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HS452, HS652 Rotary Vane Pumps

1. 5 Technical Information Anti Suckback Device N Description HS452 652 64 Nut 69A External oil pump gear SR03700281 69B Internal oil pump gear SR03700277 70 Oil pump cover 71 Screw 73 Plate 74 Filter 75 Casing 76 Exhaust flange 77 OR gasket 1 2 78 Oil fill plug 79 Oil drain plug SR03700256 80 Oil drain plug gasket SR03700256 81 Left sideplate 83 Spring 84 Filter 86 Oil level indicator 99 Special screw 100 Piston 101 Arm 102 Spring 1 103 OR gasket 1 2 104 OR gasket 1 2 105 Sleeve 106 Spring 1 107 Ring 1 2 108 Arm 109 Insert 110 Special washer 111 Screw 78 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Anti Suckback Device NOTE 1 Part of Smart Pump Major Maintenance Kit P N 9499382 2 Part of Smart Pump Minor Maintenance Kit P N 9499371 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 79 126 5 Technical Information Technical Data Technical Data 80 126 The following table lists the main technical data of the HS452 and HS652 pumps Tab 3 TECHNICAL DATA Hz UNITS HS452 HS652 FREE AIR DISPLACEMENT 66 l min m3 h 450 27 658 39 5 46 l min m3 h 327 19 6 478 28 7 PUMPING SPEED 66 m3 h 21 29 5 at 5 mbar inlet pressure 46 m3 h 14 5 20 5 ULTIMATE PARTIAL mbar 104 104 PRESSURE ULTIMATE TOTAL mbar 2 103 2 103 PRESSURE ULTIMAT
2. not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L HS452 HS652 Rotary Vane Pumps HS452 HS652 Rotary Vane Pumps HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 3 126 HS452 HS652 Rotary Vane Pumps 4 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Contents Contents 1 Procedura per l installazione 9 Informazioni generali 10 Immagazzinamento 12 Preparazione per l installazione 13 Installazione 15 Uso 19 Manutenzione 20 Smaltimento 22 2 Anleitung zur Installation 23 Allgemeine Hinweise 24 Lagerung 27 Vor der Installation 28 Installation 30 Gebrauch 34 Wartung 35 Entsorgung 37 3 Proc dure pour l installation 39 Indications g n rales 40 Emmagasinage 42 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 5 126 Contents 6 126 5 Pr paration pour l Installation 43 Installation 45 Utilisation 49 Maintenance 5
3. Detaillierte technische Informationen sind im Anhang Technical Information enthalten HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Anleitung zur Installation 2 In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben WARNUNG Die Warnhinweise richten die Aufmerksamkeit des Bedieners auf eine spezielle Prozedur oder Praktik die bei unkorrekter Ausf hrung schwere Personensch den zur Folge haben k nnte VORSICHT Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam da bei Nichteinhaltung Sch den am Ger t entstehen k nnen Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 25 126 2 Anleitung zur Installation Allgemeine Hinweise Verwendete Symbole Folgende Symbole wurden durchg ngig in allen Illustrationen verwendet Saugflansch Betriebsfl ssigkeiten L4 auff llen t Ablassflansch A Gefahr siehe l Installations und Gebrauchsanleitung Gasballastventil A Hei e Oberfl che Verbrennungsgefahr bei Ber hrung 26 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Anleitung zur Installation 2 Lagerung W hrend des Transports und der Lagerung der Pumpen sollen die folgenden Umgebungsbedingungen gegeben sein Temperatur 20 C bis 70 C Relative Feuchtigkeit 0 95 niederschlagsfr
4. HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 91 126 5 Technical Information Stopping the Pump Stopping the Pump 92 126 There are no special procedures for switching the pump off it needs only to be disconnected from the electric power by means of the bipolar switch When the pump is stopped the anti suckback device makes it possible to maintain vacuum in the vessel connected on the inlet flange of the pump If the pump is expected to be stopped for a lengthy period or in any case if it has pumped in large amounts of vapors it is good practice to run it with the gas ballast open and the inlet line closed for a few minutes before switching off in order to limit the risk of corrosion or scaling due to pollution of the oil by condensed vapors HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Safety Rules Personnel responsible for pump operation and maintenance must be well trained and must be aware of the accident prevention rules The accident prevention precautions contained in this section must be respected at all times during operation and maintenance of the pump to avoid damage to operators and to the pump These precautions are provided in the form of WARNING and CAUTION notes Operating procedures technical information and precautions which if not respected and or implemented correctly may cause body harm to operators Operating procedures technical inform
5. O uui ERIT 130 00 5 12 130 00 15127 261 00 10 28 98 97 3 90 514 97 20 27 164 00 6 46 Figure 7 HS 452 and HS 652 pump dimensions 82 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Safety Precautions Always carry the pump by means of the handle provided The pump must be set in position taking the upmost care in order to avoid accidental falls WARNING In case of a need to handle the pump after a period of operation it must be left to cool first as the external surface temperature may be in excess of 60 C HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 83 126 5 Technical Information Transport and Installation Transport and Installation The pumps are shipped to the customer inside cardboard boxes Total weight of the pack including the pump is about 36 Kg The case must be handled with care using appropriate lifting equipment When moving the case ensure that it is securely bound to the lifting equipment and that the equipment is strong enough to support the weight 84 126 pump s working environment is a traditional industrial environment Naturally sites with corrosive vapors or excessive heat are best avoided Room temperature should ideally be between 12 C and 40 C If the temperature is not inside this range consult Agilent technical service for the changes required Sett
6. Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com NAME COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc E i Agilent Technologies 4 P ee sa Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product Remove all accessories from the core product 6 0 inlet screens vent valves e Prior to shipment drain any oils or other liqu
7. are achieved by the lubricating oil thanks to the close machining tolerances The vacuum pumps are connected directly to the electric motor through a flexible coupling so that motion is transmitted even in case of poor alignment A fan fitted on the joint and housed in the pump support produces a forced air flow over the finned surfaces of the casing to avoid oil overheating 70 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Lubrication The pump s lubricating system is force feed type Oil circulation is obtained by means of a gear pump connected to the rotor shaft The oil is drawn through a gauze filter to prevent any foreign bodies from entering the pump Shunt mounted on the delivery line is a hydraulic piston which besides actuating the anti suckback device see ANTI SUCKBACK DEVICE also regulates pressure by discharging excess oil flow directly into the tank The required flow of oil under pressure passes through ducts that are drilled in the walls of the pump and lubricates the bushings and the inside parts HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 71 126 5 Technical Information Vacuum Seals Vacuum Seals A special feature of this pump is the low number of gaskets that are employed The seals in the circuit are obtained by means of VITON gaskets The careful surface finish of the various parts of the pump means that vacuum sealing of t
8. know how to use and consult the pump documentation be concerned about proper operation of the pump make a note of any irregularities in operation of the pump and take the necessary action where appropriate Use original spare parts wherever possible and repair a broken part as best as possible on site or send it back to the manufacturer for repairs For all problems arising or to order spare parts refer to our service department Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO ITALY HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 97 126 5 Technical Information Lubricants Lubricants 98 126 It will be readily understood how important adequate lubrication is to high technology pumps like the Agilent vacuum pumps Correct use of appropriate lubricants makes a significant contribution to achieving best performance and warding off defects When handling lubricants the following sanitary protection measures should be observed at all times Avoid prolonged excessive or repeated contact of the skin with products for lubrication and also avoid directly inhaling the fumes or vapors of such products Protect the skin by wearing appropriate clothes and equipment e g special suits glasses or where permitted by the safety regulations gloves or by applying a special protective product Clean the skin carefully after contact with the lubricants b
9. name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature Date Pg 2 3 4 0 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Contact Overtemperature Temp 2 Purge flow Cooling defective Clogging OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage
