Teledyne HPM-2002-OBE User's Manual
Contents
1. November 2008 Revision M Document Number 155 122008 December 2008 Revision N Document Number 155 082010 9 August 2010 Revision P Document Number 155 102011 sse eene October 2011 ri Visit www teledyne hi com for WEEE disposal guidance The instruments described in this manual are available with multiple pin outs CAUTION Ensure that all electrical connections are correct CAUTION instruments described in this manual designed for INDOOR use only The instruments described in this manual are designed for Class 2 installations CAUTION in accordance with IPC standards Hastings Instruments reserves the right to change or modify the design of its equipment without any obligation to provide notification of change or intent to change HPM 2002 OBEVacuum Gauge Page 2 of 39 Table of Contents 1 GENERAL INFORMATION 5 1 1 EBATURES p u e de adde 5 1 2 MODEL 2002 SENSORS iiie etanol qe eie deg 5 1 3 HPM 2002 OBE ANALOG OUTPUT MODUL 5 1 4 HPM 2002 OBE ANALOG OUTPUT 4 20MA MODULE 5 1 5 HPM 2002 OBE RS232 485 OUTPUT nennen nennen 6 1 6 HPM 2002 OBE DEVICENET 6 LE SPECIFICATION Sori MIETEN 6 2 INSTATDIEATIONZ ZS Su T 7 2 1 REGCEIVING 72. HASTINGS INSTRUMENTS INSTRUCTION MANUAL HPM 2002 OBE VACUUM GAUGE HASTINGS ASA TELEDYNE HASTINGS INSTRUMENTS C ISO 9001 CERTIFIED Manual Print History The print history shown below lists the printing dates of all revisions and addenda created for this manual The revision level letter increases alphabetically as the manual undergoes subsequent updates Addenda which are released between revisions contain important change information that the user should incorporate immediately into the manual Addenda are numbered sequentially When a new revision is created all addenda associated with the previous revision of the manual are incorporated into the new revision of the manual Each new revision includes a revised copy of this print history page Revision D Document Number 155 022002 February 2002 Revision E Document Number 155 072002 July 2002 Revision Document Number 155 082002 August 2002 Revision G Document Number 155 062004 June 2004 Revision H Document Number 155 082005 August 2005 Revision J Document Number 155 092007 September 2007 Revision K Document Number 155 062008 2 222 2 02 00000050000000000000000000000000400 anna June 2008 Revision L Document Number 155 112008
3. CR 4 Place the HPM 2002 OBE back in the Run mode 3 5 3 Atmosphere Coefficient Adjustment If a reference high pressure gauge is not available the ambient barometric pressure acquired from the weather channel or other weather service can be used to adjust the proper reading To adjust the atmosphere coefficient use the following procedure 1 Backfill with the desired gas to a pressure between 700 and 800 Torr 2 Place the instrument in the Cal mode using the SELECT button 3 Turn the ADJUST rotary encoder until the HPM 2002 OBE display matches the reading on the reference gauge OR using the RS232 485 send CM m d E e lt CR gt Place the HPM 2002 OBE back in the Run mode 2002 Gauge Page 24 of 39 4 of Operation The 2002s transducer tube is comprised of two very different sensors which provide a span of measurement extending from 1000 Torr down to less than 1 104 Torr The piezoresistive device is a direct force sensor which provides pressure indication from 1000 Torr down to less than 1 Torr The thin film Pirani device is a thermal conductivity sensor that provides pressure indication from 100 Torr down to less than 1 x 104 Torr The two decade overlap in measurement range is convenient for smooth transition either descending ascending in pressure Both sensors are small micro machined die that are bonded to a Au coated ALO preform stress isolation which in turn
4. The HPM 2002 OBE will automatically enter the Run mode upon start up This is the mode for normal operation and the mode in which the instrument will spend most of its time In the Run mode the HPM 2002 HPM 2002 OBEVacuum Gauge Page 13 of 39 OBE will continuously monitor pressure update alarm conditions and update both analog output channels about ten times a second 3 2 4 Cal Mode Optimal performance of the HPM 2002 OBE is achieved by performing in situ adjustments to the calibration coefficients in the Cal mode There are three calibration coefficients These are the zero coefficient the midrange coefficient and the atmosphere coefficient Once a tube has been fully calibrated the midrange coefficient should never need further adjustment but it may be helpful to adjust the zero coefficient or the atmosphere coefficient under certain circumstances The CAL MODE presupposes that the operator is applying a known pressure of the correct gas composition see GAS MODE The factory calibration points are 800 Torr 7 Torr and lt 10 Torr The user s calibration points are not required to be exactly those values but should be somewhat close and must be within the ranges shown in the following figure The HPM 2002 OBE detects the voltage signal within the sensor tube which is converted and displayed as a pressure reading The resulting pressure reading determines which of the three coefficients will be adjusted DISPLAYED PRESS
5. SILICON BASE MEMBRANE Figure 4 3b This radiation loss is also independent of the thermal conductivity of the gas It is somewhat dependent upon the absolute temperature of R and the ambient temperature but since AT is kept to less than 20 C this HPM 2002 OBEVacuum Gauge Page 29 of 39 loss is only approximately 10 of E If ambient changes are small compared to absolute values of the temperature this loss can approximated as a constant with temperature Since the first two losses are essentially constant at high vacuum for a given sensor we can measure these losses and subtract them from the input power which leaves only the rate of heat transmission through the gas By In the viscous flow regime E loss is directly dependent on the thermal conductivity of the gas K gt the surface area of the membrane the differential temperature and is inversely proportional to distance between the membrane and the lid It can be written as E K AT A Ax The thermal conductivity of the gas is essentially constant when in viscous flow where the Knudsen number Kn is less than 0 01 In the viscous flow regime there is no change in sensor output with pressure since all of the losses are constants with pressure In the molecular flow regime where Kn gt 1 the thermal conductivity of the gas becomes directly proportional to the gas pressure as shown below We can expect then that E will be constant at high pressures and d
6. 64 nodes are addressable per network Some of the user benefits of using DeviceNet are Reduced hardwiring and reduced start up time through the use of standardized cables for the Trunk and Branch lines in addition to standardized Taps for making physical interconnections e Ease of integrating products from multiple vendors More than 250 vendors produce DeviceNet products For more information contact the Open DeviceNet Vendor Association ODVA at their web site http www odva org HPM 2002 OBEVacuum Gauge Page 23 of 39 3 5 Calibration of the HPM 2002 OBE 3 5 1 gt Zero Coefficient Adjustment The zero coefficient corrects for the constant power level which is present over the entire pressure range Typically this adjustment corrects for low pressure errors The instrument will need to be re zeroed often if measurements are being made in the 10 Torr range especially if the ambient temperature changes The transducer may have a temperature coefficient of up to 2x10 Torr C The instrument remote zero input will allow an external gauge such as 10 gauge to automatically re zero the HPM 2002 OBE whenever the pressure drops below the desired pressure level 1f it has a TTL output NOTE Do not attempt to zero the Model 2002 in pressures above 107 Torr the microprocessor will not accept a zero above this pressure To manually adjust the zero use the following procedure 1 Ifpossible evacuate the vacuum syste
