EnergyMax Sensors User Manual
Contents
1. Does not depend Working on splitter Standard Figure 7 Ratiometric Method of Optical Calibration The actual calibration involves calculating ratios with respect to the reference sensor for the working standard and then for the Unit Under Test UUT The UUT calibration is calculated as Rvuur Vuur Vrei Rvgg Formula 1 In terms of the ratios the formula becomes Rvyur Ratioyur Ratiogig Formula 2 Although the first formula appears to be somewhat complex note that it is simply the ratio of two directly measured quantities each of which is in turn a ratio as shown in the second formula The beamsplitter is being recalibrated each time the V4 Vref ratio is measured 44 Calculation of Responsivity Rv Calibration Verification Calibration and Warranty thus the precise value of the beamsplitter ratio need not be previously specified Alternatively another way of thinking about this method is that is used to normalize the output of the UUT and working standard to correctly take account of laser energy fluctuations on both short and long time scales To produce a ratio three samples each comprised of 50 pulses are taken and then averaged Each average ratio is then used in Formula 2 to calculate the Responsivity Rv of the UUT in terms of Volts per Joule V J The second page of the calibration certificate paperwork includes the raw calibration data Responsi2. 2 Laser pulse energy measure 34 Limited warranty 46 Linearity 25 M MaxBlack coating 8 MaxBlack EnergyMax sensors 8 MaxBlack EnergyMax sensors with diffusers 13 Maximum Average power 10 Energy 54 Energy density 10 Pulse width 10 Repetition rate 10 MaxUV EnergyMax sensors 15 Measure Energy with an oscilloscope 38 Laser pulse energy 34 Measurement linearity 25 Average power 26 Energy 26 Pulse width 28 Repetition rate 26 N NIST traceability 41 42 Noise equivalent energy 10 O Obtaining service 48 Operation 33 Care of EnergyMax sensors 33 Optical calibration Method 42 Ratiometric method 44 Optical calibration method Calculation of responsivity Rv 45 Calibration fundamentals 43 Calibration verification 45 EnergyMax NIST traceable optical calibration 42 Recertify once a year 43 Oscilloscope 38 Piezoelectric effect 37 Post and stand assembly 7 Preface ix Product overview 8 Diffuse metallic EnergyMax sensors 11 MaxBlack EnergyMax sensors 8 MaxBlack EnergyMax sensors with diffusers 13 MaxUV EnergyMax sensors 15 Quantum EnergyMax Sensors 17 Product shipping instructions 49 Protective cap 33 Publication updates ix Pulse width Linearity 28 Specification 54 Pyroelectric Current and voltage response 24 Technology 23 Q Quantum EnergyMax sensors 17 58 R Ratiometric method of optical calibration 44 Recertify once a year 43 Repetition rate Linearity 26 Specification 53 Response spec
3. Specification 53 C Cable length 10 Calculation of responsivity Rv 45 Calibration Facilities and capabilities 41 Fundamentals 43 Uncertainty 10 Verification 45 Wavelength 10 Calibration and warranty 41 Coherent calibration facilities and capabilities 41 Extended warranty 46 Limited warranty 46 Obtaining service 48 Optical calibration method 42 Product shipping instructions 49 Warranty limitations 47 Care of EnergyMax sensors 33 Coherent Calibration facilities and capabilities 41 Service centers 49 Compliance RoHS 2 U S export control laws ix D Damage Test slide 6 34 Thresholds 25 Declaration of Conformity 3 Description 5 Post and stand assembly 7 Product overview 8 Unpacking and inspection 6 Diffuse metallic EnergyMax sensors 11 E Energy Linearity 26 Range 10 Energy with an oscilloscope measure 38 EnergyMax NIST traceable optical calibration 42 EnergyMax sensors Care 33 Diffuse metallic 11 MaxBlack 8 MaxBlack with diffusers 13 MaxUV 15 Quantum 17 Environmental regulations 2 RoHS compliance 2 Waste Electrical and Electronic Equipment WEEE 2002 2 Extended warranty 46 F Frequently asked questions 53 EnergyMax Sensors User Manual H Heat sinks 21 How to Measure energy with an oscilloscope 38 Measure laser pulse energy 34 I Increasing average power with heat sinks 21 ISO 9001 2000 42 Item part numbers 10 L Label Waste Electrical and Electronic Equip ment WEEE 2002
4. are not available obtain a corrugated cardboard shipping carton with inside dimensions that are at least 6 in 15 cm taller wider and deeper than the sensor The shipping carton must be constructed of cardboard with a minimum of 375 Ib 170 kg test strength Wrap the sensor with polyethylene sheeting or equivalent material and then cushion the sensor in the shipping carton with packing material or urethane foam on all sides between the carton and the sensor Allow 3 in 7 5 cm on all sides the top and the bottom Seal the shipping carton with shipping tape or an industrial stapler 50 Calibration and Warranty Ship the product to Coherent Inc 27650 SW 95th Ave Wilsonville OR 97070 Attn RMA add the RMA number you received from Coherent Customer Service 51 EnergyMax Sensors User Manual 52 Appendix A Frequently Asked Questions APPENDIX A FREQUENTLY ASKED QUESTIONS This appendix provides answers to common questions regarding Coherent EnergyMax sensors Q What if I exceed the average power specification A Use of a sensor beyond its average power spec ification will result in increased error and can result in damage to the sensor if the temperature gets too hot Optional EnergyMax heat sinks are available to increase the average power specifica tion of certain sensors for more information about heat sinks refer to Increasing Average Power With Heat Sinks on page 21 Use of En
5. 3 Voltage a Current 1103 2 153 1 0 T T T T T T T T 3 2000 2200 2400 2600 2800 3000 3200 3400 3600 3800 4000 Time us Figure 3 Pyroelectric Current and Voltage Response 24 Technical Description Damage The following table lists the damage threshold for different types of EnergyMax sensors at several wave Thresholds iene Table 13 Damage Thresholds SENSOR WAVELENGTH NM es ass 2e 3s Toon EE RE LL EL NE EE EL so po een 11 gt LE E EN sm Excimer sensors with MaxOV eaim mo uo oss 375 _ Excimer sensors wT diner Uo 5 750 790 Measurement Coherent has designed the EnergyMax sensor line to p greatly diminish several linearity effects common in Linearity pyroelectric energy sensors The outcome of this design effort is enhanced performance that is now better than at any time in the history of pyroelectric pulsed laser energy measurement 25 EnergyMax Sensors User Manual Energy Linearity Repetition Rate Linearity Average Power Linearity Energy linearity across the entire specified energy range of an EnergyMax sensor is 3 Within 10 to 90 of the energy range specification the sensors are typically linear to 2 The J 50MB IR has a slightly higher energy linearity specification of 3 5 Repetition rate linearity is 1 when us