10. occorre procedere al rifornimento di olio lubrificante poich la pompa viene fornita scarica HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 15 126 1 Procedura per l installazione Installazione ATTENZIONE Al fine di consentire una corretta circolazione d aria assicurare uno spazio libero intorno alla pompa di almeno di 20 cm 903177 18 Togliere i tappi di protezione posti sulle flange di aspirazione e scarico prima di ogni successiva operazione L aria contenuta all interno della pompa in caso di accensione involontaria pu proiettarli contro l operatore AVVERTENZA A 16 126 Durante l installazione prestare la massima attenzione che la flangia di aspirazione sia collegata alla camera da evacuare e che la flangia di scarico non sia tappata vedere la figura seguente La pompa non deve essere usata come compressore FLANGIA DI FLANGIA DI SCARICO ASPIRAZIONE Figura 2 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Procedura per l installazione 1 Allo scopo di garantire che la pressione interna al contenitore dell olio non superi mai il valore massimo ammissibile di 1 7 bar abs sulla pompa installato un dispositivo di sicurezza indicato dalla freccia rossa nella figura sottostante Trattandosi di dispositivo di sicurezza questo tappo non va in alcun modo sostituito danneggiato o manomesso E ammessa la sua momentanea rimozione tra
11. p riode de fonctionnement il est indispensable de la laisser refroidir car sa temp rature ext rieure peut tre sup rieure 60 C 50 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Proc dure pour l installation 3 AISNE Avant toute operation de maintenance il est imp ratif de toujours couper l alimentation de la pompe Placer les pancartes sp cifiques d avertissement APPAREILLAGE EN COURS DE MAINTENANCE NE PAS BRANCHER L ALIMENTATION pr s de l interrupteur d alimentation Au terme des op rations de maintenance restaurer les dispositifs de s curit AVERTISSEMENT Ne pas effectuer la substitution d huile imm diatement apr s l arr t de la machine car la temp rature de cette derni re peut tre lev e Avant de retourner une pompe au constructeur pour r paration il est indispensable de remplir et d adresser au bureau local de vente la fiche S curit et Sant jointe la pr sente notice d instructions Une copie de celle ci devra tre mise dans l emballage de la pompe avant exp dition En cas de mise au rebut de la pompe proc der son limination conform ment aux r glementations nationales en la mati re HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 51 126 3 Proc dure pour l installation Mise au Rebut Mise au Rebut Signification du logo WEEE imprim sur les tiquettes Le symbole indiqu ci dessous a t appliqu con
12. products with the same characteristics as the previous oils Only use of lubricants of suitable quality will guarantee safe operation of the pumps Mineral oils and the PFPE oil are incompatible To change from one type to another the pump must be stripped down completely and all parts washed carefully to eliminate all oil residues If you expect to have to use other lubricants first find out if the two products are compatible In cases of doubt the lubricant used up to that time must be flushed out by way of a pump flushing procedure To avoid the risk of contaminating the oil absolute cleanliness of the pump and surrounding area must be ensured during the lubrication procedures HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 99 126 5 Technical Information Lubricants Tab 4 Agilent Rotary Vane Fluid DS19 Type characteristics PROPERTY UNIT OF MEASURE ROTARY VANE FLUID DS19 Type Vapor pressure 25 C Torr 1 10 5 Boiling point 0 01 torr C F 112 233 Viscosity 40 C cSt SUS 55 258 Viscosity 100 C cSt SUS 8 1 52 7 Pour point C F 15 5 Flash point C F 213 415 Fire point C F 244 472 Density 25 C g ml 0 87 100 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Lubricants VAPOR PRESSURE VS TEMPERATURE 70 sO 90 100 110 120 130 140 150 160 c Figure8 Agilent R
13. pumped are free of copper alloys all materials are carefully selected to provide extended life a high capacity gas ballast device allow to pump condensable vapors allthe parts composing the pump are fully replaceable due to the close machining tolerances and to the centering obtained by using reference pins HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 69 126 5 Technical Information Technical Description due to its design features and low number of gaskets the pump requires little maintenance disassembly and reassemble are easy and require minimal time The pump works with force feed lubrication provided by an auxiliary gear pump driven by the rotor of the vacuum pump itself This ensures proper lubrication even when pressures are close to atmospheric The entire pump functional block is immersed in the oil contained in the casing The oil guarantees perfect sealing of the discharge valves enters the pump to ensure lubrication and sealing of the parts inside facilitates heat dissipation and reduces pump noise The pump is equipped with a special anti suckback device which automatically isolates the vacuum system when the pump stops This avoids rises in pressure or oil flow in the vacuum system while air is allowed back into the stator chambers The air entering the pump after the anti suckback device has closed prevents the oil in the casing from filling the stator chambers The inner seals
14. satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F Ili
15. sempre l alimentazione della pompa prima di compiere operazioni di manutenzione Apporre specifici cartelli di avvertenza APPARECCHIATURA IN MANUTENZIONE NON INSERIRE L ALIMENTAZIONE in corrispondenza dell interruttore di alimentazione Al termine ripristinare i dispositivi di sicurezza AVVERTENZA A Non effettuare la sostituzione dell olio subito dopo l arresto della macchina in quanto la temperatura dello stesso pu essere elevata Prima di rispedire al costruttore una pompa per riparazioni indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salute allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo della pompa prima della spedizione Qualora una pompa dovesse essere rottamata procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 21 126 1 Procedura per l installazione Smaltimento Smaltimento 22 126 Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a conta
16. warning HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Installation Procedure 4 WARNING Do not change the oil immediately after stopping the machine as the oil temperature may still be high Before returning the pump to the constructor for repairs the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the pump package before shipping Pumps must be scrapped in accordance with the specific national standards HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 65 126 4 Installation Procedure Disposal Disposal 66 126 Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L HS452 HS652 Rotary Vane Pumps User Manual ee 5 Technical Information
17. 0 Mise au Rebut 52 Installation Procedure 53 General Information 54 Storage 56 Preparation for Installation 57 Installation 59 Use 63 Maintenance 64 Disposal 66 Technical Information 67 Technical 67 Section 69 Technical Description 69 Lubrication 71 Vacuum Seals 72 Gas Ballast Valve 73 Anti Suckback Device 74 Technical Data 80 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Contents Safety Precautions 83 Transport and Installation 84 Preliminary Operations 86 Section Il 87 Connection to the Electric Supply87 Connections to the Inlet and Exhaust Flanges 88 Starting and Running the Pump 90 Stopping the Pump 92 Safety Rules93 Maintenance Actions 96 Lubricants 98 Pump Electronic Controller 103 RS 232 RS 485 Communication Description 106 IP44 Accessory Kit P N 949 9367115 Accessories 119 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 7 126 Contents 8 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L HS452 HS652 Rotary Vane Pumps User Manual Procedura per l installazione Informazioni generali 10 Simboli usati 11 Immagazzinamento 12 Preparazione per l installazione 13 Installazione 15 Uso 19 Manutenzione 20 Smaltimento 22 Traduzione delle istruzioni originali GEB Agilent Technologies 9 126 1 Procedura per l installazione Informazioni generali Informazioni generali 10 126 Questa apparecchiatura destinata ad uso profes
18. 7 900 978 01 L Installation Procedure 4 Use Before being put into service in order to reach maximum vacuum the pump must be left running for about an hour with the gas ballast valve open This will eliminate any humidity from the oil There are no special procedures for switching the pump on it needs only to be connected to the electric power by means of the bipolar switch WARNING The pump is designed for operation with neutral or non corrosive fluids It is absolutely forbidden to use potentially explosive or flammable substances HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 63 126 4 Installation Procedure Maintenance Maintenance 64 126 Personnel responsible for pump operation and maintenance must be well trained and must be aware of the accident prevention rules Death may result from contact with high voltages Always take extreme care and observe the accident prevention regulations in force When machine is powered take care on account of moving parts and high voltages If you have to perform maintenance on the pump after a considerable time in operation leave it to cool as temperature of the outer surface may be in excess of 60 C Always disconnect the power supply to the pump before starting maintenance work Place a special warning signs over the power supply breaker switch MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON When finished remove the safety
19. 70 C relative humidity 0 95 non condensing 56 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Installation Procedure 4 Preparation for Installation The pump is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office Total weight of the pack including the pump is approx 36 Kg When unpacking the pump be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 Normal exposure to the environment cannot damage the pump Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust The pump is provided with some standard accessories bottle Agilent GP 19 pin D connector for 1 0 female 19 pin D connector for RS232 male 1fuse T10A HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 57 126 4 Installation Procedure Preparation for Installation a RT KRY RR H SERRES PR Figure 1 58 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Installation Procedure 4 Installation Do not install or use the pump in an environment exposed to atmospheric agents rain s
