"user manual"
Contents
1. 16 9 1 Mass Flow Conversion 5 2 MFM 21 16 9 2 Conversion factors Introduction 1109 COATROWER amp MASS FOU METER 16 16 17 17 17 17 17 17 18 18 18 18 19 25 24 24 24 24 25 25 27 Sevenstar Operating Instruction 1 APPLICATION amp FEATURES Mass Flow Meter MFM accurately measures mass flow rates Mass Flow Controller MFC accurately measures and controls mass flow rates despites gas volume fluctuated due to pressure or temperature changes Which is widely applied in the fields as semiconductor and IC fabrication special materials science chemical industry petrolic industry pharmaceutical industry environmental protecting and vacuum system researching etc The typical applications include microelectronic process equipment such as diffusion oxidation epitaxy CVD plasma etching sputtering ion implantation vacuum deposition equipment optical fiber melting micro reaction equipment mixing amp matching gas system capillary flow control system gas chromatograph and other analytical instruments D07 series amp MFC bring the high accuracy excellent repeatability quick response soft start better reliability wide variety ranges of operation pressure good operation in high pressure and vacuum situations simple convenient operation flexible installati2. 4 6 0 0 4 INSTALLATION 6 6 1 Medium Forbidden 4 1 Receipt and 6 6 2 Corrosive 4 A ADIMEN Olen eoi pe 7 6 3 Valves Sealing 2 petri EE 8 6 4 Valves 4 4 Electrical Interfacing 9 6 5 Installation Position 4 5 PC Connections ern d eee 12 6 6 Operation Pressure 4 6 Zero 13 6 7 Calibration and 5 OPERATION INSTRUCTIONS 15 6 8 D07 19C 19CM Ordering 5 1 MEC Operations pene 15 7 Start Up ena 15 8 WARRANTY amp RM EPA e 16 8 1 Product 5 1 3 Readout Box amp PC Connections 16 8 2 Specific warranty requirements 5 1 4 Connections eee eet 16 9 3 SOLVICE ne 5 1 5 Valves Drive inn e trece bos seeds 16 9 APPENDIX tora 5 1 6 Shut Off
3. AttentionA 1 Standard Temperature 273 15K 0 Air Pressure 101325 Pa 760mm 2 Please feel free to contact us if the request gas conversion factors could not be found in our appendix 27 27 Sevenstar Beijing Sevenstar Qualiflow Electronic Equipment Manufacturing Co Ltd D07 Series Mass Flow Controller Beijing Sevenstar Electronics Co Ltd Mass Flow Meter Subsidiary Co Ltd Address No 1 Jiuxianqiao East Rd Chaoyang District Beijing China 34741 Beijing China Post code 100015 Tel 86 10 64362939 86 10 64361831 ext 8491 or 8315 Fax 86 10 64362923 or 64362939 Homepage http mfc sevenstar com cn E Mail mfcsales sevenstar com cn Shanghai Office Room 1916 Unicom International Tower NO 547 Tianmu West Road Zhabei District Shanghai 200070 China Tel 86 21 33030324 Fax 86 21 63533265 Shenzhen Office Room 712 Section B Qiche Tower No 45 Zhenhua Road Futian District Shenzhen China Zip code 518031 Tel 86 755 88290258 Fax 86 755 88294770 Description may be changed following improvements to product The information contained in this document is subject to change without notice If there is any mistake in this uses manual please feel free to contact 2010 Beijing Sevenstar Electronics Co Ltd All rights reserved
4. the potentiometer will control flow rate when the switch is turned on EXT position the external signal will control flow rate Please check out the details in Flow Readout Box Instruction Flow Displa D08 1D ZM FLOW READOUT BOX low Unit Zero potentiometer low Set potentiometer Valve Drive Switch Figure 14 Flow Readout Box Operating Panel When valve switch is on the position of AUTO gas supply should be open first and then turn on the power supply the flow rate will not be beyond 5 of presetting after flow soft start about 20 seconds General speaking it should be warming up around 15 minutes in case valves shut off and gas flow cut off after stable zero movement normal operation could begin If there is big zero excursion please see the reference 4 5 in the case of non gas flow it s better adjust zero by zero potentiometer If Valve switch is on the position of OFF after power supplying gas supplying and warming up turn switch to AUTO position flow rate will reach the presetting 2 or lower after a few seconds which is the suggested operating method 15 27 Sevenstar c If Valve switch is on the position of PURGE the flow rate will reach up to the maximum value after gas and power supplying which will have the function of air blasting to the gas circuit If Valve switch is on the position of AUTO and presetting is not zero open the gas after power supply the flow rate will have a big overshoot