7. harsh environments the tube should be installed in a clean and careful manner The tube is configured with the vacuum fitting requested If your vacuum environment is highly contaminated or has unique fitting requirements a Hastings filter or special adapter may be needed Please contact the Hastings Instruments Sales Department for assistance in your system configuration 2 4 OBE Module Installation e Environment e Indoor use e Altitude up to 2000 meters e Operating temperature range from 5 40 C HPM 2002 OBEVacuum Gauge Page 7 of 39 e Maximum relative humidity 80 temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C e Installation category HPM 2002 OBE CABLE PINOUT Analog Ouput Analog Ouput Digital Output 5 Channel I Vout Channel Anogia NC x 7 2 Vout Channel Tour Ground Digital Ground Digital Ground Remote Zero 2 5 Initial Operation Upon applying power to the control unit a pressure measurement will be given in Torr for nitrogen However it is recommended that the user follow the instructions for zeroing and adjusting the output at atmosphere HPM 2002 OBEVacuum Gauge Page 8 of 39 3 Operating Information This section contains information on operating the HPM 2002 OBE in any of its various configurations Refer to the appropriat
8. the two sensors HPM 2002 OBEVacuum Gauge Page 30 of 39 2002 Dual Sensor Vacuum 1603 1 0602 1060 Di 1 Figure 4 4 2002 Gauge Page 31 of 39 5 Troubleshootino 5 1 Advanced Setup Guide The HPM 2002 OBE has several setup and control commands which can be accessed by using the ADJUST rotary encoder and SELECT pushbutton and at the same time viewing the display Note that most of the commands which are described below can be accessed using equivalent RS232 485 commands The advanced setup is accessed from the Run mode With the Run light illuminated and not flashing each click of the ADJUST rotary encoder in the clockwise direction will advance the display through each command Once arriving at the desired command the user can change the parameter or initiate command by pressing the SELECT pushbutton When finished with the advanced setup the user may return to the normal Run mode by turning the ADJUST counter clockwise until the pressure is once again displayed The parameters are not stored upon leaving the command and entering the normal Run mode via ADJUST make the changes permanent the SAVE EEPROM command is used Note that turning the ADJUST clockwise indefinitely will simply cycle through the commands Normal Run RS485 Address Baud Rate Data Bits Parity Bits Stop Bits Turnaround Delay Decimation Ratio Save EEPROM CLOCKWISE Restore
9. to the higher pressure range 0 1024 Torr The second channel pin 7 corresponds to the lower pressure range 0 1000 mTorr The equation below gives the output voltage on the pressure pressure 100 V channel2 10x pressure V channel Where V channel 1 is the voltage between pins 5 and 6 V channel 2 is the voltage between pins 7 and 6 and the pressure is indicated in Torr HPM 2002 OBEVacuum Gauge Page 11 of 39 2002 10 VDC Analog Output 1 0 01 1 0E 00 1 0E 01 1 0E 02 Voltage V 1 0E 04 1 0 05 1 0E 04 P d 1 mbar 1 333 Torr 1 0E 03 1 0E 02 1 0E 01 1 0 00 1 0 01 1 0 02 1 0E 03 Pressure Torr HPM 2002 OBEVacuum Gauge Page 12 of 39 3 2 Analog Output 4 20mA The HPM 2002 OBE with analog output and display is shown in the figure below The user interface consists of a status bar a mode bar and setpoint test Jacks Error LED Status Ba 3 2 1 Overall Functional Description The status bar gives information about the condition of the HPM 2002 OBE High and Low indicate whether the set points are activated Error indicates if there was a problem downloading the EEPROM Torr and mTorr indicate what pressure regime the gauge is measuring The mode bar indicates which mode has been selected The HPM 2002 OBE has five modes which the user may enter This is similar to the
10. 1 4 7 21 00 lt CR gt Valid Range H m dd E e lt CR gt 1 00000e 9 to 9 99999e 9 3 3 4 Paramater Modification Commands Command Description Format Modify High Setpoint Modify Low Setpoint Modify Selected Gas Modify Selected Units Modify Decimation Ratio Modify RS 485 Address Modify Turnaround Delay Notes HPM 2002 OBEVacuum Gauge L m dd E e lt CR gt 1 00000e 9 to 9 99999e 9 G d lt CR gt 0 to 4 Decimal U u lt CR gt T or M or P D dddd lt CR gt 63 to 7936 Decimal faa A aa lt CR gt aa T dd lt CR gt 1 to DF Hexadecimal to 255 Decimal Page 18 of 39 The setpoints may also be entered as a decimal number e g H 760 99 lt CR gt will be same as entering H 7 6099E 2 lt CR gt When inputting setpoint data it should be entered in the same Units of Pressure as the presently selected Units of Measurement i e Torr mbar or Pascal The data is only checked to be a valid number with a one digit exponent before being accepted There are no limit checks on the data the user is free to choose any value appropriate to his use of the instrument The Turnaround Delay and RS 485 address are unique to multipoint communications In order to prevent inadvertent modifications of these parameters the multipoint attention character and the Model 2002 s present address aa MUST be used and are checked for validity before the command 15 executed If the RS 485 address is unkno
11. 2 2 QUICK STAR Taras Sma TN 7 2 3 TRANSDUCER INSTALLATION cotone testet tte eee Hee oe ee tH EIER IEEE i He ivre 7 2 4 OBE MODULE INSTALLATION nre eredi 7 2 5 INITIATOPERATION deret er e ere e PUR Herde p HE pr EIS D E EE t hs 8 3 OPERATING INFORMAT ION eese essen 9 3 1 ANALOG OUTPUT 0 10V excess sicci tte e cepi dede TER EE RE RU RH Pe P VERE ee 9 IA Overall Functional Description u set ertet EE 9 3 2 igh and Low Set Point Modes o et e tret oer eter E sa TR ve ee 9 SEM TIN Ur 10 S Cal E 10 3 952 GASIMode 11 3 16 Analog Output O LOV se oreet 11 32 4 20 13 3 24 Overall Functional Description or ette rete EE OSEE 13 322 lt High and Low Set Point Modes asa a RI i nea oasis Pete Pre ADAE e HAE 13 32 34 RUM MOG E
12. BEVacuum Gauge Page 15 of 39 2002 4 20 mA Analog Output Current mA Le mbar z 1 333 Torr 1 mbar 1 0 01 1 0 00 1 0E 01 1 0E 02 1 0E 03 Pressure Torr HPM 2002 OBEVacuum Gauge Page 16 of 39 3 3 RS232 485 With Display The HPM 2002 OBE with RS232 485 output and display is shown in the figure below The user interface consists of 4 digit LED display a status bar and a mode bar Error LED High Low Torr mTorr igh Low Run mm a ADJUST L iu MIL WIE de 3 3 1 Overall Functional Description The status bar gives information about the condition of the HPM 2002 OBE High and Low indicate whether the set points are activated Error indicates if there was a problem downloading the EEPROM Torr and mTorr indicate what pressure regime the gauge is measuring The mode bar indicates which mode has been selected The HPM 2002 OBE has five modes which the user may enter This is similar to the six modes which can be entered in the standard HPM 2002 there is no interlock feature when the user changes the settings within a mode any adjustments that have been made will be permanent once the mode is exited exit without making changes permanent the user must turn the power off Communication with the serial interface of the HPM 2002 OBE is vi
13. EEPROM Restore Calibration COUNTER CLOCKWISE Restore Factory Defaults Software Reset Normal Run etc The following list gives a description of each of the commands listed above along with the syntax for the equivalent RS232 485 command See RS232 485 section for more details RS485 Address 01 Multipoint 01 A 02 A FE A FF The RS485 address is the multipoint address of the HPM 2002 OBE If the unit is configured for RS232 then this parameter must set to a value of EO or greater Valid multipoint range 01 to DF laajA CR HPM 2002 OBEVacuum Gauge Page 32 of 39 Baud Rate B 2 4 B 2 4 4 8 9 6 B 19 2 B 38 4 B 57 6 125 250 500 The baud rate is given in kbaud For example 9 6 corresponds to a 9600 baud Note There is no equivalent RS232 485 command Data Bits Parity Bits Stop Bits P8n1 811 8n2 7n2 7E1 7E2 701 702 701 702 711 712 The first character 8 corresponds to the number of data bits e g 7 or 8 Second character n corresponds to the parity bit e g n no parity E even parity odd parity 0 space 1 mark The last character 1 corresponds to the number of stop bits e g 1 or 2 Note There is no equivalent RS232 485 command Turnaround Delay dt06 9100 9101 dtFE dtFF The turnaround delay is unique to multipoint communications It is the delay between receipt of an incoming comman
