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1. FFT rings is Fig A3 Objective stigmatism correction using FFT Bad astigmatism showing a distorted FFT at a under focus b in focus c over focus Good stigmation showing round FFT at d under focus e in focus f over focus 37
2. are unlit when no coil is connected to this knob FUNCTION Used for selecting an image forming mode The magnification or camera length in the selected mode can be varied with the SELECTOR switch control panel R1 and is displayed on the CRT PAGE 1 on control panel R1 The magnification or camera length set by the SELECTOR switch is stored so that even if another mode is once selected the magnification or camera length can be set to the stored value by selecting the original mode again MAGI switch Used for selecting the normal magnification mode MAG2 switch By depressing this switch a specific magnification is obtained In this mode the magnification can be increased or decreased from the specific magnification with the SELECTOR switch The magnification set in this mode is not stored LOW MAG switch Used for selecting the low magnification mode SAM ROCK switch Used for selecting the selected area magnification mode or the rocking mode when the EM ASID scanning device is used DIFF switch Used for selecting the diffraction mode In this mode the camera lengths for selected area diffraction those for high dispersion diffraction and that for high resolution diffraction can be selected in the camera length ascending order with the SELECTOR switch The selected camera length is displayed on the CRT PAGE 1 on control panel R1 OBJ FOCUS Used for focusing the image by varying the objective lens current OM lens in case of LOW MAG
3. center it with BEAM SHIFT X Y 2 4 Set TEM 1 3 Focus beam with BRIGHTNESS knob center it with GUN SHIFT X Y Depress GUN in right drawer 2 5 Maximize intensity with GUN DEF X Y to make the emitter image symmetric Condenser Alignment Set TEM 1 3 Focus beam with BRIGHTNESS knob and center it with GUN SHIFT X Y Set TEM 5 3 Focus beam with BRIGHTNESS knob and center it with BEAM SHIFT X Y Repeat 3 1 amp 3 2 until there is no apparent movement of beam when SPOT SIZE switched from 1 to 5 Condenser Aperture Center 4 1 4 2 4 3 4 4 Set TEM 2 3 Focus beam with BRIGHTNESS knob and then center beam with BEAM SHIFT X Y if necessary Spread beam CW overfocus with BRIGHTNESS knob to see the image of the condenser aperture Center condenser aperture until no beam movement when BRIGHTNESS knob varied try going between extremes by halves iteratively Repeat 4 1 4 3 at 200K magnification Condenser Aperture Stigmation Rough adjustment 5 1 5 2 Check image of filament for condenser stigmation by underfocusing and ovrfocusing with BRIFGTNESS knob if image not symmetric ellipse with major axis changing through as BRIFGTNESS knob is changed from unerfocus to overfocus Depress COND STIG on panel L1 Use condenser stigmator DEF X Y to correct stigmation for symmetric illumination at all setting of BRIGHTNESS knob leading to a sharp filament image Condenser Astigmatism Fine adjustment Optional 6 1 Se
4. the camera length when the FUNCTION DIFF switch is depressed Setting this switch to the left position decreases the value and setting the switch to the right position increases the value The magnification or camera length set by this switch is displayed on the CRT PAGE 1 on control panel R1 8 PHOTO switch By depressing this button when the lamp is unlit a film is advanced to the exposure position the lamp lights up when the film reaches the said position the film is exposed and advanced and the lamp goes out By depressing this button when the lamp is lit that is when a film is in the exposure position the film is exposed 9 EXP lamp Indicates when lit that the shutter is open 10 SCREEN switch Used for changing the large fluorescent screen position horizontal or vertical The built in lamp lights up and remains lit while the screen is at the vertical position 11 FILM ADVANCE AUTO switch When this switch is turned on the built in lamp lights up and switch unused films are successively advanced to the exposing position without depressing the PHOTO switch control panel R1 When the switch is turned off the lamp goes out and no film is advanced to the exposing position unless the PHOTO switch is depressed 12 SHUTTER AUTO switch When this switch is turned on the built in lamp lights up and the shutter is automatically controlled When the switch is turned off the lamp goes out and the shutter is controlled manu
5. JEOL JEM 2010 TRAINING TRANSMISSION ELECTRON MICROSCOPE USER MANUAL Version 5 1 EM Facility CMSE SEF Massachusetts Institution of Technology March 2009 TABLE OF CONTENTS A hese a e A as va Senses A su teaeaee aero Waseda 2 11 Performante ia Raid a a NG hae 2 LD Electron OBESA A A da 2 PA a e e e rato 2 LA Vacuum Syste Mea a e UE RA ee AE A aa 2 2 Description of Column and Panel ControlS oooonconinccnonccincnonnnconnononoconononn nono nccnonnno enn 3 ZA CO A AS ds 3 2 1 1 Condenser aperture assembly sevi id cit dis tin dees 4 2 1 2 Condenser mini lens shifting SCreWS ooconnonnnconiccnnocnnoncconncconocnnncnnn ccoo nannos 5 2 13 Spectre NOMEL Nes wai sesh ote sa estates evacuated cla ER ese 5 P E GOO Mid 5 2 1 5 Objective lens aperture assi dsd 6 2 1 6 SAD aperture assembly Field limiting aperture assembly 6 2 1 7 Intermediate lens shifting SCrEWS ix lt cs ceccscchecendessssenedseedeedssedsnceastedaccsvevesns 7 2 1 8 Projector lens shifting Screws c c4viccessanviviaesdsd lisos cas evanes 7 21 9 Seremi n 7 2 1 10 Camera chamber door Hal dead 7 ZA Pedal switehesnsnnanc o a E O 7 2 2 COMTOL PA iia 8 2 21 gt Control Pan e 9 22 2 A a a a a a 11 2 23 Control Panel L2 ta ada Nadando 13 224 Control panel Ri A a a e 15 A A cc Sacis sa adenk E A setae RE ERS 17 220 Control Panels ea o 18 2 24 Control Part Cc ds 18 2208 Control panel KB and ERE aiii 19 A sass dese Cactatesh cact
6. Select one of the illumination modes EDS nano beam diffraction and convergent beam diffraction and set 100 KX Turn the a SELECTOR fully clockwise Focus the illumination and center it with the beam SHIFT X Y Activate the HT WOBBLER Depress the BRIGHT TILT and use DEF X Y to make the illumination expands and contracts concentrically Use the beam SHIFT X Y to center the illumination Note EDS switches are on the X ray mode You will need the INCA computer to your right Load the Oxford INCA software Put the cover on the viewing window before opening the shutter The shutter will close if you try to translate the sample but you should close it before taking the cover off to adjust brightness etc If you run EDS under TEM mode TEM 3 3 or TEM 4 3 is recommended nA BWN APPENDIX III High Resolution Imaging 26 1 The HT WOBBLE must be well aligned Check it at the highest practical magnification just before you try to observe or record the feature of interest 2 Use the bigger OBJ apertures and center it accurately 3 OBJ astigmatism correction should be corrected completely The entire procedure is difficult for beginners and may require considerable practice As a learning aid diffractograms of images of an amorphous film can be extremely useful These can be obtained by digitizing the image and performing an FFT with the appropriate software e g Gatan Digital Micrograph or AMTV540 4 The a selector controls the c
