イオンポンプ・ノーブルポンプ
Contents
1. 30L B B B A A B2. A HHHHHHHHHHHH 27 CQIHHOHTH 215 8550 2 5 1
3. 11 S 956 7130 12 956 7015 lt Oil free
4. 5 x 10 Pa 5 x 10 Pa 209 1 105 1 52 1 19mA 12mA ii OVER LOAD OVER LOAD 95 OVER LOAD 30 HV 0 FAILURE HV ON ON LOCK J ON LOCK 2 1 A 20mA 1 A 76 1 29 5 1 5 1 3mA
5. HHHHHHHHHHHH 915 9520 915 9510 1 140L Ss 110L s 2 1 9 3 Xx 10 Pa 16 x10 Pa 1x10 1x10 i A 28 M e1 2 18 28 3 M e 44 HHHHHHHHHHH
6. 3 AC200V AC100V 4kg 114ICF 2 3A 2 3A 1 2 5m 1 2 5m HH REMOTE 1 36 16 1 36 16 HHHHHHHHHHHH 216 1 5 214 194 114 ICF LL 154 1 5 4 M6 36 1 7 C 30L S 912 7135 30L s 912 7130 HHHHHHHHHHHH 60L S 912 7165 912 7160 Nz 10 10 Pa 1 10 Pa 1 3Pa 6 7Pa 6 2L
7. 564 0044 1 4 33 TEL 044 980 5155 TEL 044 980 5132 TEL 044 980 5131 TEL 044 980 3503 TEL 06 6821 9701 TEL 06 6821 9708 862 0924 3 3 10 MJ TEL 096 385 3111 FAX 044 986 4236 FAX 044 986 4236 FAX 044 986 4236 FAX 044 986 4236 FAX 06 6821 9702 FAX 06 6821 9702 FAX 096 385 3061 2011 9 2011 9 Vacuum Components V
8. 20L s E PIC 052IP B 912 7125 20L S 912 7135 30L S 2x10 Pa 912 7165 60L S 1x 10 Pa 912 7010 140L S 6 x 10 Pa 912 7030 270L S 912 7031 270L S 3x 10 Pa 912 7050 500L S 1 5 x 10 Pa 912 9100 1000L S 912 7195 1000L S 1x 10 Pa PIC 052NP B 912 7120 20L S 912 7130 30L S 2x10 Pa 912 7160 60L S 1x 10 Pa 912 7020 110L S 6 x 10 Pa 912 7040 220L S 912 7041 220L S 3x 10 Pa 912 7060 400L S 2 x
9. 13Pa 6 7Pa HHHHHHHHHHHH 8 200 270 200 270 1 200 270 21 SD 1 100 100 100 100 100 100 100 100 100 9 10 YPa 100 100 100 lt Fs kKSE o 90 160 90 160 10 5 5 57 20L s
10. 10 30 30 30cm 100 10 10 1 IFHHHBHHHF 21 21 10 Pa 6 EE HHHHHHHHHHHH 20L S
11. AC200V AC100V 4kg 152ICF 2 3A 2 3A 1 2 5m 1 2 5m REMOTE 1 36 16 1 36 16 HHHHHHHHHHHH 10 356 1 5 WW tp oo Lies oo J 126 110 4 M6 108 1 7 e 60L S 912 7165 60L s 912 7160 HHHHHHHHHHHH 110L s 140L s 912 7020 912 7010 Nz 110L S 140L S 1 10 Pa 10 10 Pa 6 7Pa 1 3Pa 18L 250C 203ICF 9
12. PIC 052B T
13. REMOTE LOCAL ea HV REMOTE HV ON OFF 0 ONVOFF DC12 24V 6 12mA M HV REMOTE LOCAL HV ON 272 1 5 3 3 2 INHIBT DC12 24V 6 12mA 0 10VDC LOG 2A HV ON OFF MAX100mA DC24V REMOTELOCAL OVERLOAD REMOTE LOCAL FAILURE HHHHHHHHHHHH PIC 052
