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User manual - Nano Scan Technology

1. b B Fig 8 49 Photons counter Nano Scan Technologies Ltd User manual Spectroscopy E Nspec es S a C3M 2 g r b NT Andor DU 401A BV PMS 400A APD r A 240 000 230 000 i 220 000 6 m 210 000 m 200 000 190 000 5 e LS LS EE 0 2 4 6 8 Fig 8 50 Spectroscopy unit in photons counter mode 8 4 1 Photons counter device options For adjustment of the photons counter device the tools panel Settings is used b B Fig 8 51 Photon counter device basic settings Exposure time s Exposure time Ch A threshold level V Counters threshold voltage A count is initiated when the input signal crosses the trig Ch B threshold level V ger threshold The input amplitude should be in the rang
2. Fig 8 12 CCD The matrix temperature indicator 15 displaying on the panel CCD settings If a matrix is disconnected to the computer indicator shows value 00 C When a matrix 15 connected indicator shows current matrix temperature from embedded matrix sensor 40 20 0 20 MP Fig 8 13 Matrix temperature indicator AP Temperature above 00 Temperature below 00 set matrix temperature enter desired value in the enter field Set temperature Minimal temperature 15 different for various matrices and cooler type On the termination of measurements before device switching off it 1s recommen ded to establish temperature 20 C and switch off the device only on achievement of this or indoor temperature CCD matrix parameters 1s established in following combo boxes Nano Scan Technologies Ltd User manual Spectroscopy Exposition time Acquisition mode Single scan Accumulate Kinetic series Read mode Full vertical binning Single track Image XY scanning Off Head Scan otage scan oignal storage time varies from 0 001 to 99999 seconds The time is determined by user depends on signal intens ity noise level and other parameters Mode of spectrum acquisition Obtain single spectrum with fixed exposition time Obtai
3. 0 0040 0 0040 0 0070 Fig 7 7 On the panel Scanner Range in the field Range um scanning range for each axes are set The fields Scale gain and shift are designed to service adjustment of sensors Nano Scan Technologies Ltd User manual 101 Oscilloscope unit Fig 7 8 Sensors range panel AK ABA OCT X MDX Fig 7 9 Piezostacks calibration panel On the Piezo calibrations panel for each axis X Y Z are set nonlinear calibra tion coefficients without sensors close loop This panel contains the table of coefficients of program piezostack nonlinear correction This table coefficients 1s necessary for non linear conversion of the voltage U applied to piezostack to X movement In the sys tem EG 3000 U X AXX BX X CX X 4 DX X E U voltage in DACs counts 0 65535 X displacement in um 0 this function is working at NLC is ON Qa NLC If NLC button is off voltage is calculates by linear relationship Fig 7 10 Sensors calibration panel On the Senors calibrations panel for each axis X Y Z are set sensor calibration coefficients for sensors close loop This panel contains the table of coefficients of pro gram sensor nonlinear correcti
4. Ha w 10 000 zo 3 1 t m m 7 Fig 8 1 Spectroscopy unit The tools collected in this window are intended for obtaining of spectra in a point and spectral confocal images from surface Besides these tools allow to spend prepro cessing of the obtained spectra and spectral images There are two tabs CCD matrix and PMS Photon Counting Systems in the spectroscopy unit Nac Andor DU 4044 BY PMS 400A APD Fig 8 2 CCD and PMS tabs Nano Scan Technologies Ltd User manual Spectroscopy 8 1 Tools for spectrum obtaining and processing 8 1 1 Tools The basic tools for work with spectra are collected on the Tools panel on the CCD tab s Fig 8 3 Spectroscopy tools panel gt il Start stop Start stop spectrum acquisition The spectrum will be shown only after operation end single The spectrum collects once for fixed exposition time Continuous The cycle of spectrum for fixed exposition D Q oingle continuous time accumulation infinitely repeats On the screen the spectrum is updated after end of the next cycle of a spec trum accumulation Fo
5. y lt C3M Bl Bill 2 gq rem NT Andor DU 401A BV PMS 400A APD 73D 120 A CKaH df a E Pasmep Nx 250 T Bx A nopor B Y 60 m 150 m S ER a 0 ee HM m 2 250 000 gt 200 000 o 6 150 000 0 20 40 60 80 100 m B 5m Fig 8 59 B In the case of Single photons counter passes only scanning in a mode of focal spectral microscope In the case of Dual CCD AFM or Dual Smart CCD AFM it 1s in addition pos sible to receive 1mages on still three AFM signals in the Scan unit In the first mode all images will have same resolution in points in the second AFM images may have dif ferent resolution from CCD one At a choice of one of modes of joint scanning the Scan unit automatically one of the plotter occupies the projection of the photons counter image Nano Scan Technologies Ltd User manual
6. Lenses settings Distance measurement by video image It makes sense when only the lens has a calibration Enables axes on the video image It makes sense when only the lens has a calibration Enables grin on the video image Fig 4 2 Scan by probe area selection demonstration T Nano Scan Technologies Ltd User manual Video unit Nano Scan Technologies Ltd User manual Video unit Configuration Default 700 600 500 400 um 300 200 100 0 200 400 600 800 1 000 700 600 500 400 um 300 200 100 Fig 4 4 Scan by probe and by laser area selection demonstration Mj and Ej Nano Scan Technologies Ltd User manual Video unit Configuration Default 700 600 500 400 um 300 200 100 0 200 400 600 800 1 000 Fig 4 5 Measuring tool Each scan area has its own color Scan area by SPM head has the blue Scan area by stage has the yellow Nano Scan Technologies Ltd User manual Video unit Fig 4 6 Color indicators of scanning area To disable the axes press the button mI Configuration Default Fig 4 7 Video without axes To disable the grid press the button HB Nano Scan Technologies Ltd User manual Video unit Configuration Default Fig 4 8 Video without axes and grid Nano Scan Technologies Ltd
7. lp UU 0 200 400 600 800 1 000 Fig 8 21 CCD matrix image 8 1 3 CCD matrix calibration To calibrate of the CCD matrix use Calibrations tool box HM MM Fig 8 22 CCD matrix calibration tool box Status CCD matrix parameters entering mode Manual Manually entering Auto Automatic loading from matrix memory Scale Spectral scale physical units pixels Matrix pixels Nano Scan Technologies Ltd User manual Spectroscopy wavelength Walelength in nm Raman shift Inverse centimeter for Raman shift spectra Central pixel Set central pixel Central WL nm oet central wavelength Dispersion nm mm oet monochromatic dispersion 9 1 4 Lens Z mover For management of position of an optical microscope objective on axis Z at obtaining of the spectral information use the slider Objective Z um 7 Fig 8 23 Objective Z slider Nano Scan Technologies Ltd User manual Spectroscopy 8 2 Obtaining spectral scans Centaur Centaur HR complexes allow to obtain raster spectr
8. s270 3760 100 7 Fig 8 34 Select spectrum range By pressing the button Select spectrum range JG input fields for changing of spectral range 1s appeared on the Scan options panel In this input fields the range of re corded spectrum 15 established In the window of spectrum the allocation area which oc cupies all range of a spectrum is displayed 200 150 100 o 50 0 SSS SS SS SS SSS O SSS ee SSS SS O p ae 6 000 4 000 2 000 0 2 000 1 cM Fig 8 35 Select spectrum range Full range selected Nano Scan Technologies Ltd User manual Spectroscopy At prompting of the mouse cursor on vertical borders of allocation area the cursor assumes a standard shape of change of allocation area Moving border of allocation area across the field of a spectrum it is possible to establish area of recorded spectral data manually 8 S SS Se amp 000 4 000 2 000 0 2000 1 cM Fig 8 36 Select spectrum range After a choice of a site of recorded spectrum it is required either to confirm a choice or to return to a former range pressing buttons 1 In case of change of the range and start of process of scanning the rang
9. E m 7 000 HM MM m E 6 000 Z 0 10 20 30 40 50 Ca E aa 5 000 0 200 400 600 800 Fig 8 4 Obtaining spectrum in the point Bil Export EN Look in R CAUsersinoname o F o My Name Size Dat noname 8 Videos File Folder 12 thumbnails File Folder 09 A Searches File Folder 20 Bh Saved Games File Folder 04 Pictures File Folder 24 U Music File Folder 03 TA Links File Folder 10 1 qwyddion File Folder 09 1 fontconfig File Folder 06 1 5 Favorites File Folder 10 1 Jg Downloads File Folder 214 4 E Documents File Folder 144 Files of type SPC with lin scale spc SPC with lin scale spc SPC with nonlin scale spc ASCII txt Fig 8 5 Spectrum export file save dialog Nano Scan Technologies Ltd User manual Spectroscopy s z 2 000 Se Sa i I yl a rn 0 200 400 600 800 1 000 8 000 7 000 s 4 000 3 000 0 200 400 600 800 1 000 Nano Scan Technologies Ltd User manual Spectroscopy
10. E LZ For inclusion of a totality of tool set 1t is necessary to press the button Markers A By pressing this button the group is activated completely Thus on the chosen image markers and section lines are displayed Nano Scan Technologies Ltd User manual Data unit for data processing Ir 437 Scan SPM Oscitoscope Video W Options aot 345 Doe a a sel a Fig 3 15 Cut section markers and line Nano Scan Technologies Ltd User manual Data unit for data processing Ju Markers x L Detailed markers info Angle measurement show grid Cut section Vertical section Horizontal section d el SIR Nano Scan Technologies Ltd The button of cut sections creation by pressing the button is displayed full group of tools for carrying out of measurements At activation of markers on the chosen image there are two markers A B limiting the chosen section and all information on position of the given markers For moving of a marker across the field of the image it is necessary to guide the cursor at a marker and keeping it by means of the left button of the mouse to drag in a new point At moving of markers across the field of the image the profile getting to section automatically changes Similarly given tool operates at measure ments on curves and schedules The button of switching
11. EEEE TE EEEE 76 Dele TAMA EEEE E E E E E 77 Nano Scan Technologies Ltd User manual Content 25 2 ProD 78 5 3 The control of the stepper MOtOLs sssccccccsssssccccsssssssccssscccssssccssssceesees 78 Sou MS 1 6 1 ae LOCA ee ee 81 5 4 Remote control adjustment 82 25 Feedback cscaccicstessesescsseveccacwacssudssevsasigucowseseseevesdstaedssaacsesescsvedessases 84 5 6 Additional scan PALAMICUELS ciccscsesuccisserexcaessccenvecssdeswactaswertarssouasesteeussavenseaectoanss 86 6 Scan 3D 87 6 1 Adjustment of scan parameters ecce eee eee eee eee eese ee etes esee s etes esos eee 88 6 1 1 Signal 91 or 92 6 3 Additional scan ParamMeters ssccccccccrsssssscccssssssccccsssssssccscssssccssssscsssscoseess 93 Q 94 i cc c Ea 96 PES ullum 97 TMs EEUU 97 CAME AIO NR T T T TT 100 eE TTE 104 7 3 1 Calibration 104 7 3 2 Piezostack calibrati
12. nennen 12 1 4 Working mode 13 ANS POC directory SOT NCU Cy 14 2 Common mteriace 106 3 Data unit for data processing ee eee eee eee ee eee eee enun nene 19 ubica dini 19 0 25 SUPPO MIC Cy 19 3 3 Loading and saving images Working With tabs eee 20 SU Eni 22 i es fe P 23 3 3 4 Saving images from the thee 24 SAVNE All 25 3 3 6 DN TN 26 SA Tae aroa D RTI d I T TIT 27 3 4 1 About image nnne enin nensi renes 3 4 2 Images copy and transfer 28 3 4 3 Group and transfer 26 3 4 4 Images and tabs deleting esses enne eese nnne 29 29 po 30 Nano Scan Technologies Ltd User manual Content 3 5 1 Choice of the image for 30 3 5 2 Description of image processing
13. no Convolution function range Select range of specter curve to construct image It is displayed only selection at work with spectral images IL Display units Physical units of spectral images X axes X wavelength nm Raman shift cm or pixels corresponding to CCD pixels It is dis played only at work with spectral images 40 This tools are required to 4D spectral images visualization intensity by XY posi tion and wavelength To construct an image from a 4D data array require to select the convolution function range After pressing this button under the spectral image the window for spectra and a range of convolution function wil
14. SPM scanning probe microscope adjustment 5 1 1 Resonant curve acquisition N Frequency curve 4 ET 6 Ed Ed E E Amplifier Out V gt Fig 5 3 Cantilever resonant frequency acquisition The signal for plotting the frequency curve is selected in the Channel combo box on the Frequency scan panel In the near fields the frequencies range is completely set By default the Channel combo box is selected signal Mag used for reception of res onant frequency of probes Channel MAG OFF a Height DFL LFL Sin Cos Phase xum ADCO Fig 5 4 Signals available for the frequency curve The button v performs frequency scanning The nearby progress bar shows scanning complete progress with percents The current resonant frequency value 1s dis played on the Current frequency slider It can be set 1n other value 1f necessary The Drive intensity slider controls probe piezodrive output voltage Nano Scan Technologies Ltd User manual 75 SPM scanning probe microscope adjustment 5 1 2 Oscilloscope mode Osc curve w E Magnitude V fel Ge Aa Average RMS Average W 0 5446 RMS 1 246 13 Fig 5 6 Oscilloscope plot window An average value of the signal magnitude 1s displayed in the Average V field A root mean square of the signal is displayed in the
15. Section OFF Current speed 95 100 Current Tip Position ESSEN Fig 6 3 Scan parameters Nano Scan Technologies Ltd User manual Scan 3D E Nx size Ny size ocan width um scan height uM Channel A and B Channel C and D Section Velocity HZ Lift mode Em p z p P Nano Scan Technologies Ltd User manual Points number of in X scan direction Points number of in X scan direction Scan width in um Scan width and height field are active only when the Area se lection button has pressed scan height in um Scan width and height field are active only when the Area selection button has pressed The signals received in forward scan direction are selected in the combo box FORW gt The signals received in backward scan direction are selected in the combo box 4 BACKW The check box for cut section construction for relevant channel The title color is relevant to the cut section color The slider sets a scan velocity A scan velocity value also can be set in the edit field near the slider press Enter key after changing the value Above the Velocity slider scan complete percents are displayed Enables double pass scan techniques Disables double pass scan techniques Combo box for scan direction choosing The arrow means fast scan dire