7. ally 13 EXP TIME switch Used for setting the exposure time in the manual exposure mode Setting this switch to the lower position decreases the exposure time and setting the switch to the upper position increases the exposure time The exposure time set by this switch is displayed on the CRT PAGE 1 on control panel R1 14 CRT Used for displaying information as requested 15 CONT knob Adjusts the CRT contrast 16 BRIGHT knob Adjust the CRT brightness 17 H HOLD controller Synchronizes the CRT image horizontally 18 TV IMAGE switch For optional attachments 19 V HOLD controller Synchronizes the CRT image vertically 2 2 3 Control panel L2 Fig 2 10 13 Fig 2 10 Control panel L2 1 BAKE OUT timer Setting the column baking time 2 UNA switch Setting the microscope evacuation system to the day and night evacuation mode The ion pump will remain turned on when the EM is turned off with this switch turned on 3 Potentiometers Adjust the vacuum gauge circuit voltages and currents For maintenance and troubleshooting 4 SIP switch Must be turned on before turning on the BAKEOUT switch to bake out the ion pump 5 BAKEOUT switch To bake out the ion pump with the SIP switch turned on and the microscope column 6 ACD HEAT switch For the anticontamination device heater power 7 GUN LIFT switch Power on off switch for the lift By turning this switch ON after breaking the electron gun chamb
8. arting position Now move the transmitted beam to the position of the brighter diffracted beam using DEF X Y while DARK TILT is depressed A g will light up if you have set up the two beam condition properly Choose an aperture to allow only one beam through but largest possible to maximize illumination Center aperture in bright field and switch to dark field move transmitted beam so diffracted beam from dark field superimposed transmitted beam in bright field when you shift from dark field to bright field Go to MAGI mode and take out SAD aperture Focus in dark field If you want to take photos in dark field you need to use an exposure that is 2 3 times that recommended for the bright field image Do not blindly follow instrument s recommendation for exposure Photos Bright field image Do not go longer than about 8 sec in exposure drift instabilities etc contribute to blurry image under focus for better contrast Record film number magnification exposure make sure you watch for exposure light to come on Depress PHOTO button once to put a film over viewing screen Depress PHOTO button twice to make a shot Note When the film is advanced the PHOTO button lights up Now you can 24 VI 10 11 12 depress PHOTO twice After the film is exposed make sure you listen for the film to advance and drop into a receiving box You can set the exposure time automatically or manually as desired Fi
9. built in lamp light up when depressed and the current in the coil selected with the DEFLECTOR STIGMATOR or COND DEF ADJ R2 1 5 or 6 is set to the specified value RESET switch All the CPU resumes its functioning when depressed SHIFT knobs Vary the current in the coil selected with the DEFLECTOR R2 1 The X knob shifts the electron beam in the X direction and the Y knob shifts it in the Y direction The two lamps above each knob light up when the knob is set at the midway position When the knob is turned clockwise or counterclockwise from the midway position the left or right lamp goes out Both the lamps go out when the DEFLECTOR switch is turned off An alarm sounds when the coil current exceeds the specified value 16 8 CRS switch When this switch is depressed the current rate per notch of the SHIFT and DEF R2 2 13 enlarges 16 times 9 SHIFT X Y switch A pulsating current is supplied to the condenser lens beam deflector when this switch is set to X Or Y This is used for condenser lens beam deflector currents adjustment 10 FREQ AMP knobs Vary the frequency and amplitude of the pulsating current generated by the IMAGE X Y R1 5 SHIFT TILT R2 9 14 or WOBBLER R2 4 11 THRU FOCUS switch Used for through focus photography 12 KYBD LIGHT switch Used for keyboard light 13 DEF knobs Vary the current in the coil selected with the DEFLECTOR or STIGMATOR R2 1 2 The X knob tilts the el
10. cus for caustic image 2 IL stigmators and focus diff image and Center it Depress PROJ and use the gun shift Voltage Center HT Wobbler Bright tilt HT wobbler DEF X Y gt Image expanse and contract symmetrically Correct Objective Astigmatism Obtain a BF image first see p 23 Microscopy 400 KX OBJ STIG DEF X Y gt HR images Microscopy with AMT CCD Camera Imaging 1 Turn on CCD camera switch on the right panel 2 Load AMT software AMTV542 3 Background Collection Optional a Find empty position or holes in the sample and then depress SCREEN to the vertical position 31 b Set the magnification between 2 KX and 5 KX and spread the beam c Select the Menu item Background Acquire Background d Adjust the beam brightness so that the histogram red line in box is approximately centered in the box When this is correct click on the orange command button e You will get a chance to cancel If you proceed it will take a minute or so for the backgrounds for the various modes to be acquired WAIT until the Click Live Imaging button is re enabled gray letters return to black Now you are ready to collect images 4 Set up a Case Click Menu Case Study Open New Case 5 View Image Camera Control Survey and Click for Live Image Note Focus is used to fine focus FFT is to get Real time FFT image SuperPix runs at near TV rates with a smaller display area Speed Quality button switches between frame av
