Mid-Range Travel Steel Linear Stages (M-)UTM
Contents
1. M UTM X Z assemblies can be aligned to within 50 urad orthogonality and can provide up to 150 mm of travel AD 20 Newport M UTM Mid Range Travel Steel Linear Stages i 0 Maintenance 11 3 AD Newport RECOMMENDATION It is recommended to contact our After Sales Service which will be able to define the appropriate maintenance for your application Maintenance The M UTM stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and manipulated with precaution PRECAUTIONS The M UTM stage must operate and be stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your stage to our After Sales Service after every 2000 hours of use for lubrication If your M UTM stage is mounted on a workstation and cannot be easily dismantled please contact our After Sales Service for further instruc tions Repairing CAUTION Never attempt to disassemble an element of the stage that has not been specified in this manual Disassembling a non specified element can cause a malfunction of the stage If you observe a malfunction in your stage please immediately contact us to make arrangements for a repair CAUTION All disassembly attempts or repair of stage without authorization will void your warranty Calibration CAUTION It is recommended to return your stage to2. OO Ba TIM Mid Range Travel Steel Linear Stages USER S MANUAL GS Newport www newport com M UTM Mid Range Travel Steel Linear Stages Warranty Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument trans portation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or mis use of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Load on the stage greater than maximum specified load Carriage speed higher than specified speed Improper grounding Connectors must be properly secured When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads e Modification of the stage or any part This warranty is
3. Direction AD Newport The incremental sensor operates following the photoelectric measurement principle with a disk including slides When the sensor shaft turns the sen sor generates square signals in quadrature sent to pins 19 20 23 and 24 of the 25 pin Sub D connector 9 EDH0156En1030 01 03 M UTM Mid Range Travel Steel Linear Stages J OOOOOOCOOOOO 25 L i 1617 O1 S161 O11 1O1 19 Newport User Stage Encoder Phase A l Pin 19 SS Encoder Phase A L Pin 23 Encoder Phase B L Pin 20 b Encoder Phase B i Pin 24 Index Pulse Phase Pin 15 Output Signals Index Pulse Phase _ Pin 25 YY YY Y Y Oe gt ee 1 Pin 21 ay ee Encoders mA max a D x amp Sensors y OV Power Supply 5 7 Pinouts The 25 pin Sub D connection for the M UTM stages is given in the follow ing table UE31PP UE31CC M UTMPE1 amp PE 1 M UTMCCIDD amp CC 1DD UE404CC Manual UE41PP UE33CC M UTMCCIHL M UTMMS1 amp MS 1 M UTMPP1HL amp PP 1 M UTMCC 1 1 Phase 1 1 N C 1 Tachometer 1 N C 2 Phase 1 2 N C 2 Tachometer 2 N C 3 Phase 2 3 N C 3 Tachometer 3 N C 4 Phase 2 4 N C 4 Tachometer 4 N C 5 Phase 3 5 Motor 5 Motor 5 N C 6 Phase 3 6 Motor 6 Motor 6 N C 7 Phase 4 7 Motor 7 Motor 7 N C 8 Phase 4 8 Motor 8 Motor 8 N C 9
4. 98 25 1 97 50 3 9 100 5 9 150 Model Metric A B L1 in mm 6 1 155 7 1 180 9 1 230 11 0 280 UTM M UTM 1 4 20 M6 1 0 25 M UTM Series XY assemblies are an economical choice when precision motion for light loads is required These stages can be aligned to within 50 urad orthogonality AD Newport 19 z Manual Drive 2 __ gt Dimension in mm UTM M UTM L2 H MS1 4 0 100 5 1 26 32 MS 1 5 6 141 5 1 26 32 PP1HL 3 6 90 5 1 65 42 PP 1 5 2 131 5 1 65 42 PE1 5 5 139 1 26 32 PE 1 7 1 180 1 26 32 CC 1 5 2 133 1 91 48 5 CC1HL 5 8 148 1 91 48 5 CC1DD 4 6 116 5 1 26 32 cc 1DD 6 2 157 5 1 26 32 EDH0156En1030 01 03 M UTM Mid Range Travel Steel Linear Stages Accessories EQ100 Brackets Dimension in mm EQ100 Series right angle brackets to order separately can be used for ver tical mounting configurations of a M UTM stage Model A B c EQ100 S 5 3 135 5 1 130 5 4 1 105 4 HOLES 050 M4 CLR fi 63 O EQ100 L 8 5 215 5 9 144 6 9 174 e 108 EDH0156En1030 01 03 pem C lt 119 4 gt 16 a Dimensions in millimeters Model Description EQ100 S Right Angle Bracket for M UTM25 50 EQ100 L Right Angle Bracket for M UTM100 150