20. 78 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Sales amp Services GmbH amp Co KG Vacuum Products Division Lyoner Str 20 60 528 Frankfurt am Main GERMANY Tel 49 69 6773 43 2230 Fax 49 69 6773 43 2250 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 0 2 3452 2455 Fax 82 0 2 3452 3947 Toll free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beis
21. E TOTAL mbar 1 102 1 102 PRESSURE WITH GAS BALLAST WATER VAPOR mbar 30 30 TOLERANCE WATER VAPOR CAPACITY g h 550 550 OIL CAPACITY min max I 0 6 1 0 6 1 MOTOR RATING 3ph kW 0 5 0 5 NOMINAL ROTATION 66 rpm 1980 1980 SPEED low speed 46 rpm 1350 1350 NOISE LEVEL with gas dB A lt 60 lt 60 ballast closed OIL TEMPERATURE C 75 75 pump operating F 169 169 Installation category Il Pollution degree 2 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 TECHNICAL DATA Hz UNITS HS452 HS652 OPERATING C 12 40 12 40 TEMPERATURE RANGE WEIGHT Kg 33 33 Ib 72 7 72 7 INLET FLANGE DN 25KF 25KF EXHAUST FLANGE DN 25KF 25KF Main Dimensions length mm 515 515 width mm 164 164 height mm 271 271 Nominal Input Voltage V 100 120 100 120 200 240 200 240 Input frequency Hz 50 60 50 60 Max input power VA 1000 1000 Main Fuse T type A 10 10 Indoor Use Only Max Altitude m 2000 2000 According to PNEUROP 6602 At ultimate total pressure 20 C 68 F room temperature HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 81 126 5 Technical Information Technical Data Dimensions The following figure shows the pump dimensions 198 32 7 81 75 00 2 95 40 24 1 58 zT HL AU ft I m ds m L D Hz H3 3 A Il B a a ow s E E H A E Eri H
22. EN60950 Input Output Communications Tab 5 P1 1 0 PIN N SIGNAL NAME IN OUT 1 Norm Status relay contact out 2 Speed setting 0 10V in 3 Oil level relay contact out 4 Start in 5 Ground out 6 Norm Status N O relay contact out 7 Oil level relay contact out 8 Start in 9 24V out Remote Start Stop Rotational speed setting by analog input 0 10 V High speed 68 Hz Vin gt 9 V Low speed 46 Hz Vin lt 1 V frequency interlock 46Hz 104 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Pump Electronic Controller Fecc F_HS Figure 11 NOTE The pump operation is 1 0 signals dependent so you must always plug in the provided mating connector to start the pump HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 105 126 5 Technical Information RS 232 RS 485 Communication Description RS 232 RS 485 Communication Description J2 Both the RS 232 and the RS 485 interfaces are available on the connector J2 Serial Port Tab 6 PIN N SIGNAL NAME 1 5 V out TX RS232 RX RS232 Spare GND A RS485 Spare B RS485 OI I BR WwW MD Spare The communication protocol is the same see the structure below but only the RS 485 manages the address field Therefore to enable the RS 485 is necessary to select the type
23. H Abbildung 2 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 31 126 2 Anleitung zur Installation Installation WARNUNG Zur Gew hrleistung dass der Innendruck im lbeh lter den zul ssigen H chstwert von 1 7 bar abs nicht bersteigt ist in der Pumpe eine Sicherheitsvorrichtung installiert siehe roter Pfeil im Bild Es handelt sich um eine Sicherheitsvorrichtung somit darf der Verschluss auf keinen Fall ersetzt besch digt oder manipuliert werden Eine vor bergehende Entfernung durch Abschrauben ist m glich damit das l bei Bedarf nachgef llt werden kann Der Anwender muss die Vorrichtung wieder in ihren Platz einschrauben nachdem das l eingef llt wurde und bevor die Pumpe wieder gestartet wird Die Nichtbeachtung dieser Vorsichtsma nahmen kann der Maschine und dem Bediener Schaden zuf gen Falls der Druck in dem lbeh lter die zugelassenen Werte berschreitet zum Beispiel aufgrund eines verstopften Auslasses wird eine Mischung aus angesaugtem Gas und l aus dem Sicherheitsverschluss treten Dieses Austreten erfolgt bis zum Abschalten der Pumpe und oder Beseitigung des Grunds f r den berdruck zum Beispiel Entfernung der Verstopfung am Auslass Abbildung 3 32 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Anleitung zur Installation 2 Kontrollieren da die Versorgungsspannung mit der Spannungsangabe auf dem Typenschi
24. K 1 byte 0x15 The command execution has been failed Unknown Window 1 byte 0x32 The specified inco ci pu command is not a valid window The data type specified in the command Logic Numeric or Data Type E 1 byt 0x33 ai yie 0x33 Alphanumeric is not accorded with the specified Window The value expressed during a write Out of Range 1 byte 0x34 command is out of the range value of the specified window The specified window is Read Only t ily disabled Win Disabled 1 byte 0x35 tempora disabled some values cannot be changed while pump is running Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 109 126 5 Technical Information RS 232 RS 485 Communication Description Examples Command START Source PC Destination Pump 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Pump Destination PC STX ADDR ACK ETX CRC Command STOP Source PC Destination Pump 02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC Source Pump Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC 110 126 HS452 HS652 Rotary Vane Pumps User Man
25. NTROLLER TEMPERATURE C 216 N ENVIROMENT TEMPERATURE C 300 N CYCLE TIME min 301 N CYCLE NUMBER 302 N PUMP LIFE h 319 A CONTROLLER MODEL 323 A CONTROLLER SERIAL NUMBER 325 A ELECTRICAL MODIFICATION LEVEL 500 L Monitor Mode write only 503 N RS485 SERIAL ADDRESS SETTING 0 31 504 L SERIAL TYPE SELECT 0 RS323 1 RS485 112 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Operational limits Technical Information 5 Tab 10 Input Voltage V Controller status lt 85 Power fail 85 140 Operative 140 170 Power fail 170 270 Operative 210 Power fail Status Led Tab 11 Led status Controller status Off Stop Green flashing Ramp Autotuning Green Normal Operation Red Fail Slow red flashing 2 Hz Oil level fail Quick red flashing 10 Hz Oil level sensor fail Orange Off Reset selftest When you switch the controller on an electronic self test is performed during such phase you ll see the led Orange for 1 sec And turned off for two other seconds Immediately after the first phase the controller perform a specific test on the pump rotor in order to be sure that it isn t locked HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 113 126 5 Technical Information RS 232 RS 485 Communication Description Electronic Self Test When you switch the pump on with the main On Off switch the pump doesn t start imm
26. PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 1 12
27. Section 69 Technical Description 69 Lubrication 71 Vacuum Seals 72 Gas Ballast Valve 73 Anti Suckback Device 74 Technical Data 80 Dimensions 82 Safety Precautions 83 Transport and Installation 84 Preliminary Operations 86 Section Il 87 Connection to the Electric Supply 87 Connections to the Inlet and Exhaust Flanges 88 Starting and Running the Pump 90 Stopping the Pump 92 Safety Rules 93 Warning Notes 93 Caution Notes 95 Maintenance Actions96 Lubricants 98 Original Instructions GEB Agilent Technologies 67 126 5 Technical Information Disposal Pump Electronic Controller 103 Technical Specifications 103 Input Output Communications 104 RS 232 RS 485 Communication Description 106 J2 Serial Port 106 Communication Format 107 Communication Protocol 107 Windows meaning 111 Electronic Self Test 114 Rotor Lock Test 114 Oil Level Check 114 IP44 Accessory Kit P N 949 9367 Protection against Solids115 15 Protection against Liquids 115 Protection against Liquids 115 IP44 Accessory Kit Use 116 Accessories 119 68 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Section Technical Description The HS452 and HS652 pumps are rotary vane pumps oil sealed driven by a three phase electric motor Figure 4 These vacuum pumps are suitable for pumping non corrosive gases The main features are all parts in direct contact with the fluid
28. a pompe il est imp ratif de proceder son remplissage en huile de lubrification car elle est livr e vide HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 45 126 3 Proc dure pour l installation Installation ATTENTION Pour permettre une bonne circulation de l air laissez un espace libre de 20 cm minimum autour de la machine AVERTISSEMENT Avant toute autre op ration retirer les bouchons de protection plac s sur les brides d aspiration et de vidange En cas de mise en marche inopin e de l appareillage l air contenu l int rieur de la pompe peut les projeter contre l op rateur AVERTISSEMENT A 46 126 Pendant l installation faire tr s attention que la bride d aspiration soit reli e la chambre vider et que la bride d vacuation ne soit pas bouch e voir la figure ci apr s La pompe ne doit pas tre utilisee comme un compresseur BRIDE DE BRIDE DE EVACUATION ASPIRATION Figure 2 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Proc dure pour l installation Afin de garantir que la pression interne du r servoir d huile ne d passe jamais la valeur maximum admissible de 1 7 bars abs un dispositif de s curit a t install indiqu par la fl che rouge ci dessous S agissant d un dispositif de s curit ce bouchon ne doit en aucun cas tre remplac endommag ou modifi est possible de le retirer momentan men