6. 50MB YAG J 50MB IR J 25MB IR MEDIUM HEAT LARGE HEAT SINK W SINK W 1064 1064 1064 ST D fj lt lt ecc un un 1064 1064 1064 1064 1064 1064 22 Technical Description Table 12 lists the different heat sinks that are available for EnergyMax sensors Table 12 Available Heat Sinks ITEM NAME DESCRIPTION NUMBER EnergyMax small 1123430 ee heat sink Increases average power handling 25 mm aperture EnergyMax medium EnergyMax sensors 1123431 heat sink EnergyMax large Increases average power handling on 50 mm aperture 1123432 heat sink EnergyMax sensors Pyroelectric The EnergyMax sensor line uses a pyroelectric element Technolo gy to measure the energy laser pulse It does this by producing a large electrical charge for a small change in temperature The active sensor circuit takes the current from the sensor element and converts it to a voltage that the instrument can measure Figure 3 shows the relation ship between the current response of the pyroelectric element and the output voltage of the sensor circuit The 23 EnergyMax Sensors User Manual relationship between the current response and output voltage response is fixed so the calibrated peak voltage of the output is the integrated energy of the laser pulse 8 7 253 6 203 2 15 3 D 4 153
7. J DB 25 J DB 25 J DB 25 J DB 25 J DB 25 Item Number 1110573 1110576 1110746 1110743 1110843 1110855 a The maximum average power specification in the table above is when the sensor is used without a heat sink See Increasing Average Power With Heat Sinks on page 21 for information describing how optional heat sinks can increase the average power handling capa bility of these sensors 10 Diffuse Metallic EnergyMax Sensors Description Diffuse Metallic EnergyMax sensors feature broad wavelength coverage 190 nm to 2 1 um and large active area up to 50 mm This series of EnergyMax sensors consists of three different models that allow measurement over a wide range of wavelengths beam diameters average power levels and repetition rates These sensors feature a unique diffused metallic coating which offers signifi cantly higher damage resistance than traditional metallic coatings and produces very little specular reflectance thus eliminating spurious beams that can re enter the laser cavity Table 3 Diffuse Metallic EnergyMax Sensor Selection Chart ACTIVE AREA DIAMETER CALIBRATION WAVELENGTH 10 MM 25 MM 50 MM 1064 nm J 10MT 10KHZ J 25MT 10KHZ J 50MT 10KHZ The 25 mm and 50 mm sensors accept a user installable optional heat sink see Increasing Average Power With Heat Sinks on page 21 which can extend the energy and or repetition rate range These heat sinks allow the J 25
8. Sensor Selection Chart 11 Diffuse Metallic EnergyMax Sensor 12 MaxBlack EnergyMax Sensor With Diffusers Selection Chart 13 MaxBlack EnergyMax Sensor With Diffusers Specifications 14 MaxUV EnergyMax Sensor Selection Chart 15 MaxUV EnergyMax Sensor Specifications sees 16 Quantum EnergyMax Sensor Selection Chart 17 Quantum EnergyMax Sensor Specifications pp 19 Average Power Ratinps cem eret d BA iad todas 22 Available Heat Sinks nn Rte orientis dns A Purse de esp NS 23 Damage Threshold sisi senno etinm tet eta aea Ue esatta ena Neues a 25 Wavelength Compensation Accuracy 30 Coherent Service Centers issue 49 LIST OF FIGURES Waste Electrical and Electronic Equipment Label 2 Typical Dynamic Range Curves of Quantum EnergyMax Sensots 18 Pyroelectric Current and Voltage Response 24 Photo Sensitivity Temperature Characteristics eee 27 Spectral Absorption of EnergyMax Sensor 31 Spectral Sensitivity of EnergyMax Sensors With Diffusers 32 Ratiometric Method of Optical Calibration RN 44 Vil EnergyMax Sensors User Manual viii Preface U S Export Control Laws Compliance Publication Update
9. from the laser pulse the sensors are also sensitive to vibrational and acoustical noise If this noise is large enough the sensors will respond Typically this occurs at the very low end of the available ranges Confirm measurements with the Trigger icon As a final confirmation that the system is properly measuring pulse energy verify that the Trigger icon on the meter is visible active An active Trigger icon indicates the meter is actively trig gering and collecting data After the laser turns off the meter holds the most recent energy pulse measured by the sensor A visible Trigger icon gives assurance that the meter is displaying the latest reading rather than a previous measurement 37 EnergyMax Sensors User Manual How to Measure Energy With an Oscilloscope This section presents a step by step procedure for setting up an oscilloscope and using a pyroelectric EnergyMax sensor to accurately read a peak voltage output 1 To assure accuracy of a pulse energy measurement make sure the oscilloscope is calibrated properly Check the recalibration due dates Select a scope that has a sensitivity of at least 2 mV and a bandwidth of at least 20 MHz To connect an EnergyMax sensor to an oscillo scope you will need a J POWER DB25 to BNC accessory available from Coherent Use the 1 Mohm input impedance of the oscillo scope when connecting all EnergyMax sensors To avoid affecting the calibration of the senso
10. upgrades and perform any needed repairs and recali brate the Product for a fixed service fee as established by the Company from time to time and in effect at the time of service If the product cannot be recertified due to damage beyond repair parts obsolescence or other reasons the Customer may be informed that an Extended Warranty program is not available for the Product If the Product fails and is returned to the Company within one year following the date of recalibration and recertifi cation service the Company will at its option repair or replace the Product or any component found to be defec tive If the Product must be replaced and the Product is no longer available for sale Coherent reserves the right 46 Warranty Limitations Calibration and Warranty to replace with an equivalent or better Product This watranty applies only to the original purchaser and is not transferable The foregoing warranties shall not apply and Coherent reserves the right to refuse warranty service should malfunction or failure result from Damage caused by improper installation handling or use Laser damage including sensor elements damaged beyond repair e Failure to follow recommended maintenance procedures s Unauthorized product modification or repair Operation outside the environmental specifications of the product Coherent assumes no liability for Customer supplied material returned with Products for
11. warranty service or recalibration THIS WARRANTY IS EXCLUSIVE IN LIEU OF ALL OTHER WARRANTIES WHETHER WRITTEN ORAL OR IMPLIED COHERENT SPECIFICALLY DISCLAIMS THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR PARTICULAR PURPOSE IN NO EVENT SHALL THE COMPANY BE LIABLE FOR ANY INDIRECT INCIDENTAL OR CONSEQUENTIAL DAMAGES IN CONNECTION WITH ITS PRODUCTS 47 EnergyMax Sensors User Manual Obtaining Service In order to obtain service under this warranty Customer must notify the Company of the defect before the expira tion of the warranty period and make suitable arrange ments for the performance of service The Company shall in its sole discretion determine whether to perform watranty service at the Customer s facility at the Company s facility or at an authorized repair station If Customer is directed by the Company to ship the product to the Company or a repair station Customer shall package the product to protect from damage during shipping and ship it to the address specified by the Company shipping prepaid The customer shall pay the cost of shipping the Product back to the Customer in conjunction with recalibration and recertification the Company shall pay the cost of shipping the Product back to the Customer in conjunction with product failures within the first twelve months of time of sale or during an extended twelve month warranty period A Returned Material Authorization number RMA assigned by
