気体質量流量計と コントローラー クリーン気体用 オプションの一体型
Contents
1. FMA A2000 WARRANTY lt 19 100 SLM OMEGA MO FMEii M RetConmd Max Pressung i a OMEGA ENGINEERING INC ri pmici GT 06007 suamor GT 0800 28 442 me FMA OZ EA RAD CE OMEGA wao CC Modets_ FMA AZ4L FMA A2417 he LM mem07P 7 29 2 Hz_ OMEGA DAIVE PLOL BOX 4047 Ce os DE ROT AT mrs IM mega om FLOW me em FMA A2000 FMA A2000 FMA A2300 2400 LCD 0 5 Vdc 4 20 mA FMA A20002. 0 10 SCCM 0 50 SLM 316 SS 1 25 kg 2 75 DPF50 PF60 PF300 PF5500 PF403 90 260 Vac 316 SS 4 NPT 2 57 276 lt 5 i 4 FMA A22 FMA A24 SS 209psj7g 0 5 NIST
3. FKM O 316 SS FKM O 89 3 50 4FNPT 97 3 80 IS 6 0 25 2080 a 6 0 25 4 9 D 25 1 00 0 5 Vdc 0 19 0 75 1 50 8 0 10 x 0 25 2 0 5 Vdc uid mm 1000Q 4 20 mA 500Q 5 9 316 SS 842 FMA A21 0 10 SCCM 4 6 FMA A22 SS 24 Vdc 150 mA 0 10 SCCM 0 50 SLM 316 SS 115 Vac 220 Vac AC FMA A23 0 10 SCCM 24 Vdc 300 mA 0 100 SLM 115 Vac 220 Vac AC FMA A24 SS
4. M S75 10 NIST M S770 FMA A2376 20 psig 0 45 SLIMAP 2 pg FMA A2102 SS 27 225 7 D 20
5. 0 100 SLM 24 D 20 FMA A2000 OMEGA 0 5 Vdc 1 FS 0 15 FS 100 1 5 0 50 C 32 122 F 0 05 FS 1 C 0 01 FS psi _ A74 427002300 1inH O 1 SLM 1 psi 20 SLM 20 psi lt 5 LPM 5 50 psi gt 5 LPM 20 40 psi 250 psig 316 SS 500 psig 1 x10 cc min He 3 SCCM SLM
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