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1. aaneen eneen S T GENERAL arenden 20 APPENDIX 3 2 Control Mode ee 20 APPENDIX ll been A CUO 20 Sevenstar MFC MFM User s Manual SECTION 1 NTRODUCTION 1 1 Declaration The copy right of The user 5 manual of mass flow controller and mass flow meter 18 subjected to Beijing Sevenstar Electronics Co Ltd following abbr Sevenstar which 1s not allowed to duplicate store and distribute any part of this manual in mean of electric mechanical photocopy recording or other way without permission of Sevenstar This manual is not assured that there is no mistake and missing in which have been corrected strictly and the publisher is under no obligation to the mistake or missing meanwhile the publisher is not in charge of any loss that this manual leads to 1 of 32 Sevenstar Beijing Sevenstar Electronics Co Ltd 1 2 Attention Dear customer thanks for using CS mass flow controller and mass flow meter This manual describes in detail important issues about correct and safe operations of the product User of the product should read and comprehend this manual and pay attention to the text with labels and notices Sevenstar assumes no liability for the customer s failure to comply with this manual This manual is necessary for your installation and maintenance please keep it carefully 1 3 The notice of safety
2. Compression Fitting 10mm SS Compression Fitting 12mm CC Compression Fitting 1 4 Flow N2 S60SLM HH Compression Fitting 3 8 PP Compression Fitting 1 2 EE VCR 1 2 XX customized fittings please consult d for details 5 Seal Materials V Viton N Mounting Position H Horizontal E HESD Horizontal Edge Side Down U Vertical Inlet Up 1 D Vertical Inlet Down d Description Default Value The letters on cover and tag In English Differential Pressure 29 of 32 Sevenstar CS230 LIXXXC 50 SLM ExFlow N2 150 SLM 0 15 0 35 MPa 21 8 50 8 psid 150 SLM lt Flow N2 lt 250SLM 0 20 0 35 MPa 29 0 50 8 psid 250 SLM lt Flow N2 lt 300SLM 0 25 0 40 MPa 36 3 58 0 psid CS230 LIXXXN 50 100SLM 0 02MPa 2 9 psid gt 100SLM lt 0 05MPa 7 3 psid S Customized Requirement For Example The letters on cover and tag in Chinese Customer Special Full Scale 29SLM The proportion of mixture gases should be indicated N2 60 CO2 40 Customer Differential Pressure 0 3 0 5 MPa Customer Calibration Temperature 40 C and other customized requirements Take CS230A013C050LDGGVHS as the example CS230 013 050 D GG V H S Model CS230 Type Elastomer type Gas No Type of Valve Normally closed Full range 50SLM Electronic connector DB15 Fittings Compression Fitting Seal material Viton Moun
3. QCX 41 QCX 43 QCX 34 QCX 18 QCX P18 QCX 47 Table 2 5 Table of Selecting Type of Cable R3232 R3483 pc Serial Port Converter CS Serial of DB 15 Pins Figure 2 14 CS Product and Illustration of Connecting Power D08 1D 1F 17 of 32 Sevenstar Power 215 CS Product of 0819 Pins Figure 2 15 CS Product and Illustration of Connecting Power Power 24 Air Supply Computer gt CS Product of 15 Pins Figure 2 16 CS Product and Illustration of Connecting Power 18 of 32 Line 17 46 nn n Cb LEGO Re EE qo Ee Gi Line 19 48 24V d To Switch Line 43 Power of EGAD 15 Line 41 15Y EGND R3232 R3485 Converter Line 34 Line 50 Line 53 CS Product of DB 15 Pins CS Product ot DE 9 Pins Line 53 Line 53 Line 18 47 LA Line 20 49 T To Switch Line 47 215 Power of 15y User Power Source CS Product Figure 2 17 Illustration of Connecting CS Product Sevenstar manufactures all standard cables RS485 adaptor customized cables and some accessories For more details contact Sevenstar or its local agent 2 5 Checking Before Operation 19 of 32 Sevenstar Before operating the MFC the following checks should be completed 2 5 Check that tubing 1s leak free 2 5 2 Check the process sequence and proper function of all other gas componen
