean not containing dust or oil mist Control 1 to 100 FS see table Gas type and control range page 7 9 Valve output update cycle Response Within 0 7s at setting 2 FS typ at standard differential Control starts from the fully closed status or the setting is changed pressure during control Accuracy 1 1 5 FS 80 FS lt Q lt 100 FS at standard temperature 2 1 FS 40 FS lt Q lt 80 FS and differential pressure 3 0 5 FS 0 FS lt Q lt 40 FS Q flow rate 2 Repeatability 1 0 75 FS 80 FS lt Q lt 100 FS Q flow rate 2 0 5 FS 40 FS lt Q lt 80 FS 3 0 25 FS 0 FS lt Q lt 40 FS Temperature characteristics 0 08 FS max per 1 C Pressure characteristics 0 2 FS max per 100kPa Operating differential pr
64. git 80 FS lt Q lt 100 FS temperature and differential 2 1 0 FS 1 digit 40 FS lt Q lt 80 FS pressure Q flow rate 3 0 5 FS 1 digit 0 FS lt Q lt 40 FS Totalizing Display range function Display resolution 3 At the time the RUN key is pressed Analog Output type Instantaneous flow rate PV output or setting flow rate SP output output switchable output Output rating 30Vdc 30mA max open collector non insulated output Totalized pulse output width 100ms 10 when pulse output is selected in the function setup Totalized pulse output rate 0 001m3 1 pulse 0 01m 1 pulse 0 01m 1 pulse External Input type number of inputs External 3 way switching input OPEN GND 5V 1 switching External contact input 2 way switching 3 Alarm event Number of outputs Alarm output 1 Event output 2 input Required circuit type Non voltage contact or open collector Contact OFF terminal voltage External 3 way switching input 2 5 0 5V External contact input 2 8 0 5V Allowable ON contact resistance Allowable OFF contact resistance Allowable ON residual voltage output external 3 way switching input Communi RS 485 communications 3 wire system 6 cations Transmission speed 2400 4800 9600 19200 38400 bps Power Rating 24Vdc current consumption 400mA max 24Vdc current consumption 500mA max Allowable power voltage 21 6 to 26 4Vdc 1 21 6 to 26 4Vdc 1 21 6 to 26 4Vdc range T operating tempe
65. he table below External 3 way switching Selected SP input state D Handling Precautions e When the SP No is switched by the external 3 way switching input you cannot switch the SP No using A or W keys though you can switch the SP value 4 8 Chapter 4 BASIC OPERATION E Analog flow rate setup The SP value flow set value can be changed by analog voltage by selecting analog setting as the flow rate setting method in function setup 3 For details on how to set up the function see Chapter 5 ADVANCED OPERATION The setup voltage current range can be selected in the input range selection for analog setup 4 in the function setup The selection of voltage input current input is linked automatically with the set tings for analog output type and range selection X 15 in the function setup For example when current output is selected as analog output type and range selection in 4 5 the input type becomes current input type Then analog setup voltage current for SP value can be calculated by the equations below Function Input voltage current range Setup voltage current equation setup Internal reference 0 to 5V Setup voltage V Setting flow rate Full scale flow rate x External reference 0 to 20mA Reference output voltage Setup current mA Setting flow rate Full scale flow rate x 20 External reference 0 to 5V Setup voltage V Setting flow rate Full scale flow rate x 5 External reference 0 to
66. hed the target value press the ENT key gt gt The SP value is set and saved Note Advanced use direct setup function Control can be executed using an SP value currently being changed indicated by blinking display when the direct setup function is enabled for the instanta neous flow rate direct setup function ON OFF 2 in the function setup In this case the ENT key need not be pressed to enter the SP value D Handling Precautions e When switching the display by pressing the DISP key first press the ENT key to enter the SP value and switch the display For details on how to set up functions see Chapter 5 ADVANCED OPERATION Multi setup number of SPs in function setup 4 is 2 to 8 In multi setup up to eight SP values can be switched by key operation and by external contact input Follow the procedure below to change the SP No and SP value 1 Press the DISP key gt gt The display switches to SP No 5 to 57 7 after about one second 2 Press the A or W keys to change the SP No and press the ENT key gt gt The SP No is entered 3 Change the SP value by pressing the A or W keys You can move to the digit to be changed by pressing the lt key gt gt The digit currently being changed blinks while the SP value is being changed 4 When you have reached the target value press the ENT key to enter the new SP value gt gt The SP value and SP No are updated and the SP value of the selected SP No
67. hibited 1 2 Swagelok SS 810 1 8ST standard SS 810 1 8STSC11 oil inhibited 1 4 VCR SS 4 VCR 1 00032SC11 3 8 VCR SS 8 VCR 1 8STSC 11 or equivalent Chapter 3 MOUNTING AND WIRING A CAUTION Observe the following when using this device oil free model for oxygen gas e Piping should be carried out by a specialist skilled in handling oxygen gas e Use oil free pipes and parts e Be sure to remove foreign matter burrs etc from the pipes before connecting the device e Install a filter upstream of the device The device is a precision instrument Do not drop it or subject it to impact or it might be damaged E Mounting Installation locations Avoid mounting the device in the following locations Locations subject to high and low temperature and humidity Locations whose atmospheres contain large amounts of dirt and dust salt conductive substances such as iron powder water droplet oil mist or organic solvents Locations subject to direct sunlight and rain Locations directly subject to mechanical vibration or shock Locations close to sources of electrical noise Locations where strong magnetic or electrical fields are generated o Handling Precautions e The valve of this device cannot completely shut a flow off If complete shutoff is required provide a shutoff valve separately Changing the display direction models with integrated display only The display can be turned 180 in case the controller
68. ile changes are being made the flow set value can be changed quickly This function is useful when the user frequently changes set value for example when adjusting the flow set value during a trial run Chapter 1 INTRODUCTION e SP ramp control function setup C lt 7 This function is used to set the set value change ramp amount the rate of change per second to a constant value for the start of control and for set value changes With this function the set value change ramp amount can be set more precisely than with the slow start function Two different types of ramps can be set and there are the following 2 control modes e SP ramp control 1 In SP ramp up Ramp 1 In SP ramp down Ramp 2 e SP ramp control 2 In external contact OFF Ramp 1 In external contact ON Ramp 2 e SP limit function setup 35 The lower and upper limits of the set value range can be set to desired levels This prevents mistaken high low settings e Slow start function setup 7 Sudden changes in the controlled flow rate when control is started or when the set value is changed can be suppressed The control speed can be changed in eight stages within a range of about 1 to 6 seconds e Flow rate totalization function setup a4 1 42 MQV9200 9500 in 0 01L units MQV0002 0005 in 0 1L units MQV0020 0050 in IL units MQV0050 J K in 0 001m3 units MQV0200 0500 in 0 01m units Integrated flow count can be up to eight digits lon
