system ENV - Piezosystem Jena
Contents
1. system and ENV 800 system 300 and system 800 high dynamic piezo amplifier In all systems of the amplifier series ENV 300 and ENV 800 a protection circuit is implemented which protects from high volt age spikes when the unit is turned on and off The new soft start ensures an actuator safe activation of the system The ENV 300 and ENV 800 amplifiers are also available with integrated sensor con troller for strain gage measurement system as well as capacitive measurement system These systems are marked with suffix SG CAP CLE electronics analog modular system ENV VV options m automatic closed loop on function by switching on the whole system Order information If using more than one ENV 300 high power amplifiers or at least one ENV 800 casings with active cooling are necessary see page 72 for part number technical data ENV 300 ENV 300 SG ENV 300 CAP ENV 300 CLE ENV 300 ENV 300 ENV 300 ENV 300 nanoX nanoX SG nanoX CAP nanoX CLE part no E 270 000 E 270 100 E 270 600 E 272 000 E 278 000 E 278 100 E 278 600 E 278 700 display LCD 3 5 digit sensor controller strain gage capacitive strain gage strain gage capacitive strain gage capacitive Capacitive output voltage 20 130V 20 4130V 20 4130V 20 4130V 20 4130V 20 130V 20 4130V 20 130V output current continuous 300mA 300mA 300mA 300mA 2x150mA 2x150mA 2x150mA 2x150mA voltage noise lt2. notch filter low pass filters integrated m digital control of piezo actuating systems in industrial and laboratory settings mani UEA m for automatic control of high resolution m nano positioning applications function generator sine triangular square function sweep 10 30VDC max 2 5A connector main supply low voltage socket with 2 1mm pin The diagram shows the typical frequency which can be reached as a func tion of the capacitance of the piezoelectric actu ator and the driving volt age by an output current of 50mA aumpul volage The amplitude is reached with a THD Total Harmonic Distortion of lt 1 frequease fiel www piezojena com 87 The new digital generation of piezo con trol ers of piezosystem jena combines the highest positioning accuracy with a unique handling comfort This means that all features can be controlled via PC and the main functions can be di ect y regulated on front panel Moreover the actuators are now separable and interchangeable ASC function We also implemented free ad ust able features such as slew rate notch filter frequency and low pass filter frequency technical data part no EVD 50 OL E 720 100 A built in function generator offers sine triangular and square functions as well as noise and sweep A unique feature of the d Drive system is that it can be used in combination with strain gage or capacitive feed back sensors with o
3. 10 150V 10 150V 10 150V output current continuous 40mA 40mA 40mA voltage noise lt 0 3MVpys 500Hz lt 0 3MVpys 500Hz lt 0 3MVpys 500Hz connector output voltage LEMO 08 302 LEMO 08 302 LEMO 08 302 DC voltage offset 3 4 turn potentiometer 3 4 turn potentiometer 3 4 turn potentiometer modulation input SMB connector 0 10V 0 10V 0 10V input impedance 10k 10k 10k monitor output 1 15V 19 OL 13V OL SMB connector 0 OVCE oTov Cin monitor output impedance typ 100kQ 10kQ 10kQ connector sensor z LEMO 08 304 LEMO 08 650 width A PID controller is used for the position control A very compact attachable printed circuit board processes the analog signals for the integrated capacitive or strain gage measurement systems applications m automation systems m operation with low dynamics m precision adjustment in labs and industry The diagram shows the typical frequency which can be reached as a function of the capacitance of the piezoelectric actuator and the driving voltage by an output current of 40mA The amplitude is reached with a THD Total Harmonic Distortion of lt 1 6TE SMB plug available with part no Z 006 70 please see chapter accessories OL open loop CL closed loop f 4pF PAi O TopF Pian Fblpr Pii BaF PH TOF jraneSeao0 94 aF iPZ400 Ze piezojena com 75 piezosystemjena
4. LEMO 08 302 LEMO 08 302 LEMO 08 302 LEMO 08 302 ODU3pin nanoX ODU3pin nanoX ODU3pin nanoX ODU3pin nanoX ODU3pin nanoX ODU3pin nanoX DC voltage offset 20 130V 20 130V 20 130V 20 130V 20 130V 20 130V modulation input BNC connector O EOV O 10V 0 10V 0 IOV 0 10V Ore OW MOD input impedance 10kQ 10kQ 10kQ 10kQ 10kQ 10kQ monitor output BNC connector 2 13V 2 13V 2 13V Oar OVA Oe 10V 0 2F10Ve monitor output impedance typ 100KQ 100KQ 100KQ 500 500 500 connector sensor ODU4pin ODU4pin ODU4pin type of casing screw slot 19 rack mount stand alone screw slot 19 rack mount stand alone dimensions I x w x h mm 235 5x130x85 7 16TEx3HE 235 5x105x85 7 235 5x130x 85 7 16TEx3HE 235 5x105x 85 7 weight 1 6kg 1 6kg 1 6kg 1 6kg 1 6kg 1 6kg special features short circuit proof short circuit proof short circuit proof short circuit proof short circuit proof short circuit proof soft start soft start soft start soft start soft start soft start main supply 10 30VDC 10 30VDC 10 30VDC 10 30VDC 10 30VDC 10 30VDC max 5A max 5A max 5A max 5A max 5A max 5A connector main supply with 2 1mm pin low voltage socket low voltage socket low voltage socket with 2 1mm pin with 2 1mm pin low voltage socket with 2 1mm pin low voltage socket low voltage socket with 2 1mm pin with 2 1mm pin CL closed loop E 468 xxx all actu
