User Manual
Contents
1. 2 Press the pushing system inward 3 At this state with the pushing fork 14 sliding over the cassette base plate tighten the two adjusting screws 9 4 Release the pushing system and check that the pushing fork moves back and forth freely several times 5 If the pushing fork motion is not completely smooth or if a height difference along the pushing fork is observed further adjust the pushing fork using adjusting screws 10 6 While adjusting with screws 10 align the pushing fork to the cassette base upper plate until parallel with the four adjusting screws 11 located on the pushing system T Repeat all the above steps until full alignment is achieved Pushing System Stoppers Adjustment Repeat the following steps on both sides of the CV Tool Pushing System Backward Motion Preparation a Remove both Teflon grippers 2 and clip trays 1 a Remove the clips cassette 3 from the cassette base 5 Adjustment Adjust the pushing fork so it overlaps the cassette base upper plate by 1 5mm 1 Release the locking screw nut 16 and adjust the stopping screw 17 so the pushing fork 14 overlaps the cassette base by 1 5mm and is stopped by the small pin 18 protruding from the axis 19 Ds Tighten the screw nut so the axis is affixed 3 Reinstall the CV Tool Manual Semi automatic CV Tool 18 4 4 2 Pushing System Forward Motion Preparation 7 Place the CV Mask and then the dummy wafer on th2. empty change cassettes 1 Push the pin and remove the cassettes 2 Install new cassettes Manual Semi automatic CV Tool 20 6 0 SPARE PARTS AND ACCESSORIES Order spare parts and accessories from Persys When ordering please state the following for each required part m Part Number m Description of part The spare parts listed below are available for the Manual and Semi automatic CV Tools ITEM NUMBER PART NAME PART NUMBER 1 Teflon Grippers CV 1 227 2 Teflon Base CV 1 202 or other 3 Clips Pushing CV 1 211 or other NOTE When ordering please state CV Mask type size and position of mask on wafer Manual Semi automatic CV Tool 21
3. moving handle and pulling the plate toward you Manual Semi automatic CV Tool 13 2 Place the wafer with the mask on the Teflon plate so the major flat of the wafer is seated above the Teflon plate flat 3 Make sure the mask is in position by moving it slightly from side to side so it feels in place 4 Pull out the Stainless Steel clips with the Teflon grippers horizontally such that they do not rub the back of the wafer Manual Semi automatic CV Tool 14 5 Remove the wafer using a vacuum wand and discard the mask 6 Return the Teflon grippers to their place Manual Semi automatic CV Tool 15 4 0 CALIBRATION Semi automatic CV Tool 4 1 Preliminary Steps CV Tool calibration is to be performed only if any drift in calibration has occurred see Fig 4 1 for reference throughout the calibration procedure 7 5 14 oO 10 4 23 Figure 4 1 29 a 26 O N Az 21 1 gt 2 Semi automatic CV Tool Side amp Top View Manual Semi automatic CV Tool 16 4 2 4 3 Requirements For performing the calibration you will re
4. 16 17 17 18 18 19 19 20 20 21 LIST OF ILLUSTRATIONS Figure Title Page 1 1 Manual CV Tool 1 1 2 Semi automatic CV Tool 2 4 1 Semi automatic CV Tool Side amp Top View 16 Principle Changes in Present Revision C 1 The 8 CV tool is presented in this revision Specifications operation and spare parts sections are revised accordingly 2 Several drawings are revised in the operation chapter to present a more accurate view of the CV tool 1 0 INTRODUCTION 1 1 Scope of the Manual This manual provides the installation operation and maintenance procedures of the CV Manual and Semi automatic Tools 1 2 Description 1 2 1 Overview The CV Mask is an aluminum mask with specially shaped holes It is attached to the wafer with Stainless Steel clips by means of a CV Tool The wafer mask clips assembly travels through semi automatic transfer machines in the same way as the regular process wafer Disposable one time use ensures a constant and well shaped dot size of 0 8mm 1 2mm or 1 6mm 1 2 2 Manual CV Tool Fig 1 1 The Manual CV Tool consists of a wafer shaped Teflon base and an anodized Aluminum cover with a Teflon butterfly Its purpose is holding the wafer in position while attaching the four Stainless Steel clips Teflon Base Aluminum Cover Teflon Butterfly Figure 1 1 Manual CV Tool Manual Semi automatic CV Tool 1 2 3 Semi automatic CV Tool Fig 1 2 The