69. in instru mentation should read this manual This manual outlines the product tells how to install wire and incorporate the product into instrumentation and describes its operation inspection and maintenance troubleshooting and hardware specifications CMQ V Series Digital Mass Flow Controller Communications Manual No CP SP 1197E Those using the communications functions of the CMQ V Series should read this manual The manual gives an overview of communications and describes transmis sion protocols CMQ V Series communications data troubleshooting and communications specifications Organization of the User s Manual This manual is organized as follows Chapter 1 Chapter 2 Chapter 3 Chapter A Chapter 5 Chapter 6 Chapter 7 INTRODUCTION This chapter briefly describes this device and its features and gives a model selection guide NAMES AND FUNCTIONS OF PARTS This chapter describes the names and functions of this device s parts MOUNTING AND WIRING This chapter describes installation mounting wiring and initial settings of this device BASIC OPERATION This chapter gives the basis of how to operate this device ADVANCED OPERATION This chapter describes how to set functions parameters controller information display and flow rate range MAINTENANCE AND TROUBLESHOOTING This chapter describes how to investigate and remedy trouble that may occur during operation
70. it decimal point setting last 4 digits position may vary depending on the model Cumulative flow event Seer to 9999 gt Flow rate totalization setting first 4 digits page 1 3 PV forced zero func 0 to 999 9s us tion delay SP upper limit flow rate 100 FS 0 to 100 F Unit L min standard 13 SE Se mL min an A the SP lower limit flow rate 0 F 0 to 100 FS MQV9005 9020 9200 a Hu bai CO Sr Ki ON Ok OFF ON ALM SP OFF A Le A K Py 3 Only items corresponding to the alarm type selected in flow rate alarm setup 4 in the function setup can be set 4 These alarms can be set when 1 to 3 is set for flow rate alarm setup type 5 and valve amperage alarm setup type Z lt 2 in the function setup 5 This cannot be set when 0 Not used OFF all times has been selected for 7 and Z G event output type assignment in the function setup 6 This can be set Only when 0 Conversion factor for each gas type set by the user has been selected for the 4 or 2 amp gas type selection 1 or 2 in the function setup 7 This can be set only if a suitable alarm type is selected in the 24 valve amperage alarm setup in the function setup 5 13 Chapter 5 ADVANCED OPERATION 8 This can be set only when 8 to 10 PV upper lower limit event 1 2 has been selected for the a m OO D 2 Vand 24 event output type assignment in the function setup 0
71. llation procedure A CAUTION Mount securely in order to prevent vibration Otherwise equipment failure could result Mount the device horizontally Do not mount it with the display facing down Doing so might cause measurement error or equipment failure e MQV9200 9500 0002 0005 0020 0050 Install the device with two M4 screws using the mounting holes on the base of the device e MQVO0050 J K 0200 0500 Install the device with four M4 screws using the mounting holes on the base of the device 04 5 27 110 Installing the separate display unit For models with a separate display 1 Make mounting holes in the panel according to the panel cutout dimensions Panel cutout dimensions 100 50 gt M4 2 2 Mount the display and secure it by tightening the screws 3 4 Chapter 3 MOUNTING AND WIRING Installing the front cover for the separate display unit For models with a separate display a front cover decorative frame can be mounted Use of this cover makes it possible to hide the mounting screws improving the appearance Items needed for installation e Front cover 81446858 001 1 set e Phillips screwdriver Panel Separate display unit Mounting screws cross recessed head machine screws Note e The front cover set includes one mask one plate and two mounting screws Procedure 1 As shown in the figure put the plate over th
72. n Basic operation is the state of the device during normal use In basic operation the contents of the 7 segment display can be changed to show instantaneous flow rate flow set value totalized flow value or amperage to the valve in normal operation mode Also how to set the flow set value is described in the basic operation part Advanced operation is for selecting various functions or setting parameters of the device When the device is used with the factory settings no setup operation is needed However to change the gas type set a range set an external contact input set upper and lower alarm limits or set communication conditions for models with communication functions it is necessary to configure various settings using advanced operation The diagram below gives an outline of operation flow Basic and advanced operation are described in Chapters 4 and 5 respectively Basic operation Advanced operation NT Power ON DISP key V key ENT key a 3s or more Instantaneous flow rate display DISP key Function setup mode Flow set value Parameter setup mode display DISP key Akey 3s or more Controller information Totalized flow display mode display 4 key 3s or more DISP key Valve amperage display Chapter 2 NAMES AND FUNCTIONS OF PARTS Display OK lamp Lit when the deviation between the flow set value and instantaneous flow rate is in the allowable range
73. nce refers to the use of the 5Vdc reference voltage pin No 20 on this device and is used when the setting value is set by an externally connected potentiometer Note e For details on how to assign external 3 way switching input functions see Chapter 5 ADVANCED OPERATION Example of wiring Chapter 3 MOUNTING AND WIRING HE lt sy 1 Instantaneous flowrate output Internal circuit _ i 5V 5mA max 20 FLOW OUT 19 A GND 18 Potentiometer FLOW SP INPUT 17 5k2 o 5V ov o MODE INPUT 16 OPEN DI3 Event output 2 Event output 1 Alarm output Output common DB lt DA lt SG Input output circuit POWER GND A Power circuit POWER GND 3 gt e POWER 24V 2 Power supply 24Vdc POWER 24V 1 AC adapter input o Handling Precautions Do not input any signal to pin No 5 The power circuit is isolated from the input output circuit inside this device Even though the analog GND and digital GND are connected internally always carry out the grounding wiring individually When the AC adapter plug is inserted into the AC adapter power supply terminal the power supply changes from the DC power supply to the AC adapter The former AC adapter 81446682 001 15Vdc 350mA cannot be used with this CMQ V Chapter 3 MOUNTING AND WIRING Connector terminal block Sometimes two or more connections m
