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106-914-E Summit 11_12K User`s Guide

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1. Chapter 6 Troubleshooting 71 MICROSCOPE LIGHT IS NOT ON Area to check Check this Refer to Power for light Power cord plugged Installing into MICROSCOPE POWER not AUXILIARY POWER on probe station or plugged into wall outlet 12000 series only Probe station power Installing connected 12000 series only fuses Probe station fuse OK Light source fuse OK Microscope documentation Light bulb OK Microscope documentation Microscope Aperture shutter slide Microscope open documentation TopHat cover Shutter open Verifying and Operating 2000 series only PCS status button Indicates light is on PCS User Guide and online Help AUXILIARY POWER DOES NOT FUNCTION 12000 series Only ry NOTE The auxiliary power test requires you to plug a light into AUX POWER on the probe station manifold Area to check Check this Refer to Power for AUX Power cord plugged Installing into AUXILIARY POWER not MICROSCOPE POWER on probe station Probe station power Installing connected Fuses Probe station fuse OK Light source fuse OK din Spent ocumentation Light bulb OK Auxiliary equipment documentation PCS status button Indicates power is on Nucleus or PCS User s Guide and online Help 72 Summit 11K 12K Probe Station User s Guide Thermal Station Symptoms and Solutions This section gives information on
2. 251 073 WSHR 8 FLT 2 places m3 100114 BRACKET SHIPPING RST 01 Fig 23 Shipping restraints manual head 34 Summit 11K 12K Probe Station User s Guide f WSHR 010 FL WSHR 10 FLT Q 211 017 SCR SHC 10 32 X 0 62 o _ Shipping 2 109 610 li TAG SHIPPING Bolt BOLT RED oe _ _ nn SCS 0832 138 L Irt ois chi SCR SHC 8 32 X1 38 f ay 251 073 WSHR 8 FLT N y 100114 BFW 175088 BRACKET SHIPPING RST 01 STANDOFF Fig 24 Shipping restraints motorized head MOUNTING A MICROSCOPE Your station can be used with one or more of the following microscopes or equivalents Mitutoyo Finescope Optem A Zoom e Olympus Zoom Stereo To mount the Mitutoyo FS 60 Finescope Prior to mounting the microscope ensure that the 2 setscrews located on the left side of the microscope s mounting plate are unscrewed back out of the way before mounting on the microscope transport Chapter 3 Installing 35 Iris Control Camera Port Lever at rear F Setscrews Gross Adjustment Fine Adjustment Knob Objectives Fig 25 Mitutoyo FS 60 microscope assembly 1 Slide the Mitutoyo FS 60 Microscope on the dovetail mount and tighten the two setscrews on the left side of the mount with a 5 64 inch hex wrench 2 Slide the i
3. Vacuum controls VERIFYING THE Z LEVER The Z lever is located on the probe station s lower left side When you raise and lower the Z lever the wafer should stay in focus throughout the platen s travel When operating correctly the Z lever stays in the place when you release it Fig 42 Z lever location CAUTION f the Z lever friction is not adequate the platen can drop suddenly and damage your probes positioners and the wafer Set the friction so that the platen stays in position when you raise Z lever To prevent damage to the probes to the chuck surface or to your wafer check and adjust the Z lever friction as described in Maintaining Check the friction adjustment monthly and whenever you change the probing arrangement 54 Summit 11K 12K Probe Station User s Guide See a prober control software User s Guide PCS or Nucleus and online Help for more details on semiautomatic X Y stage movement For 11000 series only Repeat steps 3 and 4 for the other X axis control VERIFYING X AND Y AXIS STAGE MOVEMENTS You can control the X Y stage with a mouse a joystick manually or semi automatically You find the X and Y and theta controls at the front of the probe station near the base of the stage fig 43 1 Turn the Y axis control clockwise to move the stage forward Reverse rotation to move the stage backward 2 Turn the X axis control clockwise to move the stage to the right Reverse rotat
4. To connect positioner vacuum The optional vacuum manifold provides six to ten vacuum connectors for Cascade s vacuum mounted DC positioners On the large area optics bridge these vacuum connectors are in the center of the connection panel on the rear of the platen On the high stability optics bridge the vacuum connectors are located on the left and right sides under the bridge 1 Attach 1 16 inch inside diameter hoses to each DCM positioner vacuum base 44 Summit 11K 12K Probe Station User s Guide East west positioners are 0 positioners north south positioners are 90 positioners 2 Attach the other end of each hose to a connector on the connection panel 3 Attach an 1 8 inch inside diameter hose from the connector on the back of the vacuum manifold to your vacuum pump E NOTE With enough capacity you can use the same vacuum pump for both the chuck vacuum and the vacuum manifold Otherwise use separate vacuum pumps To use the same vacuum pump for the chuck vacuum and the vacuum manifold use a tee fitting to connect into the vacuum hose attached to the rear of the probe station 4 Flip on up position with switch configuration or push in with valve configuration all the vacuum connectors that you are using Turn off all unused connectors CAUTION Loss of vacuum can cause probe tips to crash Be careful not to accidentally turn off any vacuum connectors or the vacuum pump If you a
5. ns 14 i oso AEN T 14 deo 15 D ea eased ue IRR ee 15 Miersthember ses dann 15 125001200012700 AD aai i 15 IE DU PODE GOIO seanina RD eq ME ti bHdEs 15 deve dco lenia EET T TRE 15 12500 Guarded Probe SIONS nennen 16 CELS Pec NENONS MOT M 16 12600 Themnal Probe SIONOPIS nad 17 Chuck Eee te ee 17 12700 Guarded Thermal Probe Stations seen 17 eue SOC IO momies an 17 12800 Guarded Ihemiol Probe SIOTIDPS 2 anne 18 Chuck SDOCIIOCOHHOLDBS ua een 18 UNI Oele ae su 19 DIMENSIONS eek 19 el RM TUM 19 ROTON STOQE e 19 OEL e ei PME TNNT ae UN eee 19 C Aer 19 u 011 0 gt qm Hm 19 Mer ute ge ol eae epee eee IEEE EE 19 CR Cs OI B nd dt 20 leurs VUS Rae te UNE aa 20 Tego Guarded Probe MIS E E o 21 Chuck ON NINE TT 21 Total Systemi PIONO aaa nn 21 11600 Thermal Probe SIOHOPIS asien 22 dye deese eT Y 22 Toral ou uis seguir T TTE 22 11700 Guarded Thermal Probe SIODIOna ans a 23 xviii e Summit 11K 12K Probe Station User s Guide Chuck SESSION ren 23 lerne c uere 112 AN SmPPHENEEROEONEINENEENESIPLELVEONEEHESUTEUEENEUNERFVEEUNENE eni aia R 23 11800 Guarded Thermal Probe STOFOFS u ea 24 Mi De ds elle dion yrei E S T 24 TOI SIT PEDIS neuere ak 24 Installing 25 a a DT EUM 25 Nigel e aT IDE mS 25 TOOB cee om n 25 STUCCO 4
6. REIA NURM GW E ET DO DO 77 IKE iQ PR P Glossary 79 Index 81 Contents xxi xxii Summit 11K 12K Probe Station User s Guide CHAPTER Station Overview This overview covers General features of the Summit 11000 series manually operated and 12000 series semiautomatic analytical probe stations Applications Facilities and computer requirements Optional accessories e Standard accessories e Recommended configurations Environmental considerations How to use the emergency stop button EMO Features The Summit 11500 12500 11600 12600 11700 12700 and 11800 12800 series probe stations enable you to make test measurements inside an integral low noise shielded and light tight MicroChamber CHUCK SUMMIT 11500 12500 11700 12700 AND 11800 12800 This chuck is isolated and guarded making it ideal for ultra low level leakage DC and CV measurements The chuck guard connects to the external test equipment s Source Monitor Unit SMU guard A connection panel provides convenient triaxial or quadraxial connections The low capacitance guarded chuck environment enables you to make accurate current and voltage measurements The chuck significantly reduces measurement settling time and eliminates the need to make offset capacitance corrections Two Kelvin type triax connectors for chuck bias voltage and sense or for chuck grounding are located on the left bac
7. door interlock 49 frost or moisture 73 74 interlock 3 purging 10 TopHat 43 MicroChamber door interlock switch viii MicroChamber 11000 series specifications 19 MicroChamber 12000 series specifications 13 15 MicroChamber 12500 series access door 1 Microscope light not on 72 Microsoft windows 4 Moisture in MicroChamber 73 74 N notational conventions ii O Optics bridge counter balance 41 planarize 42 Optics bridge mount shipping restraints 34 P Planarity 11100 series 20 11500 series 21 11600 series 22 11700 series 23 24 12000 series 14 12500 series 14 12600 series 14 12700 series 14 Planarize optics bridge 42 Platen adjusting z lever 66 shipping restraints 30 Platen 11000 series specifications 19 Platen 12000 series specifications 14 Positioner vacuum 44 Positioners install 43 Power safety interlock 49 Power cords connections 39 Power requirements 12000 series 13 Probe card adapter 9 Probes install 43 Q Quadrax cable 39 R Rail plate 32 README file v Returning the station 77 RF positioners 8 install 45 RMA number 77 Roll out stage 5 shipping restraints 29 S Safety environmental conditions 10 summary Vil Safety standards CE vii ETL vii SEMI S3 0200 vii SEMI S3 0200 safety standard vii Shipping block 33 Shipping bracket 31 Shipping equipment 25 Shipping restraints removing 28 Shorting link 12000 series 5 Stage 55 55 Stage 11000 series specif
8. 4 Pull the roll out stage handle toward you The stage slides smoothly to the front of the probe station With the stage in this forward position you can safely load and unload wafers to and from the chuck 5 Push the roll out stage handle back toward the stage The stage slides smoothly back and clicks gently into its lock 6 Turn the roll out stage handle clockwise to lock the roll out stage in place If the stage does not roll out as expected check that you removed the roll out stage shipping restraints Roll out stage handle MicroChamber MicroChamber access door Fig 44 Roll out stage 56 Summit 11K 12K Probe Station User s Guide The auxiliary stage vacuum is independent from the main wafer stage vacuum VERIFYING CHUCK VACUUM CONTROLS A bank of toggle switches lets you turn vacuum on and off at 13 mm 0 5 in 75 mm 3 in and 150 mm 6 in diameters See table 3 NOTE On a 12000 series station the 13 mm 0 5 in toggle switch is replaced by prober control software Table 3 Vacuum switch settings Chuck Diameter 13 mm switch 75 mm switch 150 mm switch 3 in ON ON OFF 0 5 in ON OFF OFF in ON ON ON The vacuum control switches are under the platen on the probe station s right front corner See figure 41 on p 53 The top two toggle switches control the vacuum to the front and back auxiliary stages The bottom three switches control the vacuum to th
9. To moun DCM DOSITIDPIGIE sans br be e Fu iene neds tla eda 43 TO connec DOSHOneI VACUITY eures 44 RUN er FEN ER ee 45 To install the positioners one at a time LS 46 M rite Probe Card Holder Nm 47 BO RME cases nen eee ade eas 47 To install the MicroChamber TopHat JS 47 sor Chuck pi and Pers 48 Elecincal isolation end CNUCK DISIN 2 saisine M eve Ee pPPRI M po eE0ds 48 Ns qd a she ART een 50 Thermal Equipment Installation 2 2 audi erba abb kh eh he t rb Reda ci 50 Verifying and Operating 53 Using he Emergency Off BUTON EMO si pisevk Petido baden aaa 53 Verifying the 11000 or 12000 Series Probe Station Manually 54 Contents xix Verifying MEZ sin 54 Verifying X and Y Axis Stage Movements sees 55 Yering Theta AUSTIN anne aaa a 55 bin avi locu see 56 Vening Chuck Vacuum C OPTIO een 57 Verifying the Microscope and Video Adjustments eee 58 Nucleus software supports the programmable scope transport if the op tional autoprobe module PN 123 567 is purchased This module controls me EL 255 ue 4swe o MYTH m 58 Verifying the 12000 Series Station with Software eene 58 Ex vare i TTD TTE 59 Running mne Ven SOMONE san 59 feo mua Tesiaren LS 60 To view a tests dialog box without running the Test mcrcisnecornnsiisan 60 sr cena 31 09018 qem eas 60 TO PU BET ran 60 ler qp use E EE E I I 60 To get more information on verify software seen 60 bug itk De e d T
10. rieur des entr sortie l arri re de l appareil Serial number is located on the frame rail at the front of the station inside the lower right door die Serien Nummer befindet sich am Rahmen an der Vorderseite der Station Innenseite der rechten Tuer Before You Begin iii Le num ro de s rie se trouve sur le cadre a l avant de l appareil situ a l int rieur de la porte inf rieure droite Model 11000 Probe Station Model 12000 Probe Station Cascade Microtech inc Cascade Microtech ing Beaverton OF 97008 USA Beaverton OF 970085 USA Single Phase 60 80 Hz Single Phase 60 60 Hz 115 230 VAC 4 020 A i an 115 230 VAG 4 0 2 0 A T ETL Used ETL Linked Conforms h LAL Sendo 3081 1 Conforms to UL Sondand 3081 1 Cathe CAPE CS ka 0000 62613 Gere CANCSACH Na inno 62613 Model 11000 12000 Probe Station Cascade Microtech Inc Beaverton OR 97006 USA Single Phase 50 60 Hz 115 230 VAC 4 0 2 0 A ETL Listed Conforms to UL Standard 3101 1 Certified to CAN GSA C22 2 No 1010 1 Modell S300 Probe Station Cascade Microtech Inc Beaverton OR 97005 USA einphasig 50 60Hz 115 230 VAC 4 0 2 0 A ETL eingetragen entspricht UL Standard 3101 1 zertifiziert nach CAN CSA C22 2 No 1010 1 Mod le S300 Station de Mesures Sous Pointes Cascade Microtech Inc Beaverton OR 27005 Etats Unis Courant monophas 50 60 Hz 115 230 VAC 4 0 2 0 A Inscrit ETL Conforme aux standards
11. x Summit 11K 12K Probe Station User s Guide Electric Shock Hazard Chuck Bias Voltage May Cause Injury Remove Chuck Bias Voltage Before Changing Wafer Electric Shock Hazard Chuck Bias Voltage May Cause Injury Operate Only With Interlocked Bias Source WARNING Electric Shock Hazard Chuck Bias Voltage May Cause Injury Remove Chuck Bias Voltage Before Changing Wafer ACHTUNG Stromschlag Chuck unter Spannung vor Waferwechsel BIAS Spannung abschalten Attention Risque d lectrocution Une tension lectrique pr sent sur le plateau peut tre dang reuse Mettre le plateau la terre pour le d charger avant de changer le wafer WARNING Electric Shock Hazard Chuck Bias Voltage May Cause Injury Operate Only With Interlocked Bias Source ACHTUNG Stromschlag Chuck unter Spannung nur mit gesicherter BIAS Quelle betreiben Attention Risque d lectrocution Une tension lectrique pr sent sur le plateau peut tre dang reuse Faire fonctionner exclusivement en utilisant une source de voltage muni d un verrouillage de s curit Safety Standards xi Elactric Shock Hazard UPS Supply Output Mees Hands Clear Heavy Equipment Om 360 Lb 164 Kg Back Strain Injury Possible Several Persons Required To Lift Equipment WARNING Electric Shock Hazard UPS Supply Output Keep Hands Clear ACHTUNG Spannung UPS Versorgungsausgang nicht beruehren At
