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Trillium US Inc. Model 125 Cryogenic Helium Compressor User`s

1. Model 600 Drive Unit Electrical Cold Head Model Number of Multiple Cold Heads Circuit Configuration Manufacturer Allowed 350CS OIA 3 1020CS OIA 2 Scott T 1050CS OIA 1 350CP CTI 3 1020CP CTI 2 1050CP CTI 1 Number of single stage coldheads can be increased to 2 Table 2 2 Model 600 Helium Compressor Cryopum p Compatibility Model 600 Drive Unit Electrical Cryopump Model Circuit Configuration Manufacturer Number of Multiple Cryopumps Allowed CP8 CP8LP OIA CP10 OIA CP16 OIA Scott T CT8 CT8F CTI CT10 CTI CT400 CT500 OB 8 OB 8F CTI OB 10 CTI On Board Ld OB 400 CTI OB 500 CTI KA IKA IR 1 QM IKA IKA INA lQ IKA IN L Table 2 3 Model 400 Helium Compressor Coldhead Compatibility Model 400 Drive Unit Electrical Coldhead Model Circuit Configuration Manufacturer Number of Multiple Coldheads Allowed 350CS OIA 1020CS OIA RIN Scott T 350CP CTI N 1020CP CTI KA Table 2 4 Model 400 Helium Compressor Cryopum p Compatibility Model 600 Drive Unit Electrical Cryopump Model Number of Multiple Cryopumps Circuit Configuration Manufacturer Allowed CP8 CP8LP OIA 3 CP10 OIA 2 stet T CT8 CT8F CTI 3 CT10 CTI 2 OB 8 OB 8F CTI 3 Deed OB 10 CTI 2 97 00046 000 KE User s M
2. 97 00046 000 58 4 User s Manual Rev A November 2015 M600 M400 Helium Compressor o o Item Number Part Number Description UNLESS OTHERWISE SPECIFED NAME DATE 1 29 01000 000 CASE STORAGE TOOL BOX Ges ane aa s Tee AUSTIN SCIENTIFIC CO 2 55031 WRENCH FLAT OPEN I An Trillium S n n logo TITLE d A E WRENCH RLAT OPEN 3 16 anse TEE lo d MV e 5 80 01002 001 ADAPTOR WZ FEMALE AFROQUF TO 1 4 MAE aerer 1 4 MALE AEROQUIP ENDS ge EE eeng E a ADAPTOR 1 2 MALE AEROGUIP TO 174 MALE nu geo Ne errs SETENE NS WE AEROQUIP Dita woas 6 ne SOLE PROPERTY OF M cU E NO R 82 00105 000 Helium Clean up Vent Tool MALE Aeroauip An Rm Ee red re E 8 82 00105 001 Helium Clean up Vent Tool FEMALE Aeroquip wmcurtit wemenpeemesonor er B 99 00074 001 B 7 80 00177 000 Adaptor 1 4 female aeroquip to 1 4 inch flare Jas DONOT SCALE DRAWING SCALE EF EE SHEET 1 OF I 8 7 5 5 4 3 2 1 Figure 37 99 00074 001 Tool Kit Contents 97 00046 000 59 X User s Manual Rev A November 2015 M600 M400 Helium Compressor This Page Intentionally Left Blank 97 00046 000 60 Ta
3. LF H D QUU III Y IHM r 038 BA 91219 lv O 480 lt oas s gt o lt ozo lt ionn A 2 e Ge SCH A T LAAI I Z ARAJ ae em Zelle I et as Li emm ed Galles I X Hs 97 00046 000 Figure 29 M600 M400 Low Volt Analog Standard Drive Schematic 51 User s Manual Rev A November 2015 M600 M400 Helium Compressor UMS Effet s I 9 e E Ge BE yw Sal Y a gt e 9 gt i 9 SVP d z d PS o ge x e WHT E Fe F7 o e e gt o E Figure 30 M600 M400 High Volt Analog Standard Drive Schematic 52 97 00046 000 4 pd User s Manual Rev A November 2015 M600 M400 Helium Compressor ECR DESCRIPTION Release New Drawing Added remote feedback realy whe 785 running remote pins C T Figure 31 M600 M400 Low Volt Analog On Board Drive Sch
4. 5 2 INSTALLATION STEPS 521 UNPACKING and Inspection iiie etra riae Exe a NS DENKE Ga DAS FREE ee DE Ge AERE Ge de oi Vna es UR 12 5 22 MOUNTING THE Compressor sissies ariete kia ei N EE VER Ge ERR T ke GN EE MEAE ERE KOERN A UP CRY ea sind De N Ge VE DEUX ERG ed 13 5 2 3 Preparing the Compressor for Operation Se ER ee sese een nennen ener ER AA Ge Re AA aaa aa sss sa ee ee 13 S24 EG die RE AR OR RE EE AR OE EE AE iS 13 5 2 4 1 Ambient Conditions and Coolant CongecHon sesenta nnns nasse sse rada asas ss ess sa das nsn 13 5 2 4 2 Verifying and or Refilling Compressor with Helium Ggs 14 5 2 4 3 Connecting the Helium Flex Lin Suites se a a SR saa eot rss udo ao coa Y IERENS 15 5 2 5 Electrical ConnectON ie Se Re GR EA GR ER Ke AA AE GR EA AA GE ta RA AA assa sess sa dada assa essa sa da daas sess sa asas assess sa dada EES 15 6 OPERATION EE ER EE ea dek snesen 18 6 1 BEFORE SWITCHING ON THE SYSTEM 6 2 NORMAL OPERATION EN ee OR ET EE A dd EE E 6 3 ELECTRONICS INTERFACE CONNECTIONS 4 25 e suse EE EE EE OE 18 6 2 Remote Interf Ta TT 18 6 3 2 DsSub User CONtrOlS sessies erri t a tero ge ke ee EAE AUR EE ERN ERAS Ge ee KR ek Ge eg kk URN ee ee YES Ve RT PRA N ER DE Ge 20 oc Oe GEET EE EE OE AE OE OE N 21 6 3 4 Compressor Front Panel User Interface se eee eee eee 21 6 3 4 1 Compressor Front Panel User Interface Revised sese 22 6 3 5 Compressor Operational Checks dees Sers e
5. PN 56123 Figure 18 M600 Water Piping and Instrumentation Diagram 40 User s Manual Rev A November 2015 M600 M400 Helium Compressor Return Pressure M600 P amp ID Air Cooled Gauge Rev A NOT FOR PRODUCTION 0 600 PSIG He Charge Vent November 2015 Volume ta 4 hae E ET KT A Tube TT Differential 2 Way direct acting E an Relief Valve od D regie RETURN 50 100 psi NM M Bypass Solenoid w Orifice 8 Aeroquip 3 4 6 9 Bar orfice 1 8 to 3 32 PN 82 00089 000 Suction Helium Scroll Compressor Motor TTA J PN 29 00003 004 005 He out at Discharge Discharge Oil He Out to Pump 260 280 psi He Return E ee ie RON a dak 17 9 19 3 Bar Cann ee NEE arge i re EE vi Schrader ae Oiio 210 F 99 C Valve eria L OF i n 18 3 40 5 C D gt l Check Valve i Bo 2 H PN o a i 28 00223 000 81 E il In SS e le x am mm m EED emm v m e 3 He In TS2 He Oil mix i He In Supply Pressure 122 F 50 C Gauge 0 600 PSIG Hot Oil Out I He Out 0 41 4 Bar Air Y PN 10420 Out o Coded High Pressure Helium Supply S d e Hot High Pressure Helium Oil Mix 2 p LOW Pressure Helium Return He In T e Cooled High Pressure Oil Been J T p gt Hot High Pressure Oil Safety Relief Valve ban ei e i 375 PSIG 25 9 Bar PN 56123 Figure 19 M600 Air Piping an
6. Will display last 8 error codes Rev A November 2015 M600 M400 Helium Compressor SW Version Reserved Hours Counter Reserved On Timer seconds Status 0 Off 1 On 2 System Error Compressor Status 0 Off 1 On Reserved Number of active errors 1 active error 0 error inactive Number of errors logged lt 8 End of message Table 6 10 Command Data Compressor Description X Y 0 Off STX SYS y CR X Y 10n Y 2 System Error X 1 Cold Head STX SC x y CR Y 1 On Y 0 Off Data Requested xx error code hhhhh hours counter Example STX SYS1 CR Turns the compressor on the system will respond with SYS1 STX SYSO turns the compressor off STX 11 CR Coldhead On the compressor will return SC11 Note the compressor must be running to turn the Coldhead on Error Code T 97 00046 000 Display System Error Table 6 11 Error Codes Description Error has occurred 25 pd User s Manual Rev A November 2015 M600 M400 Helium Compressor 2 3 4 Contactor Error 5 Phase Fuse Error 6 Pressure Alarm 7 Temperature Fail 8 16 6 3 9 Communications via USB Reserved Compressor overload relay has tripped off Line voltage out of Phase Fuses blown Low pressure switch tripped Thermal Switch has tripped Coolant Supply Failure Lack of cooling Reserved Communication via USB can be achieved via PC integration The format for the packet is shown in Table 6
7. 9 7 0 Table 4 3 Model 600 Model 400 Helium Compressor Specifications Feature Component Specification Description Physical Dimensions See Figure 22 and Figure 23 water cooled 260 Ibs 118 Kg air cooled 300 Ibs 136 Kg Cold Head Power MS3102A14S 6S or MS3102A18 19S dependent on version Remote Connector TE 3 1634224 2 Helium connections 1 2 inch male Aeroquip couplings Electrical Service Breaker 20 Amp HV minimum 15 000 Hours per elapsed time meter on the Adsorber Replacement Schedule compressor or 2 years whichever comes first see Section 8 3 1 4 1 8 GPM 5 3 6 8 liters min minimum flow rate 65 F 80 F 18 3 26 7 C maximum inlet water temperature Recommended chiller capacity M600 2 5 ton per unit M400 2 0 ton per unit Water line connector 3 8 inch Swagelok Tube Fittings adapters available Air cooled units must maintain a minimum clearance of at least 250mm 9 85 on all sides and 400mm 15 75 at top for proper functionality Adequate air Ane slow is also required Maximum ambient temperature should not exceed 104 F 40 C Minimum ambient temperature should not fall below 23 F 5 C 97 00046 000 Interface Cooling Water for water cooled models User s Manual Rev A November 2015 M600 M400 Helium Compressor Table 4 4 Model 600 Model 400 Helium Compressor Pressure Requirements x Static Charge Operating Pressure Operating Pressure
8. Figure 24 M600 M400 Low Volt Standard Drive Schematic 97 00046 000 46 X User s Manual Rev A November 2015 M600 M400 Helium Compressor Schematic EBOX LV ONBOARD DRIVE M700 M600 M400 WITH CIRCUIT BOARD ASC WHITE 93 00100 010 Rev C Trillium US Inc Proprietary amp Confidential 2 81 00213 011 STANDARD 99 00019 023 W TH PRESSURE SWTCHESI aa Ts sTz Je sw v2 s Ts T ID H Tashan 770777777777 aa aa aa aa aa aa TT aa ai Circuit Board D EET JE du Pl ELE He 3 97 00046 000 47 User s Manual Rev A November 2015 M600 M400 Helium Compressor Schematic EBOX HV M700 M600 M400 W LCD DISPLAY STD DRIVE sAe Cadied Only 93 00100 008 Rev C Trillium US Inc Proprietary amp Confidential le led dd TREDE UOU DOU BEE 3 8100019 004 vo 3 31 00070 090 Bw 1 CABLE Circuit Board ve FEET TET ge GIE efe CABLE Figure 26 M600 M400 High Volt Standard Drive Schematic 48 97 00046 000 User s Manual Rev A November 2015 M600 M400 Helium Compressor EATON PIN 7700K3 3PST TOGGLE SWITCH o YEL OM SW 3FOT SW SHOWN FOR 2PH ALT POSITION FOR 3PH EATON P N 7702K3 3PDT TOGGLE SWITCH
9. M l t Ch PSIG ode Static hase PPIG Bar Differential PSIG Differential Bar M600 2405 16 52 34 250 10 17 23 0 69 M400 240 5 16 52 34 270 410 18 61 0 69 4 3 Configurations Due to its length of time on the market the Model 600 Model 400 Compressors have multiple configurations of its electronics module available and in use by customers The following figures will help the user identify their configuration and thus which electrical interfaces schematics and trouble shooting areas to refer to when needed COLDHEAD POWER e o S MAIN POWER MENU ON OFF J1 REMOTE Figure 1 M600 M400 Digital Standard Drive 97 00046 000 8 A User s Manual Rev A November 2015 M600 M400 Helium Compressor Figure 3 M600 M400 Low Volt Digital Multi Drive 97 00046 000 9 AZ 1 User s Manual Rev A November 2015 M600 M400 Helium Compressor MAIN POWER ON OFF MENU HIST 50HZ 380 420 S J14 COLDHEAD BIC ER POWER 92 2000009009000 e MAINTENANCE e J3 REMOTE ENM 9 S4720k 9 HOURS 1 10 Figure 5 M600 M400 Analog Standard Drive PIC NEEDED Figure 6 M600 M400 Analog On Board Drive 97 00046 000 10 4 A User s Manual 4 4 Ordering Information Table 4 5 and Table 4 6 contains ordering information for the Model 600 Model 400 compressor units and optional accessories EE EE O S M600 water cooled low
10. refrigerators and helium compressors for semiconductor optical coating linear accelerators medical equipment and R amp D applications You can find just what you need from our range of products and support services e New equipment cryopumps compressors cryocoolers and cryopump controllers such as the Model 600 Model 400 Helium Compressor described in this manual e Comprehensive range of accessories for the installation of a whole system and a complete range of spare parts to repair cryopumps and compressors 2 2 Other Services from Trillium US Inc Trillium US Inc Inc offers comprehensive refurbishment services for its own equipment as well as for that of most of our competitors Our products and services are available through our global network of agents and dealers e Repair and refurbishment services We offer our own quality products and well as most models from other manufacturers often with off the shelf availability e Exchanges We offer our own quality products as well as most makes of cryopumps and helium compressors which are refurbished and fully warranted e Technical support Our support engineers will help determine if your cryopump system is operating correctly so that you can get your system back to optimum efficiency as soon as possible o To contact Trillium US Inc Inc Technical Support Email cryo support trilliumus com Telephone 1 512 441 9258 or Toll Free 1 800 404 1055