14. Hyperterminal which can be used to communicate with RS232 versions of the HPM 2002 OBE The Transmit Device Status 5 lt gt command will retrieve the HPM 2002 OBP s status register A successful read of the status register will clear the Err4 condition What are Err3 Err5 Err6 and Err7 These are simultaneous error conditions i e Err3 1 Err2 Why does my display read U U U U stands for unconnected piezo unconnected Pirani This message indicates that the voltage readings from the sensors are outside any usable range Most often this occurs when there is no sensor tube connected to the HPM 2002 OBE This error will also occur if there is a problem with the user s DC power supply Verify that the voltage supplied to the HPM 2002 OBE is within the specified range using a voltmeter at pins 3 and 4 on the power cable After power verification and with the voltage still applied hot plug the cable into the HPM 2002 OBE If the U U still appears most likely the sensor tube HPM 2002s needs to be replaced Why does my display read U U stands for unconnected piezo This message indicates that the voltage reading from the piezoresistive sensor is outside any usable range While this message can mean that the sensor tube HPM 2002s will need to be replaced it can also indicate that the piezo zero calibration parameter which is stored in the sensor tube s EEPROM has become co
15. M 13 3 245 CAL MO iiss d e ERR UARIIS 14 3 29 GAS Mode e ROTE RR RI e CELLAR BE l 15 3 2 6 Andlog Output 4 20mA x esee e Fre e CY Ue TERRE Pe 15 33 RS232 465 WITH DISPLAY ecce tust ave eee nare ck ree ede teur puer vede gin 17 3 31 Overall Functional D scription e tte ee erre PR e o one ro 17 3 3 2 COMMAND SYNTAX RR ERR a h aS E RU ERE PEE VERS GERE RANTS EUREN ERE 17 3338 Interrogation Commands x ise ite ede dee ec t ue iet ERE D ED oe eee e deridet heh epum 18 3 3 4 Paramater Modification 18 3 3 5 Calibration Adjustment Commands esee eee eterne enne tree nette tnnt trente eterne enne 19 3 8 0 Reset Restore Commands sine vada ta e ee e EH ee eee e Re eR red 19 2 9 78 Device Statusa pa 20 3 3 Default RS232 485 Specifications us etit ted e HU E ee eR eee e ER sassa 20 3 3 9 Modular Connector Pinout R2 232 RJ 11 connector left side sese 21 3 3 10 Modular Connector Pinout RS 485 a 21 3 3 11 High and Low Set Point Modes s dtes ete eet olsun ende e
16. S POLICY cech ete tc be is e S ere pee EUER ENSE E ee NEN 36 6 2 NON WARRANTY REPAIR POLICY e ve Fee vae ux este v ewe so aere reveals 36 HPM 2002 OBEVacuum Gauge Page 4 of 39 1 General Information The Hastings HPM 2002 OBE is a small low cost electronics module which provides the user with accurate vacuum measurements over a wide range of pressure The HPM 2002 OBE uses the same rugged HPM 2002s transducer tube as the HPM 2002 bench top instrument This tube features two sensors a patented thin film Pirani sensor and a piezoresistive sensor combined in a single tube with a matched EEPROM Electrically Erasable Programmable Read Only Memory The HPM 2002 OBE electronics module combined with the HPM 2002 s tube provides accurate vacuum measurement from 1x10 Torr to 1000 Torr The HPM 2002 OBE is designed for quick easy installation and will provide the user with long lasting trouble free reliable vacuum measurement 1 1 Features e Low Cost Electronics Module e Wide Dynamic Range 1x10 Torr to 1000 Torr e Combined Sensors in a Single Tube Input Voltage 11 5 30 VDC e Connector 15 pin high density male D e Optional 4 digit LED Display e Optional Outputs Dual 0 10 volt analog or RS232 485 1 2 Model 2002 Sensors The Model 2002 transducer tube is comprised of an ion implanted piezoresistive direct force sensor and a thin film Pirani type sensor The Pirani sensi
17. The CAL MODE presupposes that the operator is applying a known pressure of the correct gas composition see GAS MODE The factory calibration points are 800 Torr 7 Torr and 10 Torr The user s calibration points are not required to be exactly those values but should be somewhat close and must be within the ranges shown in the following figure The HPM 2002 OBE detects the voltage signal within the sensor tube which is converted and displayed as a pressure reading The resulting pressure reading determines which of the three coefficients will be adjusted DISPLAYED PRESSURE ADJUSTMENT VALUE FUNCTION 512 Torr PIEZO ADJUSTMENTS SENSITIVITY ADJUSTMENT 25 rr DO NOT ADJUST WITHIN THIS RANGE 8 Torr 1 DOWN Torr i PIRANI ADJUSTMENTS SENSITIVITY ADJUSTMENT 5 orr DO NOT ADJUST WITHIN THIS RANGE 125 r ADJUSTMENTS 0625 Tort PIRANI 4 ZERO ADJUSTMENT P orr AUTIOT MPOSITIOI ENSITIVE The operator action is the same for adjustment of all three of the coefficients except that he must apply the proper calibration pressures according to the calibration point he is about to adjust T o adjust a calibration HPM 2002 OBEVacuum Gauge Page 10 of 39 coefficient place the 2002 the Cal mode using the SELECT button Then turn the ADJUST rotary encoder The Cal light will begin to flash during adjustment and will continue to flash until the Cal mode 15 exite
18. URE ADJUSTMENT VALUE FUNCTION 512 To 4 PIEZO SENSITIVITY ADJUSTMENT DO NOT ADJUST WITHIN THIS RANGE 8 Torr 1 UP DOWN Torr t PIRANI SENSITIVITY ADJUSTMENT ADJUSTMENTS DO NOT ADJUST WITHIN THIS RANGE 0625 Torr PIRANI 4 ZERO ADJUSTMENT CAUTION GAS COMPOSITION SENSITIVE The operator action is the same for adjustment of all three of the coefficients except that he must apply the proper calibration pressures according to the calibration point he is about to adjust T o adjust a calibration coefficient place the HPM 2002 OBE in the Cal mode using the SELECT button Then turn the ADJUST rotary encoder The Cal light will begin to flash during adjustment and will continue to flash until the Cal mode 15 exited using the SELECT button HPM 2002 OBEVacuum Gauge Page 14 of 39 perform a full calibration on the 2002 first use Zero Coefficient Adjustment Procedure Followed by the Midrange Coefficient Adjustment Procedure and finally perform the Atmosphere Coefficient Adjustment Procedure Sensor Coefficients are stored in the Sensor s EEPROM upon exiting the Cal mode 3 2 5 GAS Mode The HPM 2002 OBE can provide true pressure measurements in many gas environments At pressure levels where the direct force piezoresistive sensor is operative the instrument 15 gas composition independent and measures the tr
19. Wire the 15 D connector according to cable pinout see Table below using 24 AWG or other suitable wire e Using a unipolar DC Power Supply set the desired operating voltage within the range of 12 VDC to 30 VDC e Connect the HPM 2002 OBE module to the HPM 2002s transducer tube e Note that the connector is keyed finger tight connection is all that is required for adequate operation e Transducer tube may be installed in any orientation However if condensation is likely to occur then the tube port should be orientated downward When installing 1 8 NPT style transducer tube use the 7 16 wrench flats e Attach cable With the vacuum chamber at atmosphere turn on the power supply typically 24 VDC Gauge is now reading pressure best accuracy the gauge should now be zeroed Pump the vacuum system down to low 10 6 Torr pressure if possible Ideally the gauge should be operated in this condition for one hour before setting the Zero e To set the Zero place the HPM 2002 OBE in the CAL mode by using the SELECT button e Using a small flat head screwdriver rotate the ADJUST rotary encoder until the unit flashes between 0 0 and 0 0 e Return to the RUN mode by using the SELECT button 2 3 Transducer Installation The transducer tube may be installed in any orientation Although the transducer tube is rugged and will perform well in many