12. 3 Installing 29 To remove the platen shipping restraints 1 There are three short metal blocks screwed in place under the platen on the right and left sides of the station You must carefully remove the blocks to prevent them from falling inside the station fig 15 2 Loosen 1 16 to 1 8 inch but do not remove the top 8 screws holding the blocks in place 3 Slightly raise the platen with the Z lever to release the pressure on the shipping blocks 4 Rotate each block one quarter turn hold onto each block remove its screw then remove the block SS SG ee Fig 15 Platen shipping restraints 30 Summit 11K 12K Probe Station User s Guide To remove the x y stage shipping restraint 1 Unscrew the 2 8 screws holding the X Y stage shipping restraint marked with a red tag and remove fig 16 xy stage shipping restraint Capscrews Fig 16 X y stage shipping restraint LARGE AREA MICROSCOPE BRIDGE MOUNT To remove the optics bridge mount shipping restraints The optics bridge has six shipping restraints two in the front two in the back and two on the counterbalance To remove them you need a 9 64 inch hex wrench Fig 17 Bridge shipping restraints To remove the shipping blocks and spacers 1 With the 9 64 inch hex wrench remove the two 8 32 screws securing the shipping bracket to the front of the lift plate and the top plate fig 17 Save the screws Chapter 3 Inst
13. If operating in a high humidity environment then use a fan to direct airflow across and around the MicroChamber Tips for Using the Low noise Guarded Thermal Chuck When Do this After installation and before first use Summit 11700 11800 12700 and 12800 stations OR Before use if station has not been used for several days Install the triax shorting plug P N 104 740 onto one of the chuck triax connectors keep the triax shorting plug installed for at least one hour NOTE Cascade recommends that you install the shorting plug whenever the station is not in use to prevent charges from building up in the chuck We also recommend that you install the shorting plug when you are not measuring substrate current or biasing the chuck After installation and before first use OR Before use if the station has not been used for several days Turn on dry air with flow rate set to 3 CFM keep airflow on for at least one hour to dry out all moisture from MicroChamber and chuck Before wafer unload and load Turn the chuck temperature to 41 C to prevent frost formation on the chuck when the MicroChamber door is open Internal surfaces and hoses drop to 50 C if the chuck temperature is programmed to be less than 40 C or if the chuck is more than 10 warmer than the setpoint temperature Before setting temperature below 40 C Turn on dry airflow to 2 3 CFM and
14. TL 6 Pea Ded C IBID er 61 PESTO SO e T 6 Purge The MicroCharmber wih dry OF aaa 61 Second SED C 62 With the Temptronic controller fill The coolant reservoir 62 Ar Dryer SOT IS ETE IUSTUM 62 Handling Waters with The MieroCchamber sisi sise 62 TO lodd WHAT ER D 63 PASSES OR ea Ea AAEE aaa 63 Maintaining 65 Preventive Maintenance Procedures sis 65 Clegnino Me Probe STONON PERI i ert 65 To learn the probe MONO sanitaire a 65 ae re ONE bevar ule ea Rm LI 66 To check 4 uagecciuMe m 66 Maintaining Probe Station Accessories nne 67 Troubleshooting 69 deem rp de SER SE ARTT Kc 69 Computer Does Nor Tum On Nothing Wolle nenn 70 Stage Whines on Attempted Move seen 70 X Y Stage or Z Stage Does Not MOWVO us te eet tirer stent scopis 7 Vacuum Not Detected by Sensor or Wafer Not Held on Chuck 71 Joystick Error Message or Stage Wanders in Joystick Mode 41 Microscope Dan is NOT ON nennen 72 Auxiliary Power Does Not F unction nemen 72 Theurniol Station Symptoms and Tolle dansante 73 Thermal TOON Shuts DOWD anna 73 Set and Actual Temperature Do Not Match JR 73 Frost or Moisture Appears in the MicroChamber 73 Frost or Moisture Outside the MicroChamber seen 74 xx Summit 11K 12K Probe Station User s Guide Tips for Using the Low noise Guarded Thermal Chuck ssssscccccccccieceen 74 Service 77 Penang aus mM TEL NP y
15. User s Guide UNPACK To unpack your probe station 1 Your probe station weighs approximately 163 kg 360 Ib by itself You received two or more crates that together weigh up to 272 kg 600 Ib Position the crates as close as possible to your work area using a forklift minimum 272 kg or 600 Ib capacity Cut the bands holding the crates together Remove the top crate and set it on the floor Your probe station is bolted to a pallet and then a crate is bolted over the station Unbolt six bolts lift off the wooden top and set it on the floor Unpack both crates and check the parts against the packing list 5 Unbolt the crate sides eight bolts and lift them off the station At this point the probe station is still bolted to the bottom pallet Remove the probe station s plastic vapor barrier so you can see the probe station Screw in the lift handles two on each side Note that the front handles may not screw in all the way fig 11 Fig 11 Lifting handles Chapter 3 Installing 27 Fig 12 Hold down bolts 1 Unbolt from underneath the pallet the 4 bolts holding the probe station to the bottom pallet fig 12 2 Use the forklift to position the probe station next to and at the same height as your workbench 3 Four people should lift and slide the probe station onto the workbench 4 Once the station is positioned you can unscrew the lift handles and cover the screw hol
16. allow MicroChamber to purge for 10 15 minutes During measurements Make sure that the wafer is on the chuck and vacuum is turned on Sufficient vacuum is required Insufficient vacuum can increase chuck noise 74 Summit 11K 12K Probe Station User s Guide During measurements Ground the chuck with the shorting plug OR Connect the chuck to a voltage source to prevent slight charge accumulation During measurements For temperatures above 40 C dry airflow is not required OR For temperatures below 40 C turn on dry airflow to 2 3 CFM OR If you will be transitioning between temperatures above and below 40 C turn on dry airflow to 2 3 CFM When station is not in use We recommend that you install the shorting plug whenever the station is not in use to prevent charges from building up in the chuck Chapter 6 Troubleshooting 75 76 Summit 11K 12K Probe Station User s Guide CHAPTER Service This section explains what to do when your Cascade customer service representative requests that you return the probe station for service Probe station repairs carry either a 90 day warranty or the balance of your original probe station warranty if greater Preparing to Ship To pack probes and accessories see specific product documentation RMA NUMBER Before shipping a probe station to Cascade obtain a Return Material Authoriza
17. cables and accessories for low level measurements Chapter 1 Station Overview 9 For high frequency measurements Cascade recommends DC and RF positioners e HPC series probes or ACP series probes e RF cables elbows and accessories ENVIRONMENTAL CONDITIONS Your probe station works safely in the same environment as your PC Use the probe station under the following environmental conditions ndoors only e Altitude up to 2000 m Temperature 5 C to 40 C Maximum relative humidity 80 for temperatures up to 31 C decreasing linearly to 5076 relative humidity at 40 C Main supply voltage fluctuations not to exceed 10 of the nominal voltage CAUTION A total current of 3 2 1 6 A is required for both auxiliary and microscope outlets The combined leakage current of accessories attached to these two outlets must be less than 2 85 mA Thermal Controls See thermal controller documentation for more information on thermal equipment controls 11600 11700 11800 12600 12700 and 12800 Only These thermal probe stations include the thermal chuck with a chuck bias connection located at the left back of the MicroChamber The thermal controller and cooler circulator and air dryer are options THERMAL CONTROLLER AND COOLER CIRCULATOR The thermal controller and cooler circulator maintain the desired test temperature of the thermal chuck A power cable heats the chuck The cooler circulator
18. mmn 0 22 in linear lift Z lift repeatability lt 2 micron 0 08 mil Material Nickel plated steel ROLL OUT STAGE Travel 25 cm 10 in CHUCK For in depth chuck specifications see the individual station numbers Size 200 mm 8 in diameter 150 mm on 6 in stations Travel rotation Resolution rotation 1 per turn Surface Gold plated or nickel plated aluminum with provisions for grounding or biasing 14 Summit 11K 12K Probe Station User s Guide X Y STAGE Travel 203 mm x 203 mm 8 in x 8 in Resolution 0 1 micron 004 mil Bearings Cross roller Stage travel speed gt 51 mm second 2 in second Repeatability lt 1 micron 04 mil Accuracy lt 2 micron 08 mil aRepeatability and accuracy specs are one sigma Z STAGE Travel 5 mm 20 in Resolution micron 04 mil Stage travel speed gt 15 mm second 6 in second Repeatability lt micron 04 mil Accuracy lt 2 micron 08 mil aRepeatability and accuracy specs are one sigma MICROCHAMBER 12500 12600 12700 12800 EMI Isolation Yes Light tight Yes Enclosure Dry air inert gas purge capable Maximum number of positioners Eight DCM seven with high power microscope or four RF 12100 PROBE STATIONS The 12100 probe stations are designed so tha
19. mount RF style positioners To mount positioners and adjust probes see the following documents Microwave Probe Positioner User Guide P N 101 179 RF Positioner Installation Instructions P N 106 338 To mount DCM positioners Except for the rear port that interferes with the microscope you can mount the DCM positioner at any seal in the TopHat if you have a MicroChamber See figure 36 Procedure 1 Lower the Z lever to lower the platen This position keeps the probe head from crashing into the chuck after installation Chapter 3 Installing 43 CAUTION Positioners are precision instruments so handle them carefully Avoid bumping or dropping the positioners Avoid handling that scratches or causes burrs on mating surfaces 2 Inspect the surface of the positioner the positioner mounting plate and the platen They should be free of contaminants 3 Adjust the Z axis knob counterclockwise to raise the positioner all the way up This ensures clearance between the chuck top and the probe you install 4 Set the X axis and Y axis knobs in the center of their range 5 Place the positioner close to where you want it once you mount the probe 6 If this is a vacuum positioner connect vacuum to one of the vacuum barbs on the connection panel and flip the switch on up position 7 Mount probes and probe cables Ws 9 9 ai 2 Fig 32 MS1 positioner without arm and a south positioned mount on platen
20. never jarred off submicron targets by closing dark box or MicroChamber doors You can electrically isolate the MicroChamber from the probe station and purge it with dry air or inert gas 2 Summit 11K 12K Probe Station User s Guide Probe station controls reside outside the enclosed area to provide easy access to probe positioners the microscope and positioning controls y MicroChamber access door Fig 3 MicroChamber access door and roll out stage Interlock Switches for Access Door To protect you from hazardous voltages on the chuck the MicroChamber provides two access door interlock switches The software controlled switch closes when the MicroChamber access door closes and opens when the access door opens In addition a hardware interlock BNC is on the right rear of the probe station fig 9 on p 26 and fig 10 on p 26 You must connect a cable from the BNC connector to the interlock connector on the chuck biasing power supply PRECISION POSITIONING 12000 Series Only The closed loop position feedback system provides micron accuracy for test measurements Submicron moves enable you to test the smallest wafer geometries Stepper motors ensure fast and quiet X Y Z positioning COMPUTER CONNECTION 12000 Series Only System electronics are integrated into the probe station s base with a single control cable connecting the station to the computer See also the Facility and Computer Requirements sec
21. pumps coolant fluid through the chuck to chill it The MicroChamber access door includes an interlock switch that you can connect to a warning indicator This indicator prevents injury if the chuck is at a thermal extreme when the MicroChamber door is open AIR DRYER The air dryer unit dehumidifies the air used to purge the MicroChamber This prevents frost from forming during cooling Alternatively you can use dry nitrogen or another inert gas to purge the MicroChamber THERMAL CHUCK The thermal chuck is electrically isolated from the rest of the probe station 10 Summit 11K 12K Probe Station User s Guide On the Summit 1X600 series you can apply a bias voltage or ground the chuck surface through the BNC connector located at the left back of the MicroChamber The center of the BNC connector carries the chuck surface bias or guard voltage The outer shield of the BNC connector provides a connection to the MicroChamber On the Summit 1X700 and 1X800 series you can apply a bias or guard voltage or ground the chuck surface through two Kelvin type triax connectors located at the left back of the MicroChamber Shield Force Triaxto Chuck Chuck surface connection MicroChamber Chuck guard layer connection connection Fig 8 Force guard and shield connections Chapter 1 Station Overview 11 12 Summit 11K 12K Probe Station User s Guide CHAPTER 2 Station Specifications All Ser
22. user guide before changing internal and external voltage settings VORSICHT Brandgefahr System Eingangsspannung ist konfiguriert auf V Aenderungen der internen und externen Spannungsversorgung nur gemaess der Bedienungsanleitungen Attention Risque d Incendie L quipement t configur pourune alimentation lectrique de ____V Se r f rer au manuel d utilisation avant d intervenir sur la configuration interne ou externe de la tension de service Safety Standards xiii Ultraviolet Radiation Hazard Avoid exposure when hber optic cable is not connected Remove Power when servicing Fire Hazard Can Cause Serious Fire Damage Or Burns Replace Fuse With Same Type Or Rating TO 5A 250V Caution Ultraviolet Radiation Hazard Avoid exposure when fiber optic cable is not connected Remove Power when servicing VORSICHT UV Strahlung bei offenem Glasfaserkabel fuer Servicearbeiten Versorgungs Spannung abschalten Attention Risque de pr sence de rayons ultra violet Eviter une exposition quand la fibre optique est d branch e D connecter l alimentation g n rale avant toute intervention de maintenance Caution Fire Hazard Can Cause Serious Fire Damage Or Burns Replace Fuse With Same Type Or Rating TO 4A 250 V VORSICHT Brandgefahr Sicherung nur mit passendem Typ TO 4A 250V ersetzen Attention Risque d Incendie Risque de dommages importants par le feu risqu
23. 12800 Only Chapter 3 Installing 51 Install coolant 1 Fill the coolant reservoir See also the Temptronic manual for additional information 2 Check thermal functions 52 Summit 11K 12K Probe Station User s Guide CHAPTER 4 Verifying and Operating This chapter explains how to Use the Emergency Off button EMO Verify and use the 11000 or 12000 series probe station Test the thermal chuck thermal stations only Test the joystick Using the Emergency Off Button EMO The button will not lock unless it s pushed or keyed to lock for maintenance 1 Identify the red button on the right front of the station 2 Push to stop all movement on station 3 The system key must be inserted and turned clockwise to release the button and restore power Fig 41 Emergency Off button EMO Chapter 4 Verifying and Operating 53 Verifying the 11000 or 12000 Series Probe Station Manually We recommend that you run these tests on either the 12000 series or 11000 series base station These procedures assume you are facing the front of the probe station Adjust the Z lever friction after you install probes and accessories To adjust see Maintaining Before installing any accessories verify the probe station s components Tools are not needed This discussion explains how to verify the Z lever e X axis and Y axis movements Theta adjustments Roll out stage