11. 12 Table 6 12 USB Packet Format Bytes Range 1 0x55 Header 1 Notes Header 2 1 OxAA 0 102 Packet Length 2 Various Payload Data Various 0 255 Number of bytes in e Source e Destination e Command e Payload Data Field is transmitted in ittle endian See Table 6 13 See Table 6 14 thru Table 6 26 Payload fields that are native types e g integers and have more than one byte are sent in little endian The packet s CRC is calculated by e Seed value 0 e Polynomial x8 x2 x1 1 e Includes the following fields o Payload Data Length Source Destination Command Payload Data Oo Oo Oo Table 6 13 USB Maintenance Interface Command ID s Description Requests the system status Status Response 10 Packet contains system status information Get Fault History 53 Requests the set of historic faults 97 00046 000 26 pd User s Manual Rev A November 2015 M600 M400 Helium Compressor Name O Packet ID Description 54 List of either current or historic faults 57 Commands the compressor to be on off 58 Commands the cold head to be on off 224 Forces the control board processor to reset 226 Request for the firmware version information Packet contains the version build date and part number ACK 254 Response to indicate a command was executed successfully NACK 255 Response to indicate a command failed to execute successfully 6 3 9 1 USB Payload Formats
12. 18 is left floating when the compressor temperature is normal Run Status When the compressor the coldhead or both are running pin 19 is shorted to ground When the compressor and coldhead are both off pin 19 is left floating 6 3 4 Compressor Front Panel User Interface For the Model 600 Model 400 compressors that have digital electrical box configurations as shown in Figure 1 and Figure 2 on start up the front panel LCD will display the title screen and revision information Once initialization is complete the main screen is displayed Note Ifthe phases are not connected properly a Phase Error will be displayed The compressor cannot be started until the unit is powered down and the phase error is corrected 97 00046 000 21 A A pd User s Manual Rev A November 2015 M600 M400 Helium Compressor These configurations of the compressor provide 3 buttons and a 2 line display for easy operation e Off e On e Menu Pressing the Off button from any screen results in powering the compressor off The unit can only be turned on if all operational checks are passed If a system error occurs pressing the Menu button displays the status of each system check If all operational checks are successful pressing the Menu button displays the operating hours on the compressor The On button powers the compressor if all system checks are successful If a system check is in the failed state the On button is ignored 6 3 4 1
13. 3PH Detected in 1PH Mode e 1PH Detected in 3PH Mode 6 3 6 Compressor System Shut Down Manual shut down Push the OFF button or the Main Power Switch Automatic shut down The following system indication will cause the compressor to automatically shut down 1 Low Helium pressure not standard High Helium pressure not standard High Helium temperature High Oil Return temperature Contactor Overload Loss of Power gut N If an automatic shut down occurs refer to Table 6 5 to identify and remove the fault Once the fault has been corrected the user can restart the system by pressing the ON button 6 3 7 Compressor Interfaces For the Model 600 Model 400 compressors that have digital electrical box configurations shown in Figure 1 and Figure 2 a connector is provided for serial communication 6 3 7 1 Serial Port Interface J2 RS232 For the Model 600 Model 400 compressors that have digital electrical box configurations as shown in Figure 1 and Figure 2 a DBO Male connector is provided for serial port communications A straight through serial cable as shown in Table 6 6 and Table 6 7 is necessary for interfacing to the serial port Only pins 2 3 and 5 are required Table 6 6 Serial Port Interface Pin Assignments DB9 Female to Compressor DB9 to Controller 97 00046 000 23 A A pd User s Manual Rev A November 2015 M600 M400 Helium Compressor DB9 Female to Compressor DB9 to Contro
14. Compressor Front Panel User Interface Revised For the Model 600 Model 400 compressors that have digital electrical box configurations as shown in Figure 3 and Figure 4 on start up the front panel LCD will display it s initialization sequence and once complete the system status screen will be displayed showing the current state of the compressor and cold head as well as the current accumulated compressor run time Note Ifthe phases are not connected properly a AC Power Phase Error will be displayed The compressor cannot be started until the unit is powered down and the phase error is corrected These configurations of the compressor provide 4 buttons and a 2 line display for easy operation e Off Pressing this button will turn the Cold Head Compressor and Solenoid Valves off Pressing the Off button will always override the signals on the Remote Interface allowing the user to turn off the system e On Pressing this button will turn the Solenoid Valves Compressor and Cold Head on unless prohibited by one or more fault interlocks e Menu Pressing this button will cycle between the Status Screen and the Active Faults Screen Pressing this button when the Fault History screen is displayed will move to the Status Screen If more than one fault is active the Menu button is used to cycle through each of the active faults before going back to the Status Screen e History From either the Status Screen or Active Faults Screen pressing this butt
15. Helium Compressor M P amp ID W h Return Pressure 600 P amp ater Cooled Gauge ii Rev A NOT FOR PRODUCTION 0 600 PSIG November 2015 Volume 0 41 4 Bar p Gelak Z ea KERE PN 82 00011 00 oque T Differential 2 Way direct acting L Differential Fixed normally open 0 250 psi He In Relief Valve 0 17 2 Bar RETURN 250 psi 17 2 Bar Bypass Solenoid w Orifice 8 Aeroquip PN 82 00008 003 orfice 1 8 to 3 32 PN 82 00089 001 Helium Scroll Compressor Motor F Reg F PN 29 00003 004 005 He out at i i He Out to Pump E SUPPLY 260 280 psi He 17 9 19 3 Bar Ia RA AT N TA TT a kini s i L L TS1 He i 6 E EE Oil Charge H Orifice N H 210 F 99 C vi Schrader CheckVave OF 3 gt Valve Solenoid PN a 82 00091 002 Zo g i F D H o g 8 d S x H o eomm m m EO e TS2 lai mix He In Supply Pressure 122 F 50 C Gauge 0 600 PSIG 65 F to 80 F H O Out Oil Out He Out 0 41 4 Bar 18 3 C to 26 7 C 3 d PN 82 00011 002 1 4 gom min flow 105 F 40 5 C max E 5 3 liter min OD o Cooled High Pressure Helium Supply 3 ep a gt Hot High Pressure Helium Oil Mix Water Ve 2 Chiller Chiller B Low Pressure Helium Return Outlet Inlet He In T p gt Cooled High Pressure Oil I DEE e Ho High Pressure Oil 97 00046 000 Safety K Relief Valve e 375 PSIG 25 9 Bar
16. SCOTT T 150V 2PH OR PH CABLE FIN TO REPLACE EXISTING B1 00250 008 TET 180V ZD f EXTERNAL SENSOR WIRING s PEL ate ei COMMON PHASE T PRESSURE SWITCHES Caor t EE ETE N sw2 KG T lt a TEMPERATURE SWITCHES owe Sws USB FE Oxford Instruments SCH MODL CRYO PUMP CONTROLLER LV 3PH D October 27 2015 7 Figure 27 M600 M400 Low Volt Multi Drive Schematic 97 00046 000 49 User s Manual Rev A November 2015 M600 M400 Helium Compressor CONFIGURATIONS C1 C2 SWITCH SWE SHOWN CLOSED FOR 440 460 4BUVAC S0HZ INPUT ALTERNATE POSITION IS FOR 400VAC SOHZ INPUT TURN OFF MAIN POWER SWITCH BEFORE CHANGING THIS SWITCH SETTING Seca INSTALL 2 RING TERMINALS ON SAME GND STUD n PH CASU NTO REPLACE EXISTING B i por EXTERNAL SENSOR WIRING SEL O i PRESSURE SWITCHES EE va sw2 sw3 47 PRESSLALARMLOUT l 38 PHASE ERROR OUT O o 18 TEMP ALARM OUT Eu 21 SPARE2 OUT TEMPERATURE SWITCHES swe sws d d i Oxford Instruments SCH MODL CRYO PUMP CONTROLLER HV 3PH Figure 28 M600 M400 High Volt Multi Drive Schematic 97 00046 000 50 User s Manual HOUMS 310N38 Rev A November 2015 M600 M400 Helium Compressor WE vi Isi UN LE SA n Lt an 96 6 70 o 1 Il T f Y e 3 3 o 2 s v ns TG
17. TS1 Low power source voltage Mechanical seizure High Pressure in the system Possible Cause Corrective Action Confirm that sufficient cooling air is flowing to the compressor If possible provide additional cooling to the surrounding environment Add helium using the procedures described in Section 5 2 4 2 Check for proper cooling of the compressor unit Confirm that power source voltage is correct Contact Trillium US Inc for assistance Check for proper pressure in Table 5 Table 7 2 Fuse Listing for Digital Electronics Boxes in Figure Land Figure 2 Fuse Designator ENT ANM NET NN eee EE BEER 97 00046 000 Standard Unit Only On Board Unit Only ojo e Amperage Ol Part Number 31 00012 010 31 00012 010 31 00012 007 31 00012 009 31 00012 009 31 00012 013 31 00012 013 31 00012 013 31 00012 012 31 00152 009 31 00152 009 31 00152 009 50173 2 31 00152 001 31 00152 001 31 00152 004 31 00152 004 31 00152 003 32 User s Manual Rev A November 2015 M600 M400 Helium Compressor Table 7 3 Fuse Listing for Digital Electronics Box in Figure 3 and Figure 4 8 Maintenance 8 1 Maintenance Personnel Requirements Only trained and qualified personnel should perform the maintenance procedures described in this chapter All other maintenance work must be performed by Trillium US Inc Inc personnel in the factory Please contact Trillium US Inc Inc to make arrangements for maintenan
18. Table 6 14 thru Table 6 26 define the payload formats for all commands listed in Table 6 13 Table 6 14 ACK Payload Format Response to Any command that successfully executes and does not have a specific response Field Bytes Range Units Response to Command ID 1 See Table 6 13 Payload Length 1 Table 6 15 NACK Payload Format Response to Any command that fails to execute correctly or whose format is incorrect Field Bytes Range Units Command ID 1 See Table 6 13 Reason Code 1 See Table 6 16 Payload Length 2 Table 6 16 NACK Reason Codes Not ready for command Packet length error 6 Timeout 97 00046 000 27 A A pd 1 2 4 5 User s Manual Rev A November 2015 M600 M400 Helium Compressor Table 6 17 Get Status Payload Format Response Expected Status Response Action Queries the Pump Controller for its current status Range Units Payload Length No payload data Table 6 18 Status Response Payload Format In Response To Get Status Action Payload contains the Pump Controller status Field Bytes Range Units Compressor Run Time 4 Seconds PCB Temperature 2 0 1C 24V Input Voltage 2 mV Bit Set Bit 0 Compressor Pressure Fault Bit 1 Compressor Temperature Fault Bit 2 Phase Error Fault Bit 3 System Running Digital Output States 2 Bit 4 Fan Heater On Bit 5 Compressor Solenoid On Bit 6 Coldhead On Bit 7 Spare Output 1 On Bit 8 Spare Output 2 On Bit 9
19. Warning The compressor motor may become hot during operation Wait for the motor to cool down before working inside the compressor 3 3 Operator Instructions Follow standard Model 600 Model 400 Helium Compressor operating procedures as described in this manual If you still have questions regarding the safe operation of the Model 600 Model 400 Helium Compressor please contact Trillium US Inc Inc Technical Support using the contact information found in Section 2 2 Warning If the equipment is used in any manner not specified by the manufacturer the protection provided by the equipment may be impaired Warning Maintenance personnel must verify safe state of equipment after all repairs 4 Introduction 4 1 General Information about the Model 600 Model 400 Compressor Trillium US Inc Inc offers industry proven compressors such as the Model 600 Model 400 Helium Compressor described in this manual at highly competitive prices and with flexible configurations Model 600 Model 400 compressors are available in high and low voltage configurations and in either air or water cooled models 4 1 1 Model 600 Model 400 Features The Model 600 Model 400 Helium Compressors are designed for tens of thousands of hours of continuous operation The main features of the Model 600 Model 400 Helium Compressors are e Minimal maintenance requirements e Removable adsorber panel for easy maintenance e Integrated water flow meter e Rack