16. i Show grid iF TT Lit Enables automatic focusing by image Lens Z position is controlled by the slider Obj Z Automatic focusing by maximum reflected laser Enabled with only Centaur device Centaur HR c Vectus Centaur Z Obj Z saving current CCD image in the raster format file Recording CCD video in avi file none
17. After pressing the button Paste date copy of group will be created Nano Scan Technologies Ltd User manual Data unit for data processing 3 4 4 Images and tabs deleting To delete selected image from tab use the button Delete To delete all images from tab use the button Delete all m To close or delete tab press the button in the tab header 3 4 5 Info panel Show image information Add new parameter Delete selected parameter 19 oet scanning parameters from image to the scan parameters Save image info in txt file gwyXFit gwy YFit Mean E E a e Median Gaussian i Paletie Font size XMin XMax YMin YMax abel Height 9237 Ta ay 5 m G oad UTC 20 515922 1 Fig 3 9 Info panel Nano Scan Technologies Ltd User manual Data unit for data processing the Info panel main scan parameters are shown scan size device setting ap plied filters and palette To change parameter value the table it is required to double mouse click on the cell to enter new value and to press Enter key The button Set info to device is intended for adjustment of scanning para meters to similarly options of already received scan By pressing this button all signific ant parameters of scanning are automatically set according to the saved data 3 5 Data processing 3 5 1 Cho
18. z 3 4167 V Dist 39 919 51 HE EB E Fig 3 17 Angular measurement Nano Scan Technologies Ltd User manual Data unit for data processing Detailed markers info _ Phase V 3D Marker A A RES x 32 505 pm y 7 5309 pm z 6 7808 V 2 m Marker B EB x 48 175 pm m 44 091 um z 3 4167 V 1 Extra Info i4 15 67 pm Ay 36 56 pm Az 3364 V e Dist 39 919 RA a 50 1 Fig 3 18 Displaying the grid Detailed markers info Height 3D Angular measure mi 16 5758 L 12 4318 0 10 20 30 A EN Fig 3 19 Cut section in free direction Nano Scan Technologies Ltd User manual Data unit for data processing D ames 2 Data AS Spectroscopy Scan a SPM oscilloscope P Lithography Options about Detailed markers info Marker A 30 pm y 12 pm z 6 20988 V Marker B m gt amp m D SG E E Fig 3 20 Vertical cut section Poe x oscilloscope P Lithography Options NT avout Detailed markers info V 3D m x 12 ra P JH z SAT V A Marker B x 48 y 3 pm z V Extra Info ax 36 0 Az 3 1550
19. Data unit for data processing 3 3 7 Tabs merging If it is necessary to send data from all tabs one file use the button Merge all tab gt By pressing this button new tab will be created and data from all tabs will be sent in the new one To save this tab use functions of saving separate tabs Nano Scan Technologies Ltd User manual Data unit for data processing 3 4 Image grouping 3 4 1 About image grouping View of single scan and simultaneous received scans is not the same A single scan has own color Simultaneous received scans merges one group and have com mon color With this scans all sections and cropped images merges in the one group Fig 3 7 Single image Nano Scan Technologies Ltd User manual Data unit for data processing 50 M EL 10 3E MAG Crop Fig 3 8 Grouped images 3 4 2 Images copy and transfer functions To image copy and transfer from one tab to another use the button Copy selected data EES By pressing this button the selected image will be copy to the clipboard After pressing the button Paste date copy of image will be created By pressing this button in new tab image will be copied in this tab 3 4 3 Group copy and transfer functions To group copy and transfer from one tab to another use the button Copy selected group EES By pressing this button the selected group will be copy to the clipboard
20. Dist 36 138 E E Fi Bi aum bands Fig 3 21 Horizontal cut section Nano Scan Technologies Ltd User manual Data unit for data processing section Fig 3 22 Markers for sections section Fig 3 23 Markers for sections Detailed markers info carti Marker A se cti on el ee Ses 20 Fig 3 24 Markers and info for sections 9 A Nano Scan Technologies Ltd User manual Data unit for data processing 3 5 4 Scaling tools The group of tools 15 intended for management in the images sizes Fix X direction zoom Fix Y direction zoom Autoscale in X axes Autoscale in Y axes Restore scale Allow deny autoscaling 4d Point selection i Show specter in point Area selection g Select full area o Nano Scan Technologies Ltd Fix X axes scale while zooming Only Y scale changes Fix Y axes scale while zooming Only X scale changes Autoscale in X axes Autoscale in Y axes Restore image scale to 1 1 By pressing this button all actions on scale change are cancelled When the button is pressed described above the button pass in an inactive condition SPM tip positioning button show spectrum in chosen point Available only for 4D spectroscopy data For display of a spectrum from an image point press this but ton guide the cursor at the imag
21. For calibration the profile is used from the earlier saved one Use for calibration the section stored in the file Installations of points of a binding on the falling edge of test structures Point level Test structure period Oscilloscope unit 7 3 5 Calibration coefficients obtaining Let s consider the example For piezostack calibration of a scanning head on an axis X by the image saved in a file earlier it is necessary to go to the Data unit to open earlier scanned image of a test grating and to construct its section For constructing the section set up marker on the scan by the button Marker press the button Cross Section AN and the button Markers Horizontal model ES 6 01382 3 00691 AA Eee Oe E E Dd section 8 7 8 7 6 N 7 4 T i gt 0 10 20 30 40 50 AT Fig 7 13 Profile for calibration Then go to Oscilloscope unit press Show Hide calibration window I select Head in the Device combo box select Voltage Ux in the Channel combo box select 3D data Section in the Source and type in the gratings period And then press the button Acquire data Gaal Nano Scan Technologies Ltd User manual 107 Oscilloscope unit Source curve Fig 7 14 Calibration curve Apply filters for section nonlinear correction Source curve 700 100 Fig 7 15 Calibration curve after filter applying Nano Scan Technologies Ltd Use
22. NSpec Scanning Probe and confocal optical microscope software User manual Nano Scan Technologies Ltd Zavodscaya St 7 Dolgoprudnyy Russian Federation 141700 Pnone 7 495 665 00 85 7 495 642 40 68 7 495 642 40 67 E mail info nanoscantech ru web www nanoscantech ru 2012 This user guide is intended for installation and operation of NSpec software The program is used for control scanning probe and optical confocal microscopes and scan ning probe microscope controller EG series Before installation and working with this software it is recommended to read this user manual On all matters related to technical support and upgrades for this product under the additional features contact the follow ing addresses Phone 7 495 665 00 85 7 495 642 40 68 7 495 642 40 67 E mail info nanoscantech ru web www nanoscantech ru Skype NanoScanTech Nano Scan Technologies Ltd User manual Content Content UCU OM Mec 7 1 Basic information about NSpec ecce eee eee eee e eene eere eere neos tena 9 LN IP Bo noe C 9 1 2 INSPEC software 9 1 3 Basic unit panel Tools 11 Lod 11 1 3 2 Basic unit brief
23. Optomechanical unit adjustment and control 9 Optomechanical unit adjustment and control For additional options of complexes Centaur and Centaur HR in modes confocal spectral microscope and confocal laser microscope use function Run Centaur instru ment control cI After pressing of this button the screen the window of tools of man agement will be deduced by the optomechanical module Combined Interface N_SPECTR File Mode Monochromator Lens Fig 9 1 Centaur instrument control window This tools window has three operating modes For a choice of a mode of display it is necessary to pass in menu Mode and to choose a necessary mode from the drop down list In mode Inner the choice of the operated device carries out on a circuit diagram Nano Scan Technologies Ltd User manual 140 Optomechanical unit adjustment and control The chosen device is highlighted by red light and in the field of options changeable parameters are deduced qn er i Exitation Monachramatar New Current Set Reset Set Exitation Pinhole ew Current a7 cet Reset Set Exitation Filter Hew Current 2 Set Reset Set EI gt a EDGE FILTER MONDCHROMATOR LESER Ve en Fig 9 2 Centaur instrument control window Inner mode The similar kind has mode Image except that the circuit diagram and the field of options are deduced in
24. 110 120 130 0 200 400 600 800 1000 8 000 7000 ON 4 000 3 000 Nano Scan Technologies Ltd User manual Spectroscopy 6 000 z lnn la en n rnc Ve Tac es a 0 200 400 600 800 1 000 Apply Baseline substrate iss Cancel Baseline substrate Reset baseline To manual subtraction of a baseline press the button to create a baseline manu ally m On the finished spectrum there will be a straight line between start and final curve points At prompting of the mouse cursor on a line and pressing by the left button lines points are formed For moving of points establish the cursor on the point and hav ing clamped the left button move the point After creation of a base line for subtraction press Accept n and Subtract baseline BA For cancellation of subtraction of a base line manually press Cancel xl Nano Scan Technologies Ltd User manual D Spectroscopy 8 1 2 CCD matrix tools
25. 30 Jud Modas rement orbe itid dup eite 31 DS MEL ULIS ee ee 38 39 RERO 42 II E EE E ues 45 3 5 7 Image view TOONS U 45 eE A 46 3 5 9 Set Z range by 5 enne nnns 47 3 5 10 Image pixel nennen nnne nnns 48 3 5 11 Curves processing 5 ce enhn nnne eene nnn eene 46 NEP 49 3 5 13 Working with spectral 33 3 6 Images import and exDOPE 57 3 6 1 Data export to Gwyddion sse eene eene then 57 TOME TAC FC a E E E E 58 Ile H 58 MARZO M M 59 4L VIGGO uni DASIC TUNC MS eR 59 AZ 66 4 2 1 Settings panel main 66 4 2 2 Tools panel 5 67 423 New lens calibration UU MENU E MEE 69 424 DOB TIA 71 5 SPM scanning probe microscope adjustment 73 S l Ploc mode CODI OL ear s 74 5 1 1 Resonant curve 75 Jd Oscilloscope
26. 50 DE d Along Y axes from lower left corner Along X axes from lower right corner Along Y axes from lower right corner ai 8 2 5 Scanning mode For a choice of a mode of scanning it is necessary to activate the drop down list SPM scan connection Single CD Dual Dual Smart CODZAFM Fig 8 41 Choosing of scanning mode In the case of Single CCD passes only scanning in a mode of confocal spectral microscope In the case of Dual CCD AFM or Dual Smart CCD AFM it is in addition pos sible to receive images on still three AFM signals the Scan unit In the first mode all images will have same resolution in points in the second AFM images may have dif Nano Scan Technologies Ltd User manual 130 Spectroscopy ferent resolution from CCD At a choice of one of modes of joint scanning in the Scan unit automatically one of the plotter occupies the projection of the spectral image nac 120 100 80 E 60 40 20 0 20 40 60 80 100 120 0 20 40 60 80 100 120 HM 120 100 80 60 40 20 0 an ise eae 0 20 40 60 80 100 120 0 20 40 60 80 100 120 HM HM Fig 8 42 Scan result plotters view in Dual CCD AFM or Dual Smart CCD AFM modes Fig 8 43 Scanning mode indicator Dual CCD AFM and Dual
27. After input of new numer ical value it is required to press Enter key color becomes again black des ignating that is spent the data are accepted correctly and sent in the con troller If the color remains red it means the entered value falls outside the limits admissible values of parameter The combo box control of a choice of parameter of the list or the scrolled list offers a choice of parameter from a set of certain values Drop down menu control This element is intended for a choice of values of certain functions As the example is resulted the list for a filtration 2D the data lines fitting of scanning and subtraction of the set surface from the re ceived data Progress bar indicates a process execution progress in percentages Z pos 42 Element of visualization of any variable parameter of system Button to show unit in individual window in main window By pressing this button the active unit is displayed in separate window and this window can be moved by screen Only Data unit cannot be separated form main win dow The button sends the unit window backward in the program main window User manual Common interface controls 0 20 40 60 Slider control Separator Slider the combined control element includes a movable indicator and input field of the data in a numerical kind To enter the data it is possible both moving the movable indicator by the mouse and entering value in the input fie
28. RMS V field In the T s field sets a time interval Nano Scan Technologies Ltd User manual SPM scanning probe microscope adjustment 5 1 3 Land lift curves Spectroscopy curve mmea aa MAG V fel Ge mA HB 10 15 fi Channel Mac Paints 100 Speed nm sec 100 100 AZ os AP eee 0 166 Fig 5 7 Z spectroscopy curve The red strip displays current position of probe ZO and two dark blue strips dis play limits of construction of a curve and correspond to positions 70 71 and Z0 Z2 At construction the curve probe moves to point Z0 Z2 then moves downwards point Z0 Z1 further it makes movement in the opposite direction and comes back to an initial po sition The slider lt AZ1 um sets start position Z0 Z1 The slider AZ2 gt um sets final position Z0 Z2 It is also possible to set start and final position value in the fields nearby the sliders After typing in the number value from the keyboard press the button Enter Key In the Channel combo box it 1s necessary to selected signal for curve acquisition The Points combo box sets a number of curve points In the Speed nm sec field it 1s possible to set curve scanning speed The button v runs curve acquisition process Nano Scan Technologies Ltd User manual SPM scanning probe microscope adjustment 5 2 Probe Z position control There is a probe Z posit