14. 1 3Pa 6 7Pa A 250C 114ICF 954 7281 912 7121 1 1 PIC 050A IP 12 5kg PIC 050A NP 5 Xx 10 Pa 5x10 Pa AC100V 10 1 50 60Hz AC100V 10 1 50 60Hz 50 60Hz 2 5A 2 5A DC 5 2kV DC 5 2kV 35mA 35mA 0 40C 90 10KV LINEAR 10kV LINEAR 100mA LOG 100mA LOG 19109 gt 10 a 1 3x10 10 Pa 2 5m 2 5m 3m 954 7403 4kg 2
15. 220L s 270L s 400L s 500L s 954 7409 800L s 1000L s 954 7407 954 7403 7405 7407 7409 HHHHHHHHHHHH 26 60L s 30L s
16. OFF ON 10 Pa 4 W 4 600 500 400 300 200 100 5 ww 0 10 9 10 5 10 4 1 1 I 10 3 10 lt 10 Pa 5 60L s 6 10 Pa 10 Pal 7
17. 2 5m 3m 954 7403 4kg 2 203ICF 1 2 3A 1 2 5m 1 3m REMOTE 1 36 16 1 HHHHHHHHHHHH 15 400L S 500L Ss 912 7060 912 7050 Nz 400L s 500L s 1 10 9pPa 10 10 9pPa 6 7Pa 1 3Pa 38L 250C 203ICF 954 7281 915 9520 4 915 9510 4 912 7002 2 120kg 1 PIC 050A NP PIC 075A IP
18. 4x10 Pa 2x 10 Pa eg AC100V 10 AC100V 10 1 50 60Hz 1 50 60Hz 50 60Hz 4 202A DC 5 2kV DC 7 5kV 35mA 20mA 0 40C 90 10KV 10kV 0 LINEAR LINEAR 100mA 100mA NN LOG LOG 4X10 10 Pa 2x10 10 Pa 2 5m 2 5m 3m 954 7403 4kg 4kg 2 6 203ICF 1 2 3A 1 2 5m 1 3m REMOTE 1 36 16 1 HHHHHHHHHHHH 203 ICF 25 4 30
19. 1x102 1X10 8 1x10 3 00 1x103 B 1X104 1x10 5 1x10 5 0 20cm 40cm 60cm 20L S 20L S 1x102 A 1X102 4 1x1033 amp 1x10 4 WM 1x10 4 1x10 1x10 5 1x10 5 0 20cm 40cm 60cm 0 110L S 140L s 1x10 2 BB 1x103 1x10 4 1x10 5 0 20cm 40cm 60cm 800L s 1000L s 24 HHHHHHHHHHHH B 20cm 40cm 60cm 60L Ss 60L S B 20cm 40cm 60cm 400L s 500L S 3m B 20 60L s 954 7405 20 60L S 110L s 140L S
20. B A B M32 A B M32 M32 915 70 3 M3 8 a 8 110L S 140L S 220L S 270L S 400Ls 500L s 800L S 1000L s 915 7019 M32 2 1L S 8L s 20L s 60L S HHHHHHHHHHHH 1 Ti 11 67Pa 1 1 x 10 Pa
21. 203ICF 1 2 3A 1 2 5m 1 3m REMOTE 1 36 16 1 HHHHHHHHHHHH 11 210 3 203 ICF 101 5 7 g 110L s 912 7020 140L S 912 7010 HHHHHHHHHHHH 220L s 912 7040 912 7041 Nz 220L S 5Xx105 105 Pa 3 4Pa 250 C 203ICF 954 7281 915 9510 2 912 7002 1 912 7001 2 85kg 1 PIC 050A NP 90kg 2 6 x 10 Pa
22. 8 80 N2 60 L s 80 2 2 60 L s 60 360 3 a i 40 30 L s 40 30 L s 1 20 L s 20 20 L s 20 0 0 10 10 10 4 10 3 10 10 6 10 5 10 4 10 3 10 2 Pa Pa 20L s 30L s 60L s 20L S 30L S 60L s 300 625 N2 L 0 500 L s 3200 375 400 Ls MR R 25o 100 EN 125 0 0 10 6 10 5 10 4 10 3 10 2 10 6 10 5 10 4 10 3 10 2 Pa Pa 110L s 140L s 400L s 500L s 220L s 270L S 1 250 mp 1000 L s 1 000 750 800 L s MR 500 250 0 10 6 10 5 10 4 10 3 10 2 Pa 800L S