20. e Installation On site installation services are available to guarantee performance e Training We offer on site training to help you and your staff to know more about your cryopump and compressor systems Our training will give you confidence and the ability to maintain a highest possible uptime for your system 2 3 About this Manual The purpose of this manual is to provide our customers using the Model 600 Model 400 Helium Compressor with the information needed to safely and efficiently operate the compressor when operating as part of a cryogenic refrigeration system Such a system is often comprised of the following equipment e Model M600 Model 400 Helium Compressor e Coldhead s or Cryopumps e Connecting Helium Lines e Connecting Water Lines This manual describes the design operation and maintenance of the Model M600 Model 400 Helium Compressor units 97 00046 000 1 A A pd User s Manual Rev A November 2015 M600 M400 Helium Compressor 2 4 Compatibility The Trillium US Inc Model 600 Model 400 Helium Compressors are compatible with various cold heads and cryopumps described in the following tables Each Model 600 Model 400 compressor unit can be used to run one or more such cryopumps or cold heads For other combinations than listed below please contact Trillium US Inc Technical Support using the contact information found in Section 2 2 Table 2 1 Model 600 Helium Compressor Coldhead Compatibility
21. mounting option which is ideal for vacuum coating ion implanters semiconductor vacuum systems CAT scanners MRI systems and sputtering system applications e Reliable helium and oil filtration system e Front mounted high and low pressure gauges 4 1 2 Overview of Model 600 Model 400 Compressor Design and Operation Model 600 Model 400 Helium Compressor is designed to run different cryopump or coldhead models from different manufacturers see Table 2 1 thru Table 2 4 for compatibility information for either high voltage or low voltage and 60 50 Hz three phase operations The compressor itself consists of five main mechanical components e Compressor Capsule motor e Heat Exchanger with water ports or dual fans 97 00046 000 4 A pd User s Manual Rev A November 2015 M600 M400 Helium Compressor e Oil Mist Vapor Separator e Bulk Oil Separator e Adsorber The compressor unit and the coldhead are connected by way of helium gas flex lines The compressor unit coldhead and helium lines are fitted with self sealing couplings and are charged with ultra high purity 99 999 helium gas He 5 0 UH Helium gas is pumped through the compressor motor and after being compressed to a higher pressure the oil is mixed with the helium The oil acts in addition to the primary function as a lubricator as the medium to remove heat created by compressing the helium gas from the compressor motor Once exiting the compressor motor t
22. the compressor Then allow for the coldhead cryopump to warm thoroughly and perform the helium cleanup procedures as outlined in the coldhead cryopump manual Stubborn contamination involving water vapor requires decontamination of the compressor One effective method involves supplying clean helium to the return side of the compressor at appropriate pressures while venting a small amount of gas from the supply side while the compressor is running This is referred to as a running purge Contact Trillium US Inc Inc if such a procedure is needed The steps to remove compressor decontamination with the compressor running 1 Nr E pa NG M 10 11 8 5 Set the helium regulator to whatever the compressor return pressure gauge reads i e 50 PSIG Attach the helium charge line to the running purge fill fitting Attach the running purge fill fitting to the return Aeroquip Loosely attach the running purge vent fitting to the supply Aeroquip Slowly tighten the running purge vent tool until helium is venting from the vent tool Open the regulator valve and watch the compressor pressure gauge The pressure should be stable at the pressure set in step 1 The adjustment of the regulator or the amount of helium venting from the compressor may need to be performed in order to maintain stability Once the pressure is stabilized allow the running purge to continue for a minimum of 15 minutes After a minimum of 15 minutes stop the running pur
23. 00 56 A User s Manual Rev A November 2015 M600 M400 Helium Compressor L 8 x a wd EI E 3 sl ul sl af at Figure 35 M600 M400 Fuse Configurations Multi Drive 57 A 97 00046 000 User s Manual Rev A November 2015 M600 M400 Helium Compressor REVISIONS ECR REV DESCRIPTION DATE APPROVED A RELEASE DRAWING 7 07 09 se e c m B B Trem Number Far Number Description BEGEER RE AUSTIN SCIENTIFIC CO orke ONS ARE NO 1 29 01000 000 CASE STORAGE TOOL BOX MT rillium Io NAR Gee THLE 80 01003 000 ADAPTOR 1 2 MALE AEROQUIP TO 1 4 TUBE FITTING E PLACE DECMAL TOOLKIT RUNNING PURGE DECONTAMINATION SWAGELOK ENDS 2 sss WRENCH FLAT OPEN 1 Fo j 55050 WRENCH FLAT OPEN 1 1 8 C 4 55051 WRENCH FLAT OPEN 1 3 16 THE NFORMATION CONTAINED N THS TE SWE NO TEV A TOR 172 ALE AEROG O 1 4 TUS 3 p d oos God DRAWING G THE SOLE PROPERTY OG 99 074 000 KT AUSTIN SCENTIFIC CO ANY FITTING EPROCUCTION IN FART OR AS A WHOLE OO E 82 00105 000 Helium Clean up Vent Tool MALE Aeroquip were eebe USED ON B A 82 00105 001 Helium Clean up Vent Tool FEMALE Aeroquip Leer APPUCATION DO NOT SCALE DRAWING SCALE 1 1 WEIGHT SHEET 1 OF 1 i T 8 T 7 T 5 T 4 3 T 2 1 Figure 36 99 00074 000 Tool Kit Contents as eo ro on co 4 o
24. 1 and Figure 2 output status signals pins 16 19 are designed to drive a user side opto coupler as shown in Figure 11 Example Use the output voltage from pin 19 amp 25 to monitor the run status of the compressor this output can be used to drive a LED or used as an input to a PLC Compressor User Interface 24VDC 5mA max Pin 25 Pins 16 22 Figure 11 User Status Signal Interface For the Model 600 Model 400 compressors that have electrical box configurations as shown in Figure 3 and Figure 4 remote interface outputs are shown Table 6 4 The output signals are designed to drive a user side opto coupler as shown in the figure above Each output is shorted to ground by the controller when the output is asserted and is open circuit otherwise Connect a 24VDC load between each output pin and the Output Source 24V power at pin 25 Each output should draw a maximum of 5 milliamps The outputs can be used to drive LEDs or opto couplers Table 6 4 Remote Interface Outputs for Electrical Boxes Shown in Figure 3 and Figure 4 SIGNAL SIGNAL DESCRIPTION Pressure Alarm When the compressor pressure is too low pin 16 is shorted to ground Pin 16 is left floating when the pressure is normal or the system is off Phase Error When there is input power phase error pin 17 is shorted to ground Pin 17 is left floating when there is not a phase error Temperature Alarm When the compressor is too hot pin 18 is shorted to ground Pin
25. 15 Reserved Bit Set Bit 0 Coldhead Enable Bit 1 Compressor Solenoid Enable Bit 2 System Reset Bit 3 Compressor Pressure Fault Digital Input States 2 Bit 4 Compressor Temperature Fault Bit 5 Compressor Overload Fault Bit 6 Spare Remote Input 1 Bit 7 Spare Remote Input 2 Bit 8 Spare Chassis Input 1 Bit 9 15 Reserved Bit Set Bit 0 On Button Pressed Bit 1 Off Button Pressed Bit 2 Menu Button Pressed Bit 3 History Button Pressed Bit 4 15 Reserved Bit Set Bit 0 System Fault Bit 1 AC 220V Fuse Blown Fault States 2 Bit 2 AC 24V Fuse Blown Bit 3 Compressor Overload Fault Bit 4 AC Phase Fault Bit 5 Compressor Pressure Fault 97 00046 000 28 A A pd Button States 2 User s Manual Rev A November 2015 M600 M400 Helium Compressor In Response To Get Status Action Payload contains the Pump Controller status Field Bytes Range Units Bit 6 Compressor Temperature Fault Bit 7 3 Phases Detected 1 Phase Expected Bit 8 1 Phase Detected 3 Phases Expected Bit 9 15 Reserved Payload Length 16 Table 6 19 Get Fault History Payload Format Response Expected Fault History Response Action Queries the Pump Controller for the list of historic faults Range Units Payload Length No payload data Table 6 20 Fault History Response Payload Format In Response To Get Fault History Action Payload contains the list of histor
26. 6 000 14 A A pd User s Manual Rev A November 2015 M600 M400 Helium Compressor 6 Set the pressure regulator to approximately 270 PSIG 18 6 Bar and slowly open the valve on the pressure regulator When the helium supply pressure gauge reaches the specified limits found in 5 tightly close the regulator valve 7 Ensure the regulator valve is tightly closed Shut off the helium pressure regulator on the helium bottle 8 Remove the female charge fitting and reinstall the Aeroquip cap onto the compressor Caution If the compressor pressure drops over a period of time either when not in operation or without the lines being connected disconnected this may be an indication that there is a leak along the helium circuit compressor lines coldhead cryopump If that is the case do not just keep refilling the system with helium gas Such leaks will introduce ambient air moisture and cause contamination in the helium stream This will result in catastrophic failure of the whole cryogenic system if not properly addressed Contact and report the leak to Trillium US Inc Inc immediately using the contact information found in Section 2 2 5 2 4 3 Connecting the Helium Flex Lines Caution Connect or disconnect the helium flex lines only when the power to the compressor unit is switched off Never twist or kink the helium flex lines during the installation process Before connecting the helium flex lines follow these steps 1 Identify the heli
27. 600 Model 400 units connect the cooling water a Typical municipal drinking water is acceptable however a closed loop chilled water source is recommended b Minimum water flow rate of 1 4 1 8 GPM 5 3 6 8 liters min is required to achieve a maximum discharge temperature of 100 F 38 C with 80 F 26 7 C considered ideal 3 For air cooled Model 600 Model 400 units make sure the front and rear grills have at least 24 inches of clearance from the nearest objects at all sides 4 Verify that helium pressure is between 240 5 PSIG 16 5 35 Bar If the pressure is low refer to Section 5 2 4 2 for charging procedures 5 Start the compressor and run for about 15 minutes to stabilize the compressor oil inventory 6 The compressor is now ready to be connected to the cryopump s or coldhead s 5 2 4 Installation 5 2 4 1 Ambient Conditions and Coolant Connection Ambient Conditions 97 00046 000 13 A User s Manual Rev A November 2015 M600 M400 Helium Compressor When the compressor is in operation the ambient temperature should be between 40 F 104 F 5 C 40 C The compressor unit should be set up in a non condensing environment An optimal location would be in a well ventilated or temperature controlled location Coolant Connection Caution For water cooled compressor models the water used in the unit operation must meet the specifications indicated in Table 4 3 Caution Failure to comply