29. SPH Feed Back 7 39 9 TF MODE MAG 3 68 Fig 5 19 Switching in a resonance microscopy mode using quartz resonators 5 6 Additional scan parameters Input Gains Phase Shift Degree DFL 1 LFL amp DC 2 INT ADC 3 Low Pass Filter KHz 0 10 20 Fig 5 20 Additional scan parameters panel Gain factors for the DFL LFL Int signals are established in the corresponding combo box The frequency of the low pass filter are established by corresponding slider and entry field The phase shift for lock in phase detector are established by cor responding slider and entry field It is also possible to set the value in the fields nearby the sliders After typing in the number value from the keyboard press the Enter Key Nano Scan Technologies Ltd User manual 8 Scan 3D am 6 Scan 3D In the Scan unit scan key parameters such as number of image points its sizes scanning direction scanning speed and others are presented Four fields for displaying of the received data are located in the central part of the Scan unit To entry SPM unit press the button lt Scan that 1s situated on the top panel of the NSpec window Nspec Universal Software _ Data 3 Spectroscopy x Sca ia SPM Oscilloscope Video P Lithog
30. Smart CCD AFM For a choice of the image resolution number of points drop down lists Nx points Ny points are used Nano Scan Technologies Ltd User manual 131 Spectroscopy 09 181 m Hx 100 Pe 0 0 2 0 4 0 200 BZ Fig 8 44 Scan resolution For management of position of an optical microscope objective on axis Z at obtaining of the spectral information use the slider Objective Z um Positioning 0 Fig 8 23 Objective Z slider Nano Scan Technologies Ltd User manual Spectroscopy 8 3 Panoramic spectrum The mode of a panoramic spectrum is used when width of a spectrum is more than CCD sensor width For full read of a spectrum in that case it 1s necessary to turn diffractional a lattice that all spectrum passed on a matrix At a choice of the mode of the Panoramic spectrum in addition there is the tools panel Panoramic spec trum Fig 8 47 Panoramic spectrum panel On this panel the minimum and maximum wavelengths is established for a range in which there will be a spectrum obtaining The check box a display Mode allows to show on the screen intermedia
31. User manual Video unit 4 2 Lenses calibration Work with devices and complexes form company Nano Scan Technology means possibility to use various lenses of various manufacturers As lenses have various characteristics such as the zoom focal length and work distance it 1s necessary to spend adjustment for each used lens Lens adjustment includes calibration on the test sample and combination of scanning fields of SPM with the optical image 4 2 1 Settings panel main functions For lens adjustment or configuration changing press the button Settings X The panel of options will be displayed Nano Scan Technologies Ltd User manual Video unit Data A Spectroscopy 28 Scan SPM Oscilloscope Video Settings A Name Default Lithography SE Options About Configuration Default Ajam H 8 Jel ele Range X 1024 Range Y Width Height Line length Flip x Flip y Ble Eg t t GAME Fig 4 9 Video with lens settings panel Add new configuration Creates new lens configuration Remove current configura Remove current lens configuration tion n n Measure reference Tool for measuring reference length The reference length is enter ing in the Line length field Tip scan area center align The scan areas by tip and by stage are shown on the video image ment By mouse clicking scan area center moves to mouse point Laser
32. active Photons counter mode counts in the wavelength range selected by monochromator with fixed points number Nano Scan Technologies Ltd User manual 137 Spectroscopy HM Fig 8 56 tool panel Spectrum mode On this panel of tools range borders in lengths of waves Minute nanometer and Max nanometer units of measure pixels lengths of waves Raman shift and number of points on a range are established 8 4 6 Scanning mode At a choice of stage scan or head scan the tool panel for adjustment of scanning in a surface 15 displayed Hacrp Nx Fig 8 58 select scanning mode single CCD Only photons counter data scanning simultaneously photons counter and SPM scanning with same Dual CCD SPM resolution Simultaneously photons counter and SPM scanning with dif Dual smart CCD SPM ferent resolution gt Drop down list with scan directions The arrow shows fast ocan direction NN scan direction scan channel Choice of the channel of the photons counter for scanning Nx points scan size in X Ny points scan size in Y Nano Scan Technologies Ltd User manual 138 Spectroscopy
33. an oscilloscope Mode is active In this mode of the photons counter goes on constant length of a wave with development on time Nano Scan Technologies Ltd User manual 136 Spectroscopy CKO Fig 8 54 On this tool panel the period of accumulation is established and average value and root mean square deviation is displayed Nspec ep lt gt lt a C3M m Bill 2 g nom NT Andor DU 401A BV PMS 400A APD v 3 240 000 193272 9 220 000 S Bx b nopor B 7 0 10 20 30 40 50 ld 180 000 160 000 rlam E E ed E d Fig 8 55 Photons counting mode 8 4 5 Spectrum mode In the Spectrum mode the tool panel Spectrum mode is
34. axes head piezostack Scan 3D Uz High voltage output for Z axes head piezostack X2 sensor The signal from capacity sensor by X scan stage axes Y2 sensor The signal from capacity sensor by Y scan stage axes Z2 sensor The signal from capacity sensor by Z scan stage axes Ux2 High voltage output for X axes stage piezostack Uy2 High voltage output for Y axes stage piezostack Uz2 High voltage output for Z axes stage piezostack ADC HR 1 Auxiliary analog input ADC HR 2 Auxiliary analog input Fig 6 6 Foursection photodiode drawing 6 2 Multi pass technique By pressing the button the scanning two through passage technique 15 activ i ated On the Scan tab there is a field LM height nm for distance value on axis Z on which the second pass of a probe will be carried out 1s established Near to the fields of a signals choice Channel A Channel B Channel C Channel D appear buttons Pressing such buttons 7 means the signal is chosen for obtaining on the second pass of a probe Nano Scan Technologies Ltd User manual Scan 3D SCAN F FEEDBACK Nx points 200 M My points 200 v Scan width um Scan height pm LM height nm 1000 Ch A Section 3 OFF r Ch B Section 03 OFF r i BACKW Ch C Section OFF r Ch D Section m Current speed 1
35. gt 3 88 B x The check box for cut section construction for relevant channel The title color 15 relevant to the cut section color 8 Nspec Universal Software kel Data AX Spectroscopy 7 Scan SPM m Oscilloscope Video Lithography Options NT About s PERU RRS PP RRR ORR ERR OER 8 0 8 8 8 sx mica cancel Head Scan probe SCAN FEEDBACK Nx points Ny points Scan width pm 60 Stage Scan sample Scan height um 60 FORW Ch A X Section Heiaht Ch B Section 1 19 9 9 BACKW Ch C Section gt 9 Ch 0 Section ADGA Velocity Hz 0 2 4 6 8 10 XY positioning X Y Ypos um Z Positioning 0 5 10 15 20 Current Tip Position Current speed Z pos 28 O 12 10 20 30 40 50 60 ADC1 um section 10 20 30 40 50 Line profile um 3D di E Eg ii 9 E E e a EB Nano Scan Technologies Ltd Fig 6 14 Start scanning with line cut section User manual Scan 3D 6 5 Layers At scanning of one sample site in different modes or with the various resolution for display already made scans Layers functions 1s used By pressing this button list
36. mode indicators top right corner of NSpec window Indicator Mode Description US Controller is connected SPM controller to USB USE connection indicator Controller is disconnected Emulation mode without controller CCD is connected only Centaur CCD to USB connection indicator CCD is disconnected only Centaur Emulation mode without CCD If additional controller EG 1000 is used the additional indicator is displayed USB 2 Controller is connected Additional SPM controller to Controller is disconnected USB connection indicator Emulation mode without controller Nano Scan Technologies Ltd User manual Basic information about NSpec 1 5 NSpec directory structure NSpec directory tree ES Seft_package_ 9 4 21 Andor Device Drivers CentaurDrv data 3D El ICCD DLL container Lithography Main Toolbar Osc_window plot 5canPlot Shuttle Splash window SoLJ ISPMTuning window approach USBVideo TK2 0 Gwyddion glmaterials gradients locale modules pixmaps ui NST data files NST lit files Param PMS400A Shuttle temp USB CCD Fig 1 5 NSpec directory tree Nano Scan Technologies Ltd User manual Basic information about NSpec Andor CentaurDrv data ftdi GTK2 0 Gwyddion NST data files Directory with CCD matrix drive
37. scale according to the part of image use Set Z range by se lection At using this function Z scale maximum correspond to maximum of selected image part and the minimum of the scale the minimum of selected image part To select scan area press the button and select the rectangular interested area on the image Fig 3 44 Set Z range by selection usage Nano Scan Technologies Ltd User manual Data unit for data processing 3 5 10 Image pixel interpolation There are three modes of pixel interpolation in the program NSpec Nearest neighborhood Without interpolation Bilinear Bilinear interpolation Bicubic Bicubic interpolation Fig 3 45 Others interpolation method usage 3 5 11 Curves processing tools The tool group is intended for work with several curves in the field of display 2D plots List of available curves e Delete all curves Delete all displaying curves JA Delete current curve Delete the current curve that is selected in the list Add current curve to the available curves list At curve addition serial number is appropriated To attach curve to the default tab select curve number in the mene CURE UIS UNIS list and Send to Data button To save all curves select All Current curve names 1 Line color Color selection of active curve Nano Scan Technologies Ltd User manual ds Data unit for data processing Line thickn
38. spectral images Hx Fig 8 28 Spectral scan options panel send to Data send obtained spectral image in the Data unit Clear clipboard if it is overload by earlier obtained Clear spectrum scans Choice of a way of construction of the image on the basis of the spectral data It is displayed only at work with spectral images Convolution func tion Image construction on integral of intensity from the Integral J received spectra in the chosen range Image construction on intensity maximum from the Maximum received spectra in the chosen range Image construction on intensity maximum position Maximum position ximum positi from the received spectra in the chosen range MassCenter position Ha m Select spectrum range Select spectrum wavelength range to record By scan point default full range is recorded SPM scan con nection Select convolution Select range of specter curve to construct image range It is displayed only at work with spectral images Selection of scanning direction Select scanning mode Single CCD Only CCD matrix data scanning Dual CCD SPM Simultaneously spectral photoele
39. 00 Proportional Integral Derivative Scanner range sensors scale Range Capactor sensors amp PID rate 10 kHz Fig 7 5 Scanner calibrations tables Non linear correction Close loop Nano Scan Technologies Ltd The button of on off switching of scanner close loop When close loop is on the button has blue color The button of on off switching of scanner nonlinear cor rection When close loop is on the button has green color User manual 100 Oscilloscope unit PC File save calibrations in PC file PC File Load calibrations from PC file DSP Memory Save Calibrations in DSP DSP Memory Load calibrations from DSP internal controller memory Show hide calibration window Show hide calibration window A Firmware upgrade Firmware upgrade from file function Tabs Head Stage on the Scanner test calibration panel contains calibration tables for head scanner and stage scanner corresponding To Fig 7 6 Tabs with Head Stage calirbations Speed um s of probe or stage moving in an start scan point or new position from the previous position 1s in the field Free Positioning speed established The PID panel is designed to set PID control coefficients of capacity sensors close loop In fields Proportional Integrated and Differential corresponding factors for each axis are set X Y Z nun
40. 00 Velocity Hz 0 2 4 Fig 6 7 Scan tab in two pass mode drawing 6 3 Additional scan parameters The probe position 1s shown in the XY probe positioning panel when the button Point selection has pressed AY positioning Fig 6 8 Probe positioning panel drawing The Z Positioning slider is necessary for moving of a probe on axis Z Position Z can be set from the keyboard in the field near to the slider After typing in the number value from the keyboard press the button Enter Key Depending on a choice of a way of scanning slider control or position on Z in a scanning head or position on Z in a Nano Scan Technologies Ltd User manual 93 Scan 3D scanning stage Fig 6 9 Z positioning The Current Tip Position bar indicates Z scanner lever in percents Green color of the indicator corresponds to a safe supply of a probe and red means that the probe 15 too close to the sample and there is a possibility of probe damaging Current Tip Position 2 pos 59 Fig 6 10 Z position o Fig 6 11 Escaping high voltage amplifiers Set high voltages HYZ to zero by pressing the button an output of high voltage amplifiers of the head scanner pressure is established to zero L3 L3 Fig 6 12 Fast scanning button By pressing the Fast scanning button enables algorithm allowing to carry out fast scanning by special
41. 9 4 NST data files yj My Size ye Date m R noname AutoSave nstdat 929 KB nstdat File 28 05 21 For example nstdat 929 KB nstdat File 26 05 21 File name For example 21 Files of type NST files nstdat Fig 3 6 File save dialog If all data contains in the Default tab by pressing this button Save as file dialog is deduced on the screen After data saving the new tab 1s automatically created and all data from a default tab is transferred in it Thus the default tab is cleared of the informa tion If there are some tabs with no saved file it 1s required to use the button to Save as In this case file save dialog 1s deduced on the screen in witch it 1s required to fill out a name of a saving file and the path Only the active tab thus saves For saving other tabs activate consistently tabs required saving 3 3 5 Saving all tabs To save data from all opened tabs press the button Ta Save all Tabs having saved files will save in same files For tabs not having saved files the Save file dialog will be opened 3 3 6 Creating new tabs To create new tab press the button Add new tab re After this the new tab with the name New tab will be created the end of tab list New tab 1s empty For filling it with images and graphs use tools for copying of 1mages graphs and groups Nano Scan Technologies Ltd User manual 35