4. VCRI2 M Compression Fitting1 4 Compression Fitting3 8 Compression Fitting1 2 Table 2 3 The length of the product with different fittings 11 of 32 Figure 2 5 Product dimensions Compression Fitting 6 Compression Fitting 8 Fitting Compression Fitting 10 Compression Fitting 12 VCRI2 M Compression Fitting1 4 Compression Fitting3 8 Compression Fitting1 2 Table 2 4 The length of the product with different fittings 12 of 32 Sevenstar 2 3 2 Installation Place MFC according to the flow direction 2 3 2 1 1 2VCR Connection Refer to figure 2 6 and figure 2 7 Check the gland to gland space including the gaskets Remove the plastic gland protector caps When using loose VCR original style gaskets inserting the gasket into the female nut For VCR retainer gaskets snap the gasket onto the male coupling Tighten the nuts finger tight Scribe both nut and body in order to mark the position of the nut While holding the body with a wrench tighten the nut 1 8 turn past finger tight for 316L stainless steel and nickel gaskets Figure 2 7 VCR retainer gasket 2 3 2 2Two ferrule Compression Fitting Connection Refer to figure 2 8 Check the gland to gland space Remove the gland protector caps Insert the tubing to the shoulder inside the fitting and check that the ferrules are positioned as shown in figure2 8 Tighten the nuts finger tight Use two spanners one spanner locking the fitti
5. guaranteed against defects in materials and workmanship if used in accordance with specifications and not subject to physical damage contamination alteration or retrofit Warranty periods One year 6 2 2 Buyers undertake to check and inspect the goods and to notify Sevenstar of shipment incidents by fax phone or e mail as soon as possible after accepting the goods 6 2 3 During the warranty period products must only be repaired by authorized Sevenstar service centers otherwise the Sevenstar product warranty will be invalidated 6 2 4 Repairs will be free of charge during the one year warranty period If 15 out of warranty Sevenstar will notify the owner of replacement or repair costs before proceeding Factory service and repairs are guaranteed 90 days The warranty excludes consumable materials and wear parts in teflon viton etc 6 2 5 No MFC will be accepted for repair or warranty without a decontamination and purge certificate 6 2 6 Each 1 individually checked visual inspection of fittings helium leak test and flow calibration Sevenstar shall not be responsible for any damage caused by gas leakage or the use of a dangerous gas Users are responsible for following the safety rules applicable to each gas they use Improper use of a Sevenstar MFC will void the warranty and MFC that have been damaged as a result of 1mproper use will not be replaced by Sevenstar 6 2 7 Specific warranty requirements are as follows a Gas
6. or 14 28 VDC 400mA Electronic Connector 9 pin male sub D 15 pin male sub D DeviceNet male Compression Fitting 6 Compression Fittingl 4 available to Flow N lt 60SLM Fittings Compression Fittingp8mm available to lt 200SLM Compression Fitting pl0Omm Compression Fitting 3 8 Compression Fitting 1 27 1 2 Weight 2 6kg 1 5kg NotesA MFC MFM is calibrated by N as a standard gas Units SCCM Standard Cubic Centimeter Min SLM Standard Liter Min Standard Situation Tem 273 15K 0 C Air Pressure 101325 Pa 760mm Hg F S Full Scale 5 of 32 Sevenstar 1 6 Calibration Features Normally the MFC are calibrated close to customer s requirement the requirement should be accorded with the specification Without customer s information the MFC are calibrated under standard conditions 1 6 1 Standard conditions Without special conditions specified by the customer the MFC 1s calibrated under the following standard conditions Pressure Outlet Atmospheric Normally gas mass flow rate 15 transferred to gas volume flow rate at standard state Mass flow rate unit SCCM standard cubic centimeter per minute SLM standard liter per minute Standard state Temperature 273 15K Pressure 101325Pa 760 At standard state the gas density will be constant The multiplication of density and volume flow rate 18 equal to the mass flow rate Therefore at the st