28. Figure 14 Adsorber Screw Removal 97 00046 000 36 A E User s Manual Rev A November 2015 M600 M400 Helium Compressor Figure 15 Adsorber Aeroquip OMS Supply Line Removal Figure 16 Adsorber Removal 97 00046 000 37 4 A User s Manual Rev A November 2015 M600 M400 Helium Compressor Note 8 3 2 1 3 16 Wrench 1 1 8 Wrench Figure 17 Self sealing Connector Image from Aeroquip Catalog Install Replacement Adsorber To install the replacement adsorber 1 2 3 10 8 4 Remove the dust caps from the self sealing coupling halves at each end of the replacement adsorber Check the self sealing connector flat rubber gasket to make sure that it is clean and properly positioned Place the adsorber back in the compressor using the nuts bolts and washers set aside during the removal process described in Section 8 3 1 Install the two self sealing coupling halves quickly to minimize minor gas leakage Use the 1 1 8 and 1 3 16 wrenches holding the 1 1 8 wrench tight on the coupling half attached to the adsorber Use the 1 3 16 wrench to tighten the coupling to the helium supply OMS line Make the initial turns by hand and then use the wrenches until the fittings bottom out This is critical improper or loose connections will affect compressor function a Effective connections can be validated by confirming the leak rate is less than 1 x 10 mBar l sec Make sure the supply pressure is in acc
29. ISTORY EE EE EE EE N EE EE EE EE ERS V 2 PREFAGE EE OE EE OE RE EA EE T 1 2 1 ABOUT TRILLIUM US ING ee OE EE ea AS REES SAREA 1 2 2 OTHER SERVICES FROM TRILLIUM US INC uses se se se ee se ee se ee ee ee ee va Ee Ee Ee Ee Ee Ee ee ee ee ee ee aR ee ee ee ener nr YR ri ri ri ri ri ni ee Ee ee ee ee ee ee ee nan 1 2 3 ABOUT THIS TI 1 2 4 COMPATIBIL RE EE EE EE KO OT 2 3 SARA dl EE EE EEN 3 3 1 STANDARDS FOR USE OF WARNINGS AND CAUTIONS sees ee ee ee e e eee 3 3 2 WARNINGS APPLICABLE TO ALL ASPECTS OF M600 M400 ORERATION ees ee e 3 3 2 1 High Voltage and Electrical Shock Warnings 3 2 2 High Pressure Related Wormninge sees eee eee 3 2 3 Helium Gas Related Warnings 3 2 4 Heat Related Worninge 3 3 OPERATOR INSTRUCTIONS 4 INTRODUCTION RE EE EE RE EE EE E d 4 1 GENERAL INFORMATION ABOUT THE MODEL 600 MODEL 400 COMPRESSOR ee ee esse ee ee ee ee ee ee ee ee ee ee ee ee ee ee ee ee be ee ee 4 4 1 1 Model 600 Model 400 FeatureS iese ee se de ee de ee ee ee ee ee ee ee ee ee ee sas aaa sata ee ee ee ke a 4 4 1 2 Overview of Model 600 Model 400 Compressor Design and Operation cesse 4 4 1 3 Description Of SUD E EE 5 414 Operational de AR RE EE ER EE EE RR 6 4 2 SPEGIFIGATIONS REEN RE OE OE RE ER O Ee 6 4 3 ERNEIEREN ee EE OE EE eeh EE OE N 8 4 4 ORDERING INFORMATION 11 5 INSTALLATION BEER AE RE N AE EE EER N N HOE OE ER eee 12 5 1 SAFETY WARNINGS
30. N Eed AE RE N GE DA Ee TE dae ken EE dE ENEE 22 6 3 5 1 Compressor Front Panel Fault Errors ER ee ee ee RAARO ee sa sa das ases sa sa ada 23 97 00046 000 ii User s Manual Rev A November 2015 M600 M400 Helium Compressor 6 3 6 Compressor System Shut Down 23 6 3 7 Compressor Interfaces id a a dE Ee es dene da Des ae hee o enee SR Ed e Ae Ra AUREAM ERROREM GR ee ERG RS Ee ke eg de 23 6 3 7 1 Serial Port Interface J2 R 232 seite eese AE ES Ne RE de ee Ge URN EVE soeke A re ade Nes sitae aus 23 6 3 7 2 USB Interface UT AMointengoncel se ee se ee sisse seen einen etna sensn ee danser tasa ss sia assa sa da ssa ee ee ansa 24 6 3 8 Serial Communications via bai 24 6 3 8 1 SerialPort COMMONS M 24 6 39 Communications VIA USB TTT 26 6 3 9 1 USB Payload Form ate is ses en Ek see De seek ees en ge RR Ge en ARDEN SAN Gee Fe ERR ss Dee ee ea n Ee ed Ge ee Tebn 27 7 TROUBLESHOOTING AD AO AE OE N DE OE OR RE 31 7 1 TROUBLESHOOTING ACTIVITIES is es oes stede ee ee iese ee de ek se se ee ee SE Se Be ee ee ni Ea Ge ee Ee RR ek ee NSR ek ee ee se oe ek ea ee Sie Eg 31 8 MAINTENANCE ee 33 8 1 MAINTENANCE PERSONNEL REQUIREMENTS eoenennnnrnnnnererenvenrnnennenernrnennnnnneneneennnnnenenernennnnnnenenennensnnnnnenenernnnnnnnnenenenensnneneneee 33 8 2 REMOVING THE COMPRESSOR FROM SERVICE REMOVAL TRANSPORT AND STORAGE ee oe se ee eee 33 8 3 SCHEDULED PREVENTATIVE MAINTENANCE ACTIVITY see ee e ee e ee eee 33 8 3 1 Remove the Compr
31. S Inc and by furnishing this information Trillium US Inc grants no license expressed or implied under any patents copyrights trademarks trade secrets or other intellectual property rights of Trillium US Inc Trillium US Inc copyright owner of the information contained herein gives consent for copies to be made of the information only for use within the customer s organization as related to the use of Trillium US Inc products The same consent is given for similar information contained on any Trillium US Inc Web site or disk used to distribute information to a customer Trillium US Inc does give consent to the copying or reproduction by any means of the information contained herein for general distribution advertising or promotional purposes or for creating any work for resale The names of products of Trillium US Inc or other vendors and suppliers appearing in this document may be trademarks or service marks of their respective owners that may be registered in some jurisdictions A list of Trillium US Inc trademarks and service marks can be found at http www trilliumus com Trillium US Inc 1340 Airport Commerce Dr Bldg 1 Suite 175 Austin Texas 78741 USA TEL 1 512 441 6893 FAX 1 512 443 6665 Email cryo sales trilliumus com Copyright 2015 by Trillium US Inc All rights reserved 97 00046 000 i 4 User s Manual Rev A November 2015 M600 M400 Helium Compressor Table of Contents 1 REVISION H
32. Scheduled Preventative Maintenance Activity The only scheduled field service maintenance required on the Model 600 Model 400 Helium Compressor is replacement of the compressor adsorber after every 15 000 hours of operation as shown on the Elapsed Time Meter or 2 years whichever comes first While in many cases an adsorber can last longer Trillium US Inc experience dictates that from a 97 00046 000 33 A A pd User s Manual Rev A November 2015 M600 M400 Helium Compressor cost value perspective it is better to swap the adsorber out after 2 years to protect the integrity of the overall integrated solution with the compressor load The adsorber is used as the final filter to keep the oil vapor out of the helium gas just before the gas is pumped into the compressor load cryopump coldhead etc After about 15 000 hours of operation or 2 years the effectiveness of the adsorber will decrease and need to be replaced If not replaced the oil particles could accumulate on the cold surface of the compressor load reducing the cooling performance of the overall system In severe cases of such oil contamination the load could cease to function completely To remove and replace the compressor adsorber follow the steps described in Section 8 3 1 and Section 8 3 2 8 3 1 Remove the Compressor Adsorber To remove the compressor adsorber 1 Turn off the compressor and disconnect it from the main power supply 2 Allow sufficient time for the l
33. a lt Trillium Trillium US Inc Model 600 Model 400 Cryogenic Helium Compressor User s Manual Rev A November 2015 97 00046 000 User s Manual Rev A November 2015 M600 M400 Helium Compressor For information about Trillium US Inc visit the Trillium US Inc Web site at http www trilliumus com How to Contact Trillium US Inc Support support Qtrilliumus com For contact information and a complete listing of Direct Sales Distributor and Sales Representative contacts visit the Trillium US Inc Web site at http www trilliumus com Trillium US Inc has made its best effort to ensure that the information contained in this document is accurate and reliable However the information is subject to change without notice and is provided AS IS without warranty of any kind express or implied Before placing orders customers are advised to obtain the latest version of relevant information to verify that information being relied upon is current and complete All products are sold subject to the terms and conditions of sale supplied at the time of order acknowledgment including those pertaining to warranty patent infringement and limitation of liability No responsibility is assumed by Trillium US Inc for the use of this information including use of this information as the basis for manufacture or sale of any items nor for infringements of patents or other rights of third parties This document is the property of Trillium U
34. anual Rev A November 2015 M600 M400 Helium Compressor Additional accessories will be needed to operate multiple cryopumps or cold heads Refer to Section 4 4 for the part numbers and ordering information 3 Safety Warnings 3 1 Standards for Use of Warnings and Cautions Warnings are noted when there is a possibility of injury or death to persons operating the equipment or performing specific tasks or procedures noted in this manual Cautions are noted when there is a possibility of damage to equipment if the caution is ignored 3 2 Warnings Applicable to All Aspects of M600 M400 Operation 3 2 1 High Voltage and Electrical Shock Warnings Warning This unit can start automatically and via remote control Potentially fatal voltages are present in the compressor unit The compressor should be switched off and disconnected from its power supply before carrying out any troubleshooting or maintenance activities on the unit Warning Connect or disconnect the flex lines joining the compressor and its load cryopump coldhead etc only after the compressor and its load are switched off and separated from the power source Otherwise electrical shock hazards may exist potentially causing damage to the compressor unit its load or the operator Warning Always provide proper grounding to the compressor unit and its load All electrical power connection and disconnection of the unit should be done by a qualified electrician Warning Hi
35. at least two Tip n Tell or TiltWatch labels are mounted on the exterior of the shipping carton Inspect these labels carefully before accepting the shipment Any sign that the package has been mishandled during transit may indicate that the compressor may be damaged due to oil migration within the system This could cause the unit to overheat and ultimately fail after a short period of operation The compressor must be returned to the factory for service Report the mishandling of the package and file a damage claim with the shipping company immediately Failure to do so will void the warranty on the compressor Please also contact Trillium US Inc Inc Technical Support using the contact information found in Section 2 2 Remove the straps and packaging materials from the compressor container then lift or roll the unit out of the container carefully Inspect the exterior if any damage is observed inform the shipping company and Trillium US Inc Inc Keep the original packaging materials in case the unit needs to be returned to the factory for service Most shipping companies have a certain grace period for reporting damages due to shipping in order to process the insurance information in a timely manner Therefore it is highly recommended that the shipping container be opened and the unit inspected immediately whether or not it will be put into operation right away Tip and Tells are present on the external packaging as well on the compressor i
36. been connected to the overall system as instructed in Section 5 2 4 3 as the static pressure may change based on the overall system pressure after connection If the helium pressure is too high 1 Remove the protective cap from the Fill Vent fitting 2 Slowly connect the female charge fitting As the connector is tightened helium pressure will bleed out of the compressor 3 Continue to bleed out helium gas until the pressure reaches the desired limits defined in Table 4 3 Once the pressure is reached disconnect the Aeroquip 4 Re install the protective cap If the helium pressure is too low 1 Connect a pressure regulator rated at 400 PSIG 27 6 Bar delivery pressure and a helium charge line to a user supplied helium supply gas cylinder Terminate the charge line with the female charge fitting 2 Set the helium pressure regulator to 10 25 PSIG 69 1 7 Bar Loosen the flare connector part of the female charge fitting in between the helium charge line and the female Aeroquip adaptor 3 Allow helium gas to flow though the flex line for a minimum 30 seconds to purge the charge line of air Tighten the flare connector while venting After tightening close the valve on the pressure regulator 4 Remove the Aeroquip cap of the helium fill vent fitting on the front of the compressor 5 Tighten female charge fitting on the end of the helium charge line to the gas fill vent Aeroquip fitting of the compressor 97 0004