5. 6 5160 0 264 SO 032 0 14890 2 8580 0 687 114 0 1572 8 4650 0 206 WE6 121 0 0956 13 2900 0 215 Xe 006 0 0379 5 8580 1 415 26 27 Sevenstar 9 Conversion Factors Instruction and are standard calibrated by while it s out of factory Other gas calibrations be approximated by converting of conversion factors of our instruction While using other gas operating One single gas The conversion factors could find out in the users specification instruction A mixture of two or more gases Assume there is n sorts of gases could calculate the conversion factors C by the following formula Basic Formula C 0 3106 N Cp Density of the gas Cp Specific heat of the gas N Structure factors of gas molecule See Table 6 Table 6 Gas Molecule Composing factors COMPOSITION EXAMPLE N VALUE Single atom numerator Ar He 1 01 Double atom numerator CO N 1 00 Tree atom numerator NO2 0 94 Multi atom numerator NH3 C4Hs 0 88 For mixture gases N 1 T N2 2 T Nn Then 0 3106 N1 1 T 02 oT Nn on oT C 1 1 o1 oT p2Cp2 2 aT lt lt pnCpn 0 The flow of single gas OT The flow of mixture gas P1 Pa The density of single gas CP1 CPn Specific heat of the single gas Structure factors of gas molecule See Table 6
6. and then rapidly reach to the stable presetting value this kind of operation should better be avoided e The best operating sequence should be 1 the power supply 2 Turn the Valve switch on OFF position 3 Open the gas supply 4 Warm up for minutes to have stable zero point movement 5 Turn the switch on AUTO position 6 Set flow rate under request This is the best way to operate without an overshooting 5 1 2 PURGE When need air blasting and cleaning bypass and tube users could turn the switch on PURGE position during the purging flow rate value should reach up to times or even several decuples of the full scale flow value If shutoff gas supplying it could be vacuum pumping to get rid of MFC internal or upper reaches remained gas matching request And then shut off valves open gas supply again and turn it to AUTO position 5 1 3 PC Connection By Displayer Please find the reference in Figure 1 and Figure 11 it should set the switch of displayer to the EXT and turn switch to the AUTO position and then startup PC 5 1 4 Directly PC Connection Please have the reference in Figure 1 and Figure 12 after MFC warming up it could have PC startup 5 1 5 Valves Drive When the valve switch sets to AUTO position users could perform valves drive wire of external control signal socket please find the reference in Figure 1 and Figure 7 When valve drive wire connects with 15 V valves will be shutoff when valve drive wire conn
7. inlet pressure instable 5 2 High internal gas resistance Lessen internal resistance The heavy gas flow should have big valve open widen tube to parallel connecting gas bottles to improve gas supply capacity 5 3 Circuit or valve failure Repair and adjust 6 Disturbed by high 6 1 Earth wire and zero wire frequency power connecting of power supply is error be one port connection sourcing 6 2 Signal reference port connecting Check signal connecting wire problem 7 Flow display is in 7 1 The range or unit of Display is not Re adjust Display accurate matching to controller flow rate excursion instable 8 There is still flow 8 1 Valves leakage Repair solenoid control valve passing while zero 8 2 Zero point is moving less than 0 Adjust zero setting 9 The heavy flow is 1 Block of sensor Repair and replace the new sensor passing but no Should add filter to block gas dust outputting display Using special gas should be sure of good tube sealing and gas dryness 10 Without gas flow Zero 10 1 Sensor failure Replace a new sensor is fluctuate or excursion happened AttentionA Mark indicates that reparation and adjustment must be dealt under specialist advices 23 27 Sevenstar 8 WARRANTY amp SERVICE 8 1 Product Warranty a b Our products are guaranteed within 2 years warranty against defects in materials and workmanship if used in accordance with specifications and not subject to ph