12. LInearity of Quantum EnergyMax Sensors 21 Pulse Width Linear anse 28 EnergyMax Sensors User Manual Spectral Response tesa babe 28 Applying Wavelength Compensation 29 Operation DM Ru 33 Care of Energy Max Sensors u a tate Re e dog EXE RE 33 How to Measure Laser Pulse Energy 34 How to Measure Energy With an Oscilloscope eee 38 Calibration and Warranty sss 41 Coherent Calibration Facilities and Capabilities pp 41 Optical Calibration Method ensemble 42 EnergyMax NIST Traceable Optical Calibration 42 Recertity aa 43 Calibration Fundamentals pp 43 Calculation of Responsivity Rv esee 45 Calibration Yerificatign aos rer 45 Limited Warranty M ei 46 Extended Warn ipu ese See e E Ud od US 46 Warranty Limitations sooo epic o duae oh fn S 47 Obtaining Servite iiie reel pei San ic iens Quee opea dn AUS ES Folie LS 48 Product Shipping Instructions 49 Appendix A Frequently Asked Questions 53 ilo C m 57 vi OPA ANSP WN m QUE UNIS SOV AUD Table of Contents LIST OF TABLES MaxBlack EnergyMax Sensor Selection Chart 8 MaxBlack EnergyMax Sensor Specifications pp 10 Diffuse Metallic EnergyMax
13. MT 10KHZ to be used up to 30W average power and J SOMT 10KHZ to be used up to 50W average power 11 EnergyMax Sensors User Manual Use of EnergyMax sensors at average power levels beyond the base model average power specifica tion without the optional heat sink may cause permanent damage to the sensor Diffuse Metallic EnergyMax sensors are compatible with Coherent LabMax TOP 3sigma EPM1000 and EPM2000 meters Table 4 Diffuse Metallic EnergyMax Sensor Specifications Energy Range Noise Equivalent Energy Wavelength Range um Active Area Diameter mm Max Avg Power W Max Pulse Width us Max Rep Rate pps Max Energy Density mJ cm Sensor Coating Diffuser Calibration Wavelength nm Calibration Uncertainty Linearity Cable Length m Cable Type Item Number J 10MT 10KHZ 100 nJ to 200 uJ lt 10nJ 0 3 to 2 1 10000 50 1064 nm 10 ns Diffuse Metallic 1064 2 J 50MT 10KHZ 500 uJ to 1J lt 16 HJ 0 3 to 2 1 10000 500 1064 nm 10 ns Diffuse Metallic 1064 2 J 25MT 10KHZ 50 uJ to 100 mJ lt 2uJ 0 3 to 2 1 10000 500 1064 nm 10 ns Diffuse Metallic 1064 2 Refer to Measurement Linearity on page 25 2 5 J DB 25 1110574 2 5 J DB 25 1110856 2 5 J DB 25 1110747 a The maximum average power specification in the table above is when the sensor is used without a heat sink See In creasing Average Power With Heat Sink
14. User Manual EnergyMax Sensors COHERENT User Manual EnergyMax Sensors COHERENT 27650 SW 95th Ave Wilsonville OR 97070 EnergyMax Sensors User Manual This document is copyrighted with all rights reserved Under the copyright laws this document may not be copied in whole or in part or reproduced in any other media without the express written permission of Coherent Inc Permitted copies must carry the same proprietary and copyright notices as were affixed to the original This exception does not allow copies to be made for others whether or not sold but all the material purchased may be sold given or loaned to another person Under the law copying includes translation into another language Coherent and the Coherent Logo are registered trademarks of Coherent Inc EnergyMax is a trademark of Coherent Inc Every effort has been made to ensure that the data given in this document is accurate The information figures tables specifications and schematics contained herein are subject to change without notice Coherent makes no warranty or representation either expressed or implied with respect to this document In no event will Coherent be liable for any direct indirect special incidental or consequential damages resulting from any defects in its documentation Technical Support In the U S Should you experience difficulties with your product or need technical information please vi
15. a tion needs of our customers Optical calibration is a core 41 EnergyMax Sensors User Manual Optical Calibration Method EnergyMax NIST Traceable Optical Calibration competency at Coherent and we strive to continually improve our methods precision and repeatability Addi tionally most of the calibrations are performed with highly automated systems thus reducing the possibility of human error to nearly zero Strict quality inspections during many stages of calibration and testing assure a precise and accurate instrument that is NIST traceable and CE marked The benefit to our customers is that instruments calibrated by Coherent will consistently perform as expected under their actual use conditions We are a registered ISO 9001 2000 company our prod ucts are NIST traceable and our calibration labs are fully ANSI Z540 compliant In addition to the technological advantage we also strive to deliver the best service in the industry with a knowl edgeable and responsive staff and rapid turnaround Coherent provides a certificate of NIST U S National Institute of Standards and Technology traceability with every sensor that is shipped The Rv voltage responsivity calibration factor of a pyroelectric energy sensor specifies the magnitude of the voltage pulse output for one joule optical input Only if the Rv calibration factor is known can quantitative energy measurements be made with an energy sensor 42 Recerti
16. any of its interlocks defeated is always at the operator s risk iii EnergyMax Sensors User Manual iv Table of Contents TABLE OF CONTENTS eee Fee tante c torpet iMt 1 U S Export Control Laws Compliance pp ix Publication pd ates n na ne ae ix Symbols Used in This x Sale ee nie nie ne 1 Environmental Regulations seine kei 2 RoHS Compliance 5 sce orae ee 2 Waste Electrical and Electronic Equipment WEEE 2002 2 Declaration of Conformity pp 3 ears rez anne er do E 5 Unpacking and Inspection beri ne ae dt eA 6 Post and Stand Assembly pe 7 Product Overview say 8 MaxBlack EnergyMax Sensors 8 Diffuse Metallic EnergyMax Sensors eee 11 MaxBlack EnergyMax Sensors With Diffusers sss 13 MaxUV EnergyMax Sensors ar na riae 15 Quantum EnergyMax Sensors Ne 17 Technical Description 21 Increasing Average Power With Heat Sinks eee 21 Pyrveleeinie Technology asus ae Ad en 23 Damage Thresholdss la Ma 25 Measurement LIME ATILY din manant 25 Energy Linearity P Rn 26 Repetition Rate Linearity toe M trt tuet 26 Average Power Lineanty en 26 Temperature
17. ctromagnetic Compatibility Product Family Standard for Measurement Control and Laboratory Equipment to include the following test specifications as of May 2007 EN55011 Class A Radiated Emissions EN61000 4 2 Electrostatic Discharge Performance Criteria B Unit may respond to an ESD event but will return to normal without user intervention EN61000 4 3 Radiated Immunity Performance Criteria A k Date _ 8 11 107 Director of Engineering f cL Date _ amp President Coherent Inc Page 1 of 1 EnergyMax Sensors User Manual Description DESCRIPTION This section discusses Unpacking and inspection page 6 Post and stand assembly page 7 Product overview page 8 MaxBlack EnergyMax sensors page 8 Diffuse Metallic EnergyMax sensors page 11 MaxBlack EnergyMax sensors with diffusers page 13 MaxUV EnergyMax sensors page 15 Quantum EnergyMax sensors page 17 EnergyMax Sensors User Manual Unpacking All Coherent EnergyMax sensors are carefully tested and Inspection and inspected before shipping Save the inner carton to store the sensor when not in use and to ship the sensor to Coherent for calibration Inspect each of the following items for damage The EnergyMax sensor Post and stand components see the illustration on page 7 Damage test slide only included with sensors that do not have a built in diffuser window Heat sink if ordered optional access