5. Common Phase 3 4 9 N C 9 N C 9 N C 10 N C 10 N C 10 N C 10 N C 11 Common Phase 1 2 11 N C 11 N C 11 N C 12 N C 12 N C 12 N C 12 N C 13 Mechanical Zero 13 Mechanical Zero 13 Mechanical Zero 13 Mechanical Zero 14 Shield Ground 14 Shield Ground 14 Shield Ground 14 Shield Ground 15 Index Pulse I 15 Index Pulse I 15 Index Pulse I 15 Index Pulse I 16 0 V logic 16 0 V logic 16 0 V logic 16 0 V logic 17 End of Run 17 End of Run 17 End of Run 17 End of Run 18 End of Run 18 End of Run 18 End of Run 18 End of Run 19 Encoder Phase A 19 Encoder Phase A 19 Encoder Phase A 19 Encoder Phase A 20 Encoder Phase B 20 Encoder Phase B 20 Encoder Phase B 20 Encoder Phase B 21 Encoder Power 5 V 21 Encoder Power 5 V 21 Encoder Power 5 V 21 Encoder Power 5 V 22 0 V Encoder 22 0 V Encoder 22 0 V Encoder 22 0 V Encoder 23 Encoder Phase A 23 Encoder Phase A 23 Encoder Phase A 23 Encoder Phase A 24 Encoder Phase B 24 Encoder Phase B 24 Encoder Phase B 24 Encoder Phase B 25 Index Pulse I 25 Index Pulse I 25 Index Pulse I 25 Index Pulse I EDH0156En1030 01 03 AD 10 Newport M UTM Mid Range Travel Steel Linear Stages 6 0 Connection to Newport Controllers 6 1 AD Newport Warnings on controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury
6. Encoder Phase A 23 l l 1 Encoder Phase A Encoder Phase A Encoder Phase A 20 r Encoder Phase B Encoder Phase B Encoder Phase B 24 1 1 Encoder Phase B Encoder Phase B Encoder Phase B 15 i i i Index Pulse Index Pulse Index Pulse 25 1 L T 1 Index Pulse I Index Pulse I Index Pulse I 17 pask End of Run End of Run End of Run 18 4 L End of Run End of Run End of Run 21 L m 5 V Encoder 5 V Encoder 5 V Encoder 22 Wt wa T L 0V Encoder 0 V Encoder 0 V Encoder Connector k Connector Connector Connector Cap Cap Cap Cap EDH0156En1030 01 03 Open collector type with a 5 6 V protective Zener diode T Newport a E End of Run or Mechanical Zero St E a lt Max lin 16 MA sge Max V 5 6 V K 56V ae If the Mechanical Zero output is not used a 1 kQ 0 25 W resistor must be connected between pins 13 and 21 Encoder and Index Pulse are differential pair type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 14 AD Newport M UTM Mid Range Travel Steel Linear Stages 8 0 Mounting 8 1 Stage Mountings WARNING Before to use a M UTM stage it is imperative to fix it e directly on a rectified working surface from holes
7. Newport once a year for a recalibration to its original specifications 21 EDH0156En1030 01 03 Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems AD EDH0156En1030 01 03 22 Newport M UTM Mid Range Travel Newport Steel Linear Stages CE Declaration of Conformity We declare that the accompanying product identified with the C mark meets all relevant requirements of Directive e 73 23 CEE for Low Voltage Compatibility e 89 336 EEC for Electromagnetic Compatibility Compliance was demonstrated to the following specifications EMISSION Radiated and Conducted Emission in accordance with relative prescription to the EMC NF EN61326 1 Standards for measurement lab and control equipment IMMUNITY Radiated and Conducted Immunity in accordance with relative prescription to the EMC NF EN61326 1 Standards for measurement lab and control equipment SAFETY CEI 1010 1 safety standards for measurement lab and control equipment a cay Jean Marc DELAHAYE Quality Director Zone Industrielle 45340 Beaune la R