5. able output current of 300mA this amplifier can be used especially for driving standard systems in very high frequency applications A main supply voltage from 10V to 30VDC enables the new 30V300 for universal use The casing is available as a screw slot versi on see picture or for in a 19 rack mount Casing It is compact robust and mountable in many different manners and most importantly is it high reliability The outstanding performance of the 30V300 guarantees high speed positioning with the highest accuracy available The high output current of 300mA allows dynamic use of actuators with a higher capacitance Rise time and frequency response can be precisely adjusted for each application The 30V300 CLE works with positioning sensor closed loop and without sensor open loop as well applications m driving piezo elements m OEM applications technical data 30V300 30V300nanoX 30V300 CLE 30V300nanoX CLE part no E 460 011 E 460 012 E 460 013 E 460 111 E 460 112 E 460 113 channel 1 1 1 1 1 1 display no no no no no no sensor controller no no no yes yes yes output voltage 20 130V 130 20V for nanoX actuators output current continuous 300mA 300mA 300mA 300mA 300mA 300mA nanoX 2x150mA nanoX 2x150mA nanoX 2x150mA nanoX 2x150mA nanoX 2x150mA nanoX 2x150mA voltage noise kus 500Hz2 lt 0 3mV lt 0 3mV lt 0 3mV lt 0 3mV lt 0 3mV lt 0 3mV connector output voltage LEMO 08 302 LEMO 08 302
6. list of commands No additional manual or analog inputs are necessary The simple connection via USB to a PC allows for a fast implementation of high precise positioning tasks at every work place OEM piezo amplifier OEM system modular system matic Auto s an eee ntification l Sensor Ide I ASC Automatic System Calibration electronics digital OEM m 1 channel digital amplifier m for all kinds of closed loop sensors m power supply 10 30VDC m 20 bit resolution oversampling m 64 MHz processor m built in wave function generator programmable iA The line of digital piezo amplifiers d Drive of piezosystem jena is extended by the OEM amplifier module 30DV50 This amplifier was designed for use as a single unit in industrial settings It is compact robust and mountable in diffe rent manners and it is highly reliably The 30DV50 was designed for universal use with a main supply vol age from 10V to 30VDC The casing available as screw slot version see picture or for use in a 19 rack mount Casing Piezo actuators can be controlled in three 30DV50 P different ways m by using the potentiometer on the front panel technical data OEM amplifier 30DV50 m via analog signal 0 10V part no E 754 300 m via PC Interface channels 1 display no processor 64MHZ 32bit floating point DSP The 30DV50 comes with an Automatic resolution oversampling 20bit servo rat
7. s system enables a variety of applications Special circuits are integrated to protect the piezo element from voltage spikes and exces sive voltages nano box USB E 320 00 output voltage 0 150V On 150V 0 130V output current continuous 10mA 8mA 10mA connector output voltage LEMO 08 302 LEMO 08 302 LEMO 08 302 voltage noise kus 500Hz2 3mV 3mV 3mV modulation input 0 5V 0 5V z BNC connector input impedance 10kQ 5kO dimensions I x w x h 80x55x20mm 130x55x24mm 95x55x25mm weight 150 g 159 175g USB interface USB 2 0 integrated saw tooth 2 35HZz generator 0 150V fixed duty cycle 50 main supply 5VDC 9VDC 24VDC connector main supply bare wires DC connector 2 4mm DC connector 2 1mm The diagram shows the typical frequency which can be reached as a function of the capacitance of the piezoelectric actuator and the driving voltage by an output current of 10mA The amplitude is reached with a THD Total Harmonic Distortion of lt 1 5V10 piezojena com nano box An easy to use electronic system which also features an integrated function generator The frequency is manually adjustable in a small range The potentiometer is used to adjust either offset or frequency nano box USB USB devices are being used more frequently in lab type environments plezosystem jena now offers analog amplifier with 16bit D A resolution and a USB 2 0 interface with a capable
8. spikes when the unit is turned on and off ENV 40 nanoX SG E 248 100 ENV 40 nanoX CAP E 248 600 LCD 3 5 digit strain gage Capacitive strain gage Capacitive 10 150V 10 150V 10 150V 10 150V 10 150V 40mA 40mA 2x40mA 2x40mA 2x40mA lt 0 3MVrus 500Hz LEMO0S 302 LEMO0S 302 ODU3pin ODU3pin ODU3pin adjustable via potentiometer OHO OV HOV o o o 10v 10KQ 10KQ 10KQ 10KQ 10KQ 13V OL 13V OL 1 15V 13V OL 13V OL 0 410VCL 0 410V CL 0 410VCL 0 410V CL 10kQ 10kQ 100k 10kQ 10kQ _LEMO 0S 304 LEMO 0S 650 E LEMO 0S 304 LEMO 0S 650 20TE 20TE 14TE 20TE 20TE For open loop systems the output voltage is dis played in a 10 1 1 15V ratio For closed loop systems the adjusted sensor signal is available The monitor output voltage is 0 10V for 0 100 of closed loop motion 74 www piezojena com OL open loop CL closed loop options Automatic closed loop on function by switching on the whole system O d4pF Padi DTaP Pijan F AlpF IP ic LMF PSH 7 2OyF manawa 14 20uF iPZ400 21 bOuF MIPCSEDo The amplifier module ENV 40 nanoX was especially developed for the high load ultra fast positioners of the series nanoX The special amplifier provides an output signal in the plus minus range to realize the bi direc tional motion of the nanoX systems The ENV 40 amplifier is also a