7. Please pay attention to the below notices when reading this manual We are not responsible for any result without abiding by the below notices a Do not replace any components or disassemble instrument Do not replace any components or disassemble the instrument without any authorized and make sure that the label or and seal of product 1 not removed when returning for reworking recalibration and maintenance b Please contact professional for technical service Do not replace any components Any technical support is provided by professional who must be authorized by Sevenstar c Please pay more attention to use dangerous gas Instrument should be purged completely and keep safety if dangerous gas is used Meanwhile make sure that moist gas must not react with material of seal and instrument d Please pay attention to purging instrument The whole system should be purged by dry gas after and before the instrument 15 installed e Please abide by proper steps of purging Product should be purged and handled with gloves f Do not use the instrument in explosive environment 2 of 32 Sevenstar Do not use the instrument in explosive environment unless the safety certificate 1s available Please use proper fittings and keep the rules All fittings of instrument must be matched according to the listing in manual Please read manual carefully before screwing tightly h Please do leakage check Please check carefully all of vacuum pa
8. Sevenstar CS230A User s Manual Contents SECTION 1 INTRODUCTION 3 4 Soft Start annen 1 1 Declaration neee nennen 1 DE 1 2 ALLEMON stronken 2 3 6 Valve Command Mode 1 3 The notice of safety 2 3 7 Valve c eine 1 4 General eenen 3 3 8 Multi Gas and Multi Flow 1 5 Specification ennen 5 3 9 Total Flow Accumulator 1 6 Calibration features 6 SECTION 2 INSTALLATION ns 2 1 General eee nnns 7 SECTION 4 MAINTENANCE 2 2 Unpackilig iore rettet tr rr trea 7 4 1 General 2 3 Mechanical Installation 7 42 2 23 101 15 PRESE 7 SECTION 5 TROUBLESHOOTING 2 9 5 AMSA o rro Ehe 13 5 1 Initial check eene 2321 1 2 VCR Connection 13 5 2 Troubleshooting nnn 2 3 2 2 Two ferrule Compression Fitting 13 SECTION 6 WARRANTY AND SERVICES COMME C BON 2 4 Electrical Installation 14 6 1 Guarantee of Sevenstar 2 5 Checking Before Operation 19 6 2 Product Warranty 6 3 Services SECTION3 FUNCTIONS 6 4 Disclaimer
9. Sub D connector 15 pin male sub D connector RS485 connector DeviceNet connector and RS232 RS485 connector are shown in figure2 9 figure2 10 figure 2 11 figure 2 12 and figure2 13 AttentionA The 0 5V Setpoint Input the 4 20mA Setpoint Input and the valve Over ride are not available for CS230A MFM That means pint and pin6 of D sub 9 in figure2 9 and pint pin7 pin8 and pin12 of D sub 15 in figure2 10 are not available Valve Over ride O Flow Signal Output 5V Setpoint Input SP Flow Out Ret SP Flow Out Ret 150 24V option P 5 GND N C 15V 20 Setpoint Ret P S GND 0 Flow Signal Output 5V Flow Out Ret C N C 4 20mnA Flow Signal Output Valve 15V 24V option P S GND 15 with 15V only 4 20mA Setpoint Input EGND 0 5 Setpoint Input Figure 2 10 15 pin male D sub connector 15 of 32 Sevenstar 2 1 Drain 1 Signal Common ZV 3 B 3 V B 5 4 CanH 4 5 CanL 3 4 Figure 2 11 RS485 connector Figure 2 12 DeviceNet connector Figure 2 13 RS232 RS485 connector 16 of 32 Sevenstar 2 4 3 Table of Selecting Type of Cable and its Illustration of Connection MFC DB15 Pin MFC DB9 pin 08 2B 3B AB 2E 3E 4E QCX 19 19 QCX 48 QCX 20 QCX P20 QCX 49 08 1 2 4 2F 3F 4F Input Input Vene Cor D08 1F 1FM 1FS 8C 8CM IG IGM 15 24V PC Computer QCX 17 QCX P17 QCX 46
10. ales sevenstar com cn Shanghai Office Room 1916 Unicom International Tower NO 547 Tianmu West Road Zhabei District Shanghai 200070 China Tel 86 21 33030324 Fax 86 21 63533265 Shenzhen Office Room 712 Section B Qiche Tower No 45 Zhenhua Road Futian District Shenzhen China Zip code 518031 Tel 86 755 88290258 Fax 86 755 88294770 Description may be changed following improvements to product The information contained in this document is subject to change without notice If there is any mistake in this uses manual please feel free to contact us 2011 Beijing Sevenstar Electronics Co Ltd All rights reserved