5. Semi automatic CV Tool consists of a wafer shaped sliding Teflon base with two stands on either sides Its purpose is positioning the clips cassettes in place The tool also includes two trays for collecting used clips and two Teflon grippers which are used for removing the used clips Teflon Base Clips Cassette gt Clips Tray gt Teflon Gripper Figure 1 2 Semi automatic CV Tool Manual Semi automatic CV Tool 2 2 0 TECHNICAL DATA 2 1 CV Mask and Clips Material Mask Material Clips Mask Dimensions Width Thickness Length mm No flats LR Minor flat LM Major flat SR Major amp Minor flats SM Number of dots No flats Minor flat Major flat Major amp Minor flats LR LM SR SM Manual Semi automatic CV Tool Aluminum 6061 5052 Stainless Steel 20mm 25mm for 8 mask Imm 4 By 6 8 85 40 110 40 135 50 185 60 85 40 108 20 133 30 X 82 75 107 00 130 00 X 82 75 105 70 127 80 X 4 5 6 8 6 9 11 17 6 9 11 X 6 9 11 X 6 9 11 X 2 2 Manual CV Tool Materials Anodized Aluminum 6061 5052 Teflon and Stainless Steel Dimensions mm amp approximate weight kg Length Width Height Weight 4 120 107 13 0 170 5 143 132 43 0 250 6 170 157 43 0 350 8 222 208 45 0 500 2 3 Semi automatic CV Tool Materials Anodized Aluminum 6061 5052 cleanroom certified plastics and Stainless Steel Dimensions mm Length Width He
6. User Manual Manual Semi automatic CV Tool CV 6 01 Rev C May 1997 Thank you for purchasing Persys Manual Semi automatic CV Tool This manual has been written to provide all relevant instructions for installing operating and maintaining your CV Tool We recommend you read these instructions before attempting to install or operate your CV Tool to ensure the maximum service life of your equipment Persys Technology Ltd believes the information contained in this publication is accurate as of its latest printing date and reserves the right to make changes in specification and information without prior notice Persys is not responsible for any inadvertent errors The terms and conditions governing the sales of Persys products and the licensing and use of software consist solely of those set forth in the contracts between Persys and its customers No representation or other affirmation of fact contained in this publication including but not limited to statements regarding capacity response time performance suitability for use or performance of products described herein shall be deemed to be a warranty by Persys for any purpose or give rise to any liability by Persys whatsoever In no event shall Persys be liable for any incidental indirect special or consequential damages whatsoever including but not limited to loss of profits arising out of or relating to this publication or the information contained in it even if Persys
7. e Teflon base 6 Adjustment In order to perform the following adjustment position the pushing fork so it almost touches the wafer 0 4mm apart 1 Press the pushing holder so the pushing fork 14 drives the clips in the cassette onto the wafer 2 Adjust screw 20 so it touches the stopper pin 21 ensuring that the pushing fork is not touching the wafer 3 Tighten screw 20 using the screw nut 22 4 5 Teflon Base Stoppers Adjustment Repeat the following steps for forward and backward stopper plates 1 Press the stopper fork 23 and position the wafer Teflon base 6 so the CV Mask groove is located exactly between the two cassettes 3 2 Release the stopper fork 23 until the fixing rod 24 which is under pressure of the stopper spring enters the conical hole located at the CV Tool base 25 3 In this state 7 Move the stopper plate 26 until it touches the stopper pin 27 located at the middle plate 28 bottom part 7 Move the Teflon plate over to the other side forward position the Teflon base between the two clip trays and tighten the stopper plate 26 using two screws 29 Manual Semi automatic CV Tool 19 5 0 MAINTENANCE 5 1 Semi automatic CV Tool Clips Clips accumulating in the used clips trays should be disposed of from time to time 1 Remove the two Teflon grippers holding the trays 2 Slide out the two trays of clips Changing Cassettes When the cassette is
8. has been advised knew or should have known of the possibility of such damages The products described in this document are confidential and propriety of Persys or its licensors No part of this document may be reproduced in any form including by electronic retrieval systems without prior written permission of Persys Copyright 1993 by Persys Technology Ltd Persys All rights reserved TABLE OF CONTENTS 1 0 INTRODUCTION 1 1 Scope of the Manual 1 2 Description 1 2 1 Overview 1 2 2 Manual CV Tool 1 2 3 Semi automatic CV Tool 2 0 TECHNICAL DATA 2 1 CV Mask and Clips 2 2 Manual CV Tool 2 3 Semi automatic CV Tool 3 0 INSTALLATION AND OPERATION 3 1 Unpacking 3 1 1 CV Masks 3 1 2 Manual CV Tool 3 1 3 Semi automatic CV Tool 3 2 Installation 3 2 1 Manual CV Tool 3 2 2 Semi automatic CV Tool 3 3 Operation 3 3 1 Manual Tool Positioning Mask Removing Mask after Sputtering 3 3 2 Semi automatic Tool Positioning Mask Removing Mask after Sputtering N o e e e AA A W Q A A A OOO mn MA A N e e N O 4 0 CALIBRATION Semi automatic CV Tool 4 1 4 2 4 3 4 4 4 5 Preliminary Steps Cassette Base Adjustment Pushing Fork Alignment Pushing System Stoppers Adjustment 4 4 1 Pushing System Backward Motion 4 4 2 Pushing System Forward Motion Teflon Base Stoppers Adjustment 5 0 MAINTENANCE 5 1 Semi automatic CV Tool 6 0 SPARE PARTS AND ACCESSORIES 16