8. Read the controller user s manual carefully before operat ing the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances e If the power cord or any attached cables are frayed or damaged in any way e If the power plug is damaged in any way e If the unit is exposed to rain excessive moisture or liquids are spilled on the unit e If the unit has been dropped or the case is damaged e Ifyou suspect service or repair is required e Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to e Keep all air vents free of dirt and dust e Keep all liquids away from the unit e Do not expose the unit to excessive moisture gt 85 humidity e Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle con tact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing object
9. Travel Steel Linear Stages 8 0 Mounting icscicscacrcinnianiaamanimeiuannan 15 8 1 Stage Mountings 00 0 ccc cscseessescessceseeseeeseesecnsesseeseeeseeseeesesseeseeeseseeenses 15 8 2 Interfaces Disassembling sacrsieiisiicuniinnnanin ed seavaiieedens 15 8 3 Mounting on Working Surface ccccccccscesseseteeeseeeseeseecsesenseeenseensees 17 8 4 Assembling by the Carriage ccccsssssccsscssscssscsssccssesssecssscsscccssceseees 18 8 5 Disassembling 8 6 Interface Plates MOUNTING secerneren 18 8 1 Assembly Patter iieses secsacsctscdes cas dai vateass ananitania 18 9 0 DiMeNSIONS 20 ccs cssssesseseseeeseeseseeseseeseseeeseseenesees 19 10 0 Accessories EQ100 Brackets 0 0 0 00 0 00 0ccccceeeeees 20 11 0 Maintenance 00 0 0 ssesessessssesssssssssecseseessssesescasessases 21 Tik Malint Onan Ce oea a TE AAEE ERE 21 1E Repair Mpesa E SS 21 H3 Calipr ti oinen a aeit 21 Service F r Mancnnnn naa a R 22 E A E A A E R E E E i A A E R a A 4 EA ZN gt R GO es GR Ns We declare that the accompanying product identified with the C mark meets VA SS all relevant requirements of Directives Oo Si es Nes e 73 23 EEC for Low Voltage Compatibility SA eye S ea e 89 336 EEC for Electromagnetic Compatibility S AG NG Ka ox Generic standard 7S S sae 9 6S Emission NF EN61326 1 for measurement lab and control equipment a a Om 6S Immunity NF EN6132
10. through the long cable AD Newport 13 EDH0156En1030 01 03 M UTM Mid Range Travel Steel Linear Stages 7 0 Connection to Non Newport Controllers WARNING Newport takes no responsibility for improper functioning or damage of a stage when it is used with any non Newport controllers WARNING Newport guarantees the C compliance of the M UTM translation stages only if they are used with Newport cables and controllers Nevertheless the figure below indicates the recommended wiring when a M UTM stage is used with non Newport controllers Sub D25 male Connection Connection Connection Connector M UTMPP amp PE M UTMCC amp CCDD M UTMCC1HL 9 1 Common Phase 3 4 N C N C 10 i 1 N C N C N C 11 Common Phase 1 2 N C N C 12i i i 1 N C N C 10 2 Phase 1 N C Tachometer 20 Phase 1 N C Tachometer 3 a r m Phase 2 N C Tachometer 4 3 i ra 1 Phase 2 N C Tachometer ho D x 5 1 G Phase 3 Motor Motor 6 i Phase 3 Motor Motor TA i 1 Phase 4 Motor Motor 8 4 wi 1 Phase 4 Motor Motor E 1 Y 14 i 1 Ground Ground Ground fa A i 4 16 _ 1 OV logic 0V logic OV logic 13 i 1 1 Mechanical Zero Mechanical Zero Mechanical Zero 19 c a Encoder Phase A Encoder Phase A
11. 6 1 for measurement lab and control equipment S gt w 6S Safety EIC 1010 1 safety standards for measurement lab and control oO A co oe equipment De Oy C9 is F eae i Newport Corporation shall not be liable for damages when using the product OO xs ape i GS e Modification of the product Ge Se gs age ee Gy e Using modified connector or modified or not supplied cables Coy Pes DA EA e Connecting this product to non CE equipment A aN as C a TETEE T EEA EEA EA EEA EEA EE NEE TEATE TEE TEE E E EE E E Nas EA E EE EAE x EDH0156En1030 01 03 iv Newport M UTM Mid Range Travel Steel Linear Stages Warnings WARNING The translation of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the st