18. ergyMax sensors at average power levels beyond the base model average power specifica tion without the optional heat sink may cause permanent damage to the sensor Q What if I exceed the repetition rate specification A Use of EnergyMax sensors beyond the repeti tion rate specification will result in additional measurement error FieldMaxII and 3sigma meters will have less additional error than EPM1000 and EPM2000 meters Increased repetition rate also 53 EnergyMax Sensors User Manual increases the average power so do not apply more average power than can be handled by the sensor Q What if I exceed the maximum energy specification A EnergyMax sensors contain an active circuit that will saturate if the applied energy is too high There is some headroom above the maximum spec ification the amount of headroom is dependent upon sensor responsivity and varies from 5 to 25 depending on the individual sensor but the maximum level should not be exceeded Another implication of using a sensor above its rated energy is the potential of high energy density damaging the coating Q What if I exceed the pulse width specification A Although there is some headroom built into the specification using an EnergyMax sensor with a laser that has a pulse width longer than the speci fied maximum pulse width will result in increased measurement error For example if you use the sensor with double the maximum pulse width the r
19. esult will be an additional 2 to 3 error Why isn t there a minimum pulse width specification A These pyroelectric energy sensors can function with pulse widths as short as nanoseconds picosec onds or even femtoseconds and still measure correctly As described in the previous answer the maximum pulse width specification is important and is limited by the fall time of the meter so Coherent only specs the maximum not the minimum pulse width As the pulse width gets shorter the only change that happens is that the 54 Appendix A Frequently Asked Questions damage threshold on the energy sensors decreases When using really short pulses pay close attention to the damage threshold specifications and make use of the damage test slide Table 13 on page 25 lists damage thresholds by pulse width Q Can I use the sensor at a wavelength other than the one it was calibrated at A Yes EnergyMax sensors contain a wavelength compensation table in the circuitry inside the sensor Plug the sensor into your meter and go to the wavelength setup Enter the wavelength of your laser and the sensor will correct for any spectral and or transmission changes due to wavelength refer to Spectral Response on page 28 for more information 55 EnergyMax Sensors User Manual 56 Index INDEX A Active area diameter 10 Aligning the beam 34 ANSI 7540 42 Average power Increasing with heat sinks 21 Linearity 26 Ratings 22
20. fy Once a Year Calibration Fundamentals Calibration and Warranty Coherent laser power and energy meters are precision instruments capable of delivering very accurate measurements as well as providing many years of useful service To maintain this high level of performance and to ensure compliance with your quality and ISO certifi cation it is important to have your measurement system serviced and recertified once per year Extended use of laser power and energy meters and sensors as well as environmental factors can have an adverse effect on accuracy and can also result in wear and or damage to parts critical to maintaining optimum performance Coherent performs an optical calibration using a ratio metric substitution method to remove laser energy varia tion as a source of error and to eliminate dependence on the absolute value of the beam splitter ratio By introducing a beamsplitter each laser pulse can impinge on two sensors When a dual channel meter such as the Coherent EPM2000 is employed the ratio of two sensor outputs can be measured on each pulse This ratio is independent of the actual pulse energy 43 EnergyMax Sensors User Manual A reference sensor is used in the ratiometric substitution method though its actual responsivity Rv value is never used in the calculations Only the Rv of the working standard is used Laser EE U U T Reference Sensor
21. g how optional heat sinks can increase the average power handling capa Quantum EnergyMax Sensors Description The Quantum EnergyMax series consists of three different models that provide very low pulse energy measurement down to 20 pJ Two of the models J 10SI LE and J 10SI HE incorporate a Silicon photo diode and one model J IOGE LE incorporates a Germanium photodiode All three models contain large 10 mm clear apertures and operate at repetition rates from single pulse up to 10 kHz Table 9 Quantum EnergyMax Sensor Selection Chart ACTIVE AREA DIAMETER CALIBRATION WAVELENGTH SENSOR MODEL J 10SI LE 532 nm Silicon 1064 nm J 10GE LE The main difference between Quantum EnergyMax sensors and other Coherent EnergyMax sensors is their sensitivity Quantum EnergyMax sensors are capable of measuring considerably smaller signals than the rest of the EnergyMax sensor line They do this by utilizing a photodiode rather than a pyroelectric element Due to the guantum nature of their response photodiode sensors are inherently more sensitive than pyroelectric sensors which are thermal based One consequence of 17 EnergyMax Sensors User Manual this extra sensitivity is the possibility of measurement error or noise from stray modulated light sources for example stray reflections or room lights in a laboratory environment For this reason Quantum EnergyMax sensors are designed for use with a small integrated inp
22. g pulsed measurements Ambient noise may be the culprit If the noise is small enough the meter once it detects a valid pulse will ignore this noise If the ambient noise is too large it can directly impact the analysis To determine if the meter is triggering on noise turn on the rep rate measurement feature on the energy meter This feature displays the repetition rate of the pulses the meter is capturing If the display shows strange varying rep rates the most likely cause is noise A rep rate that matches the rep rate of the laser being measured is an indication that the meter is taking valid readings In addition to adjusting the energy range of the meter adjusting the trigger level can also help prevent triggering on noise The trigger level helps determine the level of noise ignored within each range and is set as a percentage of the selected energy range For example if the trigger level is set to 5 and the energy range is 30 mJ all readings below 1 5 mJ 30 mJ x 0 05 are ignored as noise Typically it is a good idea to initially set the trigger level in the 5 to 10 range This trigger level can then be adjusted 1f too many or too few readings are being ignored A note about noise In addition to the pyroelectric effect which allows the crystalline element to 36 Operation respond to laser pulses the crystal also has a piezo electric effect This means that in addition to being sensitive to the thermal changes