9. he other side with the second clips cassette 3 3 Operation ATTENTION Be sure to wear plastic cleanroom gloves when operating the CV Tool Always use a vacuum wand when handling wafers 3 3 1 Manual Tool Positioning Mask 1 Remove the cover lifting one side first by placing your thumb on the knob and lifting the cover with your fingers 2 Position the mask face down on the Teflon base in the groove and fit the large hole on the appropriate pin Manual Semi automatic CV Tool 6 3 Position the wafer on top of the mask Figure a shows a wafer other than 8 Figure b shows an 8 wafer the notch sits on the Teflon plate notch fixer 4 Click the cover into place one side at a time Manual Semi automatic CV Tool 7 5 Insert the four Stainless Steel clips to hold the mask on the wafer 6 Remove the cover by placing your thumb on the knob and lifting the cover one side at a time 7 The wafer is now ready for sputtering Removing Mask after Sputtering 1 Place the wafer mask set on the base plate with the sputtered side facing down Manual Semi automatic CV Tool 8 2 Click the cover into place one side at a time 3 Remove the clips 4 Remove the cover Manual Semi automatic CV Tool 9 5 Remove the wafer using a vacuum wand and discard the mask Manual Semi automatic CV Tool 10 3 3 2 Semi automatic Tool Posit
10. ight 4 210 265 155 54 240 305 165 6 230 310 155 8 270 370 160 Weight 3 5kg Manual Semi automatic CV Tool 3 0 3 1 3 1 1 3 1 2 3 2 3 2 1 3 2 2 Manual Semi automatic CV Tool INSTALLATION AND OPERATION Unpacking CV Masks CV Masks are placed in plastic boxes with 50 units in each box Each box of 50 units includes 200 clips which are attached to plastic strips for the manual CV Tool or in two cassettes for the semi automatic CV Tool Manual CV Tool Assembled cover on base Semi automatic CV Tool CV Tool assembly clips tray and Teflon grippers Installation The CV Tool Manual or Semi automatic arrives fully calibrated However if any drift in calibration has occurred you should calibrate the CV Tool as specified in section 4 0 Manual CV Tool No installation required Semi automatic CV Tool See Fig 4 1 pg 15 for reference 1 Place the unit on a work bench so it is easily accessible with both hands from both sides 2 Set the clips tray 1 and Teflon grippers 2 in place on both sides of the CV Tool 3 Position the clips cassette 3 Unpack cassettes and remove tape Place cassette on leading pin with cover and screws facing inward Insert the pressure pin 4 and push the cassette into place Release the plastic insert from the cassette and push the cassette fully into position 4 Release the pressure pin 5 Repeat the above steps on t
11. ioning Mask 1 Using the moving handle place the Teflon plate at the front or back of the CV tool as is convenient for you until it reaches the stopper and remains stationary 2 Place the mask face down on the Teflon plate in the groove and fit the large hole on the appropriate pin 3 Place the wafer face down so the major flat sits on the Teflon plate major flat For 8 wafers the notch sits on the Teflon plate notch fixer Manual Semi automatic CV Tool 11 4 If the Teflon plate is not already at the back of the unit press the moving handle at the front of the plate pushing it back until it is fixed in the work station 5 Press both cassette holders simultaneously at a reasonable speed so that all four clips will be attached to the wafer 6 Release the cassette holders Manual Semi automatic CV Tool 12 7 Using the moving handle bring the Teflon plate with the wafer to the front of the CV Tool until it reaches the stopper and remains fixed 8 Using a vacuum wand remove the wafer with the mask in place Removing Mask after Sputtering 1 Make sure the Teflon plate is at the front of the unit by pushing the front
12. quire m One Dummy Wafer m One CV Mask m The following tools One set of standard Inch Allen wrenches up to 3 16 One set of standard Metric Allen wrenches up to 3 Small flat head screwdriver 7 16 wrench Cassette Base Adjustment The following adjustment procedure achieves alignment of the clips cassette base to the Teflon base upper plate on both sides of the CV Tool so clips slide easily onto the mask and wafer Preparation m Remove the clips cassette 3 from the cassette base 5 7 Place the CV Mask and then the dummy wafer on the Teflon base 6 Adjustment 1 Loosen the two screws 7 passing through the cassette base 5 located at the lift screw button 8 side Z Using the lift screw button 8 lift or lower the cassette base until the pushing fork height 14 is adjusted to the Teflon base upper plate 3 Tighten the two screws 7 Pushing Fork Alignment Adjust the pushing fork so it is parallel to the Teflon base upper plate Preparation m Remove the clips cassette 3 from the cassette base 5 7 Place the CV Mask and then the dummy wafer on the Teflon base 6 Manual Semi automatic CV Tool 17 4 4 4 4 1 Alignment A full alignment is achieved by using adjusting screws 9 two screws 10 two screws and 11 four screws alternately on both sides of the pushing system 12 13 14 as follows 1 Release the two adjusting screws 9 located at the axles holder 15
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