20. a an ASCII data string In the RS 232 mode the command message consist only of a command string and the terminator The attention character and address string are not required but if they are used they MUST be valid If all components of the ASCII data string are valid the command will be accepted and executed The RS 232 mode is sometimes referred to as point to point mode since only one device may be connected to the controller at any given time A message to the HPM 2002 OBE in the RS 485 mode consists of an attention character followed by the address string the command string and the terminator If all components of the ASCII data string are valid the command will be accepted and executed The RS 485 mode is also referred to as multipoint mode since up to 31 devices may be connected to the same controller in a network scheme 3 3 2 COMMAND SYNTAX In the following examples of syntax codes the special characters are explained The characters in square brackets represents a command string either upper or lower case command characters accepted characters must follow each other in the string with no spaces or other characters HPM 2002 OBEVacuum Gauge Page 17 of 39 The characters within wavy brackets contain choices appropriate command The characters within the symbols lt gt are the common abbreviations for the one digit ASCII control codes which they represent e g lt CR gt represents carriage return W
21. ace the HPM 2002 OBE in the Low mode by pressing the SELECT button until the Low mode light is illuminated The display then shows the set point selected During normal operation the alarm light will illuminate and the TTL output pin 2 will go high 5V if the pressure becomes less than the set point To adjust a setpoint place the HPM 2002 OBE in either setpoint mode High or Low Next use the ADJUST rotary encoder until the desired setpoint is displayed Finally place the HPM 2002 OBE back in the Run mode The new setpoints are now stored in the HPM 2002 OBE s memory HPM 2002 OBEVacuum Gauge Page 9 of 39 3 1 3 Run Mode The 2002 will automatically enter the Run mode upon start up This is the mode for normal operation and the mode in which the instrument will spend most of its time In the Run mode the HPM 2002 OBE will continuously monitor the pressure update the alarm conditions and update the display about ten times a second 3 1 4 Cal Mode Optimal performance of the HPM 2002 OBE is achieved by performing in situ adjustments to the calibration coefficients in the Cal mode There are three calibration coefficients These are the zero coefficient the midrange coefficient and the atmosphere coefficient Once a tube has been fully calibrated the midrange coefficient should never need further adjustment but it may be helpful to adjust the zero coefficient or the atmosphere coefficient under certain circumstances
22. be EEPROM Verification Error 2 Probe EEPROM Identification Error 1 Communications Syntax Error 4 Piezo Sensor Bad voltage out of range 2 Pirani Sensor Bad voltage out of range 1 High Setpoint Alarm pressure exceeds setpoint 4 Low Setpoint Alarm pressure less than setpoint 2 Gas Changed not the same as when unit last calibrated 1 3 3 8 Default RS232 485 Specifications cic MR PI 9600 Character eC Li e T I E UN tee Fight data bits PAY k EP None EET 1 5 485 Universal Address uu nuna Mh davis adn A u Dra e 00 HPM 2002 OBEVacuum Gauge Page 20 of 39 3 3 9 Modular Connector Pinout R2 232 RJ 11 connector on left side Piel ae eR dt E Ready to receive output signal from OBE Pin h Ene ee a Data output from OBE 3 and ee eee Ra e e Common Ground Reference Pin 3554 Se tete u eee op weds e Data input to OBE Pin 6 QA asam UE e EN k Dee Clear to send input signal to OBE common application of the RS232 version of the HPM 2002 OBE 15 to connect the pressure gauge directly to the serial port of a PC This is done by first wiring the supplied communication cable in the manner shown below Carrier Detect Received Data Transmitted Data Data Terminal Ready Signal Ground 9 Pin Female D C
23. be contacted for authorization before we proceed with any repairs If you then choose not to have the product repaired a minimum will be charged to cover the processing and inspection Please consult the factory for your RMA number before returning any product repair TELEDYNE HASTINGS INSTRUMENTS 804 NEWCOMBE AVENUE HAMPTON VIRGINIA 23669 U S A ATTENTION REPAIR DEPARTMENT TELEPHONE 757 723 6531 TOLL FREE 1 800 950 2468 FAX 757 723 3925 E MAIL hastings _instruments teledyne com INTERNET http www teledyne hi com Repair Forms may be obtained from the Information Request section of the Hastings Instruments web site HPM 2002 OBEVacuum Gauge Page 36 of 39 f Diagrams and Drawings 4 TUN DN High Low Torr mTorr gt High Low Run Cal Gas 2 21 E un ADJUST I SELECT zx N Pr 9 HPM 2002 OBEVacuum Gauge 1 8 NPT CONNECTION 2 35 59 7mm 1 20 30 5mm 2 1 20 diameter dimension of tube shell is typical on all HPM 2002 series tubes Mini 20025 03 2 30 58 4mm 16 20028 05 2 30 58 4mm 25 20028 06 Tube Outline Drawings all dimensions shown are approximate 2002 Ga
24. ck Si N continuous membrane surrounded by a thin film reference resistor on a Si substrate The membrane is heated to a constant 8 C above ambient temperature that is monitored by the substrate resistor The membrane resistor is approximately 60 Q and a constant substrate to membrane resistance ratio is maintained Figure 4 3b shows the Pirani die in cross section A parallel Si lid is eutectically bonded to the Au pads and sits 5 microns above the membrane As shown this dimension gives a Knudsen number of greater than 0 01 up to atmospheric pressure which ensures a molecular flow component At 10 Torr the region above the membrane is totally in the molecular flow regime and thus provides a relatively linear output verses pressure overlapping the linear output versus pressure of the piezo The measurement technique is to produce an output signal that is proportional to the power supplied to the heated resistor by using the product of the current and voltage This rejects errors introduced by resistance changes since the sensor resistance 15 no longer part of the power equation A signal proportional to the power is obtained by multiplying the voltage across the heated sensor and the voltage impressed by the direct current across a constant series resistance The power supplied to the sensor resistor must equal the heat dissipated The three main heat loss routes from the heated sensor are thermal conduction through the silicon nitride membran
25. d to transmission of the response Each increase in the hex value corresponds to an increase in the delay time of approximately 8 ms aa T dd CR Decimation Ratio dr5F SF 6F The decimation ratio can be used to set the amount of sampling which is performed by the HPM 2002 OBE s A D converters The higher the value of the hex number the more sampling takes place before the pressure reading is updated More sampling leads to more stability of pressure readings particularly below 1 mTorr However the increased sampling increases the response time of the gauge to sudden pressure changes D dddd lt CR gt Save EEPROM S_EE Save EEPROM stores the calibration parameters which are in the HPM 2002 OBE s CPU into the HPM 2002 OBE s CPU board s EEPROM The CPU board s EEPROM is not the HPM 2002s tube EEPROM The CPU board EEPROM stores the gauge setup baud rate parity address set points gas selection etc The HPM 2002s tube EEPROM stores the tube s calibration parameters EEW lt CR gt Restore EEPROM r_EE Restore EEPROM transfers the setup from the HPM 2002 OBE s CPU board s EEPROM into the HPM 2002 OBE s CPU EER lt CR gt HPM 2002 OBEVacuum Gauge Page 33 of 39 Restore Calibration r CL Restore Calibration transfers the calibration from the HPM 2002s tube EEPROM into the HPM 2002 OBE s CPU EEI lt CR gt Restore Factory Defaults r_Fd The Restore Factory Defa