11. andard state the volume flow rate can represent mass flow rate The standard mounting position is horizontal And other positions such as vertical inlet up or down flatwise or customized position are optional The mounting position should be specified by the customer to ensure the best accuracy 1 6 2 Manufacturing Environment are assembled in a class 100 clean room calibrated packaged and controlled in class 1000 environment The temperature is 220 2 1 6 3 Precision Adjustment Each is accurately controlled for 24 hours after manufacturing on a different 6 of 32 Sevenstar calibration bench The accuracy the dynamic response the stability to pressure variations 15 double checked only qualified product available for sale SECTION2 INSTALLATION 2 1 General WARNING Toxic corrosive or explosive gases must be handled with extreme care After installing the the system should be thoroughly checked to ensure it 15 leak free Purge the MFC with a dry inert gas for one hour before using corrosive gases IMPORTANT When installing the MFC ensure that the arrow on the back of the unit in the same direction as the gas flow 2 2 Unpacking The CS230A are assembled calibrated and clean packaged under clean room conditions These series products are packaged with two separately sealed plastic bags The outside is common plastic bag the inside 1s clean bag The outside bag should be remo
12. e Provisions will be made for masking disabling the alarms or warnings on an individual basis Warning and Alarms Sensor Zero Output Out of Bounds EEPROM Failure Valve Coil Failure or Valve Disconnected 22 of 32 Sevenstar Temperature Out of Operating Range After power up the LED on the top of the CS230A is turned GREEN warning condition will be announced by a blinking RED and whenever an alarm condition is detected it will be set continuously to RED Please refer to Digital MFC Communication User Manual for more details 3 11 LED There is a green red LED located on the top of the MFC The constant green LED indicates the power on Green blinking indicates that the 1s zeroing blinking red LED indicates warning condition Constant red indicates error condition AttentionA When Valve controller of MFC is posited on position of PURGE it can be functioned as a MFM In that case the maximum flow testing voltage could reach beyond 10V please be careful while flow is beyond F S 5V Full Scale the real flow will have no linearity corresponding with flow testing voltage While it s purging flow display will be inaccurate even showing reduce while the real flow is enhanced please be sure it ll be no damaged to device itself SECTION 4 MAINTENANCE 4 1 General No routine maintenance is required to be performed on the MFM or MFC Other than occasional cleaning and re calibration I
13. elopment gas system design training etc Please visit mfc sevenstar com cn for more information and find your nearest service and calibration centre 27 of 32 Sevenstar 6 4 Disclaimer Beijing Sevenstar Electronics Co Ltd is not responsible for loss as following situation Nature disaster and calamity Unsuitable operation and unreasonable usage Operating and storing in inappropriate or execrable circumstance Usage of instrument beyond user s manual Unauthorized change or replacement of product For example It is whether that gas path is not cleared before using corrodible gas is contaminated or blocked by particle such as dust Me 28 of 32 Sevenstar Appendix CS230 Selection Guide CS230 t 9 9 9 rrr a ff s m d t Tvpe A Elastomer type 0 9 9 Gas Standard SEMI52 0302 For example 013 Ne 007 H2 000 Mixture Gases please consult d for details Iv Type of Valve C Normally closed unavailable to MFM No Valve available to MFM only r r r r Full Scale 050L 50SLM 1004 100SLM 1504 150 2004 200SLM 2504 250SLM 3004 300SLM 000 customized Full scale please consult d for details a Electronic connector R DB 9 pin D DB15 pin X DeviceNet Fittings GG Compression Fitting 6mm Flow N 60SLM DD Compression Fitting 8mm Flow N2 s200SLM JJ