42. Export tab to Gwyddion Export current tab in Gwyddion Export to ASCII Export data to ASCII file 3 3 1 Working with tabs All obtained or opened data on the Data panel is grouped in tabs Each tab corres ponds to an open file or a created file at preservation By default all obtained data re mains in the Base tab Tabs not having at the heart of the kept file are designated as the New tab Tabs on the basis of the kept files have a name of a file given at saving DropCGnstdat New tab ta 1 A r Y m 30 a Fig 3 2 Tabs overview Nano Scan Technologies Ltd User manual Data unit for data processing 3 3 2 Default tab All new data received during scanning or spectrum accumulation in a point moves to the Default tab Data Defauit 73 Fig 3 3 Default tab This tab opens by default in the started program Nano Scan Technologies Ltd User manual Data unit for data processing 3 3 3 Load data After pressing of the button Open A the Open file dialog 1s deduced on the screen In this window the list of available data 1s shown virtual folders of the current user account and supported files types 1s displayed For loading saved data choose the necessary file and open it by pressing the Open button or double clicking by the left mouse button on the chosen file Open ENS Look in Etwork NSTINSpeciSoft package 9 4457 dataf
43. a field of display of laser reflected from a canti lever beam signal strength elements of management of the laser and also elements of management of feedback system On a blue field intensity of the laser reflected from a cantilever beam to the four section photo diode 1s displayed by a red stain Position of a stain in a midfield means that the stain from the laser 1s in the central part of the four section photo diode thus values of DFL and LFL signals have values zero or close to zero values SPM Feed Back 7 Range 93 5 WA I INT 8 8 68 FB INPUT SIGNAL MODE FBP FBI 2 4 a 1 2 4 B 8 10 Set point 2 4 a 10 10 5 5 10 Fig 5 16 SPM Feedback panel In the left bottom corner of the blue field the laser intensity signal INT is dis played INT Value is comparable to the sizes of a red stain FB Z means the device car Nano Scan Technologies Ltd User manual SPM scanning probe microscope adjustment rying out feedback by scan stage or head In the right bottom corner the Mag signal value is displayed There is head scanner Z position bar in the right top corner Green color corresponds to a safe approach of a probe and red means that the probe 1 too close to the sample and there is a probe damage possibility 5 SPM laser on off SPM laser on off button show PID parameters The button causes
44. al images of the sample surface To entry the raster spectral images mode select Head scan or Stage scan in the XY Scan mode combo box that is situated on the CCD settings panel XY i gt Fig 8 26 Scanning mode E Nspec 53 __ C3M m m 2 a 5 NT Andor DU 401A BV PMS 400A APD CKAH 40 0 01 maA Pasmep Nx Pasmep Ny A yim xd 0 10 20 30 40 0 01 Z HM Bl E E e 6 000 4 000 2 000 0 2000 1 Fig 8 27 Spectroscopy unit in the raster spectral images mode Basic tool set for CCD matrix adjustment 1s similar to tool set for spectrum ob taining on one point Additionally specialized tool set on the Scan option panel 15 dis played for raster spectral images Nano Scan Technologies Ltd User manual Spectroscopy 8 2 1 Settings and tools to work with
45. algorithm 6 4 Scanning For start scanning press the button Start Acquisition For stop scanning press again this button Acquisition Scanning is started only after a choice of signals on the Channel 1 4 For start enough one signal Fig 6 13 Start scanning Nano Scan Technologies Ltd User manual 94 Scan 3D Sy Nspec Universal Software 1 e H _ Data AS Spectroscopy Scan Dag SPM Oscilloscope Video Lithography y Options NT About kae ty Head Scan probe Stage Scan sample SCAN Nx points 8 FEEDBACK Ny points Scan width um 60 Scan height um 60 9 9 9 a ir MAG Ch D Section Current speed 96 602 4 Velocity Hz 8 40 XY positioning 0 2 Positioning 0 5 10 15 22 Current Tip Position emm Z pos 34 Height DFL RIPE CLL GL EUIS SLE 10 20 30 40 50 60 um um IRR PELE 0 10 20 30 40 50 60 0 MAG ADC1 60 40 E 30 20 10 Z FR FIRE XLI a 10 20 30 40 50 60 um um FERRA IL GY p p 0 10 20 30 40 50 60 0 i Nm A e 3 d e
46. ance in case of work with the spectral or SPM data Differs for 2D and 3D images Drop down basic filter list for 3D images scans The polynominal surface of the specified order will be subtracted from the image Fit None Fit 5 order Order of substrate surface Fit Lines X Fit Lines Y Subtract k Hone 0 order 1st order 2nd order Ard order 4th order 5th order Fit Lines X Fit lines by X axes X Fit Lines Y Fit lines by Y axes Drop down list of substrate polynomial from curves specters and sections The polynomial of the specified order will be subtracted from the curve Fit None Fit 5 order Order of substrate curve Manual fit manual choice of substrate line e Fit None Fit 0 order Fit 1 order Fit 2 order Fit 3 order Fit 4 order Fit 5 order Manual fit Nano Scan Technologies Ltd User manual Data unit for data processing n Apply fitting x Cancel fitting IRs Reset manual fitting line Additional mathematical filters for 3D images scans X Fitting Y Fitting Mean value Median value Gaussian Drop down list of Line by line subtraction of the specified order approximating curve in X direction Fit None Fit 5 order Order of the substrate curve The sane menu for Y direction None MET MA 0 order Y Fitting 1st order 2nd order a
47. arried out By pressing this button stepper motors perform one step up By pressing this button stepper motors perform one step down This button invokes motor options window Switching in the each motor control mode Not available with Certus Light device This button invokes remote control properties window SPM scanning probe microscope adjustment M3 3 ry z 2 z E ry E Fig 5 10 Drawing of the motors control panel in the each motor control mode Nano Scan Technologies Ltd User manual SPM scanning probe microscope adjustment E 5 3 1 Stepper motors settings By pressing the button X additional Motors options window is opened Up moving options Speed umis 0 1000 Distance mm 0 100 Down moving options Speed umis 0 1000 Distance mm 0 100 ne step options Step Up Step Down prm Landing Options Speed umis 0 1000 Landing Mode Mode Motors Level options Speed umis 0 1000 Calibrations Thread pitch mm Steps number revolution 3200 Fig 5 11 Motor options window In the Device type combo box you can choose Nano Scan Technologies Ltd microscope configuration that you have Device Type Device ID Cetus Up moving options Certus Light speed Hms 0 100 Certus Optic Centaur Distance 0 10 Fig 5 12 Choosing microscope configuration In the Up moving options the Speed
48. atically levels a scale on the maximum and minimum values In such a manner that in a corresponding window the data received at present completely is displayed At switching off of this tool the part of received im ages profiles and spectra oversteps the bounds of windows For full display of the data in a corresponding window include the given function or level the data manually with use of other scaling tools Nano Scan Technologies Ltd User manual e Data unit for data processing Height e Fig 3 32 Crop tool illustration gt I To change the image sizes guide the mouse cursor at border of a rectangle of al location and keeping the mouse pressed the left button stretch an allocation rectangle in the chosen direction After pressing Apply button 1 area of scanning will take the form also the sizes of area of allocation To cancel of area selection press the button Cancel x The new image 15 attached to group of the initial image Height Crop Fig 3 34 Cropped image Nano Scan Technologies Ltd User manual Data unit for data processing AutoSave nstdat TIT MR Fig 3 35 Group of original and cropped images 3 5 5 Image filters T Filters The button of a call of the basic mathematical filters By pressing it there is the drop down menu having a various appear
49. chanical Z mover motion Ce 29 9 Che Che Piezo Z mover motion Control 3 motors together Control first motor Control second motor Control third motor Run approach Shuttle controls lens mechanical mover shuttle controls lens piezo mover Shuttle controls stepper motors together Shuttle controls stepper motors number 1 shuttle controls stepper motors number 2 shuttle controls stepper motors number 3 Start stop head soft approach Keys for other device and functions controlling Tabs All motors and Motor 1 4 are contained control options by the joystick Steps number of steps on one turn of a wheel for stepper moving Speed number of steps in a second at turn of a shuttle for fast movement on the first position Speed Multipliers for shuttle positions multipliers on which speed increases at installation of a shuttle for fast moving by the chosen position For control from the program devices operated the Joystick it 1s necessary to guide the cursor at a wheel of management it is shown on the figures more low and to move to the necessary position For a stop of movement it 1s required to return a wheel of management in former position Fig 5 14 Shuttle fast moving Nano Scan Technologies Ltd User manual Fig 5 15 Wheel for step by step moving SPM scanning probe microscope adjustment E 5 5 Feedback parameters The Feedback panel contains
50. cope with CCD matrix is built in Certus Standard Certus Optic I U Centaur HR I U Certus NSOM devices Video unit of program is designed for configuration and working with this video cameras SES Nspec Universal Sot Data AX Spectroscopy J Scan SPM Oscilloscope Video Lithography Options NT About Configuration Default 700 v 30 a n 8 e 600 500 400 300 0 200 400 600 800 1 000 Fig 4 1 Video unit 4 1 Video unit basic functions For entering Video unit press the button on the top panel a Fig 4 1 v i i otart stop start stop CCD camera video imaging Automatic white balance Enables automatic white balance adjustment Repeated pressing of the button disables this Automatic exposure Enables automatic exposure adjustment Repeated pressing of the button disables this Autoadjustment Enables automatic white balance and exposure adjustment Re peated pressing of the button disables this Nano Scan Technologies Ltd User manual E Video unit Autofocus by image Autofocus by laser spot Save image Re Re Start recording Show tip scan area i 733 Show laser scan area u 7 Settings n Measure distance Show axes 9
51. ction Along X axes from upper left corner Along Y axes from upper left corner Along X axes from upper right corner Along Y axes from upper right corner Along X axes from lower left corner Along Y axes from lower left corner Scan 3D Along X axes from lower right corner Along Y axes from lower right corner By pressing the Feedback tab occurs feedback control panel opening On it are displayed sliders of feedback Integral Differential and Proportional component and Setpoint Set point precision 2 4 6 8 10 LLL 014 Fig 6 4 Feedback page Nano Scan Technologies Ltd User manual Scan 3D E Height DFL LFL MAG MAG Sin MAG Cos Phase 6 1 1 Signal description sample surface topography oignal proportional to a probe deviation concerning a normal Pays off as a difference between signals from the top and bottom half of four section photodiode Fig 4 43 DFL A B C D oignal proportional to a probe deviation concerning a torsion Pays off as a difference between signals from the left and right half of four section photodiode LFL 0 Magnitude of DFL signal In phase components of DFL signal Quadrature components of DFL signal Phase of DFL signal MAG MAG Sin MAG Cos Phase signals are computatio
52. ctric multiplier Nano Scan Technologies Ltd User manual 123 Spectroscopy and SPM scanning with same resolution Simultaneously spectral photoelectric multiplier and SPM scanning with different resolution Show spectrum in scan Switch between get spectrum in the selected point point and move sample to the selected point Dual smart CCD SPM Estimate size of spectrum scan data 0 0 2 0 4 0 6 0 8 1 Spectral data obtained by Centaur and Centaur HR complexes represents 4 di mensional array of intensity dependence from wavelength in each scan point XY For processing of similar images use the software NSpec 8 2 2 Convolution functions choice Fig 8 29 8 2 2 Choice of spectral images convolution function CKAH Fig 8 30 Nano Scan Technologies Ltd User manual Spectroscopy CKAH Fig 8 31 CKAH 100 80 60 40 20 0 20 40 60 80 100 Fig 8 32 Nano Scan Technologies Ltd User manual Spectroscopy CKAH Fig 8 33
53. different windows At a choice of mode Tree a device circuit diagram not to be deduced and devices accessible to change are displayed in the tree form Nano Scan Technologies Ltd User manual Optomechanical unit adjustment and control Combined Interface N_SPECTR File Mode r Shutter Exitation Manachramatar Exitation Current New z _5 Peseesei Confocal Exitation Pinhole Monachromator New Current Polarization 499 97 cet Reset Set C Edge Filters Exitation ND Filter New Current b 9 gt Fig 9 3 Centaur instrument control window Tree mode Nano Scan Technologies Ltd User manual Optomechanical unit adjustment and control 9 1 The general interface elements of options management The device which options are changed The device which options may be changed now Tee The device which options are closed for changes wv Open Close Open close shutter i Parameter input field Current Parameter value The step by step mover at first is translated in extreme position to the end then established in demanded position Apply parameters and options Indicator of options applying status Applied or in process Check box 4 Step by step moving E EX otep value M266 Additional devices adjustment Combo box control Nano Scan Technologies Ltd Us