37. c recommends a maximum of twelve cycles per hour One critical consideration is a minimum run time required to return oil to the compressor after start up To assure proper oil return one minute is the minimum run time for all cryogenic compressors A second consideration is a four minute minimum off cycle time once the compressor cycles off 6 3 Electronics Interface Connections The Model 600 Model 400 helium compressors are provided with a pig tail for connecting to the installation location Electrical box interfaces are described below 6 3 1 Remote Interface The electrical box can be controlled through a remote interface This allows a PLC or other hardware device to control and monitor certain functions of the compressor and cold head 97 00046 000 18 A A pd User s Manual Rev A November 2015 M600 M400 Helium Compressor Digital configurations of the electrical box as shown in Figure 1 thru Figure 4 provide a D sub 25 pin connector for remote interface control and status collection the pin out is shown in Table 6 1 Table 6 1 J1 or J3 Remote Connector 25 Pin D Sub PIN SIGNAL DESCRIPTION 1 N C 2 N C 3 Reset 4 Cold Head ON OFF 5 N C 6 Compressor ON OFF 7 N C 8 N C 9 N C 10 N C 11 N C 12 N C 13 N C 14 N C 15 N C 16 Pressure Alarm 17 Phase Error 18 Temperature Alarm 19 Run Status 20 N C 21 N C 22 N C 23 N C 24 Ground 25 24V Output For analog configurations of the electrical box as shown in Figur
38. ce work see Section 2 2 8 2 Removing the Compressor from Service Removal Transport and Storage It is recommended that the Model 600 Model 400 Helium Compressor be removed from service when carrying out the maintenance duties described in Section 8 3 To remove the compressor unit from service do the following 1 Turn off the compressor unit by pressing the OFF button Switch off the main power supply to the compressor Separate the compressor unit from the main power source Allow coolant to continue circulate for at least 10 more minutes for water cooled model Allow the compressor load cryopump coldhead etc to warm up to room temperature before detaching the helium flex lines from the compressor 9I 00 ID Caution Loosening or detaching helium flex lines with the compressor load at low temperature without proper warming up can result in loss of helium and or pressure rise in the cryopump or coldhead unit beyond its designed maximum pressure level When transporting the compressor unit follow these guidelines 1 Make sure the appropriate protective caps are properly secured before shipping 2 Always store the compressor unit in a dry place 3 Ifafreezing temperature environment is anticipated whether during shipping or under storage make certain the coolant in the compressor circuit is properly drained Caution The compressor unit should never be tilted more than 10 degrees either during shipping or in storage 8 3
39. d Instrumentation Diagram 97 00046 000 41 X User s Manual Rev A November 2015 M600 M400 Helium Compressor M400 P amp ID Water Cooled Return Pressure Rev A NOT FOR PRODUCTION m m November 2015 Volume 0 41 4 Bar re ers var PN 82 00011 001 oup T Differential 2 Way direct acting Differential Fixed normally open 0 250 psi He In He in at Relief Valve 0 17 2 Bar RETURN 0 100 psi 270 psi 18 6 Bar Bypass Solenoid w Orifice 8 Aeroquip 0 6 9 Bar PN 82 00008 003 orfice 1 8 to 3 32 PN 82 00089 001 Suction Helium Scroll Compressor Motor A PN 29 00003 006 007 He out at Oil He Out to Pump 200 260 psi He Oil Return Pare 13 8 17 9 Bar O ER ER l A sn TUN i Oil Charg U Orifi o m H i e H ice H uid xr Beee DJ Schrader Check Vave I OF e x Valve Solenoid PN a H 82 00091 002 eo g H 3 m d gt P Z i H g EEE o R e x D o Lo DEL Jr E TS2 He Oil mix He In 122 F 50 C H Gauge 0 600 PSIG 65 F to 80 F HO Out Oil Out He Out 0 41 4 Bar 18 3 C to 26 7 C E 4 PN 82 0001 1 002 1 4 gpm min flow 105 F 40 5 C max 5 3 liter min Cooled High Pressure Helium Supply amal 3 Hot High Pressure Helium Oil Mix Water Water Chiller Chiller Low Pressure Heli
40. e 15 Adsorber Aeroquip OMS Supply Line Removal sees see ees se se Ee ee ee enne nnne nnne Fig re 16 Adsorber Removal ierit eene hin tuer ka ran ino Re Eae eR e ERES eH ee GR nA Ta Ee ee Van ee eed a raya en E ede TEE date Figure 17 Self sealing Conpnector eee sese eee eee eee Figure 18 M600 Water Piping and Instrumentation Diagram sss sese eee ee eee eee eee eee Figure 19 M600 Air Piping and Instrumentation Diagram sese sees eee eee eee Figure 20 M400 Water Piping and Instrumentation Diagram sss sese eee se eee ee eee eee Figure 21 M400 Air Piping and Instrumentation Diagram ss sese eee eee eee Figure 22 M600 M400 Water Cooled General Dimensions eee ee Figure 23 M600 M400 Air Cooled General Dimensions eee eee Figure 24 M600 M400 Low Volt Standard Drive Schematic esses Figure 25 M600 M400 Low Volt On Board Drive Schematic Figure 26 M600 M400 High Volt Standard Drive Schematic essen Figure 27 M600 M400 Low Volt Multi Drive Schematic ese ee e ee Figure 28 M600 M400 High Volt Multi Drive Schematic eee ee e e 97 00046 000 iii 4 EX User s Manual Figure 29 M600 M400 Low Volt Analog Standard Drive ScChematiC ees ees ee ee ee ER Re ee Re Re RE 51 Figure 30 M600 M400 High Volt Analog Standard Drive Schematic esee 52 Figure 31 M600 M400 Low Volt Analog On Boa
41. e 5 and Figure 6 a two pin MS3102A14S 9S connector is provided the pin out is shown in Table 6 2 Table 6 2 Analog Remote Connector PIN SIGNAL DESCRIPTION Compressor Remote Control fandi Make ON Break OFF 97 00046 000 19 A A pd User s Manual Rev A November 2015 M600 M400 Helium Compressor 6 3 2 D Sub User Controls For the Model 600 Model 400 compressors that have electrical box configurations as shown in Figure 1 and Figure 2 input control signals pins 3 4 6 require a user slide switch or opto coupler as shown in Figure 10 Independent control of the compressor and cold head cryo pump is not possible with this configuration of electrical box The compressor is shipped with a mating plug which when left installed will cause the compressor to return to powered on state in the event of a power failure Example To start the compressor connect pin 6 to pin 24 To start the coldhead connect pin 4 to pin 24 Compressor User Interface 24VDC 10mA Pins 3 6 A or 0 24 Figure 10 User Control Signal Interface For the Model 600 Model 400 compressors that have electrical box configurations as shown in Figure 3 and Figure 4 remote interface inputs are shown Table 6 3 The inputs require a dry contact switch or an opto coupler as shown in the diagram below Short each input pin 3 4 or 6 to the Input Return pin 24 to assert the signal Open the circuit to de assert the signal Since there are
42. ed Month code was compiled Day code was compiled Firmware Part Number Firmware Version Number Bootloader Part Number NTNITNINTRPTRPITN Bytes Range Units 2 1 255 currently set to 1 Full year yyyy Month 1 Jan 12 Dec Day of Month Will be 437 Will be 436 Bootloader Version Number Hardware Part Number Will be 401 97 00046 000 N 30 Ad User s Manual Rev A November 2015 M600 M400 Helium Compressor In Response To Get Version Action Payload contains the list of firmware version numbers Bytes Range Units Calculated Checksum 2 Should be equivalent to Stored Checksum Stored Checksum 2 Should be equivalent to Calculated Checksum Reserved 5 Payload Length 25 7 Troubleshooting 7 1 Troubleshooting Activities Table 7 1 describes some problems that users might encounter while operating the Model 600 Model 400 Helium Compressor and provides potential solutions to those problems Additional Fault trees are presented in Figure 32 and Figure 33 For the Model 600 Model 400 compressors that have digital electrical box configurations as shown in Figure 1 and Figure 2 Table 7 2 lists the fuse function and amperage rating See Figure 34 for PCBA fuse locations For the Model 600 Model 400 compressors that have digital electrical box configurations as shown in Figure 3 and Figure 4 Table 7 3 lists the fuse function and amperage rating See Figure 35 for PCBA fuse locations If a compresso
43. ematic 97 00046 000 53 User s Manual Rev A November 2015 M600 M400 Helium Compressor a H M600 M400 Compressor Fault Tree A Tr I I I I um Wednesday November 25 2015 Adsorber Removal and Compression without bypass Helium flex lines AUSTIN CHECK INPUT CHECKIREPLACE SERVICE POWER PHASE AND FOR OTHER FUSES CIRCUIT BREAKERS MOTOR PHASES CAUSES LE AND WIRING ASSOCIATED re NO MODIFY WIRING TO WITH POWER SOURCE MATCH PHASES ETC CHECK TS1 amp TS2 NC Switches VERIFY WIRES ARE CONNECTED AND SWITCHES ARE OPERATIONAL Figure 32 M600 M400 Fault Tree Compressor will Not Start Adsorber Replacement 97 00046 000 54 4 User s Manual Rev A November 2015 M600 M400 Helium Compressor lt Arillium M600 M400 Compressor Fault Tree u Wednesday November 25 2015 SCHEMATIC FOR OTHER Check TS1 210 F Check TS2 122 F Fault verified 50 C VERIFY TEMP NC Switch DELTA ACROSS HEAT EXCHANGER Wait for fault to clear and check all other conditions Fault condition persist Replace temp Switch Fault verified VERIFY FANS ARE OPERATIONAL YE AUSTIN AUSTIN Figure 33 M600 M400 Fault Tree Compressor Starts but Shuts Off 97 00046 000 55 4 X User s Manual Rev A November 2015 M600 M400 Helium Compressor Figure 34 M600 M400 Fuse Configurations Digital 97 00046 0
44. essor Adsorber uie se ER ee GE ER AR ER AA ee AGE ER Re AA ee AR sa Ke ee ases GE ER asas ases da sa ke ee ee 34 83 2 Install R placeimentAdSOrDEF sissies essa KERE Re adde KA EE pe SEGE ERG EE Ek VAN GEAR RE GED Ge GN Ede AE 38 8 4 UNSCHEDULED CORRECTIVE MAINTENANCE ee ee ee ee ee ee ee ee ee see ee ee ee ee nnns ee ee ee hah AA AA AA AA AA AA AA ee ee ee AA sane sana aan 38 8 4 1 Removing Helium Contamination uu sesse ss se eee eee AS Ge ER Ke ee AE GR ee ee AE Ge ee ee AG Ge sa Re AA Ge sa das as ee sa ke ee 38 8 5 CLEANING EQUIPMENT T dd se ee eege ee De ee Ge ee ee ee Dee ie ee oe oe ee ee 39 8 6 RETURNING sel vi rm 39 List of Figures Figure 1 M600 M400 Digital Standard Drive Figure 2 M600 M400 Digital On Board Drive Figure 3 M600 M400 Low Volt Digital Multt Drtve trennen enne enne 9 Figure 4 M600 M400 High Volt Digital Mut Drive Figure 5 M600 M400 Analog Standard Drive Figure 6 M600 M400 Analog On Board Drive Figure 7 M600 M400 Compressor Internal Tip amp Tells eee eee Figure 8 M600 M400 Packaging Tip amp Tells se eee Figure 9 M600 M400 Helium Compressor Control Voltage Transformer Tap Settings Figure 10 User Control Signal Interface Figure 11 User Status Signal Interface Figure 12 Removal of Helium Supply Line Aeroquip at Access Panel Figure 13 Adsorber Aeroquip Nut and Access Panel Removal Figure 14 Adsorber Screw Removal eee eee Figur