74. ndefinite Therefore the control flow rate becomes indefi nite even if 0 1 1 Control continued was selected for amp in the function setup 6 1 Chapter 6 MAINTENANCE AND TROUBLESHOOTING e If the causes of the alarm are removed the alarm display turns off auto matically However when 2 2 Forced fully closed or 3 3 Forced fully open is selected for 5 in the function setup the alarm display and operating mode at alarm occurrence are retained even if the causes of the alarm are removed Alarm reset operation When the ENT key is kept pressed continuously while the instantaneous flow rate is being displayed the alarm is reset after 3 seconds have elapsed E Troubleshooting guide e The device is installed on the vertical or e Install in horizontal piping or use the Flow rate display does not become zero even with an actual zero flow rate Display is not ott even if the valve is fully closed Flow rate does not stabilize Poor accuracy inclined piping Condensation on sensor Zero point of sensor has deviated Foreign object on sensor Operating differential pressure range is exceeded Inlet pressure fluctuates greatly Regulator interference Large pressure loss in piping inlet pressure fluctuates greatly according to flow rate Check valve vibration Operating differential pressure setting function setup 35 does not match the actual operating differential pressure
75. ng flow rate output 0 to 20mA setting flow rate output 4 This setting can be made only for models with RS 485 communications 5 This setting cannot be made for the MQV0050 J K 6 This setting can be made only for the MQV9200 9500 0002 0005 o Handling Precautions e When the operational differential pressure setting 7 2 is changed to 0 Low differential pressure 50 50kPa always use the device with an operational differential pressure less than 100kPa Failure to do so may cause overshoot or hunting of the flow rate Chapter 5 ADVANCED OPERATION 5 2 Parameters This section describes parameter setup Basic operation Advanced operation IR H WE Power ON DISP key w key ENT key 3s or more Instantaneous flow rate display Function setup mode DISP key lt dkey 3s or more Flow set value display Parameter setup mode nen Weer Akey 3s or more Totalized flow display Device information display mode DISP key Valve amperage display Setup method Follow the procedure below to set constants such as flow rate deviation alarm upper and lower limit setting values and event output delay times 1 Press the DISP key several times to display the instantaneous flow rate gt gt The PV and L min lamps light mL min in MQV9200 2 Hold down the lt key for three seconds or more gt gt Item No 3 is displayed on the 7 segment display and the mode changes to the p
76. ngs in function setup 0 to 5V internal reference input 0 to 5V external reference input 1 to 5V external reference input 0 to 5V instantaneous flow rate output 0 to 5V instantaneous flow rate output 0 to 5V instantaneous flow rate output 0 to 5V internal reference input 0 to 5V external reference input 1 to 5V external reference input 1 to 5V instantaneous flow rate output 1 to 5V instantaneous flow rate output 1 to 5V instantaneous flow rate output 0 to 20mA external reference input 0 to 20mA external reference input 0 to 20mA external reference input 0 to 20mA instantaneous flow rate output 0 to 20mA instantaneous flow rate output 0 to 20mA instantaneous flow rate output 0 to 20mA external reference Input 0 to 20mA external reference input 0 to 20mA external reference input 4 to 20mA instantaneous flow rate output 4 to 20mA instantaneous flow rate output 4 to 20mA instantaneous flow rate output 0 to 5V internal reference input 0 to 5V external reference input 1 to 5V external reference input 1 to 5V setting flow rate output 1 to 5V setting flow rate output 1 to 5V setting flow rate output 0 to 20mA external reference input 0 to 20mA external reference input 0 to 20mA external reference input 0 to 20mA setting flow rate output 0 to 20mA setting flow rate output 0 to 20mA setting flow rate output 4 0 to 5V internal reference input 0 to 5V external reference input 1 to 5V external
77. odels seal material EPDM which can be used for ammonia acetylene or ethylene oxide gas are also available to manufacture Oxygen is the factory setting By changing the setting this model can be used for air nitrogen argon carbon dioxide CO2 city gas 13A propane 100 methane 100 or butane 100 However once this device has been used for gas other than oxygen never reuse it for oxygen The flow rate ranges in the table are for use of this device with air The controllable flow range may vary depending on the type of gas See Gas type and control range page 7 11 When oxygen is selected as the gas type selection 1 gas contacting parts treated to be oil free must be selected for Optional function 4 MQVO0050 J K 0200 0500 Notes 1 12 3 SA D 6 Standard control flow rate range Gas type Connection method Optional functions Chapter 1 INTRODUCTION Description Append ed No Air nitrogen 3 4 Oxygen 3 4 Without optional functions Without optional functions Model with RS 485 communications CPL Without optional functions Gas contacting parts treated to be oil free 5 Without optional functions gt Y With inspection certificate With traceability certificate o Product version The notations mL min standard and L min standard indicate the volume flow rate
78. oducts for a period exceeding ten 10 years unless otherwise stated in specifications or instruction manuals 5 Recommendation for renewal Mechanical components such as relays and switches used for Yamatake products will reach the end of their life due to wear by repetitious open close operations In addition electronic components such as electrolytic capacitors will reach the end of their life due to aged deterioration based on the conditions or environment in which such electronic components are used Although acceleration of the above situation varies depending on the conditions or environment of use the number of open close operations of relays etc as prescribed in specifications or instruction manuals or depending on the design margin of your machine or equipment you are required to renew any Yamatake products every 5 to 10 years unless otherwise specified in specifications or instruction manuals Field instruments sensors such as pressure flow level sensors regulating valves etc will reach the end of their life due to aged deterioration of parts For those parts that will reach the end of their life due to aged deterioration recommended replacement cycles are prescribed You are required to replace parts based on such recommended replacement cycles 6 Other precautions Prior to your use of Yamatake products you are required to understand and comply with specifications eg conditions and environment of use precautions warnings