54. displaying feedback Integral Differential and Proportional components and Setpoint KZ Feedback sign The button changes feedback sign Mi Mi Feedback by head stage owitching head stage Z scanner for caring out the feedback Feedback on off The feedback on off switch button 0 4 2 3 4 5 EE IN n7 4 078 HOH 0 1 2 1 2 3 4 Fig 5 17 Feedback parameters sliders In the drop down menu the signal on which feedback and a mode of scanning corresponding to it keeps is established Contact GFL 7 Signal Mormal GFL Contact Lateral DFL Tapping Tapping MAG Sin Tapping MAG Cos Tapping Phase STM amp Dic HR T STM ADC HR Z Fig 5 18 Choosing feedback input signal The automatic landing state indicators are shown in this window additionally Nano Scan Technologies Ltd User manual 85 SPM scanning probe microscope adjustment B Landing complete probe has landed to the surface wv A Move tip down Up Launches landing or lifting the probe to the sample x x lt Lower upper limiter Lower upper limiter has reached When choosing microscope type Snotra in a stepper motors options menu it will be running in a resonance microscopy mode using quartz resonators Tuning fork TF mode
55. e and press of the left mouse button to specify a point for which it is necessary to display a spectrum The button of a choice of a site of scanning For example at work in windows Scanning or Spectroscopy this button allows to establish the scan sizes on height and width By pressing the button panels of tools there are additional buttons The button of acknowledgment of the chosen area and installation of new borders of the image Cancel area selection Extend selected area to full scan Cropping image tool Actions of the button are similar to button Area selection It is available only at work in DATA unit User manual Data unit for data processing Height Fig 3 25 Zoom in For zooming in or out of image establish the mouse cursor in the chosen place and scrolling a mouse scroll to increase or reduce the chosen object Fig 3 26 Illustration of Fix X direction zoom tool ce a Height Height Height Fig 3 27 Illustration of Fix Y direction zoom tool e Nano Scan Technologies Ltd User manual 39 Data unit for data processing For similar actions at scaling of curves and spectra disconnect function Allow scaling H3 Height Height Fig 3 30 Illustration of restore scale tool 4 1 Action of Deny autoscaling is similar to Restore scale 1 1 tool action The main difference consists that at reception of images sections spectra the tool AI low deny Automatic scaling autom
56. e between 20 mV and 1 V 8 4 2 Photons counter device additional options For a display on the screen of the panel of additional options of the photons counter device press the button Additional options EI Nano Scan Technologies Ltd User manual 135 Spectroscopy Hon Bx A yp neck B Bx b yp neck B Bx A B Bx b B H3M C HC Fig 8 52 Photon counter device additional settings Ch A gate level V Gates threshold voltage Fast gating of the counter operation is accomplished by using the GATE inputs The pulse edges at the COUNT input are counted only as Ch B gate level V long as an appropriate level at the GATE input is present The pulse amplitude at the gate inputs should be in the range from 20 mV to 2 V Ch A event threshold Ch B event threshold Collect time s Time of photons collection Input hold off ns Delay after operation before the beginning of following measurement 9 4 3 Photons counter modes For a choice of an operating mode of the photons counting device it 1s necessary to use the dropping out list Scanning mode EI I Fig 8 53 Operating mode choice of photons counter 8 4 4 Counting mode At a choice an account Mode the tools panel
57. e of apply Apply changing allocation area Cancel Cancel changing allocation area recording spectrum will be limited by the chosen borders B 2 p amp T 500 600 Foo 900 1000 1100 1 Fig 8 37 Recording spectral range after choosing the range Nano Scan Technologies Ltd User manual Spectroscopy 8 2 3 Displayed range of a spectrum 3762 1253 Nx Lr 0 0 2 0 4 0 6 0 5 1 Fig 8 38 Choice of a displayed range of a spectrum for convolution By pressing the button Function convolution range selection input fields for changing of spectral range of convolution function 1s appeared on the Scan options panel In this field the range of a written down spectrum in used units of measure is es tablished In the window of spectrum the allocation area which occupies all range of a spectrum 1 displayed CHE LXX UII Mm cl 6 000 4 000 2 000 0 2 000 1 cM Fig 8 39 Changing the si
58. ength on the image its length will make a preset value and all axes will be calibrated according to set the reference Nano Scan Technologies Ltd User manual Video unit Nano Scan Technologies Ltd User manual Video unit Data AX Spectroscopy SF Scan SPM Oscilloscope Video Lithography Options NT About Settings Default Configuration Default v G Range 102 Ex gt Range Y T7 Width Height 8121 Line length Flip x Flip y Eg 3 IE 3D a n Fig 4 12 Creating new lens configuration After input of the reference size and its choice on the image there will be a change of axes scale of the image according to the reference size 4 2 4 Scan field selecting After lens calibration and creation of a new profile it 15 possible to spend combin ation and or installation of fields of scanning For this purpose it 1s necessary to press the button Tip scan area center alignment and having clicked on object on the video image to define a scanning field center The sizes of scan fields are set according to the sizes stored in the file of options Nano Scan Technologies Ltd User manual Video unit Configuration Default Name Range X Range Y Width Height Line length Flip x Flip y Fig 4 13 Scan fields select Nano Scan Technologies Ltd User manual SPM scanning p
59. er manual Optomechanical unit adjustment and control 9 2 Units list Shutter Wavelength selector Beam Expander Polarizer Edge filter Analyzer Monochromator Reference photoelectric multiplier Nano Scan Technologies Ltd User manual Optomechanical unit adjustment and control Confocal unit Additional devices adjustment 9 2 1 Collimator 8 Combined Interface N_SPECT File Mode Shutte wv Open Close s mies y ous 7 gt AE NL F zs e E 2 s Td he ee Mo y HE E T A Rt qas ed 5020 Y cs Ein ls ES Fig 9 4 Collimator options Open collimator shutter Close Close collimator shutter v Open Cose Nano Scan Technologies Ltd User manual Optomechanical unit adjustment and control 9 2 2 Wavelength selector Combined Interface N_SPECT File Mode Exitation Monochromator New Current 488 8 Set ResesSet Exitation Pinhole Current N 9537 Set Reset Set e Exitation ND Filter New Current 9 se Reserse AD FXPANDFER Fig 9 5 Wavelength options Excitation Monochromator Laser wavelength Excitation Pinhole oize of two dimensional crossed pinhole from 0 to 1000 um The neutral fil
60. er test calibration fe PC File PC File DSP Memory DSP Memory Q Close Loop Q Nonlinear Correction Head Stage Free positioning speed Proportional Integral Derivative 0 00 Source curve Channel Voltage Ux E Source Falling edge Level 0 1 Period um Pos um Counts 3353 78 20 30 E HM 6269 8 9024 26 Calibration curve 116522 14271 2 16697 5 EPEREEEE n GJ 190489 00002101 Capacitor sensors amp PID rate Fig 7 12 Controls panel Nano Scan Technologies Ltd User manual Oscilloscope unit Acquire data E Filters save to settings gy sensors autoadjustment Tools panel Settings Output Channel Voltage Ux Voltage Uy Voltage Uz sensor Cx sensor Cy sensor Cz Source Scan section Section from 3D data Section from Data Falling edge Level 0 1 Period um Nano Scan Technologies Ltd User manual Get data from the selected source Standard filters for curves Store obtained coefficients in the related table Run sensors automatic adjustment Combo box for device for calibration choise head or stage Combo box for calibration channel choice X piezostack calibration Y piezostack calibration Z piezostack calibration X sensor calibration Y sensor calibration Z sensor calibration For calibration the profile is used directly from the scanned image
61. erage and root mean squire value of a signal during accumulation for each channel In the field T sec time of signals ac cumulation is established To run the oscilloscope press the button Acsuisition to stop press it again tb Acquisition Nano Scan Technologies Ltd User manual Oscilloscope unit Fig 7 2 Oscilloscope controls DAC 01 V slider is required to set the value of controller output channel voltage The channel can be selected in the nearby combo box uani A 2 E LIAN 3 4 X Y 7 CK OBKa X 2 7 md 4 Fig 7 3 DAC slider Nano Scan Technologies Ltd User manual Oscilloscope unit DAC 1 DAC 2 DAC 3 DAC 4 X head DAC that moves head X axes Y head DAC that moves head Y axes Z head DAC that moves head Z axes X stage DAC that moves stageX axes Y stage DAC that moves stage Y axes Z stage DAC that moves stage Z axes Z objective DAC that moves lens piezomover Nano Scan Technologies Ltd User manual Oscilloscope unit 7 2 Scanner calibration In the right pane there is the Scanner test calibration panel Scanner test calibration PC File Q Cloze Loop PC File DSP Memory aa DSP Memory n Q Nonlinear Correction gt Head Stage Free positioning speed 1
62. ess Select line thickness Font size select size of font on the plot s e 10 000 8 000 Gi ER E Ed Bw Zn a F 4 000 uiia Fig 3 47 Several 2D curves and its list 3 5 12 Image 3D showing To create 3D view select the image in a tab and press the button Show 3D view 3 The image planar view will 3D view At switching between images in this mode all images will be displayed in 3D To exit from the 3D mode press the button re peatedly To rotate the image press and hold the left mouse button and move mouse Thus the image will be rotated corresponding to mouse movement Nano Scan Technologies Ltd User manual do Data unit for data processing B gt 8 B m Scale XY axis 2 zi Scale Z axes be be Move image Invert background ZZ lt A Show box e Show graph scale 4 Restore scale Save image as Palette Auto rotation Nano Scan Technologies Ltd E PF E E EE Y Gi VY 4 d d 4 4 4 4 e M mo md A A Fig 3 48 3D view mode By pressing the button and mouse up down moving over the image XY scale will be change By pressing the button and mouse up down moving over the image Z scale will be change Press this button and move
63. ice of the image for work After loading or reception of images for processing guide the cursor on necessary images at Data panel the and once click the left mouse button After an image choice on the screen the chosen image and a scale of heights will be displayed vido options WT about P Height 7 B E Era A B m m m m E is 1 Fig 3 10 Opened image 3 5 2 Description of image processing panel In all units except Lithography basic images curves and specters processing tools are placed on the image processing panel This panel tools is grouped by functions and purposes The panel has 3D name for three and four dimensional data and 2D name for curves and specters Nano Scan Technologies Ltd User manual 30 Data unit for data processing A LZ PA E Tools for 3D images measurement PD LZ Tools for 2D curves measurement 4 1 m ES Tools for 3D image scaling and cropping 4 1 Tools for 2D curves scaling 4 1 Tools for 3D image scaling and cropping Unit Scan Sm Basic images filters Export and copy images buttons Image view tools Curves processing tools Curves display settings 27 Use image for lithography Clear the clipboard 3 5 3 Measurement tools The group measurements tools has two kinds Tools for work with raster images Qa A PA AK for work with curves and graphics A
64. iles O VA My Name Size Type R noname Auto Save nstdat 929 KB nstdat File For example nstdat 929 KB nstdat File File name For example nstdat Files of type NST files nstdat Fig 3 4 Selection of file for opening After a choice of the necessary file the new tab which opens all images avail able in a given file are displayed After the image is loaded it 1s possible to start to work with 1mages Nano Scan Technologies Ltd User manual Data unit for data processing Data aj S e Z m m Fig 3 5 Images a new tab 3 3 4 Saving images from the tab After pressing of the button Save the Save file dialog is deduced on the screen In this window the list of available data is shown virtual folders of the current user account and supported files types is displayed At use of this button the data from current open tab saves only For saving data from other tabs or activate them and press Save or use saving functions described below After a choice of a path for saving the file it is required to fill a field the File Name and to press the button Save After saving of the chosen files it 1s possible to close program NSpec if necessary Nano Scan Technologies Ltd User manual a Data unit for data processing Save As 9 ma Look in NSTINSpeclSoft package
65. ill no file Save as dialog will be opened Open Open data file by standard Open file dialog Add new tab Add new tab with no data Copy selected data Copy selected image to the clipboard gm Copy selected group Copy selected group to the clipboard E Insert Insert image from the clipboard in the current tab Merge all tabs Images from all tabs merges in new tab Delete all Delete all data in the current tab Attention Pressing this button leads to removal from program memory of the allocated image Before pressing be sure that the given image is stored Delete Delete images selected in the tab Attention Pressing this button leads to removal from program memory of the allocated image Before pressing be sure that the given image is stored show attributes show current image attributes in a table Show 3D view ohow data in 3D image mode 3D mode tools appear Convolution function Convolution function It is displayed only at work with spectral images Convolution function range Convolution function range selection It is displayed only at work with selection spectral images Display units Change of a unit of measure on an axis X for the spectral data It is dis played only at work with spectral images lal Ta 8 Nano Scan Technologies Ltd User manual OU Data unit for data processing Export to Gwyddion Export current image to Gwyddion program for SPM data processing n
66. image Image background switching before black and white show box around 3D image Toggle graph axes Restore initial scale Save image to a hard disk in png jpg format by standard dialog Choice the palette Toggle auto rotation of 3D image around the vertical axes User manual Data unit for data processing Fig 3 49 Displaying axis and box a nj uH Fig 3 50 Displaying only axis Nano Scan Technologies Ltd User manual Data unit for data processing ky F3 b r1 m Fig 3 51 3D view without axis and box Fig 3 52 Inverted background color Nano Scan Technologies Ltd User manual Data unit for data processing 3 5 13 Working with spectral images For work with spectral images the following tooling 1s used Convolution Choice of a way of construction of the image on the basis of the spectral data It is displayed only at work with spectral images Integral Image construction on integral of intensity from the received spectra in the chosen range Maximum Image construction on intensity maximum from the received spectra in the chosen range Maximum position Image construction on intensity maximum position from the received spectra in the chosen range Mass center position