24. 17 18 23 24 Cleaning 65 Computer cables 39 failure 70 install 39 Conditions environmental 10 Configurations 9 Connections air 39 control cables 39 power cords 39 vacuum 39 Control cable connections 39 Control locations 55 conventions notational ii Counter balance optics bridge 41 Customer service 69 RMA number 77 D DCM positioners 8 Declaration of conformity xo Dimensions 11000 series 19 12000 series 13 Dry air requirements 13 E Emergency off button 53 EMO 53 Environmental conditions 10 ETL safety standard vii F FemtoGuard 2 Frost in MicroChamber 73 74 Fuses 72 computer 70 driver module 70 microscope light 72 G Glossary 79 Guarded probe station 16 Guarded thermal probe station 12700 series 17 18 24 H High Stability bridge mount 7 Hoses install 39 HP4142 cable 39 HP4145 cable 39 Humidity 10 Identifiers iii Installation packing materials 25 tools 25 Interlock 3 Interlock switch MicroChamber door viii IPA 65 Isopropyl alcohol 65 J Joystick troubleshooting 71 Joystick 12000 series 61 testing 61 L Laser warning vii Lifting handles 28 Lifting requirements 25 Lock Out Tag Out vii Locking workstation lock button vii with password vii without password vii Low current measurements 74 Index 81 M Maintenance cleaning 65 monthly 65 z lever 66 Manual station tests 53 12000 series 53 Measurements low current 74 MicroChamber cleaning 65
25. C 25 UH s ere e MN E TIE E ETIN aies 27 Te unpaok vour BIO DE BICHON ai een 27 Remove and Save Shipping Restraints Vor es 28 To remove the roll out stage shipping restraints ecccccccccrerrccrnnreen 28 To remove the GT chuck shipping restraints see 29 To remove the platen lift handle shipping restraint sssssese 29 To remove the platen shipping restraints sse e 30 To remove the x y stage shipping restraint see 31 Large Aread Microscope Bridge MOUNT usa 31 To remove the optics bridge mount shipping restraints 31 To remove the shipping blocks and spacers see a High Stability Microscope Bridge MOUN zer sense ea 33 To remove the optics bridge mount shipping restraints 33 Yale Blau D Bp c M 35 To mount the Mitutoyo FS 60 Finescope JT 25 Ta mount me opem A Zoom NEE ann 36 To mount the Olympus Zoom Stereo microscope eee 38 Ine ine Computer gnd POSSE ibi REMEDIES 39 To install the computer cables and hoses ssiirrriirrirrsrrrrrrrrrrrrrrern 39 Cunneer ihe chuck Vireuum MOSS rinnen 40 Ta Sonnerie enuck VOCUM NOSE ana a 40 Ter odd counterbalance WIIG queeeabbi dis anie Heec ea edd pe eb cdi du Het bEiua 41 To add weight to Ihe counterbalance aus cei dai inea kk del enda ni eben adds 41 To planarize the large area Optics bridge eeee 42 GTN Positioners end PIODBR anne 43
26. CE on the back of the Temptronic controller control cable CONTROL INPUT on back of cooler circulator COOLER on the back of the Temptronic controller controller power cable Temptronic controller 20 Amp 115V power source or 10 Amp 230V ordered or your dry air supply air hose air source COMPRESSED AIR INPUT on air dryer air hose REGULATED OUTPUT DRY air fitting on back of AIR FLOW on air dryer if MicroChamber GPIB Cable if you See the GPIB Switch Box See figure 39 ordered this option Installation Instructions P N 107 109 A GPIB Cable if you did computer Temptronic Controller not order this option air dryer power cable air dryer if ordered power source f you ordered the GPIB option you ll have to put the GPIB switch box between the 50 Summit 11K 12K Probe Station User s Guide computer and the controller To probe station controlled instruments Indicator LEDs Green for power on Red for host disconnected ENT sc e SPI card connector To remote host To probe station connector VNA Cal or Aux IN depending on model Fig 39 GPIB switch box Store standoff here if not needed Triax Connectors for Guarded Chuck Install standoff here if you are using a Dual Triax cable HD4156 or a Quadrax cable with an HP4142 or HP4145 Fig 40 Dual Triax or Quadrax Cable Standoff Position 11500 11700 11800 12500 12700 and
27. G gefaehrliche Laserstrahlung wenn offen oder a DANGER maus inaktive Interlocks nicht in den Strahlengang sehen AVOID EXPOSURE TO BEAM DANGER Pr sence de faisceau laser visible et invisible lorsque l appareil est ouvert et le verrouillage de s curit est d sactiv Eviter toute exposition aux rayons Safety Standards ix Pinch Point 7 Gy Pa Personal Injury Possible Stand Clear When Test Head Manipulator Is In Motion DANGER Pinch Point Personal Injury Possible Stand Clear when test head manipulator is in motion VORSICHT Verletzungsgefahr von bewegten Teilen Testkopf Manipulator fernhalten DANGER Risque de se coincer les doigts Blessures corpor les possible Se tenir loign de cet endroit lorsque le bras articul est en mouvement WARNING LABELS WARN SYMBOLE ETIQUETTES D AVERTISSEMENT Warning labels warn of a potential severe injury WARN Symbole warnen vor moeglichen schweren Verletzungen Les tiquettes avertissement pr viennent le personnel op rateur sur certains risques pouvant causer des blessures s v res Hot Surface On Chuck af Severe Burns Possible an Keep Hands Clear WARNING Hot Surface On Chuck Severe Burns Possible Keep Hands Clear VORSICHT heisse Oberflaeche Verbrennungsgefahr nicht beruehren Attention Surface du plateau chaud Risque de br lure s rieuses Tenir les mains loingn es de cet endroit
28. NTS Chapter Station Overview Description Describes general features applications accessories requirements considerations and recommendations for using the probe stations and how to use the emergency stop button 2 Station Specifications Describes specifications dimensions and requirements for all stations in the Summit series 3 Installing Provides an overview to installation as well as requirements for lifting the probe station Continues with the unpacking of the station and its setup 4 Verifying and Operating Describes how to use the emergency stop button verify and use the probe station and explains how to test the thermal chuck and joystick 5 Maintaining Explains how to maintain a Summit probe station using preventative maintenance procedures 6 Troubleshooting Lists problems you may encounter while using Summit probe stations and explains how to avoid or resolve those problems 7 Service Provides contact phone numbers and instructions to prepare the station for shipping NOTATIONAL CONVENTIONS This manual uses the following conventions When directing the user to a command found on the menus a vertical hash mark is used to indicate that a command is nested So to direct the user to the Wafer Map command from the Tools item on the menu we use Tools Wafer Map Screen text and syntax strings appear in this font e All numbers are decimal unle
29. ROBE STATIONS The 11700 offers the same thermal testing capacity as a 11600 but with an advanced reduced noise thermal chuck Using Cascade Microtech s patented FemtoGuard thermal chuck technology the 12700 provides wafer temperature control in a reduced noise and capacitance environment Chuck noise is reduced 1000 times over standard thermal chucks The noise on topside probes reduces to fA levels Chuck Specifications Flatness 25 micron 1 mil to 130 C 51 micron 2 mil to 200 C Residual capacitance chuck to lt 50 pF shield Capacitance variation over chuck lt 30 fF surface Isolation chuck to shield gt 1TQ Breakdown bias voltage gt 500 volts Chuck leakage current thermal chuck on O to 100 volts 50 fF Chuck leakage current thermal chuck off O to 100 volts 20 fF Temperature range 65 C to 200 C maximum controller dependent 300 C on HT version Temperature uniformity 10 5 C or 0 5 whichever is higher Vacuum distribution area 18 75 or 152 mm selectable Auxiliary chucks Two with individual vacuum control Total System Planarity Planarity includes all error sources Total system planarity 30 micron 1 2 mil across 101 mm 4 in circle 40 micron 1 6 mil across 203 mm 8 in circle Chapter 2 Station Specifications 23 11800 GUARDED THERMAL PROBE STATIONS The 11800 offers the sam
30. Technical Publicar i od Summit 11K 12K Probe Stations rechner User s Guide MTCECROTECH Innovating Test Technologies For Better Measurements Faster Cascade Microtech Inc 2430 NW 206th Ave Beaverton Oregon 97006 Toll Free 1 800 550 3279 Telephone 503 601 1122 Fax 503 601 1111 Email tech_support cmicro com www cascademicrotech com Japan 81 03 5478 6100 Email Japan tech_support_cmj cmj co jp Europe 44 1295 812828 Email Europe tech_support_cme cmicro com PN 106 914 Revision E Revised 8 23 01 Copyright 2000 by Cascade Microtech Inc All rights reserved No part of this manual may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopy recording or any information storage and retrieval system without permission in writing from Cascade Microtech Inc Requests for permission to make copies of any part of this manual should be mailed or faxed to Cascade Microtech Inc 2430 NW 206th Ave Beaverton Oregon 97006 USA Tel 503 601 1122 Fax 503 601 1111 The following are trademarks of Cascade Microtech e AIR COPLANAR PROBES e CASCADE MICROTECH and Design EZ PROBE FEMTOGUARD MICROCHAMBER e MICROPROBE UPDATES e PYRAMID PROBES e SURROGATE CHIP e TOPHAT EYE PASS PROBE t Allother trademarks registered trademarks service marks and trade names are the property of their respective owners Before You Begi
31. UL 3101 1 Certifi CAN CSA C22 2 No 1010 1 Ground e Erdungspunkt Masse Ground Prise de terre Model 11000 EM bod Me Casa Mere ikin in LERRA barano OR Model No Serial No Manufactured by Cascade Microtech Inc 2430 NW 206th Ave Beaverton OR 97006 USA Modell Nr Serien Nr hergestellt durch Cascade Microtech Inc 2430 NW 206th Ave Beaverton OR 97006 USA N du Mod le Ne de Serie Fabriqu par Cascade Microtech Inc 2430 NW 206th Ave Beaverton OR 97006 USA iv Summit 11K 12K Probe Stations User s Guide Where to Get More Information ABOUT SUMMIT 11K 12K PROBE STATIONS You can find out more about Summit probe stations from these sources Readme file Lists features and issues that arose too late to include in other documentation World Wide Web Cascade Microtech maintains an active site on the World Wide Web The site contains current information about the company and locations of sales offices new and existing products contacts for sales service and technical support information You can also send e mail to Cascade Microtech using the web site Requests for sales service and technical support information receive prompt response NOTE When sending e mail for technical support please include information about both the hardware and software plus a detailed description of the problem including how to reproduce it WWW ADDRESS To access the Cascade Microtech web sit
32. alling 31 2 Remove the 2 6 thumbscrews from the back cover fig 18 Set aside for use in a later step Front Back Thumb Screw Fig 18 Back cover removal 3 Slide the back cover off by moving it toward the rear of the station fig 18 4 With the 9 64 inch hex wrench remove the 2 8 screws that hold the counterbalance located under the rail plate fig 19 Screws to hold the counterbalance Ji B Screws to hold the U optics bridge mount shipping restraints Fig 19 Screw removal on the rail plate bottom view j WARNING The counterbalance is heavy Do not lift it by putting your hands on the counterbalance itself Otherwise you could smash your fingers Instead lift the counterbalance by pressing down on the microscope mounting plate and remove the two restraints under the counterbalance 5 Press down on the microscope mounting plate fig 17 on p 31 to raise the counterbalance about an inch Hold the mounting plate down at the same time you remove the shipping spacers from underneath the counterbalance See figure 20 for the location of the counterbalance spacers 32 e Summit 11K 12K Probe Station User s Guide 6 Slowly raise the microscope mounting plate to return the counterbalance to a resting position 7 Replace the back cover by sliding it into the slots in the top and secure the cover with the 2 6 thumb screws set aside in step two Make sure the front edge of the back
33. ated 22 July 1993 Where one or more of these directives allow the manufacturer during a transitional period to choose which arrangements to apply the CE marking indicates conformity to the provi sions only of those directives applied by the manufacturer Declaration of Conformity xv xvi Summit 11K 12K Probe Station User s Guide Contents Before You Begin i ABl DE SUSE Ptr rm SUN NER an onda A dame as TE RTS te OCR NE TR aaa ii Identifying Labels Ident Symbole Etiquettes d Identification iii WhereTo Ger More Infor usos te rre vb eer kill tech v ia bb Ce i rta V About Summit TIK T2K Probe STOITIOFIS sus escrita verbe cda na V Safety Standards vii decere es el Ne TRE OE ELIT vii gt bel ala 11 8 2 un seni Qvae ada de biva s cOR OT a Ica Ri ad SR SURE vii LK PNEU Rm vii Vale ge S arelsner lanWsise d EE viii Safety Labels Sicherheits Schilder Etiquettes de s curit viii Danger Labels Gefahr Symbole Etiquettes Danger viii Warning Labels Warn Symbole Etiquettes d Avertissement X Caution Labels Warn Symbole Etiquettes d Attenfion Xii MGMUTONSTOREY essen XV ile ALS Le ie T del A E IN PE Taree TT rer aren XV Station Overview 1 Fa ee Chuck Summit T1500 12500 11700 12700 and 11800 12800 ss Guarded Inemil Chuck ORION sitnsienisnsiiorsbivssiderieaienev
34. ations described in the Station Overview chapter LIFTING REQUIREMENTS You will need e Four or five people to maneuver the probe station onto the table e Forklift with a minimum 272 kg 600 Ib capacity TOOLS NEEDED You supply a 9 16 in open end or socket wrench to remove the bolts on the shipping crate We supply a set of hex wrenches for probe station screws Installation Overview Install your probe station using the procedures in this chapter You should also refer to this procedure if you are removing your probe station j WARNING Several probe station components weigh 23 kg 50 Ib or more the probe station weighs over 136 kg 300 Ib To prevent physical injury refer to and follow lifting guidelines provided by your company Note that this installation procedure may have instructions for station models with different options e Sections may describe generic procedures that apply to all stations e Sections that apply to a specific model number or option are so labeled Chapter 3 Installing 25 Chuck Triax Connectors or BNC for 12600 BNC connector for MicroChamber Positioner Vacuum 11600 11100 12100 pe