45. ge by first removing the running purge vent tool Next close the regulator valve and remove the helium charge line from the compressor Turn off the compressor Remove the running purge tools from the compressor Check the static pressure and readjust the pressure to the proper limits see Table 4 3 in accordance with Section 5 2 4 2 Cleaning Equipment The Model 600 Model 400 Helium Compressor also will allow for the coldhead drive circuit to be operated independent of the compressor motor Such an operation would be utilized if minor contamination would need to be removed from the coldhead unit The following steps shall be taken 1 Caution 8 6 Connect pin 24 to pin 4 on J1 The coldhead will operate for up to 10 minutes The timer will be displayed on the LCD screen at this point To stop the coldhead remove the connection between pin 24 and pin 4 If the jumper is not removed the coldhead drive will automatically stop after 10 minutes Do not use solvents to clean the Aeroquip fittings The fittings come pre lubricated from the factory and should never be greased or oiled Failure to comply could result in a contaminated helium circuit Returning Equipment Before returning any equipment contact Trillium US Inc Inc to receive special instructions and to obtain a return authorization RMA number See contact information found in Section 2 2 97 00046 000 39 A A pd User s Manual Rev A November 2015 M600 M400
46. gh voltage is present within the compressor unit and can cause severe injury from electrical shock Permit only qualified electrical technicians to open the compressor enclosure to perform electrical troubleshooting Warning The main power plug is used as the overall disconnect device Ensure that access to the disconnect device is made available at all times 3 2 2 High Pressure Related Warnings Warning High gas pressure is present within the system and may cause severe injury if a safe pressure level is exceeded Warning Do not charge the compressor without using a pressure regulator Do not charge the compressor to a pressure level that exceeds limit set by the manufacturer Warning The static pressure of a compressor is predetermined by the manufacturer based on operational safety and performance considerations Do not exceed this level when charging a compressor 3 2 3 Helium Gas Related Warnings Warning Helium gas can cause rapid asphyxiation and death if released in a confined and un ventilated area Warning Use a pressure reducing regulator when withdrawing helium gas from a high pressure gas cylinder 97 00046 000 3 A A pd User s Manual Rev A November 2015 M600 M400 Helium Compressor Warning Detaching the helium flex lines when the compressor load is at low temperature may cause the pressure to rise in the system beyond the permissible level therefore creating a safety hazard 3 2 4 Heat Related Warnings
47. gure 26 for digital configurations shown in Figure 1 and Figure 2 and in accordance with the schematics shown in Figure 29 thru Figure 31 for analog configurations shown in Figure 5 and Figure 6 97 00046 000 16 A A pd User s Manual Rev A November 2015 M600 M400 Helium Compressor T 240V Setting Factory setting for low 208 220V Setting voltage models 460 480V Setting Factory setting for high 380 400V Setti ng voltage models Figure 9 M600 M400 Helium Compressor Control Voltage Transformer Tap Settings 97 00046 000 17 A K User s Manual Rev A November 2015 M600 M400 Helium Compressor 6 Operation 6 1 Before Switching On the System After the compressor unit and its load cryopump coldhead etc are installed and connected check the helium gas pressure as indicated by the pressure gauges mounted on the front panel of the compressor unit Refer to Section 4 2 for the proper static pressure readings for the compressor If the helium pressure needs to be adjusted refer to Section 5 2 4 2 for procedures to adjust the helium pressure inside of the compressor 6 2 Normal Operation The load of the compressor can be powered through the power connectors located on the front panel of the compressor To start operation of the compressor do the following 1 Open the coolant supply water cooled compressor model only 2 Switch on the main power source a For analog electrical boxes this will start the com
48. he hot oil hot helium mixture is pumped via differential pressure out of the capsule through the water cooler or air cooled heat exchanger The cooled oil than enters the oil mist separator the vast majority of cool oil and cool helium are separated such that each medium helium and oil enters leaves the oil mist separator through different parallel paths The heat exchanger removes the heat generated from the process of compressing helium in the capsule The cooled oil returns to the capsule to lubricate and cool the capsule The volume tank is an empty tank that provides additional helium gas volume on the low pressure side of the compressor system This prevents the low side pressure from going too low when the compressor is running The helium gas purifying occurs after the heat removal and cooling process Helium gas purification must occur because the helium out of the heat exchanger still has a small amount of oil vapor mixed with it If this helium gas gets to the cryopump with oil vapor in it the oil will freeze and contaminate the cryopump The function of the oil mist vapor separator is to rid the helium gas stream of this oil vapor Any oil condensate is then returned to the capsule Typically the helium gas still contains a trace amount of oil vapor at this point The adsorber then filters out the remaining oil vapor from the helium gas stream Over time the adsorber will become saturated with the oil vapor Thus it is important tha
49. ic faults Field Bytes Range Units Number of Faults 1 0 25 Reserved 1 N A The remaining payload is a sequence of Number of Fault entries Fault Identifi 1 SE ault Identifier Table 6 21 Running time in seconds of the compressor at Timestamp 4 which the fault occurred Payload Length 2 102 Table 6 21 Fault Codes i Table 6 22 Set Compressor Payload Format 97 00046 000 29 A A pd User s Manual Rev A November 2015 M600 M400 Helium Compressor Response Expected ACK NACK Action Powers the Compressor Solenoid on or off Field Power State Payload Length Bytes Range Units 1 0 Off 1 On il No payload data Table 6 23 Set Coldhead Payload Format Response Expected ACK NACK Action Powers the Coldhead on or off Field Power State Payload Length Bytes Range Units 0 Off 1 1 On 1 No payload data Table 6 24 Reset Payload Format Response Expected ACK NACK Action Performs a reset on the control board processor Payload Length Range Units No payload data Table 6 25 Get Version Payload Format Response Expected Version Response Action Queries the control board for the set of firmware version numbers Payload Length Range Units No payload data Table 6 26 Version Response Payload Format In Response To Get Version Action Payload contains the list of firmware version numbers Communication Protocol Version Year code was compil
50. ldhead Payload Format Table 6 24 Reset Payload Format sees esse ss se ee AA ER RA AE Ee RA nans AR Ee tha ee AA AA essa Ee RR E AA ee ee sa as essa Table 6 25 Get Version Payload Format Table 6 26 Version Response Payload Format Table 7 1 Troubleshooting Procedures iss ee ee se Ee ee Re ee EA ER Ee ee ee ee ee tnra ee ee ee ee ranas ss ee ee Table 7 2 Fuse Listing for Digital Electronics Boxes in Figure Land Figure 2 Table 7 3 Fuse Listing for Digital Electronics Box in Figure 3 and Figure A 97 00046 000 iv Rev A November 2015 M600 M400 Helium Compressor EX User s Manual 1 Revision History Date June 2009 March 2010 December 2013 November 2015 97 00046 000 Revision 1 0 1 1 0 2 1 0 3 ECR 2534 Document Part Number 97 00046 000 Rev A November 2015 M600 M400 Helium Compressor Description of Change Combine M600 and M400 manuals Add new electrical box configuration information Change document part number Make correction to low voltage tap setting description on Figure 4 1 Change company address and name Rebranding major formatting changes Content changes all pages User s Manual Rev A November 2015 M600 M400 Helium Compressor 2 Preface 2 1 About Trillium US Inc Inc Trillium US Inc Inc a wholly owned subsidiary of Trillium US Inc specializes in the manufacture and repair of cryogenic cryopumps cryocoolers
51. ller Stop Bits 6 3 7 2 USB Interface J1 Maintenance For the Model 600 Model 400 compressors that have digital electrical box configurations as shown in Figure 3 and Figure 4 a USB type B connector is provided This connector provides control input and status output using USB protocol The underlying protocol of the USB link is HID The data is streamed as raw bytes 6 3 8 Serial Communications via RS232 e No handshaking e PC is always the host e Commands and data requests from host e Message Format o Byte 1 STX 02h control B o Bytes 2 4 Command or data request o Bytes 5 X Command or requested data o Byte X41 Carriage Return ODh e All bytes are ASCII type 20h 7Fh e Maximum value for X is 126 e Individual data values are separated by a forward slash e Used letters are ASCII capitals e Used numbers are ASCII decimals e Incorrect formats are ignored 6 3 8 1 Serial Port Commands The following serial port commands are provided Table 6 8 Serial Port Commands Send STX SYS1 CR Turn System On Table 6 9 Data Message Command No of Bytes Description Send STX DAT CR 1 3 1 Data request 97 00046 000 24 A A pd User s Manual Command Receive STX DAT 0 00 000000 12345 000000000000000 0000 00 1000000000000000 4 CR Send STX SYS x CR STX SC x y CR STX DAT CR STX ERR CR As described in previous table STX ERR xx hhhhh xx hhhhh xx hhhhh CR
52. nterior as shown in Figure 7 and Figure 8 Caution When transporting or storing the compressor unit make certain it is not tilted by more than 45 degrees from horizontal level to avoid potential oil migration damage to the compressor 97 00046 000 12 4 A K User s Manual Rev A November 2015 M600 M400 Helium Compressor Figure 7 M600 M400 Compressor Internal Tip amp Tells WARNING Figure 8 M600 M400 Packaging Tip amp Tells 5 2 2 Mounting the Compressor It is highly recommended that the compressor unit be installed on a level and steady surface If the unit must be installed in a tilted manner the maximum tilting angle is 10 degrees Tilting the unit more than this maximum allowable angle could result in damage and contamination in the system and may void the warranty of the unit 5 2 3 Preparing the Compressor for Operation 1 Check the voltage of the power source before connecting the main power cable to a suitable connector or disconnect box making sure that the compressor switch is off a Ifthe voltage of the power source is different from the factory default setting see Table 4 2 and it may be necessary to change the tap settings on the 24VAC control transformer located inside the electrical box of the compressor for all configurations of the electrical box with the exception of that shown in Figure 3 and Figure 4 Follow the steps described in Section 5 2 5 to make the change 2 For water cooled Model
53. oad of the compressor cryopump or coldhead to warm up before detaching the helium flex lines from the compressor Refer to Section 5 2 4 3 for proper procedures to detach helium flex lines Caution Detaching helium flex lines with the compressor load at low temperature could result in loss of helium gas It may also cause the pressure rise in the system beyond the permissible level therefore creating a safety hazard 3 Use the two wrenches supplied with the optional Installation Kit to avoid loosening the body of the coupling from its adapter Hold one wrench tight on the coupling half attached to the rear side of the compressor Use the other wrench to loosen the coupling to the helium supply line Unscrew the two self sealing coupling halves quickly to minimize minor gas leakage Figure 17 contains an illustration of the self sealing couplings 4 After detaching the helium flex line from the helium supply connection located on the adsorber panel on the front panel unscrew and remove the nut and washer of the helium supply connector See Figure 12 5 Unscrew the six screws holding the adsorber panel on the front panel See Figure 13 6 Once the adsorber panel is removed the adsorber should be in full view There is a short section of helium flex line that connects the adsorber with the oil mist separator of the compressor To detach the helium flex lines perform the following 1 Use two wrenches sized 1 1 8 and 1 3 16 to avoid loosening