67. ing with images Data unit tools allow to carry out minimum processing of data that has been received or stored early 7 Nspec Unive 5 lt gt us Data 7 Scan SPM Oscilloscope a Video 4 Options NT About a 2 Bj We A Lud e a Fig 3 1 Data unit overview To entry Data unit press the button A Data that is situated on the top panel of the NSpec window After transition in a window of the program the button becomes Data pale 3 2 Supported file types By default the program NSpec supports two file types of data nstdat nst meta Data represents the three dimensional data array including value of the studied parameter and its distribution in plane XY or the four dimensional data array including spectra in points in plane XY nstdat NSpec native file format nstmeta file format for spectral images Nano Scan Technologies Ltd User manual ae Data unit for data processing 3 3 Loading and saving images Working with tabs The basic options of work on saving and opening of images are located on the tools panel The description of functions of buttons presents below Save Save current tab data in corresponding file If there is still no file Save as dialog will be opened save as save data in new file by standard Save as file dialog save all save all data from all tabs If there is st
68. interpolation method by standard dialog The selected data will be sent to the current tab in the Data send to Data unit 3 5 7 Image view tools Font size Select caption font size Palettes select image palette Height Height Height Fig 3 41 Different palettes To add new palette in the list create new section in the file Soft package Ne Param palette txt in such manner Nano Scan Technologies Ltd User manual ds Data unit for data processing Start RGB Orange 000 255 127 36 253 255255 end Or Start HEX Bilberry 0000FF FF0000 endq 3 5 8 Height scale 4 Z Fig 3 42 Using Z scale To change the image contrast and to display Z signal distribution the scale of heights a signal on Z is used To the minimum value of a signal there corresponds the Nano Scan Technologies Ltd User manual 4 Data unit for data processing bottom part of a scale to the greatest value of a signal there corresponds the top part of a scale To change the image contrast move sliders on the scale Sliders are displayed only at cursor pointing on a scale of heights Fig 3 43 Sample usage of height scale 3 5 9 Set Z range by selection If necessary to set Z
69. ion slider in the left upper corner of the SPM window for setting up current probe Z position To set up Z probe position using keyboard type value in the input field and press Enter key Z M 0 Fig 5 8 Probe Z control slider 5 3 The control of the stepper motors There is a Motors control panel in the left part a window Fig 5 9 Motors control panel drawing Nano Scan Technologies Ltd User manual SPM scanning probe microscope adjustment This instrument panel are used to control and operate with the stepper motors The motors are utilized for automatic approaching the tip to the sample by moving down scanning head Move up Move down Fast movement upwards to limit switch Fast movement downwards to limit switch v Landing kb Landing Landing Step up Step down Motor options uti Control for each motor Shuttle options Nano Scan Technologies Ltd User manual By pressing this button movement of stepper motors upwards with the set speed on the set distance is carried out By pressing this button movement of stepper motors down wards with the set speed on the set distance is carried out By pressing this button movement of stepper motors upwards with the set speed to limit switch is carried out By pressing this button movement of stepper motors down wards with the set speed to limit switch is carried out By pressing this button automatic approaching is c
70. l be displayed For moving and changing the range guide the mouse cursor at the range and having pressed the left mouse button move the range on the spectrum or guide the cursor at borders of the range and having pressed the left mouse button expand or narrow the range Nano Scan Technologies Ltd User manual Data unit for data processing CKAH 550 500 450 30 40 50 60 70 30 40 50 60 70 uM 2 450 T Mw 400 E 350 0 200 400 600 800 1 000 0 200 400 600 800 1 000 Fig 3 54 Changing convolution function range 70 550 60 50 500 40 450 30 40 50 60 HM 0 200 400 600 800 1 000 Fig 3 55 convolution function range expansion Nano Scan Technologies Ltd User manual Data unit for data processing CKAH 600 600 550 550 500 500 450 450 600 500 550 hm 2 450 TAS E 5 2 450 o 400 E 400 350 350 Noi eer rene cee eee ieee omen P 0 200 400 600 800 1 000 0 200 400 600 800 1 000 Fig 3 56 Spectra in other
71. l interface elements of options management 143 92 d c 144 145 9 2s SCIO CI E uestes retos EEA TEE 146 923 CROAT RERO 147 148 TEAC TITS 149 9 2 6 150 9 2 7 External monochromator adjustment eese 151 VET 152 153 10 NSpec interface 154 Nano Scan Technologies Ltd User manual Introduction Introduction NSpec is a program for Nano Scan Technologies Ltd devices control The pro gram works together with SPM controllers EG 3000 EG 1000 series and operates devices connected to the controller Besides the program can work with CCD cameras and the spectrometers connected directly to the personal computer Basic functions of NSpec e parameters and function of SPM head Certus control e parameters and function of scanning stage Ratis control e full control of the system Centaur including spectrometer and CCD camera e stepper motor control basic data processing Minimum system requirements e Windows XP e 256 Mb RAM e video card with OpenGL 50 Mb free disk space Recommended system requirements e Windows 7 e 512 Mb RAM e NVIDIA video card more then 50 Mb free disk space NSpec software is u
72. ld Movable indicat or position automatically links with value 1n the field of the data and on the contrary Using a mouse wheel it 1s possible to scale a range of moving of a Movable indic ator 1n the current position double click by the left button of the mouse on the movable indicator returns a full range For scale moving guide the cursor at a scale and keep the mouse pressed the left button to drag a scale in the chosen direction to a toddler If necessary to move the mov able indicator and to repeat operation Positioning 5 2 Positioning 95 10 10 5 REESE a Fig 2 1 Zooming the slider scale by mouse scroll Similarly the scale changes raster images For this purpose guide the cursor at the chosen site and rotate a mouse scroll to change image scale Thus the image center there 1s a point under the cursor The interface element a Separator is intended for change of the sizes of separate fields For its use guide at it the mouse cursor and having clamped the left mouse button move the chosen direction Nano Scan Technologies Ltd User manual Common interface controls Fig 2 3 Scan fields before separators has moved Height Fig 2 4 Scan fields after separators has moved Nano Scan Technologies Ltd User manual Data unit for data processing 3 Data unit for data processing 3 1 Data unit description Data unit 1s intended for work
73. mo _ Set Reset Set KI b M266 Fig 9 9 Monochromator options Monochromator Lens Management of objective position in the monochromator Focus Focusing along optical axis X Objective moving on an axis of X perpendicularly optical axis Y Objective moving on an axis of Y perpendicularly optical axis External monochromator adjustment Nano Scan Technologies Ltd User manual Optomechanical unit adjustment and control 9 2 7 External monochromator adjustment 8 Combined Interface M266 Monochromator Wavelength New Current 500 006 500 006 Set Reset Set 44 Grating Grooves 1 mm Blaze rDispersion nm mm 1 1200 600 2 9099 Exit Port Position Lateral port Set Exit slit New Current Monochromator Pinhole Current N 50 Set Reset Set Monochromator Shutter w Open Close 0 9 Set ResetSet C Fig 9 10 External monochromator options Wavelength nm Central wavelength falling on the grating Grating Choosing diffraction grating Centaur or pair of gratings Centaur HR 0 0 Mirror Centaur not available on Centaur HR 1 First grating or gratings pair 2 second grating or gratings pair 3 Third grating or gratings pair Exit slit Crossed exit pinhole size control from 0 to 1000 um Monochromator Pinhole Crossed pinhole of monochromator size control from 0 to 1000 um Monochr
74. mode values of all matrix vertical pixels summarize in each column In this mode the matrix works like CCD line array In the Single track mode values of selected vertical pixels summarize in all column PA Fig 8 20 Single track mode options Nano Scan Technologies Ltd User manual Spectroscopy m oingle track mode oelection rows which is the summation Matrix resolution 1024x256 128 pixels Central row Selection central row px Height Selection height in px In the Image mode the image from the CCD matrix 1s shown on the screen 9 0 Ill cllc 300 200 eee
75. n CD or other data store Latest program version is on the web site www nanoscantech ru in Software There is NSpec program for Windows XP Vista 7 OSes But it can be compiled for Linux u MacOS by user request The program NSpec is distributed in zip or rar archives Archive with current version of NSpec has name Soft Package Ne zip where Ne version number URL for latest version download NSpec ftp nanoscantech ru shared NSpec 1 2 NSpec software installation Before working with the program NSpec an archive containing the program files you need to unzip to a local or removable drive Installation 1s not required The program runs directly from the exe file To work with the program 15 to start by double clicking the left mouse button or file nst exe or NSpec Ne exe in the folder Soft Package Ne When you run nst exe or NSpec Ne exe will run the program After performing the above action main window NSpec displays Following the withdrawal of the main window on the screen you can start working with the program and connected equipment Nano Scan Technologies Ltd User manual Basic information about NSpec ee i gt 105 gt Organize Include in library Share with New folder e Name Date modified Type Size Favorites EE Desktop data 2 48 Downloads Gwyddion 2 Recent Places imageformats 2 NST data files 1 NST lit files 2 Param 2 3 Libraries Docume
76. n summarized spectrum with fixed exposition time by some cycles Obtain series of spectra Matrix information read mode Values of all matrix vertical pixels summarize in each column Values of selected vertical pixels summarize in all column Full matrix 2D image will be shown scanning mode selection Obtain spectrum in one point scanning by the probe in XYZ directions scanning by the sample stage in XY directions To obtain single spectrum from the point with fix time select Single scan in the combo box Acquisition mode x 0 Fig 8 17 Spectrum in one point single scan mode For accumulative acquisition mode set additional parameters in Accumulative options panel Nano Scan Technologies Ltd User manual Spectroscopy Fig 8 18 Spectrum in one point accumulative mode Acc
77. nal result of ADC1 with phase lock detector The direct digital synthesizer of frequency DDS which creates harmonious fluctuations with the set frequency and amplitude lies at the heart of the phase lock detector This signal is deduced for a probe excitation and is used for demodulation of the signals coming on the synchronous detector input input signal arrives on a preamplifier PGA where can amplify in 1 100 times The amplified signal ar rives on an input high speed ADC The digital signal from ADC output arrives on a multiplier input where it is multiplied with a basic signal and also with the basic signal shifted on 90 The received signals pass through low frequencies filters thus on an output signals MAG Sin and MAG Cos are formed Amplitude MAG and the Phase signals are calculated mathematically from these signals DInt ADC 01 ADC 02 ADC 03 ADC 04 ADC 05 X sensor Y sensor Z sensor Ux Uy Nano Scan Technologies Ltd User manual Total signal from all four sections of the photo diode This signal is proportional to intensity of the laser beam reflected from a cantilever Dint A B C D ADCO1 signal DFL ADC02 signal LF ADCO3 signal DInt ADC04 signal ADCO5 signal The signal from capacity sensor by X scan head axes The signal from capacity sensor by Y scan head axes The signal from capacity sensor by Z scan head axes High voltage output for X axes head piezostack High voltage output for Y
78. nits description There is the units panel in window top part In the panel there is buttons for basic units arising Pressing the chosen button leads to transition to a window of the corres ponding module and the icon of the active module becomes pale BA CL AS Spectroscopy Scan SPM BM oscitoscope Video 7 Lithography Options About Fig 1 4 Units panel Nano Scan Technologies Ltd User manual Basic information about NSpec 1 3 2 Basic unit brief description Data x amp Spectroscopy A gt J Scan SPM Oscilloscope a Video 22 Lithography 92 Settings NT About Nano Scan Technologies Ltd User manual Unite for working with data collecting processing saving and so on Unite for spectrometer calibration adjustment and spectroscopic information obtaining Unite for obtaining raster data from scanning devices scanning probe micro scope laser or spectral confocal microscope Unite for adjustment and controlling of SPM It is requires to SPM adjustment probe approach scan process control Unite for system signal controlling and for scan system calibration Unite for video camera connected to the device Unite for device adjustment and working with lithography mode Open window with user interface settings language icon size UI units About the program Basic information about NSpec 1 4 Working mode indicators There 15 the working