12. ARK Vacuum compatible stages to 10 Torr In this case max speed and load capacity have to be divided by two M UTM Series linear stages RECOMMENDATION We recommend you read carefully the chapter Connection to electron ics before using the M UTM stage AD Newport 1 EDH0156En1030 01 03 M UTM Mid Range Travel Steel Linear Stages 20 Description The M UTM Series translation stages feature steel construction with pre loaded ball bearing slides and a backlash compensated leadscrew for supe rior performance over medium travel ranges These motorized stages are equipped with mechanical limit switches to prevent damage to the bearings from accidental overtravel A center home position allows the stage to be returned to a reference position in the mid dle of the stage s travel at any time The home position Mechanical Zero may also be set to either end of the stage s travel via an external switch on the stage body EAN Origin side opposite motor oo a Pp hy 0 Origin at stage center ol Origin on motor side e Q OQ ke Direction lt 9o O Gi it D E Direction O O Position measuring is performed with a 2000 pts rev encoder integral with the motor shaft and a 2 mm pitch backlash compensated leadscrew All M
13. UTM Series stages are equipped with a knurled knob for a manual con trol The modular design of M UTM stages brings you the flexibility to choose the drive configuration that best matches your specific application require ments high resolution 0 1 pm version or higher speed 1 pm version manu al DC motor or stepper motor driven versions with mini step or full step drive options For optimal performance we recommend the use of our ESP or MM series motion controllers The M UTM Series stages are supplied with a 3 meter cable for connec tion to our motion controllers AD EDH0156En1030 01 03 2 Newport MJUTM Mid Range Travel Steel Linear Stages 2 1 Design Details Base Material Stainless Steel Bearings Linear ball bearings Drive Mechanism Backlash compensated leadscrew Drive Screw Pitch mm 2 Reduction Gear 10 1 on all versions with 0 1 pm resolution Feedback 2000 pts rev rotary encoder with index pulse Limit Switches Mechanical Origin Centered can be set to left or right travel limit via external switch Protection Bellows Vacuum Compatibility Vacuum compatible versions are available up to 10 Torr using full step motor PE1 and PE 1 Additional motor mounted gear on some drive option 3 0 Characteristics 3 1 AD Newport Definitions Specifications of our products are established in reference to ISO 230 stan dard part II Determ
14. age Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit AD Newport v EDH0156En1030 01 03 M UTM Mid Range Travel Steel Linear Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in a vacuum environment less than 10 Torr CAUTION Do not place this stage in a location affected by dust oil fumes or
15. asten the stage on the working surface with 2 M CAP M41 captive screws Move the carriage to access the other 2 holes on the bottom of the stage Fasten the stage on the working surface with 2 M CAP M41 captive screws CAUTION To fasten M UTM stages use only M CAP M41 captive screws especially devised Mounting on Stage Mounting on Carriage 29 gt 75 e M4 thd y Carriage LE 22 5 5 Stage A 29 M4 thd 75 Dimensions in inches millimeters AD Newport 17 EDH0156En1030 01 03 M UTM Mid Range Travel Steel Linear Stages CAUTION When mounting M UTM stage on working surface the depth of the M4 threaded holes of the working surface must be deeper than 8 mm Protr uding captive screws will damage the carriage Before power on motor stage make a displacement try with the knurled knob to verify that the displacement of the carriage is correct 8 4 Assembling by the Carriage Make steps of Mounting on Working Surface chapter in the same order 8 5 Disassembling Make steps of Mounting on Working Surface chapter in the opposite order 8 6 Interface Plates Mounting Make steps of Interfaces Disassembling chapter in the opposite order 8 7 Assembly Pattern Stacking M UTM Series stages either together or with other Newport stage is easily accomplished Below are example schematics of the assembly pat terns used These interfac