29. ation and precautions which if not respected and or implemented correctly may cause damage to the pump Warning Notes a Death may result from contact with high voltages Always take extreme care and observe the accident prevention regulations in force b Always disconnect the power supply to the pump before maintenance work Place a special warning signs over the power supply breaker switch MACHINE UNDERGOING MAINTENANCE DO NOT POWER ON If you are performing maintenance after the pump has been operating for a considerable time allow sufficient time for it to cool as the external surface temperature may be in excess of 60 C HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 93 126 5 94 126 Technical Information Safety Rules Failure to provide the pump with a ground connection may cause serious damage to operators Always ensure that there is a ground connection and that it complies with the standards When cleaning the pump and its component parts avoid the use of flammable or toxic solvents such as benzin benzol ether or alcohol The recommendation is to use a soap and water solution preferably in ultrasound washing machines taking care to dry all the cleaned parts at temperatures under 100 C in order to eliminate residual moisture Prolonged overloads or breakdowns may cause the electric motor to overheat and to release noxious smoke remove the power immediately as a precaution and do not ap
30. bidden to use potentially explosive or flammable substances If the pump is started with cold oil initially more than normal noise will be heard this will last for a few minutes only until the oil reaches its working temperature 90 126 There are no special instructions for normal operation of the pump which is delivered to you after completion of a running in cycle in the factory If the pump is sucking in environments with liquids or vapors it is important to leave it to run with the gas ballast open so as to avoid condensation of the vapors and contamination of the lubricating oil as a result When there is no danger of the oil being contaminated the gas ballast valve should be closed to reduce the pump s power absorption The gas ballast valve will prove useful in the cold season when due to the lower room temperatures it takes longer for the pump to reach rated temperature when switched on Compression of the air forced in by the gas ballast valve develops heat which in turn increases temperature of the oil faster HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Starting and Running the Pump NOTE If gases without vapors are sucked in you are advised to open the gas ballast device from time to time in order to eliminate the traces of humidity they contain NOTE For repetitive work cycles with brief time intervals in between it is better not to stop the pump HS452
31. d aspiration Remplissage fluide de fonctionnement Danger Voir instructions d installation Mode d emploi g Soupape de lest A Surface chaude Risque de br lure en cas de contact t Bride d vacuation i HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 41 126 3 Proc dure pour l installation Emmagasinage Emmagasinage Pendant le transport et l emmagasinage des pompes il faut veiller respecter les conditions environnementales suivantes temp rature de 20 C 70 C humidit relative 0 95 non condensant 42 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Proc dure pour l installation 3 Pr paration pour l installation La pompe est fournie dans un emballage de protection sp cial si l on constate des marques de dommages pouvant s tre produits pendant le transport contacter aussit t le bureau de vente local Le poids total de l emballage et de la pompe est au maximum de 36 Kg Pendant l op ration d ouverture de l emballage veiller tout particulierement ne pas laisser tomber la pompe et ne lui faire subir aucun choc ni aucune vibration Ne pas jeter l emballage dans la nature Le mat riel est entierement recyclable et il est conforme la directive CEE 85 399 en mati re de protection de l environnement La pompe ne peut tre endommag e en restant simplement expos e l atmosph re Il est de toute fa on conseill de la garder da
32. d in the following figure Figure 14 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 117 126 5 Technical Information IP44 Accessory Kit P N 949 9367 You must exchange the 9 pin D mating connector shells with the IP44 version even if you have no cable wired on the connector In that case you have to use the plastic cap as showed in the following figure PLASTIC CAP Figure 15 118 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Accessories Tab 12 PART NUMBER Technical Information 5 DESCRIPTION 949 9390 Rotary Vane Fluid DS19 Type bottle 949 9395 Smart Pump Oil mist eliminator 949 9392 Smart Pump Exhaust filter 949 9376 Smart Pump Oil return kit 949 9382 Smart Pump major maintenance kit 949 9371 Smart Pump minor maintenance kit 949 9367 Smart Pump IP44 accessory kit 949 9396 Power cable EU 949 9397 Power cable US 949 9398 Power cable UK 949 9399 Power cable IEC320 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 119 126 5 Technical Information Accessories 120 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Ste Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be
33. dal testo Simboli usati I seguenti simboli sono utilizzati in modo coerente in tutte le illustrazioni r Flangia d aspirazione t Flangia di scarico Pericolo Vedere istruzioni OUT di installazione Modi d uso E Zavorratore HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 11 126 Riempimento con liquido d esercizio Superficie calda Pericolo di scottature se vengono toccate le parti calde 1 Procedura per l installazione Immagazzinamento Immagazzinamento Durante il trasporto e l immagazzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa 0 95 non condensante 12 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Procedura per l installazione 1 Preparazione per l installazione La pompa viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Il peso dell imballo comprensivo della pompa e al massimo di circa 36 Kg Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere la pompa e a non sottoporla ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente La pompa non pu essere danneggiata rimanend
34. dual stage rotary vane pumps oil sealed driven by a three phases electric motor These high vacuum pumps are suitable for pumping non corrosive gases The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Installation Procedure 4 natio This manual uses the following standard protocol WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information taken from the text Symbols used The following symbols are used consistently throughout in all illustration Suction flange t t Exhaust flange Warning see JUT installation operating mode instruction E Gas Ballast valve HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 55 126 Filling up operating fluid Hot surface Danger of burns if hot parts are touched 4 Installation Procedure Storage Storage When transporting and storing the pumps the following environmental requirements should not be exceeded temperature from 20 to
35. dust filter before the inlet flange When the gases to be pumped out contain large quantities of vapor it is advisable to include a condense separator before the inlet flange 88 126 To make best use of the pump s capacity use only short straight piping with a diameter not smaller than that of the inlet flange If rigid piping is used it is good practice to use a flexible joint in order to avoid undue forcing of the connection on the pump The exhaust duct must be connected to a pipe that will take away the pumped out gases HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Connections to the Inlet and Exhaust Flanges NOTE Application of an oil trap filter is necessary to avoid pollution of the surrounding atmosphere by the oil present in the exhaust duct during pump operation CAUTION Never block the pump exhaust line This would cause overpressure in the casing with the risk of breaking the pumping block envelope HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 89 126 5 Technical Information Starting and Running the Pump Starting and Running the Pump Before being put into service in order to reach maximum vacuum the pump must be left running for about an hour with the gas ballast valve open This will eliminate any humidity from the oil WARNING The pump is designed for operation with neutral or non corrosive fluids It is absolutely for
36. e agilent com vpl ra agilent com http www agilent com Pg 1 3 72 Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Company Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A Non Billable L Billable amm New PO hard copy must be submitted with this form 3B exchange Repair upgrade Consignment Demo calibration Evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one 5 HAS NOT pumped or been exposed to toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic L Corrosive L Reactive L1 Flammable L Explosive LJ Biological L Radioactive List all toxic hazardous materials Include product
37. e has a shutter which automatically closes the suction duct In this way the pump and vacuum system are completely isolated from each other and air can enter the pump without any risk for the vacuum produced in the system The device includes some special features namely drive obtained avoiding any form of contamination of the inlet duct by fluids oil and or air used to command the shutter Thanks to this when the pump is started again the pump down to vacuum conditions is extremely fast as these contaminants are not present and no degassing is therefore required suction flange maintained closed even when the pump is idle so that pollutants cannot enter from the environment and no oil can overflow from the pump SUCTION FLANGE EXHAUST FLANGE CONTROLLER PUMP BODY Figure 5 Pump main asssemblies 74 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Anti Suckback Device Figure 6 View of the pump HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 75 126 5 Technical Information Anti Suckback Device 76 126 Legend cf figure View of the Pump Tab 2 N Description HS452 652 1 Inverter motor assy 2 Rubber foot 3 Screw 4 Screw 5 Screw 7 Spacer 8 Motor support 9 Handle 10 Screw 11 Right sideplate 12 Board 14 Screw 15 Sup