9. switch S1 is in position 2 and has to be switched to position 1 Reset the interface card afterwards If the terminal shows no response the following points should be checked m is the EDA the ENV System switched on m is the RS232 Connection between PC and interface card established m is the configuration of the RS232 Connection ok m were the appropriate COM parameters chosen The 19 casing allows the card to be inter changeable with any other analog amplifier component from piezosystem jena and can be incorporated in other electronics without any problems 78 www piezojena com electronics analog modular system ENV interrace DOaras series The EDA interface modules are universal I O boards designed as a 19 slot card The modules provide analog input and digital I Os used for recording measurement signals or operating additional electronics With additional software the programming of spe cial scan functions is very easily The main advantages of these modules are the built in micro controller and a free pro grammable memory capacity The micro controller is capable of input and output pro cedures or voltage values programmed in the memory The EDA modules can also work as a normal PC line operated system directly from the PC All EDA 4 and EDA 5 interface cards have the same features The EDA 5 also has an IEEE 488 2 interface general remarks Piezo electrical systems and their electr
10. voltage connector voltage connector same type of actuator and use it with the same dimensions I x w x h 240x210x88mm_ 240x210x88mm 240x210x88mm 240x210x88mm amplifier Actuators for an ASI compatible weight 2 1kg 2 1kg 2 1kg 2 1kg amplifier are equipped with an external pre main supply 24VDC 2 5A wide range power supply 90 264VAC included amplifier l New calibration is no longer necessary valid ERE Dbi IPA only for standard calibration i se C 7OuF PHEN Li Px iy 250pF P Fap inanim 14 20 IPZ400 21 Ou MIPO SS The diagram shows the typical frequency which can be reached as a function of the capacitance of the piezoelectric actuator and the driving voltage by an output cur rent of 40mA The amplitude is reached with a THD Total Harmonic Distortion of lt 1 output voltage Y frequency Hz www piezojena com 81 electronics analog OEM and 24V40 12V40 The voltage amplifier 12V40 is well suited for low voltage piezo elements Two different types of casings are available The amplifier requires only 12VDC for supply It can be controlled via MOD input front or backside The output voltage or sensor signal can be supervised on the monitor output Special circuits are integrated to protect the piezo element from voltage peaks and too high voltages Due to very low voltage noise of only 0 3MVeays 500HZz this amplifier is well suited for sub nm positioning t
11. 0 3MVpys 500Hz connector output voltage LEMO 08 302 LEMO 08 302 LEMO 08 302 LEMO 08 302 ODU3pin ODU3pin ODU3pin ODU3pin DC voltage offset adjustable via potentiometer modulation input BNC connector 0 10V oT HOV 0 10V 0 10V ORION 0 10V 0 10V Or OV input impedance 10kQ 10kQ 10kQ 10kQ 10kQ 10kQ 10kQ 10kQ monitor output BNC connector 2 ISV HOVOR 13V OL HVOR 2 13V 13V OL HOVO HOVO 0 10V Ce 102s OV CL 10r 10V CL 0 110 Gla ca10 10V Cl 10 10V Clem monitor output impedance typ 100kQ 500 500 500 100kO 500 500 500 connector sensor LEMO 0S 304 LEMO 0S 650 ODU4pin LEMO 0S 304 LEMO 0S 650 ODU4pin width 14TE 20E 20TE 20TE 14TE 201E 20TE 201E special features soft start overvoltage protection temperature rise protection short circuit proof closed loop mode selectable via button optional auto closed loop on function part no Z 300 70 closed loop systems optional optimization of the PID parameter load dependent by the supplier For open loop systems the output voltage is displayed on MON in a 10 1 2 13V ratio For closed loop systems the adjusted sensor signal is available GTOF Pao ianpr 0x iih 504F PSHE tgpi irani 14 40pF iF A 100uF MwPoSsom E The monitor output voltage is 0 10V for 0 100 of closed loop motion OL open loop CL closed loop The diagram shows the typical frequency which can be reached as a function of the ca
12. BNC connector 0 410V 0 10V 0 10V 0 40V 0 40V 0 10V 0 10V 0 10V input impedance 10kQ 10kQ 10kQ 10kQ 10kQ 10kQ 10kQ 10kQ monitor output BNC connector 2 13V sI OLS 13V OL HSV OR ZEV KPV OR HVO 13V OL 0 10V CL 10 410V CL 10 10V CL 0 40V Cl 0 10V CLAE ORO CL monitor output impedance typ 100kQ 500 500 500 100kO 500 500 500 connector sensor 2 LEMO 0S 304 LEMO 0S 650 ODU 4pin E LEMO 08 304 LEMO 0S 650 ODU4pin width 14TE 201E 20TE 20TE 14TE 20TE 20TE 20TE special features soft start overvoltage protection temperature rise protection short circuit proof closed loop mode selectable via button optional auto closed loop on function part no Z 300 70 closed loop systems optional optimization of the PID parameter load dependent by the supplier For open loop systems the output voltage is displayed on MON in a 10 1 2 13V ratio For closed loop systems the adjusted sensor signal is available The monitor output voltage is 0 10V for 0 100 of closed loop motion OL open loop CL closed loop The diagram shows the typical frequency which can be reached as a function of the capacitance of the piezoelectric actuator and the driving voltage by an output current of 800mA Pr narod Bo The amplitude is reached with a THD aa Pz oF mros Ao Total Harmonic Distortion of lt 1 pa piezojena com 77 electronics ana