16. ation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made sys tematically with our test equipment in an air conditioned room 20 C Each stage is tested with a laser interferometer A linear cycle with 21 measures on the travel and 4 cycles in each direction gives a total of 164 points Mechanical Specifications Travel Range mm 25 50 100 and 150 Unidirectional Repeatability yum 1 5 Reversal Value Hysteresis um 3 0 PP1 PE1 CC1HL CC1DD 3 5 PP 1 PE 1 CC 1 CC 1DD On Axis Accuracy um 5 0 ay Pitch prad 110 az Yaw prad 70 D For a travel of 100 mm Load Specification Definitions Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications This value is given with speed and acceleration specified for each stage and with a load perpendicular to bearings Axial Load Capacity Cx Maximum load along the direction of the drive train Off Centered Load Q Maximum cantilever load a stage can move Q lt Cz 1 D 50 D Cantilever distance AD 4 Newport M UTM Mid Range Travel Steel Linear Stages 3 4 3 5 AD Newport Load Characteristics and Stiffness Cz N 200 Cx N 10 Cx N 50 kax urad N m 10 kay prad N m 15 Q Off center load Q lt Cz 1 D 50 D Cantilever distance in mm Cz N
17. es are accessed by unscrewing and removing the upper and or lower plates of the stages see dimension drawing 4 holes 9 7 5 4 holes M5 thd 4 holes M4 thd 4 holes M4 no ne perriage Access for captive screws gt lt 6 on A92 _ nea on 63 pis used in mounting to body 25 gt lt depth 6 depth 6 q 2 mains ai Oo 8 g 9O 6e6 2 FE oc o bo oe 6 a oe 4 holes 7 5 h ane 4 L Access for captive screws Dimensions in Millimeters mourting cramp used in mounting to carriage AD EDH0156En1030 01 03 18 Newport M UTM Mid Range Travel Steel Linear Stages 9 0 Dimensions DC Servo Drive 4 HOLES 6 8 on 152 4 x 50 8 ze QHOLES THDA lo O Oo oO B SPACING MODEL UTM100PP1HL SHOWN Dimensions in millimeters 25 PIN SUB D CONNECTOR aa L2 gt 4 HOLES 9 6 8 on 150 x 100 Stepper Drive wan y l X Ep H max 24 y mi l Y l 7 gt lt L1 Dimension Thread in mm Travel in mm
18. ese stages a mini step equals 1 10 of a full step Full Step Drive Is used for stepper motors when 1 pulse emitted by electronic corre sponds to theoretical physical motion of 1 full step of the motor Stepper Motor Performance Specifications Resolution Speed um mm sec as M UTMPP1HL 1 20 M UTMPP 1 0 1 2 D M UTMPE1 1 2 M UTMPE 1 0 1 0 2 NEOIEF AD 6 Newport M UTM Mid Range Travel Steel Linear Stages 4 2 DC Servo Drive Versions Four DC motor driven configurations are available e Two high power DC Servo versions with resolutions of 1 pm CC1HL and 0 1 pm CC 1 The CC1HL features a built in tachometer to provide superior speed stability e Two low power versions with resolutions of 1 pm CC1DD and 0 1 pm CC 1DD These stages offer a cost effective performance alternative for those who have precision positioning needs with budget limitations Resolution M UTMCC1DD M UTMCC 1DD DC Motor Performance Specifications Resolution Speed um mm sec as M UTMCC 1 0 1 2 UE33CC M UTMCC1HL 1 20 UE404CC M UTMCC1DD 1 2 5 M UTMCC 1DD 0 1 0 25 HESICC 4 3 Manual Drive Two manual drive versions are available with resolutions of 1 pm MS1 and 0 1 pm MS 1 In addition to the vernier scale on the manual drive position may be determined using the output from the incremental shaft encoder A connector for the CV1000 encoder display is provided Resolutio