23. 0 40C 90 mE 10kV LINEAR 10kV LINEAR 100mA LOG 100mA LOG 2x10 10 Pa 11x10 10 Pa 2 5m 2 5m 3m 954 7403 2 4kg 4kg 3 326CS 3 356ICF 1 3 326CS 3 356ICF 2 3A 1 2 5m 1 3m REMOTE 1 36 16 HHHHHHHHHHHH 1 356 ICF 326 CS 287 5 ICF 4 1 266 5 CS
24. 912 7125 912 7120 Nz 10 10 Pa 1 10 Pa 1 3Pa 6 7Pa 1 4L 250C 7OICF 912 7121 1 10 5kg 1 PIC 050A IP PIC 050A NP 5x10 Pa 5x 10 Pa AC100V 10 1 50 60Hz AC100V 10 1 50 60Hz 50 60Hz 2 5A 2 5A DC 5 2kVA DC 5 2kVA 35mA 35mA 0 40C 90 10kV LINEAR 10kV LINEAR 100mA LOG 100mA LOG 13x 10 10 Pa 13x10 10 Pa 2 5m 2 5m
25. 470 5 7 0 400L s 912 7060 500L s 912 7050 HHHHHHHHHHHH 17 18 800L S 1000L s 912 9110 912 7190 912 9100 912 7195 Nz 800L S 1000L S 10 2 10 Pa 10 10 Pa 1 3 x 10 Pa 1 3 x 10 2Pa 106L 250C 326CS 356ICF 356ICF 326CS 954 7281 912 9520 8 915 9510 8 912 7003 2 1 PIC 050A NP 257kg PIC 075A IP 2 2x 10 Pa 1 1 x 10 Pa AC100V 10 1 50 60Hz AC100V 10 1 50 60Hz 50 60Hz 2 5A 2 5A DC 5 2kV DC 7 5kV 35mA 20mA
26. 912 7130 30L S 912 7160 60L s 17 x 10 Pa PIC 075A IP 912 7010 140L s 8 x 10 Pa PIC 050A NP 912 7020 110L s 1 3 x 10 3Pa 912 7030 270L S PIC 075A IP 4 x 10 Pa 912 7031 270L S 2J 912 7040 220L s PIC 050A NP 3 6 x 10 Pa cs 912 7041 220L s PIC 075A IP _ 912 7050 500L s 2x 10 Pa PIC 050A NP 912 7060 400L S 4 x 10 Pa 912 9100 1000L s PIC 075A IP 11x 10 Pa cu 912 7195 1000L s A 912 9110 800L S PIC 050A NP 5 2x 10 Pa MM EE EZ2P EY
27. 3m 954 7403 4kg 2 3 AC200V AC100V 4kg 7OICF 2 3A 2 3A 1 2 5m 1 2 5m REMOTE 1 36 16 1 36 16 HHHHHHHHHHHH 216 1 5 70 1ICF 154 1 5 4 M6 36 1 7 a 20L s 912 7125 20L s 912 7120 HHHHHHHHHHHH 30L S 912 7135 912 7130 Nz 10 10 Pa 1 10 Pa
28. 597 5 610 5 ICF 538 5 CS 7 kK 800L s 912 9110 800L s 912 7190 1000L s 912 9100 1000L S 912 7195 HHHHHHHHHHHH 19 10 10 Pa 912 7125 20L s PIC 050A IP 912 7135 30L Ss 912 7165 60L S 17 x 10 Pa 912 7120 20L S PIC 050A NP