8. instead of 5850E D connectors products of Brooks if necessary it should be altered by adding 5V power supply and swoping the connections of CLOSE to PURGE of Flow Display D07 19C MFC connecting products figure 9 could directly instead of FC2900 of Tylan series products but please note there should are no connections of 3 External Zero Adjustment and 13 Valve Control ports or disconnect it 11 27 4 5 Sevenstar PC Connections Connection through Flow Readout Box with PC or other external signal Figure 11 Flow Signal Output A D In i Signal common P Signal common COMPUTER Connection INT Or PLC Cable roug Of Valve drive ATTENTION Readout Box bi B T P DOA et in LOW urge Co Auto Figurell Connection with PC through Readout Box When need test the output signal Voltage 0 5VDC users could connect to the Flow Signal Output and the Signal common of external control signal socket of Flow Readout Box also could directly connect with PC modulus A D converter 5 00 V output voltage is corresponding as full scale rating flow rate of MFC Please be sure the flow testing output electric current will be no more than 3mA When the flow is setting by external signals it should be turned the switch on OUT meanwhile it should be input 0 5 00VDC external voltage from external control socket to the Flow Readout Box In case
9. of user s external potentiometer had settled it could be used a 3 3K multi turn potentiometer to connect to the external control signal socket of 5 00V and signal common It also could be directly connecting with modulus D A converter of PC to achieve auto control please be sure the flow setting input resistance should be higher than 100 KO If PC or PLC need perform the OFF and PURGE function of valve control it could be accomplished by use two RELAYS two sets transfer contacts One relay controls OFF and anther one controls PURGE when these two relays are not operating then it reaches to auto control mode Please be careful it should be not caused short circuit by two relays simultaneously operating Suggested relays connection as method as showing in Figure 12 12 27 b PC Directly Connection Figure 12 Flow Signal Output Signal common Setpoint MFM ATTENTION Valve drive and Set in MFM 15V Figure 12 PC Directly Connection Under the case of MFM MFC directly connects to PC without Flow Readout Box 15V power supply with good anti jamming should be provided by user itself connects SET with PC D A output connects Flow Testing with PC A D input Signal common connects signal reference point low current common and heavy current power common down lead separately and connects together to the 15V power supply common port If users need PC performs A
10. 4 068 0 3633 1 7870 0 421 C3H6 069 0 3659 1 8770 0 398 C3Hs 089 0 3990 1 9670 0 348 C4H6 093 0 3515 2 4130 0 322 C4Hs 104 0 3723 2 5030 0 294 CaHio 111 0 4130 2 5930 0 255 CsHi2 240 0 3916 3 2190 0 217 CH30H 176 0 3277 1 4300 0 584 136 0 3398 2 0550 0 392 C2H3CI3 112 0 1654 5 9500 0 278 CO 009 0 2488 1 2500 1 000 025 0 2017 1 9640 0 737 CoN2 059 0 2608 2 3220 0 452 Cb 019 0 1145 3 1630 0 858 D2 014 1 7325 0 1798 0 998 F2 018 0 1970 1 6950 0 931 GeCl4 113 0 1072 9 5650 0 267 25 27 Sevenstar Continue To Table3 Conversion Factors GAS GAS CODE HEAT p Factors SEMIE52 0302 Cal g C GeH4 043 0 1405 3 4180 0 569 007 3 4224 0 0899 1 010 010 0 0861 3 6100 1 000 HCl 011 0 1911 1 6270 1 000 012 0 3482 0 8930 1 000 017 0 0545 5 707 0 999 H2S 022 0 2278 1 5200 0 844 He 001 1 2418 0 1786 1 415 Kr 005 0 0593 3 7390 1 415 N2 013 0 2486 1 2500 1 000 Ne 002 0 2464 0 9000 1 415 NH3 029 0 5005 0 7600 0 719 NO 016 0 2378 1 3390 0 976 NO2 026 0 1923 2 0520 0 741 N20 027 0 2098 1 9640 0 709 015 0 2196 1 4270 0 992 PCl 193 0 1247 6 1270 0 358 PH3 031 0 2610 1 5170 0 691 PFs 143 0 1611 5 6200 0 302 102 0 1324 6 8450 0 302 SiCl4 108 0 1270 7 5847 0 284 SiF4 088 0 1692 4 6430 0 348 51 4 039 0 3189 1 4330 0 599 SiH2CI gt 067 0 1472 4 5060 0 412 SiHC13 147 0 1332 6 0430 0 340 SFs 110 0 1588