54. on take will take the user to the Fault History screen where the most recent fault will be displayed Pressing the History button will cycle through each of the logged faults in reverse chronological order until the last logged fault is displayed Then the fault history will wrap around to the most recent fault again 6 3 5 Compressor Operational Checks The following table lists all of the compressor operational checks and the cause of a failed operational check Table 6 5 Operational Checks System Interlock Fault Pressure alarm contact is not OPEN Verify pressure Helium Pressure Alarm contact and helium pressure Temperature alarm contact is not CLOSED Verify Helium Temperature Alarm temperature contact and helium temperature Temperature alarm contact is not CLOSED Verify Oil Return Temperature Alarm temperature contact and oil temperature Overload Alarm Contactor overload tripped Reset overload on contactor Pressure switch does not come with standard models 97 00046 000 22 A A pd User s Manual Rev A November 2015 M600 M400 Helium Compressor 6 3 5 1 Compressor Front Panel Fault Errors For the Model 600 Model 400 compressors that have digital electrical box configurations as shown in Figure 3 and Figure 4 the following errors can be displayed e System Error e Compressor Overload e Low Pressure e High Temperature e AC Power Phase Error e F13 F15 Fuse Blown e F16 F18 Fuse Blown e
55. ordance to the pressures found in Table 4 4 If the pressure is either too high or too low follow the instructions in Section 5 2 4 2 to add helium gas to the compressor Write the installation date and number of running hours if known on the decal provided with the replacement adsorber Re install the adsorber access panel that was removed in Section 8 3 1 Restart the compressor Unscheduled Corrective Maintenance The following corrective maintenance activities may be necessary should the helium gas circuit of the Model 600 Model 400 Helium Compressor becomes contaminated 8 4 1 Removing Helium Contamination Helium contamination is usually indicated by irregular noisy or intermittent operation ratcheting and sometimes the seizure of the coldhead or cryopump drive mechanism This is caused by the accumulation of frozen contaminants within the compressor load and resulting in interference The source of the helium contamination is due to either Inadvertent introduction of ambient air into the system o Use of helium with purity of less than 99 999 He 5 0 UH such as helium gas used for leak detection and welding 97 00046 000 38 4 A User s Manual Rev A November 2015 M600 M400 Helium Compressor Minor contamination can usually be removed by running the coldhead or cryopump for several hours to trap the contaminants in the coldhead cryopump then shutting down the compressor and immediately removing the helium lines at
56. pply Hot High Pressure Helium Oil Mix Low Pressure Helium Return Cooled High Pressure Oil Hot High Pressure Oil GD D je g 9 pd L KG Safety Relief Valve 375 PSIG 25 9 Bar PN 56123 Figure 21 M400 Air Piping and Instrumentation Diagram 43 X User s Manual Rev A November 2015 M600 M400 Helium Compressor Ki ETT E N N N NNN TH U UNANMMM n eM IM OVERALL DIMENSIONS IN CM Figure 22 M600 M400 Water Cooled General Dimensions 97 00046 000 44 4 User s Manual Rev A November 2015 M600 M400 Helium Compressor 26 90 68 32 OVERALL DIMENSIONS IN CM Figure 23 M600 M400 Air Cooled General Dimensions 97 00046 000 45 User s Manual Rev A November 2015 M600 M400 Helium Compressor Schematic EBOX LV M700 M600 M400 W LCD DISPLAY STD DRIVE 93 00100 009 Rev A Trilium US Inc Proprietary amp Confidential 98109919011 5 08102213 223 N IE CE d EE T Ee EP EE 3 3100279 990 DELER wa E a 3 m m2 wo a Ullal sTeTr a a yof abe CAB E O 8100017 003 Circuit Board n t BB BB IF i BB BB I BR LL EE L i vi g MOv2 CAB E 81 03018 003
57. pressor and the load simultaneously 3 For digital versions of the electrical box press the green ON button to start the compressor Both the compressor and its load should start simultaneously Note During initial start up the compressor internal relief valve may begin to Chatter This is a normal occurrence and should subside within a few minutes During operation check the operating pressure frequently Refer to Table 4 3 for required operating pressures If necessary stop the compressor and adjust the helium pressure see Section 5 2 4 2 If pressure drop off occurs frequently a substantial leak may be in the helium circuit In this case stop operation and contact Trillium US Inc Inc customer service immediately see Section 2 2 Note During shut down the compressor motor may reverse rotate as the pressures equalize internally through the scroll members of the motor This will cause the compressor to emit a shuttering sound This reversal of direction has no effect on the compressor durability and is entirely normal 4 Toshut down the compressor unit press the red OFF button on the front panel for digital electrical boxes or the main power switch for analog electrical boxes For water cooled units allow coolant to continue to circulate for at least 10 more minutes before shutting off flow 6 2 1 Cycle Times There is no set answer to how often the cryogenic compressor can be started and stopped in an hour Trillium US Inc In
58. r problem still persists after performing the corrective actions described in this section please contact Trillium US Inc Inc Technical Support for further assistance see Section 2 2 Table 7 1 Troubleshooting Procedures Corrective Action Possible Cause The compressor On Off switch SW1 is in the On position but will not start 97 00046 000 No power is coming from the power source Incorrect or disconnected wiring within the compressor Thermal protection switch TS1 and or TS2 is open Pressure protection switch PS1 or PS 2 is open High current has tripped the current overload relay Check service fuses circuit breakers and wiring associated with the power source Repair as needed Check the compressor wiring against the wiring schematic Confirm that switch TS1 and or TS2 is open Add Helium if the pressure is low remove Helium if the pressure is high Reset the current overload relay User s Manual Compressor stops after several minutes of operation and remains off Pressure switch does not come with standard models Rev A November 2015 M600 M400 Helium Compressor High temperature of the compressor caused by insufficient cooling most likely due to the ambient temperature being too high resulting in the opening of thermal protection switches TS1 and or TS2 Insufficient helium static pressure High temperature helium gas tripped the thermal protection switch
59. rd Drive Schematic 53 Figure 32 M600 M400 Fault Tree Compressor will Not Start Adsorber Replacement 54 Figure 33 M600 M400 Fault Tree Compressor Starts but Shuts Ont 55 Figure 34 M600 M400 Fuse Configurations Digital 56 Figure 35 M600 M400 Fuse Configurations Multi Drive enhn enne 57 Figure 35 99 00074 000 Tool Kit Contents sss ee ee eee 58 Figure 36 99 00074 001 Tool Kit Contents sees eee ee eee 59 List of Tables Table 2 1 Model 600 Helium Compressor Coldhead Compatibility sse esse sese se se eee Table 2 2 Model 600 Helium Compressor Cryopump Compatibility Table 2 3 Model 400 Helium Compressor Coldhead Compatibility Table 2 4 Model 400 Helium Compressor Cryopump Compatibility Table 4 1 Description of Model 600 Model 400 Helium Compressor Subsystems seen 5 Table 4 2 Power Requirements for Model 600 Model 400 Helium Compressor ssssssssesrseresseerressreses 7 Table 4 3 Model 600 Model 400 Helium Compressor Specifications sese eee e e ee e Re ee ee ee Re ee ee 7 Table 4 4 Model 600 Model 400 Helium Compressor Pressure Requirements eene 8 Table 4 5 Model 600 Model 400 Helium Compressor Ordering Information Table 4 6 Model 600 Model 400 Optional Accessories and Replacement Parts Table 6 1 J1 or J3 Remote Connector 25 Pin D Subl Table 6 2 Analog Remote Connector iss se eee eee Table 6 3 Remote Interface Input
60. s for Electrical Boxes Shown in Figure 3 and Figure 4 Table 6 4 Remote Interface Outputs for Electrical Boxes Shown in Figure 3 and Figure 4 Table 6 5 Operational Checks eerte eene ee sees Ee pn sana accu exu ed de ee end adem se dus Po di ee X GR Table 6 6 Serial Port Interface Pin Assignments eee eee eee eee eee T ble 6 7 Serial Port e T ori a Ete i Reip maa Table 6 8 Serial Port Commande Tabl 6 9 Data Message ss sessies EnEn SE eni ER des eb Geek Eed ee Goed vee ge ee god ge DE oe nen ER EG ES TNR Table 6 10 Command Data esse ee esse ee ee ee ee ee ee Re ee ee ee ee ee ee Re ee ee ee ee Re ee ee sitas a ee ee ee Re ee assa ee Ge ee Table 6 11 Error e lt N Es ees rer EEEE Ek GE OE Ee ee EG ee Ee En dee a e Se de Ee e LER ER Ee ie Table 6 12 USB Packet FOriTiat EA rene ER ER EE OE EG Table 6 13 USB Maintenance Interface Command Dis Table 6 14 ACK Payload Foflmat EE Nes erro nn GER BE Re one a ERG Gee Ge si tea ee Ne asa epar Pa EEN AG Ne Gee Rd Ge Dag Wese eek Table 6 15 NACK Payload Format Table 6 16 NACK Reason Codes Table 6 17 Get Status Payload Format Table 6 18 Status Response Payload Format Table 6 19 Get Fault History Payload Format Table 6 20 Fault History Response Payload Format Table 6 21 Fault Codes N EE EE EE N Table 6 22 Set Compressor Payload Format Table 6 23 Set Co
61. t the adsorber be replaced according to the recommended replacement interval found in Section 8 3 4 1 3 Description of Subsystems Along with the five main components Table 4 1 describes the subsystems that serve to monitor the operating condition of the compressor unit and ensure its safe operation Table 4 1 Description of Model 600 Model 400 Helium Compressor Subsystems Subsystem Name Function Purpose Monitors the phase of the input power Will not Phase rotation monitor ee A allow operation if the phase is incorrect An internal line break motor protector located in the center of the Y of the motor windings disconnects all three phases in case of an overload condition The internal protector protects against single phasing Internal line break motor protector Purpose Monitors system current Will turn off the Overload rela S y compressor if the current level exceeds the pre set value Purpose Monitors helium temperature upstream of the heat exchanger Safety Function Will turn off the compressor if the helium temperature gets above 210 F 99 C Thermal switch TS1 Purpose Monitors oil temperature downstream of the heat exchanger Safety Function Will turn off the compressor if the oil temperature gets above 122 F 50 C Thermal Switch TS2 Purpose and Safety Function Equalizes pressure within the compressor unit upon power interruption 97 00046 000 5 A A pd Unloading valve User s Man
62. the body of the coupling from its adapter during removal if optional installation kit purchased utilize the two wrenches from the kit 2 Hold 1 1 8 wrench tight on the coupling half attached to the adsorber 3 Use the 1 3 16 wrench to loosen and disconnect the coupling to the helium supply and OMS line Caution Detaching helium flex lines with the compressor load at low temperature i e without proper warming up can result in loss of helium and or pressure rise in the compressor unit beyond its designed maximum pressure level Note Unscrew the two self sealing coupling halves quickly to minimize minor gas leakage See Figure 17 for an illustration of the self sealing couplings 7 Remove the two screws that hold the adsorber to the bottom of the compressor chassis see Figure 14 8 Slightly pull the adsorber assembly towards the front Then tilt the assembly to remove it from the chassis see Figure 16 9 Remove the adsorber and save all nuts bolts and washers for installing the replacement adsorber 10 The removed adsorber can be returned to Trillium US Inc for credit Section 2 2 provides the contact information 97 00046 000 34 A A pd User s Manual 97 00046 000 Rev A November 2015 M600 M400 Helium Compressor Figure 12 Removal of Helium Supply Line Aeroquip at Access Panel User s Manual Rev A November 2015 M600 M400 Helium Compressor Figure 13 Adsorber Aeroquip Nut and Access Panel Removal