11. de with camera length up to 200cm Use DIFF FOCUS for caustic image and depress INT STIGMATOR to correct INT stigmation with DEF X Y in the right drawer Focus diffraction image and Center it Depress PROJ and use SHIFT X Y Return to MAGI mode 11 HT Wobbler 11 1 11 3 11 4 Find a feature you can magnify up to 100 KX adjust illumination with BRIGHTNESS knob and center the feature with sample translator keep beam in center with beam translator Turn on CCD camera TV and project image on TV screen by depressing SCREEN button Note TV image is about 16X larger than the TEM screen image Focus the feature with OBJ FOCUS Turn on HT Wobbler 22 If image shows shift in position depress BRIGHT TILT and correct shift with DEF X Y and then turn off TV image by depressing SCREEN button If HT center is far out of alignment you may have to repeat the beam tilt purity alignment HI Microscopy 1 Reduce magnification to 50K 2 SAM ROCK mode 3 Focus images and get minimum contrast with OBJ LENS FOCUS 4 Put in SAD aperture center it focus it so no halo is visible sharp black outline DIFF FOCUS 5 Switch to DIFF mode 6 Focus the diffraction pattern with DIFF FOCUS and center it Depress PROJ and use SHIFT X Y 7 Put in objective aperture and center it 8 Switch to MAGI mode 9 Take out SAD aperture You will see the BRIGHT FIELD image 10 Objective lens stigmation 10 1 Find a small hole or curved edge in
12. e appendix IV at the end of the manual for removing and inserting sample holder 9 4 Double check V2 is open Turn on JEOL 2010 High Voltage and Filament Current 1 1 Lower Acc Voltage to 120 kV accset 120 1 2 Press HT high tension button turning the voltage on wait for BEAM CURRENT meter dark current goes up to 60 uA and stabilize Watch the pressure on SIP if it jumps turn HT off again 1 3 Turn filament knob up to scale unit 3 wait until the current stable 1 4 Increase Acc Voltage 1kV at a time letting the current stabilize until 200 kV You have to watch the pressure and current If either of them jumps then go back until they are stable Current should now read about 101 uA 1 5 Heat filament turn up 1 unit every 6 minutes Start alignment when current starts increasing around 110 uA 20 3 1 3 2 3 3 1 6 Use BRIGHTNESS knob to find image of filament on screen focus the image with BRIGHTNESS knob If you can not see image sample is in way or illumination is not centered switch to Low Mag mode Note You may need to find a bigger empty hole on your TEM sample to see the filament image If you use TEM grids you may have to make a hole in the center of your TEM sample with a sharp tweezer before you load your sample into the microscope Gun Alignment 2 1 Set OBJ lens current to 6 91 on PAGE 4 on CRT 2 2 Set MAGI and 50K 2 3 Set TEM 2 3 Focus beam onto viewing screen with BRIGHTNESS knob and
13. ectron beam in the X direction and the Y knob tilts it in the Y direction The two lamps above each knob function in the same manner as those above the SHIFT R2 7 14 TILT X Y switch A pulsating current is supplied to the condenser lens beam deflector when this switch is set to X or Y This is used for condenser lens beam deflector currents adjustment 2 2 5 Control panel L3 Fig 2 12 Y LENS pg A ESA COND COND2 D OBJ 6 NT2 INT3 D OFF OFF OFF OFF OFF OFF OFF OFF OFF OFF LENS POWER SUPPLY HT COND ON OFF 2 3 Fig 2 12 Control panel L3 1 LENS switches With the LENS POWER SUPPLY switch set to ON setting one of these switches to the upper position turns on the corresponding current 2 LENS POWER SUPPLY switch Setting to OFF turns off all the lens currents beam deflector coil currents and high voltage accelerating voltage power supply 3 HT CONT switch Used for high voltage accelerating voltage conditioning 2 2 6 Control panel SC Fig 2 13 17 2 2 7 Fig 2 13 Control panel SC 1 CRS switch The built in lamp lights up when depressed and the specimen shift speed is increased 2 N switch When depressed the specimen returns to the origin X Y Z and T 0 3 XY switches Moves the specimen 4 Tracker ball Same as the XY switches 5 ZCONT switches Moves the specimen upwards and downwards Control panel GC Fig 2 14 1 ZSPEED knob Used for var
14. er vacuum using the GUN AIR switch control panel L2 the electron gun is raised 8 Vacuum gauge selector Selects the Pirani vacuum gauge PI1 COLUMN PI2 GUN PI3 CAMERA P14 specimen chamber PIS RT or Penning vacuum gauge PEG see the evacuation system diagram on control panel L2 Gauge readings are shown on the meter control panel L2 9 GUN AIR switch The built in lamp lights up when this switch is turned on and air is admitted into the electron gun chamber 10 COL AIR switch The built in lamp lights up and air is admitted into the column except the viewing and electron gun chambers when this switch is turned on 11 Meter Indicates the pressure measured with the vacuum gauge selected with the vacuum gauge selector The Pa or pA scale is used when the selector is set at PEG or other 20 A indicate high vacuum and 250 uA indicates the atmospheric pressure When lamp H on the right hand side of this meter is lit read the upper outer scale and when lamp L is lit read the lower inner scale when the vacuum gauge selector is set at PEG 12 RESET switch Used to reset the alarm circuit when alarm lamp s light s up 13 ALARM lamps 14 AIR AIR Lights to indicate that the compressed air pressure is lower than the specified value RP Lights to indicate that the rotary pump belt is broken DP Lights to indicate that the oil diffusion pump heater is broken WATER Lights to indicate that the cooling water fl
15. eraging Quality and the faster no frame averaging Speed mode 6 Record Image a Adjust the brightness of the beam to position the histogram approximately centered in the box The green line on the right hand should be visible and slightly away from the right side of the white box b Click for Final Image to acquire a Quality Full Resolution Image after the Live image is focused and illuminated properly c Put the operation parameters sample information in the Microscope Information box and then save the image 7 Close AMT Software Put the Screen back to horizontal position and close the AMT software 16 FINISH 1 Turn off Filament HT 2 Take SAD and OBJ apertures out 3 Zero sample x y z position and tilts with N Remove sample and reinsert the single tilt holder into the scope 4 Leave microscope in MAGI 800KX Spot size 2 TEM 2 3 200kV on HT 6 91 OBJ lens current Note 1 The sample translator is motorized now You have the choice of a trackball or push button control These are backlash free 2 The goniometer is also motorized 3 The Z setting is also motorized The coarse setting is controlled by the CRS button below the Z buttons 32 4 The a selector controls the condenser mini lens Setting 3 for alignment and normal use TEM X 3 Setting 2 for observation larger than 100 KX TEM X 2 Setting 1 for HRTEM larger than 500 KX TEM X 1 You may need to reali