11. Outlet Fittings AA Compression Fitting 3mm GG Compression Fitting 6mm IDD Compression Fitting 8mm JJ Compression Fitting 10mm BB Compression Fitting1 8 CC Compression Fitting 1 4 HH Compression Fitting3 8 MM VCR 1 4 TT d4 nner X I hose RR 6 inner X Ihose XX Customer Special fittings please consult d for detail s Seal Materials V Viton T Teflon N Neoprene Mounting Position H Horizontal E HESD Horizontal Edge Side Down U Vertical Inlet Up D Vertical Inlet Down d Description 4 Default Value The letters on cover and tag in Chinese Differential Pressure D07 19C lt 10SLM 0 1 0 5 MPa 14 5 72 5 psid gt 10SLM 0 1 0 3 MPa 14 5 43 5 psid D07 19CM lt 0 02MPa 2 9psid Max Operating Pressure D07 19C 3 MPa 435 1 psig 007 19 10 MPa 1450 4 psig Calibration Temperature 22 2 C S Customer Special Requirements 20 27 Sevenstar For Example The letters on cover and tag in English Customer Special Full Scale 19SLM The proportion of Mixture gases should be indicated N2 60 gt 40 Customer Differential Pressure 0 05 0 3 MPa Customer Calibration Temperature 40 C and other customer special requirements For Example D07 19C013500CGGVHS DO7 19C 013 500C GG V H S Type Number D07 19C MFC lt Gas Flow Range Full Scale 5005 Inlet and Outlet Fitting
12. PURGE AA VA 159 INLET OUTLET Figure3 Operation Principle of MFC The outputting flow testing voltage from MFC is a direct ratio with the flow through the bypass full scale flow rate testing outputting voltage is 5V The Flow control ranges of is 2 100 F S When the set point lt 2 F S the valve will shut off MFC and MFM flow resolving power is 0 1 F S 5 27 4 1 Sevenstar AttentionA When Valve controller of MFC is posited on position of PURGE it can be functioned as a MFM In that case the maximum flow testing voltage could reach beyond 10V please care while flow is beyond F S 5V Full Scale the real flow will have no linearity corresponding with flow testing voltage While it s purging flow display will be inaccurate even showing reduce while the real flow is enhanced please be sure it ll be no damaged to device itself Operation control could accomplish by Flow Readout Box When setpoint is turned on the INT flow rate will be under controlled by the presetting potentiometer when setpoint is turned on the EXT flow rate will be controlled by 0 5 V voltage which is supplied by users There are three valves control switches on the panel of 08 series Flow Readout Box CLOSE PURGE and AUTO In case of CLOSE Valves of MFC will shut off in case of PURGE Valve will open reach to the tip to purge the Gas systems or could be functioned as a MFM when set to AUTO Valve can cont
13. Sevenstar D07 19C Mass Flow Controllers D07 19CM Mass Flow Meters INSTRUCTION MANUAL Jb Z Bl EB 3 03 8 5 BEIJING SEVENSTAR ELECTRONICS CO LTD Version June 2013 Sevenstar A NOTE TO OUR CUSTOMERS Dear customer Thank you for purchasing SEVENSTAR D07 series Mass Flow Controller and Mass Flow Meter product This user manual is important when installing and doing maintenance Please keep it carefully We strongly recommend that you read this manual thoroughly before you starting to use the product This user manual introduces the important issues including the proper and safe use of the products And please notice the words and section with the symbol Not in accordance with the user manual for the use of property caused by loss or personal injury SEVENSTAR may not be responsible If you require any additional information or assistant of Sevenstar D07 series Mass Flow Controller and Mass Flow Meter please feel free to contact your local Sevenstar Sales Agent or Sevenstar Customer Service at 8610 6436 2925 Yours sincerely Sevenstar CONTENTS 1 APPLICATION amp FEATURES 1 SP Start Up A a awu ata 2 SPECIFICATION u S u a pe eerte 2 5 2 2 Zero Test and Adjustment 3 STRUCTURE amp PRINCIPLE 3 5 2 3 Gas SUPPLY eius a lu enne re SUUCHUI E 3 5 24 Shut Off aaa rr ek o eed 3 2 Operation