35. ched 6 Inspect the coolant lines and fittings for coolant leaks If there are no leaks slide the insulating covers over the fittings 7 Check for frost on the chuck Check at different temperatures to ensure that frost is not accumulating 8 If frost forms see Troubleshooting Air Dryer Settings See air dryer When you first purge the MicroChamber at the end of installation or when you documentation haven t used it for several days set the flow rate at 7 SCFM for 30 minutes to thoroughly dry the MicroChamber After the initial purge you can reduce the purge time to 15 minutes after each time you open and close the MicroChamber After purging you can set the operating temperature Set the flow rate at 3 SCFM for temperatures below 41 C For temperatures above 41 C set the flow rate to 2 SCFM Handling Wafers with the MicroChamber AN A DANGER Chuck bias voltages can be lethal chuck temperature extremes can cause serious injury Before opening the MicroChamber access door ensure that voltage is not applied to the chuck and the chuck is not at a temperature extreme 62 Summit 11K 12K Probe Station User s Guide Before loading and unloading wafers take the following precautions Make sure that the access door interlock connects to the chuck biasing power supply s interlock and operates correctly e Set the power source to zero volts before changing the wafer Make sure that the chuck is close to room tem
36. counterbalance If you add an Olympus Stereo Zoom Microscope you may be required to remove the weights e Some applications i e one using a MicroChamber and only one or two objectives may require the removal of a small amount of weight The probing station includes two counterbalance weights with the hardware and other parts shipped You can add a total of two weights to each side of the counterbalance To add weight to the counterbalance 1 Remove the back cover of the optics bridge as described in the section To Remove the Optics Bridge Mount Shipping Restraints See figure 17 on p 31 2 Add one or two weights to the counterbalance as shown in figure 30 The weights are shaped so that they can be installed in only one orientation 3 Replace the back cover of the optics bridge Chapter 3 Installing 41 For information about ordering counterweights in addition to the two provided with the optics bridge contact your Cascade sales representative Fig 30 Adding weight to the counterbalance To planarize the large area optics bridge The optics bridge is factory planarized to the top chuck of your station and should not need to be replanarized However the procedure is presented here should you ever need to replanarize in the field Materials needed To replanarize the optics bridge you need a dial indicator 0 0 010 inch with a magnetic base or a special fixture that attaches to the dovetail mount
37. cover slides into the slots in the front plate 8 Use the 9 64 inch hex wrench to remove the 2 8 screws on the underside of the rail plate which hold the shipping blocks fig 20 9 Use the 9 64 inch hex wrench to remove the 2 8 screws holding the same two shipping blocks to the beam as shown in figure 20 Shipping blocks Screws for shipping blocks Fig 20 Shipping blocks and counterbalance spacers rear view 10 Use the 9 64 inch hex wrench to remove the 2 8 screws holding the third shipping block fig 20 and fig 21 between the front plate and beam Save all shipping blocks and 8 screws with the rest of the packing materials Shipping block Fig 21 Shipping blocks front view HIGH STABILITY MICROSCOPE BRIDGE MOUNT To remove the optics bridge mount shipping restraints This step requires a 14 inch hex wrench Chapter 3 Installing 33 1 Remove the 5 16 x 1 25 inch hex head screw and save it with the shipping washers and tag the parts 109 610 Tag Shipping Bolt Red 100 145 Spacer Bridge 2 places Fig 22 Shipping restraints front view To remove the restraints in the following two diagrams you will need a 9 64 inch hex wrench a N BFW 175088 h N STANDOFF SCS 0832 138 SCR SHC 8 32 X1 38 iani 109 610 Shipping TAG SHIPPING Bolt BOLT RED 211 007 SCR SHC 8 32 X 0 5
38. current after 10 5 fA O volts seconds FemtoGuard version 10 fA 10 volts 20 fA 100 volts Chuck leakage current after 10 seconds AttoGuard version 3 fA 0 100 volts Vacuum distribution area 13 75 or 152 mm selectable Auxiliary chucks Two with individual vacuum control 16 Summit 11K 12K Probe Station User s Guide 12600 THERMAL PROBE STATIONS The 12600 provides temperature control of wafers over a 65 C to 200 C range 300 C on HT version Since the wafer is enclosed in the low volume MicroChamber temperature transitions are fast You can verify the calibration at each temperature level using a Cascade ISS on an integrated auxiliary stage and Cascade s VNA calibration software Chuck Specifications Flatness 25 micron 1 mil to 130 C 51 micron 2 mil to 200 C Residual capacitance chuck to shield standard version 950 pF Isolation chuck to shield gt 1 GO at 500 volts DC at 25 C Breakdown bias voltage gt 500 volts Temperature range 65 C to 200 C maximum controller dependent 300 C on HT version Temperature uniformity 0 5 C or 0 5 whichever is higher Vacuum distribution area 13 75 or 152 mm selectable Auxiliary chucks Two with individual vacuum control 12700 GUARDED THERMAL PROBE STATIONS The 12700 offers the same thermal testing capacity as a 12600 but with an advanc
39. e enter this URL in your web browser http www cascademicrotech com Other If you purchased your Cascade Microtech product from a third party vendor you can contact that vendor for service and support Before You Begin v vi Summit 11K 12K Probe Stations User s Guide Safety Standards Introduction The information in this guide enables you to operate the equipment safely and effectively Any deviation from a recommended procedure or a modification of the equipment may create a hazardous operating situation Cascade Microtech Inc Cascade disclaims any responsibility for consequences resulting from any such deviation modification or application In this guide read and follow the instructions labeled e Warning s and Danger s to prevent personal hazard or injury Caution s to prevent damage or destruction to equipment or the loss of data Note s for important information The S300 probe station is designed to comply with the ETL safety standard for laboratory equipment to comply with European directives for machines and thus is CE marked to comply with the SEMI S3 0200 international standard for manufacturing quality within the semiconductor industry DANGER To avoid personal injury from electric shock ground the controller probe station and monitor with the provided power cords Do not disable the grounded leads on the power cords For continued protection against risk of fire replace a fus
40. e de br lures Remplace le fusible par un autre du m me gabarit TO 4A 250 V xiv Summit 11K 12K Probe Station User s Guide Declaration of Conformity Manufacturer Cascade Microtech Inc 2430 NW 206th Avenue Beaverton OR 97006 USA Product Summit 11000 12000 Series Prober Serial No Date of Shipment Standards This product has been assessed against the Machinery Directive 89 392 EEC annex1 as amended and complies with the Essential Health and Safety Requirements therein This product has also been assessed against the Low Voltage Directive 93 68 EEC and EN61010 and complies with the safety requirements for electrical equipment for measurement control and laboratory use This product has been assessed against the EMC Directive 89 336 EEC and complies with EN55011 CISPR 11 Class A radiated and conducted emissions and with immunity standard EN50082 1 This Declaration of Conformity is based on the results of analysis testing and evaluation performed by Cascade Microtech Inc and with the assistance of a body notified to the Member States and Commission of the European Communities Signature Date Position 1 As permitted by 93 465 EEC Council Decision concerning the modules for the various phases of the conformity assessment procedures and the rules for the affix ing and use of the CE conformity marking which are intended to be used in the technical harmonization directives d
41. e holes in the chuck Zone Fig 45 Chuck vacuum zones Follow this procedure to verify the chuck vacuum 1 Turn on your vacuum source 2 Place a small piece of paper in the chuck s center 3 On an 11000 series station turn on the switch labeled 13 mm to turn on vacuum to the smallest vacuum area 13 mm 0 5 in On a 12000 series station turn on the vacuum using PCS software 4 Verify that the vacuum s force holds the paper to the chuck top 5 Repeat steps one through four to verify each vacuum area Chapter 4 Verifying and Operating 57 For example for a small device or 2 inch wafer turn on the switch labeled 13 mm For a 3 4 or 5 inch wafer turn on both the 13 mm and 75 mm switches For a 6 or 8 inch wafer turn on all three switches 13 mm 75 mm and 150 mm To turn off vacuum flip all three switches to the off down position If the paper does not hold down as expected make sure that Your vacuum source works properly The hose connects properly to both the vacuum source and to the probe station VERIFYING THE MICROSCOPE AND VIDEO ADJUSTMENTS CAUTION TiLT BACK BRIDGE Center the programmable scope transport before raising or lowering the tilt back bridge or damage can occur to the probe station and or accessories Scope travel is limited to 1 inch in the x y axes when using the TopHat Nucleus software supports the programmable scope transport if the optional autoprobe
42. e on probe station equipment only with a fuse of the specified type and current rating To avoid injury keep hands clothing and jewelry clear of all moving parts Several probe station components weigh 23 kg 50 Ib or more To prevent personal injury refer to and follow the lifting guidelines provided by your company Use anti electrostatic discharge ESD precautions when you connect cables ESD can damage components j WARNING Class 3b lasers may be configured on the Summit and are potentially hazardous Consult OEM manuals for the provided safety information Software Interlocks Lock Out TAG Our See Locking the Workstation in the Nucleus Software User s Guide Safety Standards vii MICROCHAMBER INTERLOCK j WARNING The interlock mechanism for the load door is managed by the Nucleus system software Every posible action has been taken to ensure that the stage will stop correctly Nevertheless there is still a chance that the stage will not stop immediately when the door is opened When reaching into the stage area use caution to avoid personal injury This setting controls the actions of the stage when the load door of the station is opened Possible values include None the interlock switch has no effect Warn when the load door is open a warning message will be displayed but the stage will still be able to move as normal Stop Stage when the load door is open a warning message will be dis
43. e peak operation to prolong probe station life and to avoid unscheduled downtime This chapter explains how to maintain a Summit probe station To maintain probes positioners or other components that shipped with the station refer to the documentation that accompanied these items Preventive Maintenance Procedures j WARNING Isopropyl alcohol IPA is toxic and flammable To avoid personal injury follow the instructions on the Material Safety Data Sheet You can damage the probe station by using improper solvents or abrasive cleaners Use only industrial grade isopropyl alcohol IPA only where indicated Do not use IPA or any other chemical on the lead screws bearings sliding plates in the MicroChamber or the surfaces that they contact NOTE Dust or debris can interfere with probe to tip contact and affect your measurement accuracy CLEANING THE PROBE STATION Clean the probe station monthly or more often if your process creates contaminants To clean the probe station Use a small vacuum cleaner such as a printer vacuum to remove dust and debris from the interior of the probe station and hard to reach areas Avoid knocking debris into crevices or spaces between moving parts Blow dry air or nitrogen over the station surface to remove dust and large chunks of debris e Vacuum the interior of the MicroChamber Wipe the chuck with a soft lint free cloth lightly dampened with IPA Chapter 5 Maintainin
44. e thermal testing capacity as an 11700 but with an advanced reduced noise thermal chuck Using Cascade Microtech s patented FemtoGuard thermal chuck technology the 12700 provides wafer temperature control in a reduced noise and capacitance environment Chuck noise is reduced 1000 times over standard thermal chucks The noise on topside probes reduces to fA levels Chuck Specifications Flatness 25 micron 1 mil to 130 C 51 micron 2 mil to 200 C Residual capacitance chuck to shield 1 pF Capacitance variation over chuck 3 fF surface Isolation chuck to shield gt 1TQ Breakdown bias voltage gt 500 volts Chuck leakage current thermal chuck on O to100 volts 50 fA Chuck leakage current thermal chuck off O to100 volts 20 fA Temperature range 65 C to 200 C maximum controller dependent 300 C on HT version Temperature uniformity 0 5 C or 0 5 whichever is higher Vacuum distribution area 18 75 or 152 mm selectable Auxiliary chucks Two with individual vacuum control Total System Planarity Planarity includes all error sources Total system planarity 30 micron 1 2 mil across 101 mm 4 inch circle lt 40 micron 1 6 mil across 203 mm 8 inch circle 24 Summit 11K 12K Probe Station User s Guide CHAPTER Installing Before Installing Verify that your work area conforms to the site specific
45. ed reduced noise thermal chuck Using Cascade Microtech s patented FemtoGuard thermal chuck technology the 12700 provides wafer temperature control in a reduced noise and capacitance environment Chuck noise is reduced 1000 times over standard thermal chucks The noise on topside probes reduces to fA levels Chuck Specifications Flatness 25 micron 1 mil to 130 C 51 micron 2 mil to 200 C Residual capacitance chuck to lt 50 pF shield Capacitance variation over chuck lt 30 fF surface Isolation chuck to shield gt 1TQ Breakdown bias voltage gt 500 volts Chuck leakage current thermal chuck on O to 100 volts lt 50 fA Chuck leakage current thermal chuck off O to 100 volts 20 fA Temperature range 65 C to 200 C maximum controller dependent 300 C on HT version Temperature uniformity 10 5 C or 0 5 whichever is higher Vacuum distribution area 13 75 or 152 mm selectable Auxiliary chucks Two with individual vacuum control Chapter 2 Station Specifications 17 12800 GUARDED THERMAL PROBE STATIONS The 12800 offers the same thermal testing capacity as a 12700 but with an advanced reduced noise thermal chuck Using Cascade Microtech s patented FemtoGuard thermal chuck technology the 12700 provides wafer temperature control in a reduced noise and capacitance environment Chuck noise is reduced 1000 times over standard th