19. esessesessesessessssrssesessesessesesse 5 B D Stage WEIGHS cvscsesecadecdessvacesscdendelcesssateesacundelvesaceyesndenteceeaseetie ndndeareaneeiers 5 40 Drive cscicngesssd pci ene 6 4 1 Stepper Drive Versions cccccccesssssecssecssecssceeseeceeeceseceeeeeeceseeneeeeeeaes 6 42 DC Servo Drive Versions viiicccnidiinaiiiies a aiana E Nii 7 AVS Manual Dive ois sesicas sos vssacisades cas acevanie cs sduecendted caves idad eea aaa aneia a iai ia T 90 M l rrien es sree nek EA EEE 8 5 1 Stepper Motor Characteristics sssssessessssessesessesessesessessssessesessesessesesse 8 5 2 Command Signals for Stepper MOtOYS cccccesescesseeseeseeeseeseeeseeseesees 8 5 3 DC Motor Characteristics cccccccccccseesscssessscssceseeecseessecseesseseeseesseesees 8 5 4 Command Signals for DC MOtors ccccccccesesseeseeseeeseeeeseeesesseeseesseesees 8 5 5 Sensor POOE EEEE EEEE EN EE 9 5 6 Feedback Signal Positi n ivc ccsscssdseccescexesscdsceex see sessevncsteeeecctessectdesteatiecses 9 Dek PIOS ekoran a Taa 10 6 0 Connection to Newport Controllers 0 0 0000 11 6 1 Warnings on COntrollers ccccccscesccesceeseeesscsseeceeceeseeeseeeseeeeeeeeeeensens 11 6 2 Connectie irean IE tingid EEA 12 63 Cables assent adarna o a anaE Er ENEEK EEE NETR EE RSE 12 7 0 Connection to Non Newport Controllers 14 Newport iii EDH0156En1030 01 03 M UTM Mid Range
20. in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior writ ten approval of Newport Corporation This manual has been provided for information only and product specifica tions are subject to change without notice Any changes will be reflected in future printings AD EDH0156En1030 01 03 ii Newport M UTM Mid Range Travel Steel Linear Stages Table of Contents Warranty cronain R E E cabeza ses caaneaneeitenaiaaseeene eae ts ii MaDe Or CONTEM Seanas Maer tantatceceks htdae Sac ct ciated Ud means dealin A e EE EE ates tes iii Warnings sisccissiv cei cates e E EK EE REREN E RR vV Cations oss Soave saetan ss deveesseusstased a a aa ea dad cos aean ee naaa EA aenea vi 1 0 Introduction isis scicicicdivnsesciiinataidicaieiianddicnsnwane 1 2 0 Description isisissseidcsniinnsnndaiaidnanniiisesdninans 2 ZA Design Detail ireira ei e EEEE 3 3 0 Characteristics 2 0 0 0 cccccccecsesesseseeseesesseeseseseeseeesneseenees 3 Sel Definitions ene a E E E OE 3 3 2 Mechanical Specifications 033 gcaiiiaiiasns reniauacuaseierencacn 4 3 3 Load Specification Definitions 0 0 0 cece cesceeseeceeeeeseeeeeeseeceeeeseeeeenaes 4 3 4 Load Characteristics and Stiffness sesessess
21. ination of the position precision and repeatability of the machine tools with CNC This standard gives the definition of position uncertainty which depends on the 3 following quantities Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear error sources Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effect All Newport motion electronics can compensate for linear accuracy errors by step encoder correction The relation between absolute accuracy and on axis accuracy is as follow Absolute Accuracy On Axis Accuracy Slope x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target posi tion when approached from opposite directions Minimum Incremental Motion Sensitivity Minimum motion that a stage can achieve Our stages and our kinematic chain are conceived in such a way that sensitivity is better than the resolu tion of the encoder 3 EDH0156En1030 01 03 M UTM Mid Range Travel Steel Linear Stages EDH0156En1030 01 03 3 2 3 3 Resolution The smallest motion an encoder fixed to the stage can measure Yaw Pitch Rot