14. UTO OFF and PURGE functions we suggested connection as showing as in Figure 12 4 6 Zero Adjustment It could be zero adjusted in case of zero excursions while the first time operating or a long period operating Users could unrip the nameplate remove the screw and then adjust the potentiometer from side face showing in figure 13 Please note it should be sure that gas flow tube could not be open while zero adjustment or shutoff the valves it should be warming up not less than 15 minutes adjustment performs after its zero moving to the stable stop 13 27 Sevenstar ZERO Figure 13 Overall of D07 19C D07 19CM There is another external zero adjustment function while MFC connected with our new zero adjustment functional D08 Flow Readout Box it could be achieved by zero potentiometer of display panel The important is the ranges of external zero adjustment is narrow when there is big zero excursion happened it should be better adjust zero from zero potentiometer of MFC 14 27 5 Sevenstar OPERATING INSTRUCTIONS 5 1 MFC Operation Together with Flow Readout Box 5 1 1 Start Up Reference to Figure 14 a The main operating should perform in the Flow Readout Box Valve Control Switches and flow setting potentiometer are in the front of Readout Box panel the flow setting internal or external signal control switches are on the back of panel of Readout Box When the switch is turned on the INT position
15. and PID control circuit to MFM will compose a MFC The following figure is exactly showing the structure of D07 19C MFC after opening up its overall 3 27 Sevenstar D Connector Stand I Solenoid control valve Zero Potentiometer Sensor Inlet Outlet Figure2 Structure of D07 19C D07 19CM is compared with D07 19C the difference of structures are only lack of solenoid control valves D07 19C D07 19CM are all 15pins D connectors 3 2 Operation Principle According to the Capillary Heat Transfer Temperature Difference Calorimetric Theory the flow sensor measures the mass flow without pressure compensation The sensor heated the flow signal which was measures by electric bridge and amplified it through amplifier the amplified flow testing voltage is compared with presetting voltage the differential signal will control valve after amplified then the flow rate of closed loop control will be same as presetting flow rate The bypass divider controls the flow rate The corresponding D08 series Readout Box have stabilized power supply 3 and 1 2 digital voltage meter presetting potentiometer external amp internal converters and three phase switches Figure 3 is showing the operating principle while a MFC is connecting with Readout box 4 27 Sevenstar TOY FLOW READOUT BOX SET we Setpoint EXT L 0 5 00V Output MASS FLOW CONTROLLER 15V OFF I k gt AUTO
16. ects with 15 V valves will be turned to the top of maximum to purge position when valve drive wire hangs in the air it s in the auto control situation 5 1 6 Shut Off Operation After shutoff power supply flow will be cut off automatically It should be better shut off gas supply Turn valve switch to OFF position and close the cut off valve of gas circuit before power supply 5 2 MFM Operation 5 2 1 Start Up Please warm up for 15 minutes by power supply before MFM operating 5 2 2 Testing and Zero Adjustment 16 27 Sevenstar Please check up zero point of MFM after its warming up especially for the first time operating it could have reference in 4 6 without gas supplying which could adjust zero by zero potentiometer 5 2 3 Gas Supply After zero movement reaches stable MFM could have gas supply Please pay attention to the flow rate it should be better operate not beyond full scale range 5 2 4 Shut Off Turn off the power supply which means MFM operating will be terminated it could not affect the flow rate of bypass 6 CAUTION 6 1 Medium Forbidden The gas of using should be purified without dust liquid and oil stain When necessary it should be added filter to gas circuit to make sure gas purification If the outlet of MFC connects with liquid sources which should be added simple directional valve of MFC outlet to avoid liquid refluent to the tube to destroy MFC 6 2 Corrosive Gas The materials of bypa