46. electrically isolated from the rest of the probe station and includes connections to apply a voltage to the DUT for DC and CV characterization IPA is a toxic flammable fluid approved for cleaning chuck top and exterior surfaces The joystick is a device for controlling the x y stage motion The joystick is activated by Cascade s joystick software application Glossary 79 Manifold Methanol MicroChamber Olympus Mounting Bracket Optics Bridge Mount PCS Platen Positioners Probe Sliding Plates Thermal Controller TopHat Triax Manifold Verify WinCal X Y Stage Z Lever Z Lever Friction Adjustment Screws The manifold a box like enclosure located at the back of the probe station includes vacuum and electrical connections The manifold distributes the control signals to the probe station Methanol methyl alcohol is an alternate coolant used in a thermal probe station s cooler circulator It is toxic and flammable The MicroChamber is an enclosure system that provides light and EMI shielding in the chuck and test area It also provides environmental control The Olympus mounting bracket is also called the bonder arm or focusing block It is hardware that connects the Olympus Stereo Zoom microscope to the boom stand arm or Optic Bridge Mount Includes the vertical focus adjustment knob The optics bridge mount is a structure that holds a microscope over the work area and allows the mic
47. en Cor for optional triax connection panel oo Oo Coolant Connectors Air Hose Connect dry air 1 p Microscope Power 9 EN cd fe gt r L r L r X gt gt P Station VNA Cal Chuck Input Power Inker Vacuum Auxiliary Power To Computer Electrical Connector Thermal Station Only Fig 9 12000 family connection points for large area bridge rear view Optional Triax Panels w shorting link Chuck Triax Connectors or BNC for 12600 11600 11100 12100 o E9 63876 0 9 Optional 7777 Positioner Vacuum Manifolds BNC connector THERE for MicroChamber L J Access Door Exit Box Coolant F L Interlock Connectors i Air Hose Connect dry air O Ns C ae P Microscope Power l EN X gt C gt Lr I L O oe Auc X gt gt do b Station VNA Cal Chuck Input Power Inker m i Vacuum FM o Computer Electrical Connector Auxill P DONNE ower Thermal Station Only Fig 10 12000 family connection points for high stability bridge rear view 26 Summit 11K 12K Probe Station
48. er is the arm on the left side of the probe station that raises or lowers the platen The DUT remains in focus while the stage moves The Z lever friction adjustment screws regulate the mechanism that applies friction to the Z lever to hold the platen in place when it is raised 80 Summit 11K 12K Probe Station User s Guide Index Numerics 11700 series applications 7 12100 series specifications 15 12500 series specifications 16 12600 series specifications 17 12700 series specifications 17 18 24 12700 series applications 7 A Accessories 7 standard 9 Air connections 39 Air dryer controls 10 MicroChamber purge 62 operating temperature 62 troubleshooting 73 74 Altitude 10 Applications 11700 amp 12700 series 7 AttoGuard 2 Back cover 32 Bolts removing 28 Bridge mount 7 C Cable HP41XX 39 Quadrax 39 Cables computer 39 install 39 CE safety standard vii Chuck bias cables 49 cleaning 65 thermal accessories 9 Chuck 11000 series specifications 19 Chuck 11100 series specifications 20 Chuck 11500 series specifications 21 Chuck 11600 series specifications 22 Chuck 11700 series specifications 23 24 Chuck 12000 series specifications 14 Chuck 12100 series specifications 15 Chuck 12500 series FemtoGuard 2 specifications 16 21 Chuck 12600 12700 series bias voltage 10 electrical isolation 10 thermal 10 Chuck 12600 series specifications 17 Chuck 12700 series specifications
49. erating your probe station This section shows how to resolve the following symptoms e Computer does not turn on nothing works 12000 series only e X Y stage makes high pitched whine when attempting to move 12000 series only e X Y stage or Z stage does not move e Vacuum is not detected by the sensor or the wafer is not held on chuck Joystick error message on monitor or Stage wanders in joystick mode 12000 series only e Microscope light is not on The following section shows how to resolve problems with thermal stations Thermal controller shuts down e Set and actual temperature do not match e Frost or moisture appears in the MicroChamber Chapter 6 Troubleshooting 69 COMPUTER DOES NOT TURN ON NOTHING WORKS 12000 series Only Area to check Check this Refer to Computer Reseat all boards Installing Battery on motherboard OK Power line voltage Installing switch correct for lab Plugged in and turned Installing on Boots as stand alone computer Cables Installed correctly Installing Installed in correct slots Installing at both ends No bent pins on connectors STAGE WHINES ON ATTEMPTED MOVE 12000 series Only WARNING First turn the power OFF Area to check Check this Refer to X Y stage or Z stage Shipping restraint Installing removed MicroChamber Shipping restraints Installing removed 70 Summit 11K 12K Probe Stat
50. ermal chucks The noise on topside probes reduces to fA levels Chuck Specifications Flatness 25 micron 1 mil to 130 C 51 micron 2 mil to 200 C Residual capacitance chuck to shield 1 pF Capacitance variation over chuck 3 fF surface Isolation chuck to shield gt 1TQ Breakdown bias voltage gt 500 volts Chuck leakage current thermal chuck on O to 100 volts 50 fA Chuck leakage current thermal chuck off O to 100 volts 20 fA Temperature range 65 C to 200 C maximum controller dependent 300 C on HT version Temperature uniformity 10 5 C or 0 5 whichever is higher Vacuum distribution area 18 75 or 152 mm selectable Auxiliary chucks Two with individual vacuum control 18 Summit 11K 12K Probe Station User s Guide 11000 Series DIMENSIONS Base dimensions 68 cm 27 in wide x 76 cm 80 in deep Typical height to eye pieces 55 cm 22 in Weight 150 kg 330 Ib including optics mount PLATEN Rigidity 50 micron 2 mil for 4 5 kg 10 Ib lateral or vertical force Z lift range 5 5mm 0 22 in linear lift Z lift repeatability lt 2 micron 0 08 mil Material Nickel plated steel ROTARY STAGE Travel 7 Resolution per turn ROLL OUT STAGE Travel 25 cm 10 in CHUCK For in depth chuck specifications see the i
51. es with the black snap in covers h WARNING The probe station weighs 163 kg 360 Ib Prevent injuries by having at least four people move it REMOVE AND SAVE SHIPPING RESTRAINTS m NOTE Remove the shipping restraint screws with a 9 64 inch hex wrench that was packed with the station Save the shipping restraints If Cascade s Customer Service requests that you return the station you will need to put the shipping restraints back into position To remove the roll out stage shipping restraints 1 Turn the knobs inward and open the door fig 13 28 Summit 11K 12K Probe Station User s Guide 2 Remove the 8 screw from the roll out stage and remove the two foam blocks between the sliding plates foam blocks inside the microchamber between the sliding plates and AU rollout stage 2 Fig 13 Shipping restraints between the sliding plates and roll out stage To remove the GT chuck shipping restraints ry NOTE High temperature thermal HT chucks have similar shipping restraints marked with red tag 1 Use a 7 64 inch hex wrench to remove the restraints 2 Save all parts Bolt A Bracket top Shipping bolt tag Bracket bottom Fig 14 High temperature chuck shipping restraints To remove the platen lift handle shipping restraint 1 Remove the 8 screw on the lift handle marked with red tag CAUTION Do not raise the platen lift handle until the following second step is completed Chapter
52. for Mitutoyo Optem and Olympus INSTALL THE COMPUTER AND HOSES 12000 Series Only To install the computer cables and hoses 1 Unpack the computer the keyboard the joystick the mouse the cables and the video monitor 2 Seat the computer under your workbench and place the keyboard monitor joystick and mouse on the workbench next to the station 3 Connect the keyed cables and hoses as described in Table 1 See also figure 29 on p 41 Table 1 12000 family probe station cables and hoses Cable or Hose From To main control cable computer connector on computer the back side of the probe station monitor extender cable monitor connector on computer monitor cable keyboard cable keyboard computer PS2 port mouse cable MOUSE computer PS2 port air line high stability bridge only Air in left rear of station compressor or air supply joystick cable joystick computer Chapter 3 Installing 39 Table 1 12000 family probe station cables and hoses power cable probe station wall outlet Cable or Hose From To power cable monitor wall outlet power cable computer wall outlet extension power cable MICROSCOPE POWER on probe station optional extension power cable AUXILIARY POWER on optional probe station black vacuum hose for chuck vacuum VAC IN on probe station Right side of the probe statio
53. g 65 Wipe the outer metallic surfaces of the probe station with a soft lint free cloth lightly dampened with IPA do not wipe the labels with IPA CAUTION 5 If the Z lever friction is excessively loose the platen may drop suddenly and unexpectedly crashing the probes onto the work surface and damaging the probes the positioners and the wafer NOTE The friction corresponds to the tightness of the screws Be careful to turn the screws evenly and only a little at a time a clockwise turn increases friction tightens a counterclockwise turn decreases friction loosens CHECKING Z LEVER FRICTION The Z lever is on the probe station s lower left side To check the Z lever friction raise and lower it The platen should move up and down correspondingly The Z lever should stay in place when you release it As more accessories are installed on the platen the Z lever friction increases to hold up the platen Check the z lever friction monthly and when you change probes or positioners To check Z lever friction 1 Locate the three Z lever friction adjustment screws located near the probe station s back left post See figure 47 2 Raise and lower the Z lever resting it at increments between its limits Fig 47 Factory set adjustable screw for Z lever friction rear of station 3 Using a 5 32 inch hex wrench adjust the three Z lever friction adjustment screws evenly as needed to increase or decrease fric
54. he objective mount finger tight only Slide the objective mount into the slot at the bottom of the A Zoom j WARNING Exercise care when mounting the microscope The weight of the microscope can cause the lift plate to lower unexpectedly 5 Move the microscope up and down to test the counterweight 6 Finish installing microscope video equipment according to the manufacturer s instructions Chapter 3 Installing 37 To mount the Olympus Zoom Stereo microscope Fig 27 Installing the Olympus Zoom Stereo microscope Prior to installation obtain a 9 64 inch hex wrench to mount the Olympus mounting block Refer to Fig 4 19 during the following procedure 1 Mount the mounting block onto the microscope mounting plate using two 8 x 3 8 inch screws 2 Place the pivot post into the mounting block 3 Install the 8 32 x 1 4 inch setscrew in the mounting block not shown The setscrew in the mounting block can be tightened to lock the pivot in place or it can be tightened just enough to prevent the pivot post from being pulled back out of the block yet allowing the microscope to rotate 4 Route the cables over the optics bridge and plug into the light source 5 Plug the light source power into the microscope power extender cable or a wall outlet 6 Move the microscope up and down to test the counterweight 38 Summit 11K 12K Probe Station User s Guide Fig 28 Microscope TopHat seal left
55. huck theta rotations and travel flatness Total system planarity lt 20 micron 0 8 mil across 101 mm 4 in circle lt 30 micron 1 2 mil across 203 mm 8 in circle Chapter 2 Station Specifications 21 11600 THERMAL PROBE STATIONS The 11600 provides temperature control of wafers over a 65 C to 200 C range 300 C on HT version Since the wafer is enclosed in the low volume MicroChamber temperature transitions are fast You can verify the calibration at each temperature level using a Cascade ISS on an integrated auxiliary stage and Cascade s VNA calibration software Chuck Specifications Flatness 2 micron 1 mil to 130 C 51 micron 2 mil to 200 C Residual capacitance chuck to shield lt 950 pF standard version Isolation chuck to shield gt 1 GO at 500 volts DC at 25 C Breakdown bias voltage 500 volts Temperature range 65 C to 200 C maximum controller dependent 300 C on HT version Temperature uniformity 0 5 C or 0 5 whichever is higher Vacuum distribution area 13 75 or 152 mm selectable Auxiliary chucks Two with individual vacuum controls Total System Planarity Planarity includes all error sources Total system planarity 30 micron 1 2 mil across 101 mm 4 in circle 40 micron 1 6 mil across 203 mm 8 in circle 22 Summit 11K 12K Probe Station User s Guide 11700 GUARDED THERMAL P
56. ications 19 19 Station accessories 7 T Temperature 10 Tests 12000 series 59 Thermal chuck 12600 12700 series 10 Thermal controller 10 Thermal probe station 12600 series 17 Thermal unit shutdown 73 temperature mismatch 73 Tools for installation 25 TopHat install 47 Troubleshooting 69 12000 series ground loops 5 air dryer 73 74 computer 70 cooler circulator 73 customer service 69 frost in MicroChamber 73 74 joystick 71 microscope light 72 Summit 10600 73 thermal unit 73 vacuum 71 Wafer 71 x y stage 70 71 U Unpack probe station 27 V Vacuum not detected 71 positioner 44 Vacuum hose 11000 family 40 Vacuum line connections 39 Vacuum requirements 12000 series 13 Vacuum switch settings 11000 series 57 Verify window 12000 series 59 Verify 12000 series clear test results 60 exercise 60 exiting 60 joystick test 61 launching 59 virtual mode 60 Verifying 11000 series 53 chuck vacuum controls 57 82 Summit 11K 12K Probe Station User s Guide roll out stage 56 theta adjustments 55 Verifying 12000 series 59 Voltage fluctuation 10 W Wafer not held on chuck 71 to load 63 Wafer 11000 series load 63 unload 63 X X Y stage 4 X y stage 55 55 does not move 71 whines 70 X y stage 12000 series joystick mode 61 specifications 15 Z Z lever adjusting friction 66 Index 83
57. ide THERMAL CHUCK CONTROLLER amp AIR DRYER 11600 12600 11700 12700 Available temperature ranges 65 C to 200 C or 0 C to 200 C 300 C for HT versions Air dryer option available yes Manufactured by Temptronic Corp PROBE CARD ADAPTER Probe card dimensions 4 5 inch wide Standard Accessories Your station will come with a large assortment of accessories such as a contact substrate dust cover etc in addition to those accessories listed below 11100 12100 Manual Wrench set Appropriate power cords for country of use 12100 11500 12500 11600 12600 11700 12700 11800 12800 Manual Wrench set Microscope eyepiece covers Appropriate power cords for country of use Microscope grounding clip Interlock cable Triax cap N A for 11100 Triax shorting plug N A for 11100 12100 11600 12100 11600 12600 12600 m NOTE Cascade recommends that you install a triax shorting plug whenever the station is not in use to prevent charges from building up in the chuck We also recommend that you install the triax shorting plug when you are not measuring substrate current or biasing the chuck Recommended Configurations For DC or capacitance measurements Cascade recommends e DCM vacuum base or fixed base DC and RF positioners with low current LC triax adapters DCP probes in standard or Kelvin configurations LC