79. of this device SPECIFICATIONS This chapter describes the device s specifications and external dimensions vi Contents SAFETY PRECAUTIONS The Role of This Manual Organization of the User s Manual Conventions Used in This Manual Chapter 1 Chapter 2 Chapter 3 Chapter 4 4 1 4 2 4 3 Chapter 5 5 1 5 2 5 3 5 4 Chapter 6 INTRODUCTION BUA RF OCU CTI OND EE 1 1 E CTT 1 1 2 el EE 1 2 M Model selection guide 1 7 E Basic operation and advanced operation see ee cece e eens 1 9 NAMES AND FUNCTIONS OF PARTS MOUNTING AND WIRING ME Mounting eee cece cece cece eect cece eee eee n eee cence eee enecenees 3 2 E PIPING seiciees tees geseet ER EE DEE EE ebe 3 6 WW EE 3 7 BASIC OPERATION Switching Displays cecece cece e cece ence cence ences eeeeeneeeeees 4 1 WR Basic operation cece cece cece cece e cece tence eee n eee eeeeees 4 1 Setting the Flow Ral ics lt iscsssvssecransersaaiitaeedacsdecnsesisvaameennses 4 4 HM Digital flow rate setup eee eee eee eee e eee e tener e eee eeeees 4 5 E Flow rate setup by external contact input sssssesssseseseseess 4 7 E Flow rate setup by external 3 way switching Input 4 8 M Analog flow rate Setup eee cece e eee e eee e cece eee e ence eeeees 4 9 Selecting the Operating Mode 4 10 M Operating mode selection eecee eee ee cee cee cee eeeeeeeeees 4 10 E Operating mode display eececece cece een cee ee eecnceeee
80. on Setup Item and Factory Remarks Description Setting 8 RUN key operation and operation mode selection when power turned ON Flow rate setup method SP setup method selection Number of flow set value number of SPs selection Input range selection of analog setup analog SP input range selection 0 1 Key lock disabled Settings other than flow rate setting SP are key locked All settings are key locked RUN key disabled Operation starts in the control mode when the power is turned ON RUN key enabled 1 Operation is started up in the operating mode used before power shut down when the power is turned ON RUN key enabled 2 Operation is started up in the fully closed mode when the power is turn ed ON Digital setup set by key operation or communications Analog setup set by external analog input voltage Number of SPs 1 57 5 only Number of SPs 2 55 5 SF 3 Number of SPs 3 5F 5 to SF 2 Number of SPs 4 SF i to SF 3 Number of SPs 5 SF 8 to 5 4 Number of SPs 6 5F 0 to SF 5 Number of SPs 7 SF i to 5F 5 Number of SPs 8 5F G to SF 7 1 Analog output selection is set at voltage output G6 0 1 4 or 5 0 to 5V internal reference input 0 to 5V external reference input 1 to 5V external reference input 2 Analog output selection 0 1 2 is set at current output
81. on setup 0 45 0 4 amp a The alarm output can be set for high and low deviations in the flow set value e rt and instantaneous flow rate Additionally an alarm judgment delay time can also be set If a flow rate alarm occurs or if an alarm occurs during self diagnosis of this controller the valve can be forced fully closed or opened Handling Precautions e The valve on this device cannot completely shut off e If complete shutoff is required provide a shutoff valve separately e Automatic reset of cumulative count at start of control function function setup CAN Start of control and reset of totalized flow count can be done simultaneously by a single action by key or external switching input Combining this function with the automatic shut off function described above is handy for shutting the valve off in cases where a fixed totalized flow amount is counted repeatedly e Analog scaling function setup lt 24 This function is used to optionally change the flow rate between 10 FS and 100 FS corresponding to 100 FS analog input output 5V or 20mA e Analog input flow set value range selection function setup 5 In analog setup the desired input range can be selected from those shown below either by key operation or by external 3 way switching input When doing so the voltage input and current input are selected automatically as they are linked with the settings of function setup amp analog output type sel
82. ontrol 1 to 100 FS see Gas type and control range table page 7 9 Response Within 0 3s at setting 2 FS typ at standard differential Control starts from the fully closed status or the setting is changed pressure during control Accuracy 1 1 FS 50 FS lt Q lt 100 FS at standard temperature 2 0 5 FS 0 FS lt Q lt 50 FS and differential pressure Q flow rate 2 Repeatability 1 0 5 FS 50 FS lt Q lt 100 FS Q flow rate 2 0 25 FS 0 FS lt Q lt 50 FS Temperature characteristics 0 06 FS max per 1 C Pressure characteristics 0 2 FS max per 100kPa Pressure Standard differential pressure 200kPa Inlet pressure 200kPa gauge outlet pressure OkPa 3 gauge Required differential pressure 50kPa 5kPa 50kPa Operating differential 300kPa max pressure range 5 Pressure resistance 1MPa gauge allowable inlet pressure Temperature Standard operating 23 C temperature 3 Allowable operating 10 to 60 C temperature range Allowable storage 20 to 70 C temperature range Allowable operating humidity 10 to 90 RH condensation not allowed range External Helium leak rate Within 1 x 10 Pa m s leaks 1 4 VCR connection type Flow rate Setup method 1 Key operation 2 External analog input setup 3 RS 485 communications 3 wire system Setup resolution See Gas type and control range table page 7 9 External analog input Input range 0 to 5
83. or 1 Heater voltage error Sensor trouble foreign object on sensor condensation on sensor influx of hydrogen or helium gas etc Sensor error 2 Measured flow rate signal error Sensor trouble foreign object on sensor back current etc If items under causes do not help ask for repair Ask for repair if the delay is nota problem Set parameter setup again Set parameter setup again If you close the gas continuously from the outside set the setting flow rate to zero 0 or put the valve in the fully closed mode Remove the probable causes If the device does not return to normal operation even after the power has been shutdown for a while ask for repair Adjustment data error Data corrupted due to Ask for repair electrical noise Sensor calibration data error Data corrupted due to Ask for repair electrical noise aa Valve overheat prevention The gas is forcibly closed out User setup data error Power shut off during user setup data writing D Handling Precautions e The alarm code is displayed only when the instantaneous flow rate or totalized flow is displayed D e Fit valve overheat prevention limit operation is activated only in the MQV0050 J K 0200 J K 0500 J K At this time the current to the valve is forcibly limited regardless of the selection of amp in the function setup e Ifa sensor error ALG or ALE occurs the flow rate measurement value will become i