79. nsity Numerical value means an order of damping of the laser signal Without damping 10 fold damping 100 fold damping 1000 fold damping 10000 fold damping NSpec interface options 10 NSpec interface options For program interface tuning 15 used Options unit that 1s located on the basic in struments panel gt Options After pressing this button program options window appears CM Interface options NSpec Interface language English Buttons size Change interface font Select font X Show Data window Show Spectroscopy window show Scan window show SPI window Show Oscilloscope window Show Lithography window Show Scan head Show Scan stagg Show Spectroscopy PhS Show Oscilloscope calibration Show Qscilloscope head Show Oscilascope stage Show Video window Enable 4uto send to Data from Scan Enable Sensors autocalibration on start Enable Optics initialization an start Enable PID autotuning on start Data autoazawve time Cancel Fig 10 1 NSpec user interface options Interface language Interface language combo box Buttons size Interface buttons size px select font Calls Select font standard dialog Show data window Data unit on off check box show spectroscopy window opectroscopy unit on off check box Nano Scan Technologies Ltd User manual NSpec interface options show scan window Show SPM options window show oscilloscope window show lithography window
80. nts Music atmcd32d dll CCDUSBDCOM01 dll 2 CyUSB2Ormins dll 2 dummy ngi 2 Pictures E videos ep pair hex 2 ftd2xx dll 2 InstrumentCfg M266 xml InstrumentCfg M833 xml 2 10 2012 InstrumentCfg N Spectr xml 2 InstrumentManipulator M266 dll InstrumentManipulator M833 dll 2 1 Computer amp Local Disk C cx Local Disk D ftp incoming nst_distrib InstrumentManipulator_N_Spectr dll 2 libgfl211 dll 2 1 M266 dll 2 M833 dll mencoder exe Spectr dll nst exe PMS400A INI pmsdll32 dll QtCore4 dll QtGui4 dll QtNetwork4 dll QtOpenGLA dll RZCamAPI dll SLS SI Calc dll 5 5 si ctrl bk dll D SpUSB ini 2 10 2012 6 48 PM Configuration setti 1KB SpUsbO1 cnf 2 1 CNF File 1 KB SpUsb01 dll 2 StrHexTolnt dll ueye api dll 2 10 2012 6 48 PM Network 38 items Fig 1 1 Choosing NSpec executing file Fig 1 2 NSpec is starting After program has started on the screen to be deduced the main window of pro gram NSpec Now one may start working Nano Scan Technologies Ltd User manual Basic information about NSpec 7 Nspec Universal Software PIE ata Scan SPM EM Oscilloscope a Video x Options NT About Data 1 Default amp E B 8 m D m r5 ala a A m i E m Fig 1 3 Nspec main window 1 3 Basic unit panel Tools description 1 3 1 Basic u
81. of available layers is showing in the drop down list I P To move the layer on top press on the layer name in the list By pressing this button list of available layers is showing in the drop down list Delete layer To delete the layer on top press on the layer name in the list Nano Scan Technologies Ltd User manual Oscilloscope unit 7 Oscilloscope unit Oscilloscope unit is intended to observation signals from controller in time To entry Oscilloscope unit press the button scan that is situated on the top panel of the NSpec window Nspec Universal Software Data AS Spectroscopy SPM Video d Lithography Options T About Scanner test calibration EPC File PC File DSP Memory DSP Memory Close Loop Nonlinear Correction Source curve Controls m oA H8 0 8 Head Stage Channel Voltage Ux M 2 F itioni N ree positioning speed Falling edge 0 4 Proportional Integral Derivative Level 0 1 0 001 Period um 4 0001 0 Pos um Counts 0 Counts Calibration curve 0 8 E o O 0 4 0 Capacitor sensors amp PID rate 5 kHz Fig 7 1 Oscilloscope unit 7 1 Signal visualization Oscilloscope controls are placed on the left side of the NSpec window It contains displaying signal combo boxes and signal parameters In the fields Average and RMS are displayed av
82. ogram NSpec is star ted Selected data frame is automatically transferred to program Gwyddi on Export tab to Gwyddion Export data from current tab to Gwyddion The Gwyddion program is started All data from the tab is automatically transferred to program Gwyddion Export to ASCII Save data in ASCII file 3 6 1 Data export to Gwyddion In program Gwyddion extended together with program NSspec the unit for im port of the processed images from Gwyddion in NSpec is built in Nano Scan Technologies Ltd User manual Data unit for data processing send data back to NSpec Import active image data back to Nspec Default tab from Gwyddion send graph data to back to Import active graph data back to Nspec Default tab from Gwyddion NSpec send all data to back to NSpec Import all data back to Nspec Default tab from Gwyddion Fig 3 61 NSpec unit in the program Gwyddion 3 6 2 Export in ASCII file Any active data curves graphs scans and spectra can be imported from the unit Data to an ASCII file by the ito standard file save dialog will be opened 3 7 Clear data In case of buffer overflow of program NSpec at work in the unit Data it 1s recom mended to use the button for clearing of the program buffer Nano Scan Technologies Ltd User manual Video unit E 4 Video unit The optical micros
83. omator Shutter Monochromator Shutter wv Open eo Open shutter Close e Close shutter Nano Scan Technologies Ltd User manual Optomechanical unit adjustment and control 9 2 8 Confocal unit Combined Interface 5 File Mode Confocal PMT ND Filter New Current se Reserse Confocal Lens Focus X um C Set Reset Set H Confocal PMT Pinhole Current N 904 Set Reset Set e Fig 9 11 Confocal unit control The neutral filter of variable density Numerical value means an order of Confocal PMT ND Filter damping of the laser signal 0 Without damping 1 10 fold damping 2 100 fold damping 3 1000 09 damping 4 10000 fold damping Confocal Lens Management of objective position in the confocal unit Focus Focusing along optical axis X Objective moving on an axis of X perpendicularly optical axis Y Objective moving on an axis of Y perpendicularly optical axis Confocal PMT pinhole Crossed confocal pinhole size control from 0 to 1000 um Nano Scan Technologies Ltd User manual Optomechanical unit adjustment and control Reference ND Filter Nano Scan Technologies Ltd User manual 9 2 9 Reference PMT gt N B le id a Da Ly NE et Fig 9 12 Reference photoelectric multiplier control The neutral filter of variable de
84. on esses enhn 104 O MOr COU OVO ION 105 Lool panel 105 7 3 5 Calibration coefficients obtaining essere 107 B SDOCLEOSCODY 110 8 1 Tools for spectrum obtaining and processing ees 111 111 oo COD MUT ODDS E 116 8 1 3 CCD matrix 120 DNE NEP AUDI 121 5 2 Spectral die v P 122 Nano Scan Technologies Ltd User manual Content 6 2 1 Settings and tools to work with spectral 123 8 2 2 Convolution functions 124 8 2 3 Displayed range of a hene nennen 128 8 2 4 Scan CCT OM 130 8 2 5 EE S 130 58 5 Panoramie SCC ONIN vs o reri 133 5 1 Photons counter adjustment csseeccssssceccosssecccossecccossseeccosssscssecsssesoseessseso 134 5 4 1 Photons counter device options sss eene 135 8 4 2 Photons counter device additional options sss 135 8 4 3 Photons counter 136 8 4 4 Counting 136 OD OO 137 E MESE 6 0 ree ee nee 138 9 Optomechanical unit adjustment and control 140 9 1 The genera
85. on This table coefficients 1s necessary for non linear con version of the capacity C of the sensor to piezostack to X movement In the system EG 3000 Nano Scan Technologies Ltd User manual 192 Oscilloscope unit C X AXX 4 BX X 4 CXX DXX H E C sensor capacity in DACs counts 0 65535 X displacement in um 0 Xmax this function is working at close loop is ON a If close loop is off capacity is cal culates by linear relationship X C X 65535x c max Nano Scan Technologies Ltd User manual Oscilloscope unit 7 3 Calibration procedure 7 3 1 Calibration mode For scanner calibration go to calibration mode by pressing Show Hide calibra tion window Then a window there will be tools for carrying out of calibra tions Nspec Universal Software _ Data AS Spectroscopy Scan Mag SPM Oscilloscope Video Lithography Options NT About Scanner test calibration TPC File PCFile DSP Memory DSP Memory Close Loop Nonlinear Correction dd Head Stage Free positioning speed Controls mm Channel Source N Falling edge 0 4 Proportional Integral Derivative Level 0 1 Period um Source curve 0 8 Counts 0 4 0 6 Counts Calibration curve 0 8 Counts Capacitor sensors amp PID rate 5 kHz Fig 7 11 Oscilloscope window in the calibration mode drawing 7 3 2 Pie
86. on off of a field with the data about position of mark ers By pressing the button the window containing the detailed information on position of markers and value of measured indicators in a point of their install ation is displayed Thus the information displayed earlier at markers is de duced in this window By pressing the button in the field of the image additional marker C is dis played For its moving across the field of the image guide at it the cursor and keeping the left mouse button drag in the chosen point Thus in a window displaying the information on value of markers it is activated by pressing the button the Data about markers after button pressing in the field with values of corners the corner size between pieces AC and AB is deduced By pressing the button the grid is displayed By pressing this button the field of construction of profiles of the chosen sec tions is displayed The button of creation of vertical sections By pressing this button only vertic al sections can be created To pass to construction of sections in other direc tions press the button repeatedly The button of creation of horizontal sections By pressing this button only ho rizontal sections can be created To pass to construction of sections in other directions press the button repeatedly User manual Data unit for data processing 3 Emm UE GL amp si 48 115 y 44090
87. points m3c CKAH 70 60 500 50 40 450 30 ee eS ea ee 30 40 50 60 70 2 p 450 FE T o 0 200 400 600 800 1 000 Fig 3 57 Spectrum by integral of intensity from the received spectra in the chosen range Nano Scan Technologies Ltd User manual Data unit for data processing CKAH Fig 3 58 Image construction on intensity maximum from the received spectra in the chosen range CKAH 70 600 60 500 50 40 400 30 300 EE ular is ais xx wee 30 40 50 60 70 Fig 3 59 Image construction on spectra intensity maximum position Nano Scan Technologies Ltd User manual Data unit for data processing m3c CKAH 30 40 50 60 70 gt e C2 gt 0 200 400 600 800 1000 Fig 3 60 3 6 Images import and export For data export to other data processing programs the following tools are used Export data to Gwyddion Export current image data to Gwyddion SPM data processing program The Gwyddion program extended together with pr
88. r manual Oscilloscope unit m Markers on the curve can be moved manually in case of wrong automatic installa tion Calibration curve Counts k Fig 7 16 Calibration curve After loading calibration structure curve and carrying out all steps for calculation of polynomial coefficients in the frame Coefficients it will be shown Coefficients 0 0002101 0 0655104 6 76023 971 333 3400 11 Fig 7 17 Polynomial coefficient Then press the button Save to settings i to store polynomial coefficients on the chosen axis 1n the Piezo Calibration table Similarly coefficients are defined for other axes and scanners and for capacitor gauges After getting all coefficients it 15 necessary to keep options by pressing the but ton PC File 13 Nano Scan Technologies Ltd User manual 109 Spectroscopy m 8 Spectroscopy Spectroscopy unit is intended to obtaining spectral images To entry Spectroscopy unit press the button scan that 1s situated the top panel of the NSpec window E Nspec kake F lt gt USB USB 2 oe i Q lt gt lt C3M a Bugeo d NT O nporpamme x 6 Andor DU 401A BV PMS 400A APD E A 2D
89. r operation stop press the button otart stop again SCALE SCALE inq thi oak FTTT Scale reverse T is button the direction of scale on X axes re Data export Export spectrum in spc file by standard File save dialog By pressing this button the management window by the automated parts of the opto mechanical module is de duced Opto mechanical unit con trol This button enables an algorithm of subtraction of traces of Delete spikes influence of space particles on a CCD spectrometer matrix from a spectrum This button enables a baseline subtraction from a spec Baseline subtract trum Store current spectrum as Current spectrum will be saved in the clipboard to use as baseline baseline in the baseline subtraction function 0 UA 0 Create baseline manually Tools for manually baseline creation will be displayed Nano Scan Technologies Ltd User manual m Spectroscopy Em Toggle panorama mode Turn on panorama specter mode Andor DU 401A BV PMS 400A APD Laser power The buttons calls laser control window AE EIS ho 10 000 SSS 60 20 0 20 st C 9 000 8 000
90. raphy X Options NF About Head Scan probe To Stage Scan sample l S scan FEEDBACK OFF OFF Nx points 200 id Ny points 20 Scan width um 40 Scan height um z 2 Section OFF BACKW 0 Ch C Section J Ch D Section OF OFF OFF Current speed 60 m Velocity Hz 0 2 4 6 8 10 1 Bowe 0 Ypos Positioning XY positioning E E A BB a m m m Current Tip Position Z pos 6 Fig 6 1 Scan unit drawing There are four graphic frames in the central part of the window that shows accu mulated data while scanning In the left top corner of the Scan unit there are two tabs Head scan Stage scan By switching this tabs you choice the corresponding device to perform scanning Stage scanning is possible if your complex has the scanning stage option In minimal SPM complex there 1s no scanning stage Nano Scan Technologies Ltd User manual Scan 3D 6 1 Adjustment of scan parameters To establish scan parameters Scan and Feedback tabs are used SCAN HH FEEDBACK Nx points 200 M points 200 Mi Scan width um 60 Scan height ym 60 ChA Section OFF x Ch B Section OFF E 4 Ch C Section OFF E Ch D
91. rd order 4th order 4th order Mean value Median value Gaussian Mean value Moving average filter Window size sets in pixels Median value Median filter with square window Gaussian Gaussian filter modifies the input signal by convolution with a Gaussian function H 3px Size of averaging window Fig 3 36 Fit line X Nano Scan Technologies Ltd User manual Data unit for data processing Fig 3 37 Plane substrate section Fig 3 38 Substrate base line manually At subtraction of a base line manually check in Manual Fit for curves filters After that to press the button to Reset base line There will be a straight line between start and final points of a curve on the screen At prompting of the mouse cursor on a line and pressing by the left button lines Nano Scan Technologies Ltd User manual da Data unit for data processing points are formed For moving of points establish the cursor on the point and having clamped the left button move the point After creation of a base line for subtraction press Accept 1 For cancellation of subtraction of a base line manually it 1s neces sary to press Cancel xl 3 5 6 Export tools save image to a hard disk in png jpg tiff format oave image as Set Z range by selection Enabling of manual image contrast by image area selection Interpolation mode select image