17. et to protect operating security After a long period operating if the leakage rate of MFC valve outlet is not beyond 296 F S which is the standard situation Otherwise it should be under maintaining 17 27 Sevenstar When valve is operating PURGE which should not be directly turned to AUTO operation should be turned the switch to OFF position and then turn it into AUTO to operating 6 4 Valve Operating 6 5 Installation Position Keeping installation surface horizontal while installation Please provide the installation position when ordering the We will calibrate products according to the requirement of customers The MFC might show the zero drift if it is not installed as the same position of calibration Customer can adjust zero to fix it 6 6 Pressure Resistance Please be caution for the medium operating pressure of MFC it should not be beyond the rage of specification of inlet and outlet Especially while operating under the high pressure situation the big differential pressure will affect flow fail to shut off or lower adjust In case of using heavy flow rate of MFC please be sure appropriately widen tube and reduce gas internal resistance if operating differential pressure is lower than the value of request it might could not be reach to the full scale flow rate value 6 7 Calibration and Conversion DO7 series are calibrated by nitrogen Other gas calibrations please inform in your order statements When the nit
18. g if there are no other users statements it will be considered as B connection style from factory B connection is showing in figure 7 Between and it could be transferred by J1 12 of PCB J1 J2 connection is showing in figure 8 connection is showing in figure 9 Setpoint 0 5VDC 15V Valve test point GND 15VDC Valve di OnE alve drive Valve drive Valve OFF PURGE Zero adjustment C ommon Output 0 5VDC 15V Power common Signal commmon 15V Figure 7 D07 19C B Connection 9 27 Sevenstar S1 S2 B Switch Position T Switch Position br bus hi A S 52 51 52 The black part denotes the switch button Figure 8 D07 19C MFC Socket Switch Connection Setpoint 0 5VDC Ed valve 15 GND OFF 15VDC e alve drive 15V 15VDC 0AUTO Valve test point PURGE Zero adjustment Common 15V Output 0 5VDC Power common Signal commmon 15V Figure 9 D07 19C MFC Connection 10 27 GND 15VDC 415V 15VDC Zero adjustment lt Common Output 0 5VDC Power common Signal commmon 15V Figure 10 7 19 MFM D Connector D07 19CM MFM Connections are showing in figure 10 It could be compatible with wires of D07 19C Figure 7 which is only lack of some wires of valves control AttentionA 007 19 MFC connecting products figure 7 could not be directly
19. m i X mm j 1 4 VCR outside diameter General speaking stainless steel tube was used to connect MFC and Gas System matching to the different request other materials also could be used as nylon tube or hard flexible plastic hose Figure 5 is an example to showing the fitting structure the arrow on the base of the MFC shows flow direction please note the flow input amp output direction should not be inversed fitted Back Ferrule Figure 5 Compression Fitting Connector Installation AttentionA When installing the fitting you should manually use spanner to wrench it tighten by 1 2 turn pulling up imported Compression Fitting should use spanner to be tighten in 1 25 turns to prove its not blow by after your installing the front ferrule back ferrule and nut Please note you should use two spanners to operating one spanner for locking the fitting stable and another one for revolving the nut Especially when you dismantle the tube you should operate by the two spanners otherwise fitting will become flexible which will affect its airproof function 8 27 Figure 6 VCR Connector Installation 4 4 Electrical Interfacing MFC could begin operating after it well connected with professional cable and corresponding Flow Readout Box The all MFC amp MFM connection are showing in the following figure 7 10 D07 19C MFC connections have two styles for choice General speakin
20. n out may irreversibly damage the electronic board inside the products If user self scheme power supply of a stable and anti jamming power supply is required with ripple below 5mV e Gas connections the fittings must be handled carefully We guarantee that all fittings have been individually inspected and are scratch free f MFC MFM must not be dismounted the MFC MFM warranty will be invalidated if the seal between the MFC MFM block and cover is torn 8 3 Service Our product engineer will help you with issues related to operation calibration installation process specification gas convention etc And we also provide you with technology support amp maintenances and products operation training Please visit mfc sevenstar com cn for relevant information and the locations of our service centers 24 27 Sevenstar 9 APPENDIX 91 Mass Flow Conversion Factors Table 3 Conversion Factors GAS GAS CODE HEAT Factors SEMIE52 0302 Cal g C g l OC Air 008 0 2400 1 2930 1 006 Ar 004 0 1250 1 7837 1 415 AsH3 035 0 1168 3 4780 0 673 079 0 0647 11 1800 0 378 070 0 1217 5 2270 0 430 BF3 048 0 1779 3 0250 0 508 B2H6 058 0 5020 1 2350 0 441 101 0 1297 6 8600 0 307 CF4 063 0 1659 3 9636 0 420 CH4 028 0 5318 0 7150 0 719 C2H2 042 0 4049 1 1620 0 581 C2H4 038 0 3658 1 2510 0 598 C2H6 054 0 4241 1 3420 0 481 C3H