14. facing are required The 5230 incorporate a dual interface voltage and current as well as RS 485 digital interfaces It is possible to operate the instrument completely digitally or it can be operated in analog mode with digital monitoring CS230A series have wide range of power supply available for 8 16 VDC or 14 28 VDC In addition autoAlarm change of operating gas and range available through the digital interface Customer Secondary Development of control and sample software 1 available through the open protocol CS230A default setting MAC address 32 RS485 baud rate 19200 Control mold 0 5 analog signal control 4 of 32 Sevenstar 1 5 Specification CS230A Full scale range Ne 50 100 150 200 250 300 SLM 1 0 S P 35 F S 0 35 F S lt 35 F S 0 5 F S 0 2 F S lt 2sec Normally Closed or Normally Open 0 15 0 35MPa 50SLMsFlow N2 lt 150SLM 50 100SLM Differential Pressure 0 20 0 35MPa 150SLMsFlow N2 s250SLM 0 02MPa 0 25 0 40MPa 250SLM lt Flow N2 s300SLM 100SLM 0 05MPa Temperature 0 02 C Coefficient Zero lt 0 02 5 3MPa 435pisg lt 0 6 F S per year without autozero 1x10 atm cc sec He Viton Neoprene 5 45 C Digital RS485 DeviceNet poe Analog 0 5 VDC 4 20 mA Digital RS485 or DeviceNet Analog 0 5 VDC 4 20 mA gt Power Supply 8 16 VDC
15. heck that the output signal matches the external reading 5 2 Troubleshooting Use the following table to locate the fault ____ SYMPTOMS ut reading Check closure of series shutoff valve without gas flow 15 present not zero Zero 24 of 32 Sevenstar __ Contact Sevenstar Gas connection incorrect Check gas connection Pressure incorrect Check pressure condition Wrong control mode Change the control mode by the software will not control will not communicate with PC AttentionA Mark indicates that reparation and adjustment must be dealt under specialist advices For any other problems contact Sevenstar SECTION 6 WARRANTY AND SERVICES 6 1 Guarantee of Sevenstar Sevenstar and its authorized distributors assure that there are not flaws in the materials and quality of products within 12 months from the date of purchase The compensation for customer is only limited to invalid part for substitution installation and processing flaw It 1 guaranteed that all parts chosen by customers are suitable to relative manufacturer Other relative statements guarantee and obligation of status and usage of product 25 of 32 Sevenstar whether direct or indirect are definite to be excluded In any circumstance Sevenstar 15 not charged of any obligation of direct or indirect loss for customers or others 6 2 Product Warranty 6 2 1 Sevenstar products are
16. must be clean and particle free which means a filter must be fitted 1n the gas line upstream of the MFC 26 of 32 Sevenstar b Gas must comply with the following pressure specifications 1 Gas pressure must never exceed 3MPa 2 Differential pressure must be more than 0 05MPa for full scale flow through the valve unless another value 15 specified in the user s manual 3 Differential pressure must be less than 0 35MPa for the MFC valve to regulate without gas flow oscillation unless another value 15 specified in the user s manual 4 Pressure at the mass flow inlet must be regulated by an accurate pressure regulator to prevent gas flow oscillation c Electrical connection requirements are as follows The system must be wired carefully non observance of the pin out may irreversibly damage the electronic board inside the MFC in which case the warranty will be invalidated d Gas connections The fittings must be handled carefully Sevenstar guarantees that all fittings have been individually inspected and are scratch free e Fitting procedure The fitting procedure set out in the manual must be followed meticulously Specifically the purge procedure is very important if corrosive gases or toxic gases are used f The mass flow must not be dismounted The MFC warranty will be invalidated if the seal between the block and cover is torn 6 3 Services Sevenstar can provide services like start up service software dev