58. ies FACILITY REQUIREMENTS Vacuum 400 mm 15 inches of Hg min Power 115 V at 2 A 230 V at 1 A 50 60 Hz Dry air 4 3 liters per sec 9 SCFM with dew point 70 C Can be produced with optional air dryer Additional requirements As needed for thermal controller See also the Summit 11K 12K section of Cascade s Probe Station Facility Guide HIGH STABILITY MICROSCOPE BRIDGE MOUNT OPTION Compressed air 0 1 liters sec 0 2 CFM 70 psi min COMPUTER Call Cascade s Customer Support for the latest requirements See also www cascademicrotech com 12000 Series DIMENSIONS Base dimensions 76 cm 30 in wide x 68 cm 27 in deep Typical height to eye pieces 58 cm 23 in Weight 165 kg 860 Ib including optics mount not including microscope Chapter 2 Station Specifications 13 TOTAL SYSTEM PLANARITY 12100 12500 Planarity includes error from wafer chuck theta rotations and travel flatness Total system planarity lt 20 micron 0 8 mil across 101 mm 4 in circle 30 micron 1 2 mil across 203 mm 8 in circle 12600 12700 12800 Planarity includes all error sources Total system planarity 30 micron 1 2 mil across 101 mm 4 in circle 40 micron 1 6 mil across 203 mm 8 in circle PLATEN Rigidity 50 micron 2 mil for 4 5 kg 10 Ib lateral or vertical force Z lift range 5 5
59. ion User s Guide X Y STAGE OR Z STAGE DOES Nor MOVE connectors Area to check Check this Refer to Probe station Shipping restraint Installing 12000 and 11000 series removed 12000 series Fuses OK Plugged in and turned Installing on Main control cable Installed correctly Installing 12000 series Installed in correct slots Installing at both ends No bent pins on Installing VACUUM NOT DETECTED BY SENSOR OR WAFER Nor HELD ON CHUCK on probe station Area to check Check this Refer to Vacuum supply Turned on 12000 and 11000 series At least 400 mm 15 in of Hg Connected to VAC IN Installing Your DUT Flat on the chuck Centered on the chuck Center vacuum size set to not larger than your DUT Verifying and Operating Aux stage vacuum Correct size device s in place where vacuum is on Verifying and Operating Turned off where not used Verifying and Operating JOYSTICK ERROR MESSAGE OR STAGE WANDERS IN JOYSTICK MODE 12000 series Only Area to check Check this Refer to Joystick tension Set to return the joystick to center Reset then reinitialize Verifying and Operating Joystick cable Connected to computer Reconnect then reinitialize Installing If none of the above eliminates the problem recalibrate the joystick Refer to the Control Panel in Windows
60. ion to move the stage to the left Turn the theta control clockwise to rotate the chuck top counterclockwise Reverse rotation to rotate the chuck top clockwise If the stage does not move as expected check the following That you removed the X Y and roll out stage shipping restraints That the stage is not jammed by a stray piece of shipping material e If the stage still does not move contact your Cascade representative x axis control Fig 43 Summit 12000 series station controls VERIFYING THETA ADJUSTMENTS The theta control is on the right front of the stage Follow these steps to verify the theta control 1 1 Turn the theta control clockwise The chuck top rotates counter clockwise 2 2 Turn the theta control counterclockwise The chuck top rotates clockwise If the chuck does not rotate as expected make sure that it is not jammed by a stray piece of shipping material Chapter 4 Verifying and Operating 55 VERIFYING THE ROLL OUT STAGE The roll out stage provides safe access to the chuck The roll out handle is on the center front of the stage Follow these steps to verify the roll out stage handle 1 Raise the Z lever h WARNING If the Z lever is down when you pull the roll out stage handle you may scrape the probes across the chuck and substrate damaging the probes or wafer 2 Open the MicroChamber access door 3 Turn the roll out stage handle counterclockwise to unlock the roll out stage
61. joystick while you Nurleus user s watch the stage movement through the microscope guide for details on using the joystick Two slide switches on the joystick base regulate its tendency to return to center when released You can adjust the switches so that The joystick centers and all stage movement stops when you release the joystick OR The joystick remains where you release it and the stage continues to move in the same direction until either you stop it or it reaches the limit switches Testing procedure 1 Click START Settings Control Panel 2 In the Control Panel group double click the Joystick icon 3 4 Move the joystick and watch the on screen crosshairs move the same relative Click the Test button direction and distance Press the Turbo buttons located on top of the joystick and the left of the joystick base and watch Button 1 depress on screen Press the Accept button on the right of the joystick base and watch Button 2 depress on screen The Joystick test passes when the joystick and crosshairs move together and when the joystick and on screen buttons work together Testing the Thermal Chuck Thermal Stations Only FIRST STEP Purge the MicroChamber with dry air 1 2 oO 5 m Close and lock the access door to the MicroChamber Lower the microscope to the down position so the microscope objective seal is flush to the TopHat for Mitutoyo and A Zoom micr
62. k of the MicroChamber The access door includes an interlock switch and connector so you can automatically turn off the chuck biasing power supply when you open the door Guarded Thermal Chuck Option A guarded version of the thermal chuck reduces chuck noise down to femtoamp level Chapter 1 Station Overview 1 FemtoGuard AttoGuard Chuck Options The patented FemtoGuard AttoGuard chucks and guarded coaxial probes provide an ultra low capacitance for swept measurements without capacitive error currents The FemtoGuard option increases guarding on the chuck and in the MicroChamber so you can measure currents in the low femtoamp range Guard ring Chuck surface connection Chuck bias triax connector Chuck guard layer connection Chuck shield layer and MicroChamber connection Fig 1 Summit 11500 11700 12500 12700 and 12800 Guarded Chuck Connections The AttoGuard option extends the instrument guard under around and over the wafer providing shielding to femtoamp noise levels Wafer Force f Wafer Chuck f Guard FemtoGuard AttoGuard Guard Sheld to DC Parametric tester MicroChamber enclosure Shield Fig 2 Attoguard MICROCHAMBER The patented MicroChamber is an enclosure surrounding the chuck providing a controlled probing environment that shields wafer and probes from moisture light and electrical noise The wafer is protected inside the MicroChamber Probes are
63. lluminator on the mounting post and hand tighten the thumbscrew 3 Remove the dust guards from the eyepiece port and save them for future use 4 Insert the eyepieces into the eyepiece ports 5 Screw up to four objectives into the turret of the microscope To mount the Optem A Zoom microscope Prior to mounting the microscope ensure that the 2 setscrews located on the left side of the microscope s mounting plate are unscrewed back out of the way before mounting on the microscope transport 36 Summit 11K 12K Probe Station User s Guide Eyepiece Microscope Set Screws Op tional Eyepiece Sockets Objective Mount x Lo Objective Lens y H o o ol 21 E Dovetail Fig 26 Installing the Optem A Zoom microscope Obtain the appropriate tool and hardware to mount your microscope on the optics bridge See also the Optem A Zoom Instruction Manual for specific installation procedures 1 Slide the A Zoom Microscope on the dovetail mount and tighten the two screws on the left side of the mount with a 5 64 inch hex wrench 2 Insert the fiber optic cable into the illuminator and hand tighten the thumbscrews 3 Insert the two eyepieces into the eyepiece sockets only available with the optional eyepiece kit These eyepieces are normally 10x magnification 4 Screw the objective into t
64. mize this probe station you can make DC or capacitance measurements High frequency measurements Accessories LARGE AREA BRIDGE MOUNT X Y travel 203 x 127 mm 8 x 5 inch Lift repeatability 1 mil 25 4 u typical Vertical lift range 3 inch 7 6 cm Weight supported 20 Ib maximum HIGH STABILITY BRIDGE MOUNT X Y travel 25 4 x 25 4 mm 1 x 1 inch Lift repeatability lu 0 04 mil typical Tilt back range 2 to 3 inch 5 08 7 62 cm Weight supported 70 Ib maximum Chapter 1 Station Overview 7 OPTICS Fig 7 Tilt back microscope Mitutoyo Finescope 60 with 20X to 4000X magnification range Olympus ZoomStereo 60 with 20X to 126X magnification range 10X objective Optem A Zoom microscope video system w 125X to 4000X magnification w RF POSITIONERS Travel 12 7 mm 0 5 inch in x and y axis 11 7 mm 0 46 inch in z axis Rigidity 100 micron 4 mil deflection with 500 g 17 5 oz force on the connector of the probe Resolution 625 micron 25 mil per turn or 1 76 micron per degree Planarization 5 with micrometer at each arm DCM POSITIONERS Travel 12 7 mm 0 5 inch in each axis y Z Rigidity 100 micron 4 mil deflection with 500 g 17 5 oz force on connector of probe Resolution 317 micron 12 5 mil per turn or 0 88 micron per degree 8 Summit 11K 12K Probe Station User s Gu
65. module PN 123 567 is purchased This module controls the ECX 56 Box accessories 1 Move the stage to its approximate center of X Y travel 2 Focus the microscope on the chuck top 3 Move the stage in the X and Y axes and check that the video on the monitor moves in the same direction If it travels in the opposite direction the camera is not properly placed on the adapter Loosen the thumbscrews on the camera and rotate it 180 degrees then re tighten 4 Move the optics bridge in the X and Y axis and make sure that it travels smoothly 5 Place the microscope in the center of travel and focus on the chuck top 6 Move the optics bridge in the X and Y axes and make sure that the microscope stays in focus throughout its travel Verifying the 12000 Series Station with Software NOTE Two different software applications PCS and Nucleus are available for controlling the Summit 12000 series semiautomatic probe stations The following section deals with PCS which contains the verify program If you are using Nucleus see the Nucleus User s Guide The Verify software checks the probe station hardware except for the joystick which has its own test Click the Verify icon to run the tests During installation During preventive maintenance 58 Summit 11K 12K Probe Station User s Guide If you suspect a hardware problem Before you call Cascade Customer Service Test your probe station as explained i
66. n About This Guide Welcome to the Summit 11000 and 12000 Series Probe Station User s Guide This guide contains information about installing verifying operating and maintaining your probe station The Summit 12000 series 200 mm 8 inch probe stations are referred to in this manual as the 12000 series The Summit 11000 series 200 mm 8 inch probe stations are referred to in this manual as the 11000 series e A member of either series is referred to as a probe station Variations of these series are available such as the 150 mm 6 inch probe station and those stations with high temperature HT configurations GUIDE CONTENTS This guide covers hardware installation operation and maintenance for the Summit 11000 and 12000 series probe stations The 12000 series probe station comes with the following information Programming Communications Guide Prober Control Software User s Guide and online Help Probe plan Editor User s Guide and online Help e WinCal User Guide and online Help if ordered GPIB online Help Verify online Help DDE online Help e DC CV Parametric Configuration Guide For information on installing operating and maintaining other parts of your test system see the following e Software documentation Probe documentation Positioner documentation Test equipment literature Microscope documentation Thermal equipment documentation Before You Begin i CHAPTER CONTE
67. n optional vacuum pump Or your vacuum source black vacuum hose for Macuum mounted positioners Use 1 8 inch 9 way tee between probe station and connection panel VAC IN on rear connection panel if ordered optional vacuum pump HOr your vacuum source Quadrax BNC Triax or Dual Triax Cable HP4142 or HP4145 only See Fig 4 32 a Available only in the U S and Japan CONNECT THE CHUCK VACUUM HOSE 11000 Series Only To connect the chuck vacuum hose 1 Connect a 1 8 inch diameter hose to the vacuum input on the back of the probe station See figure 29 on p 41 2 Connect the other hose end to your vacuum source 3 Connect a 1 8 inch diameter hose to the vacuum input on the back of the rear connection panel if ordered See figure 29 on p 41 4 Connect the other hose end to your vacuum source use a 3 way tee to connect both vacuum inputs using one vacuum source 40 Summit 11K 12K Probe Station User s Guide Rear Connection Panel if ordered Vacuum input Probe Station Vacuum input Fig 29 Vacuum hose connection To add counterbalance weights Large area bridge mount only Each large area bridge mount is configured to a system at the factory so that the counterbalance is already adjusted If the bridge mount is a retrofit the counterbalance must be adjusted If you add an option such as a camera you may need to add extra weight to the microscope
68. n this section and in online Help If your probe station fails any verification test see the Troubleshooting chapter and if you cannot correct the problem contact Cascade customer service for assistance LAUNCHING VERIFY Close exit all probe station software including the Cascade program group items and other applications that link to the probe station through DDE Verify runs low level tests and resets values that the other software needs CAUTION An application left open does not properly control the hardware after these tests are run During installation a Cascade Microtech program group was created on the Program Manager desktop Verify is in that program group From the desktop double click the Verify icon in the Cascade window You should see the Verify window RUNNING THE VERIFY SOFTWARE Normally you run all tests sequentially However you may want to run a single test such as Light after you replace a microscope light bulb NOTE If you run tests out of sequence the probe station will not respond as it would if you ran the tests in sequence Therefore you may receive a false failure message VERIFY TEST STATUS Options File Test Exercise Help Passed Failed Passed Failed Acceleration Controller Velocity Motors Accuracy Limit sw Platen Home pulse Encoders Limit pos Aux pwr Light Vacuum IT METUIT Fig 46 Verify test
69. ndividual station numbers Size 200 mm 8 in diameter 150 mm on 6 in stations Surface Gold plated or nickel plated aluminum with provisions for grounding or biasing X Y STAGE Travel 203 mm x 203 mm 8 in x 8 in Resolution 0 2 in per turn mm Bearings Cross roller MICROCHAMBER 11520 11600 11700 11800 Only11100 Probe Stations EMI Isolation Yes Chapter 2 Station Specifications 19 Light tight Yes Enclosure Dry air inert gas purge capable Maximum number of positioners Eight DCM seven with high power microscope or four RF The 11100 probe stations are designed so that can be easily reconfigured and upgraded The following sections describe specifications and requirements Chuck Specifications Flatness 0 39 mils 10 microns across total surface Isolation chuck to shield gt 10TQ Auxiliary chucks Two with individual vacuum controls Breakdown bias voltage gt 1000 volts Vacuum distribution area 13 75 or 152 mm selectable Total System Planarity Planarity includes error from wafer chuck theta rotations and travel flatness Total system planarity lt 20 micron 0 8 mil across 101 mm 4 in circle 30 micron 1 2 mil across 203 mm 8 in circle 20 Summit 11K 12K Probe Station User s Guide 11500 GUARDED PROBE STATIONS The 11500 probe statio