16. gn after changing a selector setting X presents the spot size 5 EDS switches are on the X ray mode You will need the HP computer to your right Load the Oxford software Put the cover on the viewing window before opening the shutter The shutter will close if you try to translate the sample but you should close it before taking the cover off to adjust brightness etc 6 Always use TEM 3 3 or 4 3 to collect data Otherwise the EDS shutter may be overloaded and you need to wait long time to reopen the shutter 33 APPENDIX V Microscopy with AMT CCD Camera Imaging Make sure the AMT CCD camera power supply is ON switch on the back of computer monitor Load AMT software Amtv542 Background Collection a Find empty position or holes in the sample and then raise the screen to the vertical position b Set the magnification between 2 KX and 5 KX and spread the beam c Select the Corrections item Acquire a Background on Amtv542 software d Adjust the beam brightness so that the histogram red line in box is approximately centered in the box When this is correct click on the orange command button e You will get a chance to cancel If you proceed it will take a minute or so for the backgrounds for the various modes to be acquired WAIT until the Click Live Imaging button is re enabled gray letters return to black Now you are ready to collect images Set up a Case Click File Case Study Create New Case I
17. he DEF R2 13 COND For the condenser lens astigmatism correction OBJ For the objective lens astigmatism correction INT For the intermediate lens astigmatism correction COND DEF ADJ switches These switches adjust the condenser lens beam deflector coil SHIFT The lamp lights up when depressed and the ratio of the currents in the condenser lens beam deflector can be varied with the SHIFT and DEF R2 7 13 This is used to adjust the deflector so that the electron beam does not tilt even if the electron beam is shifted with the left and right SHIFT knobs L1 17 R1 1 TILT The lamp lights up when depressed and the ratio of the currents in the condenser lens beam deflector can be varied with the SHIFT and DEF R2 7 13 This is used to adjust the deflector so that the electron beam does not tilt even if the electron beam is tilted with the left and right DEF knobs L1 18 L1 2 Also used for IMAGE X and IMAGE Y R1 5S adjustment WOBBLER switches GUN switch The built in lamp lights up and the electron gun first beam deflector current pulsates when this switch is turned on Used for column alignment COND switch The built in lamp lights up and the 3rd condenser lens current pulsates when this switch is turned on Used for condenser aperture centering OBJ switch The built in lamp lights up and the objective lens current pulsate when this switch is turned on Used for current center alignment N switch The
18. ies the 3 condenser lens current An alarm sounds when the current exceeds the specified value counterclockwise and clockwise from the midway position respectively At the midway both lamps light up 15 SHIFT CRS switch When depressed the current rate per notch of the BRIGHTNESS SHIFT X and SHIFT Y knobs L1 14 17 R1 1 is enlarged 16 times 16 DEF CRS switch When depressed the current rate per notch of the DEF X and DEF Y knobs L1 18 R1 2 is enlarged 16 times 17 SHIFT X knob Used for shifting the electron beam in the X direction by varying the condenser lens beam deflector coil current The two lamps above this knob light up when this knob is set to the midway position When this knob is turned clockwise or counterclockwise from its midway position the 10 left or right lamp goes out An alarm sounds indicating that the knob has been turned beyond the specified variable range 18 DEF X knob Varies the X current in the coil selected with the DEFLECTOR 11 13 The two lamps above this knob function in the same manner as those above the SHIFT X L1 17 The two lamps however are unlit when no coil is connected to this knob 19 TEM switch When depressed the built in lamp brightens and the illumination mode is set to the TEM mode wide area illumination mode 20 EDS switch When depressed the built in lamp brightens and the illumination mode is set to the EDS mode high current density micro area illuminati
19. lerating voltage tube Electron gun 2nd Gas inlet beam deflector coil Electron gun Ist beam deflector coil 2nd condenser lens coil Condenser lens stigmator coil Spot alignment coil Condenser lens 1st beam deflector coil Condenser lens 2nd beam deflector coil Condenser minilens CM lens coil Anode chamber isolation valve lst condenser lens coil 3rd condenser lens coil Condenser aperture assembly Goniometer El le High contrast objective aperture J esi assembly Objective lens stigmator coil Objective minilens OM lens coil 1st image shift coil Specimen holder Objective lens liner tube Objective lens coil se a y y fe A a IA ABN bt yy eo Ky DN Field limiting aperture assembly gt r aK Intermediate lens stigmator coil Projector lens beam deflector coil SZP PSA 000 2nd image shift coil D Le 1 rf ll a V 1 Intermediate lens coils Projector lens coil Viewing chamber isolation valve P 1 ll OE i e Ne mi E High resolution diffraction chamber pS Binoculars Small screen Viewing chamber S 27 Viewing window Dispensing magazine Receiving magazine Ls SONY BRL dE Fig 2 2 Cross section of microscope column Large screen Camera chamber_______ gt 2 1 1 Condenser aperture assembly Fig 2 3 Knob 1 and level The apertures are selected c
20. mages will be saved here View Image Camera Control Survey and Click for Live Image Note Focus is used to fine focus FFT is to get Real time FFT image Speed Quality button switches between frame averaging Quality and the faster no frame averaging Speed mode Record Image a Adjust the brightness of the beam to position the histogram approximately centered in the box The green line on the right hand should be visible and slightly away from the right side of the white box b Click for Final Image to acquire a quality full resolution image after the Live image is focused and illuminated properly Put the operation parameters sample information in the Microscope Information box and then save the image Finish Put the Screen back to the horizontal position and close the AMT software 34 Note Please DO NOT use the AMT CCD camera to record electron diffraction patterns Only use films to record the EDPs 35 APPENDIX VI Objective Lens Stigmation Correction There are a couple of ways to do it 1 Thin Amorphous Area Find thin amorphous area and center it Correct the objective stigmation with the OBJ STIGMATOR on the upper unit in the lower left panel If the astigmatism is bad you may notice streaking that flips 90 on either side of focus Figure A1 Start slightly under focus bright Fresnel fringe at the sample edge and use each objective stigmator X or Y in turn to get the sharpe