84. ot there is a proper response to a new set value after its value is changed OK lamp output can also be used as an interlock signal for subsequent processes by assigning it to event output and including it in a sequence program PV filter function setup C 23 This function is used to average the instantaneous flow rate control flow rate detected value Use of this function makes it possible to suppress effects of slight pressure fluctuations Control dead band setup prevention of valve operation function setup This function is used to stop the valve from driving as long as the control flow rate is within the OK range Additionally the OK range width of dead band can be set to the desired level Valve amperage display function setup C 22 The electric current supplied to the valve can be displayed in units of 0 0 to 100 0 Additionally use of the valve amperage alarm detection function makes it possible to detect an inlet pressure change or clogging of the piping at the outlet Ma Mi al Gas type external switching function setup X 6 to 1 12 1 5 Two preset types of gases including one with a user determined gas type 5 conversion factor can be switched by external contact input Control flow rate range external switching function setup 6 to i2 I o cial EH LCE Two preset control flow ranges can be switched by external contact input PV forced zero function setup lt 4 This function fo
85. p count See the table in note 3 0 to 5V 0 to 5V 1 to 5V Fully closed control fully open voltage range simultaneous external switching of 5 and 3 CD L 0 mode 2 Chapter 5 ADVANCED OPERATION Display Item Item Description Setup Item and Factory Remarks Description Setting External contact 1 Not used For details on how to switch input function Reset totalized flow count three or more SP Nos see the assignment Stop totalizing flow description of the multi setup 2 way switching count page 4 5 External contact 3 3 Switching of SP No The 43 analog digital input function Switching of instantaneous setting is shown when the assignment flow rate setup method contact is ON 2 way switching Valve forced fully closed Slow start ON must be When the totalized flow count reaches the totalized flow event setting the valve is closed fully This totalized flow event preset value can be set in the parameter setup mode gt 5 2 Parameters page 5 11 When control is resumed from the fully closed operating mode the totalized flow count is auto matically reset Automatic valve Function disabled shut off when the Function enabled totalized flow event occurs On off of totalized Function disabled flow reset function Function enabled at start of control Set the alarm flow rate in the parameter setup mode gt 5 2 Parameters page 5 11 Flow rate alarm Func
86. parately When the external valve is closed it is necessary also to fully close the valve of the device using either of the following methods e Set the flow rate setpoint to zero e Make the valve operation mode to fully closed If this valve remains in normal control status when the external shutoff valve is closed zero flow rate there will be an excessively large flow as soon as the external shutoff valve is opened For the MQV0050 J K MQV0200 J K and MQV0500 J k if the external shutoff valve is closed continuously for 5 minutes or more in control mode or with the valve forced fully open the valve overheating limit AL71 will be activated and the current to the valve will be forcibly limited Before connecting pipes with Swagelok or VCR connections check the precautions in the instruction provided by the connecting joint manufacturer When separately purchasing a connecting joint use the following made by Swagelok Co Ltd 1 4 Swagelok SS 400 1 6ST standard SS 400 1 6STSC11 oil inhibited 1 2 Swagelok SS 810 1 8ST standard SS 810 1 8STSC11 oil inhibited 1 4 VCR SS 4 VCR 1 00032SC11 3 8 VCR SS 8 VCR 1 8STSC11 or equivalent Observe the following when using the device oil free model for Q oxygen gas e Piping should be carried out by a specialist skilled in handling oxygen gas e Use oil free pipes and parts e Be sure to remove foreign matter burrs etc from the pipes before connecting the device
87. per minute converted to 20 C one atmosphere 101 3kPa abs The reference temperature can also be changed to 0 C 25 C or 35 C Air nitrogen is the factory setting By changing the setting this model can be used for argon carbon dioxide CO2 city gas 13A LNG 46MJ m3 city gas 13A LNG 45MJ m3 propane 100 methane 100 or butane 100 Additionally special gas models seal material EPDM which can be used for ammonia acetylene or ethylene oxide gas are also available to manufacture Oxygen is the factory setting By changing the setting this model can be used for air nitrogen argon carbon dioxide CO2 city gas 13A propane 100 methane 100 or butane 100 However once this device has been used for a gas other than oxygen never reuse it for oxygen The flow rate ranges in the above table are for use of this device for air The controllable flow range may vary depending on the type of gas See Gas type and control range page 7 11 When oxygen is selected as the gas type selection 1 g must be selected for Optional function 4 as contacting parts treated to be oil free The MQV0050 J K is for low differential pressure and is controllable to a high flow rate range with lower differential pressure than the MQV0050 B C 1 9 Chapter 1 INTRODUCTION E Basic operation and advanced operation This device provides two kinds of operations basic operation and advanced operatio
88. psed Chapter 4 BASIC OPERATION E Flow rate setup by external contact input Advanced use When assigning 3 Switching of SP No at external contact input function assign ment to 2 in the function setup up to eight SP values can be changed by means of external contact ON and OFF combinations 1 When the number of preset SP values is set to 5 to 8 in function setup C ON Assign 3 Switching of SP No to all of amp to in the function setup P Input 3 DI3 Input 2 DI2 Input 1 DI1 Selected SP External contact input state 2 When the number of SP values is set to 3 or 4 in function setup 24 Hi Assign 3 Switching of SP No to two of to X Z in the function setup Selected SP SS DL 3 When the number of SP values is set to 2 in function setup D n Hi Assign 3 Switching of SP No to one of X to 2 in the function setup PF Input 1 to 3 DI1 to DI3 Selected SP contact input state PON BEL D Handling Precautions e When changing the SP number by external contact input the A and e keys cannot be used but the SP value can be changed 4 7 Chapter 4 BASIC OPERATION WR Flow rate setup by external 3 way switching input Advanced use When 2 Switching of SP No is assigned at external 3 way switching function sper 1 1 in the function setup three SP values 57 4 to 5 2 can be changed with the external 3 way switching input as described in t