70. ns have a triaxial guarded architecture The station provides a low residual capacitance measurement environment including the chuck for substrate measurements By eliminating residual capacitance the 11500 enables you to make precise low level measurements using shorter integration intervals Typical improvements are from 100 to 1000 times in the sub pA range in measurement speed The MicroChamber works as a Faraday cage to further reduce chuck variation to 30 fF 11550 and as low as 3fF 11560 with the AttoGuard version This feature enables you to measure capacitance without having to null position dependent capacitance changes Chuck Specifications Flatness 10 micron 0 39 mil across total surface Residual capacitance chuck to shield lt 20 pF FemtoGuard version Residual capacitance chuck to shield lt 0 2 pF AttoGuard version Capacitance variation over chuck lt 3 fF with AttoGuard surface lt 30 fF with FemtoGuard Isolation chuck to shield gt 1010 Breakdown bias voltage gt 1000 volts Chuck leakage current after 10 5 fA O volts seconds FemtoGuard version 10 fA 10 volts 20 fA 100 volts Chuck leakage current after 10 seconds AttoGuard version 3 fA O to 100 volts Vacuum distribution area 13 75 or 152 mm selectable Auxiliary chucks Two with individual vacuum control Total System Planarity Planarity includes error from wafer c
71. on the bridge Procedure 1 2 3 Place a sheet of Mylar on the chuck for protection Attach the dial indicator to the dovetail assembly Ensure that the eight 10 32 setscrews are loose and that the eight 8 32 capscrews are tightened Move the bridge to the back of the station Y so that the dial indicator needle rests near the edge of the chuck Zero the indicator Move the bridge to the front of the station Y If there is a change in the indicator s reading you must replanarize Release the tension on the four 8 32 capscrews in front or back as applicable Adjust the front or back setscrews to bring the bridge into planarization 42 Summit 11K 12K Probe Station User s Guide If the indicator s reading was positive adjust the front setscrews on both sides a thousandth of an inch past zero If the indicator s reading was negative adjust the back setscrews on both sides a thousandth of an inch past zero Note that tightening the 8 32 screws will bring the indicator reading back to zero Recheck and repeat the steps if necessary Holes for Adjustment Screws 8 u a Fig 31 Screw location for planarization If you have questions about replanarizing the optics bridge contact your Cascade Customer Service INSTALLING POSITIONERS AND PROBES You can mount these positioner types on this probe station magnetic or vacuum based DCM positioners and fixed
72. or makes an electrical connection with the MicroChamber and the shield layer of the chuck The middle shield of the connector makes a connection to the guard layer of the chuck FemtoGuard or AttoGuard The center connector makes a connection with the chuck surface Surface layer Guard layer Shield layer Fig 37 Chuck layers Chuck surface connection MicroChamber Chuck guard layer hs y connection connection Fig 38 Chuck triaxial connectors Chapter 3 Installing 49 Safety interlock switch To protect you from hazardous voltages and temperature extremes on the chuck the MicroChamber access door has a BNC safety interlock switch This switch is closed when the MicroChamber access door is closed and open when the access door is open The interlock BNC is located on the back right of the probe station see fig 9 and fig 10 You must connect a cable from the BNC connector to the interlock connector on the chuck biasing power supply and warning indicator The MicroChamber door also has a software interlock that can be set to one of four modes within prober control software PCS or Nucleus THERMAL EQUIPMENT INSTALLATION Table 2 Probe station thermal unit cable and hose connections Cable or Hose From To coolant lines fittings on back of probe station fittings on back of cooler circulator thermal power cable MicroChamber power cable on probe station THERMAL DEVI
73. oscopes only Make sure that the TopHat is sealed against the MicroChamber Make sure compressed air is connected and flowing to the air dryer Power up the air dryer Adjust the air flow control counterclockwise increases air flow to purge the MicroChamber to at least seven standard cubic feet per minute SCFM Allow the dry air to purge for at least 30 minutes Chapter 4 Verifying and Operating 61 NOTE If the system has not been purged for several days you should purge the system for 30 minutes For subsequent purges 15 minutes should be sufficient After the initial purge you can reduce the purge flow rate to three SCFM Chuck temperature transitions occur faster at lower purge rates Never operate the system with a purge flow rate less than three SCFM at temperatures below 41 For temperatures above 41 use a purge flow rate of two SCFM to minimize thermal coupling between the chuck and the probes and cables SECOND STEP With the Temptronic controller fill the coolant reservoir 1 Turn on the Temptronic controller 2 Fill the coolant reservoir See also the Temptronic manual 3 Power up the station 4 Set T1 and T2 on the Temptronic controller to the desired temperatures between 55 and 200 C See the section Local Operation in the Temptronic ThermoChuck Operator s Manual for how to set temperatures 5 Wait until the Temptronic controller verifies that the specified temperatures are rea
74. perature n addition to the connection to the power supply s interlock you can set up prober control software to indicate whether the door is open or closed CAUTION Avoid touching the chuck Chuck surface contaminants can interfere with electrical contact between the chuck and wafer To load a wafer 1 Raise the Z lever 2 Open the MicroChamber access door 3 Rotate the roll out stage handle counterclockwise to unlock then pull the stage forward Turn off chuck vacuum Use wafer tweezers to place the wafer in the chuck center aligning it visually Turn on chuck vacuum ND gg UR Using the roll out stage handle push back the stage all the way and then rotate the handle clockwise to lock the roll out stage 8 Close the MicroChamber access door To unload a wafer Follow the first four preceding steps and then 1 Use wafer tweezers to remove the wafer 2 Using the roll out stage handle push back the stage all the way and then rotate the handle clockwise to lock the roll out stage 3 Close the MicroChamber access door Chapter 4 Verifying and Operating 63 64 Summit 11K 12K Probe Station User s Guide CHAPTER Maintaining j WARNING To avoid potential damage to the prober or to yourself disconnet power from the probe station before performing maintenance procedures Your probe station is designed and built for long trouble free service Follow preventive maintenance procedures to achiev
75. played and the stage will not be allowed to move If the door opens during a move the move will be interrupted and an error will be generated When in this mode an extra icon is displayed on the status bar Safety Labels Sicherheits Schilder Etiquettes de s curit DANGER LABELS GEFAHR SYMBOLE ETIQUETTES lt lt DANGER gt gt Danger labels warn of immediate danger that could result in severe injury or death GEFAHR Symbole warnen vor Gefahren die zu schweren Verletzungen oder zum Tode fuehren koennen Les tiquettes de danger pr viennent sur la nature de divers dangers qui pourraient entrainer des blessures s rieuses ou mortelles DANGER High Voltage VORSICHT Hochspannung HIGH VOLTAGE DANGER Haute Tension viii Summit 11K 12K Probe Station User s Guide DANGER Pinch Point Keep Hands Clear VORSICHT Nicht Beruehren Pinch Point Keep Hands Clear F DANGER Risque de se coincer les doigts Tenir les mains loign es de cet endroit DANGER Pinch Point Stage Chuck Moves Unexpectedly Keep Hand Clear A DANGER VORSICHT bewegte Teile Pra arta Moves Unexpectedly Chuck nicht beruehren Keep Hands Clear DANGER Risque de se coincer les doigts Etages plateau peuvent se deplacer sans avertissement Tenir les mains loingn es de cet endroit DANGER Visible and invisible laser radiation when open and interlocks defeated Avoid exposure to beam ACHTUN
76. re using the same vacuum pump for both the chuck vacuum and the positioner vacuum loss of vacuum can cause loss of hold down for your wafer and positioners 5 Turn on the vacuum pump 6 While holding down the vacuum release valve on the positioner base position the DCM positioner 7 Release the vacuum release valve to clamp the DCM positioner in place MOUNTING RF POSITIONERS You can mount up to four RF positioners in the fixed positions on the platen See figure 33 on p 46 To use four RF probes on the probe station you need two 0 positioners and two 90 positioners You mount the 0 positioners on the platen s right and left sides and the 90 positioners on the platen s front and rear sides Chapter 3 Installing 45 Fig 33 Positioner configuration for four probes To install the positioners one at a time 1 Lower the Z lever CAUTION Positioners are precision instruments so handle them carefully Avoid bumping or dropping the positioners Avoid handling that may cause scratches or burrs on mating surfaces 2 Inspect the surface of the positioner the positioner mounting plate and the platen They should be free of contaminants 3 Adjust the Z axis micrometer counterclockwise to raise the positioner all the way up This ensures clearance between the chuck top and the probe you install 4 Set the X axis and Y axis micrometers to half between index mark 2 and 3 of their range 5 Mount the
77. roscope to move in x y and z PCS is prober control software See also the PCS User Guide and PCS online help The platen is the flat rigid top surface of the probe station for probe positioner placement Probe holders that fasten securely to the platen by clamp vacuum or magnet The positioners adjust the probe location in x y and z Some positioners include planarity adjustments The probe is the test device that contacts the DUT to pick up a signal Sliding plates close on the probe arms to seal off light from entering the TopHat and therefore the MicroChamber The thermal controller controls the chuck temperature inside the MicroChamber The TopHat sits above the MicroChamber It is a hexagon enclosure with sliding plates for positioner arms and probe cables and includes a cover with a microscope aperture seal The triax manifold is a connection panel located on the back of the platen of the large area or on top of the high stability microscope bridge It features feed through triax connectors Verify is the verification utility software that tests hardware operation for selected components See also the Verifying section in this guide and refer to Verify online help Windows based VNA calibration application software See also the WinCal User Guide and WinCal online help The X Y stage refers to the movable portion of the probe station that supports the chuck and moves laterally in the X and Y axes The Z lev
78. sianweclvarieln ds FemrioouamrAmcugorng Chuck Opfers icici n eor EPF Ree ti PPP RI ian 2 MieTSchamber naeh an 2 interlock Switches for Access DOOM au ae aa 3 mic sxBas eig E m o 3 Beige I 2 mea UI ERIEEESRELEEESRUNEEEUERERLENUETERLT AEFERUERUUERERE 3 Microsoft Windows Basecd SOITW OITB usa ensi e etr tte di bi tita di idi ls 4 e OI nalen ot dM auc Mia cx DU AN uae Mi UE 4 ie al qoos T H 5 fpei eli UIC MTM M 5 Connec Ton PANS MU 5 ADPIC CTIOINS aaa 7 cS P 7 bere Aner Bridge MOUNT a ee 7 On BEE MOUNT Se T 7 PONCE M 8 Hisce M TT UNT NETT 8 Wd rs ud EE T 8 Thermal Chuck Controller amp Air Dryer seems 9 Probe Gard lere M 9 Sandd ACCESSES NT RT TP 9 TEO TQU prop mE 9 11500 12500 11600 12600 11700 12700 11800 12800 iin 9 Peau da ne ee qe Ne ei ee ee 9 Contents xvii EnmvironmenmndiCondih ns ipei sane Peter dosi eiu tSc oe dU SU de toD EU L 10 TS C ONO EET TET 10 Thermal Controller and Cooler Circulator se 10 ATDWOF aaa au Persa a eo au beat EUR dd 10 Buone IG E na CUIU T 10 Station Specifications 13 D 13 gere aeu mE 13 High Stability Microscope Bridge Mount Option JR 12 FINDE qmm 13 LER D DC CY 13 BI E EDU T3 lente system PIONO RE DT 14 Ur Paoli Ete 14 oramai orc sp ROTEN 14 P scare dc 14 PE Le MIT
79. ss otherwise stated ii e Summit 11K 12K Probe Stations User s Guide Bit 0 is the low order bit If a bit is set to 1 the associated description is true unless otherwise stated WARNING is used to indicate the presence of a hazard which can cause severe personal injury NOTE is used to indicate important information about the product that is not hazard Er death or substantial property related damage if the warning is The globe indicates a World ignored Wide Web address DANGER is used to indicate the L presence of a hazard which will cause severe personal injury death or substantial property damage if the warning is ignored CAUTION is used to indicate the presence of a hazard which will or can cause minor personal injury or property damage if the warning is ignored This includes situations that may cause damage to hardware via electrostatic discharge ESD IDENTIFYING LABELS IDENT SYMBOLE ETIQUETTES D IDENTIFICATION These labels identify parts or system numbers and grounding points IDENT Symbole bezeichnen Teile System Nummerierungen und Erdungspunkte D autres tiquettes permettent d identifier les pieces la num rotation de l quipement et des points mis la terre Model number is located on the lower I O panel at the rear of the station die Modell Nummer befindet sich am I O Panel an der Rueckseite der Station Le num ro du mod le se situe sur le panneau inf
80. status dialog Chapter 4 Verifying and Operating 59 Point and click the mouse in the same way you use the mouse with other Windows applications To execute the tests Click a test button to run a single test only OR e Click the All button to run all tests sequentially OR e Choose a test from the Test menu OR e Choose All from the test menu to run all tests sequentially Some tests such as Motors and Light require your observation and input for a pass or fail decision To view a tests dialog box without running the test Choose Virtual mode from the Option menu then choose the test NOTE You must turn Virtual mode off before running a test on the hardware To clear the results of tests Choose Clear status from the File menu To run tests repeatedly Cascade recommends that you occasionally run all the tests ten times in a row Click the Exercise button to run the tests repeatedly Each exercise cycle takes about one minute to complete Choose Exercise during installation Choose Exercise if you suspect the probe station has an intermittent problem To exit verify Choose Exit from the File menu to exit Verify OR Click the Close button To get more information on verify software Click the Help button or open the Help menu 60 Summit 11K 12K Probe Station User s Guide Verifying the Joystick See the PCS or You can move the stage with the joystick Try manipulating the