26. d using the SELECT button perform a full calibration on the 2002 first use the Zero Coefficient Adjustment Procedure Followed by the Midrange Coefficient Adjustment Procedure and finally perform the Atmosphere Coefficient Adjustment Procedure Sensor Coefficients are stored in the Sensor s EEPROM upon exiting the Cal mode 3 1 5 GAS Mode The HPM 2002 OBE can provide true pressure measurements in many gas environments At pressure levels where the direct force piezoresistive sensor is operative the instrument is gas composition independent and measures the true pressure regardless of gas composition The Pirani is gas composition sensitive so the actual composition must be known and the Pirani calibrated in that gas When the vacuum system s gas composition is dominated by a single gas species for example during system venting with an inert gas the user can enter a gas selection into the HPM 2002 OBE by rotating the ADJUST rotary encoder To view the gas selection depress the SELECT button until the GAS light is illuminated The number on the display corresponds to the gas See the table below Gas Selection Table Gas Mode Gas Displayed Number 00 Nitrogen 01 Argon 02 Helium 03 Water Vapor 04 Custom 3 1 6 Analog Output 0 10V The dual 0 10V output option board provides voltage outputs proportional to the HPM 2002 OBE s pressure reading The first channel pin 5 corresponds
27. deseen ebbe en 21 3 3 12 Rin MOE 22 3 3 13 Cal S 22 rro iod uu e NERO a aetna 23 3 41 Overall Functional Description Porta e da repre bee vien 23 J4 2 DeviceNet description viet eee e oe ep t eet 23 3 5 CALIBRATION OE THE 2002 teeth tote deter eh the dene irte ines 24 3 51 Zero Coefficient Adjustment eene epe RE e Foe do a Ra dei EEES NEEE oe 24 3 5 2 Midrange Coefficient Adjustment nn nn 24 3 5 8 Atmosphere Coefficient Adjustment eese esses eene enne 24 4 THEORY OF OPERATION M M 25 u mna LE Sa oat E M 25 4 2 PIEZORESISTIVE DROP 26 4 3 PIRANDSENSORS pu MuR crc estre 28 HPM 2002 OBEVacuum Gauge Page 3 of 39 4 4 DUAL SENSOR OPERATION viec cese tede a aaa e Tv Fe re C Eve a Guy oss 30 5 TTROUBLESHOOTING ep Hat A 5 1 ADVANGED SETUP GUIDE Su I uu e ir Re e irpo inr es n ere qu 5 2 FREQUENTLY ASKED QUESTIONS 6 1 WARRANTY REPAIR
28. e section for Information on the mode use 3 1 Analog Output 0 10V Error LED High Low Torr mTorr High Low Run Cal Gas 3 1 1 Overall Functional Description The status bar gives information about the condition of the HPM 2002 OBE High and Low indicate whether the set points are activated ERROR indicates if there was a problem downloading the EEPROM Torr and mTorr indicate what pressure regime the gauge is measuring The mode bar indicates which mode has been selected The HPM 2002 OBE has five modes which the user may enter This is similar to the six modes which can be entered in the bench top panel mounted HPM 2002 there is no interlock feature when the user changes the setting within a mode any adjustments that have been made will be permanent once the mode is exited To exit without making changes permanent the user must turn the power off 3 1 2 High and Low Set Point Modes The HPM 2002 OBE provides TTL outputs for process control These signals are available on the 15 pin connector see previous table in Section 2 4 view the High set point place the HPM 2002 OBE in the High mode by pressing the SELECT button until the High mode light is illuminated The display then shows the set point selected During normal operation the alarm light will illuminate and the TTL output pin 1 will go high 5V if the pressure exceeds set point Similarly to view the Low set point pl
29. e to the silicon substrate E radiation losses E gt and thermal conduction through the gas to the silicon substrate Ej thus as shown in Figure 4 3b E E E The first term E is dependent the thermal conductivity of the silicon nitride K the temperature difference AT between the heater and silicon substrate and geometric factors A amp L E is given by E 15 the membrane cross sectional area through which the heat transfer occurs This is approximately the outer circumference of the membrane multiplied by the membrane thickness L is the distance from the edge of Rs the heated sensor resistor to the silicon substrate For any particular sensor all of the factors except AT are constants dependent on its construction The AT is held constant by the control circuit The thermal loss through the silicon nitride will be a constant value independent of the thermal conductivity and pressure of the gas Radiation is another source of thermal losses It can be determined from E oe T T 9A where Stefan Boltzmann radiation constant thermal emissivity of the silicon nitride membrane A surface area of the heated portion of the membrane T temperature of R T ambient temperature HPM 2002 OBEVacuum Gauge Page 28 of 39 TEMPERATURE COMPENSATING RESISTOR SILICON NITRIDE MEMBRANE HEATED SENSOR RESISTOR Figure 4 3a SILICON SUBSTRATE
30. ecimal number e g CF 760 99 lt CR gt will be same as entering 7 6099 2 lt CR When inputting calibration adjustment data it must be within the valid range of the presently selected Unit of Measurement i e Torr mbar or Pascal The data is checked to be valid before being accepted If the command syntax is not met or if the number is out or range the HPM 2002 OBE will respond with the ASCII codes for bell CR and the command will be ignored The UNIVERSAL ADDRESS may be used to calibrate all connected units simultaneously e g OOCF 760 lt CR gt 3 3 6 Reset Restore Commands Command Description Format Notes Escape lt Esc gt Reset Command Buffer ignore prior Input Software Reset R CR Reinitialize Software HPM 2002 OBEVacuum Gauge Page 19 of 39 Restore Factory Defaults lt CR gt Restore Calibration Register Default Values Set Zero 0 CR Store Present Pressure as Instrument ZERO Piezo lt 32 Torr amp Pirani lt 50 mTorr Force Zero lt CR gt Override Limit Checks and Store Present Pressure as Instrument ZERO 3 3 7 Device Status When requested to transmit its status the HPM 2002 OBE responds with a five digit number which is explained in the following digit 1 2 3 4 5 Serial Receiver Overflow 4 Main Board EEPROM Error 2 Probe EEPROM any Error Probe EEPROM Not Responding 8 Probe EEPROM Read Error 1 Probe Checksum Error 4 Pro
31. etup guide Section 5 1 for more information Why does my display read Err2 This message indicates that an error has occurred in the CPU s EEPROM where the set points gas number and communication port settings are stored If this error occurs during initial startup then the factory default values for these settings will be in effect CPU EEPROM performance can be verified by use of the RESTORE EEPROM command See the advanced setup guide Section 5 1 for more information Caution Use of the SAVE EEPROM command at this time will overwrite all previously stored values with default values Note An Err2 message is a exceedingly rare occurrence If this error occurs then the CPU s EEPROM is most likely defective Why does my display read 4 This message indicates that a communications error has occurred between the HPM 2002 OBE and a data acquisition computer This error is associated with the serial interface RS232 485 and can indicate a baud rate or parity mismatch a framing error or an overrun condition The error can also occur if the data acquisition computer is powered down while the HPM 2002 OBE is still connected Modifying as necessary the baud rate parity word length and or the stop bits on either the data acquisition computer or the HPM 2002 OBE usually eliminates this error Many operating systems are shipped with a HPM 2002 OBEVacuum Gauge Page 34 of 39 communications program e g WindowsO