13. Q monitor output 0 10V Ois OV FIO Or OV monitor output impedance typ 50Q 500 500 500 connector modulation monitor SUB D 9pin SUB D 9pin SUB D 9pin SUB D Qpin 3HE 10TE 3HE 10TE 3HE 20TE 3HE 20TE dimensions special features no of amplifiers served interface EDS1 EDS2 display ASI function Automatic Sensor Identification The ASI function allows you to exchange the same type of actuator and use it with the same amplifier Actuators for an ASI compatible amplifier are equipped with an external preamplifier New calibration is no longer necessary valid only for standard calibration 6 RS232 USB overtemperature protection short circuit proof slew rate notch filter low pass filter integrated function generator sine triangular square function ASI function Automatic Sensor Identification ASC function Automatic System Calibration flies RS232 USB Tee uae RS232 USB RS232 USB yes the menu based user interface allows the control of the system without a PC as stand alone device ASC function Automatic System Calibration In addition to the ASI function ASC provides even more functionality for our customers The integrated circuit built into a closed loop actu ator contains also the parameters for its calibration and other information such as motion m name m axis m serial number PID control and filter setting Thus the electronics can identify not only t
14. anpiay D sensor controller strain gage strain gage to the DC Level The position of the actuator 7 e capacitive capacitive or the value of the output voltage signal can output voltage 20 130V 20 4130V 20 130V 20 130V be examined via the monitor output output current continuous 3x40mA 3x40mA 1x120mA 1x120mA For computer control the piezo amplifier voltage noise lt 0 3MVays 500Hz comes with an RS232 and USB interface as connector output voltage SUB D 15pin SUB D 15pin SUB D 15pin SUB D 15pin well All parameters of the commands are per channel per channel scaled with 16bit resolution All settings and DC voltage offset via encoder via encoder via encoder via encoder readings of values can be done directly by modulation input 0 F10V 0 10V om HION 0 10V PC All commands are given in the user input impedance 10kQ 10kQ 10kQ 10kQ manual All im portant user information like manitor up E o Di S aes ETIO oF monitor output impedance typ 1000 1000 1000 1000 position value applied voltage signal and i l i connector modulation monitor SUB D 25pin SUB D 25pin SUB D 25pin SUB D 25pin a moaye by a OVGA interface USB RS 232 USB RS232 USB RS232 USB RS 232 color display on the front panel command parameter resolution 16bit 16bit 16bit 16bit connector sensor via SUB D 15pin _ via SUB D 15pin ASI function Automatic Sensor Identification output output The ASI function allows you to exchange the
15. are scaled part no E 101 73 230VAC version E 101 74 115 VAC version E 101 75 95 VAC version with 16bit resolution Easy programming can be done via the Terminal Program All commands are given in the user manual MEN MIS A driver for Labview is available display LHe aul Using integrated measurement sys ms sensor controller strain gage capacitive such as strain gage or capacitive systems l output voltage see Oe makes it possible to get a typical accuracy ae ent continuous SUS of 0 05 of the full motion The NV 40 1 voltage noise lt 0 3MVrmus 500Hz CLE is able to control piezo elements with connector output voltage EEO UE Ue both types of feed back sensors inside DC voltage offset 10 turn potentiometer when the element is equipped with an modulation input BNC connector 0 10V external sensor signal preamplifier sig input impedance 10kQ nified by the suffix E at the actuator part monitor output closed loop on BNC connector 0 10V number monitor output impedance typical 1000 interface RS 232 command parameter resolution 16bit connector sensor ODU4pin dimensions I x w x h 200x170x70mm weight 1 6kg 80 www piezojena com O d4pF iPad O TopF Puan S Alpr Pa ice 2 80uF PHJ J Fp mahosini E 4 40uF iP2400 Og MIPS SES g The diagram shows the typical frequency which can be reached as a function of the capacitance of the piezoelectric actu
16. asks All connections are also available on the backside thus this amplifier can easily be integrated as an OEM product The amplifiers of the series 12V40 are also available with a supply voltage of 24V The special part number for the 24V versions are given in the table of technical data below technical data PANE TH PANE TH 12V40 SG 12V40 SG 12V40 CLE part no E 440 011 E 440 012 E 440 111 E 440 112 E 440 711 display no no no no no sensor controller strain gage strain gage strain gage capacitive output voltage 10 150V 10 150V 10 150V 10 150V 10 150V output current continuous 40mA 40mA 40mA 40mA 40mA voltage noise kus 500Hz2 lt 0 3mV lt 0 3mV lt 0 3mV lt 0 3mV lt 0 3mV connector output voltage LEMO 08 302 LEMO 08 302 LEMO 08 302 LEMO 08 302 LEMO 08 302 DC voltage offset modulation input 3 4 turn potentiometer 3 4 turn potentiometer 3 4 turn potentiometer 3 4 turn potentiometer 3 4 turn potentiometer front SMB connector 0 10V 0 10V 0 10V 0 10V 0 10V back 0 10V 0 10V 0 10V 0 10V OHIO MOD input impedance 10kQ 10kQ 10kQ 10kQ 10kQ monitor output front SMB connector 1 15V ATIS5V 0 10V oT t10 0 10V back oH OHIO On OV Om 10 0 10V MON output impedance typ 100kQ 100kO 100kQ OL 100kQ OL 100kQ OL 500 CL 500 CL 500 CL connector sensor LEMO 0S 304 LEMO 0S 304 ODU4pin type of casing screw slot plug in screw slot plug in s