22. located on the mounting plate e on another stage directly or with a mounting interface but in no case the stage has to remain without fastening It is equally necessary to fasten the device to move on the carriage e directly e removing the plate on the top of the stage 4 holes 27 6 8 a plate UTM on 1 6 0 x 2 0 152 4 x 50 8 i 9 holes 1 4 20 thd 1 0 25 4 spacing M UTM O gholes M6 thd 98 25 spacing B 4 holes 27 6 8 i N Top plate on 5 9 x 3 9 150 x 100 e on the carriage Dimensions in inches millimeters CAUTION The working surface flatness directly influences stage accuracy and per formance 8 2 Interfaces Disassembling Disassemble the top plate fixed on the carriage of the stage with 4 CHc M4 x 39 in 10 mm screws O 2 48 in 63 mm QW n Newport 15 EDH0156En1030 01 03 M UTM Mid Range Travel Steel Linear Stages Turn the stage upside down Disassemble the base plate fixed on the body of the stage with 4 CHc M4 x 39 in 10 mm screws O 2 48 in 63 mm AD EDH0156En1030 01 03 16 Newport M UTM Mid Range Travel Steel Linear Stages 8 3 Mounting on Working Surface Rotate the manual knob to move the carriage to provide access to the 2 holes on the bottom of the stage F
23. n M UTMMS1 M UTMMS 1 Manual Performance Specifications Resolution Travel per Revolution ym mm rev M UTMMS1 1 2 M UTMMS 1 0 1 0 2 AD Newport 7 EDH0156En1030 01 03 M UTM Mid Range Travel Steel Linear Stages EW Motor 5 1 Stepper Motor Characteristics Motor Angle by Step Current Resistance Inductance Newport C A Q mH Utilization UE31PP 3 6 0 56 7 6 8 4 Full Step UE41PP 1 8 1 2 3 4 3 Full Step or Mini Step 5 2 Command Signals for Stepper Motors Command Signals Command Signals UE31PP UE41PP 1 2 3 4 12 3 4 Phase 1 Phase 1 Phase 2 Phase 2 Phase 3 Phase 3 Phase 4 Phase 4 Direction lt m Displacement Direction Direction Displacement Direction Direction Ee PA Direction 5 3 DC Motor Characteristics Motor Mechanical Power Nominal Voltage Armature Resistance Tachometer Ww v Q V Krpm UE31CC 2 53 24 57 UE33CC 23 36 14 UE404CC 40 75 18 6 3 10 5 4 Command Signals for DC Motors Motor y Motor i Tachometer Tachometer Motor e Motor y Tachometer Tachometer Displacement Direction Direction Displacement Direction Direction I
24. n the above drawings Motor signal is referred to Motor signal Tacho Generator signal is referred to Tacho Generator signal AD EDH0156En1030 01 03 8 Newport MJUTM Mid Range Travel Steel Linear Stages 5 5 5 6 Encoder Phase A Encoder Phase A Encoder 1 Phase B Encoder Phase B When the stage moves in Direction the Motor voltage is higher than Motor voltage and Tacho Generator voltage is higher than Tacho Generator voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage and Tacho Generator voltage is lower than Tacho Generator voltage Sensor Position Home Position Origin s at Center of Travel Range OE E a a EOR Limit Mechanical Zero Index Pulse Index Pulse z W 4 I EO L E td Nd a Stage Travel Range _ gt Motion Direction End of Run and Mechanical Zero are TTL type 5 V 5 2 mA max Use of the Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source Use appropriate TTL type receivers Feedback Signal Position Direction Direction Direction lt lt Motion
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26. ormal center load capacity on bearings Cx Direct load capacity on X axis Cx Inverse load capacity on X axis kax Angular stiffness Roll kay Angular stiffness Pitch Stage Weights Weights indicated into the below table are average values for stages with a typical drive unit installed M UTM25 Ib kg 6 6 3 M UTMS50 Ib kg 7 1 6 2 M UTM100 Ib kg 7 7 3 5 M UTM150 Ib kg 8 4 3 8 The weight variation between drive units is not very significant EDH0156En1030 01 03 M UTM Mid Range Travel Steel Linear Stages 4 0 Drive EDH0156En1030 01 03 4 1 Stepper Drive Versions Stepper motor driven stages are offered in four variants e Two mini step drive versions with resolutions of 1 pm PP1HL and 0 1 pm PP 1 These combine high speed positioning and smooth displace ment from 1 10 stepper encoder count driving mode For ultrasmooth low speed positioning microstepping up to 250x is possible using ESP Series Controllers e Two full step versions with resolutions of 1 pm PE1 and 0 1 pm PE 1 These are primarily designed for applications requiring the position to be maintained within the stage s resolution when power is switched off such as operation in vacuum Resolution Mini Step Drive Is used for stepper motors when 1 pulse emitted by electronic corre sponds to theoretical physical motion of a fraction of a full step of the motor For th