92. right top corner of the NSpec window service calibration file for DAC ADC scale and offset File contains program interface settings File contains external laser settings File contains lithography settings File contains color palettes settings File contains photons measurement counter settings File contains remote controller settings File contains autosaved controller and program configurations Automatic ally load configuration when program starts Directory with photons measurement counter drivers Remote controller drivers Service avi codec directory CCD video camera drivers Executable file User manual Common interface controls 2 Common interface controls 42 Contact Normal GFL T Mode Signal Tapping Tapping Tapping Tapping HRUT TSTM 400 HR Z m C Fit Lines X Fit Lines Y e Noe BETEA 0 order O 2nd order 3rd order Ath order Sth order owe Nano Scan Technologies Ltd The usual button of unitary inclusion of functions by pressing doesn t change the form Two state button switches on off of functions On state red frame off state black frame The input field of numerical value black color means the current estab lished value For value change guide in the field the mouse cursor and press the left button of the mouse of 1 times The input field for numerical value after activation
93. robe microscope adjustment 5 SPM scanning probe microscope adjustment To entry SPM unit press the button n that is situated on the top panel of the NSpec window Key parameters of adjustment a scanning probe microscope are located in the SPM unit In the SPM unit feedback parameters are set stepper motor are controlled scanning mode are set and etc Frequency curve se deo Ne Z Range 87 4 7 Tip INT 8 1 MAG 8 07 Amplifier Out mV 0 Probe Resonant Frequency mHz HR RRA OR GES Ga LFL ADC 2 1 v INT ADC 3 1 Fig 5 1 SPM unit drawing Nano Scan Technologies Ltd User manual SPM scanning probe microscope adjustment 5 1 Plot mode control In the left part of a window there is a panel of Plot mode control It is used for display resonant curve and others signals received by system from sensors and a digital microscope Fig 5 2 Plot mode control A field of the probe amplitude frequency curve is displayed in the right F d requency curve mode valent oet An oscilloscope field is displayed in the right window part There are aver age and RMS of selected signal values fields under oscilloscope curve Oscilloscope mode A land lift curves 2 spectroscopy and spectroscopy parameters panel are S i ode displayed in the right window part Nano Scan Technologies Ltd User manual
94. rs Directory with drivers for confocal unit and monochromator Directory with program pictogram and translation files Directory with drivers of EG series USB controller Library of interface tools Gwyddion program for SPM data processing Default folder for data saving AutoSave nstdat Autosave data file NST lit Files Param ccd conf ccd data par controller conf data motor par default par default2 par Emulator conf ExtraCalib par gui conf laser conf lithography conf palette txt pms conf shuttle conf SPM conf PMS400A Shuttle temp USB CCD nst exe Nano Scan Technologies Ltd Default folder for lithography drawing Directory with program settings and configuration files File contains nonlinear correction parameters File contains spectrometer parameters and calibration File contains controller options otepper motors configuration file File contains scanners connected to EG 3000 calibration parameters the range nonlinear correction coefficients for scanners and sensors etc This data corresponds calibration tables in the Oscilloscope unit File contains scanners connected to EG 1000 calibration parameters the range nonlinear correction coefficients for scanners and sensors etc This data corresponds calibration tables in the Oscilloscope unit Emulators configuration file USB Emulator USB controller emulation CCD Emalator CCD spectrometer emulation Its states are shown in the
95. scan area center The scan areas by stage are shown on the video image related to alignment not available in laser spot By mouse clicking scan area center moves to mouse Certus Standard point 4 2 2 Tools panel Settings Nano Scan Technologies Ltd User manual Video unit Settings m Range x Lim Range i Lim 100 Height 25 Line length Lim Flip x Flip Combo box with available configurations Name Range X Range Y Width Height Line length Flip X Flip Y Nano Scan Technologies Ltd Fig 4 10 Settings panel The list of available configurations is enumerate in the combo box Current configuration name Name of new configuration is entered here X axes field of view size Y axes field of view size Width of the image in percentage of width of a matrix Height of the image in percentage of height of a matrix The field to enter the reference size of the test structure Horizontal image flip Vertical image flip User manual Video unit 4 2 3 New lens calibration For new lens calibration it is necessary to focus on the test sample surface and produce following steps Press the button Add new configuration 89 e Enter the configuration name e Enter reference size of the test structure Using tool Measure reference n select reference structure on the video im age Irrespective of a numerical ruler l
96. sed to following equipment operations e Certus Light Certus Standard e Certus Optic e Certus NSOM Centaur e Centaur U Centaur I HR e Centaur U HR Nano Scan Technologies Ltd User manual Introduction Snotra e Ratis e Vectus The program is based on multythread kernel written in C and built by com piler GCC4 The program interface is built using cross platform libraries and libraries 4 QWT The program is compatible with all current versions of OS Windows XP 2003 Vista 7 Upon request the program can be transferred to the operating system Linux BSD MacOS Only basic functions of data processing are implemented to NSpec software and tools for optimal adjustment of scanning parameters Specialized software 1s recommended to use for full data processing such as Gwyddion For pro cessing the spectral data is also recommended to use specialized programs such as GRAMS To facilitate the transfer of data to other applications NSpec program supplied by the filters of import export formats ASCII gwy Gwyddion spc GRAMS Nano Scan Technologies Ltd User manual Basic information about NSpec 1 Basic information about NSpec In this chapter general information about NSpec is presented installation struc ture main units description and etc 1 1 Distribution of NSpec The Nspec software is distributed with Nano Scan Technologies Ltd devices and equipment o
97. show scan Head window Show scan Stage window show photons counter tab show oscilloscope calibration Show head calibration window Show stage calibration window show video window Enable auto send to Data from Scan Enable Sensors autocalibration on start Enable Optics initialization start Enable PID autocalibration on start Data auto save time min Nano Scan Technologies Ltd User manual scan unit on off check box SPM unit on off check box Oscilloscope unit on off check box Lithography unit on off check box scanning by head tab in the Scan unit on off check box scanning by stage tab in the Scan unit on off check box Show hide photons counter tab in the Spectroscopy unit check box Oscilloscope calibration window on off check box scanning head calibration tab in the Oscilloscope unit on off check box scanning stage calibration tab in the Oscilloscope unit on off check box Video unit on off check box Auto send obtained data to the Data unit on off check box sensors autocalibration with device start on off check box Optics initialization with device start on off check box PID autocalibration with device start on off check box Sets data auto save interval in the Data unit If 0 auto save disabled
98. te results in the course of scanning of a panoramic spec trum a Nspec a C3M Bl 2 g Bugeo dp mom x NT O nporpamme Andor DU 401A BV PMS 400A APD EJ djs P iM P aia Fig 8 48 Spectroscopy Panoramic spectrum mode Nano Scan Technologies Ltd User manual Spectroscopy 8 4 Photons counter adjustment For transition to management of the photons counter device pass in the tab Photon counter in the unit Spectroscopy v 1 1 otart Stop otart stop of photon counting Additional options Call of the additional options panel ocanning mode ocanning mode drop down list None Photon counter mode on the constant wavelength opectrum mode Photon counter mode in the wavelength range Raster scanning of surface by the SPM head in a mode of the Head scan account of photons Raster scanning of surface by the stage in a mode of the ac otage scan count of photons Andor DU 404A BV PMS 400A APD
99. ter of variable density Numerical value means an order of damp Excitation ND Filter ing of the laser signal Without damping 1 10 fold damping 2 100 fold damping 3 1000 fold damping 4 10000 fold damping Nano Scan Technologies Ltd User manual Optomechanical unit adjustment and control 9 2 3 Beam expander Diameter Set Reset Set Fig 9 6 Beam expander options Beam Expander Diameter Beam diameter Nano Scan Technologies Ltd User manual Optomechanical unit adjustment and control 9 2 4 Polarizer Polarizer Position Analyzer Position Polarize Position 0 Horizontal o Set Reset Set 90 Vertical Analize Position D Horizontal 330 Set Reset Set 90 Vertical Fig 9 7 Polarizer options Establishing of a polarization angle Angle in grad Establishing of a polarization angle Angle in grad Nano Scan Technologies Ltd User manual Optomechanical unit adjustment and control 9 2 5 Edge filters Combined Interface File Mode Edge Filte Position 488nm se e Fig 9 8 Edge filters adjustment Edge Filter List of available filters Filters is mounted on the turning wheel with four positions Nano Scan Technologies Ltd User manual Optomechanical unit adjustment and control 9 2 6 Monochromator Monachromator Lens Focus X 0 vo
100. umulative options Number of accumulative cycles with exposition time be set from 1 to 99999 Number of accumulations MM Accumulative cycle time Delay between single cycles Can be set from 0 to 99999 seconds oet trigger mode Matrix signal read trigger selection external or internal By default internal The kinetic series mode allow to obtain series of periodic spectra both in the single scan and the accumulative mode When choosing the mode of obtaining the kin etic series Kinetic series opens the additional toolbar settings Kinetic series op tions Kinetic series options Number of kinetic series Desired number of kinetic series Kinetic series time Delay between single series Nano Scan Technologies Ltd User manual Spectroscopy 0 40 20 0 C 0 1 Fig 8 19 Spectrum in one point kinetic series mode Three ways of matrix information reception are possible Full vertical binning single track Image In the Full vertical binning
101. up 0 to 1000 um s and the Distance up 0 Nano Scan Technologies Ltd User manual 8 SPM scanning probe microscope adjustment to 1000 mm for upward moving are set up In similar way set up options for down ward moving With One step options sets the values of the motors step in relevant dir ections for One Step Up and One Step Down button In the Landing options parameters of automatic approach by Landing button are set up Landing mode means Mode 1 the approach 15 carried out by only one motor rear motor Ne 3 Mode 2 the approach 15 carried out by three motors The Speed 0 1000 in the Motor level options means the motor speed when Fast movement upwards downwards to limit switch buttons pressed On the Calibrations panel parameters of stepper motor calibration are set In the field the Thread pitch mm 15 set a thread pitch In the Step number field is set full quantity of steps 5 4 Remote control adjustment The Remote control button calls remote control adjustment window Shuttle Gui All motors 5 d hi c m C qi Motor 1 Speed multiplierz for shuttle pos Motor 2 e c 6 C Ln 1 hotor 4 8 M E e J DJ co T e e 4 co J Fig 5 13 Remote control GUI Nano Scan Technologies Ltd User manual SPM scanning probe microscope adjustment Me
102. ze of allocation area and moving it on the spectral image it is pos sible to allocate sites with various intensity 1n the given spectral range Nano Scan Technologies Ltd User manual Spectroscopy 4 00 FT 2M B camur B a NET iT E Se Gn Se Ss 4 00 e 7i Paman camur am 1 ume E BEHI i b 3 zm 4 i F ba Je L E SS mee IT 4 Tcu B T sem 1 1 im pa 3 id 4 T 2000 11 Fig 8 40 Example of changing convolution function range of spectrum Nano Scan Technologies Ltd User manual Spectroscopy 8 2 4 Scan direction scan direction Drop down list with scan directions The arrow shows fast scan direction w Along X axes from upper left corner 1 Along axes from upper left corner gt j Along X axes from upper right corner Along Y axes from upper right corner Along axes from lower left corner E cM
103. zostack calibration Switch off nonlinear correction and sensors close loop Scan test sample with the full amount of points 1000 x 1000 in the direction of the calibration and the full range the direction of the fast scan X measurements should occur on the growth of the voltage from minimum to maximum E3 e Produce a horizontal section of the image e Calculate calibration coefficients using Controls panel tools Procedure of coeffi cients calculatiing 1s described below in point 4 17 5 e Store new coefficients in the related table e Save data Nano Scan Technologies Ltd User manual 104 Oscilloscope unit 7 3 3 Sensors calibration e Switch off nonlinear correction and switch on sensors close loop e Scan test sample with the full amount of points 1000 x 1000 in the direction of the calibration and the full range the direction of the fast scan X measurements should occur on the growth of the voltage from minimum to maximum E3 e Produce a horizontal section of the image e Calculate calibration coefficients using Controls panel tools Procedure of coeffi cients calculatiing 1s described below in point 4 17 5 e Store new coefficients in the related table e Save data 7 3 4 Tool panel Settings Universal Software _ Data AX Spectroscopy Scan SPM Oscilloscope Video Lithography Options NT About Controls m e 5 Scann

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