81. symptoms of thermal failures THERMAL CONTROLLER SHUTS DOWN Area to check Check this Refer to Thermal controller and Adequate airflow Thermal unit cooler around units to prevent documentation overheating Thermal equipment Source provides Overview Installing power source 115V 20A or 230V Q 10A SET AND ACTUAL TEMPE RATURE Do Nor MATCH 3 SCFM after initial purge Area to check Check this Refer to Thermal equipment All cables properly Installing cables connected Air dryer Airflow rate set to Air dryer documentation Thermal controller and cooler Adequate airflow around units to prevent overheating Thermal unit documentation FROST OR MOISTURE APPEARS IN THE MICROCHAMBER Area to check Check this Refer to MicroChamber All seals intact includes TopHat access door sliding plates Installing Verifying and Operating Coolant line Installing connections intact Air dryer Power on Air dryer documentation Dry air at air dryer input check air filters for excess water Air dryer documentation Air dryer output blowing Installing into MicroChamber MicroChamber purged Verifying and Operating at 7 SCFM for 15 minutes 30 minutes initially before chilling chuck Chapter 6 Troubleshooting 73 FROST OR MOISTURE OUTSIDE THE MICROCHAMBER Area to check Check this Refer to Room Room humidity
82. t for RF CAUTION TILT BAcK BRIDGE Center the programmable scope transport before raising or lowering the tilt back bridge or damage can occur to the probe station and or accessories Scope travel is limited to 1 inch in the x y axes when using the TopHat 7 Nucleus software supports the programmable scope transport if the optional autoprobe module PN 123 567 is purchased This module controls the ECX 56 Box accessories NOTE The DC configuration of the TopHat is similar to the preceding graphic However steel rubber seals slide to allow positioning of the probe arms This seal provides a light tight environment for the wafer Note that the TopHat is inverted to allow the removal of positioners when the lid is removed A comparable TopHat is shown below INSTALL CHUCK BIAS AND DOOR INTERLOCK Electrical isolation and chuck biasing 11500 11700 11800 12500 12700 and 12800 only 48 Summit 11K 12K Probe Station User s Guide The chuck is composed of three layers shield guard and surface fig 37 This structure electrically isolates the surface from the rest of the station enabling you to use guarded measurement techniques for accurate and rapid current measurements Two triax connectors enable you to apply a bias voltage to the chuck s surface and a guard voltage to the chuck s guard layer The chuck bias triax connectors are located on the back of the station fig 38 The outer shield of the triax connect
83. t they can be easily reconfigured and upgraded Chuck Specifications Flatness 10 micron 0 39 mil across total surface Isolation chuck to base gt 1010 Auxiliary chucks Two with individual vacuum control Breakdown bias voltage gt 1000 volts Vacuum distribution area 13 75 or 152 mm selectable Chapter 2 Station Specifications 15 12500 GUARDED PROBE STATIONS The 12500 has a triaxial guarded architecture The station provides a low residual capacitance measurement environment for substrate measurements By eliminating residual capacitance the 12500 enables precise low level measurements without using integration intervals Typical improvements are from 100 to 1000 times in the sub pA measurement range The MicroChamber works as a Faraday cage to further reduce chuck variation to 30 fF 12550 and as low as 3 fF 12560 with the AttoGuard version This feature enables you to measure capacitance without having to null position dependent capacitance changes Chuck Specifications Flatness 10 micron 0 39 mil across total surface Residual capacitance chuck to shield lt 20 pF FemtoGuard version Residual capacitance chuck to shield lt 0 2 pF AttoGuard version Capacitance variation over chuck lt 3 fF with AttoGuard surface lt 30 fF with FemtoGuard Isolation chuck to shield gt 10TQ Breakdown bias voltage gt 1000 volts Chuck leakage
84. tention Risque d lectrocution Pr sence d une tension permanente Tenir les main loingn es de cet endroit WARNING Heavy Equipment 360 Lb 164 Kg Back Strain Injury Possible Several Persons Required To Lift Equipment ACHTUNG Schwergut mit Entladegeraet Attention poids lourd post rieur CAUTION LABELS WARN SYMBOLE ETIQUETTES D ATTENTION Caution labels warn of potential injury station damage or the loss of data WARN Symbole warnen vor moeglichen Verletzungen Beschaedigungen oder Datenverlust Les tiquettes d attention avertissent des risques pouvant entrainer des blessures endommager l quipement ou amener une perte de donn s num riques xii Summit 11K 12K Probe Station User s Guide Fire Hazard Can Cause Serious Fire Damage Or Burns ace Fuse With Samo T Orang TSA 250V ypa FIRE HAZARD System input voltage has been pre configured to V Refer to user guide before changing internal and external voltage settings Caution Fire Hazard Can Cause Serious Fire Damage Or Burns Replace Fuse With Same Type Or Rating T4A 250 V VORSICHT Brandgefahr Sicherung nur mit passendem Typ T4A 250V ersetzen Attention Risque d Incendie Risque de dommages importants par le feu risque de br lures Remplace le fusible par un autre du m me gabarit TAA 250 V Caution Fire Hazard System input voltage has been pre configured to V Refer to
85. tion 4 Repeat step two after the final adjustment to ensure that the friction is appropriate for all Z lever heights 66 Summit 11K 12K Probe Station User s Guide 5 Recheck the z lever friction at all positions between fully up and down MAINTAINING PROBE STATION ACCESSORIES If your probe station includes modules such as a thermal unit that is not manufactured by Cascade refer to the manufacturer s documentation for maintenance procedures To maintain your Cascade probes and positioners refer to the user s guides for those accessories Chapter 5 Maintaining 67 68 Summit 11K 12K Probe Station User s Guide CHAPTER If you do not resolve the failure after following the steps in this section contact Cascade Technical Support at 800 626 9395 Troubleshooting This section covers common probe station problems Diagnostic and repair actions are described to help you repair the most common of problems This section does not cover invasive troubleshooting or component level repair Attempting to troubleshoot beyond the instructions in this section may cause further damage to your probe station or related equipment and may also void your warranty Symptoms and Solutions Find the symptom that most closely matches your problem and check everything listed in the table For 12000 series stations run Verify the hardware verification software after you resolve your problem and before you begin op
86. tion User s Guide Roll Out Stage The roll out stage handle when unlocked and pulled moves the stage to the front travel 25 cm of the probe station fig 3 on p 3 With the stage in this forward position you can safely load and unload wafers Make sure the Z lever is up when you pull the rollout stage handle Otherwise you can scrape probes across the chuck and substrate which will damage the wafer and probes CAUTION Rotating the Chuck The chuck rests on a rotary stage enabling you to rotate it 7 1 per turn Turn the theta control to rotate the chuck fig 4 CONNECTION PANELS Optional probe connection panels at the rear of the platen provide a convenient attachment point for test instruments The connection panels relieve cable strain and enable you to make stable measurements There are two versions the large area microscope bridge mount and the high stability microscope bridge mount The large area bridge mount includes a removable vacuum panel which has six pairs of barb connectors and switches enabling you to connect up to six vacuum mounted positioners The high stability tilt back bridge mount uses a fixed vacuum connection panel Triaxial and BNC feed through connectors are available as well as banana jack to pin jack connectors Use of the triax and BNC connectors and the banana posts on the probe station reduce strain on the probes and cables They also limit probe cable movement
87. tion for more information about the minimum computer configuration Chapter 1 Station Overview 3 MICROSOFT WINDOWS BASED SOFTWARE 12000 Series Only You control your probe station using Microsoft Windows based software which includes online help The software includes Probe station control software PCS or Nucleus that enables you to manage the probe station and prepare it for automatic testing See the Nucleus or PCS User s Guides for detailed software information e Self test utility to verify hardware l robe plan editor that enables point and click die selection Optional WinCal VNA calibration software that enables you to use any standard vector network analyzer NOTE Many software test applications are available to work with prober control software such as HP VEE Metrics I CV Labview Basic for Windows Visual Basic HPIC CAP BSim Pro V most etc Call CMI Customer Support for details As a true Microsoft Windows application the software includes Dynamic link and data exchange server DDE which enables other Windows programs to control the probe station GPIB which enables a remote host to control the probe station X Y STAGE The stage has manual controls for moving in the X and Y axes There is also a theta control for rotating the chuck fig 4 Theta Control X axis Control NM N a Y axis Control Fig 4 X Y Stage and theta Controls 4 Summit 11K 12K Probe Sta
88. tion number RMA Contact your nearest Cascade sales office or Cascade customer service at 800 550 3279 Write the following information on a tag and attach it to the probe station Owner s name and address RMA number Probe station model number Probe station serial number back left of probe station Description of the service required or failure indications REPACKING Always use the original packing materials Otherwise you ll void your warranty If you cannot locate the shipping materials or hardware contact your Cascade representative Remove all probes and accessories from the probe station including the microscope Do not ship them unless they are associated with the failure symptoms To disconnect and disassemble the probe station and attach the shipping restraints reverse the steps in the Installing section of this manual Chapter 7 Service 77 78 Summit 11K 12K Probe Station User s Guide Glossary Air Dryer AttoGuard Boom Stand Chuck Bias Computer Connection Panel Option Cooler Circulator DDE Server Dry Air DUT FC 77 FemtoGuard Guarded Chuck Isopropyl Alcohol IPA Joystick An air dryer is a device that reduces the relative humidity of the MicroChamber purge air to a dew point of 70 C 94 F The AttoGuard extends the instrument guard under around and over the wafer providing shielding to femtoamp levels AttoGuarding also reduces resid
89. two rails to the platen using the four mounting screws 6 Slide the positioner between the rails CAUTION The positioner can scratch the chuck top if it tilts forward and falls 7 Mount the positioner close to where you want the probe mounted The standard position is to mount the positioner s front flush with the end of the rails For wider probe separation mount the positioner farther away from the wafer chuck 8 Secure each positioner to the platen by tightening the clamping knob 46 Summit 11K 12K Probe Station User s Guide 9 Check the positioner for clearance The probe mount rests approximately 8 mm to 13 mm 0 3 inch to 0 5 in above the chuck top 10 Mount the probes and probe cables 11 Planarize the probe head See ACP probe documentation INSTALLING THE PROBE CARD HOLDER See the instructions that are included with the probe card holder Fig 35 Probe card holder INSTALLING THE TOPHAT MicroChambered Stations Only To install the MicroChamber TopHat 1 Remove the blank seals from the positioner entry areas 2 Screw in the four standoffs on the platen See figure 36 on p 48 3 Insert the TopHat ring on top of the platen Chapter 3 Installing 47 4 Slide the slotted seals into the TopHat ring and push over the positioner extender arm 5 Install the TopHat cover and seal the cover with the objective 6 Push down the screws to catch the standoffs and finger tighten Fig 36 TopHa
90. ual chuck capacitance from hundreds of pF to 1pF and below The boom stand is a microscope attachment system that allows you to swing the microscope away from the work area Chuck bias is an option to apply a voltage to the chuck and therefore to the wafer or substrate for DC CV tests Cascade s Windows based prober control software package runs on an IBM compatible PC computer The connection panel option consists of triax BNC and banana pin jack connectors and a vacuum manifold Provides feed through connectors to reduce strain on probes and positioners Reduces triboelectric noise The Cooler circulator is a device that chills the thermal chuck to the set low temperature The Dynamic Data Exchange DDE application software provides communication with other application software running on your computer Refer to the Probe Station Communications Guide or the DDE Server online Help Dry air can be air or nitrogen with a dew point of 70 C 94 F DUT is Device Under Test It can be a wafer substrate or other circuit to be tested Also called Flourinert Alternate coolant used in cooler circulator for thermal probe station It is inert non toxic and non flammable The FemtoGuard increases chuck guarding to enable current measurements in the low femto amp range The Guarded chuck reduces leakage currents by using a conductive material that is nearly at the same potential as the signal that you are trying to measure It is
91. which provides additional measurement stability The triax and BNC connectors interface from front to back directly across the panel The banana post and pin jack connectors are color coded to indicate internal connections Cables are attached from the probes to the front connectors and from your measurement devices to the rear connectors The shorting link grounds the top of the station when it is connected If you have trouble with ground loops you can disconnect the shorting link without damaging your test equipment or creating hazardous working conditions Isolation diodes limit voltage on the platen to 0 7 V to protect you and your test equipment Chapter 1 Station Overview 5 N BEN a Ss amp eS a e N SS Oa Be N Nom V KA Ne SN OSS UA OW S bd OO j 2 SS I Fig 6 Connection panel for high stability bridge mount left and right A separate vacuum connection panel kit is available for the high stability bridge mount 6 Summit 11K 12K Probe Station User s Guide Applications The probe station is ideal for testing temperature sensitive devices because the MicroChamber s low volume enables rapid temperature cycling and better temperature control The station is also useful for testing light sensitive devices Other applications include device and process characterization as well as reliability testing Depending on the probes and accessories that custo

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