17. ator and the driving voltage by an output cur rent of 40mA The amplitude is reached with a THD Total Harmonic Distortion of lt 1 table top moaqauiar system ENV table top e ectr 0 n j G OEM piezo amplifier FASI Autom itcation and NV 120 1 The NV 40 3 and NV 120 1 are a three and m compact one channel piezo amplifier built in a compact m computer interface table top unit The continuous output current is RS232 USB 40mA for NV 40 3 and 120mA for NV 120 1 Biases COP open loop operation for The max voltage is 130VDC strain gage and The amplifier is built in two different versions Capacitive feed The NV 40 3CLE and NV 120 1CLE are the heen T c enpa ele amplifier units for piezo elements ie ae 190 1CLE with an integrated feedback measurement only system for strain gage or capacitive sensors modulation input This provides highest precision in positioning monitor output The open loop version is named NV 40 3 m soft start function and NV 120 1 and can operate in open loop incr eased PZT mode only NV 40 3 CLE Fh The output voltage can be adjusted manually i by an offset incremental encoder on the front A piezosystemjena i panel External control can be done by an technical data NV 40 3 NV 40 3 CLE NV 120 1 NV 120 1 CLE analog voltage signal is 0 10V applied to partig o oe pee Hie r o MOD input aes 3 3 1 1 The external offset signal is effectively added ol ue coom
18. ator types with bidirectional level transmission design e g nanoX400 84 www piezojena com 30V300nanoX 30V300 CLE The diagram shows the typical frequency which can be reached as a function of the capacitance of the piezoelectric actuator and the driving voltage by an output current of 300mA The amplitude is reached with a THD Total Harmonic Distortion of lt 1 output voltage v electronics analog OEM O 38uF Pa TOF Puin aor Pig 2 50yF PSH T 20uF nen Skoog id afr P2400 27 00pF APIS 10000 i ie OEM piezo amplifier HMIVUUldal SYOtCiil INV table top OEM piezo amplifier closed casing main supply voltage 10 30VDC 300mA output current permanent closed loop version available different casing designs available S 3 a D O N Q www piezojena com 85 plezosystemyjena electronics analog OEM system and nanox box USB m channel low cost amplifier m miniature amplifier for low voltage piezo elements m DC supply voltage m low power m small size casing 5V10 E 304 10 nano box E 310 00 OEM amplifier part no nano box V710 nanox Dox 5V10 The OEM amplifier 5V10 has been developed for bimorph and low voltage piezo elements The design and construction provides a flex ble alternative in electronic drives and control systems The easy adaptation of the output voltage and current to customer
19. crew slot dimensions I x wx h mm 181x130x45 181x105x47 35 181x130x45 181x105x47 35 181x130x45 special features power on delay overdrive protection power on delay overdrive protection power on delay overdrive protection power on delay overdrive protection power on delay overdrive protection main supply 12VDC 12VDC 12VDC 12VDC 12VDC version 24V40 part no E 440 031 E 440 032 E 440 131 E 440 132 E 440 732 main supply 24VDC 24VDC 24VDC 24VDC 24VDC OL open loop CL closed loop 82 www piezojena com OEM piezo amplifier electronics analog OEM eee system and 24V40 m closed casing m 12V or 24VDC power supply excellent cost effectiveness small dimensions closed loop version available casing design changeable between screw slot and 19 plug in version 12V40 SG piezosystemjena 105 Tp T lt 7 Eier 165 T 12V40 E 440 011 The diagram shows the typical frequency which can be reached as a function of the capacitance of the piezoelectric actuator and the driving voltage by an output current of 40mA The amplitude is reached with a THD Total Harmonic Distortion of lt 1 www piezojena com 83 electronics analog OEM DVO DV300nanoxX The line of OEM piezo amplifiers from piezosystem jena has been extended by the OEM amplifier 30V300 With its remark
20. e 20usec Sensor Identification ASI and an Auto matic System Calibration ASC These are new functionalities of piezo electrical systems from piezosystem jena for auto matic sensor identifier and exchangeability of single parts of the system actuator or electronic without new calibration proce dure For further Information please see page 88 or the general remarks page 5 A unique feature of the 30DV50 is that it can be used in combination with strain gage or Ca fa ative feed back sensors without additio nal modification The DSP digital signal pro cessor runs at 64MHz sensor controller controller output voltage output current continuous voltage noise connector output voltage DC voltage offset modulation input input impedance monitor output monitor output impedance typical connector modulation monitor interface dimensions I x w x h weight Capacitive strain gage PID digital with DSP low pass notch filter 20 130V 130 20V for nanoX actuators 50mA 2x50mA for nanoX actuators lt 0 3MVpys 500Hz SUB D 15pin 20 130V adjustable on front panel or via interface 0 10V programmable slew rate 25kO 0 10V 500 SUB D 9pin RS232 230x130x86mm 1 6kg special features short circuit proved overtemperature protection ASI function The sampling rate is only 20usec AutomaticSensor Identification ASC function Automatic System applications Calibration slew rate