21. mode Knobs The amount of current variation when the large knob is turned one notch is the same as when the small knob is turned 16 notches Switch Setting this switch to 1 2 3 or 4 enlarges the amount of current variation per notch by 1 16 256 or 4 096 times respectively WOBBLER Used for generating alternating current or imposing a small cyclic electrical variation on the related current or voltage IMAGE X and Y switches Used for focusing The Ist and 2nd beam deflector coil currents vary periodically when one of these switches is turned on If the image is out of focus it wobbles in the X direction when the IMAGE X switch is turned on and in the Y direction when the IMAGE Y switch is turned on HT switch By depressing on this switch the high voltage is periodically varied facilitating the voltage center alignment DIFF FOCUS knob Used for varying the Ist intermediate lens coil current for focusing the field limiting aperture image when the FUNC TION SAM ROC switch control panel R1 is depressed and for focusing the diffraction pattern when the FUNCTION DIFF switch is depressed SELECTOR switch Used for varying the normal magnification when the FUNCTION MAG 1 or MAG 2 switch control panel R1 is depressed the low magnification when the FUNCTION LOW MAG switch is 12 depressed the selected area magnification or the rocking angle in case the EM ASID is used when the FUNCTION SAM ROCK switch is depressed and
22. ndenser Astigmatism Rough adjustment 30 TEM 2 3 COND STIG DEF X Y gt sharp filament image 8 9 10 11 12 13 14 15 Condenser Astigmatism Fine adjustment Optional 1 MAGI TEM 2 3 100 KX turn the BRIGHTNESS knob clockwise until it beeps 2 Depress DIFF in the right panel and bring the camera length to 200 cm Focus the main spot DIFF FOCUS and center it Depress PROJ and use the shift knobs RH drawer 3 Use condenser aperture alignment knobs to set the spot for a symmetrical appearance as focus is adjusted 4 COND DEF ADJ Shift and set the SHIFT X Y switch to X and use X Shift and X DEF to adjust the image so there is no translation Repeat this with Y Beam Tilt purity Image Wobbler MAGI TEM 2 3 100 KX OL 0 DV 6 91 COND DEF ADJ Tilt TILT X Y switch to X and use X Shift and X DEF to bring two spot images into one Repeat this with Y Saturation of Filament Emission Turn filament emission control to stop be careful not to move the stop itself Filament ready Emission 110 pA Bias Set to 78 Do not change it and this value may vary Eucentricity Focus specimen with z height knob You should always maintain OBJ 6 91 and DV 0 The small knob of OBJ FOCUS is helpful for this You may depress IMAGE WOBBLE X Y to help you to focus image Intermediate Lens Astigmatism Optional 1 Both OBJ and SAD apertures out spread beam Diff mode Cam Length 50cm Diff fo
23. nish Turn CCD camera off Close AMT software and put down the screen Turn down Filament emission Turn down HT Select IMAGE SHIFT Left Condenser aperture in 2 level set to left Both SAD and OBJ apertures out Zero sample X Y and Z positions and tilts with N button After taking out TEM samples from holder you have to put it back to goniometer You need to vacuum the holder Set magnification at 800 KX Set TEM 2 3 SPOT SIZE at 2 If you recorded images on films do not forget to refill film up to 50 and reset the unused film number to 50 To change films open the desiccator in room 13 1036 by pressing AIR PUMP button Wait for venting to complete open lid and remove the two boxes marked FOR 2010 ONLY Close the lid and press AIR PUMP After you refill the film box in dark room put the Film box and the empty receiver box in the desiccator room 13 1036 and press the AIR PUMP button to pump the desiccator Fill the log out sheet in the computer You have to fill all blanks besides the comment blank 25 APPENDIX I Camera Length Calibration for JEOL JEM 2010 Electron Microscope Standard Sample NiOz a 0 417 nm cubic Accelerating Voltage 200 kV Bragg s Law Rd AL A 0 0253 A at 200 kV Named L cm Calibrated L cm 15 16 3 20 21 5 25 26 8 30 32 1 40 42 4 50 52 4 60 62 8 80 83 1 100 104 120 124 150 155 200 199 APPENDIX II EDS NBD CBD Alignment 1
24. ns and a projective lens The ultra high resolution UHR pole piece is used in the objective lens The objective aperture sizes are 20 40 60 and 120 um in diameter SAD aperture sizes are 10 20 50 and 100 um in diameter In Low Mag mode the objective lens is turned off and the objective mini lens is active 1 3 Specimen stage Specimen holder is exchanged with airlock mechanism with two stage evacuation X Y Z and X tilt are all motor driven The movement range of X and Y directions is 1 mm The specimen tilt angle is 15 for both X tilt and Y tilt 1 4 Vacuum system It includes an oil rotary pump an oil diffusion pump and a sputter ion pump SIP The diffusion pump is for pumping of the specimen chamber and the camera chamber and the SIP is for the pumping of the column and gun chamber 2 Description of Column and Panel Controls 2 1 Column The essential column parts are shown in Fig 2 1 and 2 2 Condenser minilens shifting 1 Condenser aperture screw 4 pcs assembly Refrigerant tank Goniometer Objective aperture assembly Specimen holder Field limiting aperture assembly Intermediate lens shifting screws 4 pcs Projector lens shifting screws 4 pcs Binoculars 8 Z CONT switch SPEC CONTROLLER Screen lever Tracker ball 10 Camera chamber door handle 11 Pedal switches Fig 2 1 External view of column Lift arm Electron gun Wehnelt unit Acce
25. ns in conjunction with the intermediate lens shifting knobs in order to align the image forming system Projector lens shifting screws SERVICE ONLY Used for shifting the projector lens in order to align the image forming system Screen level Used when observing the image through binoculars By pulling the level towards users the small fluorescent screen is inclined 45 Camera chamber door handle Used for opening and closing the camera chamber door You have to turn Nitrogen gas on By turning the handle clock wise as far as it will go 9 clock position the electron gun filament power is switch off the AIRLOCK OPEN lamp goes out the airlock valve V2 close air is admitted into the camera chamber door open By turning the handle counter clockwise as far as it will go 6 clock position i e the original position with the door closed the two chambers are evacuated upon completion of evacuation when the vacuum reaches the required value the airlock valve automatically opens and the CAMERA AIRLOCK OPEN lamp lights up Pedal switches X pedal switches left By stepping on one of the pedals the specimen is titled around the X axis in one direction and by stepping on another pedal the specimen is tilted around the X axis in the opposite direction Y pedal switches right When a rotation specimen holder is used the specimen is rotated in one direction by stepping on one of the pedals and rotated in the opposite direction by step