23. he sensor for laser damage before each use If the surface appears damaged contact Coherent for assis tance see Table 15 Coherent Service Centers on page 49 for contact information 33 EnergyMax Sensors User Manual How to The following procedure explains how to measure laser Measure Laser Pulse 1 pulse energy Test the sensor coating to determine its laser damage tolerance Before placing the sensor in the beam path posi tion the damage test slide which has the same coating as the sensor in the beam path for a few pulses to determine if the sensor coating can with stand the laser energy without being damaged Damage test slides are only included with sensors that do not have a built in diffuser window If the test slide is damaged by the laser energy either expand the beam or attenuate the beam to reduce the energy density impacting the sensor coating Before placing the sensor in the beam path compare the laser parameters and the sensor specifications to make sure they are compatible with each other Align the sensor in the beam path After confirming that the energy density is safe for the sensor coating remove the protective cap from the sensor and place the sensor in the beam path The absorption of the sensor coating is not highly dependent on the angle of the incident beam so placing the sensor roughly perpendicular to the 34 Operation incident beam is acceptable The
24. ing Ener gyMax sensors with 3sigma FieldMaxII TOP and Field within the repetition rate specification of the meter In practice the actual error is often much less than 1 Repetition rate linearity is 1 up to 750 pps when using EnergyMax sensors with 1000 and EPM2000 and is 2 at repetition rates greater than 750 pps The pyroelectric crystal is sensitive to temperature at a rate of approximately 0 2 per degree Celsius change in temperature Historically this has limited the average power to which a sensor can be exposed Coherent has implemented a temperature compensation circuit into EnergyMax sensors to limit the amount of error associ ated with operation at higher average powers This circuit allows measurement of higher pulse energy at faster repetition rates than ever before and enables the use of removable heat sinks EnergyMax sensors have less than 2 error when used at maximum average power and have less than 0 5 undershoot when hit with the full power rating In prac tice many EnergyMax sensors have typical average power linearity error of less than 1 26 Technical Description Temperature Silicon Quantum EnergyMax sensors J 10SI LE i J 10SI HE have a temperature linearity component due Linearity of ate Quantum to a photo sensitivity temperature characteristic that varies by wavelength as shown in the figure below In EnergyMax practice the error is less than 1 unless the se
25. l Description TECHNICAL DESCRIPTION Increasing Average Power With Heat Sinks This section discusses Increasing average power with heat sinks this page Pyroelectric technology page 23 Damage thresholds page 25 Measurement linearity page 25 Spectral response page 28 Using a heat sink increases the average power handling capability of EnergyMax sensors This optional acces sory is designed for measuring a pulsed laser at either higher repetition rates or higher energy levels The average power specification is dependent upon coating and wavelength The following table provides average power ratings for several wavelength and sensor combinations Note that 10 mm aperture sensors do not accept heat sinks 25 mm aperture sensors accept small and medium heat sinks and 50 mm aperture sensors accept large heat sinks 21 EnergyMax Sensors User Manual Use of EnergyMax sensors at average power levels beyond the base model average power specifica tion without the optional heat sink may cause permanent damage to the sensor Table 11 Average Power Ratings APERTURE WAVELENGTH NO HEAT SMALL HEAT SENSOR MODEL MM NM SINK W SINK W J 10MB LE and J 10MB HE J 25MB LE and J 25MB HE J 50MB LE and J 50MB HE V 193 V 248 J 50MUV 193 w o diffuser J 50MUV 193 w diffuser J 50MUV 248 w o diffuser J 50MUV 248 w diffuser J 10MT 10KHZ J 25MT 10KHZ J 50MT 10KHZ J
26. lse Width us Max Rep Rate pps Max Energy Density mJ cm 2 Sensor Coating Calibration Wavelength nm Calibration Uncertainty Linearity Cable Length m Cable Type Item Number a The maximum average power specificati Power With Heat Sinks on page 21 for in bility of these sensors Use of EnergyMax sensors at average power levels beyond the base model average power specifica tion without the optional heat sink may cause permanent damage to the sensor MaxUV EnergyMax sensors are compatible with Coherent LabMax TOP 3sigma FieldMaxII TOP FieldMaxII P EPM1000 and EPM2000 meters Table 8 MaxUV EnergyMax Sensor Specifications J 25MUV 248 125 uJ to 250 mJ Au 0 19 to 2 1 25 2 5 J DB 25 1110745 J 25MUV 193 50 uJ to 100 mJ 2yuJ 0 19 to 2 1 25 2 5 J DB 25 1110741 J 50 MUV 248 W O DIFFUSER 500 uJ to 1J lt 16 0 19 to 2 1 50 10 J 50MUV 248 W DIFFUSER 500 uJ to 1J lt 16 ul 0 19 to 0 266 er to Measurement Linearity on page 2 5 J DB 25 1146243 16 2 5 J DB 25 1110572 J 50MUV 193 W O DIFFUSER 125 uJ to 250 mJ lt 4HJ 0 19 to 2 1 50 2 5 J DB 25 1146237 J 50MUV 193 W DIFFUSER 125 uJ to 250 mJ lt 4HJ 0 19 to 0 266 2 5 J DB 25 1110575 on in the table above is when the sensor is used without a heat sink See Increasing Average ormation describin
27. n rate energy range and or pulse width are available Contact Coherent b Sensor is rated for a maximum of four minutes continuous use before the sensor must be cooled for at least four minutes to achieve lt 2 measurement non linearity 14 Description MaxUV Energy These sensors are specifically optimized for use with Max Sensors AtF lasers operating at 193 nm and KrF lasers operating at 248 nm and feature high accuracy and large active areas up to 50 mm The EnergyMax series utilizes a unique coating called MaxUV that delivers superior long term damage resistance Two of the 50 mm diameter models labeled as with Diffuser in the model name incorporate a DUV quartz diffuser for increased coating damage resistance Table 7 MaxUV EnergyMax Sensor Selection Chart CALIBRATION WAVELENGTH 50 MM W DIFFUSER 50 MM W O DIFFUSER Inm 25MUV 193 J 50MUV 193 J 50MUV 193 Z248nm J 25MUV 248 J 50 MUV 248 J 50 MUV 248 Both sensors accept a user installable optional heat sink see Increasing Average Power With Heat Sinks on page 21 which can extend the maximum energy or average power range These heat sinks allow 25 mm sensors to be used up to 18W average power and 50 mm sensors to be used up to 43W average power both at 193 nm 15 EnergyMax Sensors User Manual Energy Range Noise Equivalent Energy Wavelength Range um Active Area Diameter mm Max Average Power W Max Pu
28. nd to prevent damage to this product or any equipment connected to it There are no user serviceable parts in Coherent EnergyMax sensors For service information refer to Obtaining Service on page 48 Do not operate the system if its panels are removed or any of the interior circuitry is exposed Do not operate the system in wet or damp conditions or in an explosive atmosphere Do not operate the system if there are suspected fail ures Refer damaged units to qualified Coherent service personnel EnergyMax Sensors User Manual Environmental Regulations RoHS These Coherent products are RoHS EU Restriction of Compliance Hazardous Substances compliant Waste Electrical The European Waste Electrical and Electronic Equip and Electronic ment WEEE Directive 2002 96 EC is represented by crossed out garbage container label Figure 1 The Equipment purpose of this directive is to minimize the disposal of WEEE 2002 ilifate i WEEE as unsorted municipal waste and to facilitate its separate collection Figure 1 Waste Electrical and Electronic Equipment Label Safety Declaration of Conformity D131091 Revision AA Declaration of Conformity We Coherent Inc 7470 SW Bridgeport Road Portland Oregon USA 97224 declare under sole responsibility that the EnergyMax Sensor meets the intent of Directive 89 336 EEC for Electromagnetic Compatibility Compliance was demonstrated per testing to EN61326 Ele
