取扱説明書
Contents
1.2. Q
3. OFF 3 DC24V 10 GND 0 30 L min 0 49MPa 72 5 25L min 0 60 C O 0 40C BsBM Ni Re3 8 PT DC24V 10 3 MAX300mA AWM2448
4. 2 A 1
5. 0 10096 109 1009 0 30 L min 12 3 SW1 VR2 SW2 3 VR3 SW4 VR4 3 1 CONT SW2 CONT ON OFF
6. ws 3 1 3 3 2 3 LCD LED 4 FCV 5
7. 2 FCV 4x2 M4 6 Rc38 PT 0 P16 6
8. 0 10V REF 5V VR2 3 6 VR1 5 wk FCV 1 13 REF CONT gt LT FLOW H H OM orn nT MODE 8 CONT CNT OK CHECK 1 MODE NN GAIN DELAY SHUT FS AR CPU
9. 1 1 1 1 P8 9 POWER 2 7 POWER 1 1 2 ON QNO 3 CNT 1 3 CHECK 1 4 CNT CNT
10. FCV OFE COM CV 5 a a FCV MAX DC30V 2A a b FCV NtAx DC30Y 2A b INT EXT MODE P11 8 mm k 160 gt i M4 6 gl HS y YY y M4 6 4 9 M4x8 6 Rc3 8 PT
11. 010V 1 5V 4 20mA EE Uf 1 1 i 7 0 P 1 6 4 AWM2448 9 0 2mm 500mm 24 28 10mmMAX DC24V 10 GND a b o 10V 1 5YV 4 20mA 0o 10V 4 20mA GND FLOW REF CONT SHUT
12. FE f 6 3mm 35mm f 2 Re 6 3mm 6 L 1f 0 M4X8 4 10 2 35mm Rc3 8 PT3 8 P16 JOINT 1 4 lesen
13. ECV 2 3 4 4 emm er mm 5 6 7 1 N 8 9 10 mm 11 13 14 mm 15 15 WT FR SR EE 16 17 SUM a
14. 1 OFF 3m 6 6 M4 6 M4X8 4 3 FCV 2 4 FCV 0 5 0 0 0
15. CNT OK ON 3 2 CW COW SW1 4 CCW SW1 CCW SW4 3 3 MODE SW3 INT SET ON OFF EXT EE ON OFF ES TNI 3 4 DELAY GAIN VR3 4 DELAY VR4 0 3 sec GAIN VR3 0 07 0 2L sec 30 L min ss 3 5 REF VR2 MODE EXT
16. a ren Na 10 LED MAX DC30V 2A a AIK 103 FCV LED b MAX DC30V 2A 1 a AIK 103 5 VDD 30V I lt 2A 1SS245 6 20 0 10V mA 10 4 0 10 30 L min L min
17. MAX30V V OFF 4 1 5 ON 1 0 7 ei DC24V POW sy 10 ECV FCV MAX300mA a a 1 POW 9 FCV 0 10V 1 5V 4 20mA TLOW ec FCV gt 8kQ P5 300Q FCV EXT 8 FCV REE NT FCV TTL ON CONT EXT OFF OFE ee FCV I NT SHUT TTL ON
18. 0K 3 1 S i il 11 2 LED 2 1 LED FCV 4 a 2 3
19. 9 0 30 L min 5 25 L min FS 3 5 sec 0 2 sec 1 sec 3 3 ed i LED 1 ON OFF INT EXT FLOW a a REF b b CONT COM SHUT POW GND 1 2 SUS304 316 3 FS 30 min 39 0 9 min 15 FCV
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