ウェーハ用 C-SCAN（PDF 2.1MB）
Contents
1. a C SCAN CMP _ 0 A 757 AD 7 Z lt sl gt l llelalal elels Fe leg wieleds a 1 34 3 13 2 32. oi WW 3 a C SCAN12S C SCAN08E 12E 8 1 8 1 mm Si mm i mm kpa mm C SCAN 12S d 4 1 di 4 1 361x361 50 a 443 b 126 c 443 C SCAN 08E 0 1 II 1 0 ji5 0 2200 79x45 x4 200 10 x80 x4 e 400 f 429 g 122 C SCAN 12E h 551 1kPa 0 01kg cm2 1 10 C SCAN E 4 BDS C 40kg 500x450
3. PET 8bit 2 op 6 VersaTek 4 5m ws i USB USB2 0 _VersaTek8
4. COI EG NITTA C SCAIN 5 D 1 mm 0 1 mm PC 8 12 0 1mm 7744 3 192Hz ASCII BMP AVI 2
5. mm 0 1Mpa N tv nag 104 0061 8 2 1 TEL 03 6 7 44 2 7 20 FAX OG 6744 1 Tr639 1085 1 2 TEL 0743 56 8848 FAX 0743 56 8770 http www nitta co jp product mechasen sensor top html ME Ce p 3 2011 12
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