29. nsors are Sensors used in a very hot environment To calculate A C compare the temperature of the environment within which the sensor is being used to the calibration temper ature Add 1 to 2 C for sensor electronics Typ 1 5 1 0 0 5 Temperature Coefficient C 0 5 190 400 600 800 1000 Wavelength nm Figure 4 Photo Sensitivity Temperature Characteristics 27 EnergyMax Sensors User Manual Pulse Width Linearity Spectral Response There is a small amount of pulse width linearity error when using a sensor at its maximum specified pulse width This error is less than 1 At pulse widths less than 10 us this error is negligible and is less than 0 5 The J 50MB IR sensor has a slightly higher pulse width linearity specification of 1 5 All EnergyMax sensors incorporate a diffuse coating to minimize specular reflections which eliminate spurious beams that can re enter the laser cavity In addition all EnergyMax sensors include the conve nience of onboard electronics that contain built in wave length compensation factors When using the sensor with a meter such LabMax TOP 3sigma FieldMaxII TOP or FieldMaxII P enter the wavelength of the laser being measured into the meter and the sensor output will be automatically compensated Wavelength compensation results in an additional error factor when engaged and when the sensor is being used a
30. ory This manual Advise Coherent immediately of any shortages or damage refer to Obtaining Service on page 48 A Returned Material Authorization RMA will be issued for any damaged sensor refer to Product Shipping Instructions on page 49 Description Post and Stand Assembly Post Post Holder Stand 1 4 20 SHC Screw supplied EnergyMax Sensors User Manual Product Coherent EnergyMax sensors are known as smart sensors that is they incorporate onboard electronics Overview Vz that automatically correct for pyroelectric sensor temper ature as well as built in wavelength compensation factors This section gives an overview of each of the five types of sensors that comprise the EnergyMax Family MaxBlack Diffuse Metallic MaxBlack With Diffusers MaxUV and Quantum MaxBlack The MaxBlack EnergyMax series consists of six EnergyMax different models that allow measurement over a wide Sensors range of wavelengths beam diameters average power levels and repetition rates All MaxBlack EnergyMax sensors feature the MaxBlack coating which offers significantly better damage resistance and mechanical durability characteristics compared to black paint coatings Table 1 MaxBlack EnergyMax Sensor Selection Chart ACTIVE AREA DIAMETER CALIBRATION WAVELENGTH 10 25 MM 50 10MB LE J 25MB LE J 50MB LE 1064 nm Description The 25 and 50 mm diameter sensors acce
31. pt a user install able optional heat sink see Increasing Average Power With Heat Sinks on page 21 which can extend the energy and or repetition rate range These heat sinks allow 25 mm sensors to be used up to 15W average power and 50 mm sensors to be used up to 24W average power Use of EnergyMax sensors at average power levels beyond the base model average power specifica tion without the optional heat sink may cause permanent damage to the sensor MaxBlack EnergyMax Sensors are compatible with Coherent LabMax TOP 3sigma FieldMaxII TOP FieldMaxII P EPM1000 and EPM2000 meters EnergyMax Sensors User Manual Table 2 MaxBlack EnergyMax Sensor Specifications J 50MB HE J 50MB LE J 25MB HE J 25MB LE J 10MB HE J 10MB LE Energy Range 250 uJ 500 mJ 500 uJ 1J 25 uJ 50mJ 10 uJ 20 mJ 300 nJ 600 uJ Noise Equivalent Energy lt 8uJ lt 16 pJ lu lt 0 5 lt 20 nJ Wavelength Range um 0 19 12 0 19 12 0 19 12 Active Area Diameter mm 50 50 25 25 10 10 Max Avg Power W 10 10 5 5 4 4 Max Pulse Width us 17 17 17 17 17 17 Max Rep Rate pps 300 300 1000 1000 1000 1000 Max Energy Density mJ em 500 500 500 500 500 1064 nm 10 ns Sensor Coating MaxBlack MaxBlack MaxBlack MaxBlack MaxBlack MaxBlack Diffuser Calibration Wavelength nm bration Uncertainty Linearity Refer to Measurement Linearity on page 25 Cable Length m 2 5 2 5 2 5 2 9 2 5 2 5 Cable Type J DB 25
32. r do not add coax cable length when using a BNC terminated sensor with the oscilloscope Set up the scope as follows Bandwidth to 20 MHz DC coupling Trigger on slope and internal source or use the laser sync output and external source Estimate the approximate EnergyMax sensor voltage output expected based on the Rv V J of the sensor available on calibration certificate and 38 Operation calibration sticker attached to the sensor cable and the typical laser pulse energy 7 If you know your expected laser pulse rep rate set the scope time base to show 2 pulses on the screen This helps set the trigger and allows observation of the true baseline of the pulse As an example for a laser running at 10 pps set the scope time base to 20 msec division Once proper triggering is taking place use the vertical adjust to set the baseline of the EnergyMax voltage pulse to coincide with a horizontal grid line see the following figure This becomes the zero for the peak voltage reading Tek Stop _ Ichi Coupling amp Impedance DC 200mV 4 TM 100us A Ch 160 Q 1110 00 m so Coupling Invert Bandwidth ine Zee Position Offset DC Off 20 MHz div 940mdiv 0 000 V d 39 EnergyMax Sensors User Manual 8 Adjust the time base of the scope to show a single EnergyMax pulse and focus on the leading edge to accurately read the peak
33. response of the sensor is dependent on the location of the beam on the sensor surface the spatial uniformity of diffuse metallic is 1 5 MaxBlack and MaxUV is 5 with a 4 to 6 mm diameter beam Aligning the beam to the center of the sensor is a good practice for the most repeatable results 3 Connect the sensor to the meter and then select a range Make sure there is a secure connection between the sensor and the meter Turn on the meter and select the proper setting to measure energy per pulse joules Match the appropriate wavelength of the sensor and the laser by adjusting the wave length correction setting on the meter Select the appropriate energy range by exposing the sensor to the laser beam When manually selecting an energy range start at the highest range possible and then step down through the ranges until valid read ings show up on the display Selecting too low of a range may cause an error message to display or cause the meter to pick up ambient noise instead of actual energy readings Picking up ambient noise is an indication that the energy range needs to be adjusted upward A meter that does not display any 35 EnergyMax Sensors User Manual readings is an indication that the range is set too high and needs to be adjusted downward 4 Adjust the trigger threshold to minimize noise When using an energy sensor at its lowest energy range the meter may display unexpected readings while takin