29. 1000L S 22 HHHHHHHHHHHH 9 10 2 10 3 20L s 30L s QG 4 R10 60L s 10 5 10 6 10A 100uA 1mA 10mA 100mA 20L s 30L S 60L S 10 2 220L s 10 3 Q 110L s 400L s 1 800L s 10 5 10 6 100A 1mA 10mA 100mA 1A 110L s 220L Ss 400L Ss 800L S 10 2 10 3 QG 4 p10 10 5 10 6 10A 100uA 1mA 10mA 100mA 20L S 30L S 60L s 10 2 A 10 3 270L s 500L s a 140L s 10 5 1000L s 10 10A 100uA 1mA 10mA 100mA 1A 140L s 270L s 500L s 1000L S HHHHHHHHHHHH 23 10
30. 956 7015 NEG 12 S PIC 220IP PIC 220NP PIC 800BIP PIC 800BNP PIC 1x10 Pa 30000 40 000
31. AC100V 10 1 50 60Hz 50 60Hz 2 5A DC 5 2kV 35mA 0 40C 90 a WE 10kV LINEAR 100mA LOG 6x10 10 Pa 2 5m 3m 954 7403 4kg 2 203ICF 1 2 3A 1 2 5m 1 3m 0 REMOTE 1 36 16 1 HHHHHHHHHHHH 13 14 Tm 7 h 220L
32. 10 Pa 912 9110 800L S 912 7190 800L S 1x 10 Pa 912 7100 125L S HV ON OFF HV INHIBT REMOTE HV ON OFF REMOTE LOCAL HV ON DC12 24V 6 12mA 0 10V DC LOG 1000 2 HV ON OFF REMOTE LOCAL OVER LOAD FAILURE MAX 100mA DC24V REMOTE LOCAL SS REMOTE LOCAL HV ON LOCK HHHHHHHHHHHH 1x 10 Pa 197 15 203 15 765 1 5 403 1 5 175 155 21
33. 250C 152ICF 954 7281 915 7027 1 915 9527 1 912 7121 2 1 PIC 050A IP 25 6kg PIC 050A NP 2 1 7 x 10 Pa 1 7 x 10 Pa AC100V 10 1 50 60Hz AC100V 10 1 50 60Hz 50 60Hz 2 5A 2 5A DC 5 2kVA DC 5 2kVA 35mA 35mA 0 40C 90 10kV LINEAR 10kV LINEAR 100mA LOG 100mA LOG 13x10 gt 10 Pa 13x10 10 Pa 2 5m 2 5m 3m 954 7403 2 3 4kg
34. 54 7281 915 9520 1 915 9510 1 912 7001 1 48kg 1 PIC 050A NP PIC 075A IP 2 1 3 x 10 Pa 8 x 10 Pa AC100V 10 1 50 60Hz AC100V 10 1 50 60Hz 50 60Hz 2 5A 2 5A DC 5 2kV DC 7 5kV 35mA 20mA 0 40C 90 10kV LINEAR 10kV LINEAR 100mA LOG 100mA LOG 13x10 10 Pa 8x10 10 Pa 2 5m 2 5m 3m 954 7403 4kg 2 4kg
35. H 2 10 Pa 10 Pa 10 Pa NEG 10 Pa A x10 pa 20 18 16 L14 12 10 F8 Le L4 3 3 10 10 Pa OFF pe 4 100sec 150sec 10 Pa ON OFF
36. ol 8 9 2011 9 http www canon anelva co jp
37. s 270L s 164 5 96 2 a 912 7040 912 7030 1 30 3 1 40 8 30 3_ HHHHHHHHHHHH 7 220L s 270L S 912 7041 912 7031 270L s 912 7030 912 7031 Ns gt 270L S 5x10 10 Pa 6 5 x 10 Pa 250 C 203ICF 954 7281 915 9510 2 912 7002 1 912 7001 2 85kg 90kg 1 PIC 075A IP 2 4x10 Pa AC100V 10 1 50 60Hz 50 60Hz 2 5A DC 75kV 20mA 0 40C 90 10kV 2 LINEAR et 100mA LOG 0 ON Pa
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