38. ediately but it start only after about three seconds This test time isn t required if the pump is already powered as when it is operated in remote or serial mode Rotor Lock Test After the electronic self test the inverter perform a rotor lock test This test requires about 5 seconds During this time the rotor turns very slowly after wards the pump accelerate The acceleration time is a function of the oil temperature and of the chamber volume to rough down The lower is the oil temperature the longer is the time required to reach nominal speed Oil Level Check An oil level check is performed four minutes after the pump starting If the pump oil level is under the minimum threshold the pump controller generate a message you are able to receive by status led blinking see the Status Led table RS232 window see Windows Meaning table and a signal on I O port see I O table If the oil level check fails low level the pump doesn t stop The test only activates the output described above 114 126 An Oil level sensor fail is highlighted by means of quick status led blinking and RS232 window see Status led and Window meaning tables HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 IP44 Accessory Kit P N 949 9367 Using the IP44 accessory kit you can make the pump protected against solid and liquids as defined here below Protection against Solids Protection against accid
39. eference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 0 10 64397888 Fax 86 0 10 64391318 Toll free 800 820 32
40. ei HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 27 126 2 Anleitung zur Installation Vor der Installation Vor der Installation Die Pumpe wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Das Verpackungsgewicht betr gt einschlie lich der Pumpe maximal 36 Kg Beim Auspacken ist darauf zu achten da die Pumpe nicht fallengelassen oder St en oder Vibrationen ausgesetzt wird Das Verpackungsmaterial ist ordnungsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r den Umweltschutz Die Pumpe kann wenn sie einfach der Atmosph re ausgesetzt ist nicht besch digt werden Sie sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden Die Pumpe wird mit einigen Standardzubeh rteilen geliefert 1 lflasche Agilent GP 1 9 Stift Stecker D f r 1 0 Steckbuchse 19 Stift Stecker D f r RS232 Stecker 1 Sicherung T10A 28 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Anleitung zur Installation 2 I ER Abbildung 1 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 29 126 2 Anleitung zur Installation Installation Installation Die Pumpe darf nicht in Umgebungen installiert und oder benutzt werden die ungesch tzt vor Witterun
41. en service de la pompe il est n cessaire pour atteindre le vide maximum de faire fonctionner la pompe pendant environ une heure avec le reniflard ouvert afin de supprimer l humidit de l huile La mise en marche de la pompe ne requiert aucune man uvre particuli re il suffit de la brancher l alimentation lectrique et d agir sur l interrupteur bipolaire version avec moteur monophas ou unipolaire version avec moteur triphas WSR S S La pompe a t con ue pour fonctionner avec des fluides neutres ou non corrosifs L emploi de substances potentiellement explosives ou inflammables est strictement interdit HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 49 126 3 Proc dure pour l installation Maintenance Maintenance Le personnel charg de la conduite et de la maintenance de la pompe doit avoir re u la formation n cessaire et poss der une connaissance approfondie des normes de pr vention des accidents du travail AVERTISSEMENT Les hautes tensions peuvent entra ner la mort par contact Veiller toujours op rer avec le maximum de prudence et dans le respect des normes de pr vention des accidents du travail en vigueur AVERTISSEMENT Lorsque la machine est sous alimentation faire attention la presence d organes en mouvement et de haute tension AVERTISSEMENT cas de necessite de proc der des op rations de maintenance de la pompe au terme d une
42. ental touch of parts under power or internal moving parts with tools wires or similar objects with a size larger than 1mm Protected against intrusion of parts larger than 1mm Protection against Liquids Water spray from all directions has no negative effect on the device IP44 Accessory Kit Items 1 main plug bracket 2 bracket spacers 2 bracket screws washers 1 socket rubber gasket 2 IP44 plastic shells for 9 pin D mating con ector HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 115 126 5 Technical Information IP44 Accessory Kit P N 949 9367 116 126 IP44 Accessory Kit Use Figure 12 Remove the spring bracket mounted on standard IEC socket Insert the D rubber plate item 1 into the pump s IEC main socket pushing it till the socket bottom Screw down the two brackets spacers items 2 on the standard IEC socket spacers Insert the main cable plug Fix the main cable plug by using the bracket and screws washers item 3 Exchange the 9 pin D mating connector plastic shells with the IP44 shells items 4 contained in the IP44 accessory kit see the following figure HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 REMOVE THE PLASTIC SHELL AND INSTALL THE IP44 SHELL Figure 13 WARNING To obtain the IP44 protection level you must set up the pump electrical connections as highlighte
43. er l appareil Agilent d cline par cons quent toute responsabilit en cas de non respect total ou partiel des instructions fournies d utilisation incorrecte de la part d un personnel non form d op rations non autoris es ou d un emploi contraire aux r glementations nationales sp cifiques Les pompes HS452 e HS652 sont des pompes rotatives deux stades palettes tanches en bain d huile actionn es par un moteur lectrique triphas Ces pompes vide pouss sont adapt es au pompage de gaz non corrosifs Les paragraphes suivants fournissent toutes les indications n cessaires pour garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical information HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Proc dure pour l installation 3 Cette notice utilise les signes conventionnels suivants AHSA AIR Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une man uvre sp ciale dont la mauvaise ex cution risque de provoquer de graves l sions ATTENTION Les messages d attention apparaissent avant certaines proc dures dont le non respect peut endommager s rieusement l appareillage Les notes contiennent des renseignements importants extrapol s du texte Symboles utilis s Les symboles suivants sont utilis s dans les diff rentes illustrations Bride
44. form ment la directive CE d nomm e WEEE Ce symbole valable uniquement pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE DOIT PAS tre mis au rebut avec les d chets domestiques ou industriels mais doit tre recycl Par cons quent nous invitons l utilisateur final contacter le fournisseur du dispositif qu il s agisse de la maison m re ou d un revendeur pour entreprendre le processus de mise au rebut apr s v rification des termes et conditions du contrat de vente 52 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L HS452 HS652 Rotary Vane Pumps User Manual 4 Installation Procedure General Information 54 Symbols used 55 Storage 56 Preparation for Installation 57 Installation 59 Use 63 Maintenance 64 Disposal 66 Original Instructions GEB Agilent Technologies 53 125 4 Installation Procedure General Information General Information 54 126 This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained per sons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The HS452 and HS652 pumps are
45. gns of damage Use only tools that are in perfect working order and specially designed for the job use of inappropriate or ineffective tools may cause serious damage Perform repairs in clean and where possible dust free areas Protect all the clearances of connection points with suitable plastic caps and cover the machined surface areas of all parts stripped down until they are put back on the pump again Always check the lubricant and that it is properly distributed through the pump inadequate lubrication may damage the pump seriously Give the parts some form of marking as you strip them down to ensure that you reassemble them again in the proper order Check that there are no scratches or grooves on the machined shafts in their seats inside the pump or on machine ground surfaces Slight scratches and abrasions may be eliminated with very fine emery paper or by a little light grinding Before putting a group together always spread a little oil over inner parts and mating surfaces Replace all seals with original spare parts before reassembling components HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 95 126 5 Technical Information Maintenance Actions Maintenance Actions Maintenance may be seen as the totality of all scheduled and unscheduled maintenance work Maintenance includes 1 SCHEDULED MAINTENANCE Maintaining the nominal state of operation 2 UNSCHEDULED MAINTENANCE Restoring the nominal s
46. gsbedingungen Regen Frost Schnee Staub und aggressiven Gasen sind und in denen Explosions oder erh hte Brandgefahr besteht W hrend des Betriebs sollen die folgenden Umgebungsbedingungen gegeben sein Temperatur 12 C bis 40 C Relative Feuchtigkeit 0 95 niederschlagsfrei Zum Schutz vor Kurzschl ssen oder berlastungen muss ein automatischer Schalter in die Hauptspeisungsleitung zu den Agilent Vorrichtungen installiert werden siehe folgende Tabelle Tab 1 P N 110 Vac 220 Vac 949 9360 10A 949 9365 6A VORSICHT Die Pumpe ist vor ihrer Inbetriebnahme mit Schmier l zu f llen da sie leer geliefert wird 30 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Anleitung zur Installation 2 Um eine korrekte Luftzirkulation zuzulassen sorgen Sie daf r dass um die Pumpe herum ein freier Raum von mindestens 20 cm vorhanden ist WARNUNG Vor Aufnahme jeglicher Arbeiten sind die Schutzkappen an den Saug und Druckflanschen zu entfernen Die im Pumpeninnern enthaltene Luft k nnte diese bei unbeabsichtigter Einschaltung gegen den Bediener schleudern WARNUNG Bei der Installation ist unbedingt darauf zu achten dass der Saugflansch an die zu entleerende Kammer angeschlossen ist und der Ablassflansch nicht verschlossen ist siehe nachstehende Abbildung Die Pumpe darf nicht als Verdichter verwendet werden ABLASSFLANSCH SAUGFLANSC