21. on possible connecting with PC to carry out automatic control to the users system D07 series better be connected together with D08 Readout Box series the cable connection is showing as following Figure 1 Figure 1 D07 19C MFC and Readout Box 1 27 Sevenstar 2 SPECIFICATION Table 1 Specifications of 007 19 amp D07 19CM MFM 07 19 D07 19CM 0 5 10 20 30 50 100 200 300 500 SCCM 1 Full scale range N2 0 1 2 3 5 10 20 SLM 1 FS 20SLM 2 ES 0 5 ES 20SLM 2 6 bien mse lt 10SLM 0 1 0 5 MPa ss gt 10SLM 0 1 0 3 MPa 8 Temperature coefficient Zero lt 0 05 5 Span lt 0 1 5 9 Operationtem 520 40 10 0 9500 1 415V 50 415V 50 15V 200 15 50 ce 0 1 2 3 4 5 6 2 27 Sevenstar NotesA MFC MFM is calibrated by N gt as a standard gas Units SCCM Standard Cubic Centimeter Min SLM Standard Liter Min Standard Situation Temperature 273 15K 0 Air Pressure 101325 760mm Full Scale The main specifications of D07 series could be found in table 1 and table 2 D07 19CM is the measuring department of D07 19C Same types of amp MFC could match the same specifications 3 STRUCTURE amp OPERATION PRINCIPLE 3 1 Structure The MFM consists of flow sensor flow splitter bypass and flow amplifying circuit add control valves
22. rogen calibration users use other gas operating it could convert and calculate used gas flow rate by conversion coefficient of appendix 9 1 Which means users could multiply the readout flow rate from MFC Displayer with the used gas corresponding conversion coefficient result will be used gas corresponding mass flow rate of standard situation For example there is 100 SCCM N2 calibrated MFC the flow rate is displayed 86 SCCM while firedamp flowing the conversion coefficient of firedamp is 0 719 from reference of appendix 9 2 the real firedamp flow rate is 86 X 0 719 which is 61 8 SCCM If users use the mixture gas it could be calculated the conversion coefficient by the method that introduced in appendix 9 2 18 27 Sevenstar 6 8 D07 19C 19CM Ordering Code DO7 t 9 9 9 ff 5 m d t Number 19C 19CM MFM 9 9 9 Gas Please consult SEMI52 0302 For Example 013 007 H gt 000 Mixture gases please consult d for detail r r r r Flow Range Full Scale 4 005C 5SCCM 010C 10SCCM 020C 20SCCM 030C 30SCCM 050C 50SCCM 100C 1005 200C 2005 300C 3005 500C 500SCCM 001L 1SLM 0020 2SLM 003 3SLM 0050 5SLM 0100 10SLM 0200 20SLM 000C Customer Special Request please consult d for detail 19 27 Sevenstar DO7 t 0001 ner ffl 5 m d f f Inlet and
23. rol the flow rate automatically INSTALLATION amp CONNECTION Receipt and Upacking The D07 19C D07 19CM mass flow controller are manufactured under clean room conditions and has been packed accordingly upon receipt after receiving the equipment please carefully check the outer package for any damage incurred during the transportation Check that the delivery is complete and no parts are missing Since the products can be ordered in Several configuration ensure that the scope of supply is correct If you think there is a problem please contact the forwarder at once with regard to liability 6 27 4 2 Dimension Dimensions of D07 19C D07 19CM are as following 2 M4 deep Compression Fitting 3 6 8 1 8 1 4 L 113 1 4 VCR L 124 Compression Fitting 10 3 8 L 118 4 X Those L 114 6 X Ihose L 121 Figure 4 Outline Dimensions of 007 19 D07 19CM AttentionA The height of 108mm is the height without electric connector of cable It should be added 50mm more with the electric connector 7 27 Sevenstar 4 3 Fittings The Standard fittings is used with Compression Fitting and VCR there are ten types of fitting could be provided a Compression Fitting b Compression Fitting 3mm c Compression Fitting p8mm d Compression Fitting 10mm e Compression Fitting 1 4 f Compression Fitting 1 8 g Compression Fitting 3 8 h 4 X m