32. hen entering more than one command in the same data string they must be separated by a comma All command strings must be followed by the terminator character carriage return lt CR gt also known as ENTER When a lower case character is present in an example it represents an option Character Description Valid Inputs a RS 485 Address hexadecimal 0 9 A F 01 DF m Most Significant Digit Of Mantissa 1 9 d Decimal Digit 0 9 0 5 u Unit Of Pressure T M or P Command Separator comma N A CR Command Terminator carriage return N A 3 3 3 Interrogation Commands Command Description Format Transmit Averaged Pressure Transmit Pirani Pressure Transmit Piezo Pressure Transmit RS 485 Address Sample Response P lt CR gt 1 23456e 0 Torr lt CR gt R lt CR gt Pr 1 98765e 3 Torr lt CR gt Z lt CR gt Pz 7 65432e 2 Torr lt CR gt Transmit Decimation Ratio Transmit Selected Gas Transmit High Setpoint Transmit Low Setpoint Transmit Device Status Transmit Turnaround Delay Transmit Selected Units Transmit Software Version lt gt Address 01 lt CR gt D lt CR gt Decimation Ratio 255 lt CR gt G lt CR gt Gas 0 lt CR gt H lt CR gt Hi 1 00000e 1 Torr lt CR gt L lt CR gt Lo 1 00000e 2 Torr lt CR gt S lt CR gt 00044 lt CR gt T lt CR gt Comm Delay 6 lt CR gt U lt CR gt Torr lt CR gt V lt CR gt Hastings Instruments OBE 2002 Version
33. hermal convection currents which allows the sensor to be mounted in any orientation without calibration shifts 1 3 HPM 2002 OBE Analog Output Module The analog output 0 10 V module consists of a power conversion sensor transducer board microprocessor board and a user interface option board Two 0 10 Volt linear outputs are generated for the user via the high density 15 pin D connector The first of these outputs covers the pressure range from 0 to 1024 Torr The second output covers the range from 0 to 1000 mTorr A four digit floating point LED display is standard 1 4 HPM 2002 OBE Analog Output 4 20mA Module Identical to 1 3 except replace 0 10 V with 4 20 mA HPM 2002 OBEVacuum Gauge Page 5 of 39 1 5 HPM 2002 OBE RS232 485 Output Module The RS232 485 module consists of a power conversion sensor transducer board microprocessor board and a user interface option board Serial communication is conducted via an RJ 11 type connector With RS232 option EIA 232 Rev E communication can easily be established between the module and the serial port of a PC The RS485 option allows the user to address multiple units and allows operation at distances of up to 4000 feet The RS232 485 module includes a four digit floating point LED display 1 6 HPM 2002 OBE DeviceNet Module The DeviceNet module consists of a power conversion sensor transducer board microprocessor board and a user interface option board All communication is conduc
34. irectly proportional to the pressure at low pressures The energy loss E changes between these two controlling equations as the system passes through the transition region 0 01 Kn 1 E aL 273 T 2 T T A P where accomodation coefficient L free molecule thermal conductivity temperature of heated membrane ambient temperature P pressure surface area of the heated portion of the membrane ag For nitrogen at a pressure of 760 Torr and a temperature of 20 C the mean free path A is less than 1 x 10 7 meters and is inversely proportional to pressure Since the thermal transfer distance Ax is a few micrometers this sensor will remain in the molecular flow regime at a much higher pressure 10 Torr than is typical for a thermal vacuum gauge This extends the linear response part of the output curve up into the 1 Torr range The nonlinear transition region will extend up to 1000 Torr 4 4 Dual Sensor Operation The microprocessor in the control unit continuously monitors the outputs of both the piezoresistive sensor and the Pirani sensor Figure 4 4 shows representations of the sensors output over the pressure range from 10 Torr to 10 Torr The microprocessor uses the output of the piezoresistive sensor at high pressures gt 32 Torr and uses the output of the Pirani sensor at low pressures lt 8 Torr In the crossover region a software averaging algorithm ensures a smooth transition between
35. is bonded to a TO 8 header The header is resistance welded into a 316 stainless steel envelope as shown in the Figure 4 1 4 1 1 PCB EEPROM TO 8 HEADER PIRANI PIEZO SENSOR SENSOR Figure 4 1 HPM 2002 OBEVacuum Gauge Page 25 of 39 4 2 Piezoresistive Sensor Figure 4 2 shows a typical schematic of a Boron ion implanted Wheatstone bridge network in a Si diaphragm inverted box type geometry The inside of the box is evacuated during anodic bonding to a Pyrex substrate The membrane has maximum deflection at atmosphere or higher pressure and the membrane resistances change value as the differential pressure is decreased during pump down The resulting differential output is SPV V where S is the sensitivity P is the pressure V is the applied bridge voltage V is the no load output voltage Since the sensitivity changes so dramatically with temperature some correction is required for compensation The change in output voltage dVo P dT dT dT To insure temperature invariance dVo 0 therefore 1 1 V dT S dT which requires for any change in sensitivity to be countered by an equal but opposite change in applied voltage The temperature compensation is a network of temperature dependent resistive components and fixed temperature compensation current source compensation TCR TCS Sensitivity of the sensor is proportional to the sensor factor K the strain gauge positio
36. m into the low 10 Torr 1 33x 10 mbar range or as low as possible below 10 Torr 2 Allow the sensor to operate in this condition for a minimum of 15 minutes 3 Place the instrument in the CAL mode using the SELECT button then turn the ADJUST rotary encoder The CAL light will start to flash indicating that the calibration mode has been activated 4 Use ADJUST until the display reads 0 0 or 0 0 with an occasional 0 0 OR using the RS232 485 send 0 lt CR gt 5 The unit is now fully zeroed Place the HPM 2002 OBE back in the RUN mode to store the zero in permanent memory 3 5 2 Midrange Coefficient Adjustment The midrange coefficient corrects for errors in the slope of the power curve of the thin film Pirani Typically this is due to the geometry of a particular sensor and will only need to be performed once in the lifetime of the sensor This adjustment might be needed if a full calibration is being performed in a gas other than nitrogen The zero adjustment will need to be performed before making this adjustment To adjust the midrange coefficient use the following procedure 1 Evacuate the vacuum chamber and refill with the desired gas to a pressure of 7 Torr as indicated by a reference vacuum gauge 2 Place the instrument in the Cal mode using the SELECT button 3 Turn the ADJUST rotary encoder until the HPM 2002 OBE display matches the reading on the reference gauge OR using the RS232 485 send
37. ng element is a Pt thin film serpentine element deposited on a 1 micron thick Si N membrane The membrane is peripherally supported by a Si box shaped die and is covered by a thick Si lid parallel to the membrane and open on two ends The piezoresistive unit is an ion implanted Wheatstone bridge in a 50 micron thick Si membrane peripherally supported by a Si box shaped die which has been anodically bonded to a Pyrex substrate The dual sensor assembly is encased in a corrosion resistant 316 stainless steel tube shell The durable tube design withstands high pressure 150 psig 10 2 bar and high pressure surges Since the Pirani sensor is miniaturized and employs a Pt thin film on a Si N membrane instead of a conventional long fragile wire the transducer can withstand high levels of mechanical shock The Model 2002 is designed for fast response The micro machined sensing elements have a very small mass and operate in a constant temperature Pirani and a constant current piezo feedback mode This makes response time very fast as compared to other commercially available sensors which have to change the temperature of a significant mass to reflect pressure changes and have a large internal volume which must equalize in pressure with the system before the sensor can reach its final value The transducer s small internal volume 1 5 cc permits rapid pneumatic response to system pressure changes Further the small geometry of the transducer prevents t