21. electronics analog modular system ENV EA T piramaparrmes a ai EWT ied FY ENT 400 casings for system ENT ENV EDA width part no 42 TE casing 42 TE E 103 97 ENV casings 42 TE casing with cooling 42 TE E 103 951 63 TE casing Bove E 103 90 63 TE casing with cooling 63 TE E 103 901 84 TE casing 84 TE E 103 91 84 TE casing with cooling 84 TE E 103 911 84 TE rack casing 84 TE E 103 92 84 TE rack casing 375mm 84 TE E 103 921 84 TE double high casing 2x 84 TE E 103 94 rack s s rack casing mounting angles dimensions 84 TE rack i 84 TE rack 84 TE double high width mm 265 373 480 483 483 480 depth mm 343 343 343 21 2 STO 343 height mm 158 158 158 133 13 290 1 TE 5 08 mm casings with active cooling are necessary for high power amplifiers when using more than one ENV 300 or at least one ENV 800 systems We strongly recommend active cooling if the output current of all ENV modules is beyond 300mA rack mounting angles available upon request ENT system main supply modules ENT 40 20 ENT 400 main voltage module width output power supply frequency ENT 40 20 230V 14TE 25W 50 60Hz E 103 13 ENT 40 20 115i 14TE 25W 50 60Hz E 103 14 ENT 400 115V 230V 100W 50 60Hz E 103 33 The main supply module ENT 40 20 can be operated with up to four modules ENV 40 but no module ENV 300 The main supply module ENT 400 can be operated with up to two
22. etting option 0 44pF P d eo ER k o FopF iP Lan i ie S A 1e0pr Pati i l 7 80pF iP SH 3 eed TE 5 ek F atpF inanga kati 100 A EA EA oe S E 14 40uF P2400 20m MIPS SO The diagram shows the typical frequency which can be reached as a function of the an capacitance of the piezoelectric actuator output voltage v 5 and the driving voltage by an output 40 current of 50mA 20 The amplitude is reached with a THD Total Harmonic Distortion of lt 1 Dd frequency Hz piezojena com 89
23. face resolution 16bit 16bit sample rate 32 ksamples s 32 ksamples s number of analog outputs 4 4 inputs 8 8 number of digital outputs 8 TTL HCT573 8 TTL HCT573 inputs 8 as analog inputs 8 as analog inputs programmable programmable 0 5V 10bit 0 5V 10bit output voltage range 0 10V 0 410V size 100x160mm 100x160mm width 6TE 10TE 30 9 03 o4 05 06 07 t sex 08 O05 G 01l z Figure 1 www piezojena com 79 plezosystemyjena electronics analog table top VAY At compact one channel piezo amplifier computer inter face RS 232 closed loop open loop operation for strain gage and capacitive feedback sensors memory function modulation input monitor output technical data NV 40 1 CLE NV 40 1 CLE The NV 40 1 CLE is a standard one chan nel piezo amplifier with a permanent out put current of 40mA The max voltage is 150VDC The amplifier is built as a com pact table top unit for laboratory use mainly Different ver sons for main supply vol tae of 95V to 230V are available The output voltage can be adjusted manu ally by an offset potentiometer on the front panel A BNC connector is located on the front panel for external control by an analog volt ae signal from 0 10V The external offset signal is effectively added to the DC level The third way for control is given by the RS 232 interface on the back panel All parameters of the commands
24. he actu ator but also its calibration data The actuator can be used with a different type of electronic without needing to be recalibrated The new system works immediately and at its peak performance Another significant advantage is the full function generator setup The full function generator setup contains standard values for amplitude offset fre quency and so on All of this information is stored inside an id chip that is located on the actuator s connector The setup is immedi dely active again after switching on the electronic 88 www piezojena com OEM system modular system electronics digital modular system J Drive automatic sensor identification ASI function available for open loop and closed loop m power supply 90 264VAC 50 60 Hz 20usec servo rate interface with or without display 20 bit resolution oversampling d Drive up to 300mA output current closed loop settings possible by customer m notch filter m programmable E i plezosystemjena digital electronics principle of function built in wave moniter function generator output analogue digital input position command analogue input piezosystem jena provides demo software fast and easy remote control of the system for controlling the d Drive system All functions are available as backup function picture the software remoteDrive allows as well as default s