24. s Compression Fitting 6mm Seal Materials Viton Mounting Position Horizontal SS Customer Special Requirements For Example The letters on cover and tag in English Differential Pressure 0 05 0 3 MPa Customer Special fittings According to drawing Customer Special Calibration Temperature 40 C 21 27 Sevenstar 7 TROUBLESHOOTING Table 2 Failure Handling 1 There is no gas flow 1 1 Gas flow is shutting off gas Check the gas sourcing and make it PURGE Check potentiometer or In Out switch setting position 2 In case of turing on but without gas flow 2 2 Power supply failure Check input output voltages the flow rate testing is 15VDC 5 00VDC error 2 3 Sensor failure Replace the new sensor 2 4 Amplifier or other circuits failure Replace amplifier or repair circuit 3 In case of valve 31 Over load pressure of input Reduce the inlet operating pressure to shutting off there is outlet the differential pressure between decrease differential pressure still heavy flow rate inlet and outlet is beyond rating passing 4 The flow rate display 4 1 Pressure is lower than the rating could not reach to full scale flow rate value 4 3 Setting voltage is less than5 00V Check the setting Voltage 4 4 Others trouble Repair circuit etc 22 27 Continue To Table 2 Failure Handling NO 5 Fluctuant flow rate 5 1 Inlet pressure is too low or Heighten
25. ss are anti caustic materials like 00Cr17Nil4Mo2 same as 316Lstainless steel Teflon and Viton When users operate in condition of no vapor low leakage regular cleaning and proper operating MFC could possible control the normal corrosive gas Using ammonia organic solvent gas such as acetone or other strong caustic gas like BC13 and BBr3 please informed related information in your order statements Valve sealing materials usually are Viton for D07 19C MFC could also used Teflon While Teflon has been selected leakage maybe happened of valve port valve sealing leakage rate will lower than 2 of full scale flow rate when use the special caustic gas all sealing materials should be changed relatively For the cases that the MFC MFM used with toxic pyrophoric flammable or corrosive gas you should ensure that the fixing and fitting are airtight It becomes necessary to remove the controller from the system purge the controller thoroughly with a dry inert gas such as nitrogen before disconnecting the gas connections Failure to purge the controller could cause a fire or explosion resulting in death 6 3 Seal of Valve The Valve of MFC is an electric magnetic valve for adjustment which is not a solenoid plug valve so that could not perform that kind of function Users should better have that plug valve by themselves Especially when users operate with caustic gas general speaking it should separately add one cut off valve of MFC inlet and outl
26. ysical damage contamination alteration or retrofit Buyers undertake to check and inspect the goods and to notify SevenStar of shipment incidents by fax phone or e mail as soon as possible after receipting the goods During the warranty period products must only be repaired by Sevenstar or authorized SevenStar service centers otherwise the SevenStar product warranty will be invalidated Repairs will be performed free of charge during the two year warranty period If MFCs MFMs are out of warranty SevenStar will notify the owner of replacement or repair costs before proceeding Factory service and repairs are guaranteed 90 days The warranty excludes consumable materials and wear parts in teflon viton etc No MFC MFM used with dangerous gas will be accepted for repair or warranty without a decontamination and purge certificate 8 2 Specific warranty requirements are as follows Gas must be clean and particle free which means a filter lt 30 must be fitted in the gas line upstream of the a MFC MFM b Gas must comply with the pressure specifications and never exceed the rated value c Process gas should be in line with the seal materials chosen in the order especially in case of corrosive gas We shall not be responsible for any damage caused by changing process gas or choosing the wrong seal materials in order d Electrical connection requirements are as follows The system must be wired carefully non observance of the pi
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