89. rature ripple 5 max 10 CsT lt 40 C 10 CsT lt 35 C 2 23 5 to 26 4Vdc 2 23 5 to 26 4Vdc 40 C lt T lt 60 C 35 C lt T lt 50 C ripple 5 max ripple 5 max Mass Applicable standards 7 9 Chapter 7 SPECIFICATIONS 7 10 Notes 1 2 3 4 D 6 we The notations mL min standard and the L min standard refer to volumetric flow rate per minute after conversion to 20 C 1 atmosphere The reference temperature can also be changed to 0 C 25 C or 35 C in the flow rate display unit selection The controllable flow rate range varies according to the gas type See Gas type and control range table This table shows the accurate for air nitrogen and oxygen for oxygen model For details about accuracy for other gas types contact Yamatake Temperature and pressure mean those during calibration Differential pressure required for obtaining full scale flow rate Outlet pressure 0 0MPa gauge Operation is possible even below the required differential pressure but the controllable flow rate range becomes narrower See Relationship between differential pressure and flow rate page 7 10 Only models with RS 485 communications option The maximum operating differential pressure of the MQV0200 0500 may also vary depending on the power voltage For details see the graph below Relationship between power voltage and maximum operating differential pressure in MQV020
90. rcibly sets the detected instantaneous flow rate to 0 zero after the delay time elapses when the flow rate setpoint has been set to 0 zero or the valve mode has been changed to fully closed This function makes it possible to ignore the deviation of the instantaneous flow rate zero point caused by inclination of the piping or the like Flow rate display unit change function setup 37 This function is used to change the flow rate display unit to L min or mL min of the MQV9200 9500 0002 0005 When multiple devices are used side by side this function can make the flow rate display units uniform PV display decimal point change function setup 3 This function is used to shift the decimal point position of the instantaneous flow rate display one digit left or right When multiple devices are used side by side the number of digits after the decimal point of the flow rate display can be made uniform Chapter 1 INTRODUCTION Valve forcibly open or close function setup 2 84 to iz This function is used to forcibly open or close the valve fully by key operation external contact input or external 3 way switching input Automatic shut off function setup 3 1 15 The valve can be shut off automatically under the following conditions 1 When the totalized flow count reaches the preset value 2 When one of the alarms including flow rate alarms is triggered H ALM alarm lamp ON output valve shut off functi
91. re applied to the relationship between the valve amperage and the flow rate So to use the valve amperage alarm function first sufficiently test under operating conditions to check the valve amperage range and then determine the alarm amperage setting 5 14 Chapter 5 ADVANCED OPERATION 5 3 Device Information Display This section describes device information display Basic operation Advanced operation NT Power ON DISP key key ENT key 3s or more Frame Instantaneous flow rate display Function setup mode DISP key 4 key 3s or more DISP key DISP key i 4 key 3s or more m e Totalized flow display Device information display mode DISP key Valve amperage display WR Setup method Four items of those set on the device that is gas type full scale flow rate refer ence temperature and communications address are displayed sequentially 1 Press the DISP key several times to display the instantaneous flow rate gt gt The instantaneous flow rate is displayed and the PV and L min lamps light the mL min lamp lights on the MQV9200 2 Hold down the A key for three seconds or more gt gt The HRS is displayed on the 7 segment display and the mode changes to the device information display mode 3 Release the A key once 4 Press the A or W key to select the desired setting gt gt When releasing the key the display item and currently set value are alternately
92. ront cover sold separately hides the mounting screws of the separate display on the panel surface and improves the appearance e Various additional functions The functions listed below are all standard All CMQ V models have the functions described below For function setup see Chapter 5 ADVANCED OPERATION e Multi setup function setup 1 Control flow range setting function setup 24 2 5 Quickly switch to one of eight preset flow set value by key operation or external input If Switching of SP No is set to external 3 way switching input up to three set values can be switched Gas type switching function setup 28 26 The gas type to be used can be selected from the standard compatible gases by key operation Additionally two kinds of gas type settings can be changed by external contact input Gas type setup function setup C The user can set gas type conversion factors for gases other than the standard compatible gases and for mixed gases Zo The control flow range can be changed to the desired range 10 to 100 of the flow range at factory setting in units of 1 FS The setup and display resolution levels can be improved by reducing the control flow range Additionally two kinds of control flow ranges can be switched through external contact input Direct setup function setup 2 6 When changing the flow set value by key input the controlled flow rate can follow the set value wh
93. se time is the time required for the controlled flow rate to reach 2 of the set value starting from the fully closed state or from when the set value is changed during control e Low differential pressure operation CMQ V controllers can operate at a low differential pressure of 50kPa or less e Wide control range Wide control range of to 100 FS 2 to 100 FS for the MQV9005 e Wide product line up There are two types of models those with integrated display and those with separate display On models with separate display the display unit can be detached to allow remote operation via the dedicated 2m cable 1 1 Chapter 1 INTRODUCTION E Functions 1 2 e User friendly Runs on a general purpose 24Vdc power supply and the CMQ V s internal power circuit and input output circuits are isolated When multiple CMQ V are driven through the analog inputs and outputs as with a PLC they can all use a common power supply even if the PLC s analog modules are not isolated by channel Therefore even without individual power supplies for each device problems with one circuit do not affect adjacent ones Also provided is a handy AC adapter sold separately for easy use in the laboratory e Display direction can be changed models with integrated display only The direction of the display can be rotated 180 to match the direction of the gas flow in case it was mounted the other way e Improved design separate display model A f
94. sorption diode built in relay Failure to do so might cause the device to malfunction e External contact input e EI D13 DIS Di 9 or D GND D Handling Precautions e When switching by relay contact use an appropriate relay intended for micro current use with gold contacts Failure to do so could cause faulty contact resulting in malfunction e Analog I O Flow out 0 to 5V 1 to 5V 0 to 20mA 4 to 20ma Output A GND FLOW SP INPUT 0 to 5V 1 to 5V Oto 20mA 4to20ma MPU e When using potentiometer 0 to 5V 5V A GND 0V FLOW SP INPUT 3 9 Chapter 3 MOUNTING AND WIRING 3 10 e External 3 way switching input 5V A GND 0V 5V eem MODE INPUT OPEN D Handling Precautions e When switching by relay use an appropriate relay intended for micro current use with gold contacts Failure to do so could cause faulty contact resulting in malfunction DV Operation of external 3 way switching input Input state of pin No 16 OPEN GND 5V Assigned function Switching of operating mode 1 Fully closed Fully open Switching of operating mode 2 Fully closed Fully open Switching of totalizing Continue counting Reset Stop counting operation Switching of analog Internal External External I O voltage range reference reference reference 0 to 5V or 0 to 5V or 1 to 5V or external 0 to 20mA 4 to 20mA reference 0 to 20mA 0 to 5V 0 to 20mAI0 to 5V 0 to 20mA 1 to 5V 4 to 20mA Internal refere