38. ning of the diaphragm and the diaphragm geometry 0 thus S lt Once the defining geometry of the resistive film and piezo membrane have been established the sensor factor is dependent on the crystal orientation of the membrane material the doping level and diffusion parameters and the strain gauge geometry The sensor factor is essentially the change in resistance for a change in strain or gt I Boron ion implanted doped Si matrix resistance elements are employed as shown in Figure 4 2 The die is electrostatically bonded on to a Pyrex substrate in a good vacuum so that the die cavity is evacuated this provides maximum deflection at atmospheric pressure When the sensor 15 exposed to vacuum the deflection becomes less and less as the die cavity pressure and the vacuum system pressure equalizes Eventually the strain in the membrane due to AP becomes zero and only the residual strain in the lattice remains The bridge resistive elements are oriented to give maximum change in bridge resistance which in turn gives maximum voltage out for a given strain HPM 2002 OBEVacuum Gauge Page 26 of 39 PRESSURE dre een BRIDE DIAPHRAGM ELE RIDGE BACKING SURFACE OR RESTRAIN DIFFUSED BRIDGE RESISTORS E Figure 4 2 HPM 2002 OBEVacuum Gauge Page 27 of 39 4 3 Pirani Sensor Figure 4 3a shows a thin metal film resistive element on one micron thi
39. onnector 2 3 3 10 Modular Connector RS 485 The two RJ 11 Connectors are Feed Thru connections since they are wired in parallel see above fig RS 485 half duplex RS 485 full duplex Pin 1 T R Pin 1 T Pin 2 T R Pin 2 T Pin 3 GND Pin 3 GND Pin 4 GND Pin 4 GND Pin 5 n a Pin 5 R Pin 6 n a Pin 6 R 3 3 11 High and Low Set Point Modes The HPM 2002 OBE provides TTL outputs for process control These signals are available on the 15 pin connector see previous table in Section 2 4 The High set point can be viewed using either the display or the serial connection To view the high setpoint place the HPM 2002 OBE in the High mode by pressing the Select button until the High light on the mode bar is illuminated The display then shows the set point selected During normal operation the alarm light will illuminate and the TTL output pin 1 will go high 5V if the pressure exceeds set point To view the setpoint using the serial connection send H lt CR gt Similarly to view the Low set point place the HPM 2002 OBE in the Low mode by pressing the SELECT button until the Low light on the mode bar is illuminated The display then shows the set point selected 2002 Gauge Page 21 of 39 During normal operation alarm light will illuminate and TTL output pin 2 will go high 4 5V if the pressure becomes less than
40. pplying a known pressure of the correct gas composition see GAS MODE The factory calibration points are 800 Torr 7 Torr and lt 10 Torr The user s calibration points are not required to be exactly those values but should be somewhat close and must be within the ranges shown in the figure on page 15 The HPM 2002 OBE detects the voltage signal within the sensor tube which is converted and displayed as a pressure reading The resulting pressure reading determines which of the three coefficients will be adjusted HPM 2002 OBEVacuum Gauge Page 22 of 39 3 4 DeviceNet TM HPM 2002 OBE with DeviceNet option is shown in figure below 3 4 1 Overall Functional Description The DeviceNet module consists of a power conversion sensor transducer board microprocessor board and a user interface option board All communication is conducted via a 5 pin Micro style with center pin male pin contacts The module has passed the ODVA DeviceNet test and conforms to the vacuum pressure gauge device profile an Electronic Data Sheet EDS with limited features is also available upon request 3 4 2 DeviceNet description DeviceNet is a low level network that provides connections between industrial devices sensors and actuators and higher level devices controllers Both power and high speed digital signaling are contained within the same cable Controller Area Network CAN protocol is used to transfer commands and data across the bus Up to
41. rogen sse Conversion Factors for other gases are selectable Burst Pressure TUDE EM 150 psig Proof Pressure uuu ise deuote End as en aa AN E sepe RS 30 psig Nominal Operating Pressure Tube 1x10 to 10 Torr Input Opera ng 11 5 to 30 VDC Input Powers s uman u eeu e EE E EE 24 VDC 2 125 mA Maximum pressure above which may cause permanent damage HPM 2002 OBEVacuum Gauge Page 6 of 39 2 Installation This section is designed to assist in getting a new pressure gauge into operation as quickly and easily as possible Please read the following instructions thoroughly before installing the instrument 2 1 Receiving Inspection Carefully unpack the Hastings Model HPM 2002 OBE Instrument part HPM 2002 OBE and transducer tube part 20025 Inspect all items for any obvious signs of damage due to shipment Immediately advise the carrier who delivered the shipment if any damage is suspected Compare each component shipped against the packing list Ensure that all parts are present i e transducer electronics module hardware etc Optional equipment or accessories will be listed separately on the packing list 2 2 Quick Start e Unpack and inspect all items for any obvious signs of damage due to shipment Immediately advise the carrier who delivered the shipment if any damage is suspected e
42. rrupted or lost See next FAQ Why does my display temporarily show U as I pump the system down U stands for unconnected piezo This message may flash near the dual sensor crossover pressure range if the piezo zero calibration parameter has been corrupted or lost The RESTORE CALIBRATION command will download the calibration parameters from the HPM 2002 OBE to the sensor tube See the advanced setup guide Section 5 1 for more information If the error persists at the crossover point then a calibration of the Piezo sensor should be performed The Piezo Zero is updated when the Pirani pressure is less than 125 mTorr In order to update and save the Piezo Zero parameter e Pump out to 100 mTorr or less e Using SELECT step to the CAL function e Rotate ADJUST one step in either direction and then back to its original position CAL light starts flashing e Using SELECT exit the CAL function and return to the Run mode Changing the Piezo Zero will shift the atmospheric reading by the same amount therefor the atmospheric readong should also be checked and re adjusted if necessary Why does my display read U This message indicates that the voltage readings from the thin film Pirani sensor are outside any usable range This usually indicates that the sensor is defective and will need to be replaced HPM 2002 OBEVacuum Gauge Page 35 of 39 6 WARRANTY 6 1 Warranty Repair Policy Hastings Instruments warrant
43. s this product for a period of one year from the date of shipment to be free from defects in material and workmanship This warranty does not apply to defects or failures resulting from unauthorized modification misuse or mishandling of the product This warranty does not apply to batteries or other expendable parts or to damage caused by leaking batteries or any similar occurrence This warranty does not apply to any instrument which has had a tamper seal removed or broken This warranty is in lieu of all other warranties expressed or implied including any implied warranty as to fitness for a particular use Hastings Instruments shall not be liable for any indirect or consequential damages Hastings Instruments will at its option repair replace or refund the selling price of the product if Hastings Instruments determines in good faith that it is defective in materials or workmanship during the warranty period Defective instruments should be returned to Hastings Instruments shipment prepaid together with a written statement of the problem and a Return Material Authorization RMA number Please consult the factory for your RMA number before returning any product for repair Collect freight will not be accepted 6 2 Non Warranty Repair Policy Any product returned for a non warranty repair must be accompanied by a purchase order RMA form and a written description of the problem with the instrument If the repair cost is higher you will