17. ng stable wrench another one to tighten in 1 25 turns to prove it s not blow by after 13 of 32 installing the front ferrule back ferrule and nut Fitting Glande Nut back front ferrule Figure 2 8 Compression Fitting Connector Installation AttentionA When installing the fitting you should manually use spanner to wrench it tighten by 1 2 turn pulling up imported Compression Fitting should use spanner to be tighten in 1 25 turns to prove its not blow by after your installing the front ferrule back ferrule and nut Please note you should use two spanners to operating one spanner for locking the fitting stable and another one for revolving the nut Especially when you dismantle the tube you should operate by the two spanners otherwise fitting will become flexible which will affect its airoroof function 2 4 Electrical Installation 2 4 1 General With simple switching power supply CS230A MFC MFM are available for 8 to 16 VDC dual ending and 14 to 28 VDC single ending Customer can choose as need Customer can choose 9 pin male Sub D or 15 pin male sub D connector 9 pin male Sub D connector is the SEMI Standard compatible only 0 5V analog signal control and output available 15 pin male sub D connector both 4 20mA and 0 5V analog signal control and output available CS230A can communicate with PC RS485 or DeviceNet 14 of 32 Sevenstar 2 4 2 Connections The 9 pin male
18. pressed continuously for 0 5 seconds in order to start zero process The green LED will blink during the zero process After zero finished the green LED will be on constantly 3 4 Soft Start The CS230A support soft start function Soft start allows customer change the setting of MFC with definite rate Please refer to Digital MFC Communication User Manual for more details 3 5 Delay Delay is used to postpone the start of flow from zero flow to the received set point It is programmed in millisecond but the MFC internally rounds up any value to 100ms For example when the delay value 15 200 will delay 200ms then receiving the operate command When the set point 1s less than the min control rate the valve will shut off and when larger than the min control rate MFC will start after the set delay time Special default Values from to 49 ms will be programmed as 100ms Delay applies to digital and analog set points 3 6 Valve Command Mode CS230A MFC MFM are available for valve close or valve open by input digital signal or analog voltage directly The Valve Command Mode is used to select one of three ways to interpret the analog signal of Valve Command Please refer to Digital MFC Communication User Manual for more details 3 7 Valve Type CS230A MFC MFM are normally closed NC type valve the NC type valve is closed and gas can not flow through Please mention the valve type when you order the MFC 3 8 Multi Ga
19. rts and make sure that there 15 not leakage in the system i Please make sure that instrument is working under safe pressure Please make sure that the pressure of inlet gas is less than maximum working pressure referring to maximum working pressure in manual j Please keep the whole system away from pollution When system running do not use polluting gas such as particle of dust dirt fibre glass or scrap iron k Please do warm up instrument before working Please do warm up instrument especially in using dangerous gas Please close valve completely to make sure that there 15 not error flow 1 4 General Mass flow controller MFC accurately measures and controls mass flow rates which is widely applied in the fields as semiconductor and IC fabrication special materials science chemical industry petrolic industry pharmaceutical industry environmental protecting and vacuum system researching etc The typical applications include microelectronic process equipment such as diffusion oxidation epitaxy CVD plasma etching sputtering ion implantation vacuum deposition equipment optical fiber melting micro reaction equipment mixing amp matching gas system capillary flow control system gas chromatograph and other analytical instruments The CS230A are a latest generation MFC for use in semiconductor 3 of 32 Sevenstar applications and demanding industrial uses where its high accuracy and flexibility in inter