47. he functional block is ensured by the film of oil separating metal surfaces Sealing of the rotor shaft is guaranteed by a rotating gasket with dust guard lip The suction flange and duct are sealed by mean of OR gaskets 72 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Gas Ballast Valve When the pump sucks in vapors these condense during compression and mix with the oil forming an emulsion an aqueous vapor for example or a solution organic solvent vapors for example A number of problems arise from this such as the impossibility of obtaining high vacuums the alteration of the properties of the oil could cause scaling on parts of the pump To avoid this during compression at the second stage atmospheric air is let into the pump through an adjustable valve or gas ballast valve located at the top of the pump In this way the discharge valve of the second stage opens through the effect of the atmospheric air before the partial pressure of the vapor reaches saturation point thus preventing condensation from occurring The vapors are expelled mixed with air HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 73 126 5 Technical Information Anti Suckback Device Anti Suckback Device The pump is equipped with a special anti suckback device to avoid air pressure rises and or oil back flow towards the evacuated vessel when the pump is switched off This devic
48. ids purge or flush all gasses and wipe off any excess residue f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being returned under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercar
49. iminary Operations Before starting the pump fill up with lubricating oil as the pumps are delivered empty A tin of oil is included in the packing CAUTION Oil must be poured into the casing through the special threaded plughole and NOT through the suction line WARNING Take out the protective caps on the suction and exhaust flanges before doing anything else In the event of an accidental start up the air inside the pump could violently expel the protective caps and harm the operator 86 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Section Il Connection to the Electric Supply CAUTION It is recommended to connect the pump to the power supply through a dedicated switch on the main electrical panel of the installation or in proximity of the power supply connection point HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 87 126 5 Technical Information Connections to the Inlet and Exhaust Flanges Connections to the Inlet and Exhaust Flanges Remove the protective caps from both flanges Connect the system to be evacuated to the inlet flange using a centering ring with OR and a locking collar For guarantee reliable sealing use an OR gasket in Perbunan or Viton The inlet duct is equipped with a sieve filter preventing solid particles from entering and damaging the pump When the gases to be pumped out contain dust it is advisable to insert a
50. ing the pump in position should be performed as follows Pump laid on the ground There no special instructions for this type of installation except that the floor should be as flat as possible and suited to bear the weight of the pump it should ideally be a concrete floor and of any accessories mounted on it Note that the pump is stable on its base plate and it should not be necessary to anchor it to the floor with bolts and screws also vibrations to and from the pump are greatly reduced by the use of rubber feet Pump off the ground In this case the user must design a suitable support structure remembering the following points the plane supporting the pump must be perfectly horizontal the structure should be adequately rigid the relevant safety precautions should be applied HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Note also that the pump should be attached to the supporting structure after replacing the rubber feet with special anti vibration feet which should be screwed to the pump base and to the supporting plane After taking the pump out of its packing case you are advised to make the following checks Ensure that the pump has not suffered any damage during shipping b Check that there are no uncovered or loose parts HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 85 126 5 Technical Information Preliminary Operations Prel
51. ld des Motors bereinstimmt Die Pumpe an das Versorgungsnetz anschlie en Die Pumpe muss so installiert werden dass die Stromversorgung leicht unterbrochen werden kann Stromkabel F r den Anschluss muss ein dreipoliges Kabel verwendet werden Au enleiter Neutral Masse Der Kabelquerschnitt muss mindestens 0 75 mm betragen AWG18 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 33 126 2 Anleitung zur Installation Gebrauch Gebrauch Vor der eigentlichen Inbetriebnahme der Pumpe ist es zur Erreichung des Grenzvakuums erforderlich die Pumpe ungef hr eine Stunde mit ge ffnetem Ballast laufen zu lassen um die Feuchtigkeit aus dem l zu entfernen Die Einschaltung der Pumpe erfordert keine speziellen Schritte sie braucht nur durch Bet tigung des zweipoligen Version mit Einphasenstrommotor oder des allpoligen Trennschalters Version mit Dreiphasenstrommotor an die elektrische Energieversorgungsquelle angeschlossen werden Die Pumpe ist f r den Betrieb mit neutralen und nicht korrosiven Fluiden konzipiert Der Einsatz mit potentiell explosions oder feuergef hrlichen Substanzen ist streng verboten 34 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Wartung Anleitung zur Installation 2 Das f r den Betrieb und die Wartung zust ndige Personal soll geschult sein und ber eine solide Kenntnis der Unfallschutzvorschriften verf gen Hochspann
52. mite svitamento per consentire la carica dell olio nella pompa quando necessario E responsabilit dell utente riavvitare il dispositivo nella sua posizione originaria dopo l avvenuta carica dell olio e prima dell avvio della pompa L inosservanza di queste precauzioni pu causare danni alla macchina ed all operatore Nel caso in cui la pressione del contenitore dell olio superi i valori limite ammessi ad esempio per scarico ostruito una miscela di gas aspirati e olio fuoriuscir dal tappo di sicurezza Questa fuoriuscita continuer fino allo spegnimento della pompa e o alla rimozione della causa di sovrappressione ad esempio rimozione dell ostruzione dello scarico Figura 3 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 17 126 1 Procedura per l installazione Installazione 117121771112 Controllare che la tensione di alimentazione corrisponda a quella indicata sul cartellino del motore Collegare la pompa all alimentazione A 3 34 La pompa deve essere installata in modo tale da permettere una facile interruzione della linea d alimentazione elettrica Cavo d alimentazione Il giusto cavo per il collegamento elettrico un cavo a tre fili Fase Neutro Terra La sezione del cavo deve essere di almeno 0 75 mm AWG18 18 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Procedura per l installazione 1 Uso Prima di mettere la pompa in servizio effettivo
53. necessario per il raggiungimento del vuoto limite far marciare per circa un ora la pompa con zavorra aperta allo scopo di eliminare l umidit nell olio L accensione della pompa non richiede particolari manovre sufficiente collegarla all alimentazione elettrica agendo sull interruttore bipolare La pompa progettata per operare con fluidi neutri o non corrosivi assolutamente vietato l impiego con sostanze potenzialmente esplosive 0 infiammabili HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 19 126 1 Procedura per l installazione Manutenzione Manutenzione Il personale addetto alla condotta ed alla manutenzione della pompa deve essere ben addestrato e deve avere un approfondita conoscenza delle norme antinfortunistiche PUYAT Le alte tensioni possono causare morte al contatto Operare sempre con la massima cautela e secondo le norme antinfortunistiche in vigore PYS UAE Quando la macchina alimentata prestare attenzione per la presenza di parti in movimento e di alta tensione NAYS 1031174718 Nel caso si debba procedere ad operazioni di manutenzione della pompa al termine di un periodo di esercizio necessario lasciarla raffreddare poich la temperatura esterna pu superare i 60 C gt gt I 20 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Procedura per l installazione 1 AVVERTENZA Escludere
54. now ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected temperature from 12 C to 40 C relative humidity 0 95 non condensing Protect against short circuits and overload by installing on Agilent Device electrical main line an automatic circuit breaker of proper capacity see table here below Tab 1 P N 110 Vac 220 Vac 949 9360 10 A 949 9365 6A Before starting the pump fill up with lubricating oil as the pump is delivered empty Assure a free space all around the pump at minimum of 20cm to allow proper air circulation HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 59 126 4 Installation Procedure Installation WARNING Take out the protective caps on the suction and exhaust flanges before doing anything else In the event of an accidental start up the air inside the pump could violently expel the protective caps and harm the operator During installation pay maximum attention that the suction flange is connected to the vacuum chamber and the exhaust flange is not closed see the following figure The pump must not be used as a compressor EXHAUST FLANGE SUCTION FLANGE Figure 2 60 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Installation Procedure 4 WARNING A safety device indicated by