25. ing The casing can be delivered as a 19 rack mount Depending on the application sever al amplifier modules can be combined with one power supply module ENT into one casing The input and output connections the dis play and the potentiometer for manual control are on the front side of each ENV module www piezojena com 73 plezosystemyjena electronics analog modular system ENV m 40mA perma nent current 19 module for ENV systems OEM version EVEUET 6 low voltage noise static and dynamic applications technical data ENV 40 part no E 103 10 display sensor controller output voltage 10 150V output current continuous 40mA voltage noise connector output voltage LEMO 08 302 DC voltage offset modulation input BNC connector 0 10V input impedance 10kQ monitor output BNC connector 124 15x monitor output impedance typ 100kQ connector sensor width 14TE ENV 40 SG ENV 40 SG E 240 100 ENV 40 OF E 103 60 ENV 40 nanoX E 248 000 system 40 adjustment with highest resolution The amplifier system 40 was developed for static and low frequency applications The system has very low noise characteristics typ 0 3 MVkms 500 Hz and thus provides resolutions in the nm and sub nm range In all amplifier systems of the series ENV 40 a protection circuit is implemented which protects from high voltage
26. log modular system ENV Dy INtEerace DOaras series EDA the interface board with microcontroller The EDA interface boards have eight analog inputs and four analog outputs as well as eight digital in and outputs It is well suited to the automa ton of positioning processes the programming of specific scan functions data acquisi ton and the control of any analog system The card comes with demo software pro wding different functions and a monitor program for monitoring the in and output data Programming of useful functions can be easily done by using the demo software as well Please see the first steps of programming below The full description can be found in the user manual of the EDA or please ask our office for further assistance After starting the demo program for the first time parameters and possible settings are set by default The language setting adjusts to the language of the operating system In case of the PC system language is diffe r t from German or English the program language is set to English The subroutine Voltage Way is activated The interface is specified as RS232 on COM1 with 9600 Baud If COM 1 is not accessible an error is prompted and the menu Settings opens The settings have to be adjusted After changing to the subroutine Terminal the EDA should use the prompt EDAn Vn nnn S0 gt In the case where the system replies URL Vn nnn 1 gt the function
27. modules ENV 300 or one module ENV 800 72 www piezojena com electronics analog modular system ENV applications m multi axes actuator m high frequency applications ENV 300 and above m automated processes in engineering precision alignment in optical applications The amplifier system ENV is a modular system with a 19 casing In special appli cations it is possible to combine one or more amplifier modules with different charac teristics Each amplifier module has its own display which shows the output voltage If used with a measurement system and closed loop module it displays the cali brated motion Different modules for closed loop and PC connections are available system 40 adjustment with highest resolution The amplifier system 40 was developed for static and low frequency applications The system has very low noise characteristics typ 0 3 MVpyg 500 Hz and thus provi de resolutions in the nm and sub nm range ENV system system 300 flexible system for higher dynamic work The amplifier system 300 was developed for dynamic applications of piezoelectrical ele ments For example it allows the use of the PZ 100 positioning system with frequencies of approximately 500HZz at full amplitude The system was designed using a modern electronic concept to reach the same noise characteristics of the system 40 This allows the system 300 to be used in dynamic appli cations for positioning purp
28. onics work with high voltages and high currents Please consider the advices and rules for safety Please read our manual and the ad vce given in the piezoline download file applications m PC control of analog amplifiers m automatic process control specifications input voltage range 0 to 10V power supply digital 5V 100mA power supply analog 15V 15mA Figure 1 shows motion of a piezo element with an inte gated capacitive sensor The TRITOR is controlled by an EDA 4 interface card with a resolution of 16 bit Because of the high resolu ton of the Capacitive sensor the minimal step of 1 2nm 16 bit resolution corresponding to a motion of 80um in closed loop mode can be resolved easily modular system ENV modular system ENV table top OEM piezo amplifier LZ m LED indicating the active channels function can be changed by programming the FLASH EPROM m switch can be programmed for stand alone work m reset switch m universal AD DA interface boards 4 channel DAC 8 channel ADC 16 bit 6n 8 bit uP 64 k RAM 128 k Flash on board programm connections able m RS 232 m comes with m IEEE 488 connector demo program for Windows m easy access via terminal program EDA 5 only piezosystemjena EDA 4 E 202 40 RS 232 C 9600 or 19200 or 57600 baud technical data EDA 5 E 202 50 RS 232 C 9600 or 19200 or 57600 baud and IEEE 488 2 part no type of inter