95. ssure Standard differential pressure 100kPa Inlet pressure 100kPa gauge outlet pressure OkPa 3 gauge Required differential pressure 5kPa 30kPa 4 Operating differential 300kPa max pressure range 25 Pressure resistance 1MPa gauge allowable inlet pressure Temperature Standard operating 23 C temperature 3 Allowable operating 10 to 60 C temperature range Allowable storage 20 to 70 C temperature range Allowable operating humidity 10 to 90 RH condensation not allowed range External Helium leak rate Within 1 x 10 Pa m s leaks Flow rate Setup method 1 Key operation 2 External analog input setup 3 RS 485 communications 3 wire system See Gas type and control range table page 7 9 External analog input Input range 0 to 5Vdc 1 to 5Vdc 0 to 20mA 4 to 20mA switchable Input impedance 1MQ 10 7 2 Chapter 7 SPECIFICATIONS Model No MQV9005 MQV9020 Flow rate Display method 7 segment LED 4 digits display See Gas type and control range table page 7 9 Indication accuracy 1 FS 1 digit at standard temperature and differential pressure Totalizing Display range 0 00 to 999 999 99L 0 00 to 999 999 99L Totalized count backup 1 Every 50mL 1 Every 200mL timing 2 Every hour from the previous backup 3 At the time the RUN key is pressed Analog Output type Instantaneous flow rate PV output or setting flow rate SP output output switchable Total output
96. sure kPa Differential pressure kPa 60 1 2 3 S 50 F 4 bal 2 40 Z a E 20 Outlet pressure condition 1 150kPa gauge 4 2 10 I 2 50kPa gauge 3 OkPa gauge 7 4 50kPa gauge 0 j L L L L L L 0 10 20 30 40 50 60 Differential pressure kPa MQV9200 9500 0002 MQV9200 MQV9500 MQV0002 240 1 0 2 4 a 2 3 1 E 3 1 2 3 S 4 S on SC 4 S A S 4 g A a 160 5 LA S 16 2 06 D E E E 3 120 E S 12 E a a a 80 Outlet pressure condition Eet d Outlet pressure condition 0 8 Outlet pressure condition 1 150kPa gauge gt l 1 150kPa gauge 1 150kPa gauge GE 2 50kPa gauge os 2 50kPa gauge _ 8 2 50kPa gauge 3 _OkPa gauge 3 _OkPa gauge 0 4 3 _OkPa gauge 4 50kPa gauge 7 4 50kPa gauge 4 50kPa gauge o LLJ LI l I 0 0 on Lr ce 0 0 fo ot td 0 10 20 30 40 50 60 0 2 4 6 8 10 0 10 20 30 40 50 60 Differential pressure kPa Differential pressure kPa Differential pressure kPa MQV0005 0020 0050 B C MQV0005 MQ
97. there exists a possibility that parts and machinery may break down You are required to provide your Equipment with fool proof design fail safe design anti flame propagation design safety design or the like so that the said Equipment may satisfy the level of the reliability and safety required in your use whereby preventing any occurrence of physical injuries fires significant damage and so forth 3 Precautions and restrictions on application Yamatake products other than those explicitly specified as applicable e g Yamatake Limit Switch For Nuclear Energy shall not be used in a nuclear energy controlled area radiation controlled area Any Yamatake products shall not be used for with medical equipment In addition you are required to conduct a consultation with our sales representative and understand detail specifications cautions for operation and so forth by reference to catalogs specifications instruction manual etc in case that you intend to use Yamatake product for any purposes specified in 1 through 6 below Moreover you are required to provide your Equipment with fool proof design fail safe design anti flame propagation design and other designs of protection safety circuit on your own responsibility to ensure the reliability and safety whereby preventing problems caused by failure or nonconformity 1 For use under such conditions or in such environments as not stated in technical documents including catalogs specifica
98. through the key input communications external contact input or external 3 way switching input One flow set value can be set in the single setup while up to eight flow set values can be set in the multi setup In the analog setup the flow rate is set through the external voltage current input The factory setting is digital setup Either digital setup or analog setup is selected as the flow rate setup method CC 3 in the function setup 0 Digital setup flow rate is set through the key input or communication 1 Analog setup flow rate is set through the external analog voltage current For further detailed setup make selections in 2 4 to 45 in the function setup For details on function setup see Chapter 5 ADVANCED OPERATION DI Handling Precautions 4 4 e Setup by communications is available only for models with RS 485 com munications Chapter 4 BASIC OPERATION E Digital flow rate setup Up to eight SP values can be set on this device The operating procedure may vary depending on the number of SP values to be set Single setup number of SPs in function setup 1 4 is 1 Follow the procedure below to change the SP value 1 Press the DISP key gt gt The SP flow rate setpoint is shown on the 7 segment display 2 Change the SP value by pressing the A or W keys You can move to the digit to be changed by pressing the lt key gt gt The digit currently being changed starts blinking 3 When you have reac
99. tion and instruction manuals 2 For use of specific purposes such as Nuclear energy radiation related facilities For use outside nuclear energy controlled areas For use of Yamatake Limit Switch For Nuclear Energy Machinery or equipment for space sea bottom Transportation equipment Railway aircraft vessels vehicle equipment etc Antidisaster crime prevention equipment Burning appliances Electrothermal equipment Amusement facilities 3 Supply systems such as electricity gas water supply systems large scale communication systems and traffic air traffic control systems requiring high reliability 4 Facilities that are to comply with regulations of governmental public agencies or specific industries 5 Machinery or equipment that may affect human lives human bodies or properties 6 Other machinery or equipment equivalent to those set forth in items 1 to 5 above which require high reliability and safety 4 Precautions against long term use Use of Yamatake products including switches which contain electronic components over a prolonged period may degrade insulation or increase contact resistance and may result in heat generation or any other similar problem causing such product or switch to develop safety hazards such as smoking ignition and electrification Although acceleration of the above situation varies depending on the conditions or environment of use of the products you are required not to use any Yamatake pr