27. s of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts 11 EDH0156En1030 01 03 M UTM Mid Range Travel Steel Linear Stages 6 2 Connection On each stage is represented a label which indicates its name its serial number and the motor it is equipped with ex UE31PP M UTM100PE 1 S N ENCODER 5V MOTOR UE31PP Stepper Motor U 30VDC I 1A WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors labeled Motor any time prior to power up with the supplied cable assemblies WARNING With MM series controllers damage to stage may occur if the stage is not the same type as shown on driver label located near the stage interface connector Check that the option number specified on this label correspond to the number indicated in the driver module options table for your stage WARNING Vacuum compatible stages have to be configured if running with an ESP series controller 6 3 Cables All our M UTM stages are delivered equipped with a 3 meter cable with 25 pin Sub D connectors so they can be directly connected to our con trollers drivers of MM or ESP series Dimensions in inches millimeters Locking E E Knobs 41 DS 25 Pin Sub D 2 13 10 3 Connec
28. steam This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock e Operating temperature 10 to 35 C e Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before mov ing the stage Failure to do so may damage the cable and cause an elec trical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in end of run position it is strongly recommended not to go beyond this point by using the manual knob as this may dam age the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specifica tion control every year AD EDH0156En1030 01 03 vi Newport M UTM Mid Range Travel Steel Linear Stages Mid Range Travel Steel Linear Stages M UTM 1 0 Introduction This manual provides operating instructions for the stage that you have purchased in the M UTM Series e M UTMPPIHL e M UTMPE1V6 e M UTMCC 1 e M UTMMS1 e M UTMPP 1 o M UTMPE 1V6 e M UTMCCIHL e M UTMMS 1 e M UTMPE1 e M UTMCCIDD e M UTMPE 1 e M UTMCC 1DD REM
29. tor 54 lt 2 32 59 gt Disconnected 4 1 104 for a static cable 6 54 166 for a cable in motion with the stage WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable AD EDH0156En1030 01 03 12 Newport M UTM Mid Range Travel Steel Linear Stages For applications where the standard 3 meter cable MMCABLE 3 included with your stage is not adequate Newport offers longer length cables designed to ensure the integrity of your positioning application These cables are specially shielded and terminated with Newport s stan dard 25 pin sub D connectors They are available in 5 m MMCABLE 5 7 m MMCABLE 7 or 10 m MMCABLE 10 lengths WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk For cable lengths in excess of 3 meters we recommend the MMCABLE REG to ensure a high quality regulated 5 V supply to the stages Dimensions in inches millimeters EB m ESS 25 Pin Sub D 38 25 Pin Sub D 2 1 Male Sic lt Female 54 OLP p 2 4 62 gt This regulator is available as an option Please note that for best efficiency this regulator should be attached to the stage to re adjust the 5 volts com ing from the controller
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