20. s and Multi Flow The multi gas and multi range technology has been developed in the CS230A series 21 of 32 Sevenstar MFC MFM Customer can change gas convert factor full scale of MFC via digital interface Full scale of CS230A series MFC MFM can be re ranged from 30 to 110 5 For example an with 200SLM full scale the new full scale can be re ranged between from 603 to 220SLM CS230A support customer offset by the target null value The target null value is a customer programmed constant used to offset the flow output independently of all other sensor offset constants including the zero process For example set Target Null Value 20 5 then when no flow through the reading is 20 ES with gas flow 20 ES through MFC MFM the reading is O F S Offset range is from 100 5 tol0OO ES Please refer to Digital MFC Communication User Manual for more details 3 9 Total Flow Accumulator The Total Flow accumulator will record the amount of gas in SL that has been delivered by CS230A MFC MFM The amount of purge will not be accumulated in the total flow amount For example the total reading is 3000 means the amount of gas delivered by MFC is 3000SL Please refer to Digital MFC Communication User Manual for more details 3 10 Alarm The CS230A MFC MFM will monitor and store certain abnormal conditions as described below These conditions can be read and reset from the RS485 interfac
21. ssion Fitting3 8 Compression Fitting1 2 VCRI 2 Male are optional for customer The length of the product L shown in Table2 2 and Table2 4 Do not remove the protective end caps of the fittings until installation Figure 2 1 CS230A MFC MFM 8 of 32 Sevenstar Figure 2 2 Product dimensions Compression Fitting 6 Compression Fitting 8 Fitting Compression Fitting 10 Compression Fitting 12 VCRI2 M Compression Fitting1 4 Compression Fitting3 8 Compression Fitting1 2 Table 2 1 The length of the product with different fittings Attention The height which is showing in figure 2 2 of 143mm are height without electric connectors of cable It should be added around 50mm more after adding the electric connector 9 of 32 Sevenstar 143 Figure 2 3 Product dimensions Compression Fitting 6 Compression Fitting 8 Compression Fitting 10 Compression Fitting12 VCRI2 M Compression Fitting1 4 Compression Fitting3 8 Compression Fitting1 2 Table 2 2 The length of the product with different fittings Attention The height which is showing in figure 2 3 of 143mm are height without electric connectors of cable should be added around 50mm more after adding the electric connector 10 of 32 Sevenstar Figure 2 4 Product dimensions Compression Fitting 6 Compression Fitting 8 Compression Fitting 10 Compression Fitting 12
22. t can be used about 3 or 4 years with an ultra clean and non corrosive gas It can be used about 1 or 2 years with a low purity gas or a corrosive gas For any other problems contact Sevenstar 4 2 CautionA 4 2 1 Medium Forbidden The used gas should be purified without dust liquid and oil stain If necessary the 23 of 32 Sevenstar filter should be added to gas system for purification If the outlet of 18 connected to liquid sources a One way valve should be added to avoid the liquid back to destroy MFC Attention For the cases that the MFC MFM used with toxic pyrophoric flammable or corrosive gas you should ensure that the fixing and fitting are airtight It becomes necessary to remove the controller from the system purge the controller thoroughly with a dry inert gas such as nitrogen before disconnecting the gas connections Failure to purge the controller could cause a fire or explosion resulting in death 4 2 2 Seal of Valves The Solenoid Valve of 15 only for adjustment can not be used for shut off Generally shut off valves should be added in upstream and downstream of MFC for protection Normally leakage of MFC valve is not more than 1 ES SECTION 5 TROUBLESHOOTING 5 1 Initial Check 5 1 1 Check the gas supply pressure and check the flow path to the MFC MFM has been opened 5 1 2 Ensure that the power supply and command signals are correctly transmitted to the D connector pins and RS485 5 1 3 C