34. s on page 21 which can extend either the maximum energy or average power range These heat sinks allow the J 25MB IR sensor to be used up to 15W average power and the J SOMB YAG sensor to be used up to 45W average power 13 EnergyMax Sensors User Manual Use of EnergyMax sensors at average power levels beyond the base model average power specifica tion without the optional heat sink may cause permanent damage to the sensor MaxBlack EnergyMax sensors with diffusers are compatible with Coherent LabMax TOP 3sigma FieldMaxII TOP FieldMaxII P EPM1000 and EPM2000 meters Table 6 MaxBlack EnergyMax Sensor With Diffusers Specifications J 50MB YAG J 50MB IR J 25MB IR Energy Range 1 5 mJ to 3J 1 0 mJ to 3J 1 5 mJ to 3J Noise Equivalent Energy uJ lt 50 lt 100 lt 50 Wavelength Range um 0 266 to 2 1 0 5 to 3 0 0 532 to 2 1 Max Beam Size mm 35 30 12 5 Max Avg Power W 20 15 20 340 Max Pulse Width us 1000 860 Max Rep Rate pps 50 30 20 14 0 1064 nm 10 ns 2 8 532 nm 10 ns 0 75 355 nm 10 ns 1 0 266 nm 10 ns Diffuser YAG IR IR Calibration Wavelength nm 1064 1064 2940 1064 Linearity Refer to Measurement Linearity on page 25 Cable Length m 2 5 2 5 2 5 Cable Type J DB 25 J DB 25 J DB 25 Item Number 1110744 1155722 1110577 gt 100 2940 nm 100 hs 5 0 1064 nm 10 ns Max Energy Density J cm a Modified sensors with higher repetitio
35. s Preface This manual contains user information for the Coherent EnergyMax sensors It is the policy of Coherent to comply strictly with U S export control laws Export and re export of lasers manufactured by Coherent are subject to U S Export Administration Regulations which are administered by the Commerce Department In addition shipments of certain components are regu lated by the State Department under the International Traffic in Arms Regulations The applicable restrictions vary depending on the specific product involved and its destination In some cases U S law requires that U S Government approval be obtained prior to resale export or re export of certain articles When there is uncertainty about the obligations imposed by U S law clarification should be obtained from Coherent or an appropriate U S Government agency To view information that may have been added or changed since this publication went to print connect to www Coherent com EnergyMax Sensors User Manual Symbols Used in This Document This symbol is intended to alert the operator to the presence of dangerous voltages associated with the product that may be of sufficient magnitude to consti tute a risk of electrical shock This symbol is intended to alert the operator to the presence of important operating and maintenance instructions Safety SAFETY Carefully review the following safety information to avoid personal injury a
36. s on page 21 for information describing how optional heat sinks can increase the average power handling capability of these sensors 12 Description MaxBlack MaxBlack EnergyMax sensors with diffusers are specif EnergyMax ically designed for use with very high energy peak power Sensors With lasers operating at low repetition rates such as those E based on Nd YAG Ruby Ho YAG and Erbium The Diffusers YAG Harmonics sensor can work at 1064 nm 532 nm 355 nm and 266 nm without the need to change diffusers or any other accessories The J 25MB IR sensor can operate throughout the 694 nm to 2 1 um wavelength range The J 50MB IR sensor operates from 500 to 2940 nm and is optimized for use with medical lasers These sensors combine a MaxBlack coating with a diffuser that produces superior damage resistance char acteristics This combination enables operation with lasers that produce either very high energy per pulse or very high peak fluences Table 5 MaxBlack EnergyMax Sensor With Diffusers Selection Chart CALIBRATION ACTIVE AREA DIAMETER WAVELENGTH 25 MM FOR RUBY TO Ho YAG 50 MM FOR ND YAG 50 mm for Erbium 1064 nm J 25MB IR J 50MB YAG J 50MB IR a Sensor is rated for a maximum of four minutes continuous use before the sensor must be cooled for at least four minutes to achieve lt 2 measurement non linearity These sensors accept a user installable optional heat sink see Increasing Average Power With Heat Sink
37. sit our website www Coherent com You can obtain additional support by either telephoning our Technical Support Hotline at 1 800 343 4912 or e mailing our Support Team at support instruments Coherent com Telephone coverage is available Monday through Friday except U S holidays If you call outside our office hours your call will be taken by our answering system and will be returned when the office reopens If there are technical difficulties with your product that cannot be resolved by support mechanisms outlined above please e mail or telephone Coherent Technical Support with a description of the problem and the corrective steps attempted When communicating with our Technical Support Department via the web or telephone the model and serial number of the product will be required by the Support Engineer responding to your request Outside the U S If you are located outside the U S visit our website for technical assistance or telephone our local Service Representative Representative phone numbers and addresses can be found on the Coherent website www Coherent com Coherent provides web and telephone technical assistance as a service to its customers and assumes no liability thereby for any injury or damage that may occur contemporaneous with such services These support services do not under any circumstances affect the terms of any warranty agreement between Coherent and the buyer Operating a Coherent product with
38. t a wavelength different from the wavelength at which it was calibrated The accuracy is based upon the sensor coating 28 Applying Wavelength Compensation Accuracy Technical Description Overall measurement accuracy is a combination of cali bration uncertainty found in the sensor specification tables and the wavelength compensation accuracy found in Table 14 on page 30 Overall accuracy is calculated using a process known as summing in quadrature which means summing the squares of numbers and then taking the square root Measurement Accuracy Jp W where U Percent Calibration Uncertainty W Wavelength Accuracy Example 1 J 10SI HE used at 355 nm U 3 W 5 Measurement Accuracy 43 52 494 25 5 8 Example 2 J 10MB LE used at 532 nm U 2 W z 296 Measurement Accuracy 4 22 2 V4 4 2 8 29 EnergyMax Sensors User Manual Table 14 Wavelength Compensation Accuracy SENSOR WAVELENGTH COMPENSATION ACCURACY for wavelengths other than the calibration wavelength CALIBRATION WAVELENGTH All High Rep Rate sensors 39 Diffuse metallic coating All Multipurpose sensors 2 MaxBlack coating 1064 nm J 50MB IR 532nm J 10GE LE Figure 5 on page 31 and Figure 6 on page 32 plot the spectral characteristics of each sensor Figure 5 plots the percent absorption of each coating by wavelength Figure 6 plots also by wavelength the spectral sensi