44. six modes which can be entered in the bench top panel mounted HPM 2002 there is no interlock feature when the user changes the settings within a mode any adjustments that have been made will be permanent once the mode is exited exit without making changes permanent the user must turn the power off 3 2 2 High and Low Set Point Modes The HPM 2002 OBE provides TTL outputs for process control These signals are available on the 15 pin connector see previous table in Section 2 4 view the High set point place the HPM 2002 OBE in the High mode by pressing the SELECT button until the High mode light is illuminated The display then shows the set point selected During normal operation the alarm light will illuminate and the TTL output pin 1 will go high 5V if the pressure exceeds the set point Similarly to view the Low set point place the HPM 2002 OBE in the Low mode by pressing the SELECT button until the Low mode light is illuminated The display then shows the set point selected During normal operation the alarm light will illuminate and the TTL output pin 2 will go high 5V if the pressure becomes less than the set point To adjust a setpoint place the HPM 2002 OBE in either setpoint mode High or Low Next use the ADJUST rotary encoder until the desired setpoint is displayed Finally place the HPM 2002 OBE back in the Run mode The new set points are now stored in the HPM 2002 OBE s memory 3 2 3 Run Mode
45. ted via 5 pin Micro style with center pin male pin contacts The module has passed the ODVA DeviceNet test and conforms to the vacuum pressure gauge device profile an Electronic Data Sheet EDS with limited features 15 also available upon request 1 7 Specifications Measuring range 1 10 to 108 Torr O 1 3x10 to 1 3 10 mbar Accuracy N2 D 23952 u u u uu 2000 of reading 1 x10 to 50 Torr TET 1 5 of reading 50 to 1000 Torr Ambient temperature operating ene nene rsen nenne nnne ne rennen 0 to 50 Process control sss 2 TTL outputs 1 TTL remote zero command input Digital read E nP EE IE Four digit LED Bdquipment Operating ranges ier eie Ua 12 30 VDC Transducer mountng eee eerie nee ee ee eee i egi Any position without recalibration Transducer internal lt 1 5 Wetted HT Aa Au Si3N4 Si Pyrex REPE 316 stainless steel and High Temp Low Outgassing UHV Epoxy Weight OBE amp HPM 2002s 12 oz 1 8 NPT tube Calibrated for nit
46. the set point To view the setpoint using the serial connection send L lt CR gt The set points can be adjusted using either the controls on the gauge or the serial connection To adjust a setpoint using the manual controls place the HPM 2002 OBE in either setpoint mode High or Low Next use the ADJUST rotary encoder until the desired setpoint is displayed Finally place the HPM 2002 OBE back in the Run mode The new set points are now stored in the HPM 2002 OBE s memory Or simply use one of the Modify High Setpoint Commands e g H m dd E e lt CR gt 3 3 12 Run Mode The HPM 2002 OBE will automatically enter the Run mode upon start up This is the mode for normal operation and the mode in which the instrument will spend most of its time In the Run mode the HPM 2002 OBE will continuously monitor the pressure update the alarm conditions and update the display about ten times a second 3 3 13 Cal Mode Optimal performance of the HPM 2002 OBE is achieved by performing in situ adjustments to the calibration coefficients in the Cal mode There are three calibration coefficients These are the zero coefficients the midrange coefficient and the atmosphere coefficient Once a tube has been fully calibrated the midrange coefficient should never need further adjustment but it may be helpful to adjust the zero coefficient or the atmosphere coefficient under certain circumstances The CAL MODE presupposes that the operator is a
47. ue pressure regardless of gas composition The Pirani is gas composition sensitive so the actual composition must be known and the Pirani calibrated in that gas When the vacuum system s gas composition is dominated by a single gas species for example during system venting with an inert gas the user can enter a gas selection into the HPM 2002 OBE by rotating the ADJUST rotary encoder view the gas selection depress the SELECT button until the GAS light is illuminated The number on the display corresponds to the gas See the table below Gas Selection Table Gas Mode Gas Displayed Number 00 Nitrogen 01 Argon 02 Helium 03 Water Vapor 04 Custom 3 2 6 Analog Output 4 20mA The dual output option board provides current output proportional to the HPM 2002 OBE s pressure reading The first channel pins 5 amp 10 corresponds to the higher pressure range 1 1024 Torr The second channel pins 7 amp 11 corresponds to the lower pressure range 0 1000 mTorr The equation below gives the output current of the pressure 16mA I channell lt 4mA p Torr 1024Torr 16mA I channel2 4mA channel2 4mA p mTorr ee Note that for both channels the output is always between 4mA and 20mA specifically when the pressure goes below 1 Torr channel 1 current will be approaching its minimum of 4mA and when the pressure is above 1 Torr channel 2 current will be 20mA HPM 2002 O
48. uge Page 38 of 39 2 30 58 4mm Ai G 1 8 NPT HPM 2002s 01 2 30 C 58 4mm 1 2 O D Smooth Tube HPM 2002s 07 3 27 83mm 1 4 VCR 20028 02 2 57 65 3mm 2 3 4 Conflat 20028 04 Tube Outline Drawings all dimensions shown are approximate HPM 2002 OBEVacuum Gauge Page 39 of 39
49. ult command is used to place calibration parameters into the CPU From this point the gauge can be calibrated After calibration the calibration parameters are stored in the HPM 2002s tube s EEPROM lt CR gt Software Reset rrrr This command performs a complete reboot of the HPM 2002 OBE The CPU is reset and the tube s calibration parameters are loaded lt gt 5 2 Frequently Asked Questions Why does my display read Err1 This message indicates that an error has occurred during transfer of data between the HPM 2002 OBE s CPU and the sensor tube s EEPROM where the calibration coefficients are stored If this error occurs during initial startup then the factory default calibration coefficients will be automatically loaded The factory defaults are often not accurate typically 50 or greater however they allow the user to calibrate the gauge If the sensor tube s EEPROM cannot communicate with the CPU then any new calibration will be lost when the gauge power is disconnected Sensor tube EEPROM performance can be verified by use of the RESTORE FACTORY DEFAULTS and the RESTORE CALIBRATION commands in the following manner After calibration use the RESTORE FACTORY DEFAULTS command The pressure reading will shift dramatically Immediately use the RESTORE CALIBRATION command The pressure reading will return to the calibration value if the tube EEPROM communication is working properly See the advanced s
50. wn the UNIVERSAL ADDRESS 00 may be used to set the address to a known value e g 35 lt gt will change the RS 485 address to 35 Caution Since all units will respond to the UNIVERSAL ADDRESS make sure that only the unit to be modified is connected to the RS 485 Bus If more than one unit is connected this will result in all of the units being set to the same address The UNIVERSAL ADDRESS is used for setup only i e to set all units to the same gas data is never transmitted when the UNIVERSAL ADDRESS is used The value entered for the Turnaround Delay is used to modify an internal timer which normally runs at 8 millisecond e g aa 10 lt gt will set the delay to 80 milliseconds If the command syntax 15 not met or if the number is out or range the HPM 2002 will respond with the ASCII codes for bell CR and the command will be ignored 3 3 5 Calibration Adjustment Commands Command Description Format Valid Range Set Full Scale Calibration Efe CR 5 12e 2 to 1 023 3 Torr 6 83 2 to 1 365 3 mbar 6 83 4 to 1 365 5 Pascal Set Midpoint Calibration Efe CR 4 00 0 to 7 999e 0 Torr 5 34 0 to 1 066 1 mbar 5 34 2 to 1 066 3 Pascal Set Low Scale Calibration Efe CR 0 to 1 2499e 1 Torr 0 to 1 666e 1 mbar 0 to 1 666 1 Pascal Notes The calibration adjustment data may also be entered as a d
Download Pdf Manuals
Related Search