26. on mode 21 NBD switch When depressed the built in lamp brightens and the illumination mode is set to the NBD mode small convergence angle micro area illumination mode 22 CBD switch When depressed the built in lamp brightens and the illumination mode is set to the CBD mode wide range changeable convergence angle micro area illumination mode 23 a SELECTOR knob Select the convergence angle with the illuminating area kept unchanged in size The Cm lens current decreases and illuminating angle becomes larger as ths is turned clockwise The CM lens current decreases to zero when this is turned fully clockwise 2 2 2 Control panel R1 Fig 2 9 3 6 10 11 14 1516 For attachments H i we E a t 4 S TEBRIN 1218 17 18 19 Fig 2 9 Control panel R1 1 SHIFT Y knob Used for shifting the electron beam in the Y direction by varying the condenser lens beam deflector coil current The two lamps above this knob light up when this knob is set to the midway position When this knob is turned clockwise or counterclockwise from its midway position the left or right lamp goes out An alarm sounds indicating that the knob has been turned beyond the specified variable range 11 2 3 4 5 6 7 DEF Y knob Varies the Y current in the coil selected with the DEFLECTOR control panel L1 The two lamps above this knob function in the same manner as those above the SHIFT Y R1 1 The two lamps however
27. ondenser mini lens Setting 3 for alignment and normal use TEM X 3 Setting 2 for observation larger than 100 KX TEM X 2 Setting 1 for HRTEM larger than 500 KX TEM X 1 You may need to realign after changing a selector setting X presents the spot size To improve beam coherence for high resolution imaging use an a SELECTOR setting of 1 5 The sample should be tightly secured in the holder and should be stable under the beam 6 Proper crystallographic orientation Try to find the on axis electron diffraction patterns by titling A double tilt holder is critical for the samples with single phase or big grain size APPENDIX IV Removing and Inserting the Sample Holder 27 When you insert and remove the specimen holder the pin on the rod touches a microswitch like a button that tells the microscope vacuum system to do something What the microscope does will depend on the position of the pump air switch You must be very careful to hit the microswitch and STAY ON IT until the specimen holder has fully vented if you are removing the holder or is held by the vacuum if you are inserting the holder Keep a counter clockwise pressure on the holder while you are on the microswitch to ensure the pin on the sample holder keeps good contact Otherwise you will crash the vacuum and shut down the microscope Be especially careful for highlighted steps OUT 1 Set switch to AIR 2 Pull straight out until you feel a s
28. orresponding to the knob 1 position and level direction 2 1 3 2 1 4 Knob 2 3 4 Knobs 2 and 3 used for precisely aligning the aperture in the electron beam path by shifting the aperture in the X and Y directions on the horizontal plane when the level is turned to the left Knobs 2 and 4 are used when the level is turned to the right The apertures sizes are Lever Position to Left 120 um 70 um 50 um Lever Position to Right 20 um 10 um Open Knob 1 DEA Knob 3 Knob 2 Lever Fig 2 3 Condenser aperture assembly Condenser mini lens shifting screws Used for illumination system alignment Specimen holder Bring a specimen into from the electron beam path Goniometer Fig 2 4 Z knob Green lamp TX knob TY knob Red lamp PUMP AIR switch Fig 2 4 Goniometer 5 A specimen holder is inserted and tilted with a motor in the goniometer TX knob Defines the specimen X tilt range TY knob Defines the specimen Y tilt range Z knob Defines the specimen shifting range in the specimen vertically Green lamp When lit indicates that the specimen holder insertion and removing is ready Red lamp When lit indicates that the goniometer is being roughly evacuated PUMP AIR switch Setting this switch to PUMP evacuates the goniometer the red lamp lights up during evacuation and the goniometer vacuum is broken when this switch is set to AIR Switch setting can not be performed unle
29. ow rate of the oil diffusion pump is smaller than the specified value PIG Lights to indicate that Pirani gauge s is are broken RT Lights to indicate that the pressure in the vacuum reservoir has decreased to the specified value 14 Evacuation system diagram Shows the state of the microscope evacuation system The valve lamp s light s up when the corresponding valve s open s Valve lamp 17 lights up however when the valve closes PI1 PI2 indicate Pirani gauges and PE indicates Penning gauge SIP RP and DP indicate ion pump oil rotary pump and oil diffusion pump respectively 2 2 4 Control panel R2 Fig 2 11 Fig 2 11 Control panel R2 1 DEFLECTOR When one of these switches is turned on or depressed the built in lamp lights up and the current in the deflector coil related to the depressed switch can be varied by the SHIFT and DEF R2 7 13 GUN The electron gun beam deflector coil current can be varied with the SHIFT and DEF 15 2 3 4 5 6 7 SPOT The spot alignment coil current can be varied with the SHIFT COND The condenser lens beam deflector coil current can be varied with the SHIFT and DEF IMAGE The image shift coil current can be varied with the SHIFT and DEF PROJ The projector lens beam deflector coil current can be varied with the SHIFT STIGMATOR switches By depressing one of the switches the stigmator coil related to the depressed switch is connected to t
30. ping on the other pedal When a double tilt specimen holder is used the specimen is tilted around the Y axis in one direction by 7 stepping on one pedal and tilted around the Y axis in the opposite direction by stepping on the other pedal Further when a specimen elongating holder is used the specimen is elongated by stepping on one pedal and compressed by stepping on the other pedal 2 2 Control Panels The control panels are conveniently located for operational ease as shown in Fig 2 7 SC SPEC CONTROLLER Ll Control panel L1 R1 Control panel R1 L2 Control panel L2 L3 Control Panel L3 KB Keyboard 8 A R2 Lef led Control pane R2 eft console door GC GONIO CONTROL Fig 2 7 Location of control panels 2 2 1 Control Panel L1 Fig 2 8 1 2 3 4 5 6 7 8 9 21 20 19 3 6 1420 13 2225 Al ES SEO is 12 141546 Fig 2 8 Control panel L1 EMERGENCY STOP button Used for shut off the instrument in an emergency POWER key switch Used for starting up and shutting down the instrument ACCEL VOLTAGE READY lamp Indicates that the instrument is ready for high voltage generation That is this lamp green when lit indicates that the anode chamber pressure has dropped to a certain specified value or less and that the pressure of the isolation gas in the gas chamber has increased to a certain value or more This lamp flickers while the accelera