29. oses with very high resolution The amplifier series ENV 300 has been com plemented with the series CLE systems so they can be used with actuators with inte grated measurement systems system 800 high dynamic work for high load actua tors The amplifier system 800 is perfectly suited for high dynamic applications Multi layer low voltage actuators have a high capac tance For dynamic work it is necessary to charge and discharge this capacitance with high stady currents modular system ENV modular system ENV table top OEM piezo amplifier m modular power supply system for piezo electrical elements different currents for optimum solutions each channel with separate display closed loop mo dule for measure ment systems module for PC E Oy i RS fto noise r m protection circui for power suppli and piezo elements The amplifier system 800 delivers current of 800mA A monitor output gives the equi valent output voltage Please find advice for dynamic work with piezoelectrical ele ments in the chapter piezoline The amplifier series ENV 800 has been complemented with the series CLE systems so they can be used with actuators with inte gated measurement systems assembly Each amplifier system consists of at least two modules The ENT module supplies the main voltages for the ENV amplifier module which is the actual amplifier The ENT and ENV modules should be placed in a cas
30. pacitance of the piezoelectric actuator and the driving voltage by an output current of 300mA The amplitude is reached with a THD Total Harmonic Distortion of lt 1 piezojena com modular system EN modular system ENV table top electronics analog modular system ENV resres and ENV 800 300mA permanent for dynamic appli cations m 800mA permanent for high dynamic applications m 19 module for ENV systems m excellent price performance ratio m low voltage noise lt 0 3 MV ens ENV 800 iiec ee of CAP ENV 300 plezosystemjena technical data ENV 800 ENV 800 SG ENV 800 CAP ENV 800 CLE ENV 800 ENV 800 ENV 800 ENV 800 nanoX nanoX SG nanoX CAP nanoX CLE part no E 280 000 E 280 100 E 280 600 E 282 000 E 288 000 E 288 100 E 288 600 E 288 700 display LCD 3 5 digit sensor controller strain gage Capacitive strain gage strain gage Capacitive strain gage capacitive Capacitive output voltage 20 130V 20 4130V 20 130V 20 130V 20 130V 20 130V 20 130V 20 130V output current continuous goomA 800mA goomA 800mA 2x400mA 2x400MA_ 2x400mA 2x400mA voltage noise lt 0 3MVpys 500Hz connector output voltage LEMO 08 302 LEMO 08 302 LEMO 08 302 LEMO 0S 302 ODU3pin ODU3pin ODU3pin ODU3pin DC voltage offset adjustable via potentiometer modulation input
31. ut additional modification The DSP digital signal processor runs at 64MHz The servo rate is only 20usec EVD 50 CL E 720 300 The modular setup allows custom confi gurations for each application Typically a controller consists of m acasing with an integrated wide range power supply 90 265V 50 60HZz m an amplifier module for each axis output current 50mA per slot can contain up to six amplifier modules called EVD 50 m an interface module EDS 2 optional without display EDS 1 with 20bit resolution effective EVD 125 CL E 720 600 EVD 300 CL E 720 700 1 1 1 channels display no no no no processor 64MHz 32bit floating point DSP resolution oversampling 20bit 20bit 20bit 20bit servo rate 20usec 20usec 20usec 20usec sensor controller capacitive strain gage capacitive strain gage capacitive strain gage controller PID digital with DSP low pass notch filter output voltage 220 130V 20 130V 20 130V 20 130V output current continuous 50mA 2x50mA for 50mA 2x50mA for 125mA 2x125mA for 300mA 2x150mA for nanoX actuators nanoX actuators nanoX actuators nanoX actuators voltage noise rus 500Hz lt 0 3mV lt 0 3mV lt 0 5mV lt 0 5mV connector output voltage SUB D 15pin SUB D 15pin SUB D 15pin SUB D 15pin DC voltage offset 20 130V adjustable on front panel or via interface modulation input O57 OV 0 10V ORRON ORION input impedance 25kO 25kO 25kO 25k
32. vailable with integrated sensor controller for strain gage mea surement system as well as capacitive measurement system These systems are marked with suffix SG or CAP The diagram shows the typical frequency which can be reached as a function of the capacitance of the piezoelectric actuator and the driving voltage by an output current of 40mA The amplitude is reached with a THD Total Harmonic Distortion of lt 1 electronics analog modular system ENV system ENV 40 compact The latest development ENV 40 C of the ENV series combines the excellent features of the ENV system with the compactness of the 12V40 OEM piezo amplifier modules please see series 12V40 OEM amplifier The compact ENV series is very suitable for automated positioning and scanning appli cations in labs and industry where the direct display of the output values is not needed The ENV 40 C module is available with integrated controller for the use of different position measurement systems technical data part no display ENV 40 CSG modular system EN modular system ENV table top OEM piezo amplifier amplifier for low voltage piezo ele ments multi channel system excellent cost effectiveness closed loop system integrated option compact dimensions ENV 40 C ENV 40 CSG ENV 40 CCP E 104 00 E 104 10 E 104 30 no no no sensor controller strain gage Capacitive output voltage
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