100. tion disabled setup type Only upper limit alarm used Only lower limit alarm used Upper lower limit alarm used External contact 3 Valve forced fully open selected in Z 7 Slow start input function Switching of slow start when the contact is ON assignment operation or switching of Similarly in case of SP ramp 2 way switching instantaneous SP ramp control SP ramp control 1 or 2 control operation must be selected ini lt 7 Switching of operating Ramp control when the mode contact is ON control by contact ON 6 8 If the forced fully closed forced fully closed by and fully open are input contact OFF from two sources at the same 9 Flow rate zero adjust time both inputs become ment invalid 10 Switching of gas type Set the operation mode to full setup close or set the flow rate to zero 11 Switching of flow rate range and perform the contact ON 12 Switching of SP ramp operation for a minimum of 13 Alarm reset 10 seconds See page 6 2 for the details 0 8 becomes active by contact OFF and C 24 becomes active by contact ON 24 becomes active by contact OFF and 25 becomes active by contact ON 12 Parameter setup ramp 1 is selected when the contact is OFF Ramp 2 is selected when the contact is ON 13 All alarm detections are cancelled while the contact ON is being continued a 5 5 Chapter 5 ADVANCED OPERATION 5 6 Display Item Item Description Setup Item and Factory Remarks
101. ust be made to the same pin during wiring In this case use a connector terminal block If you need a 20 core cable for the connectors on the device and connector terminal block contact Yamatake or your dealer Note e Recommended connector terminal block Manufacturer Toyo Giken Model PCN 1H 20 Mounting connector HIROSE ELECTRIC CO LTD HIF3BA 20PA 2 54DSA Compatible connector other side HIROSE ELECTRIC CO LTD HIF3BA 20D 2 54R D Handling Precautions e For details regarding the cable with connector on both ends contact Yamatake Corporation The optional dedicated connector 81446681 001 or 81446951 001 cannot be used to connect to the connector ter minal block e The specifications of the recommended connector terminal block are subject to change Contact the manufacturer beforehand for details This terminal block can be mounted directly on a DIN rail Terminal block No Cable with connector on both ends Connector terminal The following table shows the correspondence between connector pin Nos and terminal block Nos 3 12 Chapter 4 BASIC OPERATION 4 1 Switching Displays A CAUTION Do not operate the console keys using a sharp object such as a mechanical pencil or S screwdriver Doing so might damage the console E Basic operation Basic operation is used to change the display to instantaneous flow rate PV flow set value SP totalized flow value or valve amperage Normally
102. when the power is turned ON the instantaneous flow rate is displayed in basic operation mode When this is the case operating the DISP key changes the contents of the 7 segment display as described below Power ON Instantaneous flow rate display PV and L min lamps lit DISP key Flow set value display SP and L min lamps lit DISP key Totalized flow display L lamp lit DISP key Valve amperage display SP PV L and L min lamps go out DISP key D Handling Precautions e H there is no operator input for approximately 10 seconds while the flow set value is being displayed the display automatically reverts to the instantaneous flow rate display e On the MQV9200 the mL min lamp replaces the L min lamp On the MQV0050 J K 0200 0500 the m lamp replaces the L lamp Indicating instantaneous flow rate PV display When the power is turned ON the PV and L min lamps light and the instantaneous flow rate is indicated on the display D Handling Precautions e When the operating mode is set to fully closed and the flow rate is zero and when the operating mode is switched to the control mode or Ei fully open mode the operating mode of F an Fiiz is displayed for about one second e When an alarm occurs the alarm code and the PV are displayed alter nately 4 1 Chapter 4 BASIC OPERATION Indicating the flow set value SP display If DISP key is pressed while the instantaneous flow rate is displayed the PV lamp
103. wo seconds or more while the totalized flow value is displayed Note Advanced operation e Totalized flow event output function When 1 Totalized flow rate count up ON is selected as the event output type for function setup 7 or G8 the event output turns ON when the totalized flow value reaches the totalized flow event setting This threshold value for the totalized flow event is set in the parameter setup mode e Totalized flow event automatic valve shut off function When 1 Function enabled is set for the automatic valve shut off function in function setup 3 the valve will be automatically closed fully if the total ized flow value reaches the preset value The threshold value for the totalized flow event is set in the parameter setup mode For details on function setup and parameter setup see Chapter 5 ADVANCED OPERATION 4 2 Chapter 4 BASIC OPERATION Valve amperage display If DISP key is pressed while the totalized flow is displayed the PV SP L and L min lamps go out and the electrical current to the valve 4 4 to DP indicated on the 7 segment display Note Advanced operation e When 1 Only upper limit alarm used 2 Only lower limit alarm used or 3 Upper and lower limit alarm used is selected for valve amperage alarm type 24 in the function setup the valve amperage alarm will be activated if the valve current exceeds the upper limit set value or goes below the lower limit value The valve
104. xternal 3 way switching input function assignment 4 in the function setup the operat ing mode can be changed through the external 3 way switching input For details on how to set up functions see Chapter 5 ADVANCED OPERATION 4 10 Chapter 4 BASIC OPERATION o Handling Precautions e When 0 RUN key disabled is selected for 2 RUN key operation and operating mode selection when power turned ON in the function setup the operating mode is not changed even though the RUN key is pressed e When operating mode change 5 6 or 8 is selected for external con tact input function assignment C to X 2 in the function setup changes by external contact take precedence over RUN key operation In the same manner when operating mode change 1 or 5 is selected for external 3 way switching function 4 in the function setup the external 3 way switching input takes precedence over the RUN key oper ation e The fully open mode cannot directly be changed to the control mode To make the change press the RUN key to change the fully open mode to the fully closed mode After that press the RUN key again to change the fully closed mode to the control mode Chapter 5 ADVANCED OPERATION The advanced operation provides three kinds of modes Function setup mode Parameter setup mode and Controller information display mode WR Setup mode transition operation Normally when the power is turned ON the instantan

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