31. removing holder 2 Check V2 is open left drawer 3 Loading unloading sample Please read the attached figures at the end of this document for removing and inserting sample holder Note After loading the holder double check the V2 is open 3 High Voltage and Filament Current 1 Turn on HT at 120 kV 2 Turn filament current up to 3 and wait until beam current stable 3 Increase ACC voltage in 1 kV increments up to 200kV HT ready Beam current meter 101nA 200kV 4 Increase filament current by turning up half unit over 2 5 min Stop increasing the filament current and start alignment when beam current increases to about 106 uA 4 Gun Alignment 1 Check the objective aperture is out 2 Find beam and then Set OBJ len current to 6 91 OBJ current on Page 4 3 Set DV on Page 1 to 0 by changing the focus control right hand panel 4 Focus image of filament with C2 5 Gun tilt 50 KX MAGI TEM 1 3 Depress GUN right drawer adjust DEF X Y for brightest most symmetric image of filament 5 Condenser Alignment MAGI TEM1 3 gt gun shift and TEM 5 3 gt beam shift on LH and RH control panel 50 KX and 200 KX Center filament image at each setting in turn until no more than 1 cm movement at 200 KX 6 Condenser Aperture Alignment TEM 2 3 MAGI 100 KX OL 0 DV 6 91 Adjust for no translation as C2 BRIGHTNESS control is rotated in clockwise or anti clockwise do not pass the crossover when you rotate C2 7 Co
32. sed the depressed switch lamp brightness and the coil current relating to the depressed switch becomes variable with the left and right SHIFT or DEF knobs L1 17 R 1 or L1 18 R1 2 The lamp darkens and the coil current remains fixed at the present value when the switch is redepressed COND STIG When depressed condenser lens stigmator coil current can be varied OBJ STIG when depressed the current stored in the memory which is designated by the cam switch located under this button switch is applied to the objective lens stigmator coil to the intermediate lens stigmator coil in the case of the LOW MAG mode and becomes variable DARK TILT When this is depressed the current stored in the memory which is designated by the cam switch located under this button switch is applied to the condenser lens beam coil and becomes variable The lamp above this switch indicates when lit that this switch has been turned on and remains lit until the adjacent BRIT TILT is depressed The DARK TILT is used to tilt the electron beam when observing mainly a dark field image BRIT TILT Same as the DARK TILT Used to align the optical axis by tilting the electron beam The lamp above this switch lamp remains lit until the DARK TILT is depressed The BRIT TILT is used to tilt the electron beam when observing mainly a bright field Image IMAGE SHIFT For image shifting at high magnifications 14 BRIGHTNESS knob Converges and spreads the electron beam Var
33. ss the switch is pulled Connector For optional specimen holders such as a double tilt specimen holder Objective lens aperture assembly Fig 2 5 Knob 1 and 3 Used for precisely aligning the aperture in the electron beam path by shifting the aperture in the X and Y directions on the horizontal plane Knob 2 Used for selecting the objective lens apertures By turning the knob clockwise the 120 60 40 20 um diameter apertures are respectively positioned in the electron beam path As the aperture size is reduced the electron beam intensity is also reduced The aperture is removed from the beam path by positioning the knob at red spot Fig 2 5 Objective lens aperture assembly SAD aperture assembly Field limiting aperture assembly Fig 2 6 Knob 1 Used for selecting the SAD apertures By turning the knob clockwise the 100 50 20 10 um diameter apertures are respectively positioned in the electron beam path As the aperture size is reduced the electron beam intensity is also reduced The aperture is removed from the beam path by positioning the knob at red spot Knob 2 and 3 Used for precisely aligning the aperture in the electron beam path by shifting the aperture in the X and Y directions on the horizontal plane 6 2 1 7 2 1 10 2 1 11 Knob 1 Knob 3 Sa i Knob 2 Fig 2 6 SAD aperture assembly Intermediate lens shifting screws SERVICE ONLY Used for shifting the intermediate le
34. st least distorted dotty contrast you can Then go a little closer to focus and do it again Eventually when you are in focus you should see very little contrast if the sample is thin On either side of focus you should see rounded non distorted dotty contrast Fig Al Corrected Objective stigmation a under focus b over focus Note there is no streaking 2 Fresnel Fringe Find a pointy edge of your sample or a small hole where you can see the Fresnel fringe on edges approximately 90 to each other Figure A2 Adjust the OBJ STIGMATOR until you see that the Fresnel fringe is the same thickness all the way around the edge You can do this with the bright under focus fringe or the dark over focus fringe You can see the streaky amorphous carbon area switches direction by 90 between under and over focus Also note the Fresnel fringe around the hole edge is not uniform thickness in a and c Close to focus in b you can see a bright fringe on some edges and a dark fringe on edges at approximately 90 36 Figure A2 Objective stigmation of an amorphous carbon film a under focus b in focus c over focus 3 AMT CCD live FFT Choose an amorphous area of your sample The area must be fairly uniform and all amorphous Adjust the OBJ STIGMATOR to make the FFT round Figure A3 You may need to change both magnification and focusing to see the FFT image Usually the higher the magnification is the smaller the diameter of the
35. t MAGland 100 KX Turn the BRIGHTNESS knob clockwise until it 21 6 2 6 3 beeps Depress DIFF in the right panel and bring the camera length to 200 cm Focus the main spot DIFF FOCUS and center it Depress PROJ and use the SHIFT X Y in the right drawer Depress COND DEF ADJ SHFIT and set the SHIFT X Y switch to X and use X SHIFT and X DEF to adjust the image so there is no translation Repeat this with Y 7 Beam Tilt purity Image Wobbler 7 1 7 2 Set MAGI and 100 KX Make sure OBJ lens current is 6 91 Depress COND DEF ADJ TILT and set TILT X Y switch to X and use X SHIFT and X DEF to bring two spot images into one Repeat this with Y 8 Saturation of Filament Emission 8 1 8 2 Focus the beam with BRIGHTNESS knob and turn up filament emission until all the indications of striations in the image disappear The BEAM CURRENT meter should be 110 uA BIAS set to 78 Note DO NOT INCREASE FILAMENT EMISSION BEYOND SATUATION DO NOT CHANGE THE STOPPER POSITION Spread the beam until it reaches the edge of the screen 9 Eucentricity 9 1 9 2 Set magnification to 50 KX and then move sample into view Focus specimen with z height knob to obtain the minimum contrast You should always maintain OBJ 6 91 and DV 0 10 Intermediate Lens Astigmatism Optional 10 1 10 2 10 3 10 4 Take out both OBJ and SAD apertures and spread beam by turning the BRIGHTNESS knob clockwise until it beeps Set DIFF mo