39. the Company must be included on the outside of all shipping packages and containers Items returned without an RMA number are subject to return to the sender For the latest Customer Service information refer to our website www Coherent com 48 Calibration and Warranty Detailed instructions on how to prepare a product for shipping are described below under Product Shipping Instructions Table 15 Coherent Service Centers USA 1 800 343 4912 503 454 5777 info_service Coherent com 49 607 1 968 0 49 6071 968 499 info_service Coherent com 503 454 5700 503 454 5777 info_service Coherent com Product To prepare the product for shipping to Coherent Ship P ng 1 Contact Coherent Customer Service refer to Instructions Table 15 on page 49 for a Return Material Autho rization number 2 Attach a tag to the product that includes the name and address of the owner the person to contact the serial number and the RMA number you received from Coherent Customer Service 3 Position the protective cap over the sensor 4 Place the sensor in the original shipping carton see the following illustration and then situate the foam 49 EnergyMax Sensors User Manual cutout over the sensor to hold it in place during shipment Sensor with protective cap Shipping Carton goes here If the original packing material and shipping carton
40. tivity of sensors that contain diffusers The spectral 30 Technical Description sensitivity is a function of the transmission of the optic and the absorption of the coating and is normalized to Absorption 0 9 0 8 0 7 0 6 0 5 0 4 0 3 0 2 0 1 the calibration wavelength 0 1 1 Wavelength um 10 20 Figure 5 Spectral Absorption of EnergyMax Sensor Coatings 31 EnergyMax Sensors User Manual Sensitivity Normalized to Calibration Wavelength 1 8 1 6 1 4 1 2 0 4 0 8 0 6 0 4 0 2 0 1 1 10 Wavelength um The J 50MB IR is calibrated at both 1064 and 2940 nm Figure 6 Spectral Sensitivity of EnergyMax Sensors With Diffusers 32 Care of EnergyMax Sensors Operation OPERATION This section discusses d Care of EnergyMax sensors this page How to measure laser pulse energy page 34 How to measure energy with an oscilloscope page 38 Keep the protective cap over the sensor whenever the sensor is not in use the cap is designed to fit the sensor even when the sensor is attached to a post Do not touch the sensor surface it is an optical coating that requires care Use dry nitrogen to blow contamination off of sensor surface do not use solvent Inspect t
41. tral 28 Responsivity 45 Return material authorization number RMA 49 RoHS compliance 2 S Safety 1 Declaration of Conformity 3 Environmental regulations 2 Selection chart Diffuse metallic EnergyMax sensor 11 MaxBlack EnergyMax sensor 8 MaxBlack EnergyMax sensor with diffusers 13 MaxUV EnergyMax sensor 15 Quantum EnergyMax sensor 17 Service obtaining 48 Shipping instructions product 49 Spatial uniformity 35 Specifications Diffuse metallic EnergyMax sensor 12 MaxBlack EnergyMax sensor 10 MaxBlack EnergyMax sensor with diffuser 14 MaxUV EnergyMax sensor 16 Quantum EnergyMax sensor 19 Spectral Absorption of EnergyMax sensor coatings 31 Index Response 28 Sensitivity of EnergyMax sensors with diffusers 32 Symbols used in this document x T Technical description 21 Damage thresholds 25 Increasing average power with heat sinks 21 Measurement linearity 25 Pyroelectric technology 23 Spectral response 28 Technology pyroelectric 23 Trigger Icon 37 Level 36 Threshold 36 U U S export control laws compliance ix Unpacking and inspection 6 Warranty Extended 46 Limitations 47 Limited 46 Waste Electrical and Electronic Equipment WEEE 2002 2 Wavelength Compensation 28 55 Compensation accuracy 30 Range 10 EnergyMax Sensors User Manual 60 EnergyMax Sensors User Manual Coherent Inc 4 2009 RoHS Printed in the U S A Part No 1113858 Rev AB
42. ut beam tube which limits the field of view of the sensor aperture This tube is removable for alignment purposes and custom applications The following chart plots the minimum and maximum measurable energy of each sensor across all wave lengths This chart can be used to determine the measur able energy range for wavelengths other than those in the specifications table 1064 nm and 532 nm 1 00E 05 1 00E 06 ig ge 1 00E 07 MILII S 1 00E 08 gt 9 2 1 00E 09 L1 Deal AS a d ue 1 00 10 m ELE ET ae 1 00E 11 EE an J 10Si HE eene J 10Si LE J 10Ge LE 1 00E 12 200 400 600 800 1000 1200 1400 1600 1800 Wavelength nm Figure 2 Typical Dynamic Range Curves of Quantum EnergyMax Sensors 18 Description The output of the Silicon and Germanium photodiodes used in the Quantum EnergyMax sensors varies greatly by wavelength The sensors contain spectral compensa tion to account for this variation see Spectral Response on page 28 50 that measurements are still accurate when used at wavelengths other than the cali bration wavelength Table 10 Quantum EnergyMax Sensor Specifications J 10SI LE J 10SI HE ange om Active Area Diameter mm Max Avg Power mW Rep Rate pps 10000 10000 10000 2j p Se m 10 10 60 1 1 32 32 3 3 19 EnergyMax Sensors User Manual 20 Technica
43. vity in units of V J of the UUT is calculated as Rvyurt Ratioyur Ratiogtg Rvsta After calibration each sensor is connected to another meter and tested as a system to verify the calibration The specification is 2 The result of this verification is summarized on the first page of the calibration certifi cate just below the responsivity and the raw data is presented on the second page 45 EnergyMax Sensors User Manual Limited Warranty Extended Warranty Coherent Inc the Company warrants its laser power and energy meters and sensors products Products to the original purchaser the Customer that the product is free from defects in materials and workmanship and complies with all specifications active at the time of purchase for a period of twelve 12 months Coherent Inc will at its option repair or replace any product or component found to be defective during the watranty period This warranty applies only to the orig inal purchaser and is not transferable Coherent Inc the Company offers original purchasers the Customer purchasing laser power and energy meters and sensors products Products an extended twelve 12 month warranty program which includes all parts and labor In order to qualify for this watranty a Customer must return the Product to the Company for recalibration and recertification The Company will recertify the Product provide software
44. voltage see the following figure Tek Run 632mV chi Couplin 632mv Ch1 Coupling amp Impedance 200mV 5 1 2 005 A Chi 7 172mV M 28 00 wud BE s Tne scale ner Probe Coupling Invert Bandwidth Position Offset DC off 20MHz 200 o20mdiv 0 000 v SUP 40 Calibration and Warranty CALIBRATION AND WARRANTY Coherent Calibration Facilities and Capabilities This section discusses Coherent calibration facilities and capabilities this page Optical calibration method page 42 Limited warranty page 46 Extended warranty page 46 Warranty limitations page 47 Obtaining service page 48 Product shipping instructions page 49 As the largest laser manufacturer in the world Coherent has been able to build state of the art calibration facili ties containing the widest possible range of laser types and technologies This enables us to perform instrument and sensor calibration under virtually any combination of wavelength power and operating characteristics Sensors are calibrated against NIST traceable working standard sensors which are in turn calibrated against NIST calibrated golden standard sensors These working and golden standards are maintained with the utmost care recalibrated annually and verified even more regu larly We maintain multiple NIST calibrated standards at many laser wavelengths to support the growing calibr
Download Pdf Manuals
Related Search