63. ual Rev A November 2015 M600 M400 Helium Compressor Subsystem Name Function Purpose and Safety Function Prevents oil migration when Cil check valve p N E power is off Cooling water flow meter water Purpose Allows a visual reference as to the current flow rate cooled model only of the cooling water Fuses Fuses for the coldhead drive circuit Fuses for the main input power Safety Function Over current protection Fuses for the control voltage See Table 7 2and Table 7 3 for fuse details Fuses for the fan motors Fuses for the main contactor coil Purpose and Safety Function Opens a shunt between the high and low pressure helium gas circuits Sets the proper operating pressure for the system regardless of the load Internal relief valve p ER T 8 Safety Function If the differential pressure exceeds a preset value this valve opens to allow safe operation Purpose and Safety Function Opens the helium gas circuit to External relief valve atmosphere if the helium gas pressure exceeds 430 PSIG 29 6 Bar 4 1 4 Operational Flow The flow diagrams for the Model 600 and Model 400 Helium Compressors are illustrated in Figure 18 thru Figure 21 The work flow of helium gas within the compressor follows these steps 1 High pressure helium gas is delivered from the compressor to the coldhead through the Supply helium flex line at a M600 260 280 PSI 18 19 3 Bar b M400 200 260 PSI 13 8 18 Bar 2 The heli
64. uire different accessories to be installed in line with the helium flex lines To connect these accessories follow the instructions listed above and any other applicable user manual associated with the accessory 5 2 5 Electrical Connection Caution Before connecting power to the compressor unit make sure the factory setting of the operating voltage matches that of the power supply where the unit is being installed Failure to do so will result in performance degradation of the system If the voltage of the power source is different from the factory default setting see Table 4 2 it may be necessary to change the tap settings on the 24VAC control transformer located inside the electrical box of the compressor for all configurations of the electrical box with the exception of that shown in Figure 3 and Figure 4 Follow the steps described below to make the change 1 Unscrew the two side panels of the compressor 97 00046 000 15 A A pd User s Manual Rev A November 2015 M600 M400 Helium Compressor 2 Unscrew the top wrap around cover of the unit Unscrew the electrical box cover 4 Change taps on the 24VAC control transformer to the setting that is closest to that of the power source illustrated in Figure 9 5 Put back and screw down the electrical box cover 6 Put back and screw down the panels and top cover of the compressor w Electrical connections are to be made in accordance with the schematics shown in Figure 24 thru Fi
65. um Return low pressure and Supply high pressure ports on the compressor front panel 2 Clearly mark the helium flex line that will be used to connect to the corresponding Supply and Return port on the cryopump or coldhead Note The helium flex lines are equipped with self sealing couplings which can be connected or disconnected without helium escaping Follow these steps to connect the helium flex lines 1 Unscrew the protective caps from the couplings and keep the caps for future use 2 Check the couplings for cleanness When necessary use lint free clean cloth or soft brush to clean the couplings 3 Check the self sealing connector flat rubber gasket to make sure that it is clean and properly positioned Replace any missing or defective seals 4 Use only the open wrenches supplied with the installation kit or equivalent wrenches For a coupling tighten with a 1 3 16 wrench and stabilize with a 1 wrench 5 Make the initial turns by hand and then use the wrenches until the fittings bottom out This is critical improper or loose connections will affect compressor function a Effective connections can be validated by confirming the leak rate is less than 1 x 10 mBar l sec If the flex lines need to be bent to a radius less than 8 20 cm then a 90 helium elbow needs to be installed Contact Trillium US Inc Inc using the contact information found in Section 2 2 Some installations may req
66. um Return Outlet Inlet ME p gt Cooled High Pressure Oil T e Hot High Pressure Oil Safety Relief Valve Le P4 375 PSIG 25 9 Bar PN 56123 97 00046 000 Figure 20 M400 Water Piping and Instrumentation Diagram 42 User s Manual Rev A November 2015 M600 M400 Helium Compressor He out at 200 260 psi 13 8 17 9 Bar TS1 He 210 F 99 C L M400 P amp ID Air Cooled pe Pressure Rev A NOT FOR PRODUCTION cx Fi November 2015 He Charge Vent Volume pon e 4 Aeroquip 83 T Tube T E Differential 2 Way direct acting t Jj Differential Fixed normally open 0 250 psi He In He in at Relief Valve 0 17 2 Bar RETURN 0 100 psi 270 psi 18 6 Bar Bypass Solenoid w Orifice 8 Aeroquip 0 69Bar PN 82 00009 001 orfice 1 8 to 3 32 PN 82 00089 000 Suction Helium Scroll Compressor Motor PN 29 00003 004 005 e ar Discharge Oil le Out to Pump He Oil Return ap bled EE ee 318 Aeroquip H L on Oil Charge H 1 Schrader Cool Air In H Orifice N i Valve 65 105 F OF H d CO BJ 18 3 405 0 z H Check Valve IN i Bo H PN H on Z i 28 00223 000 ER H Oil In d SS o eesesees w Weigel aa annis ai x CE EE Ge ne TERCER He In TS2 Heroi mix He In Supply Pressure 122 F 50 C Gauge d 0 600 PSIG Hot Oil Out He Out 0 41 4 Bar Air PN 10420 Out Y 97 00046 000 Cooled High Pressure Helium Su
67. um gas is then compressed during the compression stroke of the scroll motor 3 The cryopump then expands the helium gas to expand during its expansion stroke During this cycle of compression at the scroll motor and expansion in the cryopump the helium gas is forced through regeneration materials to increase the thermodynamic efficiency of the cycle 4 With each successive cycle the regeneration material becomes colder and colder Eventually the cryopump temperatures come down to cryogenic range 5 After expansion the helium gas returns to the compressor through the Return helium flex line at the pressure specified below to begin the cycle again a M600 50 100 PSI 3 4 6 9 Bar b M400 0 100 PSI 0 6 9 Bar 4 2 Specifications The Model 600 Model 400 Helium Compressor specifications are listed in Table 4 2 thru Table 4 4 97 00046 000 6 A A pd User s Manual Rev A November 2015 M600 M400 Helium Compressor Table 4 2 Power Requirements for Model 600 Model 400 Helium Compressor Rated O ti working Max Max Model RE El Voltage Freduensy Current Power Voltage VAC Range Hz Factory Default Setting VAC Draw A kW all models 200 230 180 253 60 3 25 7 8 M600 High Voltage 380 420 342 457 13 78 all models 440 480 396 528 60 3 13 78 M400 Low Voltage 200 180 220 21 7 0 all models 200 230 180253 60 3 21 7 0 M400 High Voltage 380 420 342 457 9 7 0 all models 440 480 396 528 60 3
68. up to three ways to issue commands in the Figure 3 and Figure 4 electrical boxes front panel buttons USB interface and the DB25 interface the control logic uses a last command approach based on state transitions The transition of shorting an input to pin 24 signals the controller to turn on the corresponding subsystem The transition of removing the short to pin 24 signals the controller to turn off the subsystem If the remote system intends to turn ona subsystem and the input is already shorted to pin 24 then the short must be removed for 100ms or more and then the short reapplied If the remote system wants to turn off a subsystem and the input is already open the pin must be shorted to pin 24 for 100ms or more and then opened again Table 6 3 Remote Interface Inputs for Electrical Boxes Shown in Figure 3 and Figure 4 SIGNAL SIGNAL DESCRIPTION Reset Short pin 3 to pin 24 for 3 seconds or longer to reset the control board processor Leave pin 3 open circuit floating for normal operation Coldhead Enable Short pin 4 to pin 24 to turn on the coldhead Open circuit pin 4 to turn off the coldhead Compressor Enable Short pin 6 to pin 24 to turn on the compressor Open circuit pin 6 to turn off the compressor 97 00046 000 20 A A E User s Manual Rev A November 2015 M600 M400 Helium Compressor 6 3 3 D Sub User Status For the Model 600 Model 400 compressors that have electrical box configurations as shown in Figure
69. voltage standard drive circuit Helium charge line 10ft adapter 1 4 female Aeroquip to 1 4 flare 7 S H D Shipping Platform and Crate Water Shipping Platform and Crate Air Cable Assy Remote Patch 25 Pin Male D Sub to 14 Pos Female Mil Custom Lengths Available Tool Kit Running Purge Decontamination 1 4 Male Aeroquip Ends see Figure 37 97 00046 000 Rev A November 2015 M600 M400 Helium Compressor Table 4 5 Model 600 Model 400 Helium Compressor Ordering Information Part Number 91 00019 000 91 00019 001 91 00019 002 91 00014 002 91 00014 003 91 00015 000 91 00060 000 91 00018 000 91 00018 001 91 00018 002 91 00016 002 91 00016 003 91 00016 004 Table 4 6 Model 600 Model 400 Optional Accessories and Replacement Parts 10346 HR 580 T MMF 80075 10359 10366 10134 Part Number 80 00005 000 10418 10 10144 10 99 00074 000 99 00074 001 47 00099 000 47 00100 001 47 00099 000 47 00100 002 81 00600 060 11 KE User s Manual Rev A November 2015 M600 M400 Helium Compressor 5 Installation 5 1 Safety Warnings Review the safety warnings in Section 3 before beginning any installation activities 5 2 Installation Steps 5 2 1 Unpacking and Inspection Once the equipment is received inspect the exterior of the shipping carton for any signs of damage Report any damage and file a claim with the shipping company immediately In addition
70. with the coolant specifications may result in serious damage to the compressor and may void the warranty on the unit Identify the inlet and outlet connection ports first before connecting the hoses The water supply line should be connected to the inlet port on the compressor An in line water particulate filter is recommended to prevent heat exchanger fouling Periodically check the coolant flow rate and temperature to ensure the proper operation of the compressor unit 5 2 4 2 Verifying and or Refilling Compressor with Helium Gas Caution All safety regulations related to handling pressurized gas cylinders must be observed Only use helium with 99 999 or better purity He 5 0 UH when performing refill operation The compressor should already be pressurized to 240 5 PSIG 16 5 35 Bar upon arrival However in the event that the static pressure is too low or too high steps shall be taken to restore the compressor to the proper helium pressure levels Examples of situations when the compressor may have lost some pressure include lost pressure due to connecting disconnecting helium flex lines or after certain maintenance clean up procedure Therefore prior to each operation of the compressor verify that the helium pressure inside the compressor is at the proper levels as stated in Table 4 3 If the pressure is outside of the required limits follow the appropriate steps below Pressure should also be checked after the compressor has

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