55. ns son emballage jusqu au moment de sa mise en fonction afin d viter toute pollution due la poussi re La pompe est quip e de certains accessoires standard 1 bouteille d huile Agilent GP 1 connecteur D 9 broches pour E S femelle 1 connecteur D 9 broches pour RS232 male 1 fusible T10A HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 43 126 3 Proc dure pour l installation Pr paration pour l Installation a RT KRY RR H nu SERRES PEZZI Figure 1 44 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Proc dure pour l installation 3 Installation Ne pas installer et ou utiliser la pompe dans des milieux expos s aux agents atmosph riques pluie gel neige des poussi res des gaz agressifs ainsi que dans des milieux explosifs ou risque lev d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes Temp rature de 12 C 40 C Humidit relative 0 95 non condensant AVERTISSEMENT Pour proteger contre les court circuits ou les surintensites il faut installer un disjoncteur automatique sur la ligne d alimentation principale vers les dispositifs Agilent de bonne capacite voir tableau ci dessous ATTENTION Tab 1 P N 110 Vac 220 Vac 949 9360 10A 949 9365 6A Avant toute utilisation de l
56. o semplicemente esposta all atmosfera Si consiglia comunque di mantenerla chiusa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere La pompa fornita con alcuni accessori standard 1 bottiglia di olio Agilent GP 1 connettore D a 9 contatti per 1 0 femmina 1 connettore D a 9 contatti per RS232 maschio 1 fusibile 10 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 13 126 1 Procedura per l installazione Preparazione per l installazione a CPP Lee SERRES PR Figura 1 14 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Procedura per l installazione 1 Installazione Non installare e o utilizzare la pompa in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali temperatura da 12 C a 40 C umidit relativa 0 95 non condensante AVVERTENZA Per proteggere contro corto circuiti o sovraccarichi si deve installare un interruttore automatico sulla linea d alimentazione principale verso i dispositivi Agilent di capacit adeguata vedere la tabella seguente ATTENZIONE Tab 1 P N 110 Vac 220 Vac 949 9360 10 A 949 9365 6A Prima di avviare la pompa
57. of communication as well as the device address by means of the T plus software The RS 485 is a 2 wires gnd optional half duplex communication link 106 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Communication Format Physical level both RS232 RS485 8 data bit no parity 1stopbit baud rate 600 1200 2400 4800 9600 programmable Communication Protocol The communication protocol is a MASTER SLAVE type where Host MASTER Pump SLAVE The communication is performed in the following way 1 the host MASTER send a MESSAGE CRC to the controller SLAVE 2 the controller answer with an ANSWER CRC to the host The MESSAGE is a string with the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt Where When data is indicated between two quotes 7 it means that the indicated data is the corresponding ASCII character lt STX gt Start of transmission 0x02 lt ADDR gt Unit address 0x80 for RS 232 lt ADDR gt Unit address 0x80 device number 0 to 31 for RS 485 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 107 126 5 Technical Information RS 232 RS 485 Communication Description lt WIN gt Window a string of 3 numeric character indicating the window number from 000 to 9997 for the meaning of each window see the relevant parag
58. otary Vane Fluid DS19 Type vapor pressure curve HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 101 126 5 Technical Information Lubricants VISCOSITY VS TEMPERATURE 4 ar e ren T ee Er i LL II Dx T E EE ca ns ni eni Pa pcs oe S a case 9 ec cM 757771 ee o Dll ig CA RER A 3 4 FER ess RE a Figure 9 Agilent Rotary Vane Fluid DS19 Type viscosity curve 102 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Pump Electronic Controller P1 1 0 J2 SERIAL 00000 00000 0000 0000 Figure 10 Technical Specifications Input voltage 100 120 V 50 60 Hz 200 V 240 V 50 60 Hz Output voltage 189 Vrms 3 ph Max frequency 68 Hz factory setting Starting phase maximum power 780 W maximum time 15 min Normal Operation maximum power 650 W Maximum room temperature 40 C Protection level IP 44 only using the accessory kit P N 949 9367 CE mark EN55011 cat EN61000 3 2 EN61000 3 3 ESD EN61000 4 2 EN61000 4 3 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 103 126 5 Technical Information Pump Electronic Controller EN6100 4 4 EN61000 4 5 EN61000 4 6 EN61000 4 8 EN61000 4 11 EN61010 1 CSA mark EN61010 1 Installation category II pollution degree 2
59. port plate 16 Cylindrical pin 1 2 17 Screw 18 Rubber crown 1 2 19 Half joint with fan 20 Half joint pump side 21 Oil seal ring 1 2 22 Special screw 23 OR gasket 1 2 24 Gas Ballast Valve knob 25 Half plate 26 Inlet screen SR03700237 27 OR gasket 1 2 28 Suction flange 29 Anti suckback shutter 1 2 30 Piston HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 N Description HS452 652 31 OR gasket 1 2 32 Casing gasket 1 2 33 Inner plate SR03700362 34 Pump support 35 Anti wear bushing SR03700370 36 OR gasket 1 2 37 Key motor side SR8999980301 38 First stage vane 1 39 First stage rotor SR03700371 40 Spring 1 2 41 Tongue SR8999980401 42 Second stage vane 1 43 Second stage rotor SR03700367 44 Tie rod SR03700335 45 OR gasket 1 2 46 Bracket 47 Screw 49 Valve cover plate 50 Valve spring 1 2 51 Valve gasket 1 2 52 First stage stator SR03700419 53 Middle plate SR03700421 56 GasBallast Valve shutter 1 2 57 GasBallast Valve spring 1 2 58 Second stage stator SR03700364 59 Oil pump joint SR03700390 60 Special screw 61 End plate SR03700391 62 Tongue 63 Washer HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 71 126
60. proach the pump at least until you have provided ventilation to drive out the smoke Take care not to breathe in the fumes remaining inside the pump in the course of repair work In case of fire do not throw water on the pump Switch the power off and use C02 extinguishers Carefully inspect the flanges to ensure that there are no dust oil dirt or defects of the mating surfaces before making the required connections Ensure that all joints and couplings are locked correctly before starting the pump again after repair work Do not wear any objects that may become entangled in the mechanisms and or act as conductors chains bracelets etc Ensure that the tools to be used are in perfect working condition and have insulating grips where necessary Check that the insulating material of the cables and that the conductors of the test equipment do not show any signs of damage Do not replace the oil immediately after stopping the machine as the oil may still be at high temperature Perform repairs in clean and where possible dust free areas Protect all the clearances of connection points with suitable plastic caps and cover the machined surface areas of all parts stripped down until they are put back on the pump again HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 Caution Notes Before putting the pump back into operation after a breakdown inspect it and check carefully for any other si
61. problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please r
62. raph lt COM gt Command 0x30 to read the window 0x31 to write into the window lt DATA gt an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present The field length is variable according to the data type as per the following table Tab 7 Data Type Field Length Valid Characters Logic L 1 0 OFF 1 ON Numeric N 6 41520 9 right justified with 0 Alphanumeric A 10 from blank to ASCII ETX End of transmission 0x03 CRC XOR of all characters subsequent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE 108 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 The controller can answers with the following response types Tab 8 Type Length Value Description logie 1 byte After a read instruction of a logic window After a read instruction of a Numeric 6 bytes nun numeric window Alpha numeric 10 bytes After a read instruction of an alphanumeric window ACK 1 byte 0x6 The command execution has been successfully completed NAC
63. se Agilent Technologies HS452 HS652 Rotary Vane Pumps Models 949 9360 949 9365 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D Emploi User Manual 87 900 978 01 L 11 2013 Notices Agilent Technologies Inc 2012 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 978 01 L Edition Edition 11 2013 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Lein TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with
64. sionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Le pompe HS452 e HS652 sono delle pompe rotative bistadio a palette a tenuta in bagno d olio azionate da motore elettrico trifase Queste pompe da alto vuoto sono adatte al pompaggio di gas non corrosivi Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical information HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Procedura per l installazione 1 formazioni genera Questo manuale utilizza le seguenti convenzioni LT 2111728 messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali 117121741121 messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate
65. t en le d vissant pour permettre le remplissage d huile dans la pompe lorsque cela s av re n cessaire L utilisateur est tenu de revisser le dispositif dans sa position initiale apr s avoir rempli le r servoir d huile de la pompe et avant de la d marrer Tout manquement ces consignes comporte des risques pour la machine et l op rateur Au cas o la pression du r servoir d huile d passerait les valeurs limites admises ex suite colmatage de l vacuation un m lange de gaz aspir s et d huile sortira du bouchon de s curit Cette d charge de pression continuera jusqu l arr t de la pompe ou l limination de la cause de la surpression limination du colmatage de l vacuation Figure 3 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 47 126 3 Proc dure pour l installation Installation Contr ler que la tension d alimentation correspond la tension indiqu e sur la plaquette du moteur Brancher la pompe la source d alimentation LUNA La pompe doit tre install e de mani re permettre une interruption facile du circuit d alimentation lectrique Cable d alimentation le c ble d alimentation lectrique doit tre un c ble trois torons Phase Neutre Terre La section du c ble doit tre de 0 75 mm minimum AWG18 48 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Proc dure pour l installation 3 Utilisation Avant la mise