36. ting voltage is increasing ACCELERATING VOLTAGE switch Setting this switch upwards or downwards increases or decrease the accelerating voltage value displaced on the CRT R1 14 If the HT L1 5 is not lit no voltage is generate although an accelerating voltage value is displayed on the CRT HT switch The lamp lights up when depressed and an accelerating voltage selected with the ACCEL VOLTAGE L1 4 is generated if the ACCEL VOLTAGE READY L1 3 is lit Redepressing this switch turns off the accelerating voltage Beam CURRENT meter Indicates the sum of the beam current and detecting current in the high voltage power supply FILAMENT READY Indicates when lit that the electron gun filament can be ignited FILAMENT knob Turning this knob clockwise increases the current applied to the gun filament if the FILAMENT READY L1 7 is lit PANEL LIGHT knob Controls panel illumination brightness 9 10 BIAS Controls the electron gun bias Indicator Indicates the bias value Switch Turning this switch upwards increases the bias value and the beam current indicated on the BEAM CURRENT L1 6 11 ROOM LAMP switch For turning on and off a room lamp 12 SPOT SIZE switch Setting this switch to the left position increases the spot size the size of the electron beam which has been maximally converged with the BRIGHTNESS The spot size value is displayed on the CRT R1 14 13 DEFLECTOR switches When one of these switch is depres
37. top Do NOT release 3 Rotate counter clockwise until you feel a stop Do NOT pull 4 Pull straight out until you feel a stop 5 Rotate counter clockwise until you feel a stop Do NOT pull 6 WAIT until the green LED goes out to indicate the sample is vented Then pull out the holder 4 5 4 6 N X 28 IN 1 Insert the sample holder straight in and push it against the microswitch 6 l N Keep a counter clockwise pressure to maintain good contact When you hear some valves opening to vent the 5 holder again you know you are on the microswitch Then change the switch to PUMP Keep holding the sample holder until you feel the vacuum grab it You can then release it BUT DO NOT rotate it 4 2 WAIT for the green light to come on before rotating clockwise 3 Allow the holder to go in to the stop 4 Rotate clockwise until you feel a stop Do NOT pull or push 5 Allow the holder to go in slowly Ke You need to resist a little Do NOT 6 o column vacuum iS XxX 1 1 N N 29 APPENDIX V JEOL 2010 Operation Summary 1 Startup Check 1 Make sure the ACCELERATING VOLTAGE READY Light is ON Green 2 The FILAMENT EMISSION should be OFF 3 Information panel should be showing display 1 Page 1 If not press P1 lt enter gt on the keyboard 2 Load Specimen 1 Zero tilts and z height with N and zero x y position in Goniometer Check before
38. us Couisranes a tastnee apenas a a meas sacs nae aaa 20 APPENDIX I Camera Length CalibratiOM oooococinncninnoconnnonnnononcnnnaconocnnn cono ncon coco nocnnnos 26 APPENDIX IT EDS NBD CBD Alignment cooooinccnnocononoconnnonnnnonncnnoconnconnnconccconocnnacnnnnoos 26 APPENDIX II High Resolution img sii acceler as 27 APPENDIX IV Removing and Inserting the Sample Holder oooonccninccnnncnnnccninccnnnns 28 APPENDIX V JEOL 2010 Operation SUMMA Yoococonoccnocononnnonnnonnncnnnocnnocnnnnonncconnccnnacnnos 30 APPENDIX VI JEOL 2010 STEM Allignment cccccccssccsstscssecssccssccesscesensessecsenes 32 1 Specifications 1 1 Performance Guaranteed resolution 1 4 A lattice and 1 94 A point to point Accelerating voltage 80 100 120 160 200 kV Magnification at 200kV Standard magnification mode 2 000x to 1 500 000x Selected area magnification mode 2 000x to 1 500 000x Low magnification mode LOW MAG 50x to 1 000x Electron diffraction camera length Selected area electron diffraction 8 to 200 cm 1 2 Electron optics system Illumination system includes the electron gun and condenser lens The electron gun multi stage beam stage is a standard self biasing LaBg filament The condenser lens system is four stage condenser lens 1st 2nd 3rd and mini lens The condenser aperture sizes are 10 20 50 70 and 120 um in diameter Imaging forming system includes an objective lens 1st and 2nd intermediate le
39. ying the specimen shift speed in the Z direction vertical direction 2 TILT SPEED X knob Used for varying the specimen tilting speed around the X axis 1 e around the axis of the specimen holder 3 TILT SPEED Y knob Used for varying the specimen tilting speed around the Y axis 1 e around the axis perpendicular to the axis of the specimen holder when a specimen tilt holder is used and the specimen elongation rate when a specimen elongating holder is used 18 Fig 2 14 Control panel GC 2 2 8 Control panel KB and CRT Fig 2 15 Fig 2 15 Control panel KB The keyboard is used to input commands edit information and check the status of the microscope The CRT displays useful information on the status of the microscope Brightness and contrast for the CRT can be adjusted with the right knobs The CRT displays different pages 19 3 Basic Operation I Before Starting Make sure vacuum ready green light is on otherwise can not turn voltage on Check that the pressure reading on SIP power supply is lt 3x10 Pa Check PAGE 1 on CRT to make sure TEM 2 3 Mag 800 KX 200 kV Filament knob is turned down and HT button is off IMAGE SHIFT is depressed Condenser aperture is in SAD aperture out Objective aperture is out Load sample 9 1 Zero sample x y positions and z height with neutral button N Check before removing holder 9 2 Check V2 is open 9 3 Loading unloading sample Please read th
40. your samples or also use amorphous areas in your TEM sample 10 2 Increase magnification above 100 KX higher magnification more difficult it becomes with binoculars or CCD TV 10 3 Depress OBJ STIG button and sharpen image so no preferred orientation visible with objective lens stigmator DEF X Y Note Do this overfocused slightly fringes are dark never at cross over worst resolution at cross over It is stigmated correctly if Fresnel fringes visible at overfocus dark ring at overfocus light ring at underfocus disappear uniformly into features through focus For amorphous areas there should be no preferred texture or streaking through focusing IV Dark Field Optional Double tilt holder is preferred Make sure sample is eucentric 23 Go to SAM ROCK mode and get minimum contrast with OBJ FOCUS Put in SAD aperture center and focus it Push DIFF BUTTON and set up a two beam condition one diffracted beam is brighter than other diffracted beams besides the transmitted beam by titling Push DARK TILT button If you can not see transmitted beam go to SAM ROCK mode and go back and forth until you have used tilts dark field ones to move the transmitted beam to center Go back and forth between dark field and bright field until transmitted spot does not shift As you tilt with DARK TILT button depressed you will lose illumination so use bean translators SHIFT X Y to move illumination back into center This sets up your st
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