23. ting position For example Customized requirement In Chinese Differential pressure 0 3 0 5 MPa customized fittings customized calibration temperature 40 C 30 of 32 Sevenstar APPENDIX II CONVERSION FACTOR eee ee mur umet SEMIE52 0302 Cal g C g l FACTOR Ar 3 024 1290 100 0150 1787 140 0 050 1250 CCL 10 0127 6860 0300 2 063 A2 01659 39606 0420 CH 08 058 0750 072 0 0409 1190 055 ___ 068 3 of 32 Sevenstar GAS CODE SPECIFIC HEAT DENSITY CONVERSION SEMIE52 0302 Cal g C g l 0 C FACTOR HE 0 1405 3 4180 0 570 Ho 07 ____ 34224 0 0899 1 010 0 0861 3 6100 0 999 039 SHC 067 0142 1 4500 0416 ___ SHC 147 01332 6050 0340 ___ Lem ee _ Wes xe 9059 899 32 of 32 Sevenstar Beijing Sevenstar Electronic Co Ltd CS Series Mass Flow Controller Beijing Sevenstar Electronics Co Ltd Mass Flow Meter Subsidiary Co Ltd Address No 1 Jiuxiangiao East Rd Chaoyang District Beijing China P O BOX 3 741 Beijing China Post code 100015 Tel 486 10 64362939 486 10 64361831 ext 8491 or 8315 Fax 86 10 64362923 or 64362939 Homepage http mfc sevenstar com cn E Mail mfcs
24. ts involved 2 5 3 Check the voltage of command signals and power supply to the MFC MFM 2 5 4 Check that the appropriate type of gas 1s being supplied at the rated pressure 2 5 5 Allow the MFC to warm up for 20 minutes and then check the zero level output 2 5 6 Use dry inert gas for test runs 2 5 7 Prior to using the MFC for extremely corrosive gases purge MFC with a dry inert eas for one hour SECTION3 FUNCTIONS 3 1 General Based on new sensor driver technology zero balance technology and VCP technology CS230A MFC MFM presents high performance and reliability And more digital functions are developed in CS230A products 3 2 Control Mode CS230A are available for digital 0 5V voltage and 4 20mA current control mode and output When customer chooses one of the three control modes the others will be screened The analog output will be available at all times The flow output of the CS230A MFC MFM will be available through the RS485 interface even in the analog control mode The setting of the CS230A MFC MFM can be provided to the MFC through one of three sources in digital or analog mode Please refer to Digital Communication User Manual for more details 3 3 Zero The Zero function can be commanded through the digital interface or zero button Before zero MFC please make sure that no gas flow through MFC Then zero MFC by the 20 of 32 Sevenstar digital interface or zero button The zero button must be
25. ved 1 the entrance to the clean room In order to minimize the contamination the second clean bag should be removed in the clean room when MFC installed in the system 2 3 Mechanical Installation 2 3 1 General Most applications will require a positive shutoff valve in line with the MFC Pressurized gas trapped between the two devices can cause purge effects and consideration must be given to the sitting of the shutoff valve upstream or downstream in relation to the process sequencing It is recommended that you install an in line filter upstream to the controller in order to prevent MFC from contamination CS230A should be mounted in the position accord with the requirement in the purchase order The gas should be clean and dry The mounting should be free from shock 7 of 32 Sevenstar or vibration The pictures of the MFC product are shown in figure2 1 the dimensions of the MFC product are shown in figure2 2 and figure2 4 Different fittings Compression Fitting 6 Compression Fitting 68 Compression Fitting 10 Compression Fitting 12 Compression Fitting1 4 Compression Fitting3 8 Compression Fitting1 2 VCR1 2 Male are optional for customer The length of the product L are shown in Table2 1 and Table2 3 The dimensions of the MFM product are shown in figure2 3 and figure2 5 Different fittings Compression Fitting 6 Compression Fitting 8 Compression Fitting 10 Compression Fitting 6 12 Compression Fitting1 4 Compre

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