66. tate of operation The frequency with which repairs are performed depends on the process and presence of substances that shorten pump life dust abrasives solvents water chemically aggressive substances 96 126 The pump must be cleaned at regular intervals of time Do not clean with Alcohol the plastic or rubber components of the pump Use only the strictly necessary amount of lubricant an excess of lubricating oil like when there is none may sometimes compromise proper operation of the pump Only the recommended lubricants or lubricating oils with similar characteristics and known and experimented quality should be used Oil changes must be made with the oil at a sufficiently high temperature after leaving the pump to cool for a few minutes following operation The drain and filler plugs must not be left open any longer than is strictly necessary HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 When performing maintenance look out for all signals that may precede a breakdown in particular traces of corrosion oil leaks slack joints or couplings Maintenance technicians must be aware of all applicable national directives concerning accident prevention during work on motor driven pumps and should know how to apply them have read and understood all the sections on Safety Rules be familiar with the essential design features and operation of the pump
67. tegui No 109 Col Del Valle 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2013 Printed in ITALY 11 2013 Publication Number 87 900 978 01 L Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 32450 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford 0X5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com
68. the red arrow in the figure below is installed on the pump to guarantee that the pressure inside the oil vessel never exceeds the maximum permitted value of 1 7 bar abs This is a safety device and for this reason the cap must not be replaced damaged or tampered with Temporary removal by unscrewing is allowed to fill oil into the pump when needed Users are responsible for screwing the device back in its original position after filling and before starting the pump Failure to respect these precautions may cause damage to the machine and injury to the operator A mixture of intake gas and oil will issue from the safety cap if the pressure in the oil vessel exceeds the allowed limit values e g obstructed exhaust The flow will continue until the pump is stopped and or the cause of overpressure is removed e g obstruction is removed from exhaust Figure 3 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 61 126 4 Installation Procedure Installation CAUTION Check that your electrical mains voltage corresponds to that indicated on the motor s plate Connect the pump to the power supply WARNING The pump must be installed in a way that allows an easy interruption of the line voltage Power supply cord The correct cable for electrical wiring is a three wires Ph N Earth cable The wire section has to be at least 0 75 mm AWG18 62 126 HS452 HS652 Rotary Vane Pumps User Manual 8
69. ttare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L HS452 HS652 Rotary Vane Pumps User Manual 2 Anleitung zur Installation Allgemeine Hinweise 24 Verwendete Symbole 26 Lagerung 27 Vor der Installation 28 Installation 30 Gebrauch 34 Wartung 35 Entsorgung 37 bersetzung der Originalanleitungen GEB Agilent Technologies 23 126 2 Anleitung zur Installation Allgemeine Hinweise Allgemeine Hinweise 24 126 Dieses Ger t ist f r den professionellen Gebrauch bestimmt Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von Agilent mitgelieferten Zusatzinformationen genau lesen Bei vollst ndiger bzw teilweiser Nichtbeachtung der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Benutzung unter Mifachtung der nationalen Bestimmungen bernimmt Firma Agilent keinerlei Haftung Die Pumpen HS452 und HS652 sind dichte lbadgeschmierte zweistufige Fl gelzellenpumpen die von einem Dreiphasenstrommotor bet tigt werden Diese Hochvakuumpumpen eignen sich f r das Pumpen von nicht korrosiven Gasen In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Verwendung des Ger ts aufgef hrt
70. tung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EU Richtlinie WEEE Schrott von elektrischen und elektronischen Ger ten angebracht Das nur in EU L ndern g ltige Symbol zeigt an dass das betreffende Produkt NICHT zusammen mit normalem Haushalts und Industriem ll entsorgt werden darf sondern einem differenzierten Entsorgungssystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts die Muttergesellschaft oder den Wieder verk ufer kontaktieren um die Abholung und Entsorgung nach Pr fen der Vertrags und Verkaufsbedingungen einzuleiten HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 37 126 2 Anleitung zur Installation Entsorgung 38 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L HS452 HS652 Rotary Vane Pumps User Manual Proc dure pour l installation Indications g n rales 40 Symboles utilis s 41 Emmagasinage 42 Pr paration pour l Installation 43 Installation 45 Utilisation 49 Maintenance 50 Mise au Rebut 52 Traduction de la mode d emploi originale GEB Agilent Technologies 39 126 3 Proc dure pour l installation Indications g n rales Indications g n rales 40 126 Cet appareillage a t con u en vue d une utilisation professionnelle Il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication fournie par Agilent avant d utilis
71. ual 87 900 978 01 L Technical Information 5 Command READ PUMP STATUS Source PC Destination Pump with address 3 02 83 32 30 35 30 03 38 37 STX ADDR WINDOW RD ETX CRC Source Pump with address 3 in stop status Destination PC 02 83 32 30 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA STATUS ETX CRC Windows meaning Tab 9 WIN TYPE DESCRIPTION 000 L START STOP 1 START 0 STOP 001 L LOW SPEED 0 OFF 1 0 008 L REMOTE SERIAL CONFIGURATION 1 REMOTE 0 SERIAL 102 SET POINT VALUE Hz 105 SET POINT HYSTERESIS 0 100 108 N BAUD RATE 0 4 600 1200 2400 4200 9600 117 LOW SPEED ADJUST Hz 120 ROTATIONAL FREQUENCY SETTING Hz High speed adjust HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 111 126 5 Technical Information RS 232 RS 485 Communication Description WIN TYPE DESCRIPTION 200 N BUS CURRENT mA 201 N 3PHASE VOLTAGE Vrms 202 N POWER W 203 N DRIVING FREQUENCY Hz current driving frequency 205 N STATUS 0 stop 2 ramp 3 autotuning 5 normal 6 fail 206 N ERROR CODE Bit 7 motor block Bit 6 short circuit Bit 5 undervoltage Bit 4 motor over temperature Bit 3 power fail Bit 2 controller overt Bit 1 pump overt Bit 0 spare 211 N CO
72. ungen k nnen bei Kontakt t dliche Folgen haben Es ist stets mit gr ter Vorsicht und gem der geltenden Unfallschutzvorschriften vorzugehen Bei eingeschaltetem Ger t ist auf Bewegungs und Hochspannungsteile zu achten Falls die Pumpe im Anschlu an den Betrieb gewartet werden soll ist abzuwarten bis sie abgek hlt ist da ihre Oberfl che eine Temperatur von 60 C berschreiten kann HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L 35 126 2 Anleitung zur Installation Wartung WARNUNG Vor Wartungsarbeiten ist die Pumpe stets energiefrei zu schalten Am Netzschalter sind spezielle Warnschilder INSTANDHALTUNG AM GER T NICHT EINSCHALTEN anzubringen Nach Abschlu der Arbeiten sind die Sicherheitseinrichtungen wieder zu aktivieren WARNUNG Keine Olwechsel unmittelbar nach Stillsetzung des Gerates vornehmen da die Oltemperatur sehr hoch sein kann Bevor dem Hersteller eine Pumpe zur Reparatur zur ckgesandt wird ist das Formular Sicherheit und Gesundheit in der Anlage zum vorliegenden Handbuch auszuf llen und der lokalen Verkaufsstelle zuzustellen Eine Kopie des Formulars ist der Pumpenverpackung vor dem Versand beizulegen Bei eventueller Verschrottung einer Pumpe ist diese entsprechend der einschl gigen nationalen Vorschriften zu entsorgen 36 126 HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Anleitung zur Installation 2 Entsorgung Bedeu
73. warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if
74. y washing freely with water and soap Apply a skin cream after washing Take off and change clothes or shoes on which oil has been spilled Never put rags dripping with oil into the pockets of your clothes When disposing of waste lubricants observe the following environment protection regulations Thelubricants risk contaminating the water and the ground Therefore never pour lubricating products on to the ground into water or in the sewage system All violations of these rules are liable to persecution as provided for by law When using lubricants always keep an oil can nearby Take care in draining off waste oils In disposal of these products respect all regulations in force concerning waste oil disposal The recommended lubricating oil is the Agilent Rotary Vane Fluid DS19 Type The Rotary Vane Fluid DS19 Type is a general purpose mechanical pump fluid specifically engineered to provide superior performance in high speed direct drive mechanical pumps HS452 HS652 Rotary Vane Pumps User Manual 87 900 978 01 L Technical Information 5 These precisely distilled fluids 100 solvent refined neutral paraffinic oil deliver lower base pressure capability faster pump down cycles and reduced maintenance requirements on both the pump and the fluid It is absolutely necessary to continue using the lubricants initially used to fill the tank If this is not possible for organizational or business reasons use only

HS452, HS652